Clamping assembly and wafer clamping device

Abstract

The present application relates to the field of semiconductor technology, and discloses a clamping assembly and a wafer clamping device. The clamping assembly includes: a sleeve, a clamping arm, and a limiting mechanism; the sleeve has a hollow inner cavity, and openings are provided at both ends of the sleeve, and the openings are connected to the hollow inner cavity; the clamping arm includes a connecting shaft and a clamping member connected to the connecting shaft, the connecting shaft passes through the hollow inner cavity and the opening, and the clamping member is protruding from the opening and extends along the radial direction of the connecting shaft; the limiting mechanism is arranged between the sleeve and the connecting shaft so that the connecting shaft moves relative to the sleeve in the hollow inner cavity according to a preset motion path. In this way, by arranging the connecting shaft in the sleeve, the limiting mechanism is arranged between the sleeve and the connecting shaft, the connecting shaft is connected to the clamping member, and the connecting shaft is driven, so that when the connecting shaft moves in the sleeve according to the preset motion path, the clamping member is driven to move, so that the clamping member can achieve the purpose of clamping and fixing, and the structure is simple and easy to operate.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor equipment, and in particular to a clamping assembly and a wafer clamping device. Background Art

[0002] During the wafer transfer process, the wafer is placed on a tray, and then the wafer on one tray is transferred to another tray by a wafer adsorption device. However, during the transfer process, since the wafer is adsorbed and transferred by the wafer adsorption device, the tray carrying the wafer may be slightly displaced, resulting in inaccurate positioning of the tray, reducing the accuracy of wafer transfer. Summary of the invention

[0003] The present application provides a clamping assembly and a wafer clamping device to solve the problem in the related art that a material tray is prone to displacement, resulting in inaccurate positioning.

[0004] In a first aspect, the present application provides a clamping assembly, comprising: a sleeve, a clamping arm, and a limiting mechanism;

[0005] The sleeve has a hollow inner cavity, and openings are provided at both ends of the sleeve, and the openings are communicated with the hollow inner cavity;

[0006] The clamping arm comprises a connecting shaft and a clamping member connected to the connecting shaft, the connecting shaft passes through the hollow inner cavity and the opening, and the clamping member is convexly disposed at the opening and extends along the radial direction of the connecting shaft;

[0007] The limiting mechanism is arranged between the sleeve and the connecting shaft so that the connecting shaft moves relative to the sleeve in the hollow inner cavity along a preset movement path.

[0008] Optionally, the limiting mechanism includes a guide groove and a pin shaft; the guide groove is recessed on the circumferential side of the sleeve, and the guide groove is communicated with the hollow inner cavity; the pin shaft is convexly arranged on the connecting shaft, and the pin shaft can be slidably arranged in the guide groove.

[0009] Optionally, the limiting mechanism includes a guide groove and a pin; the guide groove is recessed on the circumferential side of the connecting shaft; the pin is protruding on the inner side of the sleeve, and the pin can be slidably disposed in the guide groove.

[0010] Optionally, the guide groove extends spirally along the axial direction of the clamping assembly.

[0011] Optionally, when the pin shaft is located on a side of the guide groove away from the clamping member, there is a spacing distance between the clamping member and the sleeve.

[0012] Optionally, the sleeve includes a cylindrical portion and an extension portion provided on one side of the cylindrical portion, the extension portion is provided on the outer circumference of the cylindrical portion and extends outward along the outer circumference of the cylindrical portion, and the connecting shaft passes through the cylindrical portion and the extension portion.

[0013] Optionally, the clamping arm further comprises a flange member, wherein the flange member is arranged on a side of the connecting shaft away from the clamping member, and the maximum diameter of the flange member is greater than the maximum diameter of the hollow inner cavity.

[0014] Optionally, a boss is protruding from one side of the clamping member close to the sleeve, and a side of the boss close to the sleeve is a plane.

[0015] Optionally, the clamping assembly further comprises a coil spring, and the coil spring is sleeved on the circumference of the connecting shaft.

[0016] In a second aspect, the present application provides a wafer clamping device, comprising: a sleeve, a clamping arm, a limiting mechanism, and a driving member;

[0017] The sleeve has a hollow inner cavity, and openings are provided at both ends of the sleeve, and the openings are communicated with the hollow inner cavity;

[0018] The clamping arm comprises a connecting shaft and a clamping member connected to the connecting shaft, the connecting shaft passes through the hollow inner cavity and the opening, and the clamping member is protruded from the opening and extends along the radial direction of the connecting shaft to fix the wafer;

[0019] The driving member is drivingly connected to the connecting shaft; the limiting mechanism is arranged between the sleeve and the connecting shaft so that the connecting shaft moves relative to the sleeve in the hollow inner cavity along a preset movement path.

[0020] The above technical solution provided by the embodiment of the present application has the following advantages compared with the prior art:

[0021] The clamping assembly and wafer clamping device provided by the embodiment of the present application, wherein the clamping assembly includes: a sleeve, a clamping arm, and a limiting mechanism; the sleeve has a hollow inner cavity, and openings are provided at both ends of the sleeve, and the openings are connected to the hollow inner cavity; the clamping arm includes a connecting shaft and a clamping member connected to the connecting shaft, the connecting shaft passes through the hollow inner cavity and the opening, and the clamping member is convexly arranged at the opening and extends along the radial direction of the connecting shaft; the limiting mechanism is arranged between the sleeve and the connecting shaft so that the connecting shaft moves relative to the sleeve in the hollow inner cavity according to a preset motion path. In this way, by sleeve-arranging the connecting shaft in the sleeve, the limiting mechanism is arranged between the sleeve and the connecting shaft, the connecting shaft is connected to the clamping member, and the connecting shaft is driven, so that when the connecting shaft moves in the sleeve according to the preset motion path, the clamping member is driven to move, so that the clamping member achieves the purpose of clamping and fixing, and the structure is simple and easy to operate. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and, together with the description, serve to explain the principles of the invention.

[0023] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0024] Figure 1 and Figure 2 All of them are structural schematic diagrams of the clamping assembly provided in the embodiments of the present application.

[0025] Reference numerals:

[0026] 100, clamping assembly; 110, sleeve; 120, clamping arm; 130, coil spring; 140, limiting mechanism;

[0027] 111, opening; 112, cylindrical portion; 113, extension portion; 1131, mounting hole;

[0028] 121, connecting shaft; 122, clamping member; 1221, boss; 123, flange member;

[0029] 141. Guide groove; 142. Pin shaft. DETAILED DESCRIPTION

[0030] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of this application.

[0031] like Figure 1 and Figure 2 As shown, an embodiment of the present application provides a clamping assembly 100, wherein the clamping assembly 100 includes: a sleeve 110, a clamping arm 120, and a limiting mechanism 140; the sleeve 110 has a hollow inner cavity, and openings 111 are provided at both ends of the sleeve 110, and the openings 111 are connected to the hollow inner cavity; the clamping arm 120 includes a connecting shaft 121 and a clamping member 122 connected to the connecting shaft 121, the connecting shaft 121 passes through the hollow inner cavity and the opening 111, and the clamping member 122 is protruded from the opening 111 and extends along the radial direction of the connecting shaft 121; the limiting mechanism 140 is arranged between the sleeve 110 and the connecting shaft 121 so that the connecting shaft 121 moves relative to the sleeve 110 in the hollow inner cavity according to a preset movement path. In this way, by sleeve-mounting the connecting shaft 121 in the sleeve 110, the limiting mechanism 140 is arranged between the sleeve 110 and the connecting shaft 121, the connecting shaft 121 is connected to the clamping member 122, and the connecting shaft 121 is driven, so that when the connecting shaft 121 moves along a preset movement path in the sleeve 110, it drives the clamping member 122 to move, thereby enabling the clamping member 122 to achieve the purpose of clamping and fixing, and the structure is simple and the operation is easy.

[0032] The preset motion path can be set to make the connecting shaft 121 perform lifting motion or linear reciprocating motion relative to the sleeve 110, or the connecting shaft 121 can perform spiral ascending motion or rotational motion relative to the sleeve 110. The preset motion path can be combined according to actual use requirements, for example, the lifting motion is combined with the rotational motion, so that the connecting shaft 121 rises and rotates relative to the sleeve 110, so that the clamping member 122 can be clamped and fixed more conveniently. For example, when the connecting shaft 121 performs lifting motion relative to the sleeve 110, the clamping member 122 follows the connecting shaft 121 to perform lifting motion, so that the clamping member 122 can clamp or release the object. When the connecting shaft 121 performs rotational motion relative to the sleeve 110, the clamping member 122 follows the connecting shaft 121 to perform rotational motion, so that the clamping member 122 can be removed and the clamping orientation of the clamping member 122 can be changed.

[0033] The connecting shaft 121 and the clamping member 122 can be an integrally formed structure or a detachable structure. The connecting shaft 121 and the clamping member 122 are arranged as an integrally formed structure so that the clamping arm 120 is more secure and not easy to loosen during use. The connecting shaft 121 and the clamping member 122 are detachably connected, including being connected by snap-fitting, or being connected by screws and bolts, or being connected by magnetic attraction. In this way, when the clamping member 122 is worn or damaged, the clamping member 122 can be replaced to save costs. Of course, when the material tray is fixedly clamped, the shape of the clamping member 122 can also be changed or a negative pressure adsorption device can be added to the clamping member 122. Through negative pressure adsorption and physical clamping, the fixing effect of the clamping member 122 on the material tray is improved.

[0034] In one embodiment of the present application, the limiting mechanism 140 includes a guide groove 141 and a pin 142; the guide groove 141 is arranged on the peripheral side of the sleeve 110, and the guide groove 141 is communicated with the hollow inner cavity; the pin 142 is convexly arranged on the connecting shaft 121, and the pin 142 is slidably arranged in the guide groove 141. The guide groove 141 is arranged on the peripheral side of the sleeve 110, and the guide groove 141 is communicated with the hollow inner cavity; the pin 142 is convexly arranged on the connecting shaft 121, and the pin 142 is slidably arranged in the guide groove 141. The extended shape of the guide groove 141 is the movement path of the pin 142, and the pin 142 can slide in the guide groove 141, thereby changing the position of the pin 142 in the guide groove 141, and then the connecting shaft 121 moves relative to the sleeve 110. The pin 142 can penetrate the side wall of the sleeve 110 and be convexly arranged outside the side wall, or it can be flush with the outer wall of the sleeve 110.

[0035] Specifically, a guide groove 141 can be provided to extend in a spiral along the axial direction of the clamping assembly 100. The guide groove 141 is bent and extended along the circumferential side of the sleeve 110 from one side away from the clamping member 122 to the other side close to the clamping member 122, so that the opening 111 of the guide groove 141 is curved in a threaded shape. In this way, while the connecting shaft 121 drives the clamping member 122 to perform lifting and lowering movements, the connecting shaft 121 can also drive the clamping member 122 to perform rotational movement. On the one hand, the connecting shaft 121 can drive the clamping member 122 to clamp or release, and on the other hand, the connecting shaft 121 can also drive the clamping member 122 to swing, thereby facilitating the transfer of items without colliding with the clamping member 122 or damaging the clamping member 122.

[0036] In another embodiment of the present application, the limiting mechanism 140 includes a guide groove and a pin; the guide groove is recessed on the circumferential side of the connecting shaft 121; the pin is convexly disposed on the inner side of the sleeve 110, and the pin can be slidably disposed in the guide groove.

[0037] A guide groove is concavely provided on the circumference of the connecting shaft 121; a pin is convexly provided on the inner side of the sleeve 110, and the pin is slidably arranged in the guide groove. When the connecting shaft 121 is driven to move, the guide groove moves relative to the pin, thereby moving according to the movement path on the guide groove, and then driving the connecting shaft 121 to move along the preset movement path, and the connecting shaft 121 drives the clamping member 122 to move, so that the clamping member 122 is clamped and fixed.

[0038] Specifically, the guide groove can be set to extend spirally along the axial direction of the clamping assembly 100. The guide groove extends along the circumference of the connecting shaft 121 from one side away from the clamping member 122 to the other side close to the clamping member 122, so that the opening 111 of the guide groove is curved in a spiral shape.

[0039] Of course, the opening 111 of the guide groove may also be in a rectangular shape parallel to the axial direction of the clamping assembly 100, or in a circular shape perpendicular to the axial direction of the clamping assembly 100. The shape of the opening 111 of the guide groove may be set according to actual use requirements.

[0040] It should be understood that in order to prevent the pin shaft 142 and the guide groove 141 from disengaging, the guide groove 141 is a closed guide groove, and the guide groove 141 encloses and forms a closed movement path.

[0041] When the pin 142 is located at the side of the guide groove 141 away from the clamping member 122, there is a spacing distance between the clamping member 122 and the sleeve 110. Specifically, when the pin 142 is located at the side of the guide groove 141 away from the clamping member 122, there is a spacing distance between the clamping member 122 and the extension 113. In this way, it is convenient for the clamping member 122 to clamp and fix the material tray. The range of the spacing distance is between 1 cm and 3 cm. Of course, the range of the spacing distance can also be set between 1.5 cm and 2.5 cm.

[0042] The sleeve 110 includes a cylindrical portion 112 and an extension portion 113 disposed on one side of the cylindrical portion 112, the extension portion 113 being disposed on the outer periphery of the cylindrical portion 112 and extending outward along the outer periphery of the cylindrical portion 112, and a connecting shaft 121 passing through the cylindrical portion 112 and the extension portion 113. The cylindrical portion 112 has a hollow inner cavity, and the extension portion 113 has an opening 111, and the opening 111 on the extension portion 113 is connected to the hollow inner cavity of the cylindrical portion 112. The cylindrical portion 112 and the extension portion 113 can be set as an integrally formed structure or as a detachable structure. Setting the cylindrical portion 112 and the extension portion 113 as an integrally formed structure can improve the structural stability of the sleeve 110 and enhance the service life of the sleeve 110.

[0043] The outer contour of the cylindrical portion 112 is circular or rectangular. The hollow inner cavity of the cylindrical portion 112 is set to be cylindrical, and accordingly, the connecting shaft 121 is also set to a cylindrical structure, which is convenient for the connecting shaft 121 to rotate in the hollow inner cavity, and the cylindrical structure can reduce friction and enhance the continuity of the rotation of the connecting shaft 121.

[0044] The extension portion 113 extends radially outward along the outer periphery of the cylindrical portion 112. The extension portion 113 can fix the clamping assembly 100. For example, when the clamping assembly 100 is installed on the side of the machine or on the carrier, the extension portion 113 can be engaged with the machine or the carrier to fix the clamping assembly 100. The distance that the extension portion 113 extends outward can be set to 1 cm to 3 cm. On the one hand, the extension portion 113 can play a role in fixing the clamping assembly 100, and on the other hand, it can also avoid the extension portion 113 from causing interference to the clamping member 122, thereby improving the clamping and fixing effect. Of course, the distance that the extension portion 113 extends outward can also be set to 1.5 cm to 2.5 cm.

[0045] refer to Figure 2 The extension portion 113 is provided with at least one mounting hole 1131, and the mounting hole 1131 can facilitate the installation of the clamping assembly 100. The mounting hole 1131 is clamped by a wrench, so that the clamping assembly 100 is installed on the machine platform or the carrier. Specifically, the number of the mounting holes 1131 can be three, and the three mounting holes 1131 are arranged at intervals along the outer periphery of the opening 111. In this way, the sleeve 110 is rotated and installed using a wrench, thereby improving the installation efficiency of the clamping assembly 100.

[0046] The clamping arm 120 also includes a flange 123, which is arranged on the side of the connecting shaft 121 away from the clamping member 122. The outer contour of the flange 123 can be circular or rectangular, or can be set to a trapezoid or hexagon, etc. The function of the flange 123 is to limit the movement distance of the connecting shaft 121 relative to the sleeve 110, to prevent the connecting shaft 121 from passing through the sleeve 110 during the movement relative to the sleeve 110, to improve the stability of the clamping assembly 100 and to extend the service life of the clamping assembly 100. In order to further improve the limiting effect of the flange 123, the maximum diameter of the flange 123 can be set to be greater than the maximum diameter of the hollow inner cavity. In this way, the flange 123 cannot penetrate into the hollow inner cavity in the sleeve 110, and the flange 123 is limited at the outer periphery of the sleeve 110. Of course, the flange 123 can also be arranged to penetrate into the hollow inner cavity of the sleeve 110, and a groove can be opened on the peripheral side of the sleeve 110. Part of the flange 123 is accommodated in the hollow inner cavity and can move relative to the hollow inner cavity, and the other part of the flange 123 is protruded outside the groove and can slide along the groove, thereby limiting the movement distance of the connecting shaft 121 relative to the sleeve 110.

[0047] A boss 1221 is convexly provided on one side of the clamping member 122 close to the sleeve 110, and the side of the boss 1221 close to the sleeve 110 is a plane. The boss 1221 can increase the clamping force of the clamping member 122 on the material tray, and can also reduce the displacement distance of the connecting shaft 121. The side of the boss 1221 close to the sleeve 110 is set as a plane, which can avoid damage to the material tray when the clamping member 122 clamps and fixes the material tray, and improve the service life of the material tray. At the same time, it can also make the clamping member 122 clamp the material tray more stable.

[0048] In one embodiment of the present application, the clamping assembly 100 further includes a coil spring 130, which is sleeved on the circumference of the connecting shaft 121. The coil spring 130 can make the movement of the connecting shaft 121 more stable and avoid damage to the material tray. Part of the coil spring 130 can also be sleeved on the circumference of the sleeve 110. The diameter of the coil spring 130 is set to be greater than the diameter of the cylindrical portion 112 of the sleeve 110, the diameter of the coil spring 130 is smaller than the diameter of the extension portion 113, and the diameter of the coil spring 130 is smaller than the diameter of the flange 123. In this way, the coil spring 130 can be fixed between the flange 123 and the extension portion 113, thereby improving the stability of the transmission of the connecting shaft 121.

[0049] The embodiment of the present application also provides a wafer clamping device, including: a sleeve 110, a clamping arm 120, a limiting mechanism 140, and a driving member; the sleeve 110 has a hollow inner cavity, and openings 111 are provided at both ends of the sleeve 110, and the openings 111 are connected to the hollow inner cavity; the clamping arm 120 includes a connecting shaft 121 and a clamping member 122 connected to the connecting shaft 121, the connecting shaft 121 passes through the hollow inner cavity and the opening 111, the clamping member 122 is protruded from the opening 111 and extends along the radial direction of the connecting shaft 121 for fixing the wafer; the driving member is drivingly connected to the connecting shaft 121; the limiting mechanism 140 is arranged between the sleeve 110 and the connecting shaft 121 so that the connecting shaft 121 moves relative to the sleeve 110 in the hollow inner cavity according to a preset movement path.

[0050] During the wafer transfer process, the wafer is generally adsorbed by a wafer adsorption device, and the wafer is placed on a tray, so that the wafer is transferred from one tray to another, or from a wafer to a tray. At this time, the fixity of the tray often affects the accuracy of the wafer transfer. Therefore, the tray needs to be fixed to improve the efficiency and accuracy of the wafer transfer.

[0051] By using the wafer clamping device provided in the embodiment of the present application, the material tray is clamped and fixed by the clamping member 122, and the connecting shaft 121 is connected to the clamping member 122. When the connecting shaft 121 moves, it drives the clamping member 122 to move, thereby improving the efficiency and accuracy of wafer transfer.

[0052] The driving member can be a driving device such as a linear motor, a servo motor or a cylinder, as long as it can drive the connecting shaft 121 to move. One end of the clamping arm 120 is drivingly connected to the driving member, and the power generated by the driving member is transmitted to the connecting shaft 121 so that the connecting shaft 121 can move along the guide groove 141 to achieve the clamping and fixing of the clamping member 122.

[0053] It should be noted that, in this article, relational terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

[0054] The foregoing is merely a specific embodiment of the present invention, which enables those skilled in the art to understand or implement the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but rather to the widest scope consistent with the principles and novel features claimed herein.

Claims

1. A clamping assembly, characterized in that: include: A sleeve, a clamping arm, and a limiting mechanism; The sleeve has a hollow inner cavity, and openings are provided at both ends of the sleeve, and the openings are communicated with the hollow inner cavity; The clamping arm comprises a connecting shaft and a clamping member connected to the connecting shaft, the connecting shaft passes through the hollow inner cavity and the opening, and the clamping member is convexly disposed at the opening and extends along the radial direction of the connecting shaft; The limiting mechanism is arranged between the sleeve and the connecting shaft so that the connecting shaft moves relative to the sleeve in the hollow inner cavity along a preset movement path; The sleeve comprises a cylindrical portion and an extension portion provided at one side of the cylindrical portion, the extension portion being provided at the outer periphery of the cylindrical portion and extending outward along the outer periphery of the cylindrical portion, the connecting shaft passing through the cylindrical portion and the extension portion; the extension portion extending outward is set to a distance of 1 cm to 3 cm; The clamping arm further comprises a flange, which is arranged on a side of the connecting shaft away from the clamping member, and the maximum diameter of the flange is greater than the maximum diameter of the hollow inner cavity; The clamping assembly also includes a coil spring, which is sleeved on the circumference of the connecting shaft; two ends of the coil spring are respectively connected to the flange and the extension portion.

2. The clamping assembly according to claim 1, characterized in that: The limiting mechanism includes a guide groove and a pin; the guide groove is recessed on the peripheral side of the sleeve, and the guide groove is communicated with the hollow inner cavity; the pin is convexly arranged on the connecting shaft, and the pin is slidably arranged in the guide groove.

3. The clamping assembly according to claim 1, characterized in that: The limiting mechanism comprises a guide groove and a pin shaft; the guide groove is recessed on the peripheral side of the connecting shaft; the pin shaft is convexly arranged on the inner side of the sleeve, and the pin shaft is slidably arranged in the guide groove.

4. The clamping assembly according to claim 2 or 3, characterized in that: The guide groove spirally extends along the axial direction of the clamping assembly.

5. The clamping assembly according to claim 2 or 3, characterized in that: When the pin shaft is located at a side of the guide groove away from the clamping member, there is a spacing distance between the clamping member and the sleeve.

6. The clamping assembly according to claim 1, characterized in that: A boss is protruding from one side of the clamping piece close to the sleeve, and a side of the boss close to the sleeve is a plane.

7. A wafer clamping device, comprising: A sleeve, a clamping arm, a limiting mechanism, and a driving member; The sleeve has a hollow inner cavity, and openings are provided at both ends of the sleeve, and the openings are communicated with the hollow inner cavity; The clamping arm comprises a connecting shaft and a clamping member connected to the connecting shaft, the connecting shaft passes through the hollow inner cavity and the opening, and the clamping member is protruded from the opening and extends along the radial direction of the connecting shaft to fix the wafer; The driving member is drivingly connected to the connecting shaft; the limiting mechanism is arranged between the sleeve and the connecting shaft so that the connecting shaft moves relative to the sleeve in the hollow inner cavity along a preset movement path; The sleeve comprises a cylindrical portion and an extension portion provided at one side of the cylindrical portion, the extension portion being provided at the outer periphery of the cylindrical portion and extending outward along the outer periphery of the cylindrical portion, the connecting shaft passing through the cylindrical portion and the extension portion; the extension portion extending outward is set to a distance of 1 cm to 3 cm; The clamping arm further comprises a flange, which is arranged on a side of the connecting shaft away from the clamping member, and the maximum diameter of the flange is greater than the maximum diameter of the hollow inner cavity; The wafer clamping device also includes a coil spring, which is sleeved on the circumference of the connecting shaft; two ends of the coil spring are respectively connected to the flange and the extension part.

Images