How to remove cutting tools

Abstract

The present invention provides a method of removing a cutting tool. A machining device has a flange mechanism (25). The flange mechanism has a fixed flange (26) having a boss (43) formed with an external thread (434) and a support surface (441) projecting radially from the boss to support a cutting tool (21), a pressing flange (27) to which the cutting tool is clamped between the pressing flange and the fixed flange, and a fixing nut (28) fastened to the boss to fix the cutting tool through the pressing flange. The fixed flange includes a suction hole (45) formed in the support surface to suction-fix the cutting tool, a suction passage (47) to communicate the suction hole with a suction source (41), an on-off valve (40) formed in the suction passage, and a control device (100) to open and close the on-off valve, which opens the on-off valve when the pressing flange (27) is removed.

Description

Technical Field

[0001] The present invention relates to a method for removing a cutting tool from a machining device having a flange mechanism. Background Art

[0002] A known processing device uses a cutting tool to cut various plate-shaped workpieces, such as semiconductor substrates, resin package substrates, and ceramic substrates, made of silicon, gallium arsenide, SiC (silicon carbide), sapphire, and the like (see, for example, Patent Documents 1 and 2). The processing device described in Patent Document 1 cuts the workpiece using a cutting tool, called a washer tool, consisting solely of a cutting edge.

[0003] The machining device disclosed in Patent Document 2 includes a tool replacement mechanism that sucks and holds a pressing flange together with a cutting tool to replace the cutting tool together with the pressing flange, and fixes the cutting tool by sandwiching it between the pressing flange and a fixing flange.

[0004] Patent Document 1: Japanese Patent Application Laid-Open No. 2016-144838

[0005] Patent Document 2: Japanese Patent Application Laid-Open No. 2016-64450

[0006] However, in the processing device disclosed in Patent Document 2, when the pressing flange is removed from the fixing flange, the washer cutter, which is attracted and held together with the pressing flange, may fall from the pressing flange and be damaged. This problem is particularly likely to occur when removing the pressing flange in a processing device having a cutter replacement mechanism, such as the processing device disclosed in Patent Document 2. Summary of the Invention

[0007] Therefore, an object of the present invention is to provide a method for removing a cutting tool from a machining device, which can suppress damage to the cutting tool during replacement.

[0008] According to the present invention, a method for removing a cutting tool is provided, wherein the cutting tool is a cutting tool in a processing device having a flange mechanism, the flange mechanism being used to mount a disc-shaped cutting tool having a mounting hole in the center on a spindle serving as a rotating axis, the flange mechanism being characterized in that the flange mechanism comprises: a fixed flange portion having a convex portion with an external thread formed at a front end and a supporting surface protruding radially from the convex portion to support the cutting tool; a pressing flange portion having a mounting hole mounted on the convex portion, the cutting tool mounted on the convex portion being clamped between the pressing flange portion and the fixed flange portion; and a fixing nut having an internal thread formed on the inner circumference thereof that screws into the external thread of the convex portion. The fixing nut is fastened to the protrusion to fix the cutting tool through the pressing flange, and the fixed flange includes: a suction hole formed on the supporting surface to suck and fix the cutting tool; a suction path to connect the suction hole with a suction source; a valve formed on the suction path; and a control part to open and close the valve to control the suction. In the method for removing the cutting tool, when removing the pressing flange, the valve is opened to suck and hold the cutting tool on the fixed flange so that the cutting tool does not fall. After removing the pressing flange, the valve is closed to stop the fixed flange from sucking and holding the cutting tool, and the cutting tool is removed.

[0009] In the method of removing the cutting tool, the processing device may also have a cutting tool replacement mechanism for loading and unloading the cutting tool relative to the flange mechanism, and the cutting tool replacement mechanism has: a nut loading and unloading part, which loads and unloads the fixing nut; a tool loading and unloading part, which loads and unloads the cutting tool; and a pressing flange loading and unloading part, which loads and unloads the pressing flange part.

[0010] The present invention has the effect of being able to suppress damage to the cutting tool during replacement. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a perspective view showing a configuration example of the processing apparatus according to the first embodiment.

[0012] Figure 2 It will Figure 1 A perspective view showing an exploded view of a cutting unit of the machining device shown.

[0013] Figure 3 yes Figure 2 A cross-sectional view of the main parts of the cutting unit is shown.

[0014] Figure 4 It shows Figure 1 A perspective view of a tool loading and unloading unit of a cutting tool loading and unloading mechanism of a machining device is shown.

[0015] Figure 5 It shows Figure 4A perspective view of the main parts of the pressing flange attachment and detachment section of the tool attachment and detachment unit shown.

[0016] Figure 6 It shows Figure 4 A perspective view of the main parts of the nut mounting and removal section of the tool mounting and removal unit shown.

[0017] Figure 7 It shows Figure 4 The figure shows a perspective view of the main part of the tool attachment and detachment section of the tool attachment and detachment unit.

[0018] Figure 8 yes Figure 1 A side view of a pressing flange attachment and detachment portion of a processing apparatus in a state where the pressing flange is being attached and detached is shown, wherein a cutting unit is shown in section.

[0019] Figure 9 yes Figure 1 A side view of a tool attachment and detachment portion of a machining device showing a state in which a cutting tool is being attached and detached, wherein a cutting unit is shown in cross section.

[0020] Label Description

[0021] 1: Machining device; 6: Cutting tool replacement mechanism; 21: Cutting tool; 23: Spindle; 25: Flange mechanism; 26: Fixed flange (fixed flange portion); 27: Pressing flange (pressing flange portion); 28: Fixed nut; 40: Opening and closing valve (valve); 41: Suction source; 43: Protrusion; 45: Suction hole; 47: Suction path; 83: Pressing flange loading and unloading portion; 84: Nut loading and unloading portion; 85: Tool loading and unloading portion; 100: Control device (control portion); 212: Mounting hole; 271: Mounting hole; 281: Internal thread; 434: External thread; 441: Support surface. DETAILED DESCRIPTION

[0022] The embodiments of the present invention will be described in detail with reference to the accompanying drawings. The present invention is not limited to the contents described in the following embodiments. In addition, the constituent elements described below include those that can be easily imagined by those skilled in the art and are substantially the same. In addition, the structures described below can be appropriately combined. In addition, various omissions, replacements, or changes in the structure can be made within the scope of the present invention.

[0023] [Implementation Method 1]

[0024] A processing apparatus according to a first embodiment of the present invention will be described with reference to the accompanying drawings. Figure 1 It is a perspective view showing a configuration example of the processing apparatus according to the first embodiment. Figure 2 It will Figure 1 A perspective view showing an exploded view of a cutting unit of the machining device shown. Figure 3 yes Figure 2 A cross-sectional view of the main parts of the cutting unit is shown.

[0025] (Processing equipment)

[0026] The processing device 1 of the first embodiment is Figure 1 The cutting device shown in FIG. 1 is used to cut a workpiece 200. In Embodiment 1, the workpiece 200 is a wafer such as a circular semiconductor wafer or an optical device wafer made of a base material such as silicon, gallium arsenide, SiC (silicon carbide), or sapphire. On a front surface 201 of the workpiece 200, devices 203 are formed within regions partitioned in a grid pattern by a plurality of predetermined dividing lines 202 formed in a grid pattern.

[0027] The workpiece 200 of the present invention may be a so-called TAIKO (registered trademark) wafer having a thin center portion and a thicker outer periphery. Besides wafers, it may also be a rectangular resin-encapsulated substrate having multiple resin-sealed components, a ceramic substrate, a ferrite substrate, a substrate containing at least one of nickel and iron, a glass substrate, etc. In the first embodiment, the workpiece 200 is supported by the annular frame 205 by adhering its back surface 204 to an adhesive tape 206 having an annular frame 205 attached to its outer periphery.

[0028] Figure 1 The processing device 1 shown is a cutting device that holds a workpiece 200 by a chuck table 10 and performs cutting processing (equivalent to processing) along a predetermined dividing line 202 by a cutting tool 21. Figure 1 As shown, the processing device 1 includes: a chuck worktable 10, which uses a holding surface 11 to attract and hold the workpiece 200; a cutting unit 20, which uses a cutting tool 21 to cut the workpiece 200 held by the chuck worktable 10; a shooting unit (not shown) which shoots the workpiece 200 held by the chuck worktable 10; a cutting tool replacement mechanism 6; and a control device 100 as a control unit.

[0029] In addition, if Figure 1As shown, the processing device 1 has a moving unit 30 that moves the chuck table 10 and the cutting unit 20 relative to each other. The moving unit 30 includes at least: an X-axis moving unit 31 as a processing feed unit, which feeds the chuck table 10 in the X-axis direction parallel to the horizontal direction; a Y-axis moving unit 32 as an indexing feed unit, which feeds the cutting unit 20 in the Y-axis direction parallel to the horizontal direction and perpendicular to the X-axis direction; a Z-axis moving unit 33 as a plunge feed unit, which feeds the cutting unit 20 in the Z-axis direction parallel to the vertical direction perpendicular to both the X-axis direction and the Y-axis direction; and a rotation moving unit 34 that rotates the chuck table 10 around an axis parallel to the Z-axis direction.

[0030] The X-axis moving unit 31 moves the chuck table 10 in the X-axis direction, which serves as the machining feed direction, thereby performing machining feed relative to the chuck table 10 and the cutting unit 20 along the X-axis direction. The Y-axis moving unit 32 moves the cutting unit 20 in the Y-axis direction, which serves as the indexing feed direction, thereby performing indexing feed relative to the chuck table 10 and the cutting unit 20 along the Y-axis direction. The Z-axis moving unit 33 moves the cutting unit 20 in the Z-axis direction, which serves as the plunge feed direction, thereby performing plunge feed relative to the chuck table 10 and the cutting unit 20 along the Z-axis direction.

[0031] The X-axis moving unit 31, the Y-axis moving unit 32 and the Z-axis moving unit 33 have: a well-known ball screw, which is configured to rotate freely around the axis; a well-known motor, which causes the ball screw to rotate around the axis; and a well-known guide rail, which supports the chuck worktable 10 or the cutting unit 20 so that it can move freely in the X-axis direction, the Y-axis direction or the Z-axis direction.

[0032] The chuck table 10 is in the shape of a disk, and the holding surface 11 for holding the workpiece 200 is formed of porous ceramics or the like. In addition, the chuck table 10 is configured to be movable in the X-axis direction between the processing area 2 below the cutting unit 20 and the loading and unloading area 3 away from the bottom of the cutting unit 20 for loading and unloading the workpiece 200, through the X-axis moving unit 31, and is configured to be rotatable around an axis parallel to the Z-axis direction through the rotation moving unit 34. The chuck table 10 is connected to a vacuum suction source not shown in the figure, and suction is performed by the vacuum suction source to suck and hold the workpiece 200 placed on the holding surface 11. In embodiment 1, the chuck table 10 sucks and holds the back side 204 of the workpiece 200 through the adhesive tape 206. In addition, as Figure 1 As shown, a plurality of clamping parts 12 for clamping the annular frame 205 are provided around the chuck table 10 .

[0033] The cutting unit 20 is a cutting member to which a cutting tool 21 for cutting a workpiece 200 held by the chuck table 10 is detachably mounted. The cutting unit 20 is provided so as to be movable in the Y-axis direction relative to the workpiece 200 held by the chuck table 10 by a Y-axis moving unit 32 and in the Z-axis direction by a Z-axis moving unit 33.

[0034] like Figure 1 As shown, the cutting unit 20 is installed on the support frame 5 that is upright from the device body 4 by means of the Y-axis moving unit 32 and the Z-axis moving unit 33. The cutting unit 20 can position the cutting tool 21 at any position on the holding surface 11 of the chuck table 10 by the Y-axis moving unit 32 and the Z-axis moving unit 33.

[0035] like Figure 2 As shown, the cutting unit 20 includes a cutting tool 21 , a spindle housing 22 , a spindle 23 rotatably provided in the spindle housing 22 , a rotary joint 24 , and a flange mechanism 25 .

[0036] The cutting tool 21 is an extremely thin, roughly annular cutting tool. In the first embodiment, the cutting tool 21 is a so-called washer tool consisting solely of a cutting edge 211. The cutting edge 213 is formed of abrasive grains such as diamond or CBN (Cubic Boron Nitride) and a bonding material such as metal or resin, and is formed to a predetermined thickness. The cutting tool 21 is formed into a disc shape with a mounting hole 212 at the center of the cutting edge 211.

[0037] The spindle housing 22 is supported movably in the Z-axis direction by a Z-axis moving unit 33, and is supported movably in the Y-axis direction by a Y-axis moving unit 32 via the Z-axis moving unit 33. The spindle housing 22 accommodates the spindle 23 except for the distal end portion and a spindle motor (not shown), and supports the spindle 23 rotatably about its axis.

[0038] The spindle 23 serves as a rotating shaft rotated by a spindle motor (not shown), and its front end protrudes beyond the front end surface 221 of the spindle housing 22. The front end of the spindle 23 gradually tapers toward the front end, and a threaded hole 231 is provided in the front end surface.

[0039] The rotary joint 24 transmits the attractive force that secures the cutting tool 21 to the fixing flange 26 of the flange mechanism 25. The rotary joint 24 integrally includes an annular flange portion 241, through which the front end of the spindle 23 passes, and a cylindrical protrusion 242 extending vertically from the inner edge of the flange portion 241. The flange portion 241 overlaps the front end surface 221 of the spindle housing 22, extending from the inside through the front end of the spindle 23. A screw (not shown) is screwed through a through hole 243 provided in the flange portion 241 and into a threaded hole 222 provided in the front end surface 221, thereby securing the rotary joint 24 to the spindle housing 22. The rotary joint 24 is arranged coaxially with the spindle 23.

[0040] Furthermore, a suction tube 244 is attached to the convex portion 242 of the rotary joint 24. The suction tube 244 extends vertically from the inner edge of a through hole extending through the convex portion 242 and is connected to a suction source 41 such as a vacuum pump via an on-off valve 40. The on-off valve 40 opens and closes the connection between the suction source 41 and the inner circumference of the convex portion 242 of the rotary joint 24.

[0041] The flange mechanism 25 is fixed to the spindle 23 and is used to mount the cutting tool 21 on the front end of the spindle 23. Figure 2 and Figure 3 As shown, the flange mechanism 25 includes a fixing flange 26 as a fixing flange portion, a pressing flange 27 as a pressing flange portion, and a fixing nut 28 .

[0042] The fixing flange 26 has a cylindrical convex portion 43 and a flange portion 44 that protrudes radially outward from the central portion in the axial direction of the convex portion 43. The convex portion 43 is fixed to the front end portion of the main shaft 23. Figure 3 As shown, the inner circumferential surface of the protrusion 43 includes a stepped portion 431 and a tapered portion 432. The stepped portion 431 is provided on the front end side farther from the spindle housing 22 than the flange portion 44, so that the inner diameter of the protrusion 43 gradually decreases from the front end farther from the spindle housing 22 toward the base end closer to the spindle housing 22. The surface of the stepped portion 431 is formed flat along a direction perpendicular to the axis of the protrusion 43, i.e., the fixing flange 26.

[0043] The tapered portion 432 is formed along the axial center of the protrusion 43 to the base end, so that the inner diameter of the protrusion 43 gradually increases from the axial center toward the base end. The fixing flange 26 is inserted into the front end of the spindle 23 at the base end of the protrusion 43. The fixing screw 292, which passes through the washer 291 overlapping the surface of the stepped portion 431, is screwed into the threaded hole 231 provided in the front end surface of the spindle 23, thereby securing the fixing flange 26 to the front end of the spindle 23. When the fixing flange 26 is secured to the front end of the spindle 23, the tapered portion 432 is in close contact with the front end of the spindle 23.

[0044] The convex portion 43 includes a tool-supporting convex portion 433 that protrudes outward from the center of the outer peripheral surface in the axial direction and is integral with the flange portion 44. The tool-supporting convex portion 433 is located closer to the front end than the flange portion 44, and its outer diameter is equal to the inner diameter of the mounting hole 212 of the cutting tool 21. The convex portion 43 is inserted from the front end into the mounting hole 212 of the cutting tool 21, supporting the cutting tool 21 on the outer peripheral surface of the tool-supporting convex portion 433. Furthermore, the convex portion 43 has an external thread 434 formed at the front end of the outer peripheral surface.

[0045] The flange portion 44 is an annular member that protrudes radially outward from the center portion of the convex portion 43 in the axial direction. The outer diameter of the flange portion 44 is smaller than the outer diameter of the cutting tool 21. The flange portion 44 has a support surface 441 that faces the cutting tool 21. The inner circumference of the mounting hole 212 of the cutting tool 21 is supported by the tool-supporting convex portion 433. The support surface 441 has a support protrusion 442 formed along the entire circumference of the outer edge, which protrudes toward the front end, i.e., the cutting tool 21. The end surface 443 of the support protrusion 442 is formed flat and perpendicular to the axis of the fixed flange 26. The flange portion 44 supports the cutting tool 21 by placing the cutting tool 21 in close contact with the end surface 443 of the support protrusion 442.

[0046] The fixing flange 26 also includes a suction hole 45, a suction passage 46, the aforementioned on-off valve 40, and a control device 100. The suction hole 45 is formed on the support surface 441 and is used to suction and fix the cutting tool 21 using the suction force from the suction source 41. In the first embodiment, the suction hole 45 opens at a position on the inner circumference side of the support protrusion 442 of the support surface 441, and a plurality of suction holes 45 are provided at equal intervals in the circumferential direction.

[0047] Suction passage 46 is formed within fixed flange 26 and connects suction hole 45 with the inner circumference of rotary joint 24. One end of suction passage 46 connects to suction hole 45, while the other end opens onto the outer circumferential surface of convex portion 43 and faces the inner circumferential surface of rotary joint 24. Suction passage 46 and suction tube 244 of rotary joint 24 form suction path 47, which connects suction hole 45 with suction source 41. Therefore, on-off valve 40 is formed within suction path 47. Fixed flange 26 includes suction path 47.

[0048] The fixing flange 26 opens the on-off valve 40 , and the suction source 41 suctions the suction hole 45 via the suction passage 47 , thereby sucking and holding the cutting tool 21 on the end surface 443 of the support protrusion 442 of the support surface 441 .

[0049] The pressing flange 27 is formed into a circular ring with a mounting hole 271 at its center. The mounting hole 271 is mounted on the protrusion 43 of the fixed flange 26. The outer diameter of the pressing flange 27 is smaller than that of the cutting tool 21. The front end of the protrusion 43 of the fixed flange 26 is inserted into the mounting hole 271. The pressing flange 27 has a clamping surface 272 along its entire circumference. The cutting tool 21 is clamped between the clamping surface 272 and the end surface 443 of the support protrusion 442 on the support surface 441 of the fixed flange 26. The clamping surface 272 is formed flat and perpendicular to the axis of the pressing flange 27. The pressing flange 27 clamps the cutting tool 21 between the clamping surface 272 and the support protrusion 442 on the support surface 441 of the fixed flange 26 via the clamping surface 272. Furthermore, a fitting groove 273 is formed along the entire circumference of the outer peripheral surface of the pressing flange 27. The support surface 441 refers to the region extending annularly from the outer periphery of the convex portion 43 to the end surface 443. In the first embodiment, the suction hole 45 is opened at a position inward of the end surface of the support protrusion 442 of the support surface 441 of the fixed flange 26, but it may be opened at another position on the support surface 441, such as the end surface.

[0050] The fixing nut 28 is formed in a circular ring shape, and has an internal thread 281 formed on the inner circumference thereof, which is screwed into the external thread 434 of the protrusion 43. The fixing nut 28 is fastened to the protrusion 43 by screwing the internal thread 281 into the external thread 434 of the protrusion 43 of the fixing flange 26. The fixing flange 26 allows the protrusion 43 of the fixing flange 26 to pass through the mounting hole 271 of the pressing flange 27, thereby clamping the cutting tool 21 between the end face 443 of the support protrusion 442 and the clamping surface 272. The fixing nut 28 is fastened to the protrusion 43, thereby fixing the cutting tool 21 between the fixing flange 26 and the pressing flange 27 via the pressing flange 27. Figure 2 As shown, the fixing nut 28 is provided with four pin fitting holes 282 at equal intervals in the circumferential direction on the end surface.

[0051] The cutting unit 20 thus constructed has the rotary joint 24 fixed to the front end surface 221 of the spindle housing 22. The fixing flange 26 is passed through the front end of the spindle 23 inside the base end of the protrusion 43 and is fixed to the front end of the spindle 23 by means of a fixing screw 292 or the like. The inner circumferential surface of the mounting hole 212 of the cutting tool 21 is supported on the outer circumferential surface of the tool supporting protrusion 433. In the cutting unit 20, the front end side of the protrusion 43 of the fixing flange 26 is inserted into the inner side of the mounting hole 271 of the pressing flange 27, and the internal thread 281 is threadedly engaged with the external thread 434. The pressing flange 27 and the cutting tool 21 are then fixed to the front end of the spindle 23 using the fixing nut 28.

[0052] Furthermore, the axes of the main shaft 23 , the rotary joint 24 , the fixing flange 26 , the cutting blade 21 , the pressing flange 27 , and the fixing nut 28 of the cutting unit 20 are set to be parallel to the Y-axis direction.

[0053] The imaging unit is fixed to the cutting unit 20 so as to move integrally therewith. The imaging unit includes an imaging element for imaging the area to be cut of the workpiece 200 held by the chuck table 10 before cutting. The imaging element is, for example, a CCD (Charge-Coupled Device) imaging element or a CMOS (Complementary Metal Oxide Semiconductor) imaging element. The imaging unit images the workpiece 200 held by the chuck table 10 to obtain an image used for, for example, alignment (i.e., alignment of the workpiece 200 with the cutting tool 21), and outputs the obtained image to the control device 100.

[0054] The machining apparatus 1 also includes an X-axis position detection unit (not shown) for detecting the X-axis position of the chuck table 10; a Y-axis position detection unit (not shown) for detecting the Y-axis position of the cutting unit 20; and a Z-axis position detection unit for detecting the Z-axis position of the cutting unit 20. The X-axis position detection unit and the Y-axis position detection unit can be composed of a linear scale and a read head parallel to the X-axis or Y-axis directions. The Z-axis position detection unit detects the Z-axis position of the cutting unit 20 using motor pulses. The X-axis position detection unit, the Y-axis position detection unit, and the Z-axis position detection unit output the X-axis position of the chuck table 10 and the Y-axis or Z-axis position of the cutting unit 20 to the control device 100. In the first embodiment, the X-axis, Y-axis, and Z-axis positions of the various components of the machining apparatus 1 are determined using a predetermined reference position (not shown) as a reference.

[0055] The control device 100 controls each component of the machining device 1 to cause the machining device 1 to perform machining operations on the workpiece 200. Specifically, the control device 100 opens and closes the on-off valve 40 to control the suction of the cutting tool 21 by the fixed flange 26. Furthermore, the control device 100 is a computer, and the control unit 100 includes: an arithmetic processing unit having a microprocessor such as a CPU (central processing unit); a storage device having a memory such as a ROM (read-only memory) or a RAM (random access memory); and an input / output interface device. The arithmetic processing unit of the control device 100 performs arithmetic processing according to a computer program stored in the storage device, and outputs control signals for controlling the machining device 1 to the various components of the machining device 1 via the input / output interface device.

[0056] The control device 100 is connected to a display unit (not shown) such as a liquid crystal display device that displays the status and images of the machining operation, and an input unit used by the operator to register machining details, etc. The input unit is composed of at least one of an external input device such as a touch panel provided on the display unit and a keyboard.

[0057] (Cutting tool replacement mechanism)

[0058] Figure 4 It shows Figure 1 A perspective view of a tool loading and unloading unit of a cutting tool loading and unloading mechanism of a machining device is shown. Figure 5 It shows Figure 4 A perspective view of the main parts of the pressing flange attachment and detachment section of the tool attachment and detachment unit shown. Figure 6 It shows Figure 4 A perspective view of the main parts of the nut mounting and removal section of the tool mounting and removal unit shown. Figure 7 It shows Figure 4 The figure shows a perspective view of the main part of the tool attachment and detachment section of the tool attachment and detachment unit.

[0059] The cutting tool replacement mechanism 6 is configured to attach and detach the cutting tool 21 to and from the fixing flange 26 of the flange mechanism 25 of the cutting unit 20. Figure 1 As shown, the cutting tool replacement mechanism 6 is provided in a position aligned with the chuck table 10, which is positioned in the loading and unloading area 3 of the apparatus main body 4, in the Y-axis direction. The cutting tool replacement mechanism 6 includes a tool stocker 70 that holds the cutting tool 21 before and after replacement, and a tool loading and unloading unit 80 that loads and unloads the cutting tool 21 to and from the spindle 23 of the cutting unit 20 and transports the cutting tool 21 between the tool stocker 70 and the cutting unit 20.

[0060] The tool stocker 70 includes a stocker main body 71 that is attached to the apparatus main body 4 and a tool holding portion 72 for holding the cutting tool 21. A plurality of tool holding portions 72 are provided on the stocker main body 71. In the first embodiment, the tool stocker 70 includes two tool holding portions 72. The cutting tools 21 held by the tool holding portions 72 of the tool stocker 70 include unused cutting tools 21, used cutting tools 21 that have not reached the end of their life, and usable cutting tools 21 of the same type and / or different types.

[0061] In the first embodiment, the axes of the two tool holding portions 72 of the tool stocker 70 are arranged parallel to the Y-axis direction. The two tool holding portions 72 are arranged at a distance from each other in the X-axis direction.

[0062] The tool attachment and detachment unit 80 attaches the cutting tool 21 to the fixed flange 26 of the flange mechanism 25 of the cutting unit 20 and detaches the cutting tool 21 from the fixed flange 26. Figure 1 As shown, the tool attachment unit 80 includes a unit body 81 , an attachment-side moving unit 82 that moves the unit body 81 in the X-axis direction, a press flange attachment portion 83 , a nut attachment portion 84 , and a pair of tool attachment portions 85 .

[0063] The attachment-side moving unit 82 includes a threaded shaft extending in the X-axis direction and threadably engaged with a nut provided on the unit main body 81; and a motor that rotates the threaded shaft about its axis, thereby moving the unit main body 81 in the X-axis direction. The attachment-side moving unit 82 moves the unit main body 81, namely, the pressing flange attachment portion 83, the nut attachment portion 84, and the pair of tool attachment portions 85 in the X-axis direction. The attachment-side moving unit 82 moves the tool attachment portion 85 in the X-axis direction between a position facing the tool holding portion 72 in the Y-axis direction and a position facing the flange mechanism 25 of the cutting unit 20 in the Y-axis direction.

[0064] The pressing flange detachable portion 83 holds the pressing flange 27 and detaches the pressing flange 27 relative to the fixed flange 26 fixed to the front end of the spindle 23 of the cutting unit 20. The axis of the pressing flange detachable portion 83 is arranged parallel to the Y-axis direction. Figure 5 As shown, the pressing flange loading and unloading portion 83 includes: a shell 831, which is fixed to the unit body 81 and has a cylindrical appearance; a rod 832, which is freely and retractably arranged at the front end of the shell 831; a disc-shaped supporting base 833, which is installed at the front end of the rod 832; and a claw 834, which is installed on the supporting base 833.

[0065] The rod 832 is a rod of an air cylinder (not shown) disposed within the housing 831. It extends and retracts to move the support base 833 and the claws 834 in the Y-axis direction. Multiple claws 834 are circumferentially spaced apart on the outer edge of the end surface 835 of the support base 833, which faces the tool holding portion 72 of the tool storage 70. In Embodiment 1, three claws 834 are circumferentially spaced apart on the outer edge of the end surface 835 of the support base 833. The multiple claws 834 are configured to move freely in the radial direction of the end surface 835 via a drive mechanism (not shown) disposed within the support base 833 or elsewhere. The multiple claws 834 engage with the engagement grooves 273 of the pressing flange 27 by approaching each other, thereby gripping the pressing flange 27. The claws 834 release their grip on the pressing flange 27 by moving apart.

[0066] The nut attachment and detachment portion 84 is used to attach and detach the fixing nut 28 relative to the protrusion 242 of the fixing flange 26. The axis of the nut attachment and detachment portion 84 is arranged parallel to the Y-axis direction. The nut attachment and detachment portion 84 and the pressing flange attachment and detachment portion 83 are arranged at a distance in the X-axis direction. Figure 6 As shown, the nut loading and unloading portion 84 includes: a shell 841, which is fixed to the unit body 81 and has a cylindrical appearance; a rod 842, which is freely and telescopically arranged at the front end of the shell 841 and is arranged to be freely rotatable around the axis; a disc-shaped supporting base 843, which is fixed to the front end of the rod 842; a claw 844, which is mounted on the supporting base 843; and a plurality of engaging pins 846, which are arranged on the end face 845 of the supporting base 843 facing the tool holding portion 72 of the tool storage device 70.

[0067] The rod 842 is a rod of an air cylinder (not shown) provided in the housing 841, and moves the support base 843, the claw 844, and the engaging pin 846 in the Y-axis direction by extending and retracting. The rod 842 is rotated about its axis by a motor (not shown) provided in the housing 841.

[0068] A plurality of claws 844 are arranged at intervals along the circumferential direction on the end surface 845 of the support base 843. In the first embodiment, four claws 844 are provided at equal intervals along the circumferential direction on the end surface 845 of the support base 843. The claws 844 are arranged to move freely in the radial direction of the end surface 845 by a drive mechanism (not shown) provided within the support base 843. The claws 844 grip the outer circumferential surface of the fixing nut 28 by approaching each other and release their grip on the fixing nut 28 by moving away from each other.

[0069] In Embodiment 1, four engaging pins 846 are provided on the support base 843 so as to protrude freely from the end surface 845 . In the embodiment 1, four engaging pins 846 are provided at equal intervals along the circumferential direction on the end surface 845 . When projecting from the end surface 845 , the engaging pins 846 can be engaged with the pin engaging holes 282 of the fixing nut 28 .

[0070] A pair of tool attachment and detachment sections 85 attach and detach the cutting tool 21 to and from the fixed flange 26. In the first embodiment, one tool attachment and detachment section 85 removes a replacement cutting tool 21 held in the tool stocker 70 from the tool stocker 70 and holds it, while the other tool attachment and detachment section 85 removes the cutting tool 21 from the fixed flange 26 of the cutting unit 20 and holds the replaced cutting tool 21 removed from the cutting unit 20. In the first embodiment, the axes of the pair of tool attachment and detachment sections 85 are arranged parallel to the Y-axis direction and spaced apart from each other in the X-axis direction. Furthermore, the height of the axis of the tool attachment and detachment section 85 in the Z-axis direction is equal to the height of the axis of the two tool holding sections 72 in the tool stocker 70 in the Z-axis direction.

[0071] like Figure 7As shown, the tool loading and unloading portion 85 includes: a shell 851, which is fixed to the unit body 81 and has a cylindrical appearance; a rod 852, which is freely and retractably arranged at the front end of the shell 851; and a disc-shaped support base 853, which is installed at the front end of the rod 852.

[0072] The rod 852 is a rod of an air cylinder (not shown) disposed within the housing 851. It extends and retracts to move the support base 853 in the Y-axis direction. The support base 853 has an annular suction groove 854 formed on its end surface 855, which faces the tool holding portion 72 of the tool stocker 70. The suction groove 854 is connected to a suction source 858 via a suction passage 856 and an on-off valve 857 disposed within the support base 853. The tool attachment portion 85 uses the suction source 858 to suction the interior of the suction groove 854, thereby suctioning and retaining the cutting tool 21 on the end surface 855 of the support base 853. Furthermore, in the first embodiment, the tool attachment portion 85 has a protrusion entry hole 859 provided in the center of the end surface 855, into which the distal end of the protrusion 43 can enter.

[0073] (Processing action of processing device)

[0074] In the processing device 1, the operator registers the processing content information in the control device 100, places the workpiece 200 before cutting on the holding surface 11 of the chuck worktable 10, and installs the replacement cutting tool 21 on the tool holding part 72 of the tool storage device 70 of the cutting tool replacement mechanism 6.

[0075] Then, when the operator instructs to start the machining operation, the machining device 1 starts the machining operation. When the machining device 1 starts the machining operation, the back surface 204 of the workpiece 200 is sucked and held on the holding surface 11 of the chuck table 10 via the adhesive tape 206, and the annular frame 205 is clamped by the clamping portion 12.

[0076] During machining, the machining apparatus 1 moves the chuck table 10 toward the machining area 2 via the X-axis moving unit 31. The imaging unit captures an image of the workpiece 200, and alignment is performed based on the image captured by the imaging unit. While the machining apparatus 1 moves the workpiece 200 and the cutting unit 20 relative to each other along the intended dividing lines 202, the cutting tool 21 cuts into each intended dividing line 202, separating the workpiece 200 into individual components 203. The machining apparatus 1 moves the workpiece 200, now separated into individual components 203, toward the loading / unloading area 3. Within the loading / unloading area 3, the suction holding of the holding surface 11 and the clamping of the clamping portion 12 are released, concluding the machining operation.

[0077] (Loading and unloading of cutting tools)

[0078] Figure 8 yes Figure 1 A side view of a pressing flange attachment and detachment portion of a processing apparatus in a state where the pressing flange is being attached and detached is shown, wherein a cutting unit is shown in section. Figure 9 yes Figure 1 A side view of a tool attachment and detachment portion of a machining device showing a state in which a cutting tool is being attached and detached, wherein a cutting unit is shown in cross section.

[0079] In the first embodiment, the processing device 1 performs a loading and unloading operation of the cutting tool 21 when the control device 100 determines that the cutting tool 21 of the cutting unit 20 is at a tool replacement timing during the processing operation. The tool replacement timing refers to the timing of replacing the cutting tool 21 of the cutting unit 20. The tool replacement timing is, for example, the timing when a predetermined number of workpieces 200 are cut or the timing when the wear of the cutting tool 21 exceeds a predetermined value, and is registered in the control device 100 as part of the processing content information. In addition, the tool replacement timing of the present invention can be the timing of replacing the workpiece 200 when a workpiece 200 is being processed or when a plurality of workpieces 200 are being processed continuously.

[0080] The loading and unloading operation is an operation for removing the cutting tool 21 from the cutting unit 20 and attaching a replacement cutting tool 21 held by the tool stocker 70 to the cutting unit 20. In other words, the loading and unloading operation of the cutting tool 21 is an operation for replacing the cutting tool 21 held by the tool stocker 70 with the cutting tool 21 attached to the cutting unit 20.

[0081] During the loading and unloading operation, the machining device 1 stops the rotation of the spindle 23 of the cutting unit 20. At this time, the on-off valve 40 opens, and the cutting tool 21 is sucked and held by the fixed flange 26 by the suction force of the suction source 41. During the loading and unloading operation, the machining device 1 moves the tool loading and unloading unit 80 in the X-axis direction via the loading and unloading side movement unit 82, so that the tool loading portion 85 of the tool loading and unloading unit 80 and the tool holding portion 72 of the tool stocker 70 face each other in the Y-axis direction.

[0082] The machining device 1 extends the rod 852 of the tool attachment portion 85 to move the support base 853 closer to the tool holding portion 72 in the Y-axis direction, pressing the end surface 855 so that the end surface 855 is in close contact with the cutting tool 21 held in the tool holding portion 72. The on-off valve 857 is opened to suction and hold the replacement cutting tool 21 in the tool attachment portion 85. The machining device 1 then retracts the rod 852 of the tool attachment portion 85 to move the support base 853 away from the tool holding portion 72 in the Y-axis direction, thereby removing the cutting tool 21 from the tool holding portion 72. The machining device 1 controls the attachment-side moving unit 82 and the moving unit 30 via the control device 100, so that the nut attachment portion 84 of the tool attachment unit 80 and the cutting unit 20 face each other in the Y-axis direction.

[0083] The machining device 1 extends the rod 842 of the nut attachment / detachment portion 84, bringing the support base 843 and claw 844 closer to the cutting unit 20 in the Y-axis direction. The claw 844 of the nut attachment / detachment portion 84 grips the fixing nut 28 and rotates the rod 842 about its axis in a direction that disengages the fixing nut 28 from the external thread 434. The machining device 1 then engages the engagement pin 846 with the pin engagement hole 282, rotating the fixing nut 28 along with the support base 843 of the nut attachment / detachment portion 84. After rotating the rod 842 until the fixing nut 28 disengages from the external thread 434, the machining device 1 stops rotating the rod 842 and retracts the rod 842, moving the support base 843 and claw 844 of the nut attachment / detachment portion 84 away from the cutting unit 20 in the Y-axis direction, thereby removing the fixing nut 28 from the protrusion 43 of the fixing flange 26.

[0084] In the machining apparatus 1 , the control device 100 controls the attachment-side moving unit 82 and the moving unit 30 so that the pressing flange attachment portion 83 of the tool attachment unit 80 and the cutting unit 20 face each other in the Y-axis direction.

[0085] The processing device 1 extends the rod 832 of the pressing flange attachment portion 83 so that the support base 833 and the claw 834 approach the cutting unit 20 in the Y-axis direction, and the claw 834 of the pressing flange attachment portion 83 is engaged with the engagement groove 273 so that the pressing flange 27 is gripped by the claw 834. The processing device 1 shortens the rod 832 of the pressing flange attachment portion 83 so that the support base 833 and the claw 834 are separated from the cutting unit 20 in the Y-axis direction. Figure 8 As shown, the pressing flange 27 is removed from the fixing flange 26 of the cutting unit 20. At this time, the control device 100 opens the on-off valve 40 to attract and hold the cutting tool 21 to the fixing flange 26. In this way, when the pressing flange 27 is removed, the control device 100 opens the on-off valve 40 to attract and hold the cutting tool 21 to the fixing flange 26 so that the cutting tool 21 does not fall.

[0086] The processing apparatus 1 controls the attachment-side moving unit 82 and the moving unit 30 by the control device 100 so that the other tool attachment portion 85 of the tool attachment unit 80 and the cutting unit 20 with the fixing nut 28 and the pressing flange 27 removed face each other in the Y-axis direction.

[0087] The processing device 1 extends the rod 852 of the other tool attachment portion 85 to move the support base 853 closer to the tool holding portion 72 in the Y-axis direction, so that the end surface 855 is in close contact with the cutting tool 21 mounted on the fixed flange 26. The on-off valve 857 is opened to attract and hold the cutting tool 21 mounted on the fixed flange 26 to the other tool attachment portion 85. The processing device 1 closes the on-off valve 40 to stop the fixed flange 26 of the cutting unit 20 from attracting and holding the cutting tool 21. The rod 852 of the other tool attachment portion 85 is shortened to move the support base 853 away from the cutting unit 20 in the Y-axis direction. Figure 9 As shown, the cutting tool 21 is removed from the cutting unit 20 .

[0088] The machining apparatus 1 controls the loading and unloading side moving unit 82 and the moving unit 30 via the control device 100, thereby positioning the tool loading and unloading portion 85 holding the replaceable cutting tool 21 opposite the cutting unit 20 from which the cutting tool 21 has been removed in the Y-axis direction. The machining apparatus 1 extends the rod 852 of the tool loading and unloading portion 85, bringing the support base 853 and the cutting unit 20 closer together in the Y-axis direction. The tool 853 passes through the mounting hole 212 of the replaceable cutting tool 21 in sequence on the protrusion 43 of the fixed flange 26 and the tool supporting protrusion 433, thereby bringing the replaceable cutting tool 21 into close contact with the end surface 443 of the support protrusion 442 of the fixed flange 26.

[0089] The machining device 1 opens the on-off valve 40 through the control device 100, suctioning and holding the replaceable cutting tool 21 to the fixed flange 26 of the cutting unit 20. The on-off valve 857 is then closed, releasing the suction and holding of the replaceable cutting tool 21 by the tool attachment unit 85. The machining device 1 then shortens the rod 852 of the tool attachment unit 85, moving the support base 853 of the tool attachment unit 85 away from the cutting unit 20 in the Y-axis direction, and attaches the replaceable cutting tool 21 to the cutting unit 20. Thus, during the attachment and detachment operation, the machining device 1, in conjunction with the opening and closing of the on-off valves 40 and 857, attaches and detaches the cutting tool 21 to and from the fixed flange 26 using the tool attachment unit 80.

[0090] The processing apparatus 1 controls the attachment and detachment moving unit 82 and the moving unit 30 via the control device 100 so that the pressing flange attachment portion 83 faces the cutting unit 20 in the Y-axis direction. The processing apparatus 1 then performs an operation opposite to the operation for removing the pressing flange 27, thereby attaching the pressing flange 27 to the cutting unit 20. The processing apparatus 1 controls the attachment and detachment moving unit 82 and the moving unit 30 via the control device 100 so that the nut attachment portion 84 faces the cutting unit 20 in the Y-axis direction. The processing apparatus 1 then performs an operation opposite to the operation for removing the fixing nut 28, thereby attaching the fixing nut 28 to the cutting unit 20. The cutting tool 21 is fixed to the front end portion of the spindle 23 using the fixing nut 28.

[0091] The machining device 1 moves the tool loading and unloading unit 80 in the X-axis direction via the loading and unloading side movement unit 82, so that the other tool loading and unloading unit 85, which holds the replaced cutting tool 21 removed from the cutting unit 20, faces the tool holding unit 72 of the tool stocker 70 in the Y-axis direction. The machining device 1 extends the rod 852 of the other tool loading and unloading unit 85, moving the support base 853 of the other tool loading and unloading unit 85 closer to the tool holding unit 72 in the Y-axis direction. After holding the replaced cutting tool 21 in the tool holding unit 72, the machining device 1 closes the on-off valve 857, releasing the suction and holding effect of the other tool loading and unloading unit 85 on the replaced cutting tool 21. The machining device 1 then retracts the rod 852 of the other tool loading and unloading unit 85, moving the support base 853 away from the tool holding unit 72 in the Y-axis direction, completing the loading and unloading operation.

[0092] As described above, in the machining apparatus 1 of the first embodiment, when the pressing flange 27 is removed from the fixed flange 26 of the cutting unit 20, the on-off valve 40 is opened, and the cutting tool 21 is suctioned and held by the fixed flange 26. Therefore, in the machining apparatus 1, when the pressing flange 27 is removed from the fixed flange 26 of the cutting unit 20, the cutting tool 21 can be prevented from falling off (dropping) from the cutting unit 20. As a result, the machining apparatus 1 achieves the effect of preventing damage to the cutting tool 21 during replacement.

[0093] The present invention is not limited to the above-described embodiment, and can be implemented with various modifications without departing from the spirit of the present invention.

Claims

1. A method for removing a cutting tool, wherein the cutting tool is a cutting tool in a machining device having a flange mechanism for mounting the disc-shaped cutting tool having a mounting hole in the center thereof on a spindle serving as a rotating axis, wherein: The flange mechanism has: a fixed flange portion having a convex portion with an external thread formed at a front end thereof and a support surface protruding radially from the convex portion to support the cutting tool; A pressing flange portion having a mounting hole mounted on the convex portion, wherein a cutting tool mounted on the convex portion is clamped between the pressing flange portion and the fixing flange portion; and A fixing nut is formed on its inner periphery with an internal thread that screws into the external thread of the convex portion. The fixing nut is fastened to the convex portion to fix the cutting tool via the pressing flange portion. The fixing flange portion comprises: a suction hole formed in the support surface for suctioning and fixing the cutting tool; a suction passage connecting the suction hole to a suction source; a valve formed in the suction path; as well as A control unit that opens and closes the valve to control suction, In the method of removing a cutting tool, When the pressing flange is removed, the valve is opened to attract and hold the cutting tool to the fixing flange so that the cutting tool does not fall. After the pressing flange is removed, the valve is closed to stop the fixing flange from sucking and holding the cutting tool, and the cutting tool is removed.

2. The method for removing a cutting tool according to claim 1, wherein: The processing device also has a cutting tool replacement mechanism for loading and unloading the cutting tool relative to the flange mechanism. The cutting tool changing mechanism has: a nut mounting and dismounting portion for mounting and dismounting the fixing nut; a tool loading and unloading portion for loading and unloading the cutting tool; and The pressing flange attaching and detaching portion attaches and detaches the pressing flange portion.

Images