Inductively Coupled Plasma Implantation Device

A plasma and inductive coupling technology, applied in the direction of circuits, discharge tubes, electrical components, etc., can solve the problems of polluting wafers, increasing quartz window sputtering, plasma radial and azimuth inhomogeneity, etc., to reduce inductance, Reduce coil, reduce the effect of standing wave effect

CN103165382BActive Publication Date: 2016-06-29INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Publication Date
2016-06-29

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Abstract

The invention discloses an inductive coupling plasma coil which comprises two groups of radio-frequency coils formed in a back-bending mode. A plane S-shaped parallel connection way is adopted in space structures of two groups of the radio-frequency coils, and two groups of the radio-frequency coils are strictly symmetrical in space distribution so that the directions of radio frequency current of the same coil position are the same. The invention further discloses an inductive coupling plasma injection device provided with the inductive coupling plasma coil. According to the inductive coupling plasma coil and the injection device, on one hand, standing wave effect in the coil can be reduced and uniformity of plasma can be increased, and on the other hand, impedance matching can be well achieved, coupling effect of the plasma is increased, the probability of chip pollution caused by sputtering of a quartz window due to over-high voltage is lowered, the uniform high-density plasma of a large area can be generated in a reaction cavity of a large area, and therefore requirements of laboratory rooms and industry in the micro electronics field are met.
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Description

technical field

[0001] The invention belongs to the technical field of semiconductor processing equipment, in particular to an inductively coupled plasma injection device. Background technique

[0002] Plasma devices are widely used in ion implantation, etching, and thin film deposition processes. With the continuous development of integrated circuit technology, especially flat panel display devices, the plasma source is required to have good characteristics such as high density and large area uniformity.

[0003] ICP inductively coupled plasma source has the advantages of inductively coupled plasma source (ICP) with high density, independent control of ion energy and density, and simple equipment, and has been widely used in integrated circuit technology. ICP inductively coupled plasmas are typically plasma excited by coils at low pressures. The ICP equipment supplies high-frequency power to the coil to generate an alternating electromagnetic field, and the electromagneti...

Examples

Embodiment Construction

[0031] like figure 2 , image 3 As shown, the present invention provides an inductively coupled plasma coil 10 consisting of two sets of folded radio frequency coils, one end is connected and the other end is not connected. The spatial structure of the two groups of radio frequency coils adopts a plane serpentine parallel connection, and the spatial distribution is strictly symmetrical, so that the direction of the radio frequency current at the same coil position is the same. The two sets of coils are made of hollow copper tubes with a radius of 1mm-10mm, which can be selected according to different requirements. In this embodiment, a 5mm hollow copper tube is used.

[0032] combine figure 2 , image 3 As shown, an inductively coupled plasma injection device provided by the present invention includes: plasma coil 10, two matching networks 11, phase shifter 12, quartz tube 13, first complementary power source 1, reaction chamber 3, base A seat 5 and a second radio freque...