A fully automatic double-sided exposure machine

Abstract

The present invention discloses a fully automatic double-sided exposure machine, which includes a loading device, an unloading device, a first table, a second table, at least one transfer and handling component and a flipping and handling component, an exposure system located between the first table and the second table, the first table and the second table are respectively moved to the exposure system on both sides of the exposure system for exposure operation, and the transfer and handling component and the flipping and handling component are fixedly installed by a bracket. The present invention adopts a double table, shares an exposure system, cooperates with the flipping and handling component and the transfer and handling component, and performs alignment exposure on the double tables respectively. The two tables can respectively perform alignment exposure on the two exposure surfaces of the base member without interfering with each other, and the exposure efficiency is high.

Description

Technical Field

[0001] The present invention relates to the technical field of exposure machines, in particular to a fully automatic double-sided exposure machine. Background Art

[0002] With the development of science and technology, industrial production is becoming more and more intelligent, and more and more tasks are replaced by manual operations by automated devices composed of mechanical components. Automated devices have more accurate positioning and reduce labor costs, and have been widely used.

[0003] Automated equipment is also widely used in the exposure field. A board placement and collection device is used to load and unload substrates, and a transfer robot is used to transfer substrates between the various workstations of the placement device, exposure machine, and collection machine. Typically, a drive assembly is installed on the side of the exposure machine to drive the transfer robot. The transfer robot is supported by a single arm and slides via the drive assembly, resulting in poor stability.

[0004] To adapt to the development of intelligent and miniaturized electronic products, the processing of electronic circuit boards is no longer limited to exposing a single side of the substrate. Instead, it is usually necessary to expose the electronic circuits on both sides of the substrate. Currently, double-sided processing of substrates usually requires two exposure machines: a first exposure machine and a second exposure machine. The first exposure machine includes a first alignment mechanism and a first exposure system, and the second exposure machine includes a second alignment mechanism and a second exposure system. A flipper is located between the first and second exposure machines. The flipper is located between the discharge end of the first exposure machine and the feed end of the second exposure machine. The loading device is located at the front end of the first exposure machine, and the unloading device is located at the rear end of the second exposure machine. When exposing the substrate, the first exposure machine first performs alignment exposure on the first exposure surface of the substrate. Then, a robot is used to transfer the substrate, after the first exposure surface has been exposed, to the flipper. The flipper flips the substrate so that the unexposed second exposure surface faces upward. The substrate is then transferred to the second exposure machine by the robot for exposure on the second exposure surface. Although this double-sided exposure method realizes the automation of double-sided exposure, it requires two alignment mechanisms and two exposure systems for alignment and exposure respectively. The entire automation system takes up a large space and is costly. Summary of the Invention

[0005] The present invention aims to provide a fully automatic double-sided exposure machine with a high degree of automation and small space occupation.

[0006] In order to achieve the above-mentioned purpose, the technical solution adopted by the present invention is: a fully automatic double-sided exposure machine, which includes a loading device, an unloading device, and also includes a first table, a second table, at least one transfer and conveying component and a flipping and conveying component. The exposure system is located between the first table and the second table. The first table and the second table are respectively moved to the exposure system on both sides of the exposure system for exposure operation, and the transfer and conveying component and the flipping and conveying component are fixedly installed by a bracket.

[0007] Furthermore, the fully automatic double-sided exposure machine also includes a top conveying component, which is arranged above the exposure system and is used to convey the substrate between the first table and the second table.

[0008] Furthermore, the top conveying assembly also includes a cleaning device.

[0009] Furthermore, the top conveying assembly includes a positioning device near the second table side.

[0010] Furthermore, the first table side has a flipping and conveying assembly and a transfer and conveying assembly. The flipping and conveying assembly is responsible for conveying the substrate to be exposed on the loading device, and for moving the substrate whose first side has been exposed out of the first table and flipping it; the transfer and conveying assembly moves the substrate whose first side has been exposed out of the flipping and conveying assembly.

[0011] Furthermore, the second table side has a second transfer and handling component for moving the substrate after the first side exposure is completed to the second table, and moving the substrate after the double-sided exposure is completed to the unloading device.

[0012] Furthermore, the second table side is provided with a second turning and transporting assembly for loading and unloading materials on the second table.

[0013] Furthermore, the bracket spans across the fully automatic double-sided exposure machine and is respectively arranged on the first table side and the second table side.

[0014] Furthermore, the bracket includes vertical slide rails at both ends and a vertical slide rail at the middle position, the flip transport assembly slides vertically along the vertical slide rails at both ends, and the transfer transport assembly slides vertically along the vertical slide rails at the middle position.

[0015] Furthermore, the bracket includes a vertical slide rail located in the middle position, and the transfer and handling assembly slides vertically along the vertical slide rail in the middle position.

[0016] Furthermore, the flipping and transporting assembly includes a longitudinally movable extension part, a transverse rotating shaft connecting the extension part, and a manifold fixed on the rotating shaft through a fixing member. The manifold is relatively arranged at both ends of the fixing member, and a plurality of adsorption members are provided on the manifold.

[0017] Furthermore, the flipping and transporting assembly includes an extension portion, a transverse rotating shaft connected to the extension portion, and a manifold fixed to the transverse rotating shaft through a fixing member. The manifold is arranged opposite to each other at both ends of the fixing member, and a plurality of adsorption members are provided on the manifold.

[0018] Furthermore, the extension portions are located at both ends of the transverse rotating shaft to clamp the transverse rotating shaft.

[0019] Furthermore, the fixing member includes at least one slider, and the at least one slider can slide relative to the rotating shaft.

[0020] Furthermore, the adsorption components are staggered on both sides of the manifold.

[0021] Furthermore, the bracket is arranged corresponding to the transfer and transport assembly and the flip and transport assembly, and the bracket includes relatively arranged vertical brackets, and the vertical brackets are slidably arranged on the frame supporting the bracket, driving the transfer and transport assembly and the flip and transport assembly to slide longitudinally.

[0022] Furthermore, the driving member of the bracket is arranged above the bracket and connected to the vertical bracket through a horizontal bracket; or the driving member of the bracket is arranged on the frame to drive the bracket to slide.

[0023] Furthermore, the transfer and transport assembly includes an extension portion, the flip and transport assembly includes an extension portion, and the extension portion and the extension portion move longitudinally.

[0024] Furthermore, the first table and the second table share a common guide rail, and the initial positions of the first table and the second table are on both sides of the exposure system, and they reciprocate from the initial position to the exposure position.

[0025] Furthermore, a first alignment system is provided between the first table and the exposure system, and a second alignment system is provided between the second table and the exposure system.

[0026] The present invention utilizes two tables, each equipped with an alignment system, and shares a common exposure system. In conjunction with a flipping and transfer assembly, the two tables perform alignment exposure separately. The two tables can each perform alignment exposure on the two exposure surfaces of a substrate without interfering with each other, resulting in high exposure efficiency. Furthermore, the exposure system is fixedly configured to expose both tables, providing stable performance. Double-sided exposure of a substrate can be completed in a single pass using a single exposure machine. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 FIG. 1 is a schematic diagram of a first embodiment of a fully automatic double-sided exposure machine according to the present invention.

[0028] Figure 2This is a schematic diagram of the flipping and transporting assembly of the present invention.

[0029] Figure 3 FIG. 2 is a schematic diagram of a second embodiment of a fully automatic double-sided exposure machine according to the present invention.

[0030] Figure 4 FIG. 1 is a top view of a second embodiment of a fully automatic double-sided exposure machine according to the present invention.

[0031] Figure 5 Schematic diagram of the working process of the fully automatic double-sided exposure machine of the present invention (1).

[0032] Figure 6 This is a schematic diagram of the working process of the fully automatic double-sided exposure machine of the present invention (2).

[0033] Figure 7 Schematic diagram of the working process of the fully automatic double-sided exposure machine of the present invention (3). DETAILED DESCRIPTION

[0034] In order to clearly describe the present invention, it is further described below based on specific embodiments.

[0035] like Figure 1-2 As shown, the fully automatic double-sided exposure machine provided by the present invention includes a loading device 1, a first table 2, a first alignment system 3, an exposure system 4, a second alignment system 5, a second table 6, and an unloading device 7. The exposure system 4 is located between the first table 2 and the second table 6. The first table 2 and the second table 6 can be moved from either side of the exposure system 4 to the bottom of the exposure system 4 for exposure operation. The first alignment system 3 is located between the first table 2 and the exposure system 4, and the second alignment system 5 is located between the second table 6 and the exposure system 4. The first table 2 and the second table 6 share a longitudinally extending guide rail. The initial positions of the first table 2 and the second table 6 are on either side of the exposure system 4, and they reciprocate between the initial position and the exposure position.

[0036] The loading device 1 is used to store and / or transport the substrate to be exposed, and the substrate to be exposed includes a first exposure surface and a second exposure surface to be exposed. The unloading device 7 is used to store and / or transport the substrate whose first exposure surface and second exposure surface have been exposed. The substrate is moved to the bottom of the exposure system 4 through the first table to perform exposure processing on the first exposure surface, and is moved to the bottom of the exposure system 4 through the second table to perform exposure processing on the second exposure surface.

[0037] The loading device 1, first table 2, second table 6, and unloading device 7 are moved between the loading device 1, the first table 2, the second table 6, and the unloading device 7 via a transfer and transport assembly 8 and a flipping and transport assembly 9. The transfer and transport assembly 8 and the flipping and transport assembly 9 are fixedly mounted via a bracket 10. The bracket 10 includes a transverse fixing frame 101 and a vertical fixing frame 102. The vertical fixing frames 102 are located at both ends of the transverse fixing frame 101 and are perpendicular to the first table 2 and the second table 6. The transverse fixing frame 101 is parallel to the exposure system 4. If the flipping and transport assembly 9 is installed on the bracket 10, the vertical fixing frames 102 on both sides of the bracket 10 are provided with vertically extending vertical slide rails 103, along which the flipping and transport assembly 9 slides. If the transfer and transport assembly 8 is installed on the bracket 10, a vertically extending vertical slide rail 103 is provided in the middle of the transverse fixing frame 102 of the bracket 10, along which the transfer and transport assembly 9 slides. If the bracket 10 is installed with the flipping and transporting assembly 9 and the transfer and transporting assembly 8, the vertical fixing frames 102 on both sides of the bracket 10 are provided with vertically extending vertical slide rails 103, and the middle position of the horizontal fixing frame 101 of the bracket 10 is provided with a vertically extending vertical slide rail 103.

[0038] The transfer and transport assembly 8 includes an extension 80, and the flip and transport assembly 9 includes an extension 90. The extensions 80 and 90 move longitudinally to transfer the substrate between the loading device 1, the first table 2, the second table 6, and the unloading device 7. The extensions 90 and 80 slide vertically along the vertical slide rails 103 of the bracket to achieve up and down movement.

[0039] The substrate can be moved directly between the first table 2 and the second table 6 through the transfer and conveying assembly 8; or a top conveying assembly 11 can be provided between the first table 2 and the second table 6, above the exposure system 4, so that the extension distance of the transfer and conveying assembly 8 or the flipping and conveying assembly 9 can be shortened, thereby better ensuring the stability of the transfer and conveying assembly 8 and the flipping and conveying assembly 9.

[0040] To prevent problems such as poor cleanliness of the substrate environment and contamination during substrate movement, the top conveyor assembly 11 also includes a cleaning device 12. Preferably, the cleaning device 12 is located in the middle of the top conveyor assembly 11. A positioning assembly is also provided near the second table surface. The top conveyor assembly 11 can utilize rollers that roll to drive the substrate forward, providing secondary dust removal and positioning for the substrate.

[0041] The base piece is moved between the loading device 1 and the first table 2 via a first transport assembly 200 , and the base piece is moved between the second table and the unloading device via a second transport assembly 300 .

[0042] The first transport assembly 200 covers the loading device 1 , the first table 2 , and the area of ​​the top conveying assembly 11 close to the first table 1 , and is fixed between the loading device 1 and the first table 2 by a bracket 10 .

[0043] The first transport assembly 200 includes a flip transport assembly 9 and a transfer transport assembly 8. Figure 2 As shown, the flipping and transporting assembly 9 includes a longitudinally movable extension 90, a transverse shaft 91 connected to the extension 90, a plurality of manifolds 92 located on the transverse shaft, and a rotating cylinder placed at both ends of the transverse shaft 91 and fixed to the extension. The extension 90 is fixed to the bracket 10 and slides along the slide rail of the longitudinal fixing frame 102, and the transverse shaft 91 extends transversely. It should be understood that the extension 90 can be set at a single end of the transverse shaft or at both ends of the transverse shaft. The extensions shown in the figure are set in pairs at both ends of the transverse shaft, which can better fix the transverse shaft 91 and the manifolds 92 thereon, and avoid uneven force on the transverse shaft 91 when it is set at a single end. Furthermore, multiple manifolds 92 are respectively mounted on the transverse rotating shaft 91 via fixing members 93. The multiple manifolds 92 are arranged opposite to each other at both ends of the fixing member 93. Each manifold 92 is provided with multiple adsorption members 94. The adsorption members 94 on the manifolds 92 mounted on the same fixing member are arranged opposite to each other, and the adsorption members 94 on the same manifold 92 are staggered at both ends of the manifold. Among them, at least one fixing member 93 is a slider that can slide relative to the transverse rotating shaft 91, and can slide to adjust the position of the manifold to accommodate base members of different sizes. For example, when the flipping and transporting assembly 9 simultaneously adsorbs two base members, the two fixing members 93 adjacent to the extension portion 90 can both be configured as sliders so that the coverage area of ​​the multiple adsorption members 94 can meet the size of the two base members.

[0044] The manifold 92 and the suction member 94 on one side constitute a first suction cup assembly 95, and the manifold 92 and the suction member 94 on the other side constitute a second suction cup assembly 96. The first suction cup assembly 95 and the second suction cup assembly 96 respectively pick up the substrate to be exposed from the loading device 1 and the substrate on the first table 2 after the first exposure surface has been exposed.

[0045] The transfer and handling assembly 8 includes an extension portion 80 that slides along the vertical slide rail of the horizontal fixing frame 101, and an adsorption assembly connected to the end of the extension portion 80. The extension portion 80 is connected to the center position of the adsorption assembly to make its force more uniform.

[0046] The second transport assembly 300 covers the unloading device 7, the second table 6 and the top conveying assembly 11. Similar to the first transport assembly 200, it is fixed by a bracket 10, and a vertical slide rail 103 extending vertically is installed in the middle of the horizontal fixing frame 101.

[0047] The second conveying assembly 300 is a second transfer conveying assembly having the same structure as the transfer conveying assembly of the first conveying assembly 200 and is used to pick up substrates whose first exposure surface has been exposed and substrates whose first exposure surface and second exposure surface have been exposed.

[0048] As shown in Figures 3-7, compared with the above-mentioned embodiment, the longitudinal movement manner of the first conveying component 200 and the second conveying component 300 is different, and the extension portion of the transfer conveying component 8 and the second conveying component 300 and the extension portion of the flipping conveying component 9 are fixedly connected and no longer move longitudinally.

[0049] The first transport assembly 200 includes a transfer transport assembly 8 and a flip transport assembly 9. The transfer transport assembly 8 is fixed to a first bracket 13, and the flip transport assembly is fixed to a second bracket 14. The first bracket 13 and the second bracket 14 are supported by a frame 15. The frame 15 includes a longitudinally extending first slide 16 located on the inner side and a second slide 17 located on the outer side. The first bracket 13 slides along the second slide 17, and the second bracket 14 slides along the first slide 16.

[0050] The first bracket 13 comprises a first transverse bracket 130, a first vertical bracket 131, and a first vertical sliding bracket 132. The first vertical bracket 131 is located at both ends of the first transverse bracket 130, perpendicular to the first table 2 and the second table 6. The first transverse bracket 130 is parallel to the exposure system 4. The first vertical sliding bracket 132 is fixed to the first transverse bracket 130, preferably located in the middle of the first transverse bracket 130. The transfer assembly 8 is connected to the first vertical sliding bracket 132 and slides along it. A first driving member 133, which drives the first vertical sliding bracket 132 to slide longitudinally, is located above the first transverse bracket 130, preferably in the middle. The longitudinal sliding of the first driving member drives the first vertical bracket 131 to slide along the second slide 17, thereby driving the transfer assembly 8 to slide longitudinally. The first driving member 133 can also be arranged in other configurations, such as being located on one or both sides of the second slide to directly drive the first vertical fixed bracket 131 to slide along the second slide 17.

[0051] The second bracket 14 includes a second vertical bracket 140 disposed opposite to the first bracket. The extension portion 90 of the flip transport assembly is connected to the second vertical bracket 140. The second vertical bracket is provided with a vertical slideway, along which the extension portion 90 of the flip transport assembly slides vertically. The vertical bracket 140 slides along the first slideway 16, driving the flip transport assembly 9 to slide longitudinally. A second drive member that drives the longitudinal sliding of the second vertical sliding bracket is provided on the first slideway 16. Alternatively, similar to the first bracket 13, the second vertical bracket 140 can be connected via a second transverse bracket, with the second drive member provided above the second transverse bracket.

[0052] The second transport assembly 300 is fixed to the third bracket 18. The structure of the third bracket is the same as that of the first bracket 13, including a third transverse bracket 180, a third vertical bracket 181, and a third vertical sliding bracket 182. The second transport assembly 300 is connected to the third vertical sliding bracket 182 and slides along the third vertical sliding bracket 182. The third vertical bracket 181 slides along the third slide 19 located on the frame 15, driving the transfer and transport assembly 8 to slide longitudinally. Similar to the first bracket 13, the third driving member 183 is located above the third slide 19 or the third transverse bracket 180. The third slide 19 can be an extension of the first slide 16 or the second slide 17.

[0053] The first bracket 13, the second bracket 14, and the third bracket 18 respectively drive the transfer and transport assembly 8, the flipping and transport assembly 9, and the second transfer and transport assembly 300, eliminating the need for longitudinal extension via the extensions of the transfer and transport assembly 8, the second transport assembly 300, and the flipping and transport assembly 9. This shortens the lever arms of the transfer and transport assembly 8, the flipping and transport assembly 9, and the second transfer and transport assembly 300, making them more stable. Furthermore, the first bracket 13, the second bracket 14, and the third bracket 18 support and fix at two points, with a longitudinal drive member positioned at the top, not only provides greater support but also fully utilizes the top space, saving lateral space.

[0054] The first driving member, the second driving member and the third driving member may be linear motors or other conventional driving methods.

[0055] During operation, the first table 1 and the second table 6 can place one substrate or multiple substrates according to the size of the substrate. The exposure method of the automatic double-sided exposure machine is described below using two substrates as an example.

[0056] (1) The transport flap assembly 9 of the first transport assembly picks up two substrates from the loading device 1 at the same time, and the first adsorption assembly 95 of the transport flap assembly 9 adsorbs the first exposure surface of the unexposed substrate and moves it to place it on the first table.

[0057] (2) The first table 1 drives the substrate to move to the first alignment system 2 for alignment, and then moves to the exposure system 4 to expose the first exposure surface of the substrate. After the exposure of the first exposure surface is completed, the first table 1 returns to its initial position. At the same time, the flip conveying assembly 9 of the first conveying assembly 200 moves to the loading device 1, and the first suction cup assembly 95 simultaneously absorbs the first exposure surfaces of the two unexposed substrates. The conveying flip assembly 9 flips so that the second suction cup assembly 96 on the other side faces the first table 1.

[0058] (3) The second suction cup assembly 95 of the transport flip assembly 9 absorbs the first exposure surface of the substrate after exposure, and then the flip transport assembly 9 flips the substrate so that the second exposure surface of the substrate that has not been exposed faces the transfer transport assembly 8 of the first transport assembly 200. The flip transport assembly 9 places the unexposed substrate on the first table.

[0059] (4) The transfer conveying assembly 8 of the first conveying assembly 200 absorbs the second exposure surfaces of the two substrates and places the substrates on the top conveying assembly. The top conveying assembly drives the substrates through the cleaning device to the other end of the top conveying assembly, and positions the substrates by the positioning assembly. The second conveying assembly 300 absorbs the second exposure surfaces of the substrates and places the substrates on the second table 6. At the same time, the first table 1 drives the unexposed substrate to perform alignment exposure operation on the first exposure surface.

[0060] (5) The second table 6 drives the substrate to perform the alignment exposure operation, completing the exposure of the second exposure surface of the substrate. The second table 6 returns to the initial position, and the second conveying assembly 300 moves the substrate to the unloading device 7. At the same time, the conveying flip assembly 9 of the first conveying assembly 200 moves to the loading device 1, and the first suction cup assembly 95 absorbs the first exposure surface of the unexposed substrate. The flip conveying assembly flips so that the second suction cup assembly 96 on the other side faces the first table 1. The second suction cup assembly of the flip conveying assembly absorbs the first exposure surface of the substrate after exposure, and then the flip conveying assembly flips so that the unexposed second exposure surface faces the transfer conveying assembly of the first conveying assembly 200. The flip conveying assembly places the unexposed substrate on the first table.

[0061] Repeat steps (4) and (5) to complete the double-sided exposure of the substrate.

[0062] While the first table 2 is being exposed, the second table 6 is performing alignment operations. When the first table 2 is exposed for the last strip and returns to its initial position, the second table 6 moves following the first table 2 to complete the alignment of the substrate alignment points, effectively utilizing the exposure time. When the first table 2 completes the exposure, the second table 6 reaches the initial exposure position, and vice versa, making the two tables more closely matched.

[0063] The present invention is not limited to the above-described embodiment, but also includes various alternatives. In place of the corresponding components in the above-described embodiment, for example, the second transport assembly 300 may alternatively be a second flip transport assembly responsible for loading and unloading the second table 6. The first suction assembly of the flip transport assembly suctions the substrate on the second table 6 after the exposure on the second exposure surface has been completed. The flip transport assembly flips so that the second suction assembly faces downward. The second suction assembly suctions the second exposure surface of the substrate on the top conveying assembly 12 and places it on the second table 6. The flip transport assembly then flips over and places the substrate on the second exposure surface after the exposure on the second exposure surface on the unloading device.

[0064] The second conveying component 300 can also be composed of two transfer conveying components, including a transfer conveying component A and a transfer conveying component B. The transfer conveying component A is responsible for moving the substrate from the top conveying component 11 to the second table, and the transfer conveying component B is responsible for moving the exposed substrate from the second table to the unloading device.

[0065] The top conveying assembly 12 may also adopt a third transfer and transport assembly, and the third transfer and transport assembly is reversely arranged above the exposure system between the first table 2 and the second table 6, that is, the adsorption component is arranged upward. The extension part of the third transfer and transport assembly may also be arranged at both ends of the adsorption assembly to clamp the adsorption assembly. The third transfer and transport assembly of the top conveying assembly is fixed by a bracket 10, and the conveyance of the substrate is achieved by the longitudinal extension of the extension part. Similar to the above, the transfer and transport assembly 8 of the first conveying assembly 200 adsorbs the unexposed second exposure surface of the substrate and places it on the third transfer and transport assembly of the top conveying assembly. The top conveying assembly adsorbs the first exposure surface of the substrate after exposure, and moves the substrate to the side of the second table 6 through the extension part. The second conveying assembly 300 moves to the top of the top conveying assembly 11, adsorbs the unexposed second exposure surface of the substrate, and places it on the second table 6 to complete the exposure operation of the second surface.

[0066] The top conveying assembly 11 is used to transport the base member. When the base member is cleaned and positioned by the cleaning device and the positioning assembly, the longitudinal movement of the first transport assembly 200 and the second transport assembly 300 can also be achieved by setting sliding rails on the side. Specifically, a longitudinal slide rail is set on one side parallel to the first table, the exposure system and the second table. The longitudinal slide rail is connected to the vertical slide rail corresponding to the first transport assembly 200 and the second transport assembly 300. The first transport assembly and the second transport assembly are longitudinally moved to different positions by the longitudinal slide rail, and the height is changed vertically by the vertical slide rail.

[0067] The present invention adopts two tables (2, 6), each of which is provided with an alignment system (3, 5), and shares an exposure system 4. In conjunction with a flipping and transporting assembly 9 and a transfer and transporting assembly 8, the two tables are respectively subjected to alignment exposure. The two tables can respectively perform alignment exposure on the two exposure surfaces of the substrate without interfering with each other, and the exposure efficiency is high. At the same time, the exposure system is fixedly set to expose the two tables, and the performance of the exposure system is stable. Double-sided exposure of the substrate is completed in one flow through a single exposure machine.

[0068] The flip and transfer assembly 9 and 8 utilize the frame for longitudinal movement. Compared to side rails, this reduces the lever arm between the flip and transfer assembly 9 and the fixed mounting portion, providing greater stability. The use of a top-mounted drive further reduces the lateral width of the automatic double-sided exposure machine. Furthermore, extensions 90 of the flip and transfer assembly 9, positioned at both ends to clamp the transverse shaft 91, further stabilize the rotation of the flip and transfer assembly. The flip and transfer assembly's slider design also accommodates base components of varying sizes.

[0069] Setting up a top conveying assembly on the top can not only speed up the conveying speed of the substrate, but also make full use of the top space, and perform secondary dust removal and positioning on the substrate to remove dust on the substrate during the transportation process and obtain better exposure effect.

[0070] In the present invention, the longitudinal direction is the scanning direction of the first or second stage moving to the exposure system, the transverse direction is perpendicular to the longitudinal direction, and the vertical direction is perpendicular to the plane defined by the transverse and longitudinal directions. The above directional definitions are for clarity of description and do not limit the solution.

Claims

1. A fully automatic double-sided exposure machine, comprising a loading device and a unloading device, characterized in that: It also includes a first table, a second table, at least one transfer and transport assembly and a flip and transport assembly, an exposure system located between the first table and the second table, the first table and the second table are respectively moved to the exposure system on both sides of the exposure system to perform exposure operations, and the transfer and transport assembly and the flip and transport assembly are fixedly installed by a bracket; The fully automatic double-sided exposure machine further comprises a top conveying assembly, which is arranged above the exposure system and is used to convey the substrate between the first table and the second table, and the top conveying assembly can be a roller; The fully automatic double-sided exposure machine includes a first conveying component and a second conveying component, the first conveying component includes the flipping conveying component and the transfer conveying component, the second conveying component is a second transfer conveying component, the coverage range of the first conveying component is the loading device, the first table and the area of ​​the top conveying component close to the first table, the coverage range of the second conveying component is the area of ​​the top conveying component close to the second table, the second table and the unloading device.

2. The fully automatic double-sided exposure machine according to claim 1, characterized in that: The top conveying assembly also includes a cleaning device.

3. The fully automatic double-sided exposure machine according to claim 1, characterized in that: The top conveying assembly includes a positioning device near the second table surface.

4. The fully automatic double-sided exposure machine according to any one of claims 1 to 3, characterized in that: The first table side has a flipping and conveying assembly and a transfer conveying assembly. The flipping and conveying assembly is responsible for conveying the substrate to be exposed on the loading device, and moving the substrate whose first side has been exposed out of the first table and flipping it; the transfer conveying assembly moves the substrate whose first side has been exposed out of the flipping and conveying assembly.

5. The fully automatic double-sided exposure machine according to any one of claims 1 to 3, characterized in that: The second table side is provided with a second transfer and handling assembly for moving the substrate after the first-side exposure is completed to the second table, and moving the substrate after the double-side exposure is completed to the unloading device.

6. The fully automatic double-sided exposure machine according to claim 1, characterized in that: The second table side is provided with a second turning and transporting assembly for loading and unloading materials on the second table.

7. The fully automatic double-sided exposure machine according to claim 1, characterized in that: The bracket spans across the full-automatic double-sided exposure machine and is respectively arranged on the first table side and the second table side.

8. The fully automatic double-sided exposure machine according to claim 1 or 7, characterized in that: The bracket comprises vertical slide rails at two ends and a vertical slide rail at a middle position, the flipping and transporting assembly slides vertically along the vertical slide rails at two ends, and the transfer and transporting assembly slides vertically along the vertical slide rail at the middle position.

9. The fully automatic double-sided exposure machine according to claim 1 or 7, characterized in that: The bracket comprises a vertical slide rail located in the middle position, and the transfer and handling assembly slides vertically along the vertical slide rail in the middle position.

10. The fully automatic double-sided exposure machine according to claim 1, characterized in that: The flipping and transporting assembly includes a longitudinally movable extension part, a transverse rotating shaft connecting the extension part, and a manifold fixed on the rotating shaft through a fixing member. The manifold is arranged opposite to each other at two ends of the fixing member, and a plurality of adsorption members are arranged on the manifold.

11. The fully automatic double-sided exposure machine according to claim 1, characterized in that: The flipping and transporting assembly includes an extension part, a transverse rotating shaft connected to the extension part, and a manifold fixed on the transverse rotating shaft through a fixing member. The manifold is arranged opposite to each other at two ends of the fixing member, and a plurality of adsorption members are arranged on the manifold.

12. The fully automatic double-sided exposure machine according to claim 10 or 11, characterized in that: The extension parts are located at two ends of the transverse rotating shaft and clamp the transverse rotating shaft.

13. The fully automatic double-sided exposure machine according to claim 10 or 11, characterized in that: The fixing member includes at least one sliding block, and the at least one sliding block can slide relative to the rotating shaft.

14. The fully automatic double-sided exposure machine according to claim 10 or 11, characterized in that: The adsorption members are staggeredly arranged on both sides of the manifold.

15. The fully automatic double-sided exposure machine according to claim 1, characterized in that: The bracket is arranged corresponding to the transfer and handling assembly and the flip and handling assembly. The bracket includes relatively arranged vertical brackets. The vertical brackets are slidably arranged on a frame supporting the bracket to drive the transfer and handling assembly and the flip and handling assembly to slide longitudinally.

16. The fully automatic double-sided exposure machine according to claim 15, characterized in that: The driving member of the bracket is arranged above the bracket and connected to the vertical bracket via a horizontal bracket; or the driving member of the bracket is arranged on the frame to drive the bracket to slide.

17. The fully automatic double-sided exposure machine according to claim 1, characterized in that: The transfer and handling assembly includes an extension portion, and the flip and handling assembly includes an extension portion, and the extension portion and the extension portion move longitudinally.

18. The fully automatic double-sided exposure machine according to claim 1, characterized in that: The first table and the second table share a guide rail. The initial positions of the first table and the second table are on both sides of the exposure system, and they reciprocate from the initial position to the exposure position.

19. The fully automatic double-sided exposure machine according to claim 1, characterized in that: A first alignment system is provided between the first table and the exposure system, and a second alignment system is provided between the second table and the exposure system.

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