extension device

Abstract

Provided is an expanding device that can eliminate the relaxation of the expanded piece of a processed unit even when a plurality of processed units are continuously expanded, prevent chip damage, and suppress poor cooling of the next expanded processed unit. The expanding device (1) has a frame holding unit (20) that holds a ring-shaped frame of a processed unit, a cooling table (30) that includes an abutting surface (31) that abuts against an expanded piece of the processed unit held by the frame holding unit, an expanding unit (40) that expands the expanded piece, a heating unit (50) that has a warm air injection portion (52) that injects warm air to the expanded piece between the outer circumferential side of the processed unit and the inner circumferential edge of the ring-shaped frame, and a curved plate (90) that is provided between the processed unit and the warm air injection portion, has an air injection port that injects air toward the processed unit, and prevents the intrusion of warm air injected from the warm air injection portion (52).

Description

TECHNICAL FIELD

[0001] The present application relates to an expansion device. BACKGROUND

[0002] There is known a processing method in which a wafer on which a device is formed on a front surface is irradiated with laser light, an altered layer is formed inside along a division predetermined line, and an expansion sheet (dicing tape) to which the wafer is attached is expanded, thereby dividing into individual chips with the altered layer as a breaking base point.

[0003] Sometimes, a DAF (Die Attach Film) for fixing the divided device to a substrate or the like is attached to the above-mentioned wafer, and the DAF is divided into individual chips by expanding the expansion sheet. In this case, at the time of division of the DAF, in order to improve the divisibility of the DAF which is a ductile material, for example, a method is proposed in which a cooling plate is brought into contact with the expansion tape of the region corresponding to the DAF to cool the DAF (for example, refer to Patent Literature 1).

[0004] On the other hand, in order to prevent damage caused by contact of adjacent chips with each other due to relaxation of the expanded expansion sheet, a method is also proposed in which warm air is sprayed to the expansion sheet between the outer periphery of the processed object and the inner periphery of the frame after expansion to heat and thereby shrink the expansion sheet (for example, refer to Patent Literature 2).

[0005] Patent Literature 1: Japanese Patent Application Laid-Open No. 2006-049591

[0006] Patent Literature 2: Japanese Patent Application Laid-Open No. 2011-077482

[0007] However, in the method shown in Patent Literature 2, if warm air is sprayed at the time of shrinking of the expansion sheet, the periphery of the cooling plate is also heated. Therefore, in the method shown in Patent Literature 2, for example, in the case where the expansion sheets of a plurality of processed object units are continuously expanded, after the expansion sheet of the first processed object unit is expanded and shrunk by heating, it can not be possible to sufficiently cool the DAF at the time of expansion of the expansion sheet of the next processed object unit. If the method shown in Patent Literature 2 cannot sufficiently cool the DAF, it can not be possible to break the DAF into individual chips. SUMMARY

[0008] The present application was made in view of this point, and has an object to provide an expansion device which, even in the case where expansion sheets of a plurality of processed object units are continuously expanded, can eliminate relaxation of the expansion sheet of the processed object unit after expansion to prevent damage of the chips, and can suppress poor cooling of the next processed object unit which is subjected to expansion.

[0009] To solve the above problems and achieve the object, the expansion device of the present application expands the expansion sheet of a workpiece unit composed of a workpiece, the expansion sheet attached to the workpiece, and a ring-shaped frame attached to the outer periphery side of the expansion sheet, characterized by comprising: a frame holding member that holds the ring-shaped frame of the workpiece unit; a cooling table that has an abutting surface of a size corresponding to the workpiece, the cooling table abutting against the expansion sheet of the workpiece unit including the ring-shaped frame held by the frame holding member; an expansion member that expands the expansion sheet attached to the ring-shaped frame held by the frame holding member; a heating member that has a warm air injection portion that injects warm air toward the expansion sheet between the outer periphery side of the workpiece and the inner periphery of the ring-shaped frame; and a warm air intrusion prevention member that is provided between the workpiece and the warm air injection portion, has a gas injection port that injects gas toward the workpiece, and prevents intrusion of the warm air injected from the warm air injection portion.

[0010] In the expansion device, the warm air intrusion prevention member can include a curved surface that faces the workpiece, is formed to a size corresponding to the abutting surface, has a warp that becomes farther apart from the workpiece at a position closer to the center side than the outer periphery side of the workpiece, and the injection port is formed in the curved surface, thereby forming an air reservoir between the curved surface and the workpiece.

[0011] The present application achieves the following effects: even when the expansion sheets of a plurality of workpiece units are continuously expanded, the expansion sheets of the expanded workpiece units can be prevented from relaxing and being damaged, and cooling of the next workpiece unit to be expanded can be suppressed. BRIEF DESCRIPTION OF DRAWINGS

[0012] Figure 1 FIG. 1 is a perspective view showing an example of a workpiece unit that is a processing target of the expansion device of Embodiment 1.

[0013] Figure 2 FIG. 2 is a cross-sectional view schematically showing a structure example of the expansion device of Embodiment 1.

[0014] Figure 3 FIG. 3 is a cross-sectional view schematically showing a state in which the ring-shaped frame of the workpiece unit is placed on the frame placement plate of the expansion device shown in FIG. 2. Figure 2 FIG. 4 is a cross-sectional view of a curved plate or the like of the expansion device shown in FIG. 2.

[0015] Figure 4 FIG. 5 is a cross-sectional view schematically showing a state in which the expansion sheet of the workpiece unit is expanded by the expansion member of the expansion device shown in FIG. 2. Figure 2 FIG. 6 is a cross-sectional view schematically showing a state in which the warm air injection portion of the heating member of the expansion device shown in FIG. 2 is placed in the expansion sheet of the workpiece unit.

[0016] Figure 5 FIG. 7 is a cross-sectional view schematically showing a state in which the warm air intrusion prevention member of the expansion device shown in FIG. 2 is placed between the workpiece and the warm air injection portion. Figure 4A cross-sectional view of the frame holding unit of the extension device shown fixed the state of the annular frame.

[0017] Figure 6 is a cross-sectional view schematically showing the extension of the extension sheet by heating the extension sheet shown. Figure 5 A cross-sectional view of the frame holding plate shown raised to extend the extension sheet.

[0018] Figure 7 is a cross-sectional view schematically showing the extension of the extension sheet shown. Figure 6 A cross-sectional view of the extension sheet shown heated to shrink the extension sheet.

[0019] Figure 8 is a cross-sectional view schematically showing a structure example of the extension device of the modification example of Embodiment 1.

[0020] Explanation of Reference Numerals

[0021] 1: Extension device; 20: Frame holding unit (frame holding member); 30: Cooling table; 31: Abutting surface; 40: Extension unit (extension member); 50: Heating unit (heating member); 52: Warm air injection portion; 90: Bending plate (warm air intrusion prevention member); 91: Injection port; 92: Bending surface; 200: Workpiece unit; 201: Workpiece; 210: Extension sheet; 211: Annular frame; 300: Warm air; 301: Air accumulation. DETAILED DESCRIPTION

[0022] Embodiments for carrying out the present application will be explained in detail with reference to the drawings. The present application is not limited by the contents described in the following embodiments. In addition, the following described constituent elements include what can be easily conceived by those skilled in the art, and substantially the same contents. In addition, the following described structures can be appropriately combined. In addition, various omissions, substitutions, or changes of the structures can be made within a range not departing from the gist of the present application.

[0023] [Embodiment 1]

[0024] Embodiment 1 of the extension device of the present application will be explained with reference to the drawings. Figure 1 is a perspective view showing an example of the workpiece unit of the workpiece of the extension device of Embodiment 1. Figure 2 is a cross-sectional view schematically showing a structure example of the extension device of Embodiment 1. Figure 3 is a cross-sectional view schematically showing the extension of the extension sheet shown. Figure 2 A cross-sectional view of the bending plate or the like of the extension device shown.

[0025] The extension device of Embodiment 1 is a device that divides the workpiece 201 of the workpiece unit 200 shown into individual chips 202. In Embodiment 1, as shown in Figure 1 Figure 1 ​As shown, the workpiece unit 200 has: workpiece 201; an extension piece 210 attached to workpiece 201; and an annular frame 211 on the outer periphery of the extension piece 210.

[0026] The workpiece 201 is a wafer, such as a disc-shaped semiconductor wafer or optical device wafer, with silicon, sapphire, gallium arsenide, or SiC (silicon carbide) as the substrate 203. For example... Figure 1 As shown, the workpiece 201 has devices 206 formed in each region of the front surface 204 divided by multiple intersecting predetermined dividing lines 205. An extension sheet 210 is attached to the back surface 207 of the back surface side of the workpiece 201, and an annular frame 211 is attached to the outer periphery of the extension sheet 210. Laser light of a wavelength that is transparent to the substrate 203 is irradiated from the back surface 207 side along the predetermined dividing lines 205. A modified layer 208 is formed inside the substrate 203 along the predetermined dividing lines 205 as the dividing starting point.

[0027] The workpiece 201 is divided into individual chips 202 along a predetermined dividing line 205, with the modified layer 208 as the dividing starting point. Each chip 202 has a portion of a substrate 203 and a device 206 formed on the front side of the substrate 203.

[0028] In addition, the modified layer 208 refers to a region whose density, refractive index, mechanical strength or other physical properties are different from those of the surrounding area. Examples include melt-treated regions, cracked regions, insulation failure regions, refractive index change regions, and regions where these regions are mixed.

[0029] The extension sheet 210 is formed into a circular plate with a diameter larger than the outer diameter of the workpiece 201, and is made of a stretchable resin, which has thermal shrinkage properties that cause shrinkage when heated.

[0030] In Embodiment 1, a circular DAF (Die Attach Film) 212 is adhered between the back surface 207 of the substrate 203 of the workpiece 201 and the extension sheet 210 in the workpiece unit 200. The DAF 212 is a chip bonding adhesive film used to fix the chip 202 to other chips or substrates. In Embodiment 1, the DAF 212 is formed as a circular plate with a diameter larger than the outer diameter of the workpiece 201 and smaller than the inner diameter of the annular frame 211. The DAF 212 is divided according to each chip 202. In the divided chips 202, the DAF 212 is adhered to the back surface 207 of the substrate 203 of the chip 202.

[0031] The extension device 1 of Embodiment 1 is a device that extends the extension sheet 210 of the workpiece unit 200 to divide the workpiece 201 into individual chips 202 and divides the DAF 212 for each chip 202. As shown in Figure 2 The extension device 1 has a chamber 10, a frame holding unit 20 as a frame holding member, a cooling stage 30, an extension unit 40 as an extension member, a heating unit 50 as a heating member, and a control unit 100 as a control member.

[0032] The chamber 10 is formed in a box shape and houses the frame holding unit 20, the cooling stage 30, the extension unit 40, and the heating unit 50 as a heating member. The chamber 10 is provided with an opening 12 in a side wall 11, and the workpiece unit 200 enters and exits through the opening 12. In addition, the opening 12 is opened and closed by an opening and closing door 13.

[0033] The frame holding unit 20 holds and fixes the annular frame 211 of the workpiece unit 200. The frame holding unit 20 has a frame placement plate 21 and a frame pressing plate 22. The frame placement plate 21 is formed in a circular ring shape with an inner diameter slightly smaller than that of the annular frame 211 and an outer diameter slightly larger than that of the workpiece 201 and the DAF 212, and an upper surface 23 is formed parallel to the horizontal direction and flat. The frame placement plate 21 places the annular frame 211 of the workpiece unit 200 on the upper surface 23.

[0034] In addition, the frame placement plate 21 is disposed to be freely raised and lowered by a lifting cylinder 42 of the extension unit 40. The front end of a rod 45 of the lifting cylinder 42 is attached to the frame placement plate 21, and the rod 45 is extended and contracted so that the frame placement plate 21 is raised and lowered within the chamber 10. In addition, in Embodiment 1, the frame placement plate 21 is raised from a position where the upper surface 23 and the lower edge of the opening 12 are substantially aligned in the horizontal direction. Figure 2

[0035] ​The frame pressing plate 22 is formed in a circular ring shape with an inner diameter smaller than that of the frame placement plate 21 and larger than the outer diameter of the workpiece 201 and the DAF 212, and an outer diameter slightly larger than that of the annular frame 211, and the lower surface 24 is formed parallel to the horizontal direction and flat. The frame pressing plate 22 is disposed at a position coaxial with the frame placement plate 21, and in Embodiment 1, is disposed at a position higher than the frame placement plate 21. In Embodiment 1, the frame pressing plate 22 is disposed at a position where the lower surface 24 is substantially aligned with the opening 12 in the horizontal direction, and is disposed apart from the frame placement plate 21 located below. In Embodiment 1, the frame pressing plate 22 is supported by the sliding support member 25 so as to be liftable and lowerable within the chamber 10. In Embodiment 1, the frame pressing plate 22 is supported by the sliding support member 25 so as to be able to be lifted from the position where the lower surface 24 is substantially aligned with the opening 12 in the horizontal direction to a position where the lower surface 24 is substantially aligned with the opening 12 in the vertical direction. Figure 2

[0036] The frame holding unit 20 places the annular frame 211 of the workpiece unit 200 inserted into the chamber 10 through the opening 12 on the upper surface 23 of the frame placement plate 21 positioned below by the lift cylinder 42. The frame holding unit 20 lifts the frame placement plate 21 on which the annular frame 211 is placed on the upper surface 23 by the lift cylinder 42, sandwiches the outer peripheral side of the annular frame 211 and the extension piece 210 between the frame placement plate 21 and the frame pressing plate 22, holds the annular frame 211, and lifts the frame placement plate 21 and the frame pressing plate 22 from the position where the outer peripheral side of the annular frame 211 and the extension piece 210 are sandwiched. In addition, in Embodiment 1, the frame holding unit 20 is provided with the sealing member 26 that seals between the extension piece 210 along the entire circumference of the lower surface 24 of the frame pressing plate 22.

[0037] In addition, in Embodiment 1, the compressed air blowout port 63 is provided on the inner peripheral side of the sealing member 26 of the lower surface 24 of the frame pressing plate 22 of the frame holding unit 20, and the compressed air is supplied to the compressed air blowout port 63 from the compressed air supply source 62 via the supply path 60 provided inside the frame pressing plate 22, the swirl tube 64, and the on-off valve 61. The compressed air blowout port 63 is provided along the entire circumference of the frame pressing plate 22.

[0038] The cooling stage 30 includes an abutting surface 31 of a size corresponding to the workpiece 201, and abuts against the extension piece 210 of the workpiece unit 200 including the annular frame 211 held by the frame holding unit 20. The cooling stage 30 has a thick circular plate-shaped stage main body 32, a cooling unit 33 that cools the stage main body 32, and a stage lift unit 34.

[0039] ​In Embodiment 1, the table body 32 is formed of an aluminum alloy, has an outer diameter that is smaller than an inner diameter of the frame pressing plate 22, and is disposed at a position coaxial with the inner periphery of the frame pressing plate 22. The lower surface of the table body 32 is an abutting surface 31 that corresponds to the size, i.e., the outer diameter, of the workpiece 201. In Embodiment 1, the outer diameter of the table body 32 is equal to the outer diameter of the DAF 212, and thus the outer diameter of the abutting surface 31 as the lower surface corresponds to the size, i.e., the outer diameter, of the workpiece 201. The abutting surface 31 of the table body 32 faces the back surface 207 of the workpiece 201 across the extension piece 210 and the DAF 212 of the workpiece unit 200 that holds the annular frame 211 via the frame holding unit 20.

[0040] In addition, a plurality of suction holes 35 are opened in the abutting surface 31 of the table body 32, and these suction holes 35 are connected to a suction source 72 such as an ejector via a suction passage 70 provided in the table body 32 and an on-off valve 71. The table body 32 is suctioned by the suction source 72 via the suction passage 70 and the on-off valve 71, and thus the back surface 207 side of the workpiece 201 can be suction-held on the abutting surface 31 across the extension piece 210 and the DAF 212.

[0041] In Embodiment 1, a cooling unit 33 is provided at the central portion of the upper surface of the table body 32, and cools the table body 32, i.e., the abutting surface 31. In Embodiment 1, the cooling unit 33 is a piston cooler that cools the table body 32, but in the present application, it is not limited to a piston cooler.

[0042] The table lifting unit 34 is configured of an unillustrated motor, a ball screw that rotates by the motor, and the like, and lifts the table body 32 and the cooling unit 33 in the chamber 10.

[0043] In addition, in Embodiment 1, the table body 32 and the cooling unit 33 of the cooling table 30 are covered by a table cover 36. The table cover 36 insulates the table body 32, and in the embodiment, integrally has a large-diameter cylindrical portion 37 that covers the outer periphery of the table body 32 at a spacing from the outer periphery, a ring-shaped annular portion 38 that covers the upper surface of the table body 32 at a spacing from the upper surface and is connected to the outer edge of the large-diameter cylindrical portion 37, and a small-diameter cylindrical portion 39 that covers the outer periphery of the cooling unit 33 at a spacing from the outer periphery and is connected to the inner edge of the annular portion 38, and the table cover 36 is disposed coaxial with the table body 32 and the cooling unit 33. The table cover 36 is lifted integrally with the table body 32 and the cooling unit 33 by the table lifting unit 34.

[0044] Further, the embodiment 1 supplies compressed air from the compressed air supply source 82 to the cooling workbench 30 and the workbench cover 36 via the supply path 80 and the on-off valve 81.

[0045] The expansion unit 40 expands the expansion sheet 210 adhered to the annular frame 211 held by the frame holding unit 20. The expansion unit 40 has an expansion drum 41 fixed to the chamber 10 and a lift cylinder 42 that lifts the frame placement plate 21.

[0046] The expansion drum 41 has a drum portion 43 in a cylindrical shape. The drum portion 43 is formed to have an inner diameter larger than an outer diameter of the large-diameter cylindrical portion 37 of the workbench main body 32 and an outer diameter smaller than an inner diameter of the frame pressing plate 22. The drum portion 43 is disposed on the outer peripheral side of the large-diameter cylindrical portion 37 of the workbench main body 32 and on the inner peripheral side of the frame pressing plate 22, and is coaxially disposed with the frame holding unit 20 and the cooling workbench 30. A roller member 44 in a cylindrical shape is installed at a lower end of the expansion drum 41, and is disposed on the same plane as a lower surface 24 of the frame pressing plate 22 located below and is rotatable about an axis.

[0047] The heating unit 50 heats the expansion sheet 210 between the outer peripheral side of the workpiece 201 of the workpiece unit 200 whose expansion sheet 210 has been expanded by the frame holding unit 20 and the inner peripheral edge of the annular frame 211 to shrink the expansion sheet 210. The heating unit 50 has a heating plate 51, a plurality of warm air injection portions 52, and a movable shutter 53.

[0048] The heating plate 51 is formed in a circular plate shape having an outer diameter equal to an inner diameter of the frame pressing plate 22, is disposed on the inner peripheral side of the frame placement plate 21, and is coaxially disposed with the frame holding unit 20 and the cooling unit 33. The heating plate 51 is disposed at a position lower than the lower surface of the frame placement plate 21 that is parallel to the horizontal direction and located below. The heating plate 51 is rotatable about an axis by a heating plate rotation motor 54 installed in the chamber 10.

[0049] The plurality of warm air injection portions 52 face the expansion sheet 210 between the outer peripheral side of the workpiece 201 of the workpiece unit 200 whose expansion sheet 210 has been expanded by the frame holding unit 20 and the inner peripheral edge of the annular frame 211 and inject warm air 300 (shown in the drawing) therefrom. The plurality of warm air injection portions 52 are disposed at an outer edge portion of an upper surface of the heating plate 51 at equal intervals in the circumferential direction, and face the expansion sheet 210 between the outer peripheral side of the workpiece 201 of the workpiece unit 200 whose expansion sheet 210 has been expanded by the frame holding unit 20 and the inner peripheral edge of the annular frame 211. Figure 7

[0050] ​The warm air injection section 52 has a bottomed cylindrical injection section body 521 provided with an opening section at an upper portion, a coil heater 522 which is a heating section housed in the injection section body 521, and an air supply source 525 which supplies air into the injection section body 521 via a supply path 523 and an on-off valve 524. The coil heater 522 generates heat by being supplied with electric power from a direct current power supply with the on-off valve closed. The warm air injection section 52 opens the on-off valve 524, the air supply source 525 supplies air into the injection section body 521, the supplied air is heated by the coil heater 522, and warm air 300 is injected from the opening section.

[0051] The movable shutter 53 is formed in a disc shape with an outer diameter slightly smaller than an inner diameter of the frame placement plate 21, is disposed coaxially with the frame holding unit 20 and the cooling unit 33 above the warm air injection section 52 and on an inner peripheral side of the frame placement plate 21. The movable shutter 53 is rotated about an axis by a movable shutter rotation motor 55 installed to the heating plate 51. In addition, the movable shutter 53 is provided with an opening section 56 which exposes the warm air injection section 52 at an outer edge portion.

[0052] Thus, the extension device 1 of Embodiment 1 is provided with the cooling stage 30 above the workpiece unit 200 held by the frame holding unit 20 and the heating unit 50 below the workpiece unit 200.

[0053] The control unit 100 controls the constituent elements of the extension device 1 respectively, and causes the extension device 1 to perform a machining operation on the workpiece unit 200. In addition, the control unit 100 is a computer having an arithmetic processing device having a microprocessor like a CPU (central processing unit), a storage device having a memory like a ROM (read only memory) or a RAM (random access memory), and an input / output interface device. The arithmetic processing device of the control unit 100 performs arithmetic processing in accordance with a computer program stored in the storage device, and outputs a control signal for controlling the extension device 1 to the constituent elements of the extension device 1 via the input / output interface device.

[0054] The control unit 100 is connected to an unillustrated display unit constituted by a liquid crystal display device or the like which displays a state or an image or the like of the machining operation, and an unillustrated input unit used by an operator when registering machining content information or the like. The input unit is constituted by at least one of a touch panel and an external input device like a keyboard provided to the display unit.

[0055] Additionally, the extension device 1 includes a bending plate 90 as a warm air intrusion prevention member. The bending plate 90 is disposed between the workpiece 201 of the workpiece unit 200 held by the frame holding unit 20 and the plurality of warm air jets 52, and has the function of spraying air as gas toward the workpiece 201. Figure 3 The nozzle 91 shown suppresses the intrusion of warm air 300 ejected from the warm air jet section 52. The curved plate 90 is formed as a circular plate with an outer diameter approximately equal to the contact surface 31 of the workbench body 32 of the cooling workbench 30. It is coaxially configured with the frame holding unit 20 and the cooling unit 33 and is mounted on the upper surface of the movable baffle 53.

[0056] The bending plate 90 is mounted on the upper surface of the movable baffle 53, so that it faces the workpiece 201 of the workpiece unit 200 held by the frame holding unit 20. The outer diameter of the bending plate 90 is approximately equal to the abutment surface 31 of the worktable body 32 of the cooling worktable 30, thus forming a size corresponding to the abutment surface 31. In addition, the outer diameter of the bending plate 90 is approximately equal to the outer diameter of the abutment surface 31 of the worktable body 32 of the cooling worktable 30, so that it is positioned closer to the inner periphery of the movable baffle 53 than the warm air jet 52 on the heating plate 51.

[0057] In Embodiment 1, the bending plate 90 is formed with uniform thickness and a warped shape at a position closer to the center of the workpiece 201 held by the frame holding unit 200 than the workpiece 201 held by the frame holding unit 200. Therefore, the upper surface of the bending plate 90 is a warped curved surface 92 with a warped shape at a position closer to the center of the workpiece 201 held by the frame holding unit 200 than the workpiece 201 held by the frame holding unit 200. Thus, the bending plate 90 includes a curved surface 92.

[0058] In implementation method 1, such as Figure 3 As shown, the nozzle 91 is located at the center of the curved plate 90, and air from the air supply source 95 is supplied via the supply path 93 and the on / off valve 94. Since the curved surface 92 of the curved plate 90 is curved as described above, the air supplied from the air supply source 95 and ejected from the nozzle 91 remains between the curved surface 92 and the workpiece 201, thereby preventing the warm air 300 ejected from the warm air jet section 52 from intruding between the curved surface 92 and the workpiece 201.

[0059] Next, this specification will describe the processing operation of the aforementioned extension device 1. Figure 4 It is shown schematically in Figure 2 The diagram shows a cross-sectional view of the state in which the annular frame of the workpiece unit is mounted on the frame mounting plate of the expansion device. Figure 5 It is shown schematically.Figure 4 A cross-sectional view of the frame holding unit of the extension device shown fixed the state of the annular frame. Figure 6 is a schematic view showing the extension of the annular frame 211 by the extension device 1. Figure 5 A cross-sectional view of the frame holding unit of the extension device shown fixed the state of the annular frame. Figure 7 is a schematic view showing the extension of the annular frame 211 by the extension device 1. Figure 6 A cross-sectional view of the frame holding unit of the extension device shown fixed the state of the annular frame.

[0060] The extension device 1 of the above structure registers the processing content information in the control unit 100, and starts the processing operation when a processing start instruction is accepted. In the processing operation, the extension device 1 lowers the frame placement plate 21, and positions the abutting surface 31 of the work table main body 32 of the cooling work table 30 at a position higher than the lower surface 24 of the frame pressing plate 22. The extension device 1 closes the on-off valves 61, 71, 81, 94, 524, cools the work table main body 32 by the cooling unit 33, closes the on-off valves to supply electric power from the direct current power supply to the coil heater 522, and opens the opening 12 by the on-off door 13 in the state where the coil heater 522 is heated. The extension device 1 inserts the processed object unit 200 into the chamber 10 through the opening 12, and places the annular frame 211 of the processed object unit 200 inserted into the chamber 10 on the upper surface 23 of the frame placement plate 21 as shown. Figure 4 The extension device 1 closes the opening 12 by the on-off door 13, opens the on-off valves 61, 81 to blow out compressed air from the compressed air blowout port 63, and supplies compressed air from the compressed air supply source 82 to between the work table main body 32 and the work table cover 36 of the cooling work table 30. The extension device 1 extends the rod 45 of the lift cylinder 42 to raise the frame placement plate 21, and lowers the work table main body 32 and the like of the cooling work table 30 by the work table lift unit 34.

[0061] The extension device 1 closes the opening 12 by the on-off door 13, opens the on-off valves 61, 81 to blow out compressed air from the compressed air blowout port 63, and supplies compressed air from the compressed air supply source 82 to between the work table main body 32 and the work table cover 36 of the cooling work table 30. The extension device 1 extends the rod 45 of the lift cylinder 42 to raise the frame placement plate 21, and lowers the work table main body 32 and the like of the cooling work table 30 by the work table lift unit 34.

[0062] The extension device 1 closes the opening 12 by the on-off door 13, opens the on-off valves 61, 81 to blow out compressed air from the compressed air blowout port 63, and supplies compressed air from the compressed air supply source 82 to between the work table main body 32 and the work table cover 36 of the cooling work table 30. The extension device 1 extends the rod 45 of the lift cylinder 42 to raise the frame placement plate 21, and lowers the work table main body 32 and the like of the cooling work table 30 by the work table lift unit 34. Figure 5 The extension device 1 holds the annular frame 211 and the outer peripheral side of the extension sheet 210 between the frame pressing plate 22 located below and the frame placement plate 21, and positions the abutting surface 31 and the lower surface of the sealing member 26 on the same plane, close to the DAF 212 attached to the extension sheet 210 as shown.

[0063] The extension device 1 further raises the frame placement plate 21, and raises the work table main body 32 and the like of the cooling work table 30 by the work table lift unit 34 at the timing when the extension sheet 210 comes into contact with the abutting surface 31. In addition, when the extension sheet 210 comes into contact with the abutting surface 31, the DAF 212 is cooled by the cooling unit 33 through the extension sheet 210 and the work table main body 32.

[0064] The expanding device 1 causes the frame pressing plate 22 to be pushed up by the annular frame 211 and the frame placement plate 21 and the like, and to rise to a position where the lower surface 24 of the frame pressing plate 22 is higher than the lower end of the roller member 44, and positions the abutting surface 31 of the table main body 32 of the cooling table 30 and the lower end of the roller member 44 on the same plane by the table lifting unit 34. Thus, as shown in Figure 6 The expanding device 1 causes the frame pressing plate 22 to be pushed up by the annular frame 211 and the frame placement plate 21 and the like, and to rise to a position where the lower surface 24 of the frame pressing plate 22 is higher than the lower end of the roller member 44, and positions the abutting surface 31 of the table main body 32 of the cooling table 30 and the lower end of the roller member 44 on the same plane by the table lifting unit 34. Thus, as shown in

[0065] When the stretching force is thus applied to the expanding sheet 210 attached to the back surface 207 of the workpiece 201 in a radial manner, since the workpiece 201 is formed with the modification layer 208 along the division predetermined line 205, the workpiece 201 is divided into individual chips 202 along the division predetermined line 205 with the modification layer 208 as a base point. Also, regarding the DAF 212 attached to the back surface 207 of the workpiece 201, the force in the expanding direction from the expanding sheet 210 is concentrated between the chips 202 when the workpiece 201 is divided into individual chips 202, and thus the DAF 212 is divided along with the individual chips 202. In the expanding device 1, when the rod 45 of the lifting cylinder 42 ends the extension, the on-off valve 71 is opened, and the workpiece 201, i.e., the individual chips 202 obtained by the division, is sucked and held on the abutting surface 31 of the table main body 32 of the cooling table 30 through the expanding sheet 210.

[0066] The expanding device 1 causes the frame pressing plate 22 to be pushed up by the annular frame 211 and the frame placement plate 21 and the like, and to rise to a position where the lower surface 24 of the frame pressing plate 22 is higher than the lower end of the roller member 44, and positions the abutting surface 31 of the table main body 32 of the cooling table 30 and the lower end of the roller member 44 on the same plane by the table lifting unit 34. Thus, as shown in Figure 7 The expanding device 1 closes the on-off valve 61, stops the blowing of the compressed air from the compressed air blowing outlet 63, opens the on-off valve 94, and supplies air between the curved surface 92 of the bending plate 90 and the workpiece 201 sucked and held by the abutting surface 31 of the table main body 32 of the cooling table 30. Also, the expanding device 1 opens the on-off valve 524, and rotates the heating plate 51 by the heating plate rotation motor 54 while blowing the warm air 300 from the warm air jetting section 52.

[0067] Also, the expanding device 1 separates the expanding sheet 210 from the roller member 44 as the frame placement plate 21 and the like are lowered, and thus blows the warm air 300 to the slack portion of the expanding sheet 210 between the outer peripheral side of the workpiece 201 and the inner peripheral edge of the annular frame 211 due to the temporary expansion along the entire circumference, and heats and shrinks the slack portion.

[0068] Further, the expansion device 1 provides air from the air supply source 95 to between the curved plate 90 and the workpiece 201 when the expansion sheet 210 between the outer periphery of the workpiece 201 and the inner periphery of the annular frame 211 is heated and shrunk. Thus, the curved plate 90 includes the curved surface 92 described above and the air outlet 91 is formed on the curved surface 92, thereby forming the air reservoir 301 in which air provided from the air supply source 95 is accumulated between the curved surface 92 and the workpiece 201. The expansion device 1 suppresses the warm air 300 from intruding into the air reservoir 301, that is, suppresses the workpiece 201 and the abutting surface 31 of the workbench main body 32 of the cooling workbench 30 from being heated by the warm air 300 by forming the air reservoir 301. In this way, the curved plate 90 suppresses the warm air 300 ejected from the warm air ejection section 52 from intruding between the curved plate 90 and the workpiece 201.

[0069] In the expansion device 1, when the rod 45 of the lift cylinder 42 ends the shortening, the opening and closing valves 71, 81, 94, 524 are closed, the opening 12 is opened by the opening and closing door 13, the workpiece 201 is divided into individual chips 202, and the DAF 212 is carried out to the outside of the chamber 10 as the workpiece unit 200 after the division into individual chips 202. The workpiece 201 divided into individual chips 202 and the workpiece unit 200 in which the DAF 212 is divided into individual chips 202 is heated and shrunk after the expansion of the expansion sheet 210 in a state in which the workpiece 201 is suction-held to the abutting surface 31 of the workbench main body 32 of the cooling workbench 30, and thus it is possible to suppress the chips 202 after the division from rubbing against each other. Further, the expansion device 1 repeatedly performs the processes illustrated in the drawing and sequentially and continuously divides the workpieces 201 of a plurality of workpiece units 200 into individual chips 202 and divides the DAF 212 into individual chips 202. Figure 4 to Figure 7

[0070] ​As explained above, the extension device 1 of the embodiment 1 has the curved plate 90 as the warm air intrusion prevention member that suppresses intrusion of the warm air 300 blown from the warm air blowing section 52 between the curved plate 90 and the workpiece 201. Therefore, the extension device 1 can suppress the warm air 300 from intruding between the workpiece 201 and the curved plate 90 in the region where the workpiece 201 is cooled by the cooling stage 30, i.e., between the stage main body 32 and the curved plate 90, and can suppress the atmospheric temperature therebetween from rising, can cool the DAF 212 attached to the back surface 207 of the next workpiece 201, and can suppress poor cooling of the workpiece 201 and the DAF 212 at the time of extension of the extension sheet 210. As a result, the extension device 1 functions to eliminate the slack of the extension sheet 210 of the workpiece unit 200 after extension and prevent damage of the chip 202 even when the extension sheets 210 of a plurality of workpiece units 200 are continuously extended, and can suppress poor cooling of the next workpiece unit 200 after extension and can suppress occurrence of poor separation.

[0071] In addition, in the extension device 1 of the embodiment 1, the curved plate 90 includes the curved surface 92 on which the air ejection port 91 that ejects air is formed, and the air accumulation 301 is formed between the curved surface 92 and the workpiece 201, so that the warm air 300 can be suppressed from intruding between the curved surface 92 and the workpiece 201.

[0072] In addition, in the extension device 1 of the embodiment 1, when the extension sheet 210 is heated and shrunk, the on-off valve 81 is opened to supply the compressed air supplied from the compressed air supply source 82 to between the stage main body 32 and the cooling unit 33 of the cooling stage 30 and the stage cover 36, so that the compressed air supplied from the compressed air supply source 82 flows around the air accumulation 301, so that the warm air 300 can be suppressed from intruding into the air accumulation 301.

[0073] [Modified Example]

[0074] A modified example of the extension device of the embodiment 1 of the present application will be described with reference to the drawings. Figure 8 is a cross-sectional view schematically showing a structure example of the extension device of the modified example of the embodiment 1. In addition, Figure 8 In the modified example, the same reference numerals are given to the same parts as those of the embodiment 1, and the description will be omitted.

[0075] The extension device 1-1 of the modification of Embodiment 1 is provided with the cooling table 30 not having the table cover 36 and the extension drum 41-1 below the workpiece unit 200 held by the frame holding unit 20, and the heating unit 50 above the workpiece unit 200, the frame pressing plate 22 is fixed, and the extension drum 41-1 is installed to the extended rod 47 of the drum cylinder 46, and is raised to a position higher than the upper surface 23 of the frame placement plate 21 together with the cooling table 30, thereby extending the extension sheet 210, and is the same as the extension device 1 of Embodiment 1 except for this. In addition, Figure 8 The chamber 10 is omitted.

[0076] The extension device 1-1 of the modification has the bent plate 90 as the warm air intrusion prevention member, and thus can suppress the intrusion of the warm air 300 between the table main body 32 and the bent plate 90 to raise the atmosphere temperature therebetween, and has the same effect as Embodiment 1 that even in the case of continuously extending the extension sheets 210 of a plurality of workpiece units 200, the relaxation of the extension sheets 21 of the workpiece units 200 after extension can be eliminated to prevent the damage of the chips 202, and the poor cooling of the next workpiece unit 200 to be extended can be suppressed, and the occurrence of the poor separation can be suppressed.

[0077] In addition, the present application is not limited to the above-described embodiments. That is, various modifications can be made and implemented within the scope of the gist of the present application. In addition, in Embodiment 1, the frame pressing plate 22 of the frame holding unit 20 is provided to be liftable, but in the present application, the frame pressing plate 22 of the frame holding unit 20 can be fixed to the chamber 10.

[0078] In addition, in Embodiment 1, an example in which the modified layer 208 as the separation starting point is formed on the workpiece 201 along the separation predetermined line 205 is described, but in the present application, it is not limited to the modified layer 208. In the present application, the workpiece 201 can be subjected to cutting or laser ablation processing to be separated into individual chips 202 along the separation predetermined line 205 before extension in the extension device 1, or the workpiece 201 can be subjected to cutting or laser ablation processing to form a processing groove recessed from the front surface 204 along the separation predetermined line 205. In addition, in Embodiment 1, the workpiece unit 200 has the workpiece 201 and the DAF 212, but in the present application, it is not limited to this, and can have one of the workpiece 201 and the DAF 212 and not the other.

Claims

1. An expanding apparatus which expands an expanding sheet of a processed object unit constituted by a processed object, the expanding sheet adhered to the processed object, and a ring-shaped frame adhered to an outer peripheral side of the expanding sheet, wherein the expanding apparatus has: a frame holding member which holds the ring-shaped frame of the processed object unit; a cooling table which includes an abutting surface of a size corresponding to the processed object, the cooling table abutting against the expanding sheet of the processed object unit including the ring-shaped frame held by the frame holding member; an expanding member which expands the expanding sheet adhered to the ring-shaped frame held by the frame holding member; a heating member which has a warm air injection portion which injects warm air facing the expanding sheet between the outer peripheral side of the processed object and the inner periphery of the ring-shaped frame; a warm air intrusion prevention member which is provided between the processed object and the warm air injection portion, has a gas injection port which injects gas toward the processed object, and prevents intrusion of the warm air injected from the warm air injection portion; and a table cover which covers the outer periphery of the cooling table, and blows out compressed air from between the table cover and the cooling table when the heating member injects warm air to the expanding sheet between the outer peripheral side of the processed object and the inner periphery of the ring-shaped frame.

2. The expanding apparatus according to claim 1, wherein when the expanding sheet is expanded by the expanding member while the adhesive film between the processed object and the expanding sheet is cooled by the cooling table, the table cover blows out the compressed air from between the table cover and the cooling table, and the frame holding member blows out compressed air from the blowout port provided throughout the entire circumference.

3. The expanding apparatus according to claim 1 or 2, wherein the warm air intrusion prevention member includes a curved surface which faces the processed object, is formed to a size corresponding to the abutting surface, has a warp in a manner that a distance between the curved surface and the processed object becomes farther at a position closer to the center side than the outer peripheral side of the processed object, and the injection port is formed in the curved surface, thereby forming an air reservoir between the curved surface and the processed object. ​ ​ ​ ​ ​ ​ ​ ​ ​

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