Movable fast high vacuum pumping system

Abstract

The present invention belongs to vacuum sealing technology, and specifically relates to a movable fast high vacuum pumping system, including a vacuum chamber, and a molecular pump connected to the vacuum chamber, and also including a mechanical pump. The mechanical pump is connected to the side exhaust pipe of the vacuum chamber through a bellows, and a connecting pipeline is provided on the top of the vacuum chamber; a vacuum chamber isolation valve is provided on the side exhaust pipe, and a vacuum chamber vent valve is provided on the top of the vacuum chamber. In order to meet the fast high vacuum conditions, a vacuum system including a mechanical pump, a bellows, a molecular pump and a pipeline control valve is designed and installed; a valve mechanism is provided in the vacuum chamber and the exhaust pipe, including an exhaust valve, a rough exhaust valve and a vacuum chamber isolation valve, which can respectively realize the inflation, pre-exhaust and coordinated exhaust functions of the vacuum chamber.

Description

Technical Field

[0001] The invention belongs to vacuum sealing technology, and in particular relates to a movable fast high vacuum pumping system. Background Art

[0002] At present, the commonly used composite vacuum systems are all faced with the problems of complex structure, immobility, and inability to pump to the -3Pa level of high vacuum. The vacuum systems that can meet the high vacuum or ultra-high vacuum levels are relatively expensive and equipment-specific. They are not suitable for the vacuum systems required for small-volume (no more than 10L) sealed spaces. Therefore, it is necessary to design a vacuum system with a simple structure, portability, and the ability to quickly pump to a high vacuum. Summary of the invention

[0003] The object of the present invention is to provide a portable rapid high vacuum pumping system which is low in price and easy to use.

[0004] The technical solution of the present invention is as follows:

[0005] A movable fast high vacuum pumping system comprises a vacuum chamber, a molecular pump connected to the vacuum chamber, and a mechanical pump. The mechanical pump is connected to a side pumping pipeline of the vacuum chamber through a bellows, and a connecting pipeline is provided on the top of the vacuum chamber; a vacuum chamber isolation valve is provided on the side pumping pipeline, and a vacuum chamber air release valve is provided on the top of the vacuum chamber.

[0006] The bellows is connected to the side exhaust pipe of the vacuum chamber, and a mechanical pump rough exhaust valve is arranged on the subsequent connecting pipe.

[0007] The vacuum chamber is provided with a resistance gauge and an ionization gauge.

[0008] The resistance gauge and ionization gauge are respectively connected to the vacuum gauge power supply.

[0009] The molecular pump is connected to a molecular pump power supply and a display.

[0010] The connecting pipe is a quartz tube or a corrugated tube.

[0011] It also includes a supporting structure, on which the vacuum chamber, molecular pump and mechanical pump are all placed.

[0012] The supporting structure comprises a supporting base plate at the bottom and a supporting frame arranged on the supporting base plate.

[0013] A movable pulley is arranged below the supporting bottom plate.

[0014] The molecular pump is connected to a cooling fan.

[0015] The remarkable effects of the present invention are as follows:

[0016] A portable and movable support frame is designed, including a movable pulley, a supporting base plate, and a supporting rod; 4 pulleys are installed at the 4 corners of the bottom of the support frame, which can slide 360 ​​degrees at will and be locked at any time.

[0017] In order to meet the conditions of fast high vacuum, a vacuum system including a mechanical pump, bellows, molecular pump and pipeline control valves was designed and installed; valve mechanisms were set in the vacuum chamber and the exhaust pipeline, including a vent valve, a rough exhaust valve and a vacuum chamber isolation valve, which can respectively realize the inflation, pre-exhaust and coordinated exhaust functions of the vacuum chamber.

[0018] The corresponding molecular pump power supply, vacuum gauge and vacuum gauge power supply are matched for vacuum monitoring and power control of the entire system. The molecular pump power supply is fixed to the support rod on the support frame, which can display the molecular pump speed in real time and switch between high and low speed gears, which is suitable for speed selection with different vacuum requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of a movable rapid high vacuum pumping system;

[0020] In the figure: 1. Moving pulley; 2. Mechanical pump; 3. Bellows; 4. Support frame; 5. Molecular pump power supply and display; 6. Vacuum gauge power supply; 7. Resistance gauge; 8. Ionization gauge; 9. Vacuum chamber venting valve; 10. Mechanical pump roughing valve; 11. Vacuum chamber isolation valve; 12. Vacuum chamber; 13. Molecular pump; 14. Molecular pump cooling fan; 15. Support base plate; 16. Connecting pipes. DETAILED DESCRIPTION

[0021] The present invention will be further described below through the accompanying drawings and specific implementation methods.

[0022] Designed movable support frame, such as Figure 1 As shown, it includes a supporting base plate 15, a movable pulley 1 installed under the supporting base plate 15, and a supporting frame 4 installed on the supporting base plate 15. A molecular pump power supply and display 5 and a vacuum gauge power supply 6 are placed on the supporting frame 4.

[0023] The vacuum chamber 12 is placed on a supporting base plate 15 , and a molecular pump 13 is connected below the vacuum chamber 12 . A cooling fan 14 can be installed on the molecular pump 13 to cool the molecular pump 13 and prevent the molecular pump from overheating due to high-speed rotation and causing damage to the pump body.

[0024] The mechanical pump 2 is installed on the supporting base plate 15, and the bellows 3 is connected to the mechanical pump 2. One end of the bellows 3 is connected to the side exhaust pipe of the vacuum chamber 12, and the other end of the bellows 3 is connected to the mechanical oil pump 2, which functions to realize simultaneous or separate exhaust of the vacuum chamber 12 and the exhausted components.

[0025] A connecting pipe 16 is designed on the top of the vacuum chamber 12, and the connecting pipe 16 is connected to a tube in which a sample requiring high vacuum condition measurement is placed, or a container requiring sealing leakage detection.

[0026] A vacuum chamber isolation valve 11 is installed on the side exhaust pipe of the vacuum chamber 12 to isolate the mechanical pump 2 and the molecular pump 13 to perform vacuuming to different degrees. A vacuum chamber vent valve 9 is installed on the top of the vacuum chamber 12 to fill in external air after the exhaust is completed to separate the exhaust system from the exhausted components.

[0027] After the bellows 3 is connected to the side exhaust pipe of the vacuum chamber 12, a mechanical pump rough exhaust valve 10 is installed on the connected pipe for early low vacuum exhaust of the exhaust system.

[0028] The resistance gauge 7 and the ionization gauge 8 are installed on the top of the vacuum chamber and connected to the vacuum gauge power supply 6, and are used to measure the air pressure values ​​under low vacuum and high vacuum conditions in the vacuum chamber respectively.

[0029] The molecular pump power supply and display 5 are placed on the support frame 4 and are connected to the molecular pump 13 for starting the operation of the molecular pump 13 and monitoring the rotation speed.

[0030] The vacuum gauge power supply 6 is connected to the resistance gauge 7 and the ionization gauge 8 and is placed on the top of the support frame 4 to supply power to the resistance gauge 7 and the ionization gauge to enable them to achieve measurement and pressure display.

[0031] Example 1: Quartz tube sample high vacuum packaging experiment

[0032] On the top connecting pipe of the vacuum chamber 12, a quartz tube is connected through a silicone tube as an intermediate pipeline, and a sample requiring high vacuum conditions is placed in the quartz tube. After ensuring that all pipelines are well sealed, the molecular pump power supply and the display 5 and the mechanical pump 2 power supply are connected, the mechanical pump 2 is turned on for pre-evacuation, and the mechanical pump rough pumping valve 10 is opened at the same time to perform low vacuum evacuation on the quartz tube. After that, the vacuum gauge power supply 6 is connected, and the real-time pressure data in the vacuum chamber 12 measured by the resistance gauge 7 will be displayed on the left side of the vacuum gauge power supply. When the pressure in the vacuum chamber 12 is evacuated to below 5Pa, the mechanical pump rough pumping valve 10 is closed, and the vacuum chamber isolation valve 11 and the molecular pump 13 are opened at the same time, and the quartz tube is started to be evacuated with high vacuum. For the sealed environment evacuation of the volume below 2L, the molecular pump low speed gear (420Hz) can be used. For the volume above 2L, it should be switched to the high speed gear (780Hz) for evacuation. When the data measured by the ionization gauge 8 on the right side of the vacuum gauge power supply shows the desired vacuum degree, the quartz tube sample can be flame-rotated and sealed, and finally a quartz tube high vacuum sealed sample is obtained for subsequent related experiments. For this system that has completed the vacuum experiment, the vacuum chamber vent valve 9 needs to be opened before the next vacuuming to fill in air to separate the vacuum system and the vacuumed components.

[0033] Example 2: Sealed container leakage detection

[0034] For the container that needs to be sealed and leaked, similar to the above example, the movable fast high vacuum pumping system is connected with a silicone tube or a bellows. Under the condition that all the joints are well sealed, the molecular pump power supply and the display 5 and the mechanical pump 2 power supply are connected, the mechanical pump 2 and the mechanical pump rough pumping valve 10 are opened, and while the vacuum gauge power supply is pumped, the change of the data measured by the resistance gauge 7 on the left side of the vacuum gauge power supply is observed. If it is always atmospheric pressure or only slightly decreased from the atmospheric pressure, it is displayed that the container to be leaked has a large leak hole, and the leak hole position can be detected by the sound of the leak or by applying alcohol. In the process of applying alcohol on the surface of the sealed container, when the reading on the left side of the vacuum gauge power supply 6 rises sharply, it means that there is a leak hole there, and it needs to be repaired. Utilizing the movable fast high vacuum pumping system, the complicated pipeline system and the sealed container can be leaked quickly and effectively, which is convenient and practical.

Claims

1. A movable fast high vacuum pumping system, comprising a vacuum chamber (12) and a molecular pump (13) connected to the vacuum chamber (12), characterized in that: It also includes a mechanical pump (2), the mechanical pump (2) is connected to the side exhaust pipe of the vacuum chamber (12) through a bellows (3), and a connecting pipeline (16) is provided on the top of the vacuum chamber (12); a vacuum chamber isolation valve (11) is provided on the side exhaust pipe, and a vacuum chamber air release valve (9) is provided on the top of the vacuum chamber (12); The bellows (3) is connected to a side exhaust pipe of the vacuum chamber (12), and a mechanical pump rough exhaust valve (10) is provided on the subsequent connecting pipe; The vacuum chamber (12) is provided with a resistance gauge (7) and an ionization gauge (8); The resistance gauge (7) and the ionization gauge (8) are respectively connected to the vacuum gauge power supply (6); The molecular pump (13) is connected to a molecular pump power supply and a display (5); It comprises a supporting structure, on which the vacuum chamber (12), the molecular pump (13) and the mechanical pump (2) are all placed; The connecting pipeline (16) is a quartz tube; a quartz tube is connected to the connecting pipeline at the top of the vacuum chamber (12) through a silicone tube as an intermediate pipeline, and a sample requiring high vacuum conditions is placed in the quartz tube; after ensuring that all pipelines are well sealed, the molecular pump power supply and the display (5) and the mechanical pump (2) power supply are connected, the mechanical pump (2) is turned on for pre-evacuation, and the mechanical pump roughing valve (10) is opened at the same time to perform low vacuum evacuation on the quartz tube; then the vacuum gauge power supply (6) is turned on, and the left side of the vacuum gauge power supply will display the real-time pressure data in the vacuum chamber (12) measured by the resistance gauge (7); when the pressure in the vacuum chamber (12) is evacuated to below 5Pa, the mechanical pump roughing valve is closed. The door (10) is opened, and the vacuum chamber isolation valve (11) and the molecular pump (13) are opened at the same time, and the quartz tube is started to be evacuated with high vacuum. For the sealed environment evacuation with a volume below 2L, the molecular pump adopts the low speed gear, and for the volume above 2L, the molecular pump is switched to the high speed gear for evacuation; when the data measured by the ionization gauge (8) on the right side of the vacuum gauge power supply shows the desired vacuum degree, the quartz tube sample is flame-rotated and sealed, and finally a quartz tube high vacuum sealed sample is obtained; for the movable fast high vacuum evacuation system that completes the evacuation experiment, the vacuum chamber vent valve (9) needs to be opened before the next evacuation to fill in air, so as to separate the evacuation system and the evacuated components.

2. The portable rapid high vacuum pumping system according to claim 1, characterized in that: The supporting structure comprises a supporting base plate (15) at the bottom and a supporting frame (4) arranged on the supporting base plate (15).

3. The portable rapid high vacuum pumping system according to claim 2, characterized in that: A movable pulley (1) is provided below the supporting bottom plate (15).

4. The portable rapid high vacuum pumping system according to claim 1, characterized in that: The molecular pump (13) is connected to a cooling fan (14).

Images