Precise angle measuring sensor and measuring method thereof

Abstract

The invention relates to a precise angle measuring sensor and a measuring method thereof. The precise angle measuring sensor comprises a first laser beam, a second laser beam, a first spectroscope, asecond spectroscope, a first photoelectric detector, a second photoelectric detector, a third photoelectric detector, a fourth photoelectric detector and a processing system, wherein a reflecting surface reflects the first laser beam and the second laser beam; the first spectroscope splits the first laser beam reflected by the reflecting surface into a third laser beam and a fourth laser beam; thesecond spectroscope splits the second laser beam reflected by the reflecting surface into a fifth laser beam and a sixth laser beam; the first photoelectric detector is used for receiving the third laser beam reflected by the first spectroscope and displaying an incidence position; the second photoelectric detector is used for receiving the fourth laser beam transmitted via the first spectroscopeand displaying an incidence position; the third photoelectric detector is used for receiving the fifth laser beam reflected by the second spectroscope and displaying an incidence position; the fourthphotoelectric detector is used for receiving the sixth laser beam transmitted by the second spectroscope and displaying an incidence position; and the processing system is used for processing according to variation of the incidence positions of the laser beams detected by the photoelectric detector so as to obtain the rotary angle value of a measured object on a reflecting component.

Description

Technical field

[0001] The present invention relates to the field of measurement technology, in particular to a precision angle sensor and a measurement method thereof. Background technique

[0002] The angle sensor is a commonly used geometric sensor, which is widely used in many fields such as aerospace, industrial production, machinery manufacturing, and military science. For example, the Chinese patent with the patent number 201510276409.0 and the name "a continuous incremental optical arm amplification type high-precision angle sensor" discloses an angle sensor, which is suitable for measuring the continuous increment of the angle of the measured object. Reliable and high precision. However, relatively speaking, the calculation process of the angle sensor is slightly complicated. In calculation, it is necessary to measure the incident angle of the laser beam on the reflecting surface before and after the rotation, and the calculation speed is slow. Summary of the invention...

Examples

Embodiment approach

[0048] As a preferred embodiment, the first photodetector and the second photodetector are located on both sides of the first spectroscope, and the first photodetector, the second photodetector, and the first spectroscope are arranged in parallel to each other. It is easy to understand that the design here is to reduce the size of the entire device and to facilitate the calculation of the rotation angle of the measured object. The angle of the photodetector is not limited while ensuring that the photodetector can receive the laser beam.

[0049] As a preferred embodiment, the third photodetector and the fourth photodetector are respectively located on both sides of the second beam splitter, and the third photodetector, the fourth photodetector, and the second beam splitter are arranged parallel to each other. It is easy to understand that the design here is to reduce the size of the entire device and to facilitate the calculation of the rotation angle of the measured object. The a...

Technical field

[0001] The present invention relates to the field of measurement technology, in particular to a precision angle sensor and a measurement method thereof. Background technique

[0002] The angle sensor is a commonly used geometric sensor, which is widely used in many fields such as aerospace, industrial production, machinery manufacturing, and military science. For example, the Chinese patent with the patent number 201510276409.0 and the name "a continuous incremental optical arm amplification type high-precision angle sensor" discloses an angle sensor, which is suitable for measuring the continuous increment of the angle of the measured object. Reliable and high precision. However, relatively speaking, the calculation process of the angle sensor is slightly complicated. In calculation, it is necessary to measure the incident angle of the laser beam on the reflecting surface before and after the rotation, and the calculation speed is slow. Summary of the invention...

Examples

Embodiment approach

[0048] As a preferred embodiment, the first photodetector and the second photodetector are located on both sides of the first spectroscope, and the first photodetector, the second photodetector, and the first spectroscope are arranged in parallel to each other. It is easy to understand that the design here is to reduce the size of the entire device and to facilitate the calculation of the rotation angle of the measured object. The angle of the photodetector is not limited while ensuring that the photodetector can receive the laser beam.

[0049] As a preferred embodiment, the third photodetector and the fourth photodetector are respectively located on both sides of the second beam splitter, and the third photodetector, the fourth photodetector, and the second beam splitter are arranged parallel to each other. It is easy to understand that the design here is to reduce the size of the entire device and to facilitate the calculation of the rotation angle of the measured object. The a...

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