A high-sensitivity MEMS graphene wind speed and direction sensor chip

Abstract

A high-sensitivity MEMS graphene wind speed and direction sensor chip, the sensor includes: a glass substrate, a plurality of glass through holes are opened on the glass substrate, and a heat-conducting metal is arranged in the glass through holes; a temperature measuring component is arranged on the upper surface of the glass substrate and located at the top of the glass through hole, and is used to detect the change of resistance; a heating component is arranged at the bottom of the glass through hole, and is used to generate a measurement reference temperature; and an interconnection component is arranged on both sides of the interconnection component to derive the electrical signal of the temperature measuring component. The beneficial effect of the present invention is that the present invention adopts a double-sided layout, the upper surface of the glass substrate is distributed with a detection unit for temperature measurement, and the lower surface is provided with a heating resistor for heating. The heat emitted by the heating resistor can be conducted to the graphene temperature measuring unit at the shortest distance, which reduces the time for the heat of the sensor with a single-sided layout to be conducted from the substrate surface to the back of the substrate, thereby greatly improving the accuracy, sensitivity and response rate of wind measurement.

Description

Technical Field

[0001] The present invention relates to the technical field of fluid measurement, and particularly to a high-sensitivity MEMS graphene wind speed and direction sensor chip. Background Art

[0002] The improvement of the living standards of human beings has promoted the continuous development of science and technology. Nowadays, in daily life, the requirements for meteorological and environmental monitoring are increasing day by day. Moreover, for the measurement requirements of wind speed and direction in the military field, the research and development of MEMS wind speed and direction sensors is a difficult problem that has not been well solved in China at present. Especially the measurement under harsh environments for a long time is one of the important problems faced currently.

[0003] Whether it is cold weapons, hot weapons, nuclear weapons or high-tech weapons, their combat performances are all affected by weather and climate without exception. According to the news from the China National Meteorological Center, military meteorological experts explained that meteorological conditions have a direct impact on war. The impact of meteorological conditions on artillery activities is mainly on the firing of guns. The projectile flying in the air is constantly affected by meteorological conditions. Due to the change of meteorological conditions, it directly affects the accuracy of the projectile hitting the target. The shell is affected by air resistance when flying in the air. The magnitude of air resistance not only depends on the shape of the projectile itself and the flight mode, but also is affected by meteorological conditions such as wind. Therefore, when firing ground artillery, the deviation caused by wind to the shell hitting the target must be corrected. Wind can change the speed and direction of the relative movement of the shell in the atmosphere. The longitudinal wind (wind parallel to the firing direction) can make the impact point far or near. When there is a tailwind, the resistance decreases and it is easy to produce a long shot; when there is a headwind, the resistance increases and it is easy to produce a short shot. The crosswind (wind perpendicular to the firing direction) can make the impact point deviate to the left or right. When the wind blows from an oblique direction, it is considered according to the vector relationship by decomposing it into longitudinal wind and crosswind to consider its impact. The bullet is also affected by wind during its flight. The longitudinal wind affects the height of the ballistic trajectory, the height of the burst point and the horizontal distance. When there is a headwind, the position of the burst point is lower and the distance is closer; the opposite is true for a tailwind. Taking a 100-mm anti-aircraft gun as an example, when there is no wind, the height of the burst point is 8000 meters and the horizontal distance is 1000 meters. When there is a 10 m / s headwind in the whole layer of air, it is calculated that the burst point can be reduced by 24 meters and the horizontal distance can be shortened by 140 meters according to the calculation. The crosswind mainly makes the ballistic trajectory deviate from the shooting plane.

[0004] Still taking the above example, if there is a 10 m / s crosswind blowing to the right (left), the position of the burst point can be deviated to the right (left) by about 114 meters. Therefore, when firing an anti-aircraft gun, the deviation amount of the wind must be corrected. Usually, the meteorological service personnel of the troops will accurately measure the wind speed and direction at that time and place, then calculate the wind distribution according to a hypothetical distribution of wind with height and make corresponding corrections to the design parameters, and then make corresponding adjustments to the firing elements.

[0005] Compared with traditional warfare, long-range precision strikes are an important feature of modern warfare. For modern artillery, accurate preparation of firing parameters is a prerequisite for achieving this requirement, and modern high technology provides a broad space for development to meet or achieve this goal. For long-range indirect aiming artillery, with the equipment and application of global positioning systems and various modern reconnaissance methods, the determination of local artillery positions can reach an accurate level. On the other hand, the modern fire control computers equipped are sufficient to quickly solve the trajectory (2 to 3 seconds) at the combat site. Under traditional combat conditions, artillery corrects firing parameters through test firing to achieve the purpose of correcting the impact point. Therefore, the influence of external ballistic parameters such as wind on the range and accuracy of projectiles can be compensated by on-site test firing corrections even if they are not very accurate. Modern warfare requires that artillery systems can effectively strike targets with high first-group coverage or first-shot hit rate. The hit rate of the first shell has become a key factor in determining the victory or defeat of the war and the survival of one's own side. In artillery positions, cup wind speed and direction sensors (cup anemometers) are generally used. Since the sensor uses a mechanical transmission structure and has movable parts, it will be mechanically worn out after long-term use, and its accuracy will be affected, making it inconvenient to read. In addition, due to mechanical inertia, it cannot capture the slight changes in instantaneous wind speed, resulting in large errors and low resolution during measurement. Obviously, traditional wind speed and direction sensors cannot meet the requirements of accurate measurement. On-site real-time and accurate measurement of wind speed and direction has become an urgent task.

[0006] Based on the temperature-sensitive properties of graphene materials, it can quickly and effectively sense instantaneous wind changes and can be widely used in the demand for accurate and real-time measurement of wind speed and direction. This project mainly studies graphene wind speed and direction sensors, which will play a significant role in breaking through the research barriers of high-precision, high-sensitivity, and high-resolution wind speed and direction sensors, achieving the autonomy of key technologies, and improving weapon performance and equipment reliability. Summary of the invention

[0007] In order to effectively solve the deficiencies of the above-mentioned background technology problems, a high-sensitivity MEMS graphene wind speed and direction sensor chip is designed by using graphene materials instead of metal materials and other semiconductor materials. The graphene temperature-sensitive element is placed in the wind-sensing area, and the heat generated by the heating resistor on the lower surface of the substrate is transferred to the surface of the substrate by heat transfer, so that the temperature at the temperature measuring element on the surface of the substrate remains consistent. The heated graphene material is affected by the electron-phonon coupling, and the resistivity changes accordingly, and the resistance also changes. When the wind blows through the sensor substrate, it takes away part of the heat, causing the resistance of the graphene to change again. Finally, the change in the conductivity of the graphene film is detected by an external detection circuit to achieve temperature measurement.

[0008] A high-sensitivity MEMS graphene wind speed and direction sensor chip can work normally in an environment with a wind speed of 0-30m / s. The sensor includes:

[0009] A glass substrate, wherein a plurality of through-glass holes are formed on the glass substrate, and a heat-conducting metal is disposed in the through-glass holes;

[0010] A temperature measuring component, arranged on the upper surface of the glass substrate and located at the top of the through-glass hole, for detecting a change in resistance;

[0011] A heating component, disposed at the bottom of the through-glass hole, for generating a measurement reference temperature;

[0012] And an interconnection component is arranged on both sides of the interconnection component to derive the electrical signal of the temperature measurement component.

[0013] Optionally, the temperature measurement component includes: a graphene temperature measurement unit and a first metal electrode, wherein the first metal electrodes are respectively arranged at two ends of the graphene temperature measurement unit and connected to the graphene temperature measurement unit through wiring.

[0014] Optionally, the graphene temperature measuring unit is a temperature-sensitive nanofilm, comprising: a graphene film layer, a boron nitride film layer respectively arranged above and below the graphene film layer, and an internal interconnection electrode, the internal interconnection electrode respectively covers the two exposed ends of the graphene film layer, and the internal interconnection electrode is connected to the first metal electrodes located on both sides of the graphene temperature measuring unit through wiring.

[0015] Optionally, the plurality of glass through holes are arranged in a ring array, and the plurality of groups of temperature measuring components are arranged in a ring-shaped symmetrical manner.

[0016] Optionally, a glass through hole is provided on the glass substrate, and a temperature measuring component is arranged on each glass through hole. The graphene temperature measuring units of the temperature measuring components are centrally symmetrical and evenly distributed in the circumferential direction, and the angle between adjacent graphene temperature measuring units is 45°.

[0017] Optionally, the heating component includes: a heating resistor and a second metal electrode, the heating resistor is arranged on the lower surface of the glass substrate and located at the bottom of the through-glass hole, and both ends of the heating resistor are respectively connected to the second metal electrode.

[0018] Optionally, the interconnection component includes: an interconnection pad, a lead column and an external interconnection electrode, the interconnection pad is arranged on the upper surface of the glass substrate and connected to the adjacent first metal electrode, the external interconnection electrode is arranged at the bottom of the glass substrate, the lead column is penetrated in the glass substrate, and the two ends of the lead column are respectively connected to the interconnection pad and the external interconnection electrode, and the lead column is connected to the external circuit through the external interconnection electrode to transmit signals.

[0019] Optionally, the through glass hole includes a single-hole structure or a multi-hole structure.

[0020] Optionally, the high-sensitivity MEMS graphene wind speed and direction sensor chip further includes a silicon nitride protective layer, which covers the upper and lower surfaces of the glass substrate respectively, and covers the temperature measurement component and the heating component on the upper and lower surfaces of the glass substrate respectively.

[0021] Optionally, the high-sensitivity MEMS graphene wind speed and direction sensor chip further includes a barrier layer, which is disposed between the internal interconnection electrode and the glass substrate.

[0022] The beneficial effects of the present invention are as follows: The present invention adopts a double-sided layout form. The upper surface of the glass substrate is distributed with a detection unit for temperature measurement, and the lower surface is provided with a heating resistor for heating. The heat generated by the heating resistor can be conducted to the graphene temperature measurement unit at the shortest distance, reducing the time for the heat of the sensor with a single-sided layout to be conducted from the substrate surface to the back surface of the substrate. Therefore, the accuracy, sensitivity, and response rate of wind measurement can be greatly improved. And since the graphene temperature measurement unit is arranged on the upper surface of the glass substrate, it can sense the change of wind to the greatest extent, and the response speed will also be greatly improved compared with the traditional back wind-sensing type wind speed and direction sensor. And the graphene temperature measurement units are distributed in a ring-shaped central symmetry, which has an equivalent property for wind direction measurement. No matter from which direction the wind comes, the angle range can be reduced to within 45°, which can improve the accuracy of wind direction measurement. The use of the graphene temperature measurement unit greatly increases the temperature measurement range and accuracy of the temperature sensor, and due to the high thermal conductivity of the graphene material, the response speed of the device is effectively improved. The graphene temperature measurement unit is wrapped by silicon nitride and the substrate, effectively eliminating the interference factors in the surrounding environment, and the silicon nitride isolates the direct contact between the graphene film and the outside world, thereby improving the corrosion resistance and stability of the device. And compared with the existing basic structure, the structure of the present invention is simpler, has high measurement sensitivity, can be applied to extremely harsh test environments, and is an ideal wind speed and direction sensor. It can work in a wind speed environment of 0 - 30 m / s to realize the measurement of wind speed and direction, and is acid and alkali resistant, corrosion resistant, and has high application value. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 is a schematic external structure diagram of the present invention;

[0024] Figure 2 is a schematic cross-sectional view of a part of the structure of the present invention;

[0025] Figure 3 is a schematic top view of the structure of the temperature measurement component of the present invention;

[0026] Figure 4 is a bottom view of the structure of the temperature measurement component of the present invention;

[0027] Figure 5Schematic structural diagram of the graphene temperature measurement unit of the present invention;

[0028] Figure 6 Top view schematic diagram of the graphene thin film layer of the embodiment of the present invention;

[0029] As shown in the figure, the list of reference numerals is as follows:

[0030] 1, 6 - Interconnect pads; 2, 5 - First metal electrodes; 3, 7 - Lead pillars; 4 - Graphene temperature measurement unit; 8, 15 - Silicon nitride protective layers; 9, 14 - External interconnect electrodes; 10, 13 - Second metal electrodes; 11 - Heat - conducting metal; 12 - Heating resistor; 16 - Glass substrate; 17 - Boron nitride thin film layer; 18 - Internal interconnect electrode; 19 - Graphene thin film layer; 20 - Barrier layer; 21 - Wiring. Detailed implementation manners

[0031] The embodiments of the present invention will be described in detail below. The examples of the embodiments are shown in the drawings, where the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the drawings are exemplary and are only used to explain the present invention and should not be construed as a limitation of the present invention.

[0032] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by terms such as "center", "upper", "lower", "front", "rear", "left", "right", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred combination or element must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation of the present invention. In addition, during the description of the embodiments of the present invention, for the positional relationships of "upper", "lower", "front", "rear", "left", "right", etc. of all the devices in the drawings, they are all based on Figure 1 as the standard.

[0033] In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, the terms "connected" and "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0034] The following further describes the present invention with reference to the drawings:

[0035] Such as Figure 1 、 2As shown, a high-sensitivity MEMS graphene wind speed and direction sensor chip can work normally in an environment with a wind speed of 0 - 30 m / s. The sensor includes:

[0036] A glass substrate 16, on which a plurality of glass through-holes are provided, and a heat-conducting metal 11 is arranged in the glass through-holes;

[0037] A temperature measurement component, which is arranged on the upper surface of the glass substrate 16 and at the top of the glass through-hole, and is used to detect the change in resistance;

[0038] A heating component, which is arranged at the bottom of the glass through-hole and is used to generate a measurement reference temperature;

[0039] And an interconnection component, which is arranged on both sides of the interconnection component to export the electrical signal of the temperature measurement component.

[0040] As Figure 2 shown, the heat-conducting metal 11 is arranged in the glass through-hole by electroplating or printing. The heat-conducting metal 11 includes copper, gold or other metals with high thermal conductivity, and can be filled by thick film processes such as electroplating or printing. Filling the heat-conducting metal 11 in the glass through-hole can quickly conduct the heat generated by the heating component to the temperature measurement component, and utilize the high thermal conductivity of metals with high thermal conductivity such as copper to achieve the effect of rapid heat transfer and improved response rate.

[0041] The glass through-hole plays a role in rapid heat conduction. The glass through-hole includes a single-hole structure or a porous structure, and is a single-hole structure in the embodiment.

[0042] As Figure 2 shown, the temperature measurement component includes: a graphene temperature measurement unit 4 and first metal electrodes 2, 5. The first metal electrodes 2, 5 are respectively arranged at both ends of the graphene temperature measurement unit 4 and are connected to the graphene temperature measurement unit 4 through wiring. The shape of the graphene temperature measurement unit 4 includes, but is not limited to, a square or a circle. The graphene temperature measurement unit 4 is arranged on the upper surface of the glass substrate 16, so it can contact the wind for the first time, thereby improving the response time.

[0043] As Figure 5 、 6 shown, the graphene temperature measurement unit 4 is a temperature-sensitive nano-film. The graphene temperature measurement unit 4 includes: a graphene film layer 19, boron nitride film layers 17 respectively arranged on the upper and lower sides of the graphene film layer 19, and internal interconnection electrodes 18. The internal interconnection electrodes 18 respectively cover the exposed two ends of the graphene film layer 19, and the internal interconnection electrodes 18 are connected to the first metal electrodes 2, 5 located on both sides of the graphene temperature measurement unit 4 through wiring. In other embodiments, the number of layers of the boron nitride film layer 17 is greater than or equal to 1, and the graphene film layer 19 is a single-layer structure.

[0044] As shown Figure 6 in FIG. 1, the graphene thin film layer 19 includes, but is not limited to, a folded structure, and may also be a disc shape in other embodiments.

[0045] As shown Figure 3 in 4 FIG. 2, a plurality of the glass through holes are arranged in an annular array, and a plurality of the temperature measuring assemblies are arranged symmetrically in a ring. Preferably, 8 glass through holes are formed in the glass substrate 16, and a temperature measuring assembly is arranged on each glass through hole. The graphene temperature measuring units 4 of the 8 groups of temperature measuring assemblies are centrosymmetric and evenly distributed in the circumferential direction, and the included angle between adjacent graphene temperature measuring units 4 is 45°. Compared with the traditional wind speed and direction sensor, in which the temperature measuring units are arranged in an array in the east-west and north-south directions and the angle can only be reduced to within the range of 90°, for the graphene temperature measuring unit 4 of the present invention, when the wind blows over the surface of the sensor, the range of the wind direction can be locked within ±45° of this point according to the lowest temperature. Its advantage is that the measurement of the wind direction has an equivalent property. No matter from which direction the wind comes, the angle range can be reduced to within 45°. Therefore, the accuracy of the wind direction measurement can be improved.

[0046] As shown Figure 2 in FIG. 3, the heating assembly includes: a heating resistor 12 and second metal electrodes 10, 13. The heating resistor 12 is arranged on the lower surface of the glass substrate 16 and at the bottom of the glass through hole. The two ends of the heating resistor 12 are respectively connected to the second metal electrodes 10, 13. The heating resistor 12 is a folded structure or a disc type structure corresponding to the graphene thin film layer 19. The heating resistor 12 can be connected to an external processing circuit through the second metal electrodes 10, 13 and leads to export the measured data, and the current wind speed and direction information can be obtained through external processing. The material of the heating resistor 12 is a high resistivity material, such as Pt. The heating resistor 12 is arranged on the lower surface of the glass substrate 16 to heat the entire glass substrate 16 so that the temperature at each graphene temperature measuring unit 4 is consistent.

[0047] The number of folded lines of the graphene thin film layer 19 and the heating resistor 12 is multiple.

[0048] As shown Figure 2As shown in the figure, the interconnect component includes interconnect pads 1 and 6, lead posts 3 and 7, and external interconnect electrodes 9 and 14. The interconnect pads 1 and 6 are disposed on the upper surface of the glass substrate 16 and are connected to adjacent first metal electrodes 2 and 5. The external interconnect electrodes 9 and 14 are disposed at the bottom of the glass substrate 16. The lead posts 3 and 7 penetrate through the glass substrate 16. The two ends of the lead posts 3 and 7 are respectively connected to the interconnect pads 1 and 6 and the external interconnect electrodes 9 and 14. The lead posts 3 and 7 are used to export the signals measured by the graphene temperature measurement unit 4 and are connected to an external circuit through the external interconnect electrodes 9 and 14 to transmit the signals.

[0049] Embodiment 2:

[0050] As Figure 2 shown in the figure, the high-sensitivity MEMS graphene wind speed and direction sensor chip further includes silicon nitride protective layers 8 and 15. The silicon nitride protective layers 8 and 15 respectively cover the upper and lower surfaces of the glass substrate 16 and cover the temperature measurement component and the heating component on the upper and lower surfaces of the glass substrate 16 respectively, for protecting the temperature measurement component and the heating component, isolating the direct contact between the temperature measurement component and the heating component and the outside world, and providing an oxygen-free protection.

[0051] Embodiment 3:

[0052] As Figure 5 shown in the figure, the high-sensitivity MEMS graphene wind speed and direction sensor chip further includes a barrier layer 20. The barrier layer 20 is disposed between the internal interconnect electrode 18 and the glass substrate 16. The barrier layer 20 isolates the internal interconnect electrode 18 from the glass substrate 16. The barrier layer 20 serves as a wetting layer and a protective layer to prevent the mutual diffusion of metal atoms and substrate atoms at high temperatures.

[0053] The principle of the present invention is:

[0054] The heat generated by the heating resistor on the lower surface of the sensor glass substrate is quickly conducted to the upper surface of the glass substrate through the high thermal conductivity of the heat-conducting metal in the glass through-hole. Under the condition of no wind and only natural convection, due to symmetry, the 8 circumferentially uniformly distributed graphene temperature measurement units on the substrate surface are at the same temperature and have equal resistances. When the wind speed is non-zero, the heat exchange between the fluid and the substrate occurs in the form of forced convection. Due to the action of the fluid viscous force and the no-slip condition of the wall surface, starting from the wind-sensing edge of the substrate on the substrate surface, there is a very thin velocity boundary layer and thermal boundary layer. Within the boundary layer, there are large velocity gradients and temperature gradients along the normal direction of the wall surface. Moreover, the thickness of the boundary layer gradually increases from upstream to downstream. Correspondingly, the forced convection heat transfer coefficient between the wall surface and the air changes. The thickness of the thermal boundary layer at the front end of the substrate is smaller, the convective heat transfer coefficient is larger, and more heat is lost. Therefore, the temperature at the front end is relatively low, while the situation at the rear end of the substrate is the opposite. Therefore, there is a temperature difference between the upstream and downstream temperature measurement points on the substrate surface. According to the temperature-sensitive mechanism of graphene, the resistance of graphene is different at different temperatures. Since the temperature change causes the resistance of graphene to change, it is led out to the external circuit through the lead, and a certain voltage value is output. The difference in the voltage value can be used to obtain the wind speed at this time after being processed by the outside world. The principle of wind direction measurement is to decompose the wind speed vectorially. According to the temperature values measured by the temperature measurement resistors at different circumferential positions, the corresponding angle of the wind direction can be obtained using the corresponding theoretical formula. At the same time, in this process, the silicon nitride thin film isolates the temperature-sensitive nanometer thin film from direct contact with the outside world, provides an oxygen-free protection for graphene, and ensures that the sensor can work in an environment with a large wind speed, thus achieving high-sensitivity and high-precision measurement in a complex environment.

[0055] The beneficial effects of the present invention are as follows. The present invention adopts a double-sided layout form. The detection units are distributed on the upper surface of the glass substrate for temperature measurement, and heating resistors are arranged on the lower surface for heating. The heat generated by the heating resistors can be conducted to the graphene temperature measurement unit at the shortest distance, reducing the time for the heat of the sensor with a single-sided layout to be conducted from the substrate surface to the back of the substrate. Therefore, the accuracy, sensitivity, and response rate of wind measurement can be greatly improved. And since the graphene temperature measurement unit is arranged on the upper surface of the glass substrate, it can sense the wind changes to the greatest extent, and the response speed will also be greatly improved compared with the traditional back-wind-sensing anemometer and wind vane sensor. Moreover, the graphene temperature measurement units are distributed symmetrically about the center in a ring shape, and have an equivalent property for wind direction measurement. No matter from which direction the wind comes, the angle range can be reduced to within 45°, which can improve the accuracy of wind direction measurement. The use of graphene temperature measurement units greatly increases the temperature measurement range and accuracy of the temperature sensor, and due to the high thermal conductivity of the graphene material, the response speed of the device is effectively improved. The graphene temperature measurement units are wrapped by silicon nitride and the substrate, effectively eliminating the interference factors in the surrounding environment, and the silicon nitride isolates the direct contact between the graphene film and the outside world, thereby enhancing the corrosion resistance and stability of the device. Moreover, compared with the existing basic structure, the structure of the present invention is simpler, has high measurement sensitivity, and can be applied to extremely harsh test environments, and is an ideal anemometer and wind vane sensor. It can work in a wind speed environment of 0 - 30 m / s to achieve the measurement of wind speed and wind direction, and is acid and alkali resistant and corrosion resistant, having high application value.

[0056] In the description of this specification, the descriptions referring to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples", etc. mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0057] Although the embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and purposes of the present invention, and the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A high-sensitivity MEMS graphene wind speed and direction sensor chip that can operate normally in an environment with a wind speed of 0 - 30 m / s, characterized in that, The sensor includes: A glass substrate (16) with a plurality of glass through-holes formed therein, and a heat-conducting metal (11) is disposed in the glass through-holes; A temperature measurement component, which is disposed on the upper surface of the glass substrate (16) and at the top of the glass through-holes, and is used for detecting the change in resistance; A heating component, which is disposed at the bottom of the glass through-holes and is used for generating a reference temperature for measurement; And an interconnection component, which is disposed on both sides of the interconnection component to export the electrical signal of the temperature measurement component.

2. The high-sensitivity MEMS graphene wind speed and direction sensor chip according to claim 1, characterized in that The temperature measurement component includes: a graphene temperature measurement unit (4) and first metal electrodes (2, 5), and the first metal electrodes (2, 5) are respectively disposed at both ends of the graphene temperature measurement unit (4) and are connected to the graphene temperature measurement unit (4) through wiring.

3. The high-sensitivity MEMS graphene wind speed and direction sensor chip according to claim 2, wherein The graphene temperature measurement unit (4) is a temperature-sensitive nano-film, and the graphene temperature measurement unit (4) includes: a graphene film layer (19), boron nitride film layers (17) respectively disposed above and below the graphene film layer (19), and internal interconnection electrodes (18), and the internal interconnection electrodes (18) respectively cover the exposed two ends of the graphene film layer (19), and the internal interconnection electrodes (18) are connected to the first metal electrodes (2, 5) located on both sides of the graphene temperature measurement unit (4) through wiring.

4. The high-sensitivity MEMS graphene wind speed and direction sensor chip according to claim 1, wherein A plurality of the glass through-holes are arranged in a circular array, and a plurality of groups of the temperature measurement components are arranged symmetrically in a circular shape.

5. The high-sensitivity MEMS graphene wind speed and direction sensor chip according to claim 4, characterized in that There are (8) glass through-holes formed in the glass substrate (16), a temperature measurement component is disposed on each glass through-hole, and the graphene temperature measurement units (4) of the (8) groups of temperature measurement components are centrosymmetric and evenly distributed circumferentially, and the included angle between adjacent graphene temperature measurement units (4) is 45°.

6. The high-sensitivity MEMS graphene wind speed and direction sensor chip according to claim 1, wherein The heating component includes: a heating resistor (12) and second metal electrodes (10, 13), the heating resistor (12) is disposed on the lower surface of the glass substrate (16) and at the bottom of the glass through-holes, and both ends of the heating resistor (12) are respectively connected to the second metal electrodes (10, 13).

7. The high-sensitivity MEMS graphene wind speed and direction sensor chip according to claim 2, wherein The interconnection component includes: interconnection pads (1, 6), lead posts (3, 7) and external interconnection electrodes (9, 14), the interconnection pads (1, 6) are disposed on the upper surface of the glass substrate (16) and are connected to the adjacent first metal electrodes (2, 5), the external interconnection electrodes (9, 14) are disposed at the bottom of the glass substrate (16), the lead posts (3, 7) are disposed through the glass substrate (16), and both ends of the lead posts (3, 7) are respectively connected to the interconnection pads (1, 6) and the external interconnection electrodes (9, 14), and the signal is transmitted out through the external interconnection electrodes (9, 14) and connected to an external circuit.

8. The high-sensitivity MEMS graphene wind speed and direction sensor chip according to claim 1, wherein The glass through-holes include a single-hole structure or a multi-hole structure.

9. The high-sensitivity MEMS graphene wind speed and direction sensor chip according to claim 1, wherein The high-sensitivity MEMS graphene wind speed and direction sensor chip further includes silicon nitride protective layers (8, 15), and the silicon nitride protective layers (8, 15) respectively cover the upper and lower surfaces of the glass substrate (16), and respectively cover the temperature measurement component and the heating component on the upper and lower surfaces of the glass substrate (16).

10. The high-sensitivity MEMS graphene wind speed and direction sensor chip according to claim 3, wherein The high-sensitivity MEMS graphene wind speed and direction sensor chip further includes a barrier layer (20), and the barrier layer (20) is disposed between the internal interconnection electrodes (18) and the glass substrate (16).

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