A multi-parameter interlocking terminal device based on excimer laser

Abstract

The present invention relates to the field of lasers, and in particular to a multi-parameter interlocking terminal device based on an excimer laser. The NPN signals of the corresponding gas flow sensors and water flow sensors on multiple gas units and water circuit units in the excimer laser are respectively connected to corresponding photoelectric couplers, and multiple photoelectric couplers are connected together and connected to another photoelectric coupler, and then connected to a relay to convert the NPN logic signal into a relay switch signal. When one or more of the multiple gas units and water circuit units have an NPN signal output of 0, the relay switch signal is disconnected and a low alarm state signal is generated. The device accurately collects the NPN signals of each unit and monitors in real time to generate interlocks, which can ensure that the gas flow in each gas circuit unit and the water flow in each water circuit unit are not lower than the dangerous lower limit value, and there will be no situation where the optical device is damaged due to too low gas flow value or the cavity and each distribution unit are damaged due to too low water flow.

Description

Technical Field

[0001] The invention relates to the field of lasers, and in particular to a multi-parameter interlocking terminal device based on an excimer laser. Background Art

[0002] Excimer laser is a pulsed gas laser for deep ultraviolet characteristic applications. It has the characteristics of high repetition rate, high energy, short wavelength, and narrow linewidth. It is an excellent laser light source for microelectronic lithography equipment.

[0003] Each unit inside the excimer laser is expensive. If some devices are damaged due to some misoperation or delay of the actuator, the cost will be relatively high. The gas flow and water flow sensors of the traditional discharge-pumped excimer laser are three-wire acquisition input terminals that only collect analog current signals. In this way, if the gas and water flow acquisition is abnormal, the microcontroller can only transmit it to the software control device through CAN. The software control device issues different levels of alarm instructions according to the restrictions. For some serious over-limit instructions, it is necessary to issue an alarm instruction through the software control device to stop the discharge of the discharge cavity. This method has delays on the one hand, and on the other hand, there are problems such as communication failures caused by electromagnetic interference of the device on the communication link. Therefore, it is necessary to cut off the power supply directly through hardware. Hardware interlocking is very important for protecting the laser.

[0004] Excimer laser alarms are divided into many levels. For more dangerous signals, it is necessary to directly cut off the power to ensure the safe use of the laser and the personal safety of the staff. If the shutter cannot be opened without nitrogen and there is a serious lack of nitrogen flow, it is a very dangerous thing. The hardware must be interlocked to directly disconnect the power supply. For example, if the water supply to the water unit is suddenly cut off due to some external reasons such as factory affairs, or the water flow value is lower than a certain limit, the high-voltage charging power supply needs to be disconnected from the hardware. Therefore, hardware interlock is very necessary. Summary of the invention

[0005] The purpose of the present invention is to provide a multi-parameter interlocking terminal device based on an excimer laser, so as to solve the problem in the prior art that hardware interlocking of multi-path gas flow and water flow of an excimer laser cannot be achieved.

[0006] In order to solve the above technical problems, the present invention provides a multi-parameter interlocking terminal device based on an excimer laser, wherein the excimer laser includes: a plurality of gas units working in a gas environment with stable concentration, and a plurality of water channel units working in a water flow cooling environment; the multi-parameter interlocking terminal device includes: a gas flow sensor, a water flow sensor, a photoelectric coupler, and a relay; a plurality of gas units are provided with gas flow sensors, and a plurality of water channel units are provided with water flow sensors; wherein:

[0007] The NPN signals of the gas flow sensors on the multiple gas units are connected to the corresponding photoelectric couplers respectively, and the multiple photoelectric couplers are connected together and connected to another photoelectric coupler, and then connected to a relay to convert the NPN logic signal into a relay switch signal. When one or more of the multiple gas units have an NPN signal output of 0, the relay switch signal is disconnected and a gas flow low alarm state signal is generated;

[0008] The NPN signals of the water flow sensors on multiple water channel units are connected to the corresponding photoelectric couplers respectively, and the multiple photoelectric couplers are connected together to another photoelectric coupler, and then connected to a relay to convert the NPN logic signal into a relay switch signal. When one or more of the multiple water channel units have an NPN signal output of 0, the relay switch signal is disconnected to generate a low water flow alarm status signal.

[0009] Further, the NPN signals of the gas flow sensors on the multiple gas units are respectively connected to the second pins of the corresponding photocouplers, and the fourth pins of the multiple photocouplers are connected together to another photocoupler, and then connected to a relay to convert the NPN logic signal into relay switch signals N2_OUT+ and N2_OUT-. When one or more of the multiple gas units have an NPN signal output of 0, the relay switch signals N2_OUT+ and N2_OUT- are disconnected and a gas flow low alarm state signal N2_PROTECT_STATE is generated;

[0010] The NPN signals of the water flow sensors on multiple water channel units are respectively connected to the second pins of the corresponding photocouplers, and the fourth pins of the multiple photocouplers are connected together to another photocoupler, and then a relay is connected to convert the NPN logic signal into relay switch signals FLOW_OUT+ and FLOW_OUT-. When one or more of the multiple water channel units have an NPN signal output of 0, the relay switch signals FLOW_OUT+ and FLOW_OUT- are disconnected to generate a low water flow alarm state signal FLOW_PROTECT_STATE.

[0011] Further, in the multi-parameter interlock terminal device, when one or both of the gas flow and the water flow generate a low alarm state, the high voltage charging power supply HVPS of the excimer laser is controlled to be disconnected, and a laser high voltage charging power disconnection state signal LASER_PROTECT_STATE is generated.

[0012] Furthermore, the multi-parameter interlock terminal device also includes a single-chip microcomputer, and the gas flow low alarm state signal N2_PROTECT_STATE, the water flow low alarm state signal FLOW_PROTECT_STATE and the laser high-voltage charging power disconnection state signal LASER_PROTECT_STATE are transmitted to the single-chip microcomputer through a photoelectric coupler.

[0013] Furthermore, the multi-parameter interlocking terminal device also includes a main controller, and the single-chip microcomputer sends the gas flow low alarm status signal N2_PROTECT_STATE and the water flow low alarm status signal FLOW_PROTECT_STATE to the main controller. The main controller saves the gas flow status signal and the water flow status signal information, and regularly monitors the working status of the gas unit and the water unit.

[0014] Furthermore, the single chip microcomputer sends the gas flow low alarm state signal N2_PROTECT_STATE and the water flow low alarm state signal FLOW_PROTECT_STATE to the main controller through the CAN bus.

[0015] Furthermore, the single chip microcomputer uses the CAN bus to send the gas flow low alarm state signal N2_PROTECT_STATE and the water flow low alarm state signal FLOW_PROTECT_STATE to the main controller via the CAN dedicated isolation chip and the CAN interface.

[0016] Furthermore, when the NPN signal output of the gas flow sensor is 0, it means that the gas flow value is lower than the set limit, and when the output is 1, it means that the gas flow value is normal; when the NPN signal output of the water flow sensor is 0, it means that the water flow value is lower than the set limit, and when the output is 1, it means that the water flow value is normal; the relay switch defaults to the normal working mode of normally closed state, and the switch is disconnected when an abnormality occurs.

[0017] Furthermore, the photocoupler is a photocoupler TLP521.

[0018] Furthermore, the multiple gas units include: an optical path transmission unit, a wavelength detection unit, a line width narrowing unit, an output coupling unit, a pulse width broadening unit, a cloth window, and a shutter; the multiple water path units include: a main oscillation discharge cavity, a magnetic pulse compressor, a resonant charging power supply, a high voltage charging power supply, and a solid pulse boosting unit.

[0019] The multi-parameter interlocking terminal device based on the excimer laser in the embodiment of the present invention accurately collects the NPN signals of the gas flow and water flow of each unit and monitors and generates interlocking in real time. It can ensure that the gas flow in each gas path unit and the water flow in each water path unit are not lower than the dangerous lower limit value, and there will be no situation where the optical device is damaged due to the gas flow value being too low or the cavity and the distribution units are damaged due to the water flow value being too low, thereby affecting the working state of the entire laser. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of this application. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0021] Figure 1 is a diagram of a unit layout in an excimer laser according to one embodiment;

[0022] Figure 2 is a circuit schematic diagram of a multi-parameter interlock terminal device according to one embodiment;

[0023] Figure 3 It is a communication interface circuit diagram of a multi-parameter interlocking terminal device according to one embodiment. DETAILED DESCRIPTION

[0024] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0025] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0026] With the continuous development of excimer lasers, the requirements for safety have been raised. Therefore, the present invention proposes a terminal device for hardware interlocking when the gas flow and water flow in the excimer laser exceed certain limits. The interlocking terminal device mainly realizes the hardware interlocking function of the multi-channel gas flow and water flow of the excimer laser. Compared with the prior art, the present invention has the ability to interlock when the gas flow and water flow are lower than certain limits, which greatly improves the safety of the use of various optical components of the laser and the safety of the use of the power distribution unit and the cavity unit.

[0027] According to an embodiment of the present invention, a multi-parameter interlocking terminal device based on an excimer laser is provided. Figure 1-3 The excimer laser includes: multiple gas units working in a gas environment with stable concentration, multiple water channel units working in a water flow cooling environment; the multi-parameter interlocking terminal device includes multiple: gas flow sensors, water flow sensors, photoelectric couplers, relays; multiple gas units are provided with gas flow sensors, and multiple water channel units are provided with water flow sensors; wherein:

[0028] The NPN signals of the gas flow sensors on the multiple gas units are connected to the corresponding photoelectric couplers respectively, and the multiple photoelectric couplers are connected together and connected to another photoelectric coupler, and then connected to a relay to convert the NPN logic signal into a relay switch signal. When one or more of the multiple gas units have an NPN signal output of 0, the relay switch signal is disconnected and a gas flow low alarm state signal is generated;

[0029] The NPN signals of the water flow sensors on multiple water channel units are connected to the corresponding photoelectric couplers respectively, and the multiple photoelectric couplers are connected together to another photoelectric coupler, and then connected to a relay to convert the NPN logic signal into a relay switch signal. When one or more of the multiple water channel units have an NPN signal output of 0, the relay switch signal is disconnected to generate a low water flow alarm status signal.

[0030] The multi-parameter interlocking terminal device based on the excimer laser in the embodiment of the present invention accurately collects the NPN signals of the gas flow and water flow of each unit and monitors and generates interlocking in real time. It can ensure that the gas flow in each gas path unit and the water flow in each water path unit are not lower than the dangerous lower limit value, and there will be no situation where the optical device is damaged due to the gas flow value being too low or the cavity and the distribution units are damaged due to the water flow value being too low, thereby affecting the working state of the entire laser.

[0031] As a preferred technical solution, the NPN signals of the gas flow sensors on the multiple gas units are respectively connected to the second pins of the corresponding photoelectric couplers, and the fourth pins of the multiple photoelectric couplers are connected together to another photoelectric coupler, and then a relay is connected to convert the NPN logic signal into relay switch signals N2_OUT+ and N2_OUT-. When one or more of the multiple gas units have an NPN signal output of 0, the relay switch signals N2_OUT+ and N2_OUT- are disconnected and a gas flow low alarm state signal N2_PROTECT_STATE is generated;

[0032] The NPN signals of the water flow sensors on multiple water channel units are respectively connected to the second pins of the corresponding photocouplers, and the fourth pins of the multiple photocouplers are connected together to another photocoupler, and then a relay is connected to convert the NPN logic signal into relay switch signals FLOW_OUT+ and FLOW_OUT-. When one or more of the multiple water channel units have an NPN signal output of 0, the relay switch signals FLOW_OUT+ and FLOW_OUT- are disconnected to generate a low water flow alarm state signal FLOW_PROTECT_STATE.

[0033] As a preferred technical solution, in a multi-parameter interlocking terminal device, when one or both of the gas flow and the water flow produce a low alarm state, the high voltage charging power supply HVPS of the excimer laser is controlled to be disconnected, and a laser high voltage charging power supply disconnection state signal LASER_PROTECT_STATE is generated.

[0034] As a preferred technical solution, the multi-parameter interlocking terminal device also includes a single-chip microcomputer, and the gas flow low alarm state signal N2_PROTECT_STATE, the water flow low alarm state signal FLOW_PROTECT_STATE and the laser high-voltage charging power disconnection state signal LASER_PROTECT_STATE are transmitted to the single-chip microcomputer through a photoelectric coupler.

[0035] As a preferred technical solution, the multi-parameter interlocking terminal device also includes a main controller, and the single-chip microcomputer sends the gas flow low alarm status signal N2_PROTECT_STATE and the water flow low alarm status signal FLOW_PROTECT_STATE to the main controller. The main controller saves the gas flow status signal and the water flow status signal information, and regularly monitors the working status of the gas unit and the water unit.

[0036] As a preferred technical solution, the single chip microcomputer sends the gas flow low alarm state signal N2_PROTECT_STATE and the water flow low alarm state signal FLOW_PROTECT_STATE to the main controller through the CAN bus.

[0037] As a preferred technical solution, the single chip microcomputer uses the CAN bus to send the gas flow low alarm state signal N2_PROTECT_STATE and the water flow low alarm state signal FLOW_PROTECT_STATE to the main controller through the CAN dedicated isolation chip and the CAN interface.

[0038] As a preferred technical solution, when the NPN signal output of the gas flow sensor is 0, it means that the gas flow value is lower than the set limit, and when the output is 1, it means that the gas flow value is normal; when the NPN signal output of the water flow sensor is 0, it means that the water flow value is lower than the set limit, and when the output is 1, it means that the water flow value is normal; the relay switch defaults to the normal working mode of normally closed state, and the switch is disconnected when an abnormality occurs.

[0039] As a preferred technical solution, the photoelectric coupler is a photoelectric coupler TLP521.

[0040] As a preferred technical solution, see Figure 1 , multiple gas units include: optical path transmission unit 1, wavelength detection unit 2, line width narrowing unit 3, output coupling unit 4, pulse width broadening unit 5, cloth window 6, shutter 7; multiple water channel units include: main oscillation discharge cavity 9, magnetic pulse compressor 10, resonant charging power supply 11, high voltage charging power supply 12, solid pulse boosting unit 13.

[0041] The following is a detailed description of the multi-parameter interlocking terminal device of the present invention with reference to a specific embodiment:

[0042] The unit layout of the excimer laser in the multi-parameter interlocking terminal device is as follows: Figure 1As shown, the gas path part in the excimer laser mainly includes: optical path transmission unit 1 (WEB), wavelength detection unit 2 (LAM), line width narrowing unit 3 (LNM), output coupling unit 4 (OC), pulse width broadening unit 5 (OPUS), cloth window 6 (BR), shutter 7 (SH). Except for the line width narrowing unit 3 which needs helium cooling, other units need to work in a nitrogen environment with relatively stable concentration to extend the service life of components and ensure their working quality. The water path unit in the excimer laser mainly includes: main oscillation discharge cavity 9 (PA), magnetic pulse compressor 10 (MPC), resonant charging power supply 11 (RC), high voltage charging power supply 12 (HVPS), solid pulse boost unit 13 (SSS). These units all need a certain amount of water flow to cool down to ensure the ambient temperature for their normal operation. The above units are all connected to the multi-parameter interlocking terminal device 8.

[0043] Figure 2 It is the circuit schematic diagram of the multi-parameter interlock terminal device. Figure 2 The interlocking circuit of seven-way gas flow monitoring is given in the figure. The NPN signals of the seven gas flow sensors, namely, optical transmission unit 1 (WEB), wavelength detection unit 2 (LAM), line width narrowing unit 3 (LNM), output coupling unit 4 (OC), pulse width stretching unit 5 (OPUS), cloth window 6 (BR), and shutter 7 (SH) (when the NPN signal output is 0, it means that the gas flow value is lower than the set limit; when the output is 1, it means that the gas flow value is normal) are connected to the second pins of the corresponding seven photoelectric couplers TLP521, and then the seven photoelectric couplers are connected to the second pins of the seven photoelectric couplers TLP521. The fourth pins of the photocoupler TLP521 are all connected together to another photocoupler TLP521, and then connected to a relay (the relay switch defaults to the normally closed state in the normal working mode, and the switch is disconnected when an abnormality occurs), and the NPN logic signal is converted into relay switch signals N2_OUT+ and N2_OUT-. When one or more of the above seven channels have an NPN signal output of 0, the relay switch signals N2_OUT+ and N2_OUT- are disconnected and a low gas flow alarm state signal N2_PROTECT_STATE is generated.

[0044] Figure 2 An interlocking circuit for five-way water flow monitoring is given in the figure. The NPN signals of the five water flow sensors, namely, the main oscillation discharge cavity 9 (PA), the magnetic pulse compressor 10 (MPC), the resonant charging power supply 11 (RC), the high voltage charging power supply 12 (HVPS), and the solid pulse boost unit 13 (SSS) (when the NPN signal output is 0, it means that the water flow value is lower than the set limit; when the output is 1, it means that the gas flow value is normal) are connected to the corresponding five photoelectric couplers respectively.

[0045] The second pin of TLP521, and then the fourth pins of the five photocouplers TLP521 are connected together to another photocoupler TLP521, and then connected to a relay (the relay switch defaults to the normally closed state in the normal working mode, and the switch is disconnected when an abnormality occurs), and the NPN logic signal is converted into relay switch signals FLOW_OUT+ and FLOW_OUT-. When one or more of the above five channels have an NPN signal output of 0, the relay switch signals FLOW_OUT+ and FLOW_OUT- are disconnected to generate a low water flow alarm state signal FLOW_PROTECT_STATE.

[0046] When one or both of the gas flow and the water flow generate a low alarm state, the laser's high voltage charging power supply HVPS is disconnected, and a laser high voltage charging power supply disconnection state signal LASER_PROTECT_STATE is generated. The gas flow low alarm state signal N2_PROTECT_STATE, the water flow low alarm state signal FLOW_PROTECT_STATE and the laser high voltage charging power supply disconnection state signal LASER_PROTECT_STATE are finally transmitted to the microcontroller MCU through the photoelectric coupler TLP291.

[0047] Figure 3 It is a communication interface circuit diagram of a multi-parameter interlocking terminal device. The single-chip microcomputer MCU sends the gas flow status signal and the water flow status signal to the main controller via the CAN dedicated isolation chip and the CAN interface via the CAN bus. The main controller saves the gas flow status signal and the water flow status signal information for regular monitoring of the working status of the gas and water circuits of each unit, and for facilitating the search for which specific signal has a problem when a fault occurs, thereby providing data basis for the next step of solving the problem.

[0048] The serial numbers of the above embodiments of the present invention are only for description and do not represent the advantages or disadvantages of the embodiments.

[0049] In the above embodiments of the present invention, the description of each embodiment has its own emphasis. For parts that are not described in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0050] In the several embodiments provided in this application, it should be understood that the disclosed technical content can be implemented in other ways. Among them, the system embodiments described above are only schematic. For example, the division of units can be a logical function division. There may be other division methods in actual implementation. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some interfaces, indirect coupling or communication connection of units or modules, which can be electrical or other forms.

[0051] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed over multiple units. Some or all of the units may be selected according to actual needs to achieve the purpose of the present embodiment.

[0052] In addition, each functional unit in each embodiment of the present invention may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit. The above-mentioned integrated unit may be implemented in the form of hardware or in the form of software functional units.

[0053] If the integrated unit is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present invention, in essence, or the part that contributes to the prior art, or all or part of the technical solution can be embodied in the form of a software product, and the computer software product is stored in a storage medium, including a number of instructions for a computer device (which can be a personal computer, a server or a network device, etc.) to perform all or part of the steps of the methods of each embodiment of the present invention. The aforementioned storage medium includes: U disk, read-only memory (ROM, Read-Only Memory), random access memory (RAM, Random Access Memory), mobile hard disk, magnetic disk or optical disk and other media that can store program codes.

[0054] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A multi-parameter interlocking terminal device based on excimer laser, It is characterized in that The excimer laser includes: a plurality of gas units operating in a gas environment with a stable concentration, and a plurality of water channel units operating in a water flow cooling environment; The multi-parameter interlock terminal device comprises: a plurality of gas flow sensors, a plurality of water flow sensors, a plurality of photoelectric couplers and two relays; a plurality of the gas units are provided with gas flow sensors, and a plurality of the water circuit units are provided with water flow sensors; wherein: The NPN logic signals of the gas flow sensors on the multiple gas units are connected to their respective corresponding photoelectric couplers, and the multiple photoelectric couplers are connected together and connected to another photoelectric coupler, and then connected to a relay to convert the NPN logic signal into a relay switch signal. When one or more of the multiple gas units have an NPN logic signal output of 0, the relay switch signal is disconnected and a gas flow low alarm state signal is generated; The NPN logic signals of the water flow sensors on the multiple water channel units are connected to their corresponding photoelectric couplers respectively, and the multiple photoelectric couplers are connected together to another photoelectric coupler, and then connected to another relay to convert the NPN logic signal into a relay switch signal. When one or more of the multiple water channel units have an NPN logic signal output of 0, the relay switch signal is disconnected to generate a low water flow alarm state signal; When the NPN logic signal output of the gas flow sensor is 0, it means that the gas flow value is lower than the set limit, and when the output is 1, it means that the gas flow value is normal; when the NPN logic signal output of the water flow sensor is 0, it means that the water flow value is lower than the set limit, and when the output is 1, it means that the water flow value is normal; the switch of the relay defaults to the normal working mode of normally closed state, and the switch is disconnected when an abnormality occurs.

2. The multi-parameter interlocking terminal device based on excimer laser according to claim 1, It is characterized in that The NPN logic signals of the gas flow sensors on the multiple gas units are respectively connected to the second pins of the corresponding photoelectric couplers, and the fourth pins of the multiple photoelectric couplers are connected together to another photoelectric coupler, and then connected to a relay to convert the NPN logic signal into relay switch signals N2_OUT+ and N2_OUT-. When one or more of the multiple gas units have an NPN logic signal output of 0, the relay switch signals N2_OUT+ and N2_OUT- are disconnected and a gas flow low alarm state signal N2_PROTECT_STATE is generated; The NPN logic signals of the water flow sensors on the multiple water path units are respectively connected to the second pins of the corresponding photoelectric couplers, and the fourth pins of the multiple photoelectric couplers are connected together to another photoelectric coupler, and then connected to a relay to convert the NPN logic signal into relay switch signals FLOW_OUT+ and FLOW_OUT-. When one or more of the multiple water path units have an NPN logic signal output of 0, the relay switch signals FLOW_OUT+ and FLOW_OUT- are disconnected to generate a low water flow alarm state signal FLOW_PROTECT_STATE.

3. The multi-parameter interlocking terminal device based on excimer laser according to claim 2, It is characterized in that In the multi-parameter interlock terminal device, when one or both of the gas flow and the water flow generate a low alarm state, the high voltage charging power supply HVPS of the excimer laser is controlled to be disconnected, and a laser high voltage charging power disconnection state signal LASER_PROTECT_STATE is generated.

4. The multi-parameter interlocking terminal device based on excimer laser according to claim 3, It is characterized in that The multi-parameter interlock terminal device also includes a single-chip microcomputer, and the gas flow low alarm state signal N2_PROTECT_STATE, the water flow low alarm state signal FLOW_PROTECT_STATE and the laser high-voltage charging power disconnection state signal LASER_PROTECT_STATE are transmitted to the single-chip microcomputer through a photoelectric coupler.

5. The multi-parameter interlocking terminal device based on excimer laser according to claim 4, It is characterized in that The multi-parameter interlocking terminal device also includes a main controller. The single-chip microcomputer sends a gas flow low alarm state signal N2_PROTECT_STATE and a water flow low alarm state signal FLOW_PROTECT_STATE to the main controller. The main controller saves the gas flow state signal and the water flow state signal information and regularly monitors the working status of the gas unit and the water unit.

6. The multi-parameter interlocking terminal device based on excimer laser according to claim 5, It is characterized in that The single chip microcomputer sends the gas flow low alarm state signal N2_PROTECT_STATE and the water flow low alarm state signal FLOW_PROTECT_STATE to the main controller through the CAN bus.

7. The multi-parameter interlocking terminal device based on excimer laser according to claim 6, It is characterized in that The single chip microcomputer uses the CAN bus to send the gas flow low alarm state signal N2_PROTECT_STATE and the water flow low alarm state signal FLOW_PROTECT_STATE to the main controller through the CAN dedicated isolation chip and the CAN interface.

8. The multi-parameter interlocking terminal device based on excimer laser according to claim 1, It is characterized in that The photocoupler is a photocoupler TLP521.

9. The multi-parameter interlocking terminal device based on excimer laser according to claim 1, It is characterized in that The multiple gas units include: an optical path transmission unit, a wavelength detection unit, a line width narrowing unit, an output coupling unit, a pulse width broadening unit, a cloth window, and a shutter; the multiple water path units include: a main oscillation discharge cavity, a magnetic pulse compressor, a resonant charging power supply, a high voltage charging power supply, and a solid pulse boosting unit.

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