A kind of automatic cleaning device of molybdenum electrode for hot wire CVD and its use method

Abstract

The present invention belongs to the field of diamond film growth, and specifically relates to an automatic cleaning device for molybdenum electrodes for hot wire CVD and a method for using the same. A grinding wire fixing seat is provided on one side of the machine base of the device, and one end of the diamond grinding wire is fixed to the grinding wire fixing seat by a locking screw; a spring fixing seat corresponding to the grinding wire fixing seat is provided on the other side of the machine base, and the spring pull-pieces are strip-shaped and evenly arranged along the spring fixing seat in the horizontal direction, and each spring pull-piece is fixed to the spring fixing seat by a pull-piece fixing screw, and one end of each spring pull-piece is sequentially connected to a spring, a spring pressure piece 1, a spring pressure piece 2, a pressure piece locking bolt and the other end of the diamond grinding wire. The present invention has a simple structure, and a speed regulating motor drives a four-jaw chuck to clamp the molybdenum electrode and rotate at high speed, and the diamond grinding wire is tightened by the grinding wire fixing seat and the spring fixing seat through the spring and is tightly attached to the groove of the molybdenum electrode, and the diamond grinding wire grinds and cleans the groove, with high efficiency and thorough grinding and cleaning.

Description

Technical Field

[0001] The invention belongs to the field of diamond film growth, and in particular relates to an automatic cleaning device for molybdenum electrodes used in hot-wire chemical vapor deposition (CVD) and a use method thereof. Background Art

[0002] Diamond has many excellent properties in mechanics, electricity, heat, optics, etc., which makes it have broad application prospects in many aspects. Due to the scarcity of natural diamond, it is difficult to be widely used. The hardness, thermal conductivity, elastic modulus and other physical properties of diamond film prepared by Chemical Vapor Deposition (CVD) are close to or reach the properties of natural diamond, thus solving the problem of the scarcity of natural diamond. Hot wire CVD is currently the most widely used and mature method for preparing diamond film.

[0003] However, in the process of diamond preparation, some diamond particles will grow in the grooves on the surface of the molybdenum electrode used for tensile support and conduction. These particles are hard and non-conductive and need to be polished off in time. If the polishing is not sufficient or clean, the diamond particles on the surface of the molybdenum electrode will affect the contact conductivity between the heating wire and the molybdenum electrode. Sparking and wire breakage may occur during the growth process of diamond. The molybdenum electrode, especially the groove at the junction with the heating wire, needs to be polished before use. The efficiency of manual polishing is currently too low, the cleaning is not thorough, and the polishing effect of each groove is inconsistent. Therefore, it is necessary to propose an automatic cleaning device for molybdenum electrodes for hot wire CVD to solve the above problems. Summary of the invention

[0004] In order to overcome the above-mentioned shortcomings, the purpose of the present invention is to provide an automatic cleaning device for molybdenum electrodes for hot wire CVD and a method of using the same, so as to solve the problems of low efficiency, incomplete cleaning, inconsistent grinding effect of each groove, etc. in the prior art of manual grinding and polishing.

[0005] The technical solution of the present invention is:

[0006] An automatic cleaning device for molybdenum electrodes for hot wire CVD, the device comprises a four-jaw chuck 1, a speed regulating motor, a motor rail, a machine base, a tailstock, a four-jaw chuck 2, a grinding wire fixing seat, a spring fixing seat, a spring puller, a spring, a spring pressure sheet 1, a spring pressure sheet 2, and a diamond grinding wire, and the specific structure is as follows:

[0007] The motor rail and the speed regulating motor are arranged on the upper left of the machine base, the right side of the speed regulating motor head is connected to the four-claw chuck 1, the tailstock rail and the tailstock are arranged on the upper right of the machine base, the left side of the tailstock is connected to the four-claw chuck 2, the two ends of the molybdenum electrode are fixed by the four-claw chuck 1 and the four-claw chuck 2, and the axes of the three are in a straight line;

[0008] A grinding wire fixing seat is provided on one side of the machine base, and one end of the diamond grinding wire is fixed to the grinding wire fixing seat by a locking screw; a spring fixing seat corresponding to the grinding wire fixing seat is provided on the other side of the machine base, and the spring pull-pieces are strip-shaped sheets and are evenly arranged laterally along the spring fixing seat, and each spring pull-piece is fixed to the spring fixing seat by a pull-piece fixing screw, and one end of each spring pull-piece is connected in sequence with a spring, a spring pressure piece 1, a spring pressure piece 2, a pressure piece locking bolt and the other end of the diamond grinding wire.

[0009] In the automatic cleaning device for molybdenum electrodes for hot wire CVD, the speed regulating motor is connected to the motor rail via motor fixing bolts.

[0010] The automatic cleaning device for molybdenum electrodes for hot wire CVD has a tailstock connected to a tailstock rail via a tailstock fixing bolt.

[0011] The automatic cleaning device for molybdenum electrodes for hot wire CVD, the grinding wire fixing seat is fixed to the machine base by fixing screw one.

[0012] In the automatic cleaning device for molybdenum electrodes for hot wire CVD, the spring fixing seat is fixed to the machine base by fixing screw 2.

[0013] In the automatic cleaning device for molybdenum electrodes for hot wire CVD, a gap is formed between the relatively arranged spring pressing piece 2 and spring pressing piece 1, and one end of the spring pressing piece 2 and spring pressing piece 1 are connected and locked by a pressing piece locking bolt.

[0014] The method for using the automatic cleaning device for molybdenum electrodes for hot wire CVD comprises the following steps:

[0015] (1) Loosen the four-jaw chuck 1 and the four-jaw chuck 2 to the maximum clamping distance, place the two ends of the molybdenum electrode into the claws of the above two four-jaw chucks, lock the four-jaw chuck 1 and the four-jaw chuck 2 to fix the molybdenum electrode, adjust and check the motor rail and the tailstock rail so that the axes of the molybdenum electrode, the four-jaw chuck 1 and the four-jaw chuck 2 are in a straight line;

[0016] (2) Cut a diamond grinding wire, adjust the locking screw to fix one end of the diamond grinding wire on the grinding wire fixing seat, pull the diamond grinding wire to place it in the groove of the molybdenum electrode, lock the pull-piece fixing screw to fix the spring pull-piece on the spring fixing seat, hook one end of the spring on the end of the spring pull-piece, and hook the other end of the spring on one end of the connecting piece consisting of spring pressure piece 1, spring pressure piece 2, and pressure piece locking bolt, pass the other end of the diamond grinding wire through the gap between spring pressure piece 2 and spring pressure piece 1, and then tighten the diamond grinding wire until the diamond grinding wire is tightened, and lock the pressure piece locking bolt;

[0017] (3) Repeat the above steps in sequence to fill all the grooves of the molybdenum electrode with diamond grinding lines;

[0018] (4) Start the speed regulating motor to drive the four-jaw chuck 1, the molybdenum electrode and the four-jaw chuck 2 to rotate at a high speed. The diamond grinding wire is tightened by the grinding wire fixing seat and the spring fixing seat through the spring and is tightly attached to the surface of the groove of the molybdenum electrode. At the same time, the diamond grinding wire grinds and cleans the residual impurities in the corresponding groove.

[0019] The design idea of ​​the present invention is:

[0020] The present invention first tightens the diamond grinding wire by a grinding wire fixing seat and a spring fixing seat through a spring and closely adheres to the groove of the molybdenum electrode. The diamond cutting wire is a steel wire with diamond powder electroplated on the surface. The four-jaw chuck clamps the molybdenum electrode and rotates at a high speed through a speed regulating motor. The diamond grinding wire effectively grinds and cleans the high-hardness particles such as diamond or silicon carbide remaining in the groove, with high efficiency and thorough grinding and cleaning.

[0021] The advantages and beneficial effects of the present invention are:

[0022] The invention has a simple structure, and the speed regulating motor drives the four-jaw chuck 1 and the four-jaw chuck 2 to clamp the molybdenum electrode and rotate at high speed. The diamond grinding wire is tightened by the grinding wire holder and the spring holder through the spring and is tightly attached to the groove of the molybdenum electrode. The diamond grinding wire can grind and clean dozens of corresponding grooves at the same time, with high efficiency and thorough grinding and cleaning. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 This is a front view of the structure of the present invention. In the figure: 1—four-jaw chuck 1; 2—speed regulating motor; 3—motor fixing bolt; 4—motor clamping rail; 5—machine base; 6—tailstock clamping rail; 7—tailstock fixing bolt; 8—tailstock; 9—four-jaw chuck 2; 10—molybdenum electrode.

[0024] Figure 2 It is a top view of the structure of the present invention. In the figure: 1—four-jaw chuck 1; 2—speed regulating motor; 3—motor fixing bolt; 4—motor clamping rail; 5—machine base; 6—tailstock clamping rail; 7—tailstock fixing bolt; 8—tailstock; 9—four-jaw chuck 2; 10—molybdenum electrode; 11—locking screw; 12—grinding line fixing seat; 13—fixing screw 1; 14—fixing screw 2; 15—spring fixing seat; 16—spring pull tab; 17—pull tab fixing screw; 18—spring; 19—spring pressure tab 1; 20—spring pressure tab 2; 21—pressure tab locking bolt; 22— Diamond grinding wire. DETAILED DESCRIPTION

[0025] like Figure 1 and Figure 2As shown, the automatic cleaning device for molybdenum electrode for hot wire CVD of the present invention mainly includes: a four-jaw chuck 1, a speed regulating motor 2, a motor fixing bolt 3, a motor rail 4, a machine base 5, a tailstock rail 6, a tailstock fixing bolt 7, a tailstock 8, a four-jaw chuck 2 9, a molybdenum electrode 10, a locking screw 11, a grinding line fixing seat 12, a fixing screw 1 13, a fixing screw 2 14, a spring fixing seat 15, a spring pull piece 16, a pull piece fixing screw 17, a spring 18, a spring pressure piece 1 19, a spring pressure piece 2 20, a pressure piece locking bolt 21, Diamond grinding wire 22 (diameter 1mm), etc., the specific structure is as follows:

[0026] A motor rail 4, a motor fixing bolt 3, and a speed regulating motor 2 are arranged in sequence on the upper left of the machine base 5. The speed regulating motor 2 is connected to the motor rail 4 through the motor fixing bolt 3. The right side of the head of the speed regulating motor 2 is connected to a four-jaw chuck 1. A tail stock rail 6, a tail stock fixing bolt 7, and a tail stock 8 are arranged in sequence on the upper right of the machine base 5. The tail stock 8 is connected to the tail stock rail 6 through the tail stock fixing bolt 7. The left side of the tail stock 8 is connected to a four-jaw chuck 2 9. Both ends of the molybdenum electrode 10 are fixed by a four-jaw chuck 1 and a four-jaw chuck 2 9, and the axes of the three are in a straight line.

[0027] A grinding line fixing seat 12 is provided on one side of the machine base 5, and the grinding line fixing seat 12 is fixed to the machine base 5 by fixing screws 13. One end of the diamond grinding wire 22 is fixed to the grinding wire fixing seat 12 by a locking screw 11; a spring fixing seat 15 corresponding to the grinding wire fixing seat 12 is provided on the other side of the machine base 5, and the spring fixing seat 15 is fixed to the machine base 5 by a fixing screw 2 14, and the spring pull-tab 16 is a strip-shaped sheet and is evenly arranged along the spring fixing seat 15 in the horizontal direction, and each spring pull-tab 16 is fixed to the spring fixing seat 15 by a pull-tab fixing screw 17, and one end of each spring pull-tab 16 is connected in sequence with a spring 18, a spring pressure sheet 19, a spring pressure sheet 20, a pressure sheet locking bolt 21 and The other end of the diamond grinding wire 22. A gap is formed between the relatively arranged spring pressing piece 20 and the spring pressing piece 1 19, and one end of the spring pressing piece 20 and the spring pressing piece 1 19 is connected and locked by a pressing piece locking bolt 21.

[0028] like Figure 1-Figure 2 As shown, the method of using the automatic cleaning device for molybdenum electrodes for hot wire CVD of the present invention is as follows:

[0029] Loosen the four-jaw chuck 1 and the four-jaw chuck 2 9 to the maximum clamping distance, place the two ends of the molybdenum electrode 10 into the jaws of the above two four-jaw chucks (four-jaw chuck 1 and four-jaw chuck 2 9), lock the four-jaw chuck 1 and the four-jaw chuck 2 9 to fix the molybdenum electrode 10, adjust and check the motor rail 4 and the tailstock rail 6 so that the axes of the molybdenum electrode 10, the four-jaw chuck 1 and the four-jaw chuck 2 9 are in a straight line. Cut a moderate length Diamond grinding line 22, adjust the locking screw 11 One end of the diamond grinding wire 22 is fixed on the grinding wire fixing seat 12, pulling The diamond grinding wire 22 is placed in the groove of the molybdenum electrode 10, and the spring pull piece 16 is fixed to the spring fixing seat 15 by locking the pull piece fixing screw 17. One end of the spring 18 is hooked on the end of the spring pull piece 16, and the other end of the spring 18 is hooked on one end of the connecting piece composed of the spring pressure piece 19, the spring pressure piece 20, and the pressure piece locking bolt 21. The other end of the diamond grinding wire 22 passes through the gap between the spring pressing piece 20 and the spring pressing piece 19 and is tightened. Diamond grinding wire 22 to The diamond grinding wire 22 is tightened, and the locking bolt 21 of the pressing plate is locked. The above operations are repeated in sequence until all the grooves of the molybdenum electrode 10 are fully tightened. Diamond grinding wire 22. Start the speed regulating motor 2 to drive the four-jaw chuck 1, the molybdenum electrode 10 and the four-jaw chuck 2 to rotate at 9 speeds. The diamond grinding wire 22 is tightened by the grinding wire fixing seat 12 and the spring fixing seat 15 through the spring 18 and is closely attached to the surface of the groove of the molybdenum electrode 10. The diamond grinding line 22 simultaneously grinds away the residual diamond and other impurities in the corresponding dozens of grooves.

[0030] The results show that it can effectively solve the problems of low efficiency, incomplete cleaning, inconsistent grinding effect of each groove and so on in the existing manual grinding and polishing technology. It has a simple structure, is easy to use, and is suitable for large-scale promotion.

[0031] The above is only the best embodiment of the present invention. It should be pointed out that all technicians in this technical field can make changes and / or modifications to the examples shown without departing from the spirit of the attached claims and the scope of the principles shown in the present invention, and these changes should also be regarded as the scope of protection of the present invention.

Claims

1. An automatic cleaning device for molybdenum electrodes for hot wire CVD, characterized in that: The device includes a four-jaw chuck 1, a speed regulating motor, a motor rail, a machine base, a tailstock, a four-jaw chuck 2, a grinding wire fixing seat, a spring fixing seat, a spring puller, a spring, a spring pressure piece 1, a spring pressure piece 2, and a diamond grinding wire. The specific structure is as follows: The motor rail and the speed regulating motor are arranged on the upper left of the machine base, the right side of the speed regulating motor head is connected to the four-claw chuck 1, the tailstock rail and the tailstock are arranged on the upper right of the machine base, the left side of the tailstock is connected to the four-claw chuck 2, the two ends of the molybdenum electrode are fixed by the four-claw chuck 1 and the four-claw chuck 2, and the axes of the three are in a straight line; A grinding wire fixing seat is provided on one side of the machine base, and one end of the diamond grinding wire is fixed to the grinding wire fixing seat by a locking screw; a spring fixing seat corresponding to the grinding wire fixing seat is provided on the other side of the machine base, and the spring pull-pieces are strip-shaped sheets and are evenly arranged laterally along the spring fixing seat, and each spring pull-piece is fixed to the spring fixing seat by a pull-piece fixing screw, and one end of each spring pull-piece is connected in sequence with a spring, a spring pressure piece 1, a spring pressure piece 2, a pressure piece locking bolt and the other end of the diamond grinding wire.

2. The automatic cleaning device for molybdenum electrodes for hot wire CVD according to claim 1, characterized in that: The speed regulating motor is connected to the motor rail via motor fixing bolts.

3. The automatic cleaning device for molybdenum electrodes for hot wire CVD according to claim 1, characterized in that: The tailstock is connected to the tailstock rail via a tailstock fixing bolt.

4. The automatic cleaning device for molybdenum electrodes for hot wire CVD according to claim 1, characterized in that: The grinding line fixing seat is fixed to the machine base by fixing screw one.

5. The automatic cleaning device for molybdenum electrodes for hot wire CVD according to claim 1, characterized in that: The spring fixing seat is fixed to the machine base by fixing screw 2.

6. The automatic cleaning device for molybdenum electrodes for hot wire CVD according to claim 1, characterized in that: A gap is formed between the spring pressing piece 2 and the spring pressing piece 1 which are arranged opposite to each other, and one end of the spring pressing piece 2 and the spring pressing piece 1 are connected and locked by a pressing piece locking bolt.

7. A method for using the automatic cleaning device for hot wire CVD molybdenum electrodes according to any one of claims 1 to 6, characterized in that: The steps include: (1) Loosen the four-jaw chuck 1 and the four-jaw chuck 2 to the maximum clamping distance, place the two ends of the molybdenum electrode into the claws of the above two four-jaw chucks, lock the four-jaw chuck 1 and the four-jaw chuck 2 to fix the molybdenum electrode, adjust and check the motor rail and the tailstock rail so that the axes of the molybdenum electrode, four-jaw chuck 1 and four-jaw chuck 2 are in a straight line; (2) Cut a diamond grinding wire, adjust the locking screw to fix one end of the diamond grinding wire on the grinding wire fixing seat, pull the diamond grinding wire to place it in the groove of the molybdenum electrode, lock the pull-piece fixing screw to fix the spring pull-piece on the spring fixing seat, hook one end of the spring on the end of the spring pull-piece, and hook the other end of the spring on one end of the connecting piece consisting of spring pressure piece 1, spring pressure piece 2, and pressure piece locking bolt, pass the other end of the diamond grinding wire through the gap between spring pressure piece 2 and spring pressure piece 1, and then tighten the diamond grinding wire until the diamond grinding wire is tightened, and lock the pressure piece locking bolt; (3) Repeat the above steps to fill all the grooves of the molybdenum electrode with diamond grinding lines; (4) Start the speed regulating motor to drive the four-jaw chuck 1, the molybdenum electrode and the four-jaw chuck 2 to rotate at a high speed. The diamond grinding wire is tightened by the grinding wire fixing seat and the spring fixing seat through the spring and is tightly attached to the surface of the groove of the molybdenum electrode. At the same time, the diamond grinding wire grinds and cleans the residual impurities in the corresponding groove.

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