Continuous casting technology of belt material aluminum pipe and aluminum alloy rotating target materials
A casting process and rotating target technology, which is applied in metal material coating process, ion implantation plating, coating, etc., can solve the problems of not being able to use high-power continuous sputtering, affecting production beats, increasing binding costs, etc., to achieve Improved utilization and service life, uniform grain size distribution, and high density
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Publication Date
- 2015-09-16
- Estimated Expiration
- Not applicable · inactive patent
Smart Images
Figure 1
Abstract
Description
technical field
[0001] The invention relates to the processing of B23P metal or C22C alloy or B22D metal casting technology applied in the IPC classification of flat panel displays, especially the continuous casting technology of aluminum and aluminum alloy rotating targets with liner. Background technique
[0002] In the prior art, the market has higher and higher requirements for flat-panel displays represented by liquid crystal (LCD) and organic light-emitting diode (OLED). From high-definition to ultra-high-definition, even panel manufacturers have begun to lay out the 4K market. However, as the thin film transistor (TFT) gradually becomes smaller and the size of the glass substrate used to prepare the panel is getting larger, it is very important to be able to form a uniform metal wiring film layer and continuously reduce the cost of materials. Among them, the metal aluminum target is An important part of the wiring material.
[0003] In order to meet market demand, t...
Examples
Embodiment 1
[0033] Embodiment 1: A stainless steel pipe with an inner diameter of 125 mm and an outer diameter of 133 mm was sandblasted and arced with a layer of Ni transition layer. Then put the liner into the cast iron outer mold. The inner diameter of the cast iron outer mold is 160 mm. After the mold is assembled, put it into the well-type heating furnace for preheating. The preheating temperature is 600 ° C and keep warm for 1 hour. Put 500 kg of Al ingot with a purity of 4N into the medium frequency induction melting furnace, cover the furnace cover, and pass in argon gas for protection. When the Al ingot is completely melted and the temperature reaches 700°C, casting starts. After the casting is completed, turn off the heating switch of the well-type heating furnace, turn on the built-in heater on the top of the mold, and start heating. The temperature of the built-in heater on the top is set to 700°C; after 1 hour, turn off the built-in heater on the top of the mold, and let it c...