A micromechanical gyroscope using piezoresistive / piezoelectric detection

Abstract

The present invention discloses a micromechanical gyroscope using piezoresistive / piezoelectric detection, comprising one or more lever coupling detection mechanisms, a driving capacitor, a detection mass block, an external decoupling mechanism, an internal decoupling mechanism and a rhombus coupling mechanism, wherein the lever coupling detection mechanism is connected to the external decoupling mechanism, the external decoupling mechanism is connected to the detection mass block, the detection mass block is connected to the internal decoupling mechanism, adjacent internal decoupling mechanisms are connected via a rhombus coupling mechanism, and each mechanism and the driving capacitor are fixed via respective anchor points. The use of piezoresistive / piezoelectric detection is beneficial to reducing the volume of the gyroscope and improving the accuracy; the use of the lever coupling detection mechanism and the rhombus coupling mechanism improves the adaptability of the gyroscope to the mechanical environment; the piezoresistive / piezoelectric detection beam is connected to the lever to improve the sensitivity of the gyroscope; the two ends of the lever are connected to the detection mass block via an external decoupling mechanism, which is beneficial to improving the sensitivity and accuracy of the gyroscope.

Description

Technical Field

[0001] The invention relates to a micromechanical gyroscope, in particular to a micromechanical gyroscope adopting piezoresistive / piezoelectric detection. Background Art

[0002] Micromechanical gyroscopes have a wide range of market demands due to their small size, light weight, low cost, low power consumption, and easy integration. They have been used in civil applications such as industry, agriculture, automobiles, consumer electronics, and military applications such as weapons and aerospace. With the expansion of application areas and the improvement of usage requirements, the size of micromechanical gyroscopes is required to be continuously reduced, the accuracy is continuously improved, and the environmental adaptability is continuously enhanced. However, it is difficult to take into account the small size, accuracy, and environmental adaptability at the same time.

[0003] Existing micromechanical gyroscopes mostly use a tuning fork coupling structure of two or four mass blocks, and adopt electrostatic excitation and capacitance detection. In order to improve the detection accuracy, a larger detection capacitor is often required. However, a large detection capacitor will occupy a larger chip area, thereby increasing the gyroscope area. On the other hand, a large capacitor will also introduce a larger coupling interference, which cannot achieve the high-precision requirements under a small volume. Moreover, the increase in capacitance will also increase the motion damping, resulting in a decrease in the quality factor and is not conducive to improving the gyroscope accuracy. The tuning fork coupling structure of two or four mass blocks makes it difficult to improve the non-working mode, thereby making it difficult to improve the environmental adaptability of the gyroscope. Existing micromechanical gyroscopes using piezoresistive detection, on the one hand, use tuning fork coupling, which makes it difficult to improve the non-working mode, thereby making it difficult to improve the environmental adaptability of the gyroscope; on the other hand, the decoupling method used cannot well achieve the motion decoupling of the two modes of the gyroscope, limiting the improvement of the gyroscope performance. Existing four-mass micromechanical gyroscopes use lever coupling on the outside and tuning fork coupling on the inside. This coupling method cannot achieve that the in-phase modal frequency of any two adjacent mass blocks is higher than the anti-phase modal frequency, which is not conducive to improving the environmental adaptability of the gyroscope. The existing two-mass or four-mass micromechanical gyroscopes use a diamond coupling mechanism. On the one hand, due to the use of capacitive drive and detection, it is difficult to reduce the gyroscope area. On the other hand, the coupling method used cannot achieve that the in-phase modal frequency of any two adjacent mass blocks is higher than the anti-phase modal frequency, which is not conducive to improving the environmental adaptability of the gyroscope. Summary of the invention

[0004] The technical problem to be solved by the present invention is to overcome the shortcomings of the prior art and provide a micromechanical gyroscope using piezoresistive / piezoelectric detection. The piezoresistive / piezoelectric detection is used to reduce the volume of the gyroscope and improve its accuracy. A lever coupling detection mechanism and a diamond coupling mechanism are used to make the in-phase motion mode of two adjacent detection mass blocks higher than the reverse motion mode, thereby improving the adaptability of the gyroscope to the mechanical environment. The piezoresistive / piezoelectric detection beam is connected to the lever, and the amplification effect of the lever can be used to increase the pressure on the piezoresistive / piezoelectric beam, thereby improving the sensitivity of the gyroscope. The two ends of the lever are connected to the detection mass block through an external decoupling mechanism, thereby achieving a larger motion displacement of the detection mass block, which is beneficial to improving the sensitivity and accuracy of the gyroscope.

[0005] In order to solve the above technical problems, the present invention provides a micromechanical gyroscope using piezoresistive / piezoelectric detection, comprising at least one group of lever coupling detection mechanisms, detection mass blocks, external decoupling mechanisms, internal decoupling mechanisms, diamond coupling mechanisms and driving capacitors; wherein each group of lever coupling detection mechanisms, detection mass blocks, external decoupling mechanisms, internal decoupling mechanisms, diamond coupling mechanisms and driving capacitors are symmetrically distributed relative to the center line of the gyroscope;

[0006] The lever coupling detection mechanism comprises a lever, a flexible hinge, a hinge anchor point, a piezoresistive / piezoelectric detection beam and a detection beam anchor point, wherein the flexible hinge connects the lever and the hinge anchor point, the piezoresistive / piezoelectric detection beam connects the lever and the detection beam anchor point, and both ends of the lever are connected to a set of external decoupling mechanisms;

[0007] The external decoupling mechanism is located outside the detection mass block, and includes an external decoupling frame, a first external decoupling folding beam, a second external decoupling folding beam, a third external decoupling folding beam and an external decoupling anchor point, the first external decoupling folding beam connects the external decoupling frame and the detection mass block, the second external decoupling folding beam connects the external decoupling anchor point and the external decoupling frame, and the third external decoupling folding beam connects the external decoupling frame and the lever;

[0008] The inner decoupling mechanism is located between every two adjacent detection mass blocks, and the inner decoupling mechanism includes an inner decoupling frame, a first inner decoupling folding beam, a second inner decoupling folding beam and an inner decoupling anchor point, the inner decoupling frame is connected to the diamond coupling mechanism, the first inner decoupling folding beam connects the inner decoupling anchor point and the inner decoupling frame, and the second inner decoupling folding beam connects the inner decoupling frame and the detection mass block;

[0009] The diamond coupling mechanism comprises a diamond coupling anchor point, a bending beam and a diamond mechanism, the bending beam connects the diamond coupling anchor point and the diamond mechanism, and the diamond mechanism is connected to the inner decoupling frame;

[0010] The driving capacitor comprises movable comb teeth, fixed comb teeth and comb tooth anchor points, the fixed comb teeth are fixed by the comb tooth anchor points, and the movable comb teeth are connected to the external decoupling frame.

[0011] The flexible hinge is composed of at least two beams, one end of the beam is connected to the lever, and the other end is connected to the hinge anchor point; there are at least two piezoresistive / piezoelectric detection beams, and the at least two piezoresistive / piezoelectric detection beams are symmetrically distributed relative to the flexible hinge. During detection, the piezoresistive / piezoelectric detection beam on one side is compressed, and the piezoresistive / piezoelectric detection beam on the other side is also compressed, thereby realizing differential detection, which is beneficial to improving the performance of the gyroscope.

[0012] The present invention has the following advantages due to the adoption of the above technical solution:

[0013] 1. Due to the use of piezoresistive / piezoelectric detection, the characteristic size of the piezoresistive / piezoelectric detection beam is 10 -9 ~10 -6 m, the detection accuracy increases with the reduction of the cross-sectional area of ​​the piezoresistive / piezoelectric detection beam, which is beneficial to reducing the size of the gyroscope and improving the accuracy; on the other hand, the use of piezoresistive / piezoelectric detection greatly reduces the capacitance at the detection end, which greatly reduces the interference through space capacitance coupling, thereby improving the accuracy; and the use of piezoresistive / piezoelectric detection can also reduce the gas damping during movement, improve the quality factor, and thus improve the accuracy of the gyroscope.

[0014] 2. The present invention adopts a diamond coupling mechanism and a lever coupling detection mechanism for combined coupling, so that the in-phase motion mode of any two adjacent detection mass blocks is higher than the reverse motion mode, so as to increase the non-working mode frequency, thereby improving the adaptability of the gyromechanical environment.

[0015] 3. The present invention uses both an internal decoupling mechanism and an external decoupling mechanism, so that except for the movement caused by the Coriolis acceleration, the movements of the two modes are isolated from each other, thereby improving the performance of the gyroscope.

[0016] 4. Since the piezoresistive / piezoelectric detection beam is connected to the lever, on the one hand, the amplifying effect of the lever can be used to increase the pressure on the piezoresistive / piezoelectric detection beam and improve the sensitivity of the gyroscope; on the other hand, the top of the lever is connected to the detection mass block through an external decoupling mechanism, which can achieve a larger movement displacement of the detection mass block, which is beneficial to improving the sensitivity and accuracy of the gyroscope.

[0017] 5. Since each mechanism is symmetrically distributed relative to the center line of the gyroscope, it is helpful to reduce the impact of processing errors and temperature changes on the performance of the gyroscope. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0019] Figure 2 It is a 1 / 4 structural schematic diagram of the present invention.

[0020] Figure 3 Schematic diagram of the lever coupling detection mechanism of the first embodiment.

[0021] Figure 4 It is a schematic diagram of the lever coupling detection mechanism of the second embodiment.

[0022] Figure 5 Schematic diagram of the lever coupling detection mechanism of the third embodiment.

[0023] Figure 6 Schematic diagram of the lever coupling detection mechanism of the fourth embodiment.

[0024] Figure 7 It is a schematic diagram of the lever coupling detection mechanism of the fifth embodiment.

[0025] Figure 8 It is a schematic diagram of the lever coupling detection mechanism of the sixth embodiment. DETAILED DESCRIPTION

[0026] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0027] Embodiment 1

[0028] A micromechanical gyroscope using piezoresistive / piezoelectric detection, such as Figure 1 As shown in FIG. 3 , the present invention comprises four groups of lever coupling detection mechanisms 110, sixteen groups of driving capacitors 120, four groups of detection mass blocks 160, eight groups of external decoupling mechanisms 130, eight groups of internal decoupling mechanisms 150 and four groups of diamond coupling mechanisms 140; the lever coupling detection mechanism 110 is connected to the external decoupling mechanism 130, the external decoupling mechanism 130 is connected to the detection mass block 160, the detection mass block 160 is connected to the internal decoupling mechanism 150, adjacent internal decoupling mechanisms 150 are connected via the diamond coupling mechanism 140, and the above-mentioned mechanisms are fixed to the driving capacitors 120 via their respective anchor points.

[0029] Specifically, each set of lever coupling detection mechanisms 110 includes a lever 113, a set of flexible hinges 111, a hinge anchor point 112, two piezoresistive / piezoelectric detection beams 114a, 114b and two detection beam anchor points 115a, 115b. The characteristic size of the piezoresistive / piezoelectric detection beams 114a, 114b is 10 -9 ~10 -6m, the flexible hinge 111 is composed of two beams 111a and 111b, one end of the beams 111a and 111b is connected to the lever 113, and the other end is connected to the hinge anchor 112, the piezoresistive / piezoelectric detection beam 114a is connected to the lever 113 and the detection beam anchor 115a, the piezoresistive / piezoelectric detection beam 114b is connected to the lever 113 and the detection beam anchor 115b, the flexible hinge 111 and the hinge anchor 112 are located on one side of the lever 113, the piezoresistive / piezoelectric detection beams 114a and 114b and the detection beam anchors 115a and 115b are located on the other side of the lever 113, the piezoresistive / piezoelectric detection beams 114a and 114b are symmetrically distributed relative to the flexible hinge 111, and the two ends of the lever 113 are respectively connected to a group of external decoupling mechanisms 130.

[0030] The external decoupling mechanism 130 includes an external decoupling frame 131, a first external decoupling folding beam 132, a second external decoupling folding beam 133, a third external decoupling folding beam 134 and an external decoupling anchor point 135. The first external decoupling folding beam 132 connects the external decoupling frame 131 and the detection mass block 160, the second external decoupling folding beam 133 connects the external decoupling anchor point 135 and the external decoupling frame 131, and the third external decoupling folding beam 134 connects the external decoupling frame 131 and the lever 113.

[0031] The internal decoupling mechanism 150 includes an internal decoupling frame 151, a first internal decoupling folding beam 152, a second internal decoupling folding beam 154 and an internal decoupling anchor point 153. The first internal decoupling folding beam 152 connects the internal decoupling anchor point 153 and the internal decoupling frame 151, the second internal decoupling folding beam 154 connects the internal decoupling frame 151 and the detection mass block 160, and the internal decoupling frame 151 is connected to the diamond coupling mechanism 140.

[0032] The diamond coupling mechanism 140 includes diamond coupling anchor points 143a, 143b, curved beams 142a, 142b and a diamond mechanism 141. The curved beam 142a connects the diamond coupling anchor point 143a and the diamond mechanism 141. The curved beam 142b connects the diamond coupling anchor point 143b and the diamond mechanism 141. The diamond mechanism 141 is connected to the inner decoupling frame 151.

[0033] The driving capacitor 120 includes movable comb teeth 121 , fixed comb teeth 122 and comb tooth anchor points 123 . The fixed comb teeth 122 are fixed by the comb tooth anchor points 123 . The movable comb teeth 121 are connected to the external decoupling frame 131 .

[0034] The inner decoupling mechanism 150 is located between each two adjacent detection masses 160 and connected via a diamond coupling mechanism 140. The outer decoupling mechanism 130 is located outside the detection mass 160, and the outer decoupling mechanism 130 connected to the adjacent detection mass 160 is connected to the lever 113 via a third outer decoupling folding beam 134.

[0035] The lever coupling detection mechanism 110, the driving capacitor 120, the external decoupling mechanism 130, the detection mass block 160, the internal decoupling mechanism 150 and the diamond coupling mechanism 140 are symmetrically distributed relative to the center line of the gyroscope.

[0036] like Figure 1 As shown, in the above embodiment, two detection methods, open-loop detection and closed-loop detection, can be adopted.

[0037] like Figure 1 , 2 As shown, when the present invention is in use, the Coriolis force is used to measure the angular velocity of the object. The fixed comb teeth 122 apply electrostatic force to the movable comb teeth 121 under the action of the driving voltage. The movable comb teeth 121 drive the external decoupling mechanism 130, and the external decoupling mechanism 130 drives the detection mass block 160 to vibrate along the X-axis. Among them, the phase difference between any two adjacent detection mass blocks 160 is 180°, as shown by the arrow 170. When the system has an angular velocity input around the Z-axis direction, under the action of the Coriolis force, the detection mass block 160 drives the lever 113 to rotate around the Z-axis through the external decoupling mechanism 130, thereby generating pressure or tension on the piezoresistive / piezoelectric detection beams 114a and 114b, and the angular velocity information input along the Z-axis direction can be obtained through the differential signal of the piezoresistive / piezoelectric detection beams 114a and 114b on both sides.

[0038] Embodiment 2

[0039] The difference between this embodiment and the first embodiment is that the structure of the lever coupling detection mechanism is different. Figure 4 As shown, the lever coupling detection mechanism 110 of the present embodiment includes a lever 113, a set of flexible hinges 111, a hinge anchor point 112, two piezoresistive / piezoelectric detection beams 114a, 114b and two detection beam anchor points 115a, 115b. The flexible hinge 111 is composed of two beams 111a, 111b. One end of the beams 111a, 111b is connected to the lever 113, and the other end is connected to the hinge anchor point 112. The piezoresistive / piezoelectric detection beam 114a is connected to the lever 113. 13 and the detection beam anchor 115a, the piezoresistive / piezoelectric detection beam 114b connects the lever 113 and the detection beam anchor 115b, the flexible hinge 111, the hinge anchor 112, the piezoresistive / piezoelectric detection beams 114a, 114b and the detection beam anchors 115a, 115b are all located on the same side of the lever 113, the piezoresistive / piezoelectric detection beams 114a, 114b are symmetrically distributed relative to the flexible hinge 111, and a group of external decoupling mechanisms 130 are respectively connected at both ends of the lever 113.

[0040] Embodiment 3

[0041] The difference between this embodiment and the first embodiment is that the structure of the lever coupling detection mechanism is different. Figure 5As shown, the lever coupling detection mechanism 110 of this embodiment includes a lever 113, two sets of flexible hinges 111A, 111B, two hinge anchors 112A, 112B, two piezoresistive / piezoelectric detection beams 114a, 114b and two detection beam anchors 115a, 115b. The flexible hinge 111A is composed of two beams 111a, 111b, one end of the beams 111a, 111b is connected to the lever 113, and the other end is connected to the hinge anchor 112A. The flexible hinge 111B is composed of two beams 111c, 111d, one end of the beams 111c, 111d is connected to the lever 113, and the other end is connected to the hinge anchor 112B. The piezoresistive / piezoelectric detection beam 114a connects the lever 113 and the detection beam anchor 115a, the piezoresistive / piezoelectric detection beam 114b connects the lever 113 and the detection beam anchor 115b, the flexible hinge 111A and the hinge anchor 112A are located on one side of the lever 113, the flexible hinge 111B, the hinge anchor 112B, the piezoresistive / piezoelectric detection beams 114a, 114b and the detection beam anchors 115a, 115b are all located on the other side of the lever 113, the piezoresistive / piezoelectric detection beams 114a, 114b are symmetrically distributed relative to the flexible hinge 111B, and a group of external decoupling mechanisms 130 are respectively connected to both ends of the lever 113.

[0042] Embodiment 4

[0043] The difference between this embodiment and the first embodiment is that the structure of the lever coupling detection mechanism is different. Figure 6As shown, the lever coupling detection mechanism 110 of this embodiment includes a lever 113, two sets of flexible hinges 111A, 111B, two hinge anchors 112A, 112B, four piezoresistive / piezoelectric detection beams 114a, 114b, 114c, 114d and four detection beam anchors 115a, 115b, 115c, 115d. The flexible hinge 111A is composed of two beams 111a, 111b, one end of the beams 111a, 111b is connected to the lever 113, and the other end is connected to the hinge anchor 112A. The flexible hinge 111B is composed of two beams 111c, 111d, one end of the beams 111c, 111d is connected to the lever 113, and the other end is connected to the hinge anchor 112B. The piezoresistive / piezoelectric detection beam 114a connects the lever 113 and the detection beam anchor 115a, the piezoresistive / piezoelectric detection beam 114b connects the lever 113 and the detection beam anchor 115b, the piezoresistive / piezoelectric detection beam 114c connects the lever 113 and the detection beam anchor 115c, the piezoresistive / piezoelectric detection beam 114d connects the lever 113 and the detection beam anchor 115d, the flexible hinge 111A, the hinge anchor 112A, the piezoresistive / piezoelectric detection beams 114a, 114b and the detection beam anchors 115a, 115d. 15b is located on one side of the lever 113, the flexible hinge 111B, the hinge anchor point 112B, the piezoresistive / piezoelectric detection beams 114c, 114d and the detection beam anchor points 115c, 115d are all located on the other side of the lever 113, the piezoresistive / piezoelectric detection beams 114a, 114b are symmetrically distributed relative to the flexible hinge 111A, the piezoresistive / piezoelectric detection beams 114c, 114d are symmetrically distributed relative to the flexible hinge 111B, and a group of external decoupling mechanisms 130 are respectively connected to both ends of the lever 113.

[0044] Embodiment 5

[0045] The difference between this embodiment and the first embodiment is that the structure of the lever coupling detection mechanism is different. Figure 7As shown, the lever coupling detection mechanism 110 of the present embodiment includes a lever 113, a group of flexible hinges 111, a hinge anchor point 112, four piezoresistive / piezoelectric detection beams 114a, 114b, 114c, 114d and four detection beam anchor points 115a, 115b, 115c, 115d, wherein the middle portion of the lever 113 has a "mouth"-shaped structure, the hinge anchor point 112 is located at the center of the "mouth"-shaped structure, the flexible hinge 111 is composed of four beams 111a, 111b, 111c, 111d, one end of the beams 111a, 111b, 111c, 111d is connected to the hinge anchor point 112, and the other end is respectively connected to the four sides of the "mouth"-shaped structure, wherein the beams 111a and 111c are parallel to the lever, the beams 111b and 111d are perpendicular to the lever, and the piezoresistive / piezoelectric detection beams 114a, 114b, 114c, 114d are parallel to the lever, and ... piezoresistive / piezoelectric detection beams 114a, 114b, 114c, 114d are perpendicular to the lever, and the piezoresistive / piezoelectric detection beams 114a, 114b, 114c, 114d are parallel to the lever, and the piezoresistive / piezoelectric detection beams The piezoelectric detection beam 114a connects the lever 113 and the detection beam anchor point 115a, the piezoresistive / piezoelectric detection beam 114b connects the lever 113 and the detection beam anchor point 115b, the piezoresistive / piezoelectric detection beam 114c connects the lever 113 and the detection beam anchor point 115c, and the piezoresistive / piezoelectric detection beam 114d connects the lever 113 and the detection beam anchor point 115d. The piezoresistive / piezoelectric detection beams 114a, 114b and the detection beam anchor points 115a, 115b are located on one side of the lever 113, and the piezoresistive / piezoelectric detection beams 114c, 114d and the detection beam anchor points 115c, 115d are all located on the other side of the lever 113. The piezoresistive / piezoelectric detection beams 114a, 114b, 114c, and 114d are symmetrically distributed relative to the flexible hinge 111, and a group of external decoupling mechanisms 130 are respectively connected to both ends of the lever 113.

[0046] Embodiment 6

[0047] The difference between this embodiment and the first embodiment is that the structure of the lever coupling detection mechanism is different. Figure 8As shown in the figure, the lever coupling detection mechanism 110 of this embodiment includes a lever 113, a group of flexible hinges 111, four hinge anchor points 112A, 112B, 112C, 112D, four piezoresistive / piezoelectric detection beams 114a, 114b, 114c, 114d, and four detection beam anchor points 115a, 115b, 115c, 115d. The middle part of the lever 113 has a structure shaped like the Chinese character "mu" (目). The hinge anchor points 112A and 112B are located in the middle grid of the "mu"-shaped structure. The hinge anchor point 112C is located in the left grid of the "mu"-shaped structure. The hinge anchor point 112D is located in the right grid of the "mu"-shaped structure. The flexible hinge 111 is composed of four beams 111a, 111b, 111c, 111d. Among them, the beams 111a and 111b are perpendicular to the lever, and the beams 111c and 111d are parallel to the lever. One end of the beam 111a is connected to the hinge anchor point 112A, and the other end is connected to the bottom edge of the "mu"-shaped structure. One end of the beam 111b is connected to the hinge anchor point 112B, and the other end is connected to the top edge of the "mu"-shaped structure. One end of the beam 111c is connected to the hinge anchor point 112C, and the other end is connected to the left side edge of the "mu"-shaped structure. One end of the beam 111d is connected to the hinge anchor point 112D, and the other end is connected to the right side edge of the "mu"-shaped structure. The piezoresistive / piezoelectric detection beam 114a connects the lever 113 and the detection beam anchor point 115a. The piezoresistive / piezoelectric detection beam 114b connects the lever 113 and the detection beam anchor point 115b. The piezoresistive / piezoelectric detection beam 114c connects the lever 113 and the detection beam anchor point 115c. The piezoresistive / piezoelectric detection beam 114d connects the lever 113 and the detection beam anchor point 115d. The beam 111a, the hinge anchor point 112A, the piezoresistive / piezoelectric detection beams 114a, 114b, and the detection beam anchor points 115a, 115b are located on one side of the lever 113. The beam 111b, the hinge anchor point 112B, the piezoresistive / piezoelectric detection beams 114c, 114d, and the detection beam anchor points 115c, 115d are all located on the other side of the lever 113. The piezoresistive / piezoelectric detection beams 114a, 114b, 114c, 114d are symmetrically distributed with respect to the flexible hinge 111. The two ends of the lever 113 are respectively connected to a group of external decoupling mechanisms 130.

[0048] The above is only the best implementation mode of the present invention. It should be pointed out that for those of ordinary skill in the art, without departing from the principle of the present invention, several deformations or equivalent replacements can be made to the technical solution of the present invention, and the same technical effects can also be achieved, which should also be regarded as belonging to the protection scope of the present invention.

Claims

1. A micromechanical gyroscope using piezoresistive / piezoelectric detection, characterized in that: It includes four groups of lever coupling detection mechanisms, four groups of detection mass blocks, eight groups of external decoupling mechanisms, eight groups of internal decoupling mechanisms, four groups of rhombus coupling mechanisms and sixteen groups of driving capacitors; wherein each group of lever coupling detection mechanisms, detection mass blocks, external decoupling mechanisms, internal decoupling mechanisms, rhombus coupling mechanisms and driving capacitors are symmetrically distributed relative to the center line of the gyroscope, and each mechanism and driving capacitor are fixed through their own anchor points; The lever coupling detection mechanism comprises a lever, a flexible hinge, a hinge anchor point, a piezoresistive / piezoelectric detection beam and a detection beam anchor point, wherein the flexible hinge connects the lever and the hinge anchor point, the piezoresistive / piezoelectric detection beam connects the lever and the detection beam anchor point, and both ends of the lever are connected to a set of external decoupling mechanisms; The external decoupling mechanism is located outside the detection mass block, and includes an external decoupling frame, a first external decoupling folding beam, a second external decoupling folding beam, a third external decoupling folding beam and an external decoupling anchor point, the first external decoupling folding beam connects the external decoupling frame and the detection mass block, the second external decoupling folding beam connects the external decoupling anchor point and the external decoupling frame, and the third external decoupling folding beam connects the external decoupling frame and the lever; The inner decoupling mechanism is located between every two adjacent detection mass blocks, and the inner decoupling mechanism includes an inner decoupling frame, a first inner decoupling folding beam, a second inner decoupling folding beam and an inner decoupling anchor point, the inner decoupling frame is connected to the diamond coupling mechanism, the first inner decoupling folding beam connects the inner decoupling anchor point and the inner decoupling frame, and the second inner decoupling folding beam connects the inner decoupling frame and the detection mass block; The diamond coupling mechanism comprises a diamond coupling anchor point, a bending beam and a diamond mechanism, the bending beam connects the diamond coupling anchor point and the diamond mechanism, and the diamond mechanism is connected to the inner decoupling frame; The driving capacitor comprises movable comb teeth, fixed comb teeth and comb tooth anchor points, the fixed comb teeth are fixed by the comb tooth anchor points, and the movable comb teeth are connected to the external decoupling frame.

2. The micromechanical gyroscope using piezoresistive / piezoelectric detection according to claim 1, characterized in that: The flexible hinge is composed of at least two beams, one end of which is connected to a lever and the other end is connected to a hinge anchor point; there are at least two piezoresistive / piezoelectric detection beams, and the at least two piezoresistive / piezoelectric detection beams are symmetrically distributed relative to the flexible hinge.

3. The micromechanical gyroscope using piezoresistive / piezoelectric detection according to claim 1 or 2, characterized in that: The characteristic size of the piezoresistive / piezoelectric detection beam is 10 -9 ~10 -6 m.

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