Measuring element and measuring device comprising the same

Abstract

The present disclosure provides a measuring element and a measuring device. The measuring element comprises a substrate and a diaphragm, the diaphragm is fixedly connected to the substrate, and a sealed cavity is defined between the diaphragm and the substrate, the diaphragm is provided with an anti-corrosion layer on its outer surface facing away from the sealed cavity, and the diaphragm is provided with an anti-hydrogen permeation layer on its inner surface facing the sealed cavity. The measuring device comprises the above-mentioned measuring element.

Description

Technical Field

[0001] The present disclosure relates to a measuring element and a measuring device comprising such a measuring element. Background Art

[0002] The contents in this section merely provide background information related to the present disclosure and may not constitute prior art.

[0003] In the industrial production process of coal chemical industry, papermaking, cement and other industries, when the medium to be measured (or called process medium) is a substance under other harsh conditions such as viscosity, high temperature, strong corrosiveness, etc., a remote measuring device is usually used for measurement. The remote measuring device isolates the medium to be measured, such as corrosive, from the transmitter through a remote measuring element. The remote measuring element may include a diaphragm and a substrate, wherein a sealed cavity filled with a working fluid is formed between the diaphragm and the substrate. During the measurement process, the medium to be measured contacts the diaphragm, so that, for example, the pressure of the medium to be measured can be measured or monitored by the change in fluid pressure on both sides of the diaphragm.

[0004] However, on the one hand, since the medium to be measured is usually highly corrosive, the diaphragm exposed to such highly corrosive medium for a long time is prone to damage and shorten its service life. On the other hand, since many of the media to be measured are hydrogen-rich media, the hydrogen in the medium to be measured will pass through the diaphragm into the sealed cavity and accumulate to cause pressure deviation, thereby causing inaccurate measurement accuracy of the measuring device. In severe cases, the diaphragm may swell or even rupture.

[0005] Therefore, there is an urgent need to provide an improved measuring element and measuring device. Summary of the invention

[0006] The purpose of the present disclosure is to provide an improved measuring element and measuring device to achieve at least one of the following purposes: improve measurement accuracy, extend service life, simplify installation process, save production costs, and expand application scope.

[0007] According to one aspect of the present disclosure, a measuring element is provided, comprising a substrate and a diaphragm, wherein the diaphragm is fixedly connected to the substrate, and a sealed cavity is defined between the diaphragm and the substrate, the diaphragm is provided with an anti-corrosion layer on its outer surface facing away from the sealed cavity, and the diaphragm is provided with an anti-hydrogen permeation layer on its inner surface facing the sealed cavity.

[0008] According to one aspect of the present disclosure, the base body has a flange formed around the outer circumference of the diaphragm, and the flange defines an area on the inner side thereof where the measuring element contacts the medium to be measured.

[0009] According to one aspect of the present disclosure, the spacer is fixedly connected to the base body by resistance seam welding.

[0010] According to one aspect of the present disclosure, the anti-corrosion layer is a perfluoroalkoxyalkane (PFA) coating coated on the outer surface of the flange, the outer surface of the separator, and the outer surface of the joint region between the flange and the separator.

[0011] According to one aspect of the present disclosure, the hydrogen permeation prevention layer is a gold-plated layer plated on the inner surface of the separator, and the gold-plated layer continuously extends beyond the connection area between the separator and the substrate.

[0012] According to one aspect of the present disclosure, the thickness of the gold-plated layer may be less than or equal to 10 micrometers.

[0013] According to one aspect of the present disclosure, a transition piece is disposed on the flange, the transition piece is fixedly connected to the spacer at a first position located radially inwardly thereof, and the transition piece is fixedly connected to the flange of the base at a second position located radially outwardly thereof.

[0014] According to one aspect of the present disclosure, the anti-corrosion layer is a perfluoroalkoxyalkane (PFA) coating coated on the outer surface of the adapter and the outer surface of the separator.

[0015] According to one aspect of the present disclosure, the hydrogen permeation prevention layer is a diamond-like carbon (DLC) coating or an oxide coating coated on the inner surface of the separator, and the hydrogen permeation prevention layer continuously extends beyond a connection region between the separator and the transition piece.

[0016] According to one aspect of the present disclosure, the coating thickness of the diamond-like carbon (DLC) coating may be less than or equal to 2 microns, the coating thickness of the gold-plated layer may be less than or equal to 10 microns, and the coating thickness of the oxide coating may be less than or equal to 200 nanometers.

[0017] According to one aspect of the present disclosure, the flange is provided with aerogel between a radially outer end portion of the hydrogen permeation prevention layer and the second position.

[0018] According to another aspect of the present disclosure, a measuring device is provided, wherein the measuring device includes the above-mentioned measuring element.

[0019] According to the present disclosure, a solution with an improved anti-hydrogen permeation and anti-corrosion structure is provided, wherein an anti-hydrogen permeation layer and an anti-corrosion layer are respectively provided on the inner and outer surfaces of the diaphragm of the measuring element, thereby preventing the diaphragm from being damaged by corrosion while blocking the permeation path through the diaphragm. Since the anti-corrosion layer and the anti-hydrogen permeation layer are closely attached to the diaphragm and are relatively thin, the accuracy of the measurement can be significantly improved. In addition, since the anti-corrosion layer and the anti-hydrogen permeation layer are respectively provided on the inner and outer surfaces of the diaphragm and are formed integrally therewith, there is no need to assemble them on site. Furthermore, the measuring element according to the present disclosure can be applied to various applications including vacuum measurement and small-range measurement. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The features and advantages of one or more embodiments of the present disclosure will become more easily understood through the following description with reference to the accompanying drawings, in which:

[0021] Figure 1 is a three-dimensional schematic diagram of a measuring device according to the present disclosure;

[0022] Figure 2 is a perspective schematic diagram of a measuring element according to a first embodiment of the present disclosure;

[0023] Figure 3 is a schematic cross-sectional view of a measuring element according to a first embodiment of the present disclosure;

[0024] Figure 4 is a partial cross-sectional view of a measuring element according to a first embodiment of the present disclosure;

[0025] Figure 5 is a flow chart schematically showing a processing process of a measuring element according to a first embodiment of the present disclosure;

[0026] Figure 6 is a schematic cross-sectional view of a measuring element according to a second embodiment of the present disclosure;

[0027] Figure 7 is a partial cross-sectional view of a measuring element according to a second embodiment of the present disclosure; and

[0028] Figure 8 is a flow chart schematically showing a processing process of a measuring element according to a second embodiment of the present disclosure. DETAILED DESCRIPTION

[0029] The following description of the preferred embodiment is merely exemplary and is by no means a limitation of the present disclosure and its application or usage. In the various drawings, the same reference numerals are used to represent the same or corresponding parts, so the construction of the same parts will not be described repeatedly.

[0030] In the description herein, for the convenience of description, a remote measuring device for measuring the pressure / pressure difference of a medium to be measured is taken as an example to describe the measuring element and measuring device according to the present disclosure. However, it is to be understood that the present disclosure is not limited to the structure and application described in the following preferred embodiments, and it can be applied to any feasible structure or application, for example, for measuring viscosity, liquid level, etc. Similarly, the present disclosure is not limited to the remote measuring device, and it can also be applied to any feasible device or device. In addition, it should be understood that in the present application, when an element is referred to as "on" or "connected to" another element, it can be directly located on other elements or directly connected to other elements, and there can also be an intermediate element and it can be indirectly located on other elements or indirectly connected to other elements through an intermediate element.

[0031] Figure 1 FIG. 1 shows a schematic diagram of a measuring device according to an embodiment of the present disclosure. Figure 1 As shown, the remote measuring device 1 mainly includes a remote measuring element 10, a transmitter 20, and a capillary 30. The remote measuring element 10 is installed on the side of the medium to be measured to sense the pressure of the medium to be measured and transmit the pressure to the transmitter 20 installed far away from the medium to be measured through the capillary 30, so that the physical quantity measured by the measuring element 10 is converted into the actual required digital quantity and displayed by the transmitter 20. Therefore, the remote measuring device 1 uses the remote measuring element 10 to isolate the medium to be measured under harsh conditions such as viscosity, high temperature, strong corrosiveness, etc. from the transmitter 20, thereby protecting the transmitter.

[0032] Figure 2 FIG. 2 shows a perspective schematic diagram of a measuring element according to a first embodiment of the present disclosure. Figure 2 As shown, the measuring element 10 according to the present disclosure may include a substrate 12 and a diaphragm 14. In the installed state, the diaphragm 14 is in direct contact with the medium to be measured. The substrate 12 may have a flange 16 extending around the outer periphery of the diaphragm 14. The flange 16 may prevent the medium to be measured from flowing outward to an area away from the diaphragm 14, thereby defining an area (hereinafter referred to as a liquid contact area) where the measuring element 10 contacts the medium to be measured on the radial inner side of the flange 16.

[0033] The spacer 14 can be fixedly connected to the base 12 by welding, sintering or other appropriate means. And the spacer 14 can have one or more annular folds, so that the spacer 14 can be appropriately deformed or partially displaced. Alternatively, in the case of having sufficient thickness, one or more recessed portions can be provided on the spacer 14. In the present embodiment, the spacer 14 is a generally circular sheet-like member and has an annular fold, but it should be understood by those skilled in the art that the present disclosure is not limited thereto, and the spacer and its folds or recesses can have any appropriate shape.

[0034] like Figure 2 As shown, the base 12 may have a flange portion 122, and the flange portion 122 may be provided with a through hole 124 for a connecting member (such as a connecting bolt) to pass through. Figure 3 As shown, the substrate 12 may be provided with a recessed portion 126 at a portion corresponding to the diaphragm 14, so as to form a sealed cavity 13 with the substrate 12 through the diaphragm 14. In addition, the substrate 12 may also be provided with a channel 128 in fluid communication with the sealed cavity 13. Before applying the measuring element, a working fluid may be injected into the sealed cavity 13 through the fluid channel 128, and the fluid channel 128 may be closed after the injection is completed. The sealed cavity 13 may contain, for example, silicone, oil, glycerine, propylene glycol or any other suitable working fluid. In use, the diaphragm 14 contacts the medium to be measured on its outer surface facing away from the sealed cavity 13, and the diaphragm 14 contacts the working fluid on the inner surface facing the sealed cavity 13. As a result, the outer surface of the diaphragm 14 is subjected to the pressure of the medium to be measured and produces a displacement, and the displacement is transmitted to the transmitter 20 through the working fluid in the sealed cavity 13, so that the pressure parameters required for process control can be provided.

[0035] However, on the one hand, since the diaphragm 14 is usually relatively thin, some elements or components (such as hydrogen) in the medium to be measured can easily penetrate through the diaphragm 14 into the sealed cavity 13, and then may dissolve into the working fluid and form hydrogen molecules H2. Once combined into hydrogen molecules, since the hydrogen molecules are too large to return to the medium to be measured, they are captured in the working fluid and accumulate more and more over time, which increases the internal pressure of the sealed cavity 13 and even causes the diaphragm to bulge or rupture, thereby affecting the accuracy of the measurement and even causing damage to the measuring element. On the other hand, since the outer surface of the diaphragm 14 is in contact with the medium to be measured, and the medium to be measured may be a highly corrosive medium such as hydrofluoric acid or sodium hydroxide and may even be a highly corrosive medium under high temperature conditions, such a medium is very easy to corrode the diaphragm, which is usually made of metal. Under the influence of the dual factors of hydrogen permeation and corrosion, the diaphragm will soon fail after being put into use, causing the transmitter to drift or the entire measurement system to be scrapped.

[0036] Therefore, there is an urgent need in the art for a solution that can solve both hydrogen permeation and corrosion. An existing solution is to plate gold on a metal diaphragm made of monel alloy 400, and to configure a cover made of corrosion-resistant material on the metal diaphragm. The cover can be made of polymers such as perfluoroalkoxy resin (PFA). The cover is used to protect the metal diaphragm from being corroded by the medium to be measured. However, the cover may reduce the sensitivity of the diaphragm to the pressure applied by the process fluid, which may lead to inaccurate measurements. Moreover, this structure is also not suitable for vacuum measurement. In addition, this structure requires the cover and diaphragm to be assembled on site, and the assembly operation involves exhausting the air between the diaphragm and the cover through a fluid such as oil, which makes the on-site operation complicated and easily leads to measurement errors.

[0037] To this end, the present disclosure proposes a measuring element with an improved anti-hydrogen permeation and anti-corrosion structure. Instead of using a metal diaphragm and a diaphragm cover, an integrated anti-hydrogen permeation and anti-corrosion structure is adopted in the embodiment according to the present disclosure. Specifically, the inner surface and the outer surface of the diaphragm 14 are respectively provided with an anti-hydrogen permeation layer and an anti-corrosion layer, so as to block the permeation path through the diaphragm while preventing the diaphragm from being damaged by corrosion. Since the anti-corrosion layer and the anti-hydrogen permeation layer are closely attached to the diaphragm and are thin, the accuracy of the measurement can be significantly improved. In addition, the anti-corrosion layer and the anti-hydrogen permeation layer are respectively arranged on the inner and outer surfaces of the diaphragm and are integrated therewith, so there is no need to assemble them on site. Furthermore, this integrated anti-hydrogen permeation and anti-corrosion structure can be applied to more types of applications including vacuum measurement and small-range measurement. This integrated anti-hydrogen permeation and anti-corrosion structure will be described in detail below.

[0038] In the hydrogen permeation and corrosion resistant structure disclosed in the present invention, a perfluoroalkoxyalkane (PFA) coating is exemplarily used as an anti-corrosion layer. The perfluoroalkoxyalkane (PFA) coating is a multi-layer composite coating, which includes a primer layer that provides adhesion, an anti-permeation intermediate layer containing a filler, and a topcoat layer applied to the outermost surface and providing chemical corrosion protection. This multi-layer composite coating has a thicker thickness and good wear resistance. And because the perfluoroalkoxyalkane (PFA) coating is inert to most chemical media, it can withstand long-term high temperatures of up to 260°C, has excellent chemical corrosion resistance, excellent anti-permeability and excellent thermal stability, so it can prevent erosion by highly corrosive media and can even be used for a long time under high temperature conditions. And, exemplarily, a gold-plated layer is used as an anti-hydrogen permeation layer for description. However, those skilled in the art will appreciate that the anti-corrosion layer and anti-hydrogen permeation layer of the present invention are not limited to perfluoroalkoxyalkane (PFA) coatings and gold-plated layers, but may adopt fluoropolymer coatings such as FEP, PFA, ETFE, PCTFE, ETCFE, or other suitable anti-corrosion materials and other suitable anti-hydrogen permeation materials other than gold to achieve the purpose of anti-corrosion and anti-hydrogen permeation according to actual applications.

[0039] The inventors have found that since the diaphragm 14 is usually thin and the gold-plated layer is soft, the gold-plated layer is easily scratched and worn by solid particles (such as pulp, gravel, coal slag, etc.) in the medium to be measured. Therefore, if a hydrogen permeation-proof layer such as a gold-plated layer is set on the outer surface of the diaphragm 14, the gold-plated layer is easily worn and loses its expected utility, thereby reducing the wear resistance and service life of the measuring element (or even the measuring device) and reducing the measurement accuracy. In addition, this method requires that the entire outer side surface of the diaphragm 14 and the area between the diaphragm 14 and the substrate 12 are plated with a gold layer, which not only increases the cost, but also increases the manufacturing process, and is not conducive to subsequent transportation and storage.

[0040] In view of the above situation, if Figure 3 and Figure 4 As shown, in an embodiment of the present disclosure, an anti-corrosion layer 144 such as a perfluoroalkoxyalkane (PFA) coating is disposed on the outer surface of the septum 14, and an anti-hydrogen permeation layer 142 such as a gold-plated layer is disposed on the inner surface of the septum 14. Thus, the outer perfluoroalkoxyalkane (PFA) coating can withstand the wear of solid particles of the medium to be measured while maintaining its own performance, while the inner gold-plated layer does not contact the solid particles and will not be affected by the solid particles in the medium to be measured, thereby providing durable and stable anti-corrosion and anti-hydrogen permeation performance at the same time.

[0041] Preferably, the perfluoroalkoxyalkane (PFA) coating can continuously extend to cover the outer surface of the diaphragm 14, the outer surface of the flange 16, and the outer surface of the joint area between the flange 14 and the diaphragm 14. In this way, it is possible to prevent the highly corrosive medium to be measured from penetrating from the outer surface of the diaphragm and the radial periphery of the diaphragm to corrode the diaphragm 14, and it is also possible to prevent the highly corrosive medium from corroding the flange 16, which is usually made of metal, thereby preventing the flange 16 from being damaged and causing the medium to be measured to flow outward from the liquid contact area defined by the flange 16.

[0042] The hydrogen permeation prevention layer 142 may extend continuously beyond the connection region between the separator 14 and the substrate 12 (in other words, the outer diameter of the hydrogen permeation prevention layer should be at least equal to or greater than the outer diameter of the connection region between the separator 14 and the substrate 12) to prevent the formation of a hydrogen permeation path in the connection region between the separator 14 and the substrate 12. Alternatively, the hydrogen permeation prevention layer 142 may fully cover the entire inner side surface of the separator 14.

[0043] The following will be combined Figure 5 The processing of the measuring element according to the first embodiment of the present disclosure is described below. Figure 5 As shown, first, in step S100, a septum 14 and a substrate 12 having a flange 16, a recess 126 and a fluid channel 128 are provided. Next, in step S200, a hydrogen permeation-proof layer 142 such as a gold-plated layer is formed on the outer surface of the septum 14 by a common process such as an electroplating process or a vacuum plating process. The thickness of the gold-plated layer can be less than or equal to 10 microns, for example, the thickness of the gold-plated layer can be 5 microns. Then, in step S300, the periphery of the septum 14 is fixedly connected to the substrate 12 by resistance seam welding (or other methods that do not cause damage to the gold-plated layer in the connection area between the septum and the substrate). Finally, in step S400, an anti-corrosion layer 144 such as a perfluoroalkoxyalkane (PFA) coating is formed on the outer surface of the septum.

[0044] According to the measuring element of the present disclosure, compared with the solution of gold plating on a metal diaphragm made of monel alloy 400 and further configuring a corrosion-resistant cover on the metal diaphragm, the diaphragm can use a common metal material such as 316L stainless steel as a base material, without using expensive monel alloy 400, thereby saving production costs. Furthermore, the measuring element according to the present disclosure can significantly improve the measurement accuracy, simplify the installation process, and is widely applicable to various applications including vacuum measurement, small-range measurement, etc. by utilizing an integrated anti-hydrogen permeation and anti-corrosion structure.

[0045] Refer to the following Figures 6 to 8 , a measuring element according to a second embodiment of the present disclosure is described.

[0046] The structure of the measuring element according to the second embodiment of the present disclosure is substantially the same as that of the measuring element of the first embodiment of the present disclosure, except that an adapter 18 is provided on the flange 16 of the base 12 , and the diaphragm 14 is fixedly connected to the base 12 via the adapter 18 .

[0047] Specifically, the adapter 18 may be fixedly connected to the spacer 14 at a first position P1 located radially inside thereof, and the adapter 18 may be fixedly connected to the flange 16 of the base 12 at a second position P2 located radially outside thereof. In this way, the spacer 14 is fixedly connected to the base 12 through the adapter 18. Preferably, the adapter 18 may extend to the radially outer end of the flange 16, thereby completely covering the flange 16, and preferably, the connection point between the adapter 18 and the flange 16 (i.e., the second position P2) may be located at the radially outer end of the flange 16, thereby facilitating connection operations such as welding.

[0048] The separator 14 according to the second embodiment of the present disclosure may form the anti-corrosion layer 144A on the outer side surface thereof and the hydrogen permeation prevention layer 142A on the inner side surface thereof.

[0049] The hydrogen permeation prevention layer 142A may include a coating having an anti-permeation function, such as an oxide coating, a gold-plated coating, or a diamond-like carbon (DLC) coating. In addition, the hydrogen permeation prevention layer 142A may extend continuously beyond the connection area between the septum 14 and the substrate 12, that is, extend beyond the connection point between the septum 14 and the adapter 18 (i.e., the first position P1), so that the connection area between the septum 14 and the adapter 18 is completely covered with the hydrogen permeation prevention layer to prevent the formation of a hydrogen permeation path in the connection area between the septum 14 and the substrate 12. Optionally, the hydrogen permeation prevention layer 142A may fully cover the entire inner side surface of the septum 14.

[0050] The anti-corrosion layer 144A can continuously extend to cover the outer surface of the diaphragm 14 and the outer surface of the adapter 18, thereby preventing the highly corrosive medium to be measured from causing corrosion damage to the diaphragm and the adapter, which are usually made of metal.

[0051] In addition, the inventors of the present disclosure have also found that although most of the hydrogen will be blocked by the hydrogen permeation prevention layer 142A, there may still be a very small amount of hydrogen that will pass through the hydrogen permeation prevention layer 142A and enter the sealed cavity 13. For this reason, an aerogel can be provided between the second position P2 and the radially outer end of the hydrogen permeation prevention layer. The aerogel can be used to adsorb and store hydrogen, thereby further improving the service life of the measuring element and the measuring device.

[0052] The following will be combined Figure 8The processing of the measuring element according to the second embodiment of the present disclosure is described below. First, in step S100A, a diaphragm 14 and a substrate 12 having a flange 16, a recess 126 and a fluid channel 128 are provided. Next, in step S200A, an adapter 18 is fixedly connected to the diaphragm 14 at a first position P1 located on the radial inner side thereof by an appropriate method such as resistance seam welding, TIG welding or the like. Then, in step S300A, a coating having an anti-penetration function such as an oxide coating, a gold plating coating or a DLC coating is formed on the inner side surface of the diaphragm 14 connected to the adapter 18. Next, in step S400A, the adapter 18 is fixedly connected to the flange 16 of the substrate 12 at a second position P2 located on the radial outer side thereof by a method such as welding or the like. Finally, in step S500A, an anti-corrosion coating is applied to the outer side surfaces of the adapter 18 and the diaphragm 14.

[0053] In the measuring element according to the second embodiment of the present disclosure, the diaphragm 14 is connected to the substrate 12 through the adapter 18 rather than directly, so that the hydrogen permeation-proof layer provided on the inner surface of the diaphragm 14 can be maintained more intact, thereby further improving the accuracy of the measurement. Moreover, even for coatings such as DLC coatings or oxide coatings that are very easily damaged by welding, they can also be applied to the measuring element according to the second embodiment of the present disclosure. Since the oxide coating can only have a nanometer-sized thickness, such as a thickness of about 200nm, and the DLC coating can also only have a thickness of about 2um, when the hydrogen permeation-proof coating of the diaphragm 14 is formed by the oxide coating or the DLC coating, the thickness of the diaphragm 14 can be further reduced and the accuracy of the measurement can be further improved. Of course, it should be understood by those skilled in the art that the thickness of the oxide coating and the DLC coating is not limited to the above values, but can be changed according to the actual application.

[0054] It can be understood from the above analysis that the measuring element and the measuring device according to the present disclosure can improve measurement accuracy, extend service life, simplify the installation process, save production costs and expand the scope of application.

[0055] It should be pointed out here that the present disclosure exemplarily describes the measuring element as a remote measuring element of the measuring device, but those skilled in the art should understand that the present disclosure is not limited to this, and the measuring element can be other measuring elements different from the remote measuring element according to actual conditions, such as a measuring element inside the measuring device.

[0056] Although various embodiments of the present disclosure have been described in detail herein, it should be understood that the present disclosure is not limited to the specific embodiments described and shown in detail herein, and other variations and modifications may be implemented by those skilled in the art without departing from the essential spirit and scope of the present disclosure. All such variations and modifications fall within the scope of the present disclosure.

Claims

1. A measuring element (10), comprising: A substrate (12); as well as a diaphragm (14) fixedly connected to the base (12), and defining a sealed cavity (13) between the base (12) and the diaphragm (14); The invention is characterized in that the diaphragm is provided with an anti-corrosion layer (144, 144A) on its outer surface facing away from the sealed cavity (13), and the diaphragm is provided with an anti-hydrogen permeation layer (142, 142A) on its inner surface facing the sealed cavity (13); The base body (12) has a flange (16) formed around the outer circumference of the diaphragm (14), and the flange defines an area on the inner side where the measuring element contacts the medium to be measured.

2. The measuring element according to claim 1, characterized in that The spacer (14) is fixedly connected to the base body (12) by resistance seam welding.

3. The measuring element according to claim 2, characterized in that The anti-corrosion layer is a perfluoroalkoxyalkane (PFA) coating coated on the outer surface of the flange (16), the outer surface of the separator (14), and the outer surface of the joint area between the flange and the separator.

4. The measuring element according to claim 2 or 3, characterized in that The hydrogen permeation prevention layer is a gold-plated layer plated on the inner surface of the separator (14), and the gold-plated layer continuously extends beyond the connection area between the separator and the substrate.

5. The measuring element according to claim 4, characterized in that The thickness of the gold-plated layer is less than or equal to 10 microns.

6. The measuring element according to claim 1, characterized in that The flange (16) is provided with a transition piece (18), which is fixedly connected to the spacer (14) at a first position (P1) located radially inside the flange (16), and is fixedly connected to the flange (16) of the base body at a second position (P2) located radially outside the flange (16).

7. The measuring element according to claim 6, characterized in that The anti-corrosion layer is a perfluoroalkoxyalkane (PFA) coating coated on the outer surface of the adapter (18) and the outer surface of the septum (14).

8. The measuring element according to claim 6 or 7, characterized in that The hydrogen permeation prevention layer is a diamond-like carbon (DLC) coating, a gold-plated coating or an oxide coating coated on the inner surface of the diaphragm (14), and the hydrogen permeation prevention layer continuously extends beyond the connection area between the diaphragm and the transition piece.

9. The measuring element according to claim 8, characterized in that The coating thickness of the diamond-like carbon (DLC) coating is less than or equal to 2 micrometers, the coating thickness of the gold-plated coating is less than or equal to 10 micrometers, and the coating thickness of the oxide coating is less than or equal to 200 nanometers.

10. The measuring element according to claim 6 or 7, characterized in that The flange (16) is provided with aerogel between the radially outer end of the hydrogen permeation prevention layer and the second position (P2).

11. A measuring device, characterized in that: The measuring device comprises a measuring element according to any one of claims 1-10.

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