A valve operation control valve group

Abstract

The present invention discloses a valve action control valve group, which includes a housing, a pneumatic control valve, a mechanical control valve, a speed control valve and a connection structure; the pneumatic control valve is connected to the mechanical control valve through the connection structure; the pneumatic control valve includes a first control valve, a second control valve, a third control valve and a fourth control valve; a main air hole and a branch air hole are provided on the housing, the main air hole includes a first main air hole and a second main air hole, and the first main air hole and the second main air hole are used to input or output gas into the pneumatic control valve; the speed control valve is used to adjust the gas flow rate inside the housing. In the present invention, by controlling the mechanical control valve A and the mechanical control valve B, the gas can quickly complete commutation, which facilitates the control of the vacuum valve, and integrates the mechanical control and the pneumatic control valve in the housing, reducing the overall volume of the control valve group, making the occupied space of the control valve group less and facilitating installation.

Description

Technical Field

[0001] The invention belongs to the technical field of valve control, and in particular relates to a valve action control valve group. Background Art

[0002] In the production process of wafers in the semiconductor and photovoltaic industries, the particles generated in the production environment and production equipment have a direct impact on the quality of the wafers. Therefore, the production process of wafers has extremely high requirements for the environment and equipment. In the production equipment of the semiconductor and photovoltaic industries, the transfer valve is a vacuum valve that connects the reaction chamber and the transfer chamber. There are strict requirements on the cleanliness of the valve itself and the particle size generated during the working movement. The vacuum valve is sealed by compressing the rubber ring to separate the cavities at both ends. When the rubber ring follows the L-MOTION motion trajectory, there is basically no friction between the rubber ring and the sealing surface of the vacuum valve, and the particle size generated during the valve movement is minimal.

[0003] In the prior art, in order to realize the L-MOTION motion trajectory of the rubber ring, multiple control valves need to be used to complete the air path control of the vacuum valve. This will cause the overall volume of the vacuum valve to become larger and the control will be inconvenient. Summary of the invention

[0004] The object of the present invention is to provide a valve action control valve group to solve the problem in the prior art mentioned in the background technology that using multiple groups of control valves to control the gas circuit will increase the volume of the vacuum valve and is inconvenient to control.

[0005] In order to solve the above technical problems, the technical solution adopted by the present invention is:

[0006] A valve action control valve group, comprising a housing, a pneumatic control valve, a mechanical control valve, a speed regulating valve and a connecting structure; wherein the pneumatic control valve and the connecting structure are arranged inside the housing, one end of the mechanical control valve is arranged inside the housing, and the other end extends to the outside of the housing; the pneumatic control valve is connected to the mechanical control valve through the connecting structure; the pneumatic control valve comprises a first control valve, a second control valve, a third control valve and a fourth control valve; the mechanical control valve comprises a mechanical control valve A and a mechanical control valve B;

[0007] The shell is provided with a main air hole and a sub-air hole, the main air hole is connected to the pneumatic control valve and the mechanical control valve respectively through a connecting structure, and the main air hole includes a first main air hole and a second main air hole; the sub-air hole is connected to the pneumatic control valve, the mechanical control valve and the main air hole respectively through a connecting structure, and the sub-air hole, the pneumatic control valve, the mechanical control valve and the main air hole form a pneumatic circuit;

[0008] One end of the speed control valve is arranged inside the housing, and the other end of the speed control valve extends to the outside of the housing. The speed control valve is connected to the pneumatic control valve, the mechanical control valve and the main air hole respectively through a connecting structure, and the speed control valve is used to adjust the gas flow rate inside the housing.

[0009] According to the above technical solution, three ventilation cavities are arranged inside the pneumatic control valve, namely a first ventilation cavity, a second ventilation cavity and a third ventilation cavity; wherein, through holes are arranged on the side walls of the first ventilation cavity and the second ventilation cavity, and a round hole is arranged at the end of the third ventilation cavity, and both the through hole and the round hole are used for connecting with the connecting structure.

[0010] According to the above technical solution, a movable plate is arranged inside the first ventilation cavity, and a push rod is arranged below the movable plate, and the push rod extends from the first ventilation cavity to the third ventilation cavity.

[0011] According to the above technical solution, the second ventilation cavity is communicated with the third ventilation cavity, and a sealing piston is arranged inside the third ventilation cavity, and the sealing piston is used to make the second ventilation cavity and the third ventilation cavity conduct unidirectionally.

[0012] According to the above technical solution, a first spring is arranged on the push rod, and a second spring is arranged below the sealing piston. The first spring is used for the reset of the push rod, and the second spring is used for the reset of the sealing piston.

[0013] A control method for a valve action control valve group. The inside of the control valve group includes 4 control processes, namely control process 1, control process 2, control process 3 and control process 4.

[0014] According to the above technical solution, control process 1 is:

[0015] Intake: Gas enters from the first main air hole, passes through the connecting structure and passes through the second control valve and the first branch air hole respectively, and is discharged through the first branch air hole;

[0016] Outlet: Gas enters the housing from the second branch air hole, passes through the connecting structure and passes through the mechanical control valve B and the second main air hole respectively, and leaves from the second main air hole.

[0017] According to the above technical solution, control process 2 is:

[0018] Intake: Gas enters from the first main air hole, passes through the connecting structure and passes through the mechanical control valve A, the third control valve, the speed control valve, the first control valve and the fourth branch air hole respectively, and is discharged through the fourth branch air hole;

[0019] Outlet: Gas enters the housing from the third branch air hole, passes through the connecting structure and passes through the fourth control valve and the second main air hole respectively, and is discharged from the second main air hole.

[0020] According to the above technical solution, control process 3:

[0021] Intake: The gas enters from the second main air hole, passes through the fourth control valve, the third control valve, the first control valve and the third branch air hole respectively through the connecting structure, and the gas is discharged from the third branch air hole;

[0022] Exhaust: The gas enters from the fourth branch air hole, passes through the first control valve, the speed regulating valve, the mechanical control valve A and the first main air hole respectively through the connecting structure, and is discharged from the first main air hole.

[0023] According to the above technical solution, control process 4:

[0024] Intake: The gas enters from the second main air hole, passes through the fourth control valve, the second control valve, the mechanical control valve B and the second branch air hole respectively through the connecting structure, and the gas is discharged from the second branch air hole;

[0025] Exhaust: The gas enters from the first branch air hole, passes through the second control valve and the first main air hole respectively through the connecting structure, and leaves from the first main air hole.

[0026] Compared with the prior art, the present invention has the following beneficial effects:

[0027] In the present invention, by arranging a pneumatic control valve and a mechanical control valve inside the housing, and arranging a main air hole and branch air holes on the housing, supplying air to the control valve group through the main air hole, the gas enters the branch air holes through the connecting structure and the pneumatic control valve, enters the vacuum valve through the branch air holes, and then returns to the inside of the control valve group from the branch air holes after passing through the vacuum valve, and finally is discharged from the main air hole to form a complete pneumatic circuit.

[0028] Through the pneumatic control valve and the mechanical control valve, the gas can quickly complete commutation, facilitating the control of the vacuum valve, and integrating the mechanical control and the pneumatic control valve in the housing, reducing the overall volume of the control valve group, making the occupied space of the control valve group smaller and facilitating installation. Description of the Drawings

[0029] Figure 1 Schematic three-dimensional structure of the present invention Figure 1 ;

[0030] Figure 2 Schematic gas circuit of the present invention Figure 1 ;

[0031] Figure 3 Schematic gas circuit of the present invention Figure 2 ;

[0032] Figure 4 Schematic diagram of the air guide groove of the present invention;

[0033] Figure 5Schematic structural diagram of the pneumatic control valve of the present invention;

[0034] Figure 6 Schematic three-dimensional structure of the present invention Figure 2 ;

[0035] Figure 7 Schematic three-dimensional structure of the present invention Figure 3 ;

[0036] Figure 8 Schematic diagram of the air distribution hole of the present invention;

[0037] Figure 9 Cross-sectional view of the pneumatic control valve of the present invention.

[0038] Markings in the figure: 1 - housing, 2 - first control valve, 3 - second control valve, 4 - third control valve, 5 - fourth control valve, 6 - mechanical control valve A, 7 - mechanical control valve B, 8 - first main air hole, 9 - second main air hole, 10 - first air distribution hole, 11 - second air distribution hole, 12 - third air distribution hole, 13 - fourth air distribution hole, 14 - speed control valve, 15 - first ventilation cavity, 1501 - movable plate, 1502 - push rod, 16 - second ventilation cavity, 17 - third ventilation cavity, 1701 - sealing piston;

[0039] Air circuit:

[0040] 1801 - first air circuit, 1802 - second air circuit, 1803 - third air circuit, 1804 - fourth air circuit, 1805 - fifth air circuit, 1806 - sixth air circuit, 1807 - seventh air circuit, 1808 - eighth air circuit, 1809 - ninth air circuit, 1810 - tenth air circuit, 1811 - eleventh air circuit, 1812 - twelfth air circuit, 1813 - thirteenth air circuit, 1814 - fourteenth air circuit, 1815 - fifteenth air circuit, 1816 - sixteenth air circuit, 1817 - seventeenth air circuit, 1818 - eighteenth air circuit, 1819 - nineteenth air circuit;

[0041] Air guide groove:

[0042] 1901 - first air guide groove, 1902 - second air guide groove, 1903 - third air guide groove, 1904 - fourth air guide groove, 1905 - fifth air guide groove. Specific implementation mode

[0043] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0044] Embodiment 1

[0045] As Figures 1 to 9 shown, a valve action control valve group includes a housing 1, a pneumatic control valve, a mechanical control valve, a speed control valve 14, and a connection structure; wherein, the pneumatic control valve and the connection structure are arranged inside the housing 1, one end of the mechanical control valve is arranged inside the housing 1, and the other end extends to the outside of the housing 1; the pneumatic control valve is connected to the mechanical control valve through the connection structure; the pneumatic control valve includes a first control valve 2, a second control valve 3, a third control valve 4, and a fourth control valve 5; the mechanical control valve includes a mechanical control valve A6 and a mechanical control valve B7; the flow path of the gas is changed by opening or closing the mechanical control valve.

[0046] The housing 1 is provided with a main air hole and a branch air hole. The main air hole is connected to the pneumatic control valve and the mechanical control valve respectively through the connection structure. The main air hole includes a first main air hole 8 and a second main air hole 9; the branch air hole is connected to the pneumatic control valve, the mechanical control valve, and the main air hole respectively through the connection structure. The branch air hole, the pneumatic control valve, the mechanical control valve, and the main air hole form a pneumatic circuit.

[0047] One end of the speed control valve 14 is arranged inside the housing 1, and the other end extends to the outside of the housing 1. The speed control valve 14 is connected to the pneumatic control valve, the mechanical control valve, and the main air hole respectively through the connection structure. The speed control valve 14 is used to adjust the gas flow rate inside the housing 1.

[0048] In the present invention, by arranging a pneumatic control valve and a mechanical control valve inside the housing 1, and providing a main air hole and a branch air hole on the housing 1, the gas is supplied into the control valve group through the main air hole. The gas enters the branch air hole after passing through the pneumatic control valve and the mechanical control valve, enters the vacuum valve through the branch air hole, and then returns to the inside of the control valve group from the branch air hole after passing through the vacuum valve, and finally is discharged from the main air hole to form a complete pneumatic circuit.

[0049] By controlling the mechanical control valve A6 and the mechanical control valve B7, the gas can quickly complete commutation, which facilitates the control of the vacuum valve, and integrates the mechanical control and the pneumatic control valve inside the housing 1, reducing the overall volume of the control valve group, making the occupied space of the control valve group smaller and facilitating installation.

[0050] Embodiment 2

[0051] This embodiment is a further refinement of Embodiment 1. As Figure 2 、 Figure 3 、 Figure 4 and Figure 5As shown in the figure, there are three ventilation cavities inside the pneumatic control valve, namely the first ventilation cavity 15, the second ventilation cavity 16 and the third ventilation cavity 17. Among them, through holes are provided on the side walls of the first ventilation cavity 15 and the second ventilation cavity 16, and a round hole is provided at the end of the third ventilation cavity 17. Both the through hole and the round hole are used for connecting with the gas path.

[0052] A movable plate 1501 is arranged inside the first ventilation cavity 15, and a push rod 1502 is arranged below the movable plate 1501. The push rod 1502 extends from the first ventilation cavity 15 to the third ventilation cavity 17.

[0053] The second ventilation cavity 16 communicates with the third ventilation cavity 17, and a sealing piston 1701 is arranged inside the third ventilation cavity 17. The sealing piston 1701 is used to make the second ventilation cavity 16 and the third ventilation cavity 17 conduct unidirectionally.

[0054] A first spring is arranged on the push rod 1502, and a second spring is arranged below the sealing piston 1701. The first spring is used for the reset of the push rod 1502, and the second spring is used for the reset of the sealing piston 1701.

[0055] Furthermore, both the first main air hole 8 and the second main air hole 9 are connected to the housing 1 by threads.

[0056] Furthermore, the branch air holes include a first branch air hole 10, a second branch air hole 11, a third branch air hole 12 and a fourth branch air hole 13.

[0057] Furthermore, the working principle of the pneumatic control valve is as follows: The first ventilation cavity 15 in the pneumatic control valve is the control end of the pneumatic control valve. When no gas is introduced into the inside of the first ventilation cavity 15, the second ventilation cavity 16 and the third cavity conduct unidirectionally. Specifically, when gas enters the inside of the second ventilation cavity 16, the sealing piston 1701 arranged in the third cavity will be pressed down, so that the second ventilation cavity 16 and the third ventilation cavity 17; when the second ventilation cavity 16 stops ventilating, the sealing piston 1701 resets under the action of the spring, blocking the connection between the second ventilation cavity 16 and the third cavity, so that the gas in the third cavity cannot enter the second ventilation cavity 16, maintaining the unidirectional conduction between the second ventilation cavity 16 and the third cavity.

[0058] When gas is introduced into the interior of the first ventilation cavity 15, the gas in the first ventilation cavity 15 will press the movable plate 1501 downward, causing the push rod 1502 installed below the movable plate 1501 to move downward together. Moreover, the push rod 1502 will push the sealing piston 1701 arranged in the third cavity, so that the second ventilation cavity 16 and the third cavity are communicated, that is, the second ventilation cavity 16 can be used as an air inlet or an air outlet, and the third cavity can also be used as an air inlet or an air outlet, namely, two-way conduction of the pneumatic control valve is realized.

[0059] Further, the speed control valve 14 adopts an existing device. For example, the PSL601A speed control valve 14 of AirTAC is used.

[0060] Further, the mechanical control valve adopts an existing device. For example, the M3 series mechanical valve M3PM210-06R of AirTAC is used.

[0061] A control method for a valve action control valve group. The interior of the control valve group includes 4 control processes, namely control process 1, control process 2, control process 3, and control process 4.

[0062] Control process 1 is as follows:

[0063] Air intake: The gas enters from the first main air hole 8, passes through the second control valve 3 and the first branch air hole 10 respectively through the connection structure, and is discharged through the first branch air hole 10.

[0064] Air outlet: The gas enters the housing (1) from the second branch air hole 11, passes through the mechanical control valve B7 and the second main air hole 9 respectively through the connection structure, and leaves from the second main air hole 9.

[0065] Control process 2 is as follows:

[0066] Air intake: The gas enters from the first main air hole 8, passes through the mechanical control valve A6, the third control valve 4, the speed control valve 14, the first control valve 2 and the fourth branch air hole 13 respectively through the connection structure, and is discharged through the fourth branch air hole 13.

[0067] Air outlet: The gas enters the housing 1 from the third branch air hole 12, passes through the fourth control valve 5 and the second main air hole 9 respectively through the connection structure, and is discharged from the second main air hole 9.

[0068] Control process 3:

[0069] Air intake: The gas enters from the second main air hole 9, passes through the fourth control valve 5, the third control valve 4, the first control valve 2 and the third branch air hole 12 respectively through the connection structure, and the gas is discharged through the third branch air hole 12.

[0070] Air outlet: The gas enters from the fourth air distribution hole 13, passes through the connection structure through the first control valve 2, speed control valve 14, mechanical control valve A6 and the first main air hole 8 respectively, and is discharged from the first main air hole 8.

[0071] Control process 4:

[0072] Air intake: The gas enters from the second main air hole 9, passes through the connection structure through the fourth control valve 5, second control valve 3, mechanical control valve B7 and the second air distribution hole 11 respectively, and the gas is discharged from the second air distribution hole 11;

[0073] Air outlet: The gas enters from the first air distribution hole 10, passes through the connection structure through the second control valve 3 and the first main air hole 8 respectively, and the gas leaves from the first main air hole 8.

[0074] Embodiment III

[0075] This embodiment is a further refinement of Embodiment I. The specific movement process of the control valve group is as follows: There are two cylinders inside the vacuum valve, namely the first cylinder and the second cylinder. Through the actions of the first cylinder and the second cylinder, the vacuum valve is closed.

[0076] Logical description of control process 1:

[0077] When the first main air hole 8 intakes air and the second main air hole 9 discharges air;

[0078] Gas intake direction: It enters from the first main air hole 8, enters the third air path 1803 through the first main air hole 8, enters the second control valve 3 through the third air path 1803, and enters the second air path 1802 and the first air path 1801 from the second control valve 3 (the first air path 1801 and the second air path 1802 are connected. The first air path 1801 connects the first air distribution hole 10 and the second control valve 3; the second air path 1802 connects the second control valve 3 and the fourth control valve 5), and then enters the first air distribution hole 10 from the first air path 1801 and the first air guide groove, and enters the vacuum valve from the first air distribution hole 10, so that the first cylinder completes the first-stage action. The first-stage action is that the piston rod of the first cylinder pushes forward, so that the sealing rubber in the vacuum valve is directly below the valve port. During the first-stage action, the mechanical control valve A6 always remains closed (when the first stage is completed, the mechanical control valve A6 will be triggered (the vacuum valve component hits the switch of the mechanical control valve A6) to be conducted).

[0079] Among them, the second air path 1802 is connected to the control end of the fourth control valve 5, making the fourth control valve 5 conduct bidirectionally, that is, the fourth control valve 5 can intake air forward or backward. But air cannot be discharged from the fourth control valve 5.

[0080] Gas outlet direction: After being discharged from the first cylinder, the gas enters the second air branch hole 11, and enters the third air guide groove 1903, the eleventh air path 1811, the twelfth air path 1812, the thirteenth air path 1813 and the fourteenth air path 1814 from the second air branch hole 11 in sequence, and enters the mechanical control valve B7 (at this time, the mechanical control valve B7 is in a triggered state, the mechanical control valve B7 is triggered, and its internal air path is connected, so that the gas can enter the air guide groove 1904), and then enters the fourth air guide groove 1904 from the mechanical control valve B7. The gas enters the fifteenth air path 1815 from the fourth air guide groove 1904, and then enters the seventeenth air path 1817 from the fifteenth air path 1815, and finally enters the second main air hole 9 from the seventeenth air path 1817, and leaves from the second main air hole 9.

[0081] This process also includes the conduction of the first control valve 2: after the gas enters the fifteenth gas path 1815, since the fifteenth gas path 1815 is connected with the sixteenth gas path 1816, the gas enters the control end of the first control valve 2 through the sixteenth gas path 1816, making the first control valve 2 bidirectionally conductive.

[0082] Embodiment 4

[0083] This embodiment is a further refinement of the first embodiment. Control process 2 logic description:

[0084] After the internal air path is reversed, the first main air hole 8 still takes in air, and the second main air hole 9 still discharges air.

[0085] Gas inlet direction: The gas enters the third gas path 1803 through the first main gas hole 8, and then enters the mechanical control valve A6 through the fourth gas path 1804, the fifth gas path 1805, the second gas guide groove 1902 and the sixth gas path 1806 in sequence. Then, through the mechanical control valve A6, it passes through the seventh gas path 1807 and the eighth gas path 1808 in sequence, and enters the control end of the third control valve 4 (to trigger the third control valve 4).

[0086] After the gas enters the mechanical control valve A6, it also includes another gas path: from the mechanical control valve A6 to the nineteenth gas path 1819, enter the speed regulating valve 14 through the nineteenth gas path 1819, and then enter the first control valve 2 through the eighteenth gas path 1818 (the first control valve 2 is triggered in the control process 1, and the gas can flow normally at this time), from the first control valve 2 to the fourth air distribution hole 13 through the fifth air guide groove 1905, and enter the second cylinder of the vacuum valve from the fourth air distribution hole 13, so that the second cylinder completes the second stage of action (the second stage of action is the action of the piston rod of the second valve cylinder, which lifts the sealing rubber of the vacuum valve, so that the valve port of the vacuum valve squeezes the sealing rubber to complete the sealing. Before this stage starts, the mechanical control valve B7 remains triggered, that is, the internal gas path of the mechanical control valve B7 is connected; after the start of this stage of action, the mechanical control valve B7 remains disconnected, that is, the internal gas path of the mechanical control valve B7 is closed)

[0087] Gas outlet direction: After being discharged from the second cylinder, the gas enters the third gas branch hole 12, and enters the fourth gas guide groove 1904 from the third gas branch hole 12, and enters the fourth control valve 5 from the fourth gas guide groove 1904 through the fifteenth gas path 1815 and the seventeenth gas path 1817 in sequence, and enters the second main gas hole 9 from the fourth control valve 5.

[0088] Embodiment 5

[0089] This embodiment is a further refinement of the first embodiment. Logic description of control process 3:

[0090] The first main air hole 8 is for air outlet, and the second main air hole 9 is for air intake.

[0091] Gas inlet direction: Gas enters from the second main gas hole 9, passes through the second main gas hole 9 and enters the fourth control valve 5; Gas leaves from the seventeenth gas path 1817, including two branch gas paths;

[0092] First branch air path: gas enters the third control valve 4 from the fourth control valve 5 through the seventeenth air path 1817, and enters the second cylinder in the vacuum valve from the third control valve 4 through the third branch air hole 12, so that the second cylinder completes the third stage of action (the third stage of action is the action of the piston rod of the second cylinder, which lowers the sealing rubber of the vacuum valve, resets the valve port sealing rubber of the vacuum valve, and completes the valve opening. After this stage is completed, the mechanical control valve B7 is reset, and the mechanical control valve B7 becomes conductive).

[0093] The second branch gas path: enters the sixteenth gas path 1816 from the fourth control valve 5, and enters the control end of the first control valve 2 through the sixteenth gas path 1816, so that the first control valve 2 is triggered, and the first control valve 2 can be bidirectionally conductive.

[0094] Gas outlet direction: The gas is discharged from the second cylinder, enters the fourth air distribution hole 13, enters the first control valve 2 through the fourth air distribution hole 13, passes through the eighteenth air path 1818 from the first control valve 2 (the second air distribution path triggers the first control valve 2) and enters the speed control valve 14, then enters the mechanical control valve A6 from the speed control valve 14 through the nineteenth air path 1819, and passes through the sixth air path 1806, the second air guide groove 1902, the fifth air path 1805, the fourth air path 1804 and the third air path 1803 in sequence through the mechanical control valve A6 (the mechanical control valve A6 has been in the triggered state after the control 1 action), enters the first main air hole 8, and leaves from the first main air hole 8.

[0095] Embodiment Six

[0096] This embodiment is a further refinement of Embodiment One. Control process 4: The first main air hole 8 discharges air, and the second main air hole 9 intakes air;

[0097] Gas intake direction: The gas enters the fourth control valve 5 from the second main air hole 9, and enters the mechanical control valve B7 from the fourth control valve 5 in sequence through the seventeenth air path 1817, the fifteenth air path 1815 and the fourth air guide groove 1904. Before the first air distribution path action is completed, the mechanical control valve B7 is in the closed state, and the gas cannot continue to flow when it reaches the mechanical control valve B7. When the first air distribution path action is in place, the mechanical control valve B7 is triggered and conducts, and then enters the second air distribution hole 11 from the mechanical control valve B7 in sequence through the fourteenth air path 1814, the thirteenth air path 1813, the twelfth air path 1812, the eleventh air path 1811 and the third air guide groove 1903, and enters the first cylinder of the vacuum valve from the second air distribution hole 11, so that the first cylinder completes the fourth-stage action. The fourth-stage action is that the piston rod of the first cylinder moves backward, so that the sealing rubber in the vacuum valve moves away from the valve port.

[0098] When the gas passes through the third air guide groove 1903, there is also a third air distribution path. The third air distribution path is: The gas passes through the tenth air path 1810 from the third air guide groove 1903 and enters the control end of the second control valve 3, so that the second control valve 3 is triggered, and the second control valve 3 can conduct bidirectionally. (Here, the second control valve 3 is made to conduct, and only then can the gas flow out of the main air hole 8 normally. Because the gas enters from below the second control valve 3 later, it must be in the conducting state to flow upward and out normally, otherwise the air path is blocked.)

[0099] Gas outlet direction: The gas is discharged from the first cylinder, enters the second control valve 3 from the first air distribution hole 10 (the gas can flow normally through this air path only after the second control valve 3 is made to conduct in the previous step), then enters the third air path 1803 from the second control valve 3, enters the first main air hole 8 from the third air path 1803, and leaves from the first main air hole 8.

[0100] Through control processes 1, 2, 3, and 4, a sealing and reset process of the vacuum valve is completed.

[0101] In the initial state, the mechanical control valve A6 is in the closed state (not triggered), and the mechanical control valve B7 is in the conducting state (triggered). When the first stage is completed, the mechanical control valve A6 is triggered by the vacuum valve component, causing the internal gas path to conduct. At the beginning of the second stage, the mechanical control valve B7 resets and closes. When the third stage is completed, the mechanical control valve B7 is triggered to open, and at the beginning of the fourth stage, the mechanical control valve A6 resets and closes. (There is a corresponding structure in the vacuum valve. When the first stage is completed, the vacuum valve component will hit the switch of the mechanical control valve, triggering the mechanical control valve. When the vacuum valve component leaves, there is a spring inside the mechanical control valve to reset and disconnect the mechanical control valve).

[0102] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements not only includes those elements, but also includes other elements not expressly listed, or elements inherent to such process, method, article or device.

[0103] Finally, it should be noted that the above are only preferred embodiments of the present invention and are not used to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A valve action control valve group, characterized in that: It includes a housing (1), a pneumatic control valve, a mechanical control valve, a speed control valve (14) and a connection structure; wherein, the pneumatic control valve and the connection structure are arranged inside the housing (1), one end of the mechanical control valve is arranged inside the housing (1), and the other end extends to the outside of the housing (1); the pneumatic control valve is connected to the mechanical control valve through the connection structure; the pneumatic control valve includes a first control valve (2), a second control valve (3), a third control valve (4) and a fourth control valve (5); the mechanical control valve includes a mechanical control valve A (6) and a mechanical control valve B (7); The housing (1) is provided with a main air hole and a sub-air hole, the main air hole is respectively connected to the pneumatic control valve and the mechanical control valve through the connection structure, and the main air hole includes a first main air hole (8) and a second main air hole (9); the sub-air hole is respectively connected to the pneumatic control valve, the mechanical control valve and the main air hole through the connection structure, and the sub-air hole, the pneumatic control valve, the mechanical control valve and the main air hole form a pneumatic circuit; One end of the speed control valve (14) is arranged inside the housing (1), the other end of the speed control valve (14) extends to the outside of the housing (1), the speed control valve (14) is respectively connected to the pneumatic control valve, the mechanical control valve and the main air hole through the connection structure, and the speed control valve (14) is used to adjust the gas flow rate inside the housing (1); There are three ventilation cavities inside the pneumatic control valve, namely a first ventilation cavity (15), a second ventilation cavity (16) and a third ventilation cavity (17); wherein, through holes are arranged on the side walls of the first ventilation cavity (15) and the second ventilation cavity (16), and a round hole is arranged at the end of the third ventilation cavity (17), and both the through hole and the round hole are used to connect with the connection structure; An activity plate (1501) is arranged inside the first ventilation cavity (15), a push rod (1502) is arranged below the activity plate (1501), and the push rod (1502) extends from the first ventilation cavity (15) to the third ventilation cavity (17); The second ventilation cavity (16) is communicated with the third ventilation cavity (17), and a sealing piston (1701) is arranged inside the third ventilation cavity (17), and the sealing piston (1701) is used to make the second ventilation cavity (16) and the third ventilation cavity (17) conduct unidirectionally; A first spring is arranged on the push rod (1502), and a second spring is arranged below the sealing piston (1701), the first spring is used for the reset of the push rod (1502), and the second spring is used for the reset of the sealing piston (1701).

2. The valve action control valve group according to claim 1, characterized in that: The inside of the control valve group includes 4 control processes, namely control process 1, control process 2, control process 3 and control process 4.

3. The valve action control valve group according to claim 2, characterized in that: Control process 1 is: Air intake: The gas enters from the first main air hole (8), passes through the connection structure through the second control valve (3) and the first sub-air hole (10) respectively, and is discharged through the first sub-air hole (10); Air outlet: The gas enters the housing (1) from the second sub-air hole (11), passes through the connection structure through the mechanical control valve B (7) and the second main air hole (9) respectively, and leaves from the second main air hole (9).

4. The valve action control valve group according to claim 3, characterized in that: Control process 2 is: Intake: The gas enters from the first main air hole (8), passes through the mechanical control valve A (6), the third control valve (4), the speed control valve (14), the first control valve (2) and the fourth sub-air hole (13) respectively through the connecting structure, and is discharged from the fourth sub-air hole (13). Outlet: The gas enters the housing (1) from the third sub-air hole (12), passes through the fourth control valve (5) and the second main air hole (9) respectively through the connecting structure, and is discharged from the second main air hole (9).

5. The valve action control valve group according to claim 4, characterized in that: Control process 3: Intake: The gas enters from the second main air hole (9), passes through the fourth control valve (5), the third control valve (4), the first control valve (2) and the third sub-air hole (12) respectively through the connecting structure, and the gas is discharged from the third sub-air hole (12). Outlet: The gas enters from the fourth sub-air hole (13), passes through the first control valve (2), the speed control valve (14), the mechanical control valve A (6) and the first main air hole (8) respectively through the connecting structure, and is discharged from the first main air hole (8).

6. The valve action control valve group according to claim 5, characterized in that: Control process 4: Intake: The gas enters from the second main air hole (9), passes through the fourth control valve (5), the second control valve (3), the mechanical control valve B (7) and the second sub-air hole (11) respectively through the connecting structure, and the gas is discharged from the second sub-air hole (11). Outlet: The gas enters from the first sub-air hole (10), passes through the second control valve (3) and the first main air hole (8) respectively through the connecting structure, and the gas leaves from the first main air hole (8).

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