Drive devices and automation equipment

Abstract

The present invention discloses a driving device and automation equipment, including: a driving unit, the driving unit including a rotating shaft; an air slip ring, the air slip ring including a stator and a rotor, the rotor covering the circumferential surface of the rotating shaft, the rotor being fixed relative to the rotating shaft, the stator being rotationally connected to the rotor, the stator being provided with a first air inlet, the rotor being provided with a first air outlet, the first air inlet being connected to the first air outlet. The rotor of the air slip ring of the present invention is directly covered on the circumferential surface of the rotating shaft, the target rotating shaft is fixed on the rotor, a coupling is omitted between the rotating shafts, and because the rotor is covered on the circumferential surface of the rotating shaft, the length of the rotor contributes little to the increase in the length of the shaft that transmits the rotating motion, and the target rotating shaft is not easy to vibrate when rotating.

Description

Technical Field

[0001] The invention relates to the field of automation equipment, in particular to a driving device with an air slip ring structure and automation equipment. Background Art

[0002] In existing equipment, a drive unit is usually required to provide rotational motion; at the same time, an air slip ring is set to prevent the air pipe from being entangled. At this time, the rotating shaft of the drive unit is connected to the rotor of the air slip ring through a coupling, and the target device is set on the rotor. This makes the shaft that transmits the rotational motion too long, and when the center of gravity of the target device deviates from the rotation axis, the target device is prone to vibrate. In situations where the installation space is limited, the load weight is limited, or the rotor rotation inertia is limited, the existing connection structure between the motor and the air slip ring cannot meet the requirements. Summary of the invention

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention provides a driving device capable of shortening the length of a shaft for transmitting rotational motion.

[0004] The invention also provides an automation device.

[0005] In a first aspect, an embodiment of the present invention provides a driving device, comprising: a driving unit, the driving unit comprising a rotating shaft; an air slip ring, the air slip ring comprising a stator and a rotor, the rotor being covered on a circumferential surface of the rotating shaft, the rotor being fixed relative to the rotating shaft, the stator being rotatably connected to the rotor, the stator being provided with a first air inlet, the rotor being provided with a first air outlet, the first air inlet being communicated with the first air outlet.

[0006] The driving device of the embodiment of the present invention has at least the following beneficial effects: in the conventional structure, the rotating shaft is connected to the rotor of the air slip ring through a coupling, and the target rotating shaft is arranged on the rotor, that is, the length of the shaft for transmitting the rotational motion needs to include the length of the coupling and the length of the rotor; in the present embodiment, the rotor of the air slip ring is directly coated on the circumferential surface of the rotating shaft, the target rotating shaft is fixed on the rotor, and the coupling is omitted between the rotating shafts. Moreover, because the rotor is coated on the circumferential surface of the rotating shaft, the length of the rotor contributes little to the increase in the length of the shaft for transmitting the rotational motion, and the target device is not easy to vibrate when rotating.

[0007] In the driving device according to some other embodiments of the present invention, the rotating shaft is integrally provided with the rotor.

[0008] According to some other embodiments of the driving device of the present invention, the rotor has a mounting hole opened in the axial direction, and the rotating shaft is placed in the mounting hole.

[0009] According to the driving device of some other embodiments of the present invention, the rotor is locked on the rotating shaft by a first set screw.

[0010] In the driving device according to some other embodiments of the present invention, the rotor and the rotating shaft are connected by a key.

[0011] According to some other embodiments of the driving device of the present invention, a first annular groove is provided on the outer circumferential surface of the rotor, the first air outlet is provided along the axial direction of the rotor, and the first air inlet and the first air outlet are both connected to the first annular groove.

[0012] According to some other embodiments of the driving device of the present invention, a sealing ring is further provided between the stator and the rotor, and two sealing rings are provided, and the two sealing rings are respectively located on both sides of the first annular groove.

[0013] According to the driving device of some other embodiments of the present invention, a second air inlet hole is further provided on the stator, and a second air outlet hole is provided on the rotor, and the second air inlet hole is communicated with the second air outlet hole.

[0014] According to some other embodiments of the driving device of the present invention, the driving device is a motor or a rotary cylinder.

[0015] In a second aspect, an embodiment of the present invention provides an automation device, comprising the above-mentioned driving device.

[0016] The automation equipment of the embodiment of the present invention has at least the following beneficial effects: by using the above-mentioned driving device, the automation equipment runs smoothly, and the space occupied by the automation equipment can be reduced, the use requirements are met, and the automation equipment has strong competitiveness.

[0017] According to some other embodiments of the automation equipment of the present invention: by using the above-mentioned driving device, the target device is not easy to vibrate when rotating, and the automation equipment can operate stably. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 is an axonometric view of the drive device of the first embodiment;

[0019] Figure 2 yes Figure 1 Exploded view of the mid-drive unit;

[0020] Figure 3 yes Figure 1 Top view of the middle rotor;

[0021] Figure 4 yes Figure 3 Sectional view along section AA;

[0022] Figure 5is an axonometric view of an adsorption platform including a driving device of the first embodiment;

[0023] Figure 6 yes Figure 5 Exploded view of the adsorption platform;

[0024] Figure 7 yes Figure 5 Top view of the middle platform;

[0025] Figure 8 yes Figure 5 Right view of the middle platform;

[0026] Fig. 9 yes Figure 5 Bottom view of the middle platform;

[0027] Fig.10 is an axonometric view of a drive device of a second embodiment;

[0028] Fig.11 yes Fig.10 Exploded view of the mid-drive unit;

[0029] Fig.12 yes Fig.10 Front view of the middle stator;

[0030] Fig.13 yes Fig.12 Cross-sectional view of the middle stator along section BB;

[0031] Fig.14 yes Fig.10 Front view of the middle rotor;

[0032] Fig.15 yes Fig.14 Cross-sectional view of the middle rotor along the CC section;

[0033] Fig.16 is an isometric view of a wafer handling device including a drive device of the second embodiment;

[0034] Fig.17 yes Fig.16 Enlarged schematic diagram of the middle Ⅰ area;

[0035] Fig.18 yes Fig.16 An exploded view of the wafer handling device;

[0036] Fig.19 yes Fig.16 Axonometric view of the center mounting seat;

[0037] Fig. 20 yes Fig.16 A top view of the middle mounting seat;

[0038] Fig.21 yes Fig. 20 A cross-sectional view of the middle mounting seat along the DD section;

[0039] Fig. 22 yes Fig.16 Axonometric drawing of the central subject;

[0040] Fig.23 yes Fig.16 Axonometric view of the connection block in . DETAILED DESCRIPTION

[0041] The following will be combined with the embodiments to clearly and completely describe the concept of the present invention and the technical effects produced, so as to fully understand the purpose, characteristics and effects of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, other embodiments obtained by those skilled in the art without creative work are all within the scope of protection of the present invention.

[0042] In the description of the embodiments of the present invention, if orientation descriptions are involved, the orientations or positional relationships indicated by “up”, “down”, “front”, “back”, “left”, “right”, etc. are based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on the present invention.

[0043] In the description of the embodiments of the present invention, if a feature is referred to as being "set", "fixed", "connected", or "installed" on another feature, it may be directly set, fixed, or connected to the other feature, or it may be indirectly set, fixed, connected, or installed on the other feature. In the description of the embodiments of the present invention, if "several" is involved, it means more than one, if "multiple" is involved, it means more than two, if "greater than", "less than", or "exceeds" is involved, it should be understood as not including the number itself, and if "above", "below", or "within" is involved, it should be understood as including the number itself. If "first" or "second" is involved, it should be understood as being used to distinguish technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0044] Reference Figure 1 and Figure 2 , Figure 1 is an axonometric view of the drive device of the first embodiment, Figure 2 yes Figure 1Exploded diagram of the driving device in the embodiment. The driving device of the first embodiment includes a driving unit and an air slip ring 300. The driving unit is a motor 100. The motor 100 is provided with a rotating shaft 110. When the motor 100 is powered on, the rotating shaft 110 can rotate around an axis in the up-down direction. The air slip ring 300 includes a stator 310, a first sealing ring 320 and a rotor 330. The rotor 330 is rotatably connected to the stator 310, and the rotor 330 is fixedly connected to the rotating shaft 110. Specifically, the stator 310 is provided with a first accommodating hole 312 in the up-down direction. The rotor 330 is placed in the first accommodating hole 312, and a rolling bearing is provided between the rotor 330 and the stator 310. The inner ring of the rolling bearing is sleeved on the rotor 330, and the outer ring of the rolling bearing is abutted against the inner surface of the first accommodating hole 312. As a result, the rotor 330 can rotate relative to the stator 310.

[0045] In another embodiment, the drive unit may also be a rotary cylinder, which also has a rotating shaft.

[0046] Reference Figure 2 , Figure 3 and Figure 4 , Figure 3 yes Figure 1 A top view of the middle rotor 330, Figure 4 yes Figure 3 The stator 310 is provided with a first air inlet 311, and the rotor 330 is provided with a first air outlet 333 (see Figure 4 ), the first air inlet 311 is connected to the first air outlet 333. Specifically, the first air inlet 311 is arranged along the radial direction of the stator 310, and the first air inlet 311 connects the first accommodating hole 312 with the outer circumferential surface of the stator 310. A first annular groove 332 is arranged on the outer circumferential surface of the rotor 330. After the rotor 330 is placed in the first accommodating hole 312, the first annular groove 332 is aligned with the first air inlet 311. The first air outlet 333 is arranged along the axial direction of the rotor 330 (the axial direction of the rotor 330 is the up and down direction), the lower end of the first air outlet 333 is connected to the first annular groove 332, and the upper end of the first air outlet 333 is connected to the upper end surface of the rotor 330.

[0047] Finally, by providing the first annular groove 332 , the first air inlet 311 is connected to the first air outlet 333 . Meanwhile, even if the rotor 330 rotates relative to the stator 310 , the connection between the first air inlet 311 and the first air outlet 333 is not affected.

[0048] In order to prevent gas leakage in the gap between the stator 310 and the rotor 330, a second annular groove 313 is provided on the surface of the first accommodating hole 312. There are two second annular grooves 313. After the rotor 330 is placed in the first accommodating hole 312, the two second annular grooves 313 are respectively located on the upper side and the lower side of the first annular groove 332. A first sealing ring 320 is respectively placed in the two second annular grooves 313. The first sealing ring 320 is generally made of elastically deformable rubber. After the first sealing ring 320 is placed in the second annular groove 313, the first sealing ring 320 is squeezed, and the first sealing ring 320 is simultaneously against the surface of the first accommodating hole 312 and the outer circumferential surface of the rotor 330, thereby preventing gas from entering the first annular groove 332 from the gap between the stator 310 and the rotor 330.

[0049] In order to make the gas outlet more uniform, four first gas outlet holes 333 are provided, and the four first gas outlet holes 333 are evenly arranged on the rotor 330 along the circumferential direction.

[0050] Reference Figure 5 and Figure 6 , Figure 5 is an axonometric view of an adsorption platform including a driving device of the first embodiment, Figure 6 yes Figure 5 Exploded diagram of the adsorption platform. The adsorption platform includes a driving device, a first frame 200 and a platform assembly 400. The motor 100 is located below the first frame 200 and is locked and fixed on the first frame 200. The air slip ring 300 is located above the first frame 200 as a whole, the stator 310 is locked and fixed on the first frame 200, and the platform assembly 400 is arranged on the rotor 330.

[0051] Reference Figures 6 to 8 , Figure 7 yes Figure 5 A top view of the middle platform 410, Figure 8 yes Figure 5 The right side view of the platform 410 in the figure. The platform assembly 400 includes a platform 410 and a cover plate 420. The platform 410 is locked and fixed to the upper end of the rotor 330. The cover plate 420 is located above the platform 410. The cover plate 420 can be glued and fixed to the upper surface of the platform 410. An air duct is provided on the upper surface of the platform 410, and the air duct is connected to the first air outlet 333. Specifically, the air duct is connected to the first air outlet 333 through a connecting hole 413 that runs through the platform 410.

[0052] Reference Figure 3 , Figure 4 , Figures 7 to 9 , Fig. 9 yes Figure 5Bottom view of the platform 410 in the middle. In order to lock and fix the platform 410 to the upper end of the rotor 330, a mounting plate 416 is provided on the lower side of the platform 410. The mounting plate 416 is integrally provided with the platform 410, and a mounting slot 418 is provided on the mounting plate 416. The platform 410 is provided with a first threaded hole 414 in the up-down direction and a second threaded hole 417 in the left-right direction. Both the first threaded hole 414 and the second threaded hole 417 are connected to the mounting slot 418. A blind hole 336 is provided at the upper end of the rotor 330 in the up-down direction. During installation, the upper end of the rotor 330 is placed in the mounting slot 418, the blind hole 336 is aligned with the first threaded hole 414, a second set screw is screwed into the first threaded hole 414, and a third set screw is screwed into the second threaded hole 417, thereby realizing the locking and fixing of the platform 410 and the rotor 330.

[0053] In order to enable the platform assembly 400 to uniformly adsorb the material, the air channel is divided into a first air channel 411 and a second air channel 412. A plurality of first air channels 411 are provided, and the plurality of first air channels 411 are arranged in parallel along the front-to-back direction. A plurality of second air channels 412 are also provided, and the plurality of second air channels 412 are arranged in parallel along the left-to-right direction. The two ends of the first air channel 411 are respectively connected to two staggered connection grooves 415, and the two ends of the second air channel 412 are also respectively connected to two staggered connection grooves 415, and a single connection groove 415 is connected to two connection holes 413.

[0054] The cover plate 420 is provided with a first through hole 421 and a second through hole 422, and the first through hole 421 and the second through hole 422 both penetrate the cover plate 420 in the up-down direction. There are a plurality of first through holes 421, and there are a plurality of second through holes 422. After the cover plate 420 is fixed on the upper surface of the platform 410, the position of the first through hole 421 corresponds to the position of the first air passage 411, and the position of the second through hole 422 corresponds to the second air passage 412.

[0055] Therefore, by providing the air channel and the cover plate 420 , the material can be uniformly adsorbed on the cover plate 420 .

[0056] Reference Figure 3 , Figure 4 and Figure 6 In order to lower the height of the center of gravity of the platform assembly 400, the adsorption platform of this embodiment does not use a coupling, and the rotor 330 is provided with a mounting hole 334 along the axial direction. The rotating shaft 110 of the motor 100 is inserted into the mounting hole 334, and then the rotor 330 is locked and fixed on the rotating shaft 110 by the first set screw. When the first set screw is used, a third threaded hole 331 can be opened in the radial direction. After the rotor 330 is sleeved on the rotating shaft 110, the first limit ring 335 at the upper end of the rotor 330 abuts against the upper end of the rotating shaft 110, and the first set screw is screwed into the third threaded hole 331, thereby locking and fixing the rotor 330 on the rotating shaft 110.

[0057] In another embodiment, a first keyway may be opened on the surface of the mounting hole 334, and a second keyway may be opened axially on the circumferential surface of the rotating shaft 110, and the rotor 330 and the rotating shaft 110 may be fixedly connected by inserting a key into the first keyway and the second keyway.

[0058] Compared with the conventional structure in which the rotating shaft 110 is connected and fixed to the rotor 330 via a coupling, no coupling is provided between the rotating shaft 110 and the platform 410, and because the rotor 330 is wrapped around the circumferential surface of the rotating shaft 110, the length of the rotor 330 contributes little to the increase in the distance between the rotating shaft 110 and the platform 410. When the platform 410 rotates on a horizontal plane, the center of gravity of the platform 410 is low, and when the center of gravity of the platform 410 deviates from the axis of the rotating shaft 110, the vibration of the platform 410 is small, and the rotation of the platform 410 is stable.

[0059] In another embodiment, the rotor 330 and the rotating shaft 110 may be integrally provided, that is, when producing the rotating shaft 110 of the motor 100, a first annular groove 332 and a first air outlet 333 may be processed on the rotating shaft 110. At this time, the height of the center of gravity of the platform assembly 400 may also be lowered.

[0060] Reference Fig.10 and Fig.11 , Fig.10 is an axonometric view of the drive device of the second embodiment, Fig.11 yes Fig.10 Exploded diagram of the driving device in the embodiment. The driving device of the second embodiment includes a driving unit and an air slip ring 600. The driving unit is a motor 100. The motor 100 is provided with a rotating shaft 110. After the motor 100 is powered on, the rotating shaft 110 can rotate around the axis in the up-down direction. The air slip ring 600 includes a rotor 610, a second sealing ring 620 and a stator 630. The rotor 610 is rotatably connected to the stator 630, and the upper end of the rotor 610 is fixedly connected to the rotating shaft 110. Specifically, the stator 630 is provided with a second accommodating hole 631 in the up-down direction, the rotor 610 is placed in the second accommodating hole 631, and a rolling bearing is provided between the rotor 610 and the stator 630. The inner ring of the rolling bearing is sleeved on the rotor 610, and the outer ring of the rolling bearing is abutted against the inner surface of the second accommodating hole 631. Therefore, by providing the second accommodating hole 631 and the rolling bearing, the rotating connection between the rotor 610 and the stator 630 is realized.

[0061] Reference Figures 12 to 16 , Fig.12 yes Fig.10 A front view of the middle stator 630, Fig.13 yes Fig.12 A cross-sectional view of the middle stator 630 along section BB, Fig.14 yes Fig.10 A front view of the middle rotor 610, Fig.15 yes Fig.14 The cross-sectional view of the middle rotor 610 along the CC section. The stator 630 is provided with a first air inlet 633 and a second air inlet 636 (see Fig.13 ), the rotor 610 is provided with a first air outlet 613 and a second air outlet 614 (refer to Fig.15 ), the first air inlet 633 is connected to the first air outlet 613, and the second air inlet 636 is connected to the second air outlet 614.

[0062] Specifically, the first air inlet hole 633 and the second air inlet hole 636 are both arranged along the radial direction of the stator 630. The first air inlet hole 633 connects the second accommodating hole 631 with the outer circumferential surface of the stator 630, and the second air inlet hole 636 also connects the second accommodating hole 631 with the outer circumferential surface of the stator 630. The first air outlet hole 613 and the second air outlet hole 614 are both arranged along the axial direction of the rotor 610. The upper end of the first air outlet hole 613 is connected to the first air inlet hole 633, and the lower end of the first air outlet hole 613 extends to the lower end surface of the rotor 610. The upper end of the second air outlet hole 614 is connected to the second air inlet hole 636, and the lower end of the second air outlet hole 614 extends to the lower end surface of the rotor 610.

[0063] In order to make the upper end of the first air outlet hole 613 communicate with the first air inlet hole 633, a first annular groove 611 is provided on the outer circumferential surface of the rotor 610, and the upper end of the first air outlet hole 613 communicates with the first annular groove 611. After the rotor 610 is placed in the second accommodating hole 631, the first annular groove 611 is aligned with the first air inlet hole 633, thereby achieving the communication between the upper end of the first air outlet hole 613 and the first air inlet hole 633. In addition, during the rotation of the rotor 610 relative to the stator 630, since the first air inlet hole 633 can always be aligned with the first annular groove 611, the first air inlet hole 633 can always be communicated with the first annular groove 611, and finally the upper end of the first air outlet hole 613 can always be communicated with the first air inlet hole 633.

[0064] In order to make the upper end of the second air outlet 614 communicate with the second air inlet 636, a third annular groove 612 is further provided on the outer circumferential surface of the rotor 610. The upper end of the second air outlet 614 communicates with the third annular groove 612. After the rotor 610 is placed in the second accommodating hole 631, the third annular groove 612 is aligned with the second air inlet 636. Thus, the upper end of the second air outlet 614 can always communicate with the second air inlet 636, and the second suction nozzle 920 can also work normally during the process of the rotor 610 rotating relative to the stator 630.

[0065] The first annular groove 611 is located above the third annular groove 612, and the first annular groove 611 and the third annular groove 612 are not connected to each other. Therefore, when the negative pressure gas passes through the rotor 610, there will be no cross-flow.

[0066] In order to prevent air leakage from the gap between the stator 630 and the rotor 610, a fourth annular groove 632, a fifth annular groove 634 and a sixth annular groove 635 are provided on the surface of the second accommodating hole 631 (see Fig.13 ). After the rotor 610 is placed in the second accommodating hole 631, the first annular groove 611 is located between the fourth annular groove 632 and the fifth annular groove 634, and the third annular groove 612 is located between the fifth annular groove 634 and the sixth annular groove 635. A second sealing ring 620 is placed in each of the fourth annular groove 632, the fifth annular groove 634 and the sixth annular groove 635.

[0067] The second sealing ring 620 is generally made of elastically deformable rubber. After the three second sealing rings 620 are respectively placed in the fourth annular groove 632, the fifth annular groove 634 and the sixth annular groove 635, the second sealing rings 620 are squeezed and deformed, so that the second sealing rings 620 are simultaneously abutted against the surface of the second accommodating hole 631 and the outer circumferential surface of the rotor 610, thereby preventing gas from entering the first annular groove 611 and the third annular groove 612 from the gap between the stator 630 and the rotor 610.

[0068] In this embodiment, in order to realize the fixed connection between the rotor 610 and the rotating shaft 110, the rotor 610 is provided with a mounting hole 616 in the axial direction. After the rotating shaft 110 of the motor 100 is inserted into the mounting hole 616, the lower end of the rotating shaft 110 abuts against the second limiting ring 615. The rotor 610 is further provided with a fourth threaded hole 617 in the radial direction, and the first set screw is screwed into the fourth threaded hole 617 to fix the rotating shaft 110 in the mounting hole 616, thereby realizing the fixed connection between the rotor 610 and the rotating shaft 110.

[0069] Reference Fig.16 and Fig.18 , Fig.16 is an isometric view of a wafer handling device including a drive device of the second embodiment, Fig.18 yes Figure 1Exploded diagram of the wafer pick-and-place device. The wafer pick-and-place device of this embodiment includes a driving device, a second frame 500, a mounting seat 700, a swing arm assembly 800, a first suction nozzle 910 and a second suction nozzle 920. The driving device includes a motor 100 and an air slip ring 600, the motor 100 is locked and fixed on the second frame 500, and the mounting seat 700 is connected to the driving unit through the air slip ring 600. Under the action of the motor 100, the mounting seat 700 can rotate around the axis in the up and down directions. There are two swing arm assemblies 800, the first suction nozzle 910 is connected to the mounting seat 700 through a swing arm assembly 800, and the first suction nozzle 910 is located at the front side of the mounting seat 700, and the second suction nozzle 920 is connected to the mounting seat 700 through another swing arm assembly 800, and the second suction nozzle 920 is located at the rear side of the mounting seat 700. The first suction nozzle 910 and the second suction nozzle 920 are both connected to the negative pressure gas source through the air slip ring 600.

[0070] Specifically, the stator 630 of the air slip ring 600 is locked and fixed on the second frame 500, and the lower end of the rotor 610 of the air slip ring 600 is fixedly connected to the mounting seat 700. Therefore, under the drive of the motor 100, the rotating shaft 110 can drive the mounting seat 700 to rotate around the axis in the vertical direction, and the first suction nozzle 910 and the second suction nozzle 920 can rotate on the horizontal plane.

[0071] In order to make the first suction nozzle 910 and the second suction nozzle 920 communicate with the negative pressure air source respectively, the first air inlet 633 and the second air inlet 636 are communicated with the negative pressure air source through the air pipe respectively, the first suction nozzle 910 is communicated with the lower end of the first air outlet 613, and the second suction nozzle 920 is communicated with the lower end of the second air outlet 614, thereby realizing the communication between the first suction nozzle 910 and the negative pressure air source and the communication between the second suction nozzle 920 and the negative pressure air source respectively. In addition, the air intake action of the first air inlet 633 and the air intake action of the second air inlet 636 can be controlled by the solenoid valve respectively, and the first suction nozzle 910 and the second suction nozzle 920 can work independently respectively.

[0072] Compared with the conventional structure in which the rotating shaft 110 is connected and fixed to the rotor 610 through a coupling, the driving device of the second embodiment has no coupling between the rotating shaft 110 and the mounting seat 700, and because the rotor 610 is wrapped on the circumferential surface of the rotating shaft 110, the length of the rotor 610 contributes little to the increase in the distance between the rotating shaft 110 and the mounting seat 700. When the first suction nozzle 910 rotates on a horizontal plane, the swing arm 820 is not easy to vibrate, and the positioning accuracy of the first suction nozzle 910 is high and the positioning time is short.

[0073] Reference Fig.18 and Fig. 20 , Fig. 20 yes Fig.16A top view of the mounting seat 700. In order to realize the installation and fixation of the first suction nozzle 910 and the second suction nozzle 920, a mounting seat 700 and a swing arm assembly 800 are provided, and the mounting seat 700 is locked and fixed to the lower end of the rotor 610. Specifically, a third through hole 710 is provided in the middle of the mounting seat 700, and a screw passes through the third through hole 710 and is tightened on the lower end of the rotor 610, thereby locking and fixing the mounting seat 700 on the rotor 610.

[0074] In order to conduct the first air outlet 613 on the rotor 610 through the mounting seat 700, the mounting seat 700 is provided with air holes, and the air holes include a first air hole 720 and a second air hole 730. The first air hole 720 is arranged in the up-down direction, and the first air hole 720 is aligned with the first air outlet 613. The second air hole 730 is arranged in the front-to-back direction, and the lower end of the first air hole 720 is connected to the rear end of the second air hole 730. As a result, the first suction nozzle 910 is connected to the front end of the second air hole 730 through the air pipe, thereby achieving communication with the first air outlet 613. The structure in which the second air outlet 614 is connected to the second air outlet 614 through the mounting seat 700 is the same as the above structure, and will not be repeated here.

[0075] Taking the first suction nozzle 910 as an example, the structure in which the first suction nozzle 910 is connected to the mounting base 700 through the swing arm assembly 800 is described.

[0076] Reference Fig.18 and Fig.23 , Fig. 22 yes Fig.16 Axonometric drawing of the central subject, Fig.23 yes Fig.16 The swing arm assembly 800 includes an adjusting screw 810, a swing arm 820, a spring 830, a first pressing plate 840, a second pressing plate 850, a positioning screw 860 and an elastic element. The swing arm 820 includes a main body 821 and a connecting block 822. The rear end of the connecting block 822 is connected to the mounting seat 700. The front end of the connecting block 822 is fixedly connected to the rear end of the main body 821 (fixed by screw locking). The first suction nozzle 910 is fixed to the rear end of the main body 821.

[0077] In order to fix the first suction nozzle 910 at the end of the main body 821 away from the connecting block 822, a second through hole 871 is opened on the front end of the main body 821 (refer to Fig. 22 ), and a separation slit 873 connected to the second through hole 871, the separation slit 873 separates the front end of the main body 821 into a first clamping block 872 and a second clamping block 874. After the first suction nozzle 910 is inserted into the second through hole 871, one end of the screw passes through the first clamping block 872 and the second clamping block 874 and then screws on the nut, the screw and the nut make the first clamping block 872 and the second clamping block 874 close to each other, so that the first suction nozzle 910 is clamped in the second through hole 871.

[0078] Reference Fig. 20 , Fig.21 and Fig.23 , Fig.21 yes Fig. 20 A cross-sectional view of the mounting seat 700 along the DD section. In order to buffer the process from motion to rest when the first suction nozzle 910 approaches the wafer, a spring 830 and an elastic element are provided. Specifically, the rear end of the connecting block 822 is provided with an insert block 882 (refer to Fig.23 ), a receiving cavity 790 is provided in the mounting seat 700, a fifth through hole 760 is provided at the front end of the mounting seat 700 along the front-to-back direction, a rear end of the fifth through hole 760 is communicated with the receiving cavity 790, and a front end of the fifth through hole 760 extends to the front end surface of the mounting seat 700. The insert block 882 passes through the fifth through hole 760, and a rear end of the insert block 882 is placed in the receiving cavity 790, and the insert block 882 and the fifth through hole 760 are in clearance fit.

[0079] Reference Fig.16 , Fig.17 , Fig.12 , Fig.19 and Fig.23 , Fig.17 yes Fig.16 In order to realize the flexible connection between the swing arm 820 and the mounting seat 700, a first notch 770 is provided on the lower surface of the front end of the mounting seat 700 (refer to Fig.19 ), a second notch 881 is provided at the rear end of the connecting block 822 (refer to Fig.23 The spring piece 830 includes a first section 831, a second section 832 and a third section 833. The second section 832 is located between the first section 831 and the third section 833. The first section 831 is placed in the first notch 770 and is fixedly connected to the mounting seat 700. The third section 833 is placed in the second notch 881 and is fixedly connected to the connecting block 822. Thus, the swing arm 820 can be swung slightly around the axis in the left-right direction relative to the mounting seat 700 through the bending deformation of the second section 832, and the swing arm 820 will not be separated from the fifth through hole 760.

[0080] In order to realize the fixed connection between the first section 831 and the mounting seat 700, a first pressing plate 840 is provided. The first pressing plate 840 is located at the lower side of the spring sheet 830, and one end of the screw passes through the first pressing plate 840 and the spring sheet 830 in sequence, and is threadedly matched with the mounting seat 700, so that the first pressing plate 840 is locked and fixed on the mounting seat 700. Similarly, the second section 832 is fixedly connected to the connecting block 822 through the second pressing plate 850, which is not repeated here.

[0081] In this embodiment, the elastic element is a compression spring. The insert block 882 has a sixth through hole 884 (see Fig.23), the mounting seat 700 has a stepped hole 740 along the vertical direction (refer to Fig.21 ), after the positioning screw 860 passes through the sixth through hole 884 and the stepped hole 740 in sequence, the compression spring is sleeved on the positioning screw 860, and then the positioning nut 870 is screwed on. At the same time, the insert block 882 is provided with a fifth threaded hole 883 along the left and right directions (refer to Fig.23 ), the fifth threaded hole 883 is connected to the sixth through hole 884, and the fourth fixing screw is screwed into the fifth threaded hole 883, so as to lock and fix the positioning screw 860 on the connecting block 822.

[0082] Thus, the lower end of the compression spring abuts against the mounting seat 700 , and the upper end of the compression spring abuts against the positioning nut 870 . The compression spring applies an upward force to the positioning nut 870 , that is, the compression spring applies an upward force to the connecting block 822 .

[0083] When the first suction nozzle 910 does not contact the wafer, the compression spring applies an upward force to the second end of the swing arm 820 (the rear end of the swing arm 820 is the second end), the first end of the swing arm 820 is fixed with the first suction nozzle 910, and the spring piece 830 is located between the first end of the swing arm 820 and the second end of the swing arm 820. The entire swing arm 820 is a lever structure, wherein the spring piece 830 that plays a fixed connection role is a fulcrum, the first end of the swing arm 820 tilts upward under the action of the compression spring, and the first suction nozzle 910 at the first end of the swing arm 820 falls downward.

[0084] After the first suction nozzle 910 contacts the wafer, the first suction nozzle 910 at the first end of the swing arm 820 is subjected to an upward force, and the second end of the swing arm 820 overcomes the pressure of the compression spring and swings downward, so that the first suction nozzle 910 can move upward and be buffered, and the first suction nozzle 910 and the wafer are not easily damaged.

[0085] In order to facilitate the adjustment of the fifth set screw of the fixed positioning screw 860, the mounting seat 700 is provided with an avoidance hole 780 in the left and right directions (refer to Fig.19 ), the avoidance hole 780 is communicated with the accommodating cavity 790, and the avoidance hole 780 is coaxially arranged with the fifth threaded hole 883. Thus, the fifth set screw can be adjusted through the avoidance hole 780, thereby fixing or loosening the positioning screw 860.

[0086] In another embodiment, the elastic element may also be a bellows or a rubber column, and the installation method of the bellows or the rubber column is the same as that of the compression spring.

[0087] In order to adjust the initial angle of the swing arm 820 and facilitate the first suction nozzle 910 to suck the wafer, an adjustment screw 810 is provided. The mounting seat 700 is provided with a sixth threaded hole 750 (refer to Fig.19), the sixth threaded hole 750 is connected to the accommodating chamber 790. After one end of the adjusting screw 810 is screwed into the sixth threaded hole 750, it extends out from the lower end of the sixth threaded hole 750 and abuts against the insert block 882 of the connecting block 822 extending into the accommodating chamber 790. Since the insert block 882 will tilt upward under the action of the compression spring, it will be in contact with the adjusting screw 810 when tilted, thereby positioning the connecting block 822. By rotating the adjusting screw 810 and adjusting the length of the adjusting screw 810 extending from the lower end of the sixth threaded hole 750, the initial angle of the swing arm 820 can be adjusted.

[0088] The present invention also relates to an automated device, comprising the above-mentioned driving device, the driving device is used to drive the suction nozzle to rotate, thereby realizing the loading of the wafer. The automated device can be a wafer bonding machine, or a wafer arranging machine.

[0089] The embodiments of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above embodiments. Various changes can be made within the knowledge of ordinary technicians in the relevant technical field without departing from the purpose of the present invention. In addition, the embodiments of the present invention and the features in the embodiments can be combined with each other without conflict.

Claims

1. An automated device, characterized in that: include: A driving unit, wherein the driving unit comprises a rotating shaft; An air sliding ring, the air sliding ring comprising a stator and a rotor, the rotor being covered on the circumferential surface of the rotating shaft, the rotor being fixed relative to the rotating shaft, the stator being rotatably connected to the rotor, the stator being provided with a first air inlet, the rotor being provided with a first air outlet, the first air inlet being communicated with the first air outlet; A mounting base connected to the rotor; A swing arm assembly, comprising a swing arm, a spring sheet and an elastic element, wherein the elastic element abuts against the mounting seat and the swing arm respectively; the spring sheet comprises a first section, a second section and a third section, wherein the second section is located between the first section and the third section, the first section is connected to the mounting seat, and the third section is connected to the swing arm, so that the swing arm can swing relative to the mounting seat; The first suction nozzle is connected to the swing arm.

2. The automation equipment according to claim 1, characterized in that: The rotating shaft is integrally arranged with the rotor.

3. The automation equipment according to claim 1, characterized in that: The rotor is provided with a mounting hole along the axial direction, and the rotating shaft is placed in the mounting hole.

4. The automation equipment according to claim 3, characterized in that: The rotor is locked on the rotating shaft by a first set screw.

5. The automation equipment according to claim 3, characterized in that: The rotor and the rotating shaft are connected via a key.

6. The automation equipment according to any one of claims 1 to 5, characterized in that: A first annular groove is arranged on the outer circumferential surface of the rotor, the first air outlet is arranged along the axial direction of the rotor, and the first air inlet and the first air outlet are both connected to the first annular groove.

7. The automation equipment according to claim 6, characterized in that: A sealing ring is further arranged between the stator and the rotor, and two sealing rings are arranged, and the two sealing rings are respectively located on both sides of the first annular groove.

8. The automation equipment according to any one of claims 1 to 5, characterized in that: The stator is also provided with a second air inlet, and the rotor is provided with a second air outlet, and the second air inlet is communicated with the second air outlet.

9. The automation equipment according to any one of claims 1 to 5, characterized in that: The automation equipment is a motor or a rotary cylinder.

Images