Semiconductor process equipment and leakage detection device thereof

Abstract

The present invention provides a semiconductor process equipment and a liquid leakage detection device thereof, wherein the liquid leakage detection device comprises: a liquid receiving part, which is used to receive leakage, and the liquid receiving part has a liquid discharge port; a liquid discharge control part, which cooperates with the liquid discharge port, and the liquid discharge control part can close the liquid discharge port to put the liquid receiving part in a liquid leakage receiving state, and can open the liquid discharge port to put the liquid receiving part in a liquid leakage discharge state; a first liquid leakage detection part, which cooperates with the liquid receiving part and is used to detect whether the accumulated leakage amount of the leakage reaches a preset threshold when the liquid receiving part is in the liquid leakage receiving state; a controller, which is communicatively connected with the liquid discharge control part and the first liquid leakage detection part, and when the first liquid leakage detection part detects that the leakage amount reaches the preset threshold, the controller can switch the liquid receiving part to the leakage discharge state through the liquid discharge control part to discharge the accumulated leakage, that is, to realize automatic controlled discharge of the leakage, thereby effectively avoiding the situation where excessive leakage in the liquid receiving part causes overflow, thereby eliminating safety hazards.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing technology, and in particular to a semiconductor process equipment and a liquid leakage detection device thereof. Background Art

[0002] With the continuous development of the semiconductor industry, the market demand for semiconductor process equipment is growing. However, due to factors such as equipment aging and structural design flaws, there are often safety risks. Once a safety incident occurs, it can cause significant losses. Therefore, the safety of semiconductor process equipment has become a key indicator for evaluating the quality of equipment.

[0003] Many processes performed using semiconductor processing equipment require high temperatures, resulting in high temperatures inside the equipment's reaction chambers. Due to effects such as heat conduction and radiation, components outside the reaction chamber (such as seals) are also exposed to high temperatures, which can severely impact component lifespan. Therefore, the reaction chamber needs to be cooled while the process is ongoing, and this is typically achieved using a coolant. The inclusion of a coolant in the equipment necessitates consideration of coolant leak detection.

[0004] like Figures 1 to 3 As shown, the existing liquid leakage detection device includes a liquid leakage receiving tray 1, screws 2, gaskets 3, a liquid leakage detection tape 4, and an alarm device 5. The liquid leakage receiving tray 1 is a rectangular tray formed by bending and welding stainless steel. The bottom wall of the rectangular tray, which is used to receive leaked liquid, is flat. Each side wall of the rectangular tray is provided with an inwardly bent plate 6. The liquid leakage detection tape 4 is arranged along the four edges of the liquid leakage receiving tray 1 and is fixed by the bent plate 6. When the liquid leakage detection tape 4 comes into contact with liquid, its resistance value changes, thereby detecting the liquid leakage. One end of the liquid leakage detection tape 4 is connected to the alarm device 5.

[0005] like Figure 4 As shown, the leak detection device is installed below the pipe joint 7 of the liquid pipeline to be leak-detected. The leak detection device's leak receiving tray 1 is secured to the machine's bracket 8 via screws 2 and gaskets 3. Gaskets 3 seal the gap between screws 2 and the leak receiving tray 1. When a leak occurs at the pipe joint 7 of the liquid pipeline, the liquid drips into the leak receiving tray 1 below. When the leaked liquid contacts the leak detection strip 4, its resistance changes, triggering the alarm device 5. This generates a leak alarm, facilitating prompt action by staff.

[0006] In the aforementioned liquid leakage detection device, leaked liquid dripping onto the liquid collecting tray 1 is stored therein and can only be cleaned manually. Furthermore, if a large amount of liquid leaks from the liquid pipeline or the amount of liquid stored in the liquid collecting tray 1 is too large, and the carrying capacity of the liquid collecting tray 1 cannot meet the requirements, the leaked liquid will overflow, posing a significant safety hazard. Summary of the Invention

[0007] The present invention aims to solve at least one of the technical problems existing in the prior art, and proposes a semiconductor process equipment and a liquid leakage detection device thereof.

[0008] In a first aspect, the present invention provides a liquid leakage detection device for semiconductor process equipment, comprising: a liquid receiving part for receiving leakage, the liquid receiving part having a liquid discharge port; a liquid discharge control part cooperating with the liquid discharge port, the liquid discharge control part being able to close the liquid discharge port so that the liquid receiving part is in a liquid leakage receiving state, and being able to open the liquid discharge port so that the liquid receiving part is in a liquid leakage discharge state; a first liquid leakage detection part cooperating with the liquid receiving part, and being used to detect whether the accumulated leakage amount of the liquid reaches a preset threshold when the liquid receiving part is in the liquid leakage receiving state; a controller being communicatively connected with the liquid discharge control part and the first liquid leakage detection part, and when the first liquid leakage detection part detects that the leakage amount reaches the preset threshold, the controller can switch the liquid receiving part to the liquid leakage discharge state through the liquid discharge control part to discharge the accumulated leakage.

[0009] Furthermore, the discharge control unit includes: a discharge pipe, which is connected to the discharge port; a valve, which is arranged on the discharge pipe and is communicatively connected to the controller. The controller can control the on-off of the discharge pipe through the valve to close or open the discharge port.

[0010] Furthermore, the first leakage detection portion is arranged on the upper surface of the liquid receiving portion and extends at least one circle along the circumference of the liquid receiving portion. The first leakage detection portion surrounds and forms a leakage containment area, and the discharge port is located in the leakage containment area. The first leakage detection portion determines whether the leakage amount reaches a preset threshold by whether the accumulated leakage in the leakage containment area contacts it.

[0011] Furthermore, the upper surface of the liquid receiving portion has a plurality of guide surfaces, which are sequentially connected along the circumference of the liquid discharge port, and each guide surface gradually decreases along the direction from the first liquid leakage detection portion to the liquid discharge port.

[0012] Furthermore, it also includes a second leakage detection unit, which is arranged in the leakage containment area and close to the drain outlet. The second leakage detection unit extends at least one circle around the drain outlet so that the leaked liquid can be guided along the guide surface to contact the second leakage detection unit, wherein the second leakage detection unit determines whether there is leakage by whether it is in contact with the leaked liquid.

[0013] Furthermore, the upper surface of the liquid receiving portion has a first platform surface, a plurality of guide surfaces surround the outer side of the first platform surface, the inner edge of each guide surface is connected to the first platform surface, the drain port and the second leakage detection portion are located on the first platform surface; and / or, the upper surface of the liquid receiving portion has a second platform surface, the second platform surface extends around the circumference of the leakage accommodating area, the outer edge of each guide surface is connected to the second platform surface, and the first leakage detection portion is located on the second platform surface.

[0014] Furthermore, the liquid receiving part has a first mounting groove, at least part of the first liquid leakage detection part is embedded in the first mounting groove, and the width of the opening of the first mounting groove is smaller than the maximum radial dimension of the part of the first liquid leakage detection part embedded in the first mounting groove to prevent the first liquid leakage detection part from falling out; and / or, the liquid receiving part has a second mounting groove, at least part of the second liquid leakage detection part is embedded in the second mounting groove, and the width of the opening of the second mounting groove is smaller than the maximum radial dimension of the part of the second liquid leakage detection part embedded in the second mounting groove to prevent the second liquid leakage detection part from falling out.

[0015] Furthermore, it also includes a connecting protrusion and a pipeline fixing part. The connecting protrusion is arranged in the leakage accommodating area, the connecting protrusion protrudes upward from the liquid receiving part or is flush with the top surface of the liquid receiving part, and the pipeline fixing part and the connecting protrusion are detachably connected. When the pipeline fixing part and the connecting protrusion are in a connected state, the pipeline fixing part and the connecting protrusion are used to fix the liquid pipeline located above the leakage detection device and requiring leakage detection.

[0016] Furthermore, it also includes a mounting and fixing portion, which is arranged on the liquid receiving portion and located outside the first liquid leakage detection portion, and is used to fix the liquid receiving portion to the external mounting body.

[0017] In a second aspect, the present invention further provides a semiconductor process equipment, comprising a liquid pipeline and a liquid leakage detection device arranged below the liquid pipeline, wherein the liquid leakage detection device is the above-mentioned liquid leakage detection device.

[0018] The present invention has the following beneficial effects:

[0019] The liquid leakage detection device provided by the present invention includes a liquid receiving part, a liquid discharge control part, a first liquid leakage detection part and a controller. The liquid discharge control part can close the liquid discharge port of the liquid receiving part to put the liquid receiving part in a liquid leakage containment state, and can open the liquid discharge port to put the liquid receiving part in a liquid leakage discharge state. The first liquid leakage detection part is used to detect whether the accumulated leakage amount of the liquid has reached a preset threshold when the liquid receiving part is in the liquid leakage containment state. The controller is communicatively connected with the liquid discharge control part and the first liquid leakage detection part. When the first liquid leakage detection part detects that the leakage amount has reached the preset threshold, the controller can switch the liquid receiving part to the liquid leakage discharge state through the liquid discharge control part to automatically discharge the accumulated leakage. In other words, the above structure can achieve automatic control of discharge when the accumulated leakage amount of the liquid receiving part reaches the preset threshold, thereby effectively avoiding the situation where excessive leakage in the liquid receiving part causes overflow, thereby eliminating safety hazards. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a schematic structural diagram of a liquid leakage detection device for semiconductor process equipment in the prior art;

[0021] Figure 2 for Figure 1 An enlarged schematic diagram of point A of the leakage detection device;

[0022] Figure 3 for Figure 1 A schematic structural diagram of a liquid leakage receiving tray of a liquid leakage detection device;

[0023] Figure 4 for Figure 1 Schematic diagram of the positional relationship between the liquid leakage detection device and the liquid pipeline and machine platform that need to be leak detected;

[0024] Figure 5 2 is a schematic structural diagram of a liquid leakage detection device for semiconductor process equipment according to an embodiment of the present invention;

[0025] Figure 6 for Figure 5 A schematic top view of a liquid leakage detection device;

[0026] Figure 7 for Figure 6 An enlarged schematic diagram of point B of the leakage detection device;

[0027] Figure 8 for Figure 5 A side view schematic diagram of a liquid leakage detection device;

[0028] Figure 9 for Figure 5 A schematic structural diagram of the liquid contact portion of a liquid leakage detection device;

[0029] Figure 10 for Figure 9 A schematic cross-sectional view of a liquid contact portion;

[0030] Figure 11 for Figure 10 An enlarged schematic diagram of the liquid contact part C;

[0031] Figure 12 for Figure 8 A partial cross-sectional schematic diagram of a liquid leakage detection device;

[0032] Figure 13 for Figure 12 An enlarged schematic diagram of point D of the leakage detection device. DETAILED DESCRIPTION

[0033] In order to enable those skilled in the art to better understand the technical solution of the present invention, the semiconductor process equipment and the liquid leakage detection device thereof provided by the present invention are described in detail below with reference to the accompanying drawings.

[0034] The present invention provides a liquid leakage detection device for semiconductor process equipment, which can be used to detect liquid leakage in semiconductor process equipment with a risk of leakage. The technology involved in the semiconductor process equipment is not limited.

[0035] In some embodiments, semiconductor processing equipment includes a liquid pipeline for introducing liquid into the equipment to perform a function. For example, the liquid pipeline is used to introduce coolant into a reaction chamber of the semiconductor processing equipment to cool the reaction chamber. A liquid leakage detection device can be used to detect liquid leaks in such liquid pipelines.

[0036] It should be noted that when a liquid leakage detection device is used to detect liquid leakage in a liquid pipeline, the leakage detection device needs to be installed below the portion of the liquid pipeline to be detected. The portion of the liquid pipeline to be detected is not limited and can be a pipe joint between two sections of the liquid pipeline, the wall of a section of the liquid pipeline, or the connection between the liquid pipeline and other devices (such as valves, pumps, liquid storage tanks, etc.).

[0037] like Figure 5 and Figure 6 As shown, in some embodiments, the liquid leakage detection device includes a liquid receiving portion 10, a liquid discharge control portion 20, a first liquid leakage detection portion 30, and a controller. The liquid receiving portion 10 is used to receive leaked liquid and has a liquid discharge port 11. Typically, the liquid receiving portion 10 is installed directly below the area to be detected. However, the liquid receiving portion 10 can also be installed to the side or below the area to be detected, provided that any leaked liquid dripping from the area to be detected can enter the liquid receiving portion 10.

[0038] The discharge control unit 20 cooperates with the discharge port 11. The discharge control unit 20 can close the discharge port 11 to place the liquid receiving unit 10 in a leak-receiving state. In this case, if a leak occurs at the part to be inspected, the leaked liquid is received by the liquid receiving unit 10 and accumulated and stored therein. The discharge control unit 20 can also open the discharge port 11 to place the liquid receiving unit 10 in a leak-discharging state. In this case, the leaked liquid received by the liquid receiving unit 10 is discharged through the discharge port 11, eliminating the need for manual cleaning of the leaked liquid in the liquid receiving unit 10.

[0039] The first leakage detection part 30 cooperates with the liquid receiving part 10. The first leakage detection part 30 is used to detect whether the accumulated leakage amount of the liquid has reached a preset threshold when the liquid receiving part 10 is in a leakage containing state. The controller is in communication connection with the liquid discharge control part 20 and the first leakage detection part 30. When the first leakage detection part 30 detects that the leakage amount has reached the preset threshold, the controller can switch the liquid receiving part 10 to the leakage discharge state through the liquid discharge control part 20 to automatically discharge the accumulated leakage. In other words, the above structure can realize automatic control of discharge when the accumulated leakage amount of the liquid receiving part 10 reaches the preset threshold, thereby effectively avoiding the situation where excessive leakage in the liquid receiving part 10 causes overflow, thereby eliminating safety hazards.

[0040] It should be noted that the "communication connection" can be an electrical connection through a signal transmission line, or a wireless communication connection through wireless WiFi, Bluetooth, etc. "Leakage volume" can include but is not limited to the weight of the leakage or the volume of the leakage. The "preset threshold" can be reasonably designed according to actual needs. For example, it can be designed according to the carrying capacity of the liquid receiving part 10 so that the preset threshold is less than or equal to the maximum carrying capacity of the liquid receiving part 10. Furthermore, the preset threshold can be designed as a certain proportion of the maximum carrying capacity of the liquid receiving part 10, such as one half, two thirds, etc. When the volume of the leakage is used as the leakage volume, the preset threshold is a volume value. At this time, it can be more intuitively understood that when the volume of the accumulated leakage in the liquid receiving part 10 accounts for a certain proportion of the total volume of the liquid receiving part 10, it can be considered that the leakage volume has reached the preset threshold.

[0041] The structure of the above-mentioned discharge control part 20 and the way of cooperating with the discharge port 11 are not limited, and can be any way of cooperating that can achieve the selective closing or opening of the discharge port 11. Figure 5 、 Figure 6 、 Figure 8 as well as Figure 12As shown, in some embodiments, the discharge control unit 20 includes a discharge pipe 21 and a valve 22. The discharge pipe 21 is connected to the discharge port 11. The valve 22 is disposed on the discharge pipe 21 and is in communication with the controller. The controller can control the valve 22 based on the detection results of the first leakage detection unit 30 to open or close the discharge pipe 21 through the valve 22, thereby closing or opening the discharge port 11.

[0042] When the controller controls valve 22 to close, drain pipe 21 is blocked, allowing leaked liquid received by liquid receiving portion 10 to accumulate and be stored there. When the controller controls valve 22 to open, drain pipe 21 is unblocked, allowing leaked liquid received by liquid receiving portion 10 to be smoothly discharged from liquid receiving portion 10 through drain port 11 and drain pipe 21. Drain pipe 21 can guide leaked liquid to a certain extent. By properly designing the direction of drain pipe 21, leaked liquid can be discharged along drain pipe 21 to a designated area capable of receiving the leaked liquid.

[0043] It should be noted that the specific type of valve 22 is not limited and can be any valve device that can communicate with the controller and realize the opening and closing of the drainage pipe 21 under the control of the controller, such as a solenoid valve, an electric valve, a pneumatic valve, etc. In the specific embodiment shown in the figure, the valve 22 is a solenoid valve, and the drainage pipe 21 includes a first drainage pipe section and a second drainage pipe section. The first end of the first drainage pipe section is connected to the drainage port 11 from the bottom of the liquid receiving portion 10, and the first drainage pipe section is bent to the side of the liquid receiving portion 10. The second end of the first drainage pipe section is connected to the inlet of the solenoid valve located on the side of the liquid receiving portion 10 via a first ferrule joint. One end of the second drainage pipe section is connected to the outlet of the solenoid valve via a second ferrule joint, and the other end can extend to a designated area for receiving leaked liquid.

[0044] Of course, it is understandable that the specific structure of the drain control unit 20 is not limited to this. In other embodiments not shown in the figures, the drain control unit 20 may also have other structures. For example, the drain control unit 20 may include a closure member and a leakage collection container. The closure member is movably or rotatably disposed below the liquid receiving portion 10, so that the closure member has a closed position located directly below the drain port 11 and closes the drain port 11, and an open position moved to the side of the drain port 11, thereby achieving the closure and opening of the drain port 11. The leakage collection container is located below the drain port 11. When the closure member is in the open position, the leaked liquid in the liquid receiving portion 10 flows downward through the drain port 11 into the leakage collection container for collection. After the collection is completed, the leakage collection container is cleaned, transported, and other operations are performed.

[0045] The manner in which the first leakage detection unit 30 cooperates with the liquid receiving portion 10 and the manner in which detection is performed are not limited and may be any manner that can detect whether the accumulated leakage in the liquid receiving portion 10 has reached a preset threshold.

[0046] like Figure 5 、 Figure 6 as well as Figure 8 As shown, in some embodiments, the first liquid leakage detection portion 30 is disposed on the upper surface of the liquid receiving portion 10 and extends at least one circle along the circumference of the liquid receiving portion 10. The first liquid leakage detection portion 30 surrounds the liquid leakage receiving area 12 (see FIG. Figure 6 The drain port 11 is located within the leakage containment area 12. The first leakage detector 30 determines whether the amount of leakage has reached a preset threshold by determining whether the accumulated leakage within the leakage containment area 12 has contacted the first leakage detector 30. Specifically, if the leakage has contacted the first leakage detector 30, the amount of leakage has reached the preset threshold; if the leakage has not contacted the first leakage detector 30, the amount of leakage has not reached the preset threshold.

[0047] Typically, during leakage detection, the liquid receiving portion 10 is in a leak containment state. When a leak occurs at the location to be detected, the leaked liquid first drips into the leak containment area 12 of the liquid receiving portion 10, where it accumulates and is stored. When the leaked liquid accumulates at the location of the first leak detection portion 30, it contacts the first leak detection portion 30. The first leak detection portion 30 then determines that the amount of leakage has reached a preset threshold, thereby sending a leak discharge signal to the controller. Upon receiving the leak discharge signal, the controller controls the discharge control portion 20 to switch the liquid receiving portion 10 to a leak discharge state (e.g., by controlling the valve 22 to open so that the drain pipe 21 is unobstructed, thereby opening the drain port 11) to automatically discharge the accumulated leaked liquid. Detection through contact between the first leak detection portion 30 and the leaked liquid is more convenient and intuitive. The fact that the first leak detection portion 30 extends at least one full circle around the circumference of the liquid receiving portion 10 ensures that leaked liquid within the leak containment area 12 can contact the first leak detection portion 30 in all directions, thereby improving detection reliability.

[0048] It should be noted that the preset threshold value of the leakage amount is related to factors such as the setting position of the first leakage detection part 30, the specific shape and size of the liquid receiving part 10, etc., so the required preset threshold value can be obtained by reasonably designing these factors. In addition, the first leakage detection part 30 can be any detection component that can be triggered when it comes into contact with liquid. For example, the first leakage detection part 30 includes a leakage detection belt, which includes a permeable layer that is permeable to liquid and a sensing component arranged inside the permeable layer. The leaked liquid penetrates into the sensing component through the permeable layer and interacts with the sensing component, thereby changing the resistance value of the leakage detection belt. The resistance value change signal serves as the above-mentioned leakage discharge signal. Among them, the permeable layer can be made of a permeable material such as nylon, and the sensing component can include multiple sensing core wires. The multiple sensing core wires can be made of special materials and / or special connection methods, so that their resistance values ​​will change when they encounter liquid. Since the leakage detection belt is a relatively mature technology, it will not be described in detail here.

[0049] Of course, it is understood that in other embodiments, other forms of first leakage detection unit 30 may be used to detect whether the leakage amount has reached a preset threshold. For example, the first leakage detection unit 30 may include a weight sensor disposed below the liquid receiving portion 10. The weight sensor weighs the liquid receiving portion 10 and the accumulated leaked liquid therein, calculates the accumulated weight of the leaked liquid (i.e., the leakage amount), and compares the weight with a preset threshold to achieve detection.

[0050] like Figure 5 、 Figure 6 、 Figure 9 、 Figure 10 as well as Figure 12 As shown, in some embodiments, the upper surface of the liquid receiving portion 10 has a plurality of guide surfaces 13. The plurality of guide surfaces 13 are connected in sequence along the circumference of the drain port 11. At this time, the drain port 11 is surrounded by the plurality of guide surfaces 13 in the middle of the plurality of guide surfaces 13 as a whole. In other words, the plurality of guide surfaces 13 are connected to form a guide portion that is roughly in the shape of a closed ring. The drain port 11 is located in the middle of the guide portion, and there are guide surfaces 13 in all directions outside the drain port 11. Each guide surface 13 gradually lowers in the direction from the first leakage detection portion 30 to the drain port 11, so that the leaked liquid dripping on each guide surface 13 can flow smoothly to the drain port 11, thereby effectively guiding the leaked liquid.

[0051] Specifically, in the specific embodiment shown in the figure, there are four guide surfaces 13, each of which is an inclined plane. The size, shape, inclination, etc. of the four guide surfaces 13 are the same. The four guide surfaces 13 are respectively located in the front, rear, left, and right directions of the discharge port 11, and two adjacent guide surfaces 13 are interconnected. Preferably, the angle between two opposing guide surfaces 13 is 175 degrees. Of course, the number, structure, and arrangement of the guide surfaces 13 are not limited thereto. In other embodiments not shown in the figure, the number of guide surfaces 13 can be reasonably designed according to actual conditions, for example, three, six, eight, etc.; the guide surface 13 can also be an arc-shaped inclined surface; the size, shape, inclination, etc. of the multiple guide surfaces 13 can also be different.

[0052] Since the existing leakage detection device (see Figure 1 and Figure 4 ) is provided along the four edges of the liquid leakage receiving tray 1. When a leak occurs, the leaked liquid generally drips directly onto the center of the liquid leakage receiving tray 1. At this time, the leaked liquid does not come into contact with the leak detection strip 4. Only when the leaked liquid accumulates to a certain level will it come into contact with the leak detection strip 4 and trigger the alarm device 5. Therefore, existing leak detection devices cannot detect leaks in a timely manner, and the detection timeliness is poor.

[0053] like Figures 5 to 8 As shown, in some embodiments, the liquid leakage detection device further includes a second liquid leakage detection portion 40. The second liquid leakage detection portion 40 is used to detect whether there is liquid leakage in the liquid receiving portion 10. Specifically, the presence of liquid leakage is determined by whether the second liquid leakage detection portion 40 contacts the leaked liquid. The second liquid leakage detection portion 40 is disposed within the liquid leakage receiving area 12 and near the liquid discharge port 11. The second liquid leakage detection portion 40 extends at least one circle around the liquid discharge port 11.

[0054] On the premise that the second leakage detection portion 40 is close to the drain port 11, since multiple guide surfaces 13 are arranged along the circumference of the drain port 11, the positional relationship among the drain port 11, the second leakage detection portion 40 and the guide surfaces 13 is generally divided into the following three types: the guide surfaces 13 and the drain port 11 are spaced apart, and the second leakage detection portion 40 is located between the guide surfaces 13 and the drain port 11; or, the guide surfaces 13 and the drain port 11 are spaced apart, and the second leakage detection portion 40 is located on the guide surfaces 13; or, both the drain port 11 and the second leakage detection portion 40 are located on the guide surfaces 13. Regardless of which of the above arrangements is adopted between the drain port 11, the second leakage detection portion 40, and the guide surface 13, it can be ensured that the second leakage detection portion 40 is located on the inner side of the outer edge of the guide surface 13. By rationally designing the position of the second leakage detection portion 40, most of the leaked liquid dripping onto the guide surface 13 can be guided along the guide surface 13 to the position of the second leakage detection portion 40 and contact the second leakage detection portion 40, thereby timely detecting the leakage and improving the timeliness of the detection.

[0055] It is more convenient and intuitive to detect by having the second leakage detection part 40 contact the leakage. The second leakage detection part 40 extends at least one circle around the drain outlet 11 to ensure that the leakage diverted from each guide surface 13 can contact the second leakage detection part 40, thereby improving the reliability of the detection. In addition, the second leakage detection part 40 can be any detection component that can be triggered when in contact with liquid, for example, the second leakage detection part 40 includes a leakage detection belt. Among them, the specific structure and working principle of the leakage detection belt have been described in detail in the above content and will not be repeated here. It should be noted that in order to ensure the leakage detection effect, the second leakage detection part 40 should be as close to the drain outlet 11 as possible, so that the area of ​​the multiple guide surfaces 13 outside the second leakage detection part 40 is as large as possible, so that most of the leakage can fall on the guide surface 13 outside the second leakage detection part 40 to be diverted to the second leakage detection part 40.

[0056] Furthermore, if Figure 5 、 Figure 6 as well as Figure 8As shown, in some embodiments, the leakage detection device also includes an alarm prompt unit 50, which is in communication with the second leakage detection unit 40 to alarm when the second leakage detection unit 40 detects leakage. Specifically, when a leak occurs in the part to be detected, the leaked liquid drips onto the guide surface 13 and flows along the guide surface 13 until it contacts the second leakage detection unit 40. The second leakage detection unit 40 sends a leakage alarm signal to the alarm prompt unit 50 (for example, the second leakage detection unit 40 includes a leakage detection belt, and the resistance value of the leakage detection belt in contact with the leakage changes, and the resistance value change signal serves as a leakage alarm signal). After receiving the leakage alarm signal, the alarm prompt unit 50 issues an alarm by emitting an alarm sound, emitting an alarm light, or displaying an alarm prompt icon on the display screen, so that the staff can quickly handle it. For example, the staff can first quickly close the water valves of the machine's main inlet and return water; secondly, the leaking part of the liquid pipeline is promptly wrapped to prevent continuous leakage; and finally, the cause of the leakage problem is investigated.

[0057] It should be noted that the alarm prompt unit 50 generally includes an alarm execution component and a controller. The alarm execution component may be a sound-generating component, a light-emitting component, a display component, etc. The controller is in communication with the alarm execution component and the second leakage detection unit 40. The second leakage detection unit 40 sends a leakage alarm signal to the controller. Upon receiving the leakage alarm signal, the controller controls the alarm execution component to issue an alarm. The controller and the aforementioned controller for controlling the discharge control unit 20 may be the same or different.

[0058] Furthermore, the object in communication with the second liquid leakage detection unit 40 is not limited to the alarm prompt unit 50. That is, after the second liquid leakage detection unit 40 detects a liquid leak, the operation performed by the liquid leakage detection device may not be to issue an alarm. In other embodiments not shown in the figures, the second liquid leakage detection unit 40 may be in communication with a liquid source device that provides liquid to the part to be detected. When the second liquid leakage detection unit 40 detects a liquid leak, it sends a pause signal to the liquid source device, which cuts off the liquid supply upon receiving the pause signal. Alternatively, the second liquid leakage detection unit 40 may be in communication with a power supply device of the entire device that includes the part to be detected. When the second liquid leakage detection unit 40 detects a liquid leak, it sends a shutdown signal to the power supply device, which shuts down upon receiving the shutdown signal, thereby shutting down the entire device.

[0059] like Figures 5 to 7 、 Figure 9 、 Figure 10 as well as Figure 12As shown, in some embodiments, the upper surface of the liquid receiving portion 10 has a first platform 14. Multiple guide surfaces 13 surround the outer side of the first platform 14, with the inner edge of each guide surface 13 connected to the first platform 14. The drain port 11 and the second leakage detection portion 40 are located on the first platform 14. Because each guide surface 13 gradually descends from its outer edge to its inner edge, the first platform 14 forms a depression within each guide surface 13. Leaked liquid dripping onto each guide surface 13 is directed to the first platform 14. Because the first platform 14 lacks a slope, the flow rate of the leaked liquid is reduced as it flows onto the first platform 14. This allows the leaked liquid to fully contact the second leakage detection portion 40 disposed on the first platform 14, thereby preventing the leaked liquid from flowing too quickly and not having sufficient time to contact the second leakage detection portion 40. This ensures detection sensitivity and accuracy.

[0060] It should be noted that, in some other embodiments not shown in the figures, the first platform surface 14 may not be provided on the inner side of the multiple guide surfaces 13, each guide surface 13 is roughly triangular, and the inner edges of the multiple guide surfaces 13 converge at one point, that is, the multiple guide surfaces 13 form a pyramid shape in this case, and the drain port 11 can be opened at the position where the inner edges of the multiple guide surfaces 13 intersect, and the second leakage detection part 40 is provided on the multiple guide surfaces 13 near the drain port 11.

[0061] like Figure 5 、 Figure 6 、 Figure 9 、 Figure 10 as well as Figure 12 As shown, in some embodiments, the upper surface of the liquid receiving portion 10 has a second platform 15, which extends continuously along the circumference of the leakage containment area 12. The outer edge of each guide surface 13 is connected to the second platform 15. The first leakage detection portion 30 is located on the second platform 15. Because each guide surface 13 gradually rises from its inner edge to its outer edge, the second platform 15 corresponds to the highest point of each guide surface 13. When the level of the leaked liquid accumulated on the liquid receiving portion 10 rises to the outer edge of the guide surface 13, the leaked liquid will quickly enter the second platform 15 at this point because the flat surface has less resistance to the rising of the leaked liquid than the inclined surface. The leaked liquid will then contact the first leakage detection portion 30 on the second platform 15, thereby improving the timeliness of the leak detection.

[0062] It should be noted that, in some other embodiments not shown in the figures, the second platform surface 15 may not be provided on the outer sides of the multiple guide surfaces 13, and the outer edge of each guide surface 13 directly extends to the edge of the liquid receiving portion 10, and the first liquid leakage detection portion 30 is provided on the multiple guide surfaces 13.

[0063] Existing leakage detection device (see Figure 1 、 Figure 3 as well as Figure 4 The liquid leakage detection tape 4 is fixed by the bent plate 6 on the liquid leakage receiving tray 1. However, this method has poor fixation. If the liquid leakage detection device or the entire equipment equipped with the liquid leakage detection device is bumpy during transportation, the liquid leakage detection tape 4 is likely to fall off the bent plate 6.

[0064] like Figures 5 to 7 as well as Figures 9 to 13 As shown, in some embodiments, the liquid receiving portion 10 has a first mounting groove 16. At least a portion of the first liquid leakage detection portion 30 is embedded in the first mounting groove 16, and the width of the opening of the first mounting groove 16 is smaller than the maximum radial dimension of the portion of the first liquid leakage detection portion 30 embedded in the first mounting groove 16, thereby preventing the first liquid leakage detection portion 30 from escaping from the first mounting groove 16. Typically, when the first liquid leakage detection portion 30 is inserted into the first mounting groove 16 through the opening, it is squeezed and slightly deformed, allowing it to be smoothly embedded in the first mounting groove 16. After the first liquid leakage detection portion 30 is embedded in the first mounting groove 16, its deformed portion will recover to a certain extent. At this time, as long as the maximum radial dimension of the portion of the first liquid leakage detection portion 30 located in the first mounting groove 16 is greater than the opening width of the first mounting groove 16, the first liquid leakage detection portion 30 can be prevented from escaping.

[0065] Preferably, the cross-section of the first liquid leakage detector 30 is circular or elliptical. The side walls of the first mounting groove 16 are inclined, and the two inclinations are opposite to each other, so that the width of the first mounting groove 16 gradually decreases from bottom to top. This can also be understood as the first mounting groove 16 being a dovetail groove. When the first liquid leakage detector 30 is inserted into the first mounting groove 16, the side walls of the first mounting groove 16 are tangent to the curved outer surface of the first liquid leakage detector 30, and the tangent point is located above the centerline of the first liquid leakage detector 30.

[0066] Similarly, in some embodiments, the liquid receiving portion 10 has a second mounting groove 17. At least a portion of the second liquid leakage detection portion 40 is embedded in the second mounting groove 17, and the width of the opening of the second mounting groove 17 is smaller than the maximum radial dimension of the portion of the second liquid leakage detection portion 40 embedded in the second mounting groove 17, thereby preventing the second liquid leakage detection portion 40 from escaping from the second mounting groove 17. Typically, when the second liquid leakage detection portion 40 is inserted through the opening of the second mounting groove 17, it is squeezed and slightly deformed, allowing it to be smoothly embedded in the second mounting groove 17. After the second liquid leakage detection portion 40 is embedded in the second mounting groove 17, its deformed portion recovers to a certain extent. At this point, as long as the maximum radial dimension of the portion of the second liquid leakage detection portion 40 located in the second mounting groove 17 is greater than the width of the opening of the second mounting groove 17, the second liquid leakage detection portion 40 can be prevented from escaping.

[0067] Preferably, the cross-section of the second liquid leakage detector 40 is circular or elliptical. The side walls of the second mounting groove 17 are inclined, and the two inclinations are opposite to each other, so that the width of the second mounting groove 17 gradually decreases from bottom to top. This can also be understood as the second mounting groove 17 being a dovetail groove. When the second liquid leakage detector 40 is inserted into the second mounting groove 17, the side walls of the second mounting groove 17 are tangent to the curved outer surface of the second liquid leakage detector 40, and the tangent point is located above the centerline of the second liquid leakage detector 40.

[0068] It should be noted that the arrangement of the first installation groove 16 and the second installation groove 17 should be designed according to the winding arrangement of the first liquid leakage detection part 30 and the second liquid leakage detection part 40 respectively. Figures 5 to 7 3 shows a simplified winding direction of the first liquid leakage detector 30 and the second liquid leakage detector 40 , and the relationship between the first installation groove 16 and the first liquid leakage detector 30 and the relationship between the second installation groove 17 and the second liquid leakage detector 40 will be described using this as an example.

[0069] Both the first leakage detection part 30 and the second leakage detection part 40 are flexible and can be bent at will within a reasonable range. The first mounting groove 16 is a rectangular shape that surrounds one circle, and the second mounting groove 17 is a circular ring shape that surrounds one circle. When assembling the first leakage detection part 30, its starting end is first inserted into the first mounting groove 16, and then the first leakage detection part 30 is inserted into the first mounting groove 16 along the shape of the first mounting groove 16 until the first leakage detection part 30 contacts its starting end, thereby completing one circle of winding. Similarly, when assembling the second leakage detection part 40, its starting end is first inserted into the second mounting groove 17, and then the second leakage detection part 40 is inserted into the first mounting groove 16 along the shape of the second mounting groove 17 until the second leakage detection part 40 contacts its starting end, thereby completing one circle of winding.

[0070] It should be noted that in other embodiments not shown in the figures, the first leakage detection part 30 and / or the second leakage detection part 40 can also be wound twice or more, and the specific number of windings can be reasonably designed according to needs.

[0071] like Figure 5 、 Figure 6 、 Figures 8 to 10 As shown, in some embodiments, the leakage detection device further includes a connecting protrusion 60 and a pipeline fixing portion (not shown in the figure). The connecting protrusion 60 is arranged in the leakage accommodating area 12 and protrudes upward from the liquid receiving portion 10 or is flush with the top surface of the liquid receiving portion 10. The pipeline fixing portion and the connecting protrusion 60 are detachably connected. When the pipeline fixing portion and the connecting protrusion 60 are in a connected state, the pipeline fixing portion and the connecting protrusion 60 are used to fix the liquid pipeline (i.e., the part to be detected) located above the leakage detection device and requiring leakage detection, thereby fixing the relative position of the liquid pipeline requiring leakage detection and the leakage detection device to prevent displacement between the two, thereby ensuring that when the liquid pipeline leaks, the leaked liquid can more accurately drip into the leakage accommodating area 12 of the liquid receiving portion 10, and can even ensure that the leaked liquid accurately drips onto the part of the guide surface 13 in the leakage accommodating area 12 located outside the second leakage detection portion 40. Among them, the connecting protrusion 60 protrudes from the liquid receiving part 10 or is flush with the top surface of the liquid receiving part 10 (that is, the top surface height of the connecting protrusion 60 is greater than or equal to the top surface of the liquid receiving part 10) can prevent the leakage received in the liquid receiving part 10 from affecting the connection between the connecting protrusion 60 and the pipeline fixing part.

[0072] It should be noted that the specific structure and connection method of the connecting protrusion 60 and the pipeline fixing portion are not limited and can be any form that can achieve the fixation of the liquid pipeline. For example, in the specific embodiment shown in the figure, the connecting protrusion 60 is respectively arranged in front, rear, left and right of the discharge port 11, and each connecting protrusion 60 is located on a guide surface 13. Each connecting protrusion 60 has a threaded hole, and the pipeline fixing portion has a threaded connection end, which is inserted into the threaded hole for threaded connection to achieve the connection between the pipeline fixing portion and the connecting protrusion 60. The pipeline fixing portion and the liquid pipeline can be matched in various ways. For example, the pipeline fixing portion can be strip-shaped, with threaded connection ends at both ends of the pipeline fixing portion, and the two threaded connection ends are respectively connected to two opposite connecting protrusions 60, and the top of the liquid pipeline is pressed and fitted by the pipeline fixing portion; or the pipeline fixing portion can be ring-shaped, the pipeline fixing portion is sleeved on the liquid pipeline, and the pipeline fixing portion is connected to a connecting protrusion 60 via a threaded connection end, etc.

[0073] Existing leakage detection device (see Figure 2 and Figure 4The four corners of the liquid leakage receiving tray 1 are fixed to the machine platform using screws 2 and gaskets 3. The gaskets 3 are placed between the screws 2 and the liquid leakage receiving tray 1 and are made of rubber. Due to the risk of aging of rubber gaskets 3, if gaskets 3 age and liquid leaks accumulate in the liquid leakage receiving tray 1 at the gaskets 3, the liquid will leak out through the screws 2 and gaskets 3, posing a safety hazard.

[0074] like Figure 5 、 Figure 6 as well as Figure 9 As shown, in some embodiments, the liquid leakage detection device further includes a mounting and fixing portion 70, which is disposed on the liquid receiving portion 10 and is located outside the first liquid leakage detection portion 30. The mounting and fixing portion 70 is used to fix the liquid receiving portion 10 to an external mounting body. The specific structure of the "external mounting body" needs to be determined according to the scenario in which the liquid leakage detection device is used. For example, when the liquid leakage detection device is used to detect liquid leaks in the liquid pipeline of semiconductor process equipment, the external mounting body can be a rack of the semiconductor process equipment or a mounting bracket provided on the rack of the semiconductor process equipment.

[0075] Since the mounting and fixing portion 70 is located outside the first liquid leakage detection portion 30, the leaked liquid accumulated on the liquid receiving portion 10 will be discharged in time when it contacts the first liquid leakage detection portion 30. The leaked liquid will not reach the location of the mounting and fixing portion 70, and will not have any impact on the mounting and fixing portion 70. There is no risk of leaking from the mounting and fixing portion 70.

[0076] It should be noted that the specific structure of the mounting portion 70 is not limited and can be any structure that can secure the liquid-receiving portion 10 to the external mounting body. For example, the mounting portion 70 can include a through-hole formed in the liquid-receiving portion 10 and a fixing screw that passes through the through-hole and is threadedly connected to the external mounting body. In this case, a gasket may or may not be provided between the fixing screw and the liquid-receiving portion 10. If a gasket is provided between the fixing screw and the liquid-receiving portion 10, even if the gasket deteriorates, the risk of leakage will be eliminated because the leaked liquid will not reach the gasket.

[0077] The present invention also provides semiconductor processing equipment, comprising a liquid pipeline and a liquid leakage detection device disposed below the liquid pipeline. The liquid pipeline is used to introduce liquid into the equipment to achieve a certain function. For example, the liquid pipeline is used to introduce coolant into the reaction chamber of the semiconductor processing equipment to cool the reaction chamber. The liquid leakage detection device can be used to detect liquid leaks in the liquid pipeline. The liquid leakage detection device is the liquid leakage detection device described above.

[0078] It will be understood that the above embodiments are merely exemplary embodiments for illustrating the principles of the present invention, and the present invention is not limited thereto. Those skilled in the art will appreciate that various modifications and improvements can be made without departing from the spirit and substance of the present invention, and such modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A liquid leakage detection device for semiconductor process equipment, characterized in that: include: A liquid receiving portion, used for receiving leaked liquid, the liquid receiving portion having a liquid discharge port; a liquid discharge control portion, cooperating with the liquid discharge port, capable of closing the liquid discharge port to place the liquid receiving portion in a liquid leakage receiving state, and capable of opening the liquid discharge port to place the liquid receiving portion in a liquid leakage discharging state; a first liquid leakage detection portion, cooperating with the liquid receiving portion, for detecting whether the accumulated amount of liquid leakage reaches a preset threshold when the liquid receiving portion is in a liquid leakage receiving state; The first liquid leakage detection portion is disposed on the upper surface of the liquid contact portion and extends at least one circle along the circumference of the liquid contact portion. The first liquid leakage detection portion surrounds and forms a liquid leakage accommodating area, and the liquid discharge port is located in the liquid leakage accommodating area. a controller, communicatively connected to the liquid discharge control unit and the first liquid leakage detection unit, and capable of switching the liquid receiving unit to a liquid leakage discharge state through the liquid discharge control unit to discharge accumulated leaked liquid when the first liquid leakage detection unit detects that the amount of liquid leakage reaches the preset threshold; A second liquid leakage detection portion is provided in the liquid leakage accommodating area and close to the liquid discharge port.

2. The liquid leakage detection device according to claim 1, characterized in that: The liquid discharge control unit includes: a liquid discharge pipe, connected to the liquid discharge port; The valve is arranged on the drainage pipe and is communicatively connected with the controller. The controller can control the on-off of the drainage pipe through the valve to close or open the drainage port.

3. The liquid leakage detection device according to claim 1, characterized in that: The first liquid leakage detection unit determines whether the amount of the liquid leakage reaches the preset threshold value by determining whether the liquid leakage accumulated in the liquid leakage accommodating area contacts the first liquid leakage detection unit.

4. The liquid leakage detection device according to claim 3, characterized in that: The upper surface of the liquid receiving portion has a plurality of guide surfaces, which are sequentially connected along the circumference of the liquid discharge port, and each of the guide surfaces gradually decreases along the direction from the first liquid leakage detection portion to the liquid discharge port.

5. The liquid leakage detection device according to claim 4, characterized in that: The second liquid leakage detection portion extends around the drain port for at least one circle so that the leaked liquid can be guided along the guide surface to contact the second liquid leakage detection portion, wherein the second liquid leakage detection portion determines whether there is leakage by whether it contacts the leaked liquid.

6. The liquid leakage detection device according to claim 5, characterized in that: The upper surface of the liquid receiving portion has a first platform surface, a plurality of the guide surfaces surround the outer side of the first platform surface, the inner edge of each of the guide surfaces is connected to the first platform surface, and the liquid discharge port and the second liquid leakage detection portion are located on the first platform surface; and / or, The upper surface of the liquid receiving portion has a second platform surface, which extends along the circumference of the liquid leakage accommodating area. The outer edge of each of the guide surfaces is connected to the second platform surface, and the first liquid leakage detection portion is located on the second platform surface.

7. The liquid leakage detection device according to claim 5, characterized in that: The liquid receiving portion has a first mounting groove, at least a portion of the first liquid leakage detection portion is embedded in the first mounting groove, and a width of an opening of the first mounting groove is smaller than a maximum radial dimension of a portion of the first liquid leakage detection portion embedded in the first mounting groove to prevent the first liquid leakage detection portion from falling out; and / or, The liquid receiving portion has a second mounting groove, and at least a portion of the second liquid leakage detection portion is embedded in the second mounting groove. The width of the opening of the second mounting groove is smaller than the maximum radial dimension of the portion of the second liquid leakage detection portion embedded in the second mounting groove to prevent the second liquid leakage detection portion from falling out.

8. The liquid leakage detection device according to any one of claims 3 to 7, characterized in that: It also includes a connecting protrusion and a pipeline fixing portion, the connecting protrusion is arranged in the leakage accommodating area, the connecting protrusion protrudes upward from the liquid receiving portion or is flush with the top surface of the liquid receiving portion, and the pipeline fixing portion is detachably connected to the connecting protrusion. When the pipeline fixing portion and the connecting protrusion are in a connected state, the pipeline fixing portion and the connecting protrusion are used to fix the liquid pipeline located above the leakage detection device and requiring leakage detection.

9. The liquid leakage detection device according to any one of claims 3 to 7, characterized in that: The device further comprises a mounting and fixing portion, which is provided on the liquid contact portion and located outside the first liquid leakage detection portion, and is used to fix the liquid contact portion to an external mounting body.

10. A semiconductor process equipment, characterized in that: It comprises a liquid pipeline and a liquid leakage detection device arranged below the liquid pipeline, and the liquid leakage detection device is the liquid leakage detection device according to any one of claims 1 to 9.

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