A femtosecond laser precision cutting device and control method thereof

Abstract

The present invention relates to the technical field of femtosecond laser tube cutting, and discloses a femtosecond laser precision tube cutting device, including: a device body, including a workbench, a beam installed above the workbench, a Y-axis linear motion platform, a hopper feeding module, an infrared femtosecond laser and a sealed optical path installed at the upper end of the beam, a material taking and placing robot installed on one side of the beam, and a second X-axis linear motion platform installed on the other side of the beam. The present invention adopts a double rotating chuck structure of a first rotating chuck and a second rotating chuck, so that during the processing of a thin tube with a core rod, the first rotating chuck and the second rotating chuck respectively clamp the two ends of the core rod, and only clamp once, without the need to repeatedly clamp the thin tube with a core rod, thereby solving the problem that the chuck will clamp the tube, and the requirements for the chuck are relatively low, while it can bring about the effects of high efficiency, lower chuck procurement cost, and simpler process.

Description

Technical Field

[0001] The invention relates to the technical field of femtosecond laser tube cutting, and in particular to a femtosecond laser precision tube cutting device and a control method thereof. Background Art

[0002] Femtosecond lasers have been widely used in physics, biology, chemical reaction control, optical communications and other fields. In the field of micro-machining, due to its minimal impact on the surrounding materials, it can safely cut, punch, engrave, and even be used in the photolithography process of integrated circuits. In the field of national defense, femtosecond lasers are used to safely cut high explosives, dismantle old and retired rockets and shells, etc. Infrared femtosecond lasers are mainly used for carbon-free precision processing of various thin tubes, films, and polymer materials.

[0003] The existing technology processes various types of thin tubes by clamping and feeding them sequentially. The processing method for thin tubes with mandrels is to cut the mandrel after feeding them sequentially to a certain length, which causes waste and takes too long to cut the mandrel. If the tube diameter is greater than 1mm, it is difficult to cut the product. In the process of sequential feeding, the thin tube will contact the guide sleeve, which is easy to cause scratches on the surface of the thin tube. The rotating chuck will continuously clamp the thin tube during the process of clamping and feeding it, which has extremely high requirements for the chuck. Imported chucks must be used, which are expensive and have a long delivery time. Summary of the invention

[0004] The main purpose of the present invention is to provide a femtosecond laser precision tube cutting device, which can effectively solve the problem of repeated clamping of thin tubes during processing and scratches caused by friction between the thin tubes and the guide sleeves in the related art.

[0005] In order to achieve the above object, the technical solution adopted by the present invention is:

[0006] A femtosecond laser precision tube cutting device, comprising:

[0007] The main body of the equipment includes a workbench, a beam installed above the workbench, a Y-axis linear motion platform, a silo feeding module, an infrared femtosecond laser and a sealed optical path installed on the upper end of the beam, a material handling robot installed on one side of the beam, and a second X-axis linear motion platform installed on the other side of the beam;

[0008] Wherein, a first X-axis linear motion platform is arranged at the upper end of the Y-axis linear motion platform, a fixed table is fixedly installed at one end of the first X-axis linear motion platform, a second rotating chuck is fixedly installed at the upper end of the fixed table, a movable table is movably installed on the first X-axis linear motion platform, the movable table includes a movable connecting plate, a first rotating chuck is fixedly installed at the upper end of the movable connecting plate, and the first rotating chuck and the second rotating chuck are respectively used for clamping the two ends of the core rod;

[0009] A first guide sleeve is also fixedly installed on the upper end of the fixed table, and a second guide sleeve is also fixedly installed on the upper end of the movable connecting plate. The first guide sleeve and the second guide sleeve are both used for guiding and positioning the core rod during clamping. During the processing, the core rod thin tube only contacts the first guide sleeve, the second rotating chuck, and the second guide sleeve and the first rotating chuck to reduce scratches caused by repeated clamping of the thin tube.

[0010] In an exemplary embodiment, the first X-axis linear motion platform includes a first slide rail, a linear motor stator plate is fixedly installed in the middle position of the first slide rail, a linear motor mover is fixedly installed in the middle position of the bottom end of the mover connecting plate, and the linear motor mover is located directly above the linear motor stator plate, the mover connecting plate is movably installed on the first slide rail, and a limit plate is fixedly installed on the first slide rail away from one end of the second rotary chuck.

[0011] In an exemplary embodiment, a second YZ manual adjustment slide is fixedly mounted on the mover connecting plate, and the second YZ manual adjustment slide is located on one side of the second guide sleeve. A first YZ manual adjustment slide is fixedly mounted on the fixed platform, and the first YZ manual adjustment slide is located on one side of the first guide sleeve. The first guide sleeve, the second rotating chuck, the second guide sleeve and the first rotating chuck are all located on the same central axis.

[0012] In an exemplary embodiment, the silo feeding module is located on one side of the crossbeam, the silo feeding module is fixedly mounted on the workbench through three legs at the bottom, a silo is fixedly mounted on the upper end of the silo feeding module, and brackets for installing sensors are also fixedly mounted on the workbenches on both sides of the silo feeding module, and the two sensors are respectively located on both sides of the silo.

[0013] In an exemplary embodiment, the silo feeding module includes a second slide rail installed on three legs, and supporting side angle support units are fixedly installed on both ends of the second slide rail, a servo motor is fixedly installed on the inner wall of one of the supporting side angle support units, and a fixed side angle support unit is fixedly installed on the second slide rail located on one side of the servo motor, a screw rod is fixedly installed on the rotating shaft of the servo motor, and the screw rod passes through the interior of the fixed side angle support unit, one end of the screw rod is installed on the inner wall of another supporting side angle support unit through a bearing, a screw rod nut is threadedly connected to the screw rod, a mounting block is fixedly installed on the screw rod nut, and the bottom end of the silo is fixedly mounted on the mounting block.

[0014] In an exemplary embodiment, the material picking and placing robot has the same structural principle as the silo feeding module and both are ball screw modules, a slide cylinder is fixedly installed on the mounting block of the material picking and placing robot, a pneumatic clamp is provided on one side of the slide cylinder, and an optical fiber sensor is fixedly installed on the bottom of one end of the second slide rail of the material picking and placing robot, and one end of the material picking and placing robot is located directly above one end of the silo feeding module.

[0015] In an exemplary embodiment, a first reflector is fixedly mounted on one end of the base plate of the sealed optical path, and a collimator and a second reflector are fixedly mounted on the other end of the base plate of the sealed optical path. The midpoints of the first reflector, the collimator and the second reflector are all located on the same central axis, and the sealed optical path is used as an optical path transmission system to prevent optical path dust.

[0016] In an exemplary embodiment, the second X-axis linear motion platform has the same structural principle as the first X-axis linear motion platform and both are linear motors equipped with slide rail mechanisms. A third reflector is fixedly mounted on the movable connecting plate of the second X-axis linear motion platform. A focusing Z-axis is also fixedly mounted on the movable connecting plate of the second X-axis linear motion platform. A coaxial CCD is fixedly mounted on the front end of the focusing Z-axis, and one end of the coaxial CCD is fixedly mounted on a galvanometer field lens group.

[0017] In an exemplary embodiment, the Y-axis linear motion platform has the same structural principle as the first X-axis linear motion platform and both are linear motors equipped with slide rail mechanisms. The bottom end of the first X-axis linear motion platform is fixedly mounted on the mover connecting plate of the Y-axis linear motion platform.

[0018] In an exemplary embodiment, folding dust covers are fixedly installed at both ends of the movable connecting plates of the first X-axis linear motion platform, the second X-axis linear motion platform and the Y-axis linear motion platform, and the other ends of the two folding dust covers are fixedly connected to the limit plates at both ends of the second X-axis linear motion platform.

[0019] According to another aspect of the present invention, a control method for a femtosecond laser precision cutting device is provided, comprising: correcting the running trajectory of the infrared femtosecond laser based on an error correction model, wherein correcting the running trajectory of the infrared femtosecond laser based on the error correction model comprises: presetting weights and thresholds from a hidden layer to an output layer, and from an input layer to a hidden layer of the error correction model; correcting the weights and thresholds from the hidden layer to the output layer, and from the input layer to the hidden layer; and correcting the running trajectory of the infrared femtosecond laser based on the corrected weights and thresholds.

[0020] Compared with the prior art, the present invention has the following beneficial effects:

[0021] The present invention redesigns the cutting of the thin tube with a core rod after processing a certain length, the sequential feeding processing of the thin tube, the contact between the thin tube and the guide sleeve, and the requirements for the rotary chuck. A double rotary chuck structure of a first rotary chuck and a second rotary chuck is adopted, so that during the processing of the thin tube with the core rod, the first rotary chuck and the second rotary chuck respectively clamp the two ends of the core rod, and only clamp once, without repeatedly clamping the thin tube with the core rod, thereby solving the problem that the chuck may damage the tube, and the requirements for the chuck are relatively low, and only an ordinary domestic chuck is required. Secondly, the double rotary chuck clamps the two ends of the core rod, and during processing, only the core rod thin tube needs to be processed, and the core rod does not need to be cut. During the processing, the thin tube does not contact the guide sleeve, so the surface of the thin tube will not be scratched during the processing, thereby increasing the cutting range of the tube diameter.

[0022] The parts not involved in the device are the same as those in the prior art or can be implemented by using the prior art. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 This is one of the overall structural schematic diagrams of a femtosecond laser precision tube cutting device of the present invention.

[0024] Figure 2 This is the second schematic diagram of the overall structure of a femtosecond laser precision tube cutting device of the present invention.

[0025] Figure 3 This is a schematic diagram of the overall structure of a femtosecond laser precision tube cutting device of the present invention with the sealed optical path housing and the folded dust cover on the first X-axis linear motion platform removed.

[0026] Figure 4 This is the third overall structural schematic diagram of a femtosecond laser precision tube cutting device of the present invention.

[0027] Figure 5 The present invention is a schematic diagram of the overall structure of a crossbeam of a femtosecond laser precision tube cutting device.

[0028] Figure 6 This is an enlarged view of the first X-axis linear motion platform of a femtosecond laser precision tube cutting device of the present invention.

[0029] Figure 7 This is an enlarged view of a femtosecond laser precision tube cutting device of the present invention with the folded dust cover on the first X-axis linear motion platform removed.

[0030] Figure 8 The present invention is a top view of a femtosecond laser precision tube cutting device without a folded dust cover on a first X-axis linear motion platform.

[0031] Fig. 9 The side view of the femtosecond laser precision tube cutting device of the present invention is shown with the folded dust cover on the first X-axis linear motion platform removed.

[0032] Fig.10 The present invention is a schematic diagram of the internal structure of a silo feeding module of a femtosecond laser precision cutting device.

[0033] In the figure: 1. First X-axis linear motion platform; 2. Crossbeam; 3. First rotary chuck; 4. Y-axis linear motion platform; 5. Focusing Z-axis; 6. Coaxial CCD; 7. Galvanometer field lens group; 8. Infrared femtosecond laser; 9. Second rotary chuck; 10. Sealed optical path; 11. Material handling robot; 12. Material bin feeding module; 13. Sensor; 14. Material bin; 15. Second X-axis linear motion platform; 16. Pneumatic gripper; 17. Sliding cylinder; 18. Fiber optic sensor; 19. The first YZ manual slide; 20, the first guide sleeve; 21, the second YZ manual slide; 22, the second guide sleeve; 23, the first slide rail; 24, the stator plate of the linear motor; 25, the mover of the linear motor; 26, the mover connecting plate; 27, the first reflector; 28, the beam expander; 29, the second reflector; 30, the third reflector; 31, the supporting side angle support unit; 32, the second slide rail; 33, the lead screw; 34, the lead screw nut; 35, the fixed side angle support unit; 36, the servo motor. DETAILED DESCRIPTION

[0034] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further explained below in conjunction with specific implementation methods.

[0035] like Figure 1-10 As shown, a femtosecond laser precision tube cutting device comprises:

[0036] The main body of the equipment includes a workbench, a beam 2 installed above the workbench, a Y-axis linear motion platform 4, a silo feeding module 12, an infrared femtosecond laser 8 and a sealed optical path 10 installed on the upper end of the beam 2, a material picking and placing robot 11 installed on one side of the beam 2, and a second X-axis linear motion platform 15 installed on the other side of the beam 2. An electric control box is fixedly installed on the side of one end of the workbench. The electric control box is equipped with control elements, which control the operation of various electrical components. Among them, the beam 2 is a marble beam;

[0037] Among them, the upper end of the Y-axis linear motion platform 4 is provided with a first X-axis linear motion platform 1, one end of the first X-axis linear motion platform 1 is fixedly installed with a fixed table, the upper end of the fixed table is fixedly installed with a second rotating chuck 9, and a movable table is movably installed on the first X-axis linear motion platform 1, and the movable table includes a movable connecting plate 26, and the upper end of the movable connecting plate 26 is fixedly installed with a first rotating chuck 3, and the first rotating chuck 3 and the second rotating chuck 9 are respectively used to clamp the two ends of the core rod;

[0038] A first guide sleeve 20 is also fixedly installed on the upper end of the fixed table, and a second guide sleeve 22 is also fixedly installed on the upper end of the movable connecting plate 26. The first guide sleeve 20 and the second guide sleeve 22 are both used for guiding and positioning the core rod during clamping. During the processing, the core rod thin tube only contacts the first guide sleeve 20, the second rotary chuck 9, the second guide sleeve 22 and the first rotary chuck 3 to reduce scratches caused by repeated clamping of the thin tube. The position above the first X-axis linear motion platform 1 can be called the loading position of the processing area, and the position above the Y-axis linear motion platform 4 can be called the processing area.

[0039] In this embodiment, when the core rod is clamped, the core rod is first sent into the first guide sleeve 20, and then inserted into the second rotary chuck 9 after passing through the first guide sleeve 20. The first X-axis linear motion platform 1 carries the first rotary chuck 3 to move, and moves to the end of the core rod, so that the core rod is inserted into the second guide sleeve 22 and then into the first rotary chuck 3. At this time, the first rotary chuck 3 and the second rotary chuck 9 clamp the core rod at the same time. The present invention adopts a double rotary chuck structure of the first rotary chuck 3 and the second rotary chuck 9, so that during the processing of the thin tube with the core rod, the first rotary chuck 3 and the second rotary chuck 9 respectively clamp the two ends of the core rod, and only clamp once, and there is no need to repeatedly clamp the thin tube with the core rod, which solves the problem of the chuck clamping the tube.

[0040] like Figure 6-9 As shown, the first X-axis linear motion platform 1 includes a first slide rail 23, a linear motor stator plate 24 is fixedly installed in the middle position of the first slide rail 23, a linear motor mover 25 is fixedly installed in the middle position of the bottom end of the mover connecting plate 26, and the linear motor mover 25 is located directly above the linear motor stator plate 24, the mover connecting plate 26 is movably installed on the first slide rail 23, and a limit plate is fixedly installed on the first slide rail 23 away from one end of the second rotating chuck 9.

[0041] A second YZ manual adjustment slide 21 is also fixedly installed on the mover connecting plate 26, and the second YZ manual adjustment slide 21 is located on one side of the second guide sleeve 22. The first YZ manual adjustment slide 19 is also fixedly installed on the fixed platform, and the first YZ manual adjustment slide 19 is located on one side of the first guide sleeve 20. The first guide sleeve 20, the second rotary chuck 9, the second guide sleeve 22 and the first rotary chuck 3 are all located on the same central axis.

[0042] In this embodiment, the second rotary chuck 9 is fixed at one end of the first slide rail 23, the first rotary chuck 3 is mounted on the mover connecting plate 26, the mover connecting plate 26 is mounted on the slide rail, and the mover connecting plate 26 is connected to the linear motor mover 25 to achieve a transmission effect. The first rotary chuck 3 slides relative to the second rotary chuck 9, thereby realizing the clamping of both ends of the core rod.

[0043] like Fig.10As shown, the silo feeding module 12 is located on one side of the crossbeam 2. The silo feeding module 12 is fixedly mounted on the workbench through three legs at the bottom. A silo 14 is fixedly mounted on the upper end of the silo feeding module 12. Brackets for mounting sensors 13 are also fixedly mounted on the workbenches on both sides of the silo feeding module 12. Two sensors 13 are respectively located on both sides of the silo 14. A plurality of core rod thin tube placement grooves are arrayed on the silo 14.

[0044] The silo feeding module 12 includes a second slide rail 32 installed on three legs, and supporting side angle support units 31 are fixedly installed at both ends of the second slide rail 32. A servo motor 36 is fixedly installed on the inner wall of one supporting side angle support unit 31, and a fixed side angle support unit 35 is fixedly installed on the second slide rail 32 located on one side of the servo motor 36. A screw rod 33 is fixedly installed on the rotating shaft of the servo motor 36, and the screw rod 33 passes through the interior of the fixed side angle support unit 35. One end of the screw rod 33 is installed on the inner wall of the other supporting side angle support unit 31 through a bearing, and a screw rod nut 34 is threadedly connected to the screw rod 33, and a mounting block is fixedly installed on the screw rod nut 34, and the bottom end of the silo 14 is fixedly installed on the mounting block.

[0045] In this embodiment, the servo motor 36 works to drive the screw rod 33 to rotate, thereby driving the screw rod nut 34 to move along the second slide rail 32, thereby driving the components installed on the upper end of the mounting block to slide.

[0046] like Figure 4 and Fig.10 As shown, the material picking and unloading robot 11 and the silo feeding module 12 have the same structural principle and are both ball screw modules. A slide cylinder 17 is fixedly installed on the mounting block of the material picking and unloading robot 11, and a pneumatic clamp 16 is arranged on one side of the slide cylinder 17. An optical fiber sensor 18 is fixedly installed at the bottom of one end of the second slide rail 32 of the material picking and unloading robot 11. One end of the material picking and unloading robot 11 is located directly above one end of the silo feeding module 12. This position can be called a clamping station. The silo feeding module 12 can drive the silo 14 to move along the Y-axis, and the material picking and unloading robot 11 can drive the pneumatic clamp 16 to move along the X-axis. The two are matched with each other so that the core rod thin tube transported along the Y-axis is clamped by the pneumatic clamp 16 and then moves along the X-axis to continue subsequent processing.

[0047] like Figure 1 , Figure 3 and Figure 5 As shown, a first reflector 27 is fixedly mounted on one end of the bottom plate of the sealed optical path 10, and a beam expander 28 and a second reflector 29 are fixedly mounted on the other end of the bottom plate of the sealed optical path 10. The midpoints of the first reflector 27, the beam expander 28 and the second reflector 29 are all located on the same central axis. The sealed optical path 10 is used as an optical path transmission system for optical path dust prevention.

[0048] like Figure 6-9 As shown, the second X-axis linear motion platform 15 has the same structural principle as the first X-axis linear motion platform 1 and both are linear motors equipped with slide rail mechanisms. A third reflector 30 is fixedly mounted on the movable connecting plate 26 of the second X-axis linear motion platform 15. A focusing Z-axis 5 is also fixedly mounted on the movable connecting plate 26 of the second X-axis linear motion platform 15. A coaxial CCD 6 is fixedly mounted on the front end of the focusing Z-axis 5. One end of the coaxial CCD 6 is fixedly mounted on a galvanometer field lens group 7, and the galvanometer field lens group 7 is located directly above the processing area.

[0049] The Y-axis linear motion platform 4 has the same structural principle as the first X-axis linear motion platform 1 and both are linear motors equipped with slide rail mechanisms. The bottom end of the first X-axis linear motion platform 1 is fixedly mounted on the mover connecting plate 26 of the Y-axis linear motion platform 4 .

[0050] Both ends of the mover connecting plates 26 of the first X-axis linear motion platform 1, the second X-axis linear motion platform 15 and the Y-axis linear motion platform 4 are fixedly installed with folding dust covers, and the other ends of the two folding dust covers are fixedly connected to the limit plates at both ends of the second X-axis linear motion platform 15.

[0051] It should be noted that the present invention is a femtosecond laser precision tube cutting equipment. When in use, first, the equipment is placed on a horizontal ground and powered on by an external power supply, and the core rod thin tube to be processed is placed in the core rod thin tube placement groove of the silo 14. The silo feeding module 12 drives the silo 14 to feed along the Y-axis to the bottom of the material picking and unloading robot 11, and the sensor 13 detects whether there is material in the silo 14. If the sensor 13 does not receive any material, the silo feeding module 12 continues to feed along the Y-axis for one stroke; if there is material, the material picking and unloading robot 11 moves to the clamping station of the silo 14, the slide cylinder 17 descends, the pneumatic clamp 16 clamps the workpiece, and then the slide cylinder 17 rises. At this time, the optical fiber sensor 18 senses whether the workpiece is clamped. If it is sensed that there is material, the material picking and unloading robot 11 moves to the upper material position in the processing area.

[0052] First, the workpiece is sent into the first guide sleeve 20, and then passed through the first guide sleeve 20 and then into the second rotary chuck 9. The first X-axis linear motion platform 1 carries the first rotary chuck 3 to move, wherein the first rotary chuck 3 is installed on the movable connecting plate 26, and the movable connecting plate 26 is installed on the slide rail. The movable connecting plate 26 is connected to the linear motor movable 25 to achieve the transmission effect, and moves to the core rod end, so that the core rod passes through the second guide sleeve 22 and then to the first rotary chuck 3. At this time, the first rotary chuck 3 and the second rotary chuck 9 clamp the core rod, wherein the first YZ manual slide 19 and the second YZ manual slide 21 are both commercially available standard parts, and their function is to realize Micro-adjustment in the YZ direction is performed to adjust the coaxial effect of the two guide sleeves so that the core rod can pass through the coaxial guide sleeve and then enter the rotating chuck. At this time, the pneumatic clamp 16 is released, the slide cylinder 17 rises, the infrared femtosecond laser 8 emits light, and the laser beam is emitted from the infrared femtosecond laser 8, reflected by the first reflector 27 to the beam expander 28, and then shot into the second reflector 29 after the beam expander 28. The second reflector 29 reflects the beam to the third reflector 30, and the third reflector 30 reflects the beam to the galvanometer field lens group 7. The second X-axis linear motion platform 15 is equipped with the focusing Z-axis 5, the coaxial CCD6, and the galvanometer field lens group 7 to move to position and process the thin tube.

[0053] In another embodiment, the present application provides another femtosecond laser cutting device, which differs from the femtosecond laser cutting device in the aforementioned embodiment in structure in the operation of controlling the motion trajectory of the control element.

[0054] The control element in this embodiment implements a control method based on error correction to correct the X-axis position of the first X-axis linear motion platform, and then generates a trajectory for controlling the femtosecond laser based on the corrected parameters to ultimately control the operation of the infrared femtosecond laser.

[0055] In this embodiment, a pre-trained correction model is used to perform error correction on the acquired coordinate values.

[0056] The error correction model is trained based on the following steps:

[0057] 1) Collecting historical data of the coordinate position of the first X-axis linear motion platform, such as the X-axis coordinate of the pseudo origin position of the first X-axis linear motion platform.

[0058] 2) Replace the abnormal data in the historical data with the processed data values.

[0059] In this embodiment, the following formula is first used to eliminate abnormal data.

[0060]

[0061] x i，tis defined as the x-axis coordinate value of the i-th coordinate position collected within the t time interval, is the average x-axis coordinate value within the time interval t. In the case of , it is indicated as abnormal data, and the data is removed and replaced by a normalized mean value, where T represents the time period, T is a multiple of the time interval t, and n represents the number of sample data collected within the time interval t. Similarly, the abnormal values ​​of the y-axis coordinate value are also removed and replaced in a similar way to the x-axis coordinate value. In this way, the corrected pseudo-origin coordinate value of the first X-axis linear motion platform can be obtained.

[0062] 3) Use the training data after removing abnormal data to train the error correction model.

[0063] The error correction model is trained using the forward propagation algorithm and the back-propagation algorithm.

[0064] First, set the parameters of the error correction model.

[0065] For example, the number of hidden layers of neurons is set to 3. The number of neurons in the input layer is n, the number of neurons in the hidden layer is m, the maximum number of training times is 1000, and the preset error threshold is 0.001.

[0066] In one example, the weight from the input layer to the hidden layer is W ij , the weight from the hidden layer to the output layer is W jk , the threshold of the hidden layer is a j , the threshold of the output layer is b k , set each weight and threshold to a random number between 0 and 1.

[0067] Next, modify the weights and thresholds.

[0068] Update the weights from the hidden layer to the output layer as:

[0069]

[0070] Update the weights from the input layer to the hidden layer as:

[0071]

[0072] Update the threshold from the hidden layer to the output layer as:

[0073]

[0074] Update the threshold from the input layer to the hidden layer as:

[0075]

[0076] Among them, w ijis the weight from the input layer to the hidden layer, w ij The updated weight, w jk is the weight from the hidden layer to the output layer, w jk The updated weight, a j is the threshold of the hidden layer, for a j The updated threshold, b k is the threshold of the output layer, for b k The updated threshold, η is the learning rate, H j is the actual output of the hidden layer, O k is the actual output of the output layer, x i is the x-axis coordinate value of the input of the BP neural network, e k =Y k -O k , m is the number of neurons in the output layer, Y k is the expected output.

[0077] Finally, the corrected X-axis coordinate value is calculated using the corrected weight and threshold.

[0078]

[0079] Based on the error correction method similar to the X-axis coordinate value, the Y-axis coordinate value of the Y-axis linear motion platform and the X-axis coordinate value of the second X-axis linear motion platform can be corrected. i The Y-axis coordinate value of the Y-axis linear motion platform and the X-axis coordinate value of the first X-axis linear motion platform can be replaced respectively, and no further details will be given here.

[0080] By using the corrected coordinate values ​​of the first X-axis linear motion platform, the second X-axis linear motion platform, and the Y-axis linear motion platform, the position of the infrared femtosecond laser can be more accurately controlled, thereby more accurately cutting the core rod thin tube.

[0081] The embodiment of the present application can also implement the following configuration:

[0082] 1. A femtosecond laser precision tube cutting equipment, characterized in that it comprises: an equipment body, including a workbench, a beam installed above the workbench, a Y-axis linear motion platform, a silo feeding module, an infrared femtosecond laser and a sealing optical path installed at the upper end of the beam, a material picking and placing robot installed on one side of the beam, and a second X-axis linear motion platform installed on the other side of the beam; wherein a first X-axis linear motion platform is provided at the upper end of the Y-axis linear motion platform, a fixed table is fixedly installed at one end of the first X-axis linear motion platform, a second rotating chuck is fixedly installed at the upper end of the fixed table, and the first X-axis linear motion platform is provided with a first X-axis linear motion platform. A movable table is movably installed on the moving platform, and the movable table includes a movable connecting plate, and a first rotating chuck is fixedly installed on the upper end of the movable connecting plate, and the first rotating chuck and the second rotating chuck are respectively used to clamp the two ends of the core rod; a first guide sleeve is also fixedly installed on the upper end of the fixed table, and a second guide sleeve is also fixedly installed on the upper end of the movable connecting plate, and the first guide sleeve and the second guide sleeve are both used for guiding and positioning the core rod when clamping the core rod. During the processing, the core rod thin tube only contacts the first guide sleeve, the second rotating chuck, and the second guide sleeve and the first rotating chuck to reduce scratches caused by repeated clamping of the thin tube, so as to reduce scratches caused by repeated clamping of the thin tube.

[0083] 2. A femtosecond laser precision tube cutting equipment according to item 1, characterized in that the first X-axis linear motion platform includes a first slide rail, a linear motor stator plate is fixedly installed in the middle position of the first slide rail, a linear motor mover is fixedly installed in the middle position of the bottom end of the mover connecting plate, and the linear motor mover is located directly above the linear motor stator plate, the mover connecting plate is movably installed on the first slide rail, and a limit plate is fixedly installed on the first slide rail away from one end of the second rotating chuck.

[0084] 3. A femtosecond laser precision tube cutting equipment according to item 2 is characterized in that a second YZ manual adjustment slide is also fixedly installed on the movable connecting plate, and the second YZ manual adjustment slide is located on one side of the second guide sleeve, a first YZ manual adjustment slide is also fixedly installed on the fixed platform, and the first YZ manual adjustment slide is located on one side of the first guide sleeve, and the first guide sleeve, the second rotating chuck, the second guide sleeve and the first rotating chuck are all located on the same central axis.

[0085] 4. A femtosecond laser precision tube cutting equipment according to item 1, characterized in that the silo feeding module is located on one side of the crossbeam, the silo feeding module is fixedly mounted on the workbench through three legs at the bottom, a silo is fixedly mounted on the upper end of the silo feeding module, and brackets for mounting sensors are also fixedly mounted on the workbenches located on both sides of the silo feeding module, and the two sensors are respectively located on both sides of the silo.

[0086] 5. A femtosecond laser precision tube cutting equipment according to item 4, characterized in that the silo feeding module includes a second slide rail installed on three legs, and supporting side angle support units are fixedly installed at both ends of the second slide rail, a servo motor is fixedly installed on the inner wall of one of the supporting side angle support units, and a fixed side angle support unit is fixedly installed on the second slide rail located on one side of the servo motor, a screw rod is fixedly installed on the rotating shaft of the servo motor, and the screw rod passes through the interior of the fixed side angle support unit, one end of the screw rod is installed on the inner wall of another supporting side angle support unit through a bearing, a screw rod nut is threadedly connected to the screw rod, a mounting block is fixedly installed on the screw rod nut, and the bottom end of the silo is fixedly installed on the mounting block.

[0087] 6. A femtosecond laser precision tube cutting equipment according to item 4, characterized in that the material picking and placing robot and the silo feeding module (12) have the same structural principle and are both ball screw modules, a slide cylinder is fixedly installed on the mounting block of the material picking and placing robot, a pneumatic clamp is provided on one side of the slide cylinder, an optical fiber sensor is fixedly installed at the bottom of one end of the second slide rail of the material picking and placing robot, and one end of the material picking and placing robot is located directly above one end of the silo feeding module.

[0088] 7. A femtosecond laser precision tube cutting device according to item 1, characterized in that a first reflector is fixedly mounted on one end of the bottom plate of the sealed optical path, a collimator and a second reflector are fixedly mounted on the other end of the bottom plate of the sealed optical path, the midpoints of the first reflector, the collimator and the second reflector are all located on the same central axis, and the sealed optical path is used as an optical path transmission system to prevent dust from occurring in the optical path.

[0089] 8. A femtosecond laser precision tube cutting equipment according to item 1, characterized in that the second X-axis linear motion platform has the same structural principle as the first X-axis linear motion platform and both are linear motors with slide rail mechanisms, a third reflector is fixedly mounted on the movable connecting plate of the second X-axis linear motion platform, a focusing Z-axis is also fixedly mounted on the movable connecting plate of the second X-axis linear motion platform, a coaxial CCD is fixedly mounted on the front end of the focusing Z-axis, and one end of the coaxial CCD is fixedly mounted on a galvanometer field lens group.

[0090] 9. A femtosecond laser precision tube cutting equipment according to item 1, characterized in that the Y-axis linear motion platform has the same structural principle as the first X-axis linear motion platform and both are linear motors with slide rail mechanisms, and the bottom end of the first X-axis linear motion platform is fixedly mounted on the mover connecting plate of the Y-axis linear motion platform.

[0091] 10. A femtosecond laser precision tube cutting equipment according to item 1, characterized in that folding dust covers are fixedly installed at both ends of the movable connecting plates of the first X-axis linear motion platform, the second X-axis linear motion platform and the Y-axis linear motion platform, and the other ends of the two folding dust covers are fixedly connected to the limit plates at both ends of the second X-axis linear motion platform.

[0092] 11. A control method for a femtosecond laser precision tube cutting device, comprising: correcting the running trajectory of the infrared femtosecond laser based on an error correction model.

[0093] 12. The method according to item 11, characterized in that correcting the running trajectory of the infrared femtosecond laser based on the error correction model comprises:

[0094] Presetting the weights and thresholds from the hidden layer to the output layer and from the input layer to the hidden layer of the error correction model;

[0095] Correcting the weights and thresholds from the hidden layer to the output layer and from the input layer to the hidden layer;

[0096] The running trajectory of the infrared femtosecond laser is corrected based on the corrected weight and threshold.

[0097] 13. The method according to item 12, characterized in that the weight from the hidden layer to the output layer is corrected based on the following formula:

[0098]

[0099] Among them, w jk is the weight from the hidden layer to the output layer, w jk The corrected weight from hidden layer to output layer, η is the learning rate, H j is the actual output of the hidden layer, and m is the number of neurons in the output layer.

[0100] 14. The method according to claim 12, characterized in that the weight update from the input layer to the hidden layer of the error correction model is corrected based on the following formula:

[0101]

[0102] Among them, w ij is the weight from the input layer to the hidden layer, is the weight from the input layer to the hidden layer after correction, η is the learning rate, H j is the actual output of the hidden layer, m is the number of neurons in the output layer, x i is the input coordinate value.

[0103] 15. The method according to item 12 is characterized in that the threshold from the input layer to the hidden layer is corrected based on the following formula:

[0104]

[0105] Among them, a j is the threshold from the input layer to the hidden layer, for a j The corrected threshold from input layer to hidden layer, w jk is the weight from the hidden layer to the output layer, η is the learning rate, H j is the actual output of the hidden layer, and m is the number of neurons in the output layer.

[0106] 16. The method according to item 12 is characterized in that the threshold from the hidden layer to the output layer is corrected based on the following formula:

[0107]

[0108] Among them, b k is the threshold from hidden layer to output layer, is the threshold from the hidden layer to the output layer after correction, η is the learning rate, H j is the actual output of the hidden layer, e k =Y k -O k , O k is the actual output of the output layer, Y k is the expected output.

[0109] 17. The method according to item 12, characterized in that correcting the running trajectory of the infrared femtosecond laser based on the corrected weight and threshold comprises: correcting the running trajectory of the infrared femtosecond laser based on the following formula:

[0110]

[0111] in, is the corrected X-axis coordinate value of the infrared femtosecond laser, is the weight from the corrected input layer to the hidden layer, is the weight of the corrected hidden layer to output layer weight, for a j The corrected threshold from input layer to hidden layer, is the threshold from hidden layer to output layer after correction, x i is the input coordinate value, e k =Y k -O k , m is the number of neurons in the output layer, O k is the actual output of the output layer, Yk is the expected output.

[0112] 18. The method according to item 11 is characterized in that the error correction model is a neural network model.

[0113] 19. A femtosecond laser precision tube cutting device according to any one of items 1 to 10, wherein the femtosecond laser precision tube cutting device also includes a control element, and the control element is used to correct the coordinate values ​​of one or more platforms among the first X-axis linear motion platform, the Y-axis linear motion platform and the second X-axis linear motion platform through an error correction model, so as to first control the operating trajectory of the infrared femtosecond laser.

[0114] 20. A femtosecond laser precision tube cutting device according to any one of items 1 to 10, the femtosecond laser precision tube cutting device also includes a control element, and the control element is configured to execute the method according to any one of claims 1 to 18 to control the operating trajectory of the infrared femtosecond laser.

[0115] The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention to be protected. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A femtosecond laser precision tube cutting device, characterized in that: include: The device body comprises a workbench, a crossbeam (2) installed above the workbench, a Y-axis linear motion platform (4), a silo feeding module (12), an infrared femtosecond laser (8) and a sealed optical path (10) installed at the upper end of the crossbeam (2), a material picking and placing robot (11) installed on one side of the crossbeam (2), and a second X-axis linear motion platform (15) installed on the other side of the crossbeam (2); The upper end of the Y-axis linear motion platform (4) is provided with a first X-axis linear motion platform (1), one end of the first X-axis linear motion platform (1) is fixedly mounted with a fixed table, the upper end of the fixed table is fixedly mounted with a second rotating chuck (9), the first X-axis linear motion platform (1) is movably mounted with a movable table, the movable table comprises a movable connecting plate (26), the upper end of the movable connecting plate (26) is fixedly mounted with a first rotating chuck (3), the first rotating chuck (3) and the second rotating chuck (9) are fixedly mounted. The disks (9) are used to clamp the two ends of the mandrel respectively; a first guide sleeve (20) is fixedly mounted on the upper end of the fixed platform, and a second guide sleeve (22) is fixedly mounted on the upper end of the movable connecting plate (26); the first guide sleeve (20) and the second guide sleeve (22) are both used to guide and position the mandrel when clamping it; during the processing, the thin tube does not contact the first guide sleeve (20), the second rotating chuck (9), the second guide sleeve (22) and the first rotating chuck (3), so as to reduce scratches caused by repeated clamping of the thin tube; The first X-axis linear motion platform (1) comprises a first slide rail (23), a linear motor stator plate (24) is fixedly mounted in the middle position of the first slide rail (23), a linear motor mover (25) is fixedly mounted in the middle position of the bottom end of the mover connecting plate (26), and the linear motor mover (25) is located directly above the linear motor stator plate (24), the mover connecting plate (26) is movably mounted on the first slide rail (23), and a limit plate is fixedly mounted on the first slide rail (23) at one end away from the second rotating chuck (9); A second YZ manual adjustment slide (21) is also fixedly mounted on the movable connecting plate (26), and the second YZ manual adjustment slide (21) is located on one side of the second guide sleeve (22); a first YZ manual adjustment slide (19) is also fixedly mounted on the fixed platform, and the first YZ manual adjustment slide (19) is located on one side of the first guide sleeve (20); the first guide sleeve (20), the second rotating chuck (9), the second guide sleeve (22) and the first rotating chuck (3) are all located on the same central axis; The silo feeding module (12) is located on one side of the crossbeam (2). The silo feeding module (12) is fixedly mounted on a workbench via three legs at the bottom. A silo (14) is fixedly mounted on the upper end of the silo feeding module (12). Brackets for mounting sensors (13) are also fixedly mounted on the workbench located on both sides of the silo feeding module (12). The two sensors (13) are respectively located on both sides of the silo (14).

2. The femtosecond laser precision tube cutting device according to claim 1, characterized in that: The silo feeding module (12) comprises a second slide rail (32) mounted on three legs, and supporting side angle support units (31) are fixedly mounted on both ends of the second slide rail (32), and a servo motor (36) is fixedly mounted on the inner wall of one supporting side angle support unit (31), and a fixed side angle support unit (35) is fixedly mounted on the second slide rail (32) located on one side of the servo motor (36), and a screw rod (33) is fixedly mounted on the rotating shaft of the servo motor (36), and the screw rod (33) passes through the interior of the fixed side angle support unit (35), and one end of the screw rod (33) is mounted on the inner wall of another supporting side angle support unit (31) through a bearing, and a screw rod nut (34) is threadedly connected to the screw rod (33), and a mounting block is fixedly mounted on the screw rod nut (34), and the bottom end of the silo (14) is fixedly mounted on the mounting block.

3. The femtosecond laser precision tube cutting device according to claim 1, characterized in that: The material picking and placing robot (11) and the silo feeding module (12) have the same structural principle and are both ball screw modules. A slide cylinder (17) is fixedly mounted on the mounting block of the material picking and placing robot (11), and a pneumatic clamp (16) is arranged on one side of the slide cylinder (17). An optical fiber sensor (18) is fixedly mounted on the bottom of one end of the second slide rail (32) of the material picking and placing robot (11), and one end of the material picking and placing robot (11) is located directly above one end of the silo feeding module (12).

4. The femtosecond laser precision tube cutting device according to claim 1, characterized in that: A first reflector (27) is fixedly mounted on one end of the bottom plate of the sealed optical path (10), and a beam expander (28) and a second reflector (29) are fixedly mounted on the other end of the bottom plate of the sealed optical path (10); the midpoints of the first reflector (27), the beam expander (28) and the second reflector (29) are all located on the same central axis; and the sealed optical path (10) is used as an optical path transmission system for optical path dust prevention.

5. The femtosecond laser precision tube cutting device according to claim 1, characterized in that: The second X-axis linear motion platform (15) has the same structural principle as the first X-axis linear motion platform (1) and both are linear motors equipped with slide rail mechanisms. A third reflector (30) is fixedly mounted on a movable connecting plate (26) of the second X-axis linear motion platform (15). A focusing Z axis (5) is also fixedly mounted on the movable connecting plate (26) of the second X-axis linear motion platform (15). A coaxial CCD (6) is fixedly mounted at the front end of the focusing Z axis (5). One end of the coaxial CCD (6) is fixedly mounted on a galvanometer field lens group (7).

6. The femtosecond laser precision tube cutting device according to claim 1, characterized in that: The Y-axis linear motion platform (4) also has the same structural principle as the first X-axis linear motion platform (1) and both are linear motors equipped with slide rail mechanisms. The bottom end of the first X-axis linear motion platform (1) is fixedly mounted on the mover connecting plate (26) of the Y-axis linear motion platform (4).

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