A tool wear automatic detection device

Abstract

The invention relates to an automatic tool wear detection device, comprising a spindle box, a working platform and a detection component; the output end of the spindle box is connected with a tool, the spindle box can drive the tool to move in the X, Y and Z directions, and the spindle box can also drive the tool to rotate; the working platform is arranged below the spindle box; the detection component is used to measure the position of the tool in the X, Y and Z directions; the detection component comprises a tool setting sensor, and the tool setting sensor comprises an X-direction tool setting surface, a Y-direction tool setting surface and a Z-direction tool setting surface; the invention drives the tool to contact the X-direction tool setting surface, the Y-direction tool setting surface and the Z-direction tool setting surface of the tool setting sensor respectively through the spindle box, calculates the displacement difference of the spindle box in the X, Y and Z directions during the initial tool setting and the actual detection, and then obtains the tool wear amount; the machining center performs real-time detection of the tool according to the tool wear amount, and the detection can be performed without removing the tool, thereby greatly improving the detection efficiency and detection accuracy and reducing the work intensity of workers.

Description

Technical Field

[0001] The invention relates to the technical field of tool detection equipment, and in particular to an automatic tool wear detection device. Background Art

[0002] Tool wear is a common phenomenon in mechanical processing. When the tool is worn, the machining accuracy of the workpiece is reduced, the surface roughness increases, and the cutting force and cutting temperature increase, and even vibration occurs, and normal cutting cannot continue. Therefore, tool wear directly affects the processing efficiency, quality and cost. The existing wear detection component can only detect one tool at a time. When detecting the next tool, the previous tool needs to be removed and clamped before the next one is placed. The operation is complicated, the workload is large, and the efficiency is low.

[0003] Therefore, tool failures in the form of tool life, wear, tool breakage, etc. have an increasingly significant impact on the working condition of the tool and the processing efficiency and accuracy of the system.

[0004] In the prior art, the research on tool wear detection mainly includes direct measurement method and indirect measurement method. Among them, the direct measurement method detects the wear state of the tool by detecting the surface roughness, surface state and geometrical change of the tool blade through the image acquisition device, and realizes rapid detection in the occasions with relatively low machining accuracy requirements.

[0005] The existing tool measurement method is not efficient. The staff needs to manually remove the worn tools at all times, which is labor-intensive and cannot detect the wear of the tools in the X, Y, and Z directions in real time. Therefore, it is necessary to design an efficient automatic tool wear detection device. Summary of the invention

[0006] Based on this, the purpose of the present invention is to overcome the shortcomings and deficiencies in the prior art and provide an automatic tool wear detection device.

[0007] An automatic tool wear detection device comprises a spindle box, a working platform and a detection component;

[0008] The output end of the spindle box is connected to a tool, and the spindle box can drive the tool to move in the X, Y, and Z directions, and the spindle box can also drive the tool to rotate;

[0009] The working platform is arranged below the spindle box;

[0010] The detection component is used to measure the position of the tool in the X, Y and Z directions; the detection component includes a tool setting sensor, and the tool setting sensor includes an X-direction tool setting surface, a Y-direction tool setting surface and a Z-direction tool setting surface;

[0011] The tool is driven by the spindle box to contact the X-axis, Y-axis and Z-axis surfaces of the tool setting sensor respectively, and the displacement difference of the spindle box in the X, Y and Z directions during the initial tool setting and the actual detection is calculated to obtain the tool wear amount.

[0012] The automatic tool wear detection device of the present invention has three tool setting directions through a tool setting sensor, and can measure the position of the tool in the X, Y and Z directions respectively; by rotating the tool, the maximum displacement in the X, Y and Z directions is obtained, and the tool wear in the X, Y and Z directions is obtained by calculating the difference with the displacement during the initial tool setting; the average value of the tool wear in the X and Y directions is calculated, and the tool wear detection is more accurate; the machining center performs real-time detection of the tool according to the tool wear, and the detection can be performed without removing the tool, which greatly improves the detection efficiency and detection accuracy and reduces the work intensity of workers.

[0013] Furthermore, the spindle box clamps the tool, and the tool is slidably arranged on the spindle box along the Z direction; a displacement sensor is provided in the spindle box, and the displacement sensor is used to sense the displacement of the tool along the Z direction; and it also includes a compensation component, which is electrically connected to the displacement sensor, and the compensation component is connected to the tool setting sensor, and the compensation component compensates the displacement of the tool setting sensor in the Z direction according to the displacement detected by the displacement sensor.

[0014] The beneficial effect of adopting the above further scheme is that when the tool encounters greater resistance, the tool can overcome the friction force and be pushed upward in the Z direction, thereby protecting the tool. At the same time, by calculating the displacement of the tool in the Z direction in the spindle box, the tool setting sensor is compensated for the displacement in the Z direction, thereby maintaining the reference inconvenience between the tool setting sensor and the tool in the Z direction, thereby maintaining accurate detection.

[0015] Furthermore, the spindle box is provided with a clamp; the clamp is used to clamp the tool; the clamp is provided with a socket for inserting the tool along the Z direction; the side of the tool is provided with a plurality of slide grooves around its circumference, and the slide grooves are arranged along the length direction of the tool; the circumferential side of the clamp is provided with corresponding socket threaded holes, and the axial direction of the threaded holes is perpendicular to the axial direction of the socket; and it also includes a plurality of bolts, which are threadedly connected to the threaded holes and tighten the slide groove of the tool.

[0016] The beneficial effect of adopting the above further scheme is that by setting the socket and the slide groove, the sliding of the tool in the Z direction can be achieved, and the tool can be tightened by the clamp through the bolt. At the same time, when the tool is subject to greater resistance, the tool can overcome the friction of the clamp and the friction of the bolt, thereby achieving the purpose of lifting the tool and protecting the tool.

[0017] Furthermore, the displacement sensor is a capacitive sensor and a processor; the capacitive sensor includes a fixed electrode plate and a moving electrode plate, the fixed electrode plate is fixedly installed at the bottom of the socket, and the moving electrode plate is arranged on the tool and moves with the tool; the fixed electrode plate and the moving electrode plate are arranged correspondingly; the capacitive sensor converts the displacement difference generated by the displacement of the tool when working into a capacitance change, and the processor calculates the capacitance change and then obtains the tool displacement difference; the processor is electrically connected to the compensation component.

[0018] The beneficial effect of adopting the above further scheme is that after the tool is installed, the initial position of the tool is recorded and the initial capacitance of the capacitive sensor is measured. During the working process of the tool, when the tool is lifted upward, the tool drives the moving electrode to move, thereby changing the distance between the two plates of the capacitive sensor, causing the capacitance to change. The tiny capacitance change is converted into a frequency change and amplified by the processor. By measuring the frequency of the square wave signal and using a curve fitting algorithm, the corresponding distance value can be obtained through the frequency value, and the distance value of the tool moving upward is obtained. Then, the displacement of the tool sensor is compensated by the compensation component, and precise control of the compensation distance is achieved.

[0019] Furthermore, the compensation component includes a lifting motor; the lifting motor is electrically connected to the processor; the tool setting sensor is connected to an output shaft of the lifting motor, and the lifting motor drives the tool setting sensor to move along the Z direction.

[0020] The beneficial effect of adopting the above further solution is that the tool setting sensor can be raised and lowered simply by means of a lifting motor, so that the compensation distance of the tool setting sensor in the Z direction is consistent with the displacement value of the tool in the Z direction.

[0021] Furthermore, the detection component also includes a protective cover; the protective cover is detachably arranged on the outside of the tool setting sensor.

[0022] The beneficial effect of adopting the above further solution is that, by providing a protective cover, the tool setting sensor can be protected when the tool is working, while damage to the tool setting sensor is avoided to affect the measurement accuracy.

[0023] Furthermore, the detection component also includes a rotating motor; the rotating motor is connected to one side of the protective cover, and the protective cover is driven to rotate by the rotating motor to control the protective cover to open or cover the tool setting sensor.

[0024] The beneficial effect of adopting the above further solution is that, by setting a rotating motor, the protective cover can be automatically opened or closed, intelligent control can be achieved, and the work intensity of workers can be further reduced.

[0025] Furthermore, it also includes an air blowing component; the air blowing component includes an air blowing pipe, the air blowing pipe is arranged on one side of the detection component, the input end of the air blowing pipe is connected to an external air source, and the air blowing pipe is provided with a plurality of air outlets corresponding to the knife sensor.

[0026] The beneficial effect of adopting the above further solution is that, by providing an air blowing pipe, the tool setting sensor can be blown with air before detection to blow away the sundries and impurities on the surface of the tool setting sensor and nearby areas, thereby avoiding affecting the detection accuracy.

[0027] Furthermore, the air blowing assembly also includes a plurality of branch pipes, which are connected to the air outlet and extend toward the direction of the tool setting sensor.

[0028] The beneficial effect of adopting the above further solution is that, by providing a branch pipe, the wind can be blown onto the tool setting sensor more accurately and effectively.

[0029] Furthermore, it also includes a detection platform; the detection platform is arranged on the working platform, and the detection platform can move along the X direction and the Y direction on the working platform; the detection component and the compensation component are arranged on the detection platform.

[0030] The beneficial effect of adopting the above further scheme is that by setting up a detection platform that can move along the X direction and the Y direction, the detection platform can be moved simultaneously while the spindle box drives the tool to move, thereby improving the detection efficiency; when calculating the tool wear, the displacement of the detection platform should be combined with the displacement of the spindle box, and then the difference calculation is performed with the displacement value during the initial tool alignment to obtain the tool wear.

[0031] For better understanding and implementation, the present invention is described in detail below with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 It is a structural schematic diagram of the automatic tool wear detection device of the present invention;

[0033] Figure 2 It is a partial cross-sectional structural schematic diagram of the spindle box of the present invention;

[0034] Figure 3 for Figure 1 A partial enlarged view of point A in the middle.

[0035] In the figure: 10, spindle box; 11, tool; 111, slide; 12, fixture; 121, socket; 122, threaded hole; 123, bolt; 20, working platform; 21, X track; 22, Y platform; 23, Y track; 30, detection platform; 40, detection component; 41, tool setting sensor; 411, X-axis tool setting surface; 412, Y-axis tool setting surface; 413, Z-axis tool setting surface; 42, protective cover; 43, rotating motor; 51, fixed pole plate; 52, moving pole plate; 60, lifting motor; 71, blow pipe; 72, branch pipe. DETAILED DESCRIPTION

[0036] See also Figures 1 to 3 , an automatic tool wear detection device of this embodiment includes a spindle box 10, a working platform 20, a detection platform 30, a detection component 40, a compensation component and a blowing component;

[0037] Specifically, the output end of the spindle box 10 is connected to a tool 11, and the spindle box 10 can drive the tool 11 to move in the X, Y, and Z directions, and the spindle box 10 can also drive the tool 11 to rotate;

[0038] Specifically, the working platform 20 is arranged below the spindle box 10;

[0039] Specifically, the detection platform 30 is arranged on the working platform 20, and the detection platform 30 can move along the X direction and the Y direction on the working platform 20; the movement of the detection platform 30 on the working platform 20 can be realized by conventional technical means, which will not be described again. Preferably, an X track 21 is arranged on the working platform 20, and a Y platform 22 is slidably arranged on the X track 21, the Y platform 22 is arranged along the Y direction, and a Y-direction track is arranged on the Y platform 22, and the detection platform 30 is slidably arranged on the Y track 23, and then the Y platform 22 is driven by a motor to move on the X track 21, and the detection platform 30 is driven by a motor to move on the Y track 23, so as to realize the position of the detection platform 30 on the working platform 20;

[0040] Specifically, the detection component 40 is disposed on the detection platform 30;

[0041] Specifically, the detection component 40 is used to measure the position of the tool 11 in the X, Y, and Z directions; the detection component 40 includes a tool setting sensor 41, and the tool setting sensor 41 includes an X-direction tool setting surface 411, a Y-direction tool setting surface 412, and a Z-direction tool setting surface 413.

[0042] In the preferred embodiment,

[0043] The spindle box 10 is provided with a clamp 12; the clamp 12 is used to clamp the tool 11; the clamp 12 is provided with a socket 121 for inserting the tool 11 along the Z direction, and the tool 11 is slidably arranged in the socket 121 along the Z direction; the side of the tool 11 is provided with a plurality of slide grooves 111 around its circumference, and the slide grooves 111 are arranged along the length direction of the tool 11; the circumferential side of the clamp 12 is provided with threaded holes 122 corresponding to the socket 121, and the axial direction of the threaded holes 122 is perpendicular to the axial direction of the socket 121; and it also includes a plurality of bolts 123, and the bolts 123 are threadedly connected to the threaded holes 122 and tighten the slide groove 111 of the tool 11.

[0044] The spindle box 10 is provided with a displacement sensor, which is used to sense the displacement of the tool 11 along the Z direction; preferably, the displacement sensor is a capacitive sensor and a processor (not shown); the capacitive sensor includes a fixed electrode plate 51 and a moving electrode plate 52, the fixed electrode plate 51 is fixedly installed at the bottom of the jack 121, and the moving electrode plate 52 is arranged on the tool 11 and moves with the tool 11; the fixed electrode plate 51 and the moving electrode plate 52 are arranged correspondingly; the capacitive sensor converts the displacement difference generated by the displacement of the tool 11 during operation into a capacitance change, and the processor calculates the capacitance change and then obtains the displacement difference of the tool 11; the processor is electrically connected to the compensation component;

[0045] The compensation component is electrically connected to the displacement sensor, and the compensation component is connected to the tool setting sensor 41. The compensation component compensates the displacement of the tool setting sensor 41 in the Z direction according to the displacement detected by the displacement sensor; preferably, the compensation component includes a lifting motor 60; the lifting motor 60 is arranged on the detection platform 30; the lifting motor 60 is electrically connected to the processor; the tool setting sensor 41 is connected to the output shaft of the lifting motor 60, and the lifting motor 60 drives the tool setting sensor 41 to move along the Z direction;

[0046] In the preferred embodiment,

[0047] The detection assembly 40 further includes a protective cover 42 and a rotating motor 43; the protective cover 42 is detachably disposed on the outside of the tool setting sensor 41;

[0048] The rotating motor 43 is connected to one side of the protective cover 42 , and the protective cover 42 is driven to rotate by the rotating motor 43 , thereby controlling the protective cover 42 to open or cover the tool setting sensor 41 .

[0049] The air blowing assembly includes a blowing pipe 71 and a plurality of branch pipes 72. The blowing pipe 71 is arranged on one side of the detection assembly 40. The input end of the blowing pipe 71 is connected to an external air source. The blowing pipe 71 is provided with a plurality of air outlets corresponding to the tool sensor 41. The branch pipes 72 are connected to the air outlets and extend toward the direction of the tool sensor 41.

[0050] The working process of this embodiment:

[0051] After the detection assembly 40 and the tool 11 are installed, the tool 11 is moved by the spindle box 10, and the detection platform 30 drives the detection assembly 40 to move, so that the tool 11 contacts the X-direction tool setting surface 411, the Y-direction tool setting surface 412 and the Z-direction tool setting surface 413 of the tool setting sensor 41, respectively, and the initial displacement values ​​of the spindle box 10 and the detection platform 30 are obtained;

[0052] When the tool 11 needs to be inspected, the tool 11 is moved again by the spindle box 10, and the inspection platform 30 drives the inspection assembly 40 to move, so that the tool 11 contacts the X-direction tool setting surface 411, the Y-direction tool setting surface 412 and the Z-direction tool setting surface 413 of the tool setting sensor 41 respectively, and the maximum measured displacement values ​​in the X, Y and Z directions are obtained by rotating the tool 11;

[0053] By obtaining the difference between the initial displacement value and the measured displacement value, the wear amount of the tool 11 in the X, Y, and Z directions can be obtained.

[0054] Since the tool 11 and the fixture 12 are slidably arranged, when the tool 11 encounters greater resistance, it will be pushed up, thereby protecting the tool 11; the displacement of the tool 11 is sensed by the capacitive sensor, and the tool 11 drives the moving electrode 52 to move, thereby changing the distance between the two plates of the capacitive sensor, causing the capacitance to change, and the tiny capacitance change is converted into a frequency change and amplified by the processor, and the corresponding distance value can be obtained through the frequency value by measuring the frequency of the square wave signal and using a curve fitting algorithm, and the distance value of the upward movement of the tool 11 is obtained, and then the displacement of the tool sensor 41 is compensated by the lifting motor 60, so as to realize precise control of the compensation distance, so that the compensation distance of the tool sensor 41 in the Z direction is consistent with the displacement value of the tool 11 in the Z direction.

[0055] By setting the protective cover 42, it is possible to prevent the cutting chips or cutting fluid from damaging the tool sensor 41 when the machining center cuts the workpiece, thereby affecting the measurement accuracy; by setting the rotating motor 43, the protective cover 42 can be automatically opened and closed, reducing the workload of the staff.

[0056] Before the tool 11 contacts the tool setting sensor 41 , the tool setting sensor 41 is blown with air through the blowing pipe 71 to blow away the sundries and impurities on the surface of the tool setting sensor 41 and nearby to avoid affecting the detection accuracy.

[0057] Compared with the prior art, the present invention has three tool setting directions through the tool setting sensor, which can measure the position of the tool in the X, Y and Z directions respectively; by rotating the tool, the maximum displacement in the X, Y and Z directions is obtained, and the tool wear in the X, Y and Z directions is obtained by calculating the difference with the displacement during the initial tool setting; the average value of the tool wear in the X and Y directions is calculated, and the tool wear detection is more accurate; the machining center performs real-time detection of the tool according to the tool wear, and the detection can be performed without removing the tool, which greatly improves the detection efficiency and detection accuracy and reduces the work intensity of workers.

[0058] In addition, the present invention also has the following beneficial effects:

[0059] When the tool encounters greater resistance, the tool can overcome the friction and be lifted upward in the Z direction, thereby protecting the tool. At the same time, by calculating the displacement of the tool in the Z direction in the spindle box, the tool setting sensor is compensated for the displacement in the Z direction, thereby maintaining the reference inconvenience between the tool setting sensor and the tool in the Z direction and maintaining accurate detection.

[0060] By setting the jack and the slide groove, the tool can slide in the Z direction, and the tool can be tightened by the clamp through the bolt. At the same time, when the tool is subject to greater resistance, the tool can overcome the friction of the clamp and the friction of the bolt to lift the tool, thereby achieving the purpose of protecting the tool.

[0061] After the tool is installed, the initial position of the tool is recorded, and the initial capacitance of the capacitive sensor is measured. During the working process of the tool, when the tool is lifted up, the tool drives the moving plate to move, thereby changing the distance between the two plates of the capacitive sensor, causing the capacitance to change. The processor converts the tiny capacitance change into a frequency change and amplifies it. By measuring the frequency of the square wave signal and using a curve fitting algorithm, the corresponding distance value can be obtained through the frequency value, and the distance value of the tool moving upward is obtained. Then, the compensation component compensates for the displacement of the tool sensor, and the compensation distance is accurately controlled.

[0062] The tool setting sensor can be raised and lowered simply by using a lifting motor, so that the compensation distance of the tool setting sensor in the Z direction is consistent with the displacement value of the tool in the Z direction;

[0063] By setting a protective cover, the tool setting sensor can be protected when the tool is working, and the tool setting sensor can be prevented from being damaged and affecting the measurement accuracy.

[0064] By setting a rotating motor, the protective cover can be automatically opened or closed, and intelligent control can be achieved, further reducing the work intensity of workers;

[0065] By providing an air blowing pipe, the tool setting sensor can be blown with air before detection to blow away the sundries and impurities on the surface of the tool setting sensor and nearby to avoid affecting the detection accuracy;

[0066] By setting up a branch pipe, the wind can be blown to the tool setting sensor more accurately and effectively;

[0067] By setting up a detection platform that can move in the X and Y directions, the detection platform can be moved while the spindle box drives the tool to move, thereby improving the detection efficiency. When calculating the tool wear, the displacement of the detection platform should be combined with the displacement of the spindle box, and then the difference between the displacement value at the initial tool alignment is calculated to obtain the tool wear.

[0068] The above-mentioned embodiments only express several implementation methods of the present invention, and the description is relatively specific and detailed, but it cannot be understood as limiting the scope of the invention patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the present invention, which all belong to the protection scope of the present invention.

Claims

1. A tool wear automatic detection device, characterized in that: include A spindle box (10), wherein the output end of the spindle box (10) is connected to a tool (11), and the spindle box (10) can drive the tool (11) to move in the X, Y, and Z directions, and the spindle box (10) can also drive the tool (11) to rotate; A working platform (20), wherein the working platform (20) is arranged below the spindle box (10); A detection component (40), the detection component (40) is used to measure the position of the tool (11) in the X, Y and Z directions; the detection component (40) comprises a tool setting sensor (41), and the tool setting sensor (41) comprises an X-direction tool setting surface (411), a Y-direction tool setting surface (412) and a Z-direction tool setting surface (413); The tool (11) is driven by the spindle box (10) to contact the X-direction tool setting surface (411), the Y-direction tool setting surface (412) and the Z-direction tool setting surface (413) of the tool setting sensor (41) respectively, and the displacement difference of the spindle box (10) in the X, Y and Z directions during the initial tool setting and the actual detection is calculated, thereby obtaining the wear amount of the tool (11); The spindle box (10) clamps the tool (11), and the tool (11) is slidably arranged on the spindle box (10) along the Z direction. When the tool (11) encounters a large resistance, it will be pushed upward; a displacement sensor is arranged in the spindle box (10), and the displacement sensor is used to sense the displacement of the tool (11) along the Z direction; it also includes a compensation component, the compensation component is electrically connected to the displacement sensor, and the compensation component is connected to the tool setting sensor (41); the compensation component compensates the displacement of the tool setting sensor (41) in the Z direction according to the displacement detected by the displacement sensor.

2. The automatic tool wear detection device according to claim 1, characterized in that: The spindle box (10) is provided with a clamp (12); the clamp (12) is used to clamp the tool (11); the clamp (12) is provided with a socket (121) for inserting the tool (11) along the Z direction; the side surface of the tool (11) is provided with a plurality of slide grooves (111) around its circumference, and the slide grooves (111) are arranged along the length direction of the tool (11); the peripheral side of the clamp (12) is provided with threaded holes (122) corresponding to the socket (121), and the axial direction of the threaded hole (122) is perpendicular to the axial direction of the socket (121); and it also includes a plurality of bolts (123), the bolts (123) are threadedly connected to the threaded holes (122), and are pressed against the slide groove (111) of the tool (11).

3. The automatic tool wear detection device according to claim 2, characterized in that: The displacement sensor is a capacitive sensor and a processor; the capacitive sensor comprises a fixed electrode plate (51) and a moving electrode plate (52); the fixed electrode plate (51) is fixedly mounted at the bottom of the jack (121); the moving electrode plate (52) is arranged on the tool (11) and moves with the tool (11); the fixed electrode plate (51) and the moving electrode plate (52) are arranged correspondingly; the capacitive sensor converts the displacement difference generated by the displacement of the tool (11) during operation into a capacitance change; the processor calculates the capacitance change and thereby obtains the displacement difference of the tool (11); the processor is electrically connected to the compensation component.

4. The automatic tool wear detection device according to claim 3, characterized in that: The compensation component comprises a lifting motor (60); the lifting motor (60) is electrically connected to the processor; the tool setting sensor (41) is connected to the output shaft of the lifting motor (60), and the lifting motor (60) drives the tool setting sensor (41) to move along the Z direction.

5. The automatic tool wear detection device according to claim 4, characterized in that: The detection component (40) further comprises a protective cover (42); the protective cover (42) is detachably arranged on the outside of the tool setting sensor (41).

6. The automatic tool wear detection device according to claim 5, characterized in that: The detection component (40) further comprises a rotating motor (43); the rotating motor (43) is connected to one side of the protective cover (42), and the protective cover (42) is driven to rotate by the rotating motor (43), thereby controlling the protective cover (42) to open or cover the tool setting sensor (41).

7. The automatic tool wear detection device according to claim 6, characterized in that: It also includes an air blowing component; the air blowing component includes an air blowing pipe (71), the air blowing pipe (71) is arranged on one side of the detection component (40), the input end of the air blowing pipe (71) is connected to an external air source, and the air blowing pipe (71) is provided with a plurality of air outlet holes corresponding to the knife sensor (41).

8. The automatic tool wear detection device according to claim 7, characterized in that: The air blowing assembly further comprises a plurality of branch pipes (72), wherein the branch pipes (72) are connected to the air outlet holes and extend in the direction of the knife sensor (41).

9. The automatic tool wear detection device according to claim 8, characterized in that: It also comprises a detection platform (30); the detection platform (30) is arranged on the working platform (20), and the detection platform (30) can move along the X direction and the Y direction on the working platform (20); the detection component (40) and the compensation component are arranged on the detection platform (30).

Images