A split type vacuum pumping device

Abstract

The present invention discloses a split type vacuum pumping device, including a mechanical pump unit and a molecular pump unit, wherein the mechanical pump unit includes a mechanical pump body, a control module connected to the mechanical pump body, a vacuum gauge, and a mechanical pump frame trolley carrying the mechanical pump body and the control module; the molecular pump unit includes a molecular pump body, a vacuum five-way and a molecular pump controller connected to the molecular pump body, and a molecular pump frame trolley carrying the molecular pump body and the molecular pump controller; wherein a vacuum three-way is installed at the air inlet of the mechanical pump body, and the vacuum three-way is respectively connected with a first resistance gauge and a vacuum hose for measuring the vacuum degree; the vacuum hose is connected to the molecular pump body to realize linkage; the control module includes a PLC integrated machine for controlling the mechanical pump unit and the molecular pump unit, and an electric control module respectively connected to the mechanical pump unit and the molecular pump unit. The present invention has the advantages of being suitable for vacuuming low-temperature insulated gas bottles, and can also be suitable for vacuuming low-temperature storage tanks of various insulation forms.

Description

Technical Field

[0001] The invention relates to the field of cryogenic heat-insulating gas bottles and cryogenic storage tanks, and in particular to a split type vacuum pumping device. Background Art

[0002] Cryogenic insulated gas cylinders, also known as Dewar flasks, can be used to store cryogenic liquids (also known as cryogenic liquid gases) such as liquid nitrogen, liquid oxygen, and liquid natural gas. Cryogenic insulated gas cylinders use a vacuum double-layer insulation method, and the sealed interlayer between the inner and outer containers is a vacuum insulation layer to achieve long-term storage of liquid gas.

[0003] Cryogenic storage tanks are double-layer vacuum insulated storage tanks used to store liquid oxygen, nitrogen, argon and other media. The inner tank is made of austenitic stainless steel, the jacket is made of low carbon steel or low alloy steel, the interlayer in the middle of the tank is filled with pearlescent sand, and then the interlayer is evacuated to achieve the insulation effect.

[0004] At present, most of the equipment for online vacuuming of cryogenic insulated gas cylinders and cryogenic storage tanks is a vacuuming device that integrates a mechanical pump and a molecular pump. This vacuuming device is suitable for vacuuming cryogenic insulated gas cylinders, but not for vacuuming all forms of cryogenic storage tanks.

[0005] There are two types of insulation for cryogenic storage tanks: high vacuum multi-layer winding insulation and pearl sand insulation. The high vacuum multi-layer winding insulation has a higher vacuum degree, and can be vacuumed with a vacuum pumping device that integrates a mechanical pump and a molecular pump. The pearl sand insulation has a lower vacuum degree, and a molecular pump cannot be used when vacuuming a cryogenic storage tank with pearl sand insulation, because if the tiny pearl sand is pumped into the cavity by the molecular pump, it will contaminate the molecular pump and may cause fatal damage to the rotor of the molecular pump. Therefore, the structural state of the existing integrated vacuum pumping device is not universal, and cannot be used to vacuum cryogenic storage tanks with pearl sand insulation. Summary of the invention

[0006] In order to solve the above technical problems, the purpose of the present invention is to disclose a split vacuum pumping device to achieve the purpose of vacuum pumping not only for low-temperature insulated gas cylinders, but also for low-temperature storage tanks with various insulation forms.

[0007] The present invention is realized by the following technical scheme: a split vacuum pumping device, comprising a mechanical pump unit and a molecular pump unit, wherein the mechanical pump unit comprises a mechanical pump body, a control module connected to the mechanical pump body, and a mechanical pump frame trolley carrying the mechanical pump body and the control module; the molecular pump unit comprises a molecular pump body, a vacuum five-way and a molecular pump controller connected to the molecular pump body, and a molecular pump frame trolley carrying the molecular pump body and the molecular pump controller;

[0008] Among them, a vacuum tee is installed at the air inlet of the mechanical pump body, and the vacuum tee is respectively connected to a first resistance gauge and a vacuum hose for measuring the vacuum degree; the vacuum hose is connected to the molecular pump body to achieve linkage; the control module includes a PLC all-in-one machine for controlling the mechanical pump unit and the molecular pump unit, and an electronic control module respectively connected to the mechanical pump unit and the molecular pump unit.

[0009] Through the above technical scheme, the split vacuum pumping device of the present invention divides the existing integrated vacuum pumping unit on the market into two separate parts, one part is a mechanical pump unit, and the other part is a molecular pump unit. It can be used to vacuum low-temperature insulated gas cylinders and low-temperature storage tanks in the form of multi-layer wrapped vacuum insulation. The mechanical pump unit can also be used alone to vacuum low-temperature storage tanks in the form of pearl sand vacuum insulation, thereby improving versatility and flexibility in the use process.

[0010] Furthermore, the electric control module includes a power supply component, an electrical component connected to the power supply component, and an interface component connected to the electrical component; wherein the power supply component supplies power to the mechanical pump unit and the molecular pump unit at the same time.

[0011] Furthermore, the power supply assembly includes a 220V mechanical pump DC power supply, a 96V molecular pump power supply, and a voltage converter installed in the mechanical pump frame trolley.

[0012] Furthermore, the electrical components include a first ionization gauge and a vacuum gauge installed in the mechanical pump unit.

[0013] Furthermore, the electrical components also include a second resistance gauge, an ionization gauge, a 485 communication, a collector and a molecular pump external control installed in the molecular pump unit.

[0014] Furthermore, the interface component includes a system switch connected to the electrical component, a resistance gauge communication interface connected to the first resistance gauge, and an ionization gauge communication interface connected to the ionization gauge.

[0015] Furthermore, the interface component also includes a collector interface, a molecular pump power supply interface, a 485 communication interface, and a molecular pump external control interface; wherein the second resistance gauge is connected to the resistance gauge communication interface, and the ionization gauge is connected to the ionization gauge communication interface; the 485 communication, collector, molecular pump power supply, and molecular pump external control are respectively connected to the 485 communication interface, collector interface, molecular pump power supply interface, and molecular pump external control interface.

[0016] Through the above technical solution, the molecular pump unit is provided with an ionization gauge, a resistance gauge, 485 communication, a collector, a molecular pump power supply, and plugs corresponding to the molecular pump external control are connected to the corresponding interfaces to achieve the purpose of the mechanical pump unit controlling the molecular pump unit.

[0017] Furthermore, the electrical component also includes an air switch, a power socket, a leakage protector, and a vacuum gauge circuit board connected to the vacuum gauge installed in the mechanical pump unit.

[0018] Furthermore, the electrical component also includes a molecular pump driver connected to the molecular pump controller, and the molecular pump controller is connected to a molecular pump power interface.

[0019] Through the above technical solution, the molecular pump controller of the present invention has the function of a voltage converter, that is, converting the 220V voltage into a 96V voltage and then supplying it to the molecular pump to start.

[0020] Furthermore, the molecular pump driver is connected to the PLC integrated machine through a relay group.

[0021] Through the above technical solution, portable vacuum pumps on the market basically do not have PLC control. Some of the ones with PLC control also use a PLC host and a secondary instrument separately. In this way, the components at least include a PLC host and a display screen, which occupy a large installation space in the chassis, making it impossible to make the chassis smaller and lighter. The present invention uses the Haonar PLC all-in-one machine, which is very small and has its own display screen. It is short in depth, does not occupy chassis space, and is convenient for programming and panel installation. In addition, the PLC control program of the present invention mainly considers saving the operator's waiting time;

[0022] Specifically, the molecular pump needs to be started in a vacuum state. Generally, the molecular pump can be started only when the vacuum degree is lower than 10Pa, otherwise it is easy to cause damage to the molecular pump rotor. Our ambient atmospheric pressure is 101.325KPa. To start the molecular pump, you must first use a mechanical pump to evacuate from the ambient atmospheric pressure. It takes a certain amount of time to below 10Pa, and the operator needs to wait during this period; that is, when the vacuum is completed, the molecular pump needs to be turned off first, and the mechanical pump can only be turned off after the molecular pump speed drops to 0. The purpose is to allow a certain negative pressure at the front end of the molecular pump to ensure that the molecular pump speed decreases slowly, thereby extending the service life of the molecular pump. This period of time often takes about 20-30 minutes. If the molecular pump speed of the magnetic levitation is reduced to 0, it will take longer; we take into account that these two time points that require operators to wait are basically inefficient waiting, so automatic control is achieved through PLC programming, so that there is no need for personnel to wait next to the equipment, and the system can automatically complete the molecular pump opening and mechanical pump closing.

[0023] Compared with the prior art, the present invention has the following advantages:

[0024] The split vacuum pumping device of the present invention divides the existing integrated vacuum pumping unit on the market into two separate parts, one part is a mechanical pump unit, and the other part is a molecular pump unit. It can be used to vacuum low-temperature insulated gas cylinders and low-temperature storage tanks in the form of multi-layer wrapped vacuum insulation. The mechanical pump unit can also be used alone to vacuum low-temperature storage tanks in the form of pearl sand vacuum insulation, thereby improving versatility and flexibility in the use process. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a structural schematic diagram of a mechanical pump unit embodied in the present invention;

[0026] Figure 2 It is a structural schematic diagram of the interface assembly of the mechanical pump unit embodied in the present invention;

[0027] Figure 3 It is a schematic diagram of the structure of the circuit module of the mechanical pump group embodied in the present invention;

[0028] Figure 4 is a circuit diagram of a circuit module of a mechanical pump group embodied in the present invention;

[0029] Figure 5 It is a schematic diagram of the structure of a mechanical pump unit and a molecular pump unit embodied in the present invention;

[0030] Figure 6 It is a structural schematic diagram of a molecular pump unit embodied in the present invention;

[0031] Figure 7 It is a schematic diagram of the linkage between the mechanical pump unit and the molecular pump unit according to the present invention.

[0032] In the figure, 1. Mechanical pump unit; 11. Mechanical pump body; 12. PLC integrated machine; 13. Interface component; 131. Resistance gauge communication interface; 132. Ionization gauge communication interface; 133. Collector interface; 134. Molecular pump power interface; 135. 485 communication interface; 136. Molecular pump external control interface; 137. System switch; 138. Vacuum gauge; 139. First resistance gauge; 14. Electronic control module; 141. Relay group; 142. Power supply component; 14 3. Molecular pump driver; 144. Molecular pump controller; 145. Circuit breaker; 146. Vacuum gauge circuit board; 147. Leakage protector; 148. Power socket; 15. Vacuum tee; 16. Vacuum angle valve; 17. Vacuum hose; 18. Mechanical pump frame trolley; 19. Mechanical pump body outlet; 2. Molecular pump unit; 21. Molecular pump body; 22. Five-way valve; 23. Molecular pump frame trolley; 24. Molecular pump outlet; 26. Ionization gauge; 28. Second resistance gauge. DETAILED DESCRIPTION

[0033] The present invention will be further described below in conjunction with the accompanying drawings.

[0034] A split type vacuum pumping device, such as Figure 1 , Figure 5 and Figure 7 As shown, it includes a mechanical pump unit 1 and a molecular pump unit 2, the mechanical pump unit 1 includes a mechanical pump body 11, a control module connected to the mechanical pump body 11, and a mechanical pump frame trolley 18 carrying the mechanical pump body 11 and the control module; the molecular pump unit 2 includes a molecular pump body 21, a vacuum five-way and a molecular pump controller 144 connected to the molecular pump body 21, and a molecular pump frame trolley 23 carrying the molecular pump body 21 and the molecular pump controller 144; wherein, a vacuum tee 15 is installed at the air inlet of the mechanical pump body 11, and the vacuum tee 15 is respectively connected to a first resistance gauge 139 for measuring the vacuum degree and a vacuum hose 17; the vacuum hose 17 is connected to the molecular pump body 21 to achieve linkage;

[0035] like Figure 5 As shown, the control module includes a PLC integrated machine 12 for controlling the mechanical pump unit 1 and the molecular pump unit 2, and an electric control module 14 connected to the mechanical pump unit 1 and the molecular pump unit 2 respectively.

[0036] Specifically, Figure 1 and Figure 2 As shown, a vacuum tee 15 is installed at the air inlet of the mechanical pump body 11, and the two ends of the vacuum tee 15 are respectively connected to the first resistance gauge 139 and the vacuum angle valve 16, and a vacuum hose 17 connected to a low-temperature storage tank in the form of pearl sand vacuum insulation (not shown in the figure) is connected along the outlet of the vacuum angle valve 16;.

[0037] like Figure 2 , Figure 3 and Figure 4As shown, the interface component 13 includes a resistance gauge communication interface 131, an ionization gauge communication interface 132, a collector interface 133, a molecular pump power interface 134, a 485 communication interface 135, a molecular pump external control interface 136, a vacuum gauge 138 and a system switch 137; when in use, in order for the vacuum gauge 138 to monitor the vacuum degree of the mechanical pump unit 1 in real time when evacuating, the first resistance gauge 139 and the vacuum gauge 138 are connected to monitor the vacuum degree value of the mechanical pump unit 1 when the vacuum is low; wherein, the MJ2 interface on the PLC integrated machine is connected to the 485 communication interface 135 , the other end of the 485 communication interface 135 is connected to the "RS485" interface of the molecular pump driver 143, then the PLC integrated machine 12 can read the relevant data on the molecular pump driver 143; at the same time, the Q2 point on the PLC integrated machine is connected to the relay group 141, the relay group 141 is connected to the molecular pump external control interface 136, and the other end of the molecular pump external control interface 136 is connected to the external control input of the molecular pump driver 143, and the PLC programming of the PLC integrated machine 12 is used to drive the relay group 141 to be attracted and disconnected, thereby achieving the purpose of automatically starting the molecular pump unit 2.

[0038] like Figure 1 , Figure 3 and Figure 4 As shown, the electric control module 14 includes a power supply component, an electrical component connected to the power supply component, and an interface component 13 connected to the electrical component; wherein the power supply component supplies power to the mechanical pump unit 1 and the molecular pump unit 2 at the same time.

[0039] Based on the above solution, the power supply assembly 142 includes a 220V mechanical pump DC power supply, a 96V molecular pump power supply, and a voltage converter installed in the mechanical pump frame cart 18.

[0040] like Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, the electrical component includes a first ionization gauge and a vacuum gauge 138 installed in the mechanical pump unit 1; a second resistance gauge 28, an ionization gauge 26, 485 communication, a collector and a molecular pump external control installed in the molecular pump unit 2; wherein the system switch 137 is connected to the electrical component, the resistance gauge communication interface 131 is connected to the first resistance gauge 139, the ionization gauge communication interface 132 is connected to the ionization gauge 26, and the second resistance gauge 28 is connected to the resistance gauge communication interface 131; and the 485 communication, collector, molecular pump power supply and molecular pump external control in the molecular pump unit 2 are respectively connected to the 485 communication interface 135, the collector interface 133, the molecular pump power supply interface 134 and the molecular pump external control interface 136.

[0041] On the basis of the above solution, the electrical components further include an air switch 145 installed in the mechanical pump unit 1 , a power socket 148 , a leakage protector 147 , and a vacuum gauge circuit board 146 connected to the vacuum gauge 138 .

[0042] On the basis of the above scheme, Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, the electrical component also includes a molecular pump driver 143 connected to a molecular pump controller 144, and the molecular pump controller 144 is connected to the molecular pump power interface 134; the molecular pump driver 143 is connected to the PLC all-in-one 12 through a relay group 141; wherein the relay group 141 includes a 24v relay ① and a 24v relay ②, the power line of the mechanical pump body 11 is electrically connected to the 24v relay ①, and the 24v relay ① forms an electrical circuit with the power supply component 142, the 24v relay ②, the circuit breaker 145 and the PLC all-in-one 12; the 24v relay ② forms an electrical circuit with the molecular pump driver 143, the vacuum gauge circuit board 146, the touch screen PLC all-in-one and the molecular pump controller, so as to achieve the purpose of the PLC all-in-one 12 controlling the molecular pump controller 144; wherein the electric control module 14 also includes a leakage protector 147 for preventing leakage, and a power socket 148 for electrically connecting each electrical component to the electric control module 14. For the pearl sand vacuum insulation type cryogenic storage tank, the specific operation of vacuuming using the mechanical pump unit 1 alone is as follows:

[0043] The mechanical pump unit 1 is suitable for use in low-temperature storage tanks in the form of pearl sand vacuum insulation and when the vacuum degree is required to be no higher than 0.1 Pa. One end of the vacuum hose 17 is fixedly connected to the inlet end of the vacuum angle valve 16, and the other end thereof is connected to the air outlet of the low-temperature storage tank in the form of pearl sand vacuum insulation; the system switch 137 is pressed to turn on the mechanical pump unit 1, that is, the mechanical pump body 11 is started, and the vacuum gauge 138 displays the vacuum degree of the mechanical pump body 11 in real time; when the vacuum degree value obtained when the mechanical pump body 11 is evacuated reaches the starting value of the molecular pump unit 2 set by the PLC all-in-one machine 12, the PLC all-in-one machine 12 transmits a signal to the molecular pump controller 144, so that it controls the molecular pump unit 2 to start automatically; when it is necessary to stop the vacuum operation, when the speed of the molecular pump unit 2 drops to 0, the mechanical pump unit 1 directly and automatically turns off the power supply of the mechanical pump unit 1 under the control of the PLC all-in-one machine 12.

[0044] On the basis of the above solution, preferably, the mechanical pump body 11 is fixedly connected to the mechanical pump frame trolley 18 by fastening bolts;

[0045] On the basis of the above scheme, Figure 5 , Figure 6 and Figure 7As shown, the molecular pump unit 2 includes a molecular pump body 21, a five-way 22 installed at the air inlet of the molecular pump body 21, an ionization gauge 26 is installed along the upper passage of the five-way 22, and a vacuum angle valve 16 is installed along the symmetrical two passages of the five-way 22. The vacuum three-way 15 of the mechanical pump unit 1 is connected to the molecular pump outlet 24 through a vacuum hose 17, and a second resistance gauge 28 is installed along the other passage of the five-way 22. In order to facilitate the mechanical pump unit 1 to control the molecular pump unit 2, the power supply of the mechanical pump unit 1 is connected to the input interface of the molecular pump controller (similar to a step-down device), and the output interface of the molecular pump controller 144 is connected to the molecular pump power supply interface 134 on the interface component 13, and the other end of the molecular pump power supply interface 134 is connected to the molecular pump driver 143, thereby providing power to the molecular pump unit to drive the molecular pump unit 2 to work, and then automatically controlling the molecular pump unit 2 through the PLC integrated machine. Furthermore, in order to facilitate the overall movement of the molecular pump unit 2 , the molecular pump unit 2 is installed as a whole on the molecular pump frame trolley 23 .

[0046] On the basis of the above scheme, the vacuum gauge 138 is an instrument for displaying the vacuum degree. The vacuum degree value is read by the resistance gauge and the ionization gauge, and the read value is displayed on the vacuum gauge 138. Specifically, the first resistance gauge 139 is used to read the vacuum degree value of the mechanical pump unit 1; the second resistance gauge 28 and the ionization gauge 26 are used to read the vacuum degree value of the molecular pump unit 2; and the resistance gauge monitors the low vacuum degree, and the measurement range is 1.0x10 5 -1.0x10 -1 Pa, and the ultimate vacuum of the mechanical pump body 11 is 1.0x10 -1 Pa; the resistance gauge basically measures the vacuum degree of the pipeline in the mechanical pump unit 1, and the connection line of the resistance gauge is connected to the resistance gauge communication interface 131 on the interface component 13, and the other end of the resistance gauge communication interface 131 is connected to the vacuum gauge 138, so that the vacuum gauge 138 displays the data of the vacuum degree of the mechanical pump body 11 measured by the resistance gauge;

[0047] Based on the above scheme, the ionization gauge 26 monitors the high vacuum degree, and its measurement range is 1.0x10 -1 -1.0x10 -5 Pa, the ionization gauge 26 is installed on the vacuum five-way 22 at the top air inlet of the molecular pump unit 2. The ultimate vacuum of the molecular pump is 1x10 -6 Pa, so the second ionization gauge 26 basically measures the vacuum degree of the high vacuum pipeline of the molecular pump unit 2, and its connecting line is connected to the ionization gauge communication interface 132 on the interface component 13, and the other end of the ionization gauge communication interface 132 is connected to the vacuum gauge 138, so that the data measured by the second ionization gauge 26 is displayed on the vacuum gauge 138. Specifically, the left side of the screen of the vacuum gauge 138 displays the resistance gauge value, and the right side displays the ionization gauge value.

[0048] Based on the above scheme, the resistance gauge and the ionization gauge ionize the air molecules to generate current, and the collector connected to the collector interface 133 captures these currents to infer the vacuum degree. The larger the current in the air, the lower the vacuum degree, and the smaller the current, the higher the vacuum degree.

[0049] Based on the above scheme, the starting voltage of the mechanical pump unit 1 is 220V, and the starting voltage of the molecular pump unit 2 is 96V. Therefore, when the mechanical pump and the molecular pump are supplied with a voltage of 220V at the same time, only the mechanical pump body 11 can be started, and the molecular pump body 21 cannot be started. Therefore, a molecular pump controller 144 is required to convert the 220V voltage into a 96V voltage and then supply it to the molecular pump to start.

[0050] On the basis of the above scheme, the 485 communication is that the PLC integrated machine 12 reads the molecular pump speed, voltage, current and other related data on the molecular pump driver 143, thereby automatically driving the molecular pump unit 2 to open and close by controlling the opening and closing of the relay group 141 through the programming of the PLC integrated machine.

[0051] When evacuating or re-evacuating low-temperature insulated gas cylinders, multi-layer wrapped high-vacuum cryogenic storage tanks, and evacuated vacuum gas cylinders with high vacuum requirements, the specific operation process is as follows:

[0052] The two ends of the vacuum hose 17 are connected to the vacuum tee 15 and the molecular pump outlet 24 respectively to form a complete vacuum system; and the ionization gauge, the second resistance gauge, the 485 communication, the collector, the molecular pump power supply, and the molecular pump external control corresponding plugs in the molecular pump unit 2 are connected to the corresponding interfaces of the interface component 13 of the mechanical pump unit 1; the starting vacuum degree of the molecular pump pump body 21 is input on the PLC all-in-one machine 12. When the vacuum degree reaches the set value after the mechanical pump unit 1 is started, the molecular pump unit 2 can be automatically started through the 485 communication interface 135. When the required vacuum degree is drawn, the molecular pump unit 2 is turned off. It takes a certain amount of time for the speed of the molecular pump pump body 21 to gradually decrease. When the speed of the molecular pump pump body 21 is 0, the mechanical pump unit 1 can be automatically turned off. Since the molecular pump unit 2 needs to be started under vacuum, that is, the molecular pump is turned on only when the vacuum degree is lower than 10Pa, otherwise it is easy to cause damage to the molecular pump rotor; when the vacuum is completed, the molecular pump needs to be turned off first, and the mechanical pump can be turned off only after the molecular pump speed drops to 0. The purpose is to allow a certain negative pressure at the front end of the molecular pump to ensure that the molecular pump speed is slowly reduced, thereby extending the service life of the molecular pump. This period of time usually takes about 20-30 minutes. If the molecular pump speed of the magnetic suspension is reduced to 0, it will take longer; therefore, automatic control is achieved through PLC programming, so that there is no need for personnel to wait next to the equipment, and the system can automatically complete the start of the molecular pump unit 2 and the shutdown of the mechanical pump unit 1. And based on the automatic mode of the PLC all-in-one machine 12, the operator only needs to press the button to start the mechanical pump unit 1 and stop the molecular pump unit 2 once, and no other complicated operation process is required.

[0053] On the basis of the above scheme, the mechanical pump unit and molecular pump unit based on the existing portable vacuum unit occupy a large installation space in the chassis, which makes it impossible to make the chassis smaller and lighter; the PLC all-in-one machine of the present invention adopts the Haonar PLC all-in-one machine, which is very small in size and has its own display screen, short in depth, and does not take up chassis space, which is convenient for programming and panel installation.

[0054] On the basis of the above solution, preferably, the vacuum hose 17 is a corrugated tube made of metal material;

[0055] The above-mentioned embodiments only express one or more embodiments of the present invention, and the description is relatively specific and detailed, but it cannot be understood as limiting the scope of the present invention. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the present invention, which all belong to the protection scope of the present invention.

Claims

1. A split type vacuum pumping device, comprising a mechanical pump unit (1) and a molecular pump unit (2), characterized in that: The mechanical pump unit (1) comprises a mechanical pump body (11), a control module connected to the mechanical pump body (11), and a mechanical pump frame trolley (18) carrying the mechanical pump body (11) and the control module; The molecular pump unit (2) comprises a molecular pump body (21), a reversing valve and a molecular pump controller (144) connected to the molecular pump body (21), and a molecular pump frame trolley (23) carrying the molecular pump body (21) and the molecular pump controller (144); The air inlet of the mechanical pump body (11) is provided with a vacuum tee (15), and the vacuum tee (15) is respectively connected to a first resistance gauge (139) for measuring the vacuum degree and a vacuum hose (17); the vacuum hose (17) is connected to the molecular pump body (21) to achieve linkage; The control module comprises a PLC integrated machine (12) for controlling the mechanical pump unit (1) and the molecular pump unit (2), and an electric control module (14) connected to the mechanical pump unit (1) and the molecular pump unit (2), respectively, wherein the electric control module (14) comprises a power supply component (142), an electrical component connected to the power supply component (142), and an interface component (13) connected to the electrical component; wherein the power supply component supplies power to the mechanical pump unit (1) and the molecular pump unit (2) at the same time, and the power supply component (142) comprises a 220V mechanical pump DC power supply, a 96V molecular DC power supply, and a 220V mechanical pump DC power supply. The mechanical pump frame trolley (18) is provided with a pump power supply, and a voltage converter installed in the mechanical pump frame trolley (18); the electrical component includes a first ionization gauge and a vacuum gauge (138) installed in the mechanical pump unit (1); the electrical component also includes a second resistance gauge (28), an ionization gauge (26), a 485 communication, a collector and a molecular pump external control installed in the molecular pump unit (2); the interface component (13) includes a system switch (137) connected to the electrical component, a resistance gauge communication interface (131) connected to the first resistance gauge (139), and a resistance gauge communication interface (131) connected to the ionization gauge (26). The interface assembly (13) further comprises a collector interface (133), a molecular pump power interface (134), a 485 communication interface (135), and a molecular pump external control interface (136); wherein the second resistance gauge (28) is connected to the resistance gauge communication interface (131), and the ionization gauge (26) is connected to the ionization gauge communication interface (132); the 485 communication, collector, molecular pump power, and molecular pump external control are respectively connected to the 485 communication interface (135), the collector interface (133), the molecular pump power interface (134), and the molecular pump external control The electrical component further comprises an air switch (145), a power socket (148), a leakage protector (147) installed in the mechanical pump unit (1), and a vacuum gauge circuit board (146) connected to the vacuum gauge (138). The electrical component further comprises a molecular pump driver (143) connected to the molecular pump controller (144), and the molecular pump controller (144) is connected to the molecular pump power interface (134). The molecular pump driver (143) is connected to the PLC integrated machine (12) via a relay group (141).

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