A special composite tooling

Abstract

The present invention discloses a special composite tooling, including a support frame, a transverse flip frame and a longitudinal rotating shaft; a detachable supporting bottom plate is provided on one side of the longitudinal rotating shaft, and a plurality of outer ring guard plates are provided on the outer contour edge of the supporting bottom plate; an inner ring guard plate is detachably provided on the other side of the longitudinal rotating shaft, and the inner ring guard plate is detachably provided on the longitudinal rotating shaft through an extrusion device; a detachably connected middle plate is provided on the longitudinal rotating shaft on the same side of the inner ring guard plate through a positioning device; the water pipes restricted at both ends of the middle plate pass through the positioning welding block and are then welded to the main body through a transition box; the positioning welding block is an L-shaped structure, and the two ends of the L are detachably connected to the inner ring guard plate and the transition box respectively. Beneficial effects: Through the detachable tooling, convenient processing of chip equipment components can be achieved, and because the tooling structure is a detachable structure, it can be convenient for welding, transportation and heat treatment, thereby improving processing efficiency.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor equipment, and in particular to a special composite tooling. Background Art

[0002] In semiconductor production equipment, parts need to be repaired and welded. The specific structure is as follows: Figure 1 The inside of the annular main body 7 is a cavity, and hollow transition boxes 8 need to be symmetrically welded on both sides of the main body 7, and the spaces inside the main body 7 and the transition boxes 8 are connected, and then water pipes 9 need to be welded again on the transition boxes 8.

[0003] Since the overall structure volume of the main body 1 is relatively large, continuity is maintained during the welding process of the transition box 8 to prevent water leakage. Therefore, the main body 7 and the transition box 8 need to be rotated at different angles as a whole to ensure that there will be no water leakage after the welding is completed. At the same time, in order to increase the service life and eliminate the internal welding stress, the main body 7 and the transition box 8 need to be heat treated as a whole, and then the water pipe 9 is welded to the transition box 8.

[0004] In the traditional process, welding, handling, heat treatment and other workers need to work together to complete the device without damage. However, since the entire device is a thin-walled structure with a cavity, it is particularly easy to cause damage or distortion during transportation. At the same time, since the thickness of one side of the main body 7 gradually becomes thinner, this also invisibly increases the work intensity.

[0005] In order to solve the inconveniences in welding, transportation and heat treatment, it is urgent to develop a new solution. Summary of the invention

[0006] In order to solve the problems of inconvenience in welding, transportation and heat treatment of semiconductor device components, the present invention provides a special composite tool.

[0007] In order to achieve the above object, the present invention adopts the following technical solution:

[0008] A special composite tooling, comprising, a support frame; the support frame is connected to the longitudinal rotating shaft through a transverse flip frame; and the rotation center axis of the transverse flip frame is perpendicular to the rotation center axis of the longitudinal rotating shaft; a detachable supporting base plate is provided on one side of the longitudinal rotating shaft, and a plurality of outer ring guard plates are provided on the outer contour edge of the supporting base plate; an inner ring guard plate is detachably provided on the other side of the longitudinal rotating shaft, and the inner ring guard plate is detachably arranged on the longitudinal rotating shaft through an extrusion device; a detachably connected intermediate plate is provided on the longitudinal rotating shaft on the same side of the inner ring guard plate through a positioning device; the water pipes restricted at both ends of the intermediate plate pass through the positioning welding block and are then welded to the main body through a transition box; the positioning welding block is an L-shaped structure, and the two ends of the L are detachably connected to the inner ring guard plate and the transition box respectively.

[0009] Furthermore, the transverse turning frame is connected to the transverse turning frame via a transverse rotating shaft arranged in the bearing seat, and the longitudinal rotating shaft rotates relative to the bearing seat fixed on the transverse turning frame.

[0010] Furthermore, the extrusion device includes a limiting sleeve sleeved on the longitudinal rotating shaft, and a positioning nut for pressing the inner ring guard plate onto the limiting sleeve, and the positioning nut is threadedly connected to the longitudinal rotating shaft.

[0011] Furthermore, the positioning device comprises: a positioning bracket and a connecting bracket; the positioning bracket contacts and positions the middle plate, and the connecting bracket is threadedly connected to the middle plate.

[0012] Furthermore, only one of the multiple inner brackets is hinged to the middle plate, and the remaining inner brackets are in contact connection with the middle plate.

[0013] Furthermore, a lifting eye bolt is provided on the side of the outer ring guard plate facing away from the inner ring guard plate.

[0014] Furthermore, the positioning welding block is connected to the inner ring guard plate via a first fixing pin; and the positioning welding block is connected to the transition box via a second fixing pin.

[0015] Compared with the prior art, the present invention has the following beneficial effects: through the detachable tooling, the chip device components can be conveniently processed, and because the tooling structure is a detachable structure, it is convenient for welding, transportation and heat treatment, thereby improving the processing efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 A schematic diagram of a workpiece that needs to be welded and heat treated;

[0017] Figure 2 This is the overall structural diagram of one side of the tooling;

[0018] Figure 3 is a schematic diagram of another side of the tooling;

[0019] Figure 4 This is a partial structural diagram of the tooling.

[0020] In the figure, 1 is a support frame, 11 is a transverse rotating shaft, 2 is a transverse turning frame, 3 is a longitudinal rotating shaft, 31 is a limiting sleeve, 32 is a positioning nut, 4 is a supporting base plate, 41 is an outer ring guard plate, 42 is an inner bracket, 43 is a lifting eye bolt, 5 is an inner ring guard plate, 51 is a positioning welding block, 511 is a first fixing pin, 512 is a second fixing pin, 6 is a middle plate, 7 is a main body, 8 is a transition box, and 9 is a water pipe. DETAILED DESCRIPTION

[0021] The present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0022] In order to process Figure 1 The components shown in the figure disclose a special composite tooling, such as Figure 2 , Figure 3 and Figure 4 As shown, it includes a support frame 1; wherein the support frame 1 is connected to the longitudinal rotating shaft 3 through the transverse flip frame 2; and the rotation center axis of the transverse flip frame 2 is perpendicular to the rotation center axis of the longitudinal rotating shaft 3. Specifically, the transverse flip frame 2 is connected to the transverse flip frame 2 through the transverse rotating shaft 11 provided in the bearing seat, and the longitudinal rotating shaft 3 rotates relative to the bearing seat fixed on the transverse flip frame 2. Through the mutual cooperation of the transverse flip frame 2 and the longitudinal rotating shaft 3, multi-angle rotation can be achieved, which is conducive to welding.

[0023] On the fixed main body 7, a removable supporting base plate 4 is provided on one side of the longitudinal rotating shaft 3, and a plurality of outer ring guard plates 41 are provided on the outer contour edge of the supporting base plate 4, and the main body 7 is clamped in the outer ring guard plates 41. In order to facilitate transportation and lifting, a lifting eye bolt 43 is also provided on the side of the outer ring guard plate 41 away from the inner ring guard plate 5. In order to give the main body 7 a qualitative effect on the inner side, an inner ring guard plate 5 is removably provided on the other side of the longitudinal rotating shaft 3, and the inner ring guard plate 5 is removably provided on the longitudinal rotating shaft 3 through an extrusion device; similarly, the inner ring guard plate 5 is clamped on the inner side of the main body 7 for positioning and preventing welding deformation. Among them, the extrusion device includes a limiting sleeve 31 sleeved on the longitudinal rotating shaft 3, and a positioning nut 32 that squeezes the inner ring guard plate 5 on the limiting sleeve 31, and the positioning nut 32 is threadedly connected to the longitudinal rotating shaft 3.

[0024] A middle plate 6 is detachably connected to the longitudinal rotating shaft 3 on the same side of the inner ring guard plate 5 through a positioning device; the water pipes 9 restricted at both ends of the middle plate 6 pass through the positioning welding block 51 and are then welded to the main body 7 through the transition box 8; the positioning welding block 51 is an L-shaped structure, and the two ends of the L-shape are detachably connected to the inner ring guard plate 5 and the transition box 8, specifically: the positioning welding block 51 is connected to the inner ring guard plate 5 through a first fixing pin 511; the positioning welding block 51 is connected to the transition box 8 through a second fixing pin 512.

[0025] The positioning device includes: a plurality of inner brackets 42 detachably connected to the supporting bottom plate 4; the inner brackets 42 are detachably connected to the middle plate 6. Specifically, the positioning device includes: a positioning bracket and a connecting bracket; the positioning bracket is in contact with the middle plate 6 for positioning, and the connecting bracket is threadedly connected to the middle plate 6.

[0026] The present invention can realize the welding of the transition box 8 and the main body 7 by rotating the horizontal flip frame 2 and other structures such as the support base plate 4 installed on the longitudinal rotating shaft 3. At the same time, since the main body 7 is clamped on the support base plate 4, it can be conveniently transported through the eye bolts 43 during hoisting, and the tooling, the main body 7 and the transition box 8 can be directly sent to the heat treatment furnace as a whole, which is convenient for process control. At the same time, after the heat treatment, the intermediate plate 6 can continue to be used to realize the positioning and welding of the water pipe. The specific steps of use are as follows:

[0027] Step 1: Assemble the lateral turning frame 2 and the supporting frame 1 into one; install the main body 7 on the separate supporting bottom plate 4 by installing the outer ring guard plate 41 to achieve external protection of the main body 7.

[0028] Step 2: Install the limiting sleeve 31, the inner bracket 42 and the inner ring guard plate 5 in sequence, and then use the positioning nut 32 to thread the longitudinal shaft 3 to achieve internal protection of the main body 7 to prevent deformation.

[0029] Step three, at the positions where the transition box 8 is installed on both sides of the main body 7, the transition box 8 is connected to one end of the positioning welding block 51 through the second fixing pin 512, and then the other end of the positioning welding block 51 is connected to the inner ring guard plate 5 through the first fixing pin 511; through this step, the positioning welding block 51 and the transition box 8 are fixed into one, which is convenient for welding of the transition box 8.

[0030] Step 4: Mount the longitudinal rotating shaft 3 on the bearing seat on the transverse turning frame 2.

[0031] Step 5, complete the welding of the main body 7 and the transition box 8; in this step, it should be noted that since the positioning welding block 51 is an L-shaped structure, one side cannot be welded during welding due to the obstruction of the positioning welding block 51. Therefore, in this step, first complete the welding of the three exposed joints between the main body 7 and the transition box 8; then remove the positioning welding block 51; then supplement the welding of the remaining joints; finally, weld the positioning eye of the second fixing pin 512 to seal.

[0032] Step 6: Remove the longitudinal shaft 3 from the transverse turning frame 2, and then heat treat all the longitudinal shaft 3 and the components mounted on the longitudinal shaft 3. In this step, a lifting device can be used to connect the eyebolts 43 and transport them from the welding area to the heat treatment area.

[0033] Step 7. After completing step 6, connect the middle plate 6 to the inner bracket 42, and position the two water pipes 9 on the transition box 8 through the bolts at both ends of the inner bracket 42; when connecting the middle plate 6 to the inner bracket 42, first position the middle plate 6 and the positioning bracket, and then fix the middle plate 6 to the connecting bracket through bolts.

[0034] Step 8: Reinstall the longitudinal rotating shaft 3 on the transverse turning frame 2, and weld the seams between the water pipe 9 and the transition box 8;

[0035] Step nine: remove the welded main body 7, transition box 8 and water pipe 9 from the tooling.

[0036] Through the above steps, welding-transportation-heat treatment-welding is completed, and the processing of equipment components is completed.

Claims

1. A special composite tool, characterized in that: It comprises a support frame (1); The support frame (1) is connected to the longitudinal rotation shaft (3) via the transverse turning frame (2); and the rotation center axis of the transverse turning frame (2) and the rotation center axis of the longitudinal rotation shaft (3) are perpendicular to each other; A detachable supporting base plate (4) is provided on one side of the longitudinal rotating shaft (3), and a plurality of outer ring guard plates (41) are provided on the outer contour edge of the supporting base plate (4); an inner ring guard plate (5) is detachably provided on the other side of the longitudinal rotating shaft (3), and the inner ring guard plate (5) is detachably provided on the longitudinal rotating shaft (3) by means of an extrusion device, the outer ring guard plate (41) is engaged with the outer side of the main body (7), and the inner ring guard plate (5) is engaged with the inner side of the main body (7); A detachably connected intermediate plate (6) is provided on the longitudinal rotating shaft (3) on the same side of the inner ring guard plate (5) through a positioning device; the water pipes (9) restricted at both ends of the intermediate plate (6) pass through the positioning welding blocks (51) and are then welded to the main body (7) through a transition box (8); The positioning welding block (51) is an L-shaped structure, and the two ends of the L-shape are detachably connected to the inner ring guard plate (5) and the transition box (8) respectively.

2. The special composite tooling according to claim 1, characterized in that: The transverse turning frame (2) is connected to the transverse turning frame (2) via a transverse rotating shaft (11) arranged in a bearing seat, and the longitudinal rotating shaft (3) rotates relative to the bearing seat fixed on the transverse turning frame (2).

3. The special composite tooling according to claim 1, characterized in that: The extrusion device comprises a limiting sleeve (31) sleeved on the longitudinal rotating shaft (3), and a positioning nut (32) for pressing the inner ring guard plate (5) onto the limiting sleeve (31), and the positioning nut (32) is threadedly connected to the longitudinal rotating shaft (3).

4. The special composite tooling according to claim 1, characterized in that: The positioning device comprises: a plurality of inner brackets (42) detachably connected to the supporting base plate (4); the inner brackets (42) are detachably connected to the middle plate (6).

5. The special composite tooling according to claim 4, characterized in that: The positioning device comprises: a positioning bracket and a connecting bracket; the positioning bracket is in contact with the middle plate (6) for positioning, and the connecting bracket is threadedly connected to the middle plate (6).

6. The special composite tooling according to claim 1, characterized in that: A lifting eye bolt (43) is also provided on the side of the outer ring guard plate (41) facing away from the inner ring guard plate (5).

7. The special composite tooling according to claim 1, characterized in that: The positioning welding block (51) is connected to the inner ring guard plate (5) via a first fixing pin (511); the positioning welding block (51) is connected to the transition box (8) via a second fixing pin (512).

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