Reading head maintenance method, frame calibration tooling and reading head calibration tooling

Abstract

The present invention relates to the field of grating measurement, and in particular, to a reading head maintenance method, a frame calibration tool, and a reading head calibration tool. The reading head maintenance method comprises: obtaining a first parameter of each reading head, and judging whether the reading head is damaged according to the first parameter; if the judgment result is no, obtaining a second parameter of the reading head, and if the second parameter does not meet the requirement, judging that the reading head is abnormal, and debugging the reading head until the second parameter reaches a predetermined value or above; if the judgment result is yes, replacing the reading head and debugging the second parameter of the replaced reading head to a predetermined value or above. The frame calibration tool and the reading head calibration tool are used to implement the above-mentioned reading head maintenance method. The reading head maintenance method, frame calibration tool, and reading head calibration tool provided by the present invention can quickly determine the cause of the reading head failure on site without returning to the factory for inspection, thereby shortening the maintenance and repair cycle and reducing the cost.

Description

Technical Field

[0001] The present invention relates to the field of grating measurement, and in particular to a reading head maintenance method, a frame calibration tool and a reading head calibration tool. Background Art

[0002] The displacement of the workpiece stage is mainly measured by the workpiece stage plane grating measurement system. Therefore, the measurement accuracy of the workpiece stage plane grating position measurement system will directly affect the positioning accuracy of the workpiece stage. The reading head is the main component of the workpiece stage plane grating position measurement system. Whether it operates normally directly affects the measurement accuracy.

[0003] However, once the reading head fails, the cause of the failure cannot be determined on site and needs to be returned to the factory for inspection, resulting in long maintenance cycles and high costs.

[0004] In summary, how to overcome the above-mentioned defects of the existing reading head maintenance method is a technical problem that needs to be urgently solved by technical personnel in this field. Summary of the invention

[0005] The purpose of the present invention is to provide a reading head maintenance method, a frame calibration tool and a reading head calibration tool to alleviate the technical problem that the reading head maintenance method in the prior art cannot determine the cause of the reading head failure on site.

[0006] The method for repairing a reading head provided by the present invention comprises:

[0007] Acquire a first parameter of the reading head, and determine whether the reading head is damaged according to the first parameter;

[0008] If the judgment result is no, then obtain the second parameter of the reading head. If the second parameter is less than the first threshold value within the working angle range of the reading head, or the second parameter is less than the second threshold value when the reading head rotates to the limit position, it is judged that the reading head is abnormal, and the reading head is debugged until the second parameter reaches a predetermined value or more and the first threshold value is greater than the second threshold value; otherwise, it is judged that the reading head is normal;

[0009] If the judgment result is yes, the reading head is replaced and the replaced reading head is debugged until the second parameter reaches above a predetermined value.

[0010] Compared with the prior art, the present invention has the following beneficial effects:

[0011] The reading head maintenance method provided by the present invention can determine whether the reading head is damaged by obtaining the first parameter of each reading head. When the judgment result is no, the reading head is not damaged and does not need to be replaced; when the judgment result is yes, the reading head is damaged and needs to be replaced, and the replaced reading head is debugged so that the second parameter of the reading head reaches above the predetermined value to ensure good accuracy.

[0012] On the basis of the above judgment results, if the reading head does not need to be replaced, the second parameter of the reading head is further obtained to determine whether the reading head is normal. If the second parameter of the reading head is less than the first threshold value within the working angle range of the reading head (i.e., the angle range that will appear when the reading head reads normally, generally between -1mrad and +1mrad), the reading head is judged to be abnormal; if the second parameter of the reading head is less than the second threshold value when the reading head rotates to the extreme position (i.e., the extreme position that the reading head can reach), it is also judged that the reading head is abnormal. No matter which result is abnormal, the reading head is directly debugged until the second parameter of the reading head reaches a predetermined value or more to ensure good accuracy. Among them, the first threshold is greater than the second threshold value, that is, within the working angle range of the reading head, the plane grating position measurement system has higher requirements for the second parameter in the reading head. If the second parameter of the reading head is not less than the first threshold value within the working angle range of the reading head, and when the reading head rotates to the extreme position, the second parameter of the reading head is not less than the second threshold value, it is judged that the reading head is normal and no maintenance is required.

[0013] Therefore, the reading head maintenance method provided by the present invention can quickly determine the cause of the reading head failure on site without returning it to the factory for inspection, thereby shortening the maintenance cycle and reducing costs.

[0014] Preferably, as an implementable embodiment, the step of debugging the reading head until the second parameter reaches a predetermined value or above comprises:

[0015] The workpiece table is transferred from the whole machine frame to the frame calibration fixture, and the first plane grating on the frame calibration fixture is used to provide a reference benchmark for the signal of the reading head;

[0016] Debugging the reading head until the second parameter reaches above a predetermined value;

[0017] Reset the workpiece table.

[0018] Preferably, as an implementable embodiment, the step of replacing the reading head and debugging the replaced reading head until the second parameter reaches a predetermined value or above comprises:

[0019] When the damaged reading heads are one or two adjacent ones, replace the damaged reading heads first, then transfer the workpiece table from the whole machine frame to the frame calibration fixture, and use the first plane grating on the frame calibration fixture to provide a reference benchmark for the signal of the reading heads;

[0020] Debugging the reading head until the second parameter reaches above the predetermined value;

[0021] Reset the workpiece table.

[0022] Preferably, as an implementable embodiment, the step of replacing the reading head and debugging the replaced reading head until the second parameter reaches a predetermined value or above further comprises:

[0023] When there are three, four or two opposite reading heads damaged, first remove the damaged reading heads, and then transfer the workpiece table to the maintenance station;

[0024] Install the reading head calibration fixture to the part of the workpiece table where the reading head is missing;

[0025] The second plane grating on the reading head calibration fixture is used to provide a reference benchmark for the signal of the reading head;

[0026] Installing and debugging the reading head until the second parameter reaches above the predetermined value;

[0027] Remove the reading head calibration tooling;

[0028] Reset the workpiece table.

[0029] Preferably, as an implementable embodiment, between the step of installing the reading head calibration tool to the position of the workpiece stage where the reading head is missing and the step of using the second plane grating on the reading head calibration tool to provide a reference benchmark for the signal of the reading head, it also includes:

[0030] After the installation of the read head calibration jig is completed, the position accuracy of the read head calibration jig is measured using a three-dimensional coordinate measuring machine. Based on the measurement results of the three-dimensional coordinate measuring machine, the read head calibration jig is adjusted until the measurement results of the three-dimensional coordinate measuring machine meet the installation requirements.

[0031] Preferably, as an implementable embodiment, the first parameter is optical power, and the second parameter is a ratio of an alternating current signal to a direct current signal.

[0032] Preferably, as an implementable method, the step of judging that the result is negative includes: the optical power is greater than zero;

[0033] And / or, the step in which the judgment result is yes includes: the optical power is equal to zero.

[0034] Preferably, as an implementable method, the first threshold is 50%;

[0035] and / or, the second threshold is 10%;

[0036] And / or, the predetermined value is greater than 70%, preferably 90%, within the working angle range of the reading head.

[0037] The present invention also provides a frame calibration tool, which includes a support frame and a first plane grating, wherein the first plane grating is mounted on the support frame, and the first plane grating is used to cooperate with the upper end surface of the reading head of the workpiece table.

[0038] When calibrating the reading head using the above-mentioned frame calibration tooling, move the workpiece table into the supporting frame, and make the first plane grating cooperate with the upper end surface of the reading head of the workpiece table. The first plane grating is used to replace the plane grating component of the whole machine frame to provide a reference benchmark for the signal debugging of the reading head. On this basis, the reading head can be debugged so that the second parameter of the reading head reaches above the predetermined value.

[0039] Therefore, the framework calibration tooling provided by the present invention can debug the reading head on site without returning it to the factory for debugging. Thus, a faulty reading head can be repaired on site with a short maintenance cycle and low cost, thus meeting product-level maintenance requirements.

[0040] Preferably, as an implementable embodiment, the frame calibration tool further includes a positioning device, the positioning device is fixedly connected to the support frame, and the positioning device is used to position the workpiece table in the width direction;

[0041] And / or, the frame calibration tool further includes a substrate, the substrate is mounted on the support frame, and the first plane grating is mounted on the substrate;

[0042] And / or, the frame calibration tool further comprises casters, and the casters are mounted on the bottom of the support frame;

[0043] And / or, the frame calibration tool further includes height-adjustable feet, wherein the feet are installed at the bottom of the support frame.

[0044] The present invention also provides a reading head calibration tool, which includes a base and a second plane grating, wherein the second plane grating is mounted on the base, the base is used to be mounted on a reading head mounting plate of a workpiece table, and the second plane grating is used to be opposite to the upper end surface of the reading head mounted on the reading head mounting plate.

[0045] At least two first adjusting members are installed at the bottom of the base, and the first adjusting members are used to abut and cooperate with the reading head mounting disk; at least two second adjusting members are installed on the side of the base opposite to the reading head mounting disk, and the second adjusting members are used to abut and cooperate with the reading head mounting disk.

[0046] When the reading head calibration tool is used to calibrate the reading head, the base is installed on the position of the reading head installation plate of the workpiece table where the reading head is missing, and the first adjustment member is operated to obtain a higher installation accuracy for the position and deflection angle of the second plane grating on the base; at the same time, the second adjustment member is operated to obtain a higher installation accuracy for the deflection angle of the second plane grating on the base to meet the requirements of the reference datum. After the installation of the reading head calibration tool is completed, the reading head is installed. At this time, the upper end face of the reading head is opposite to the second plane grating. The second plane grating can replace the plane grating component on the overall frame to provide a reference datum for the signal debugging of the reading head. On this basis, the reading head can be debugged so that the second parameter of the reading head reaches above the predetermined value.

[0047] Therefore, the reading head calibration tooling provided by the present invention can achieve the purpose of on-site debugging of the reading head.

[0048] Preferably, as an implementable embodiment, the base and the reading head mounting plate are connected and fixed by a threaded connector;

[0049] And / or, the reading head calibration tool further includes a limiting column, the limiting column is arranged on the base, and the limiting column is used to abut against the edge of the reading head mounting plate for limiting. BRIEF DESCRIPTION OF THE DRAWINGS

[0050] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0051] Figure 1 A flowchart of a method for repairing a reading head provided by an embodiment of the present invention;

[0052] Figure 2 A schematic diagram of the three-dimensional structure of a reading head mounting plate provided by an embodiment of the present invention on which a reading head is mounted;

[0053] Figure 3 A schematic diagram of the structure of the frame calibration tooling provided in an embodiment of the present invention when it cooperates with the workpiece table;

[0054] Figure 4A schematic diagram of the three-dimensional structure of a frame calibration tool provided in an embodiment of the present invention;

[0055] Figure 5 A schematic diagram of the structure of the reading head calibration tooling and the reading head mounting plate provided in an embodiment of the present invention when they are matched;

[0056] Figure 6 A schematic diagram of the three-dimensional structure of a reading head calibration tooling provided in an embodiment of the present invention;

[0057] Figure 7 A schematic diagram of the three-dimensional structure from another perspective of the reading head calibration tooling provided in an embodiment of the present invention.

[0058] Description of reference numerals:

[0059] 100-workpiece table; 110-reading head mounting plate; 120-reading head;

[0060] 200-frame calibration tool; 210-support frame; 220-first plane grating; 230-positioning device; 240-base plate; 250-castor; 260-foot;

[0061] 300 - reading head calibration tooling; 310 - base; 320 - second plane grating; 330 - first adjusting member; 340 - second adjusting member; 350 - limit column. DETAILED DESCRIPTION

[0062] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0063] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0064] The present invention is further described in detail below through specific implementation examples in conjunction with the accompanying drawings.

[0065] See also Figure 1 and Figure 2 , this embodiment provides a reading head maintenance method, which includes:

[0066] Acquire a first parameter of each reading head 120, and determine whether the reading head 120 is damaged according to the first parameter;

[0067] If the judgment result is no, the second parameter of the reading head 120 is obtained; if the second parameter is less than the first threshold value within the working angle range of the reading head, or the second parameter is less than the second threshold value when the reading head 120 rotates to the limit position, it is judged that the reading head 120 is abnormal, and the reading head 120 is debugged until the second parameter reaches a predetermined value or more, wherein the first threshold value is greater than the second threshold value; otherwise, it is judged that the reading head 120 is normal;

[0068] If the judgment result is yes, the reading head 120 is replaced and the replaced reading head 120 is debugged until the second parameter reaches above the predetermined value.

[0069] The reading head maintenance method provided in this embodiment can determine whether the reading head 120 is damaged by obtaining the first parameters of each reading head 120. When the judgment result is no, the reading head 120 is not damaged and does not need to be replaced; when the judgment result is yes, the reading head 120 is damaged and needs to be replaced, and the replaced reading head 120 is debugged so that the second parameter of the reading head 120 reaches above the predetermined value to ensure good accuracy.

[0070] On the basis of the above judgment result, if the reading head 120 does not need to be replaced, the second parameter of the reading head 120 is further obtained to determine whether the reading head 120 is normal. If the second parameter of the reading head 120 is less than the first threshold value within the working angle range of the reading head (i.e., the angle range that will appear when the reading head 120 reads normally, generally between -1mrad and +1mrad), the reading head 120 is judged to be abnormal; if the second parameter of the reading head 120 is less than the second threshold value when the reading head 120 rotates to the extreme position (i.e., the extreme position that the reading head 120 can reach), the reading head 120 is also judged to be abnormal. Regardless of which result is abnormal, the reading head 120 is directly debugged until the second parameter of the reading head 120 reaches a predetermined value or more to ensure good accuracy. Among them, the first threshold value is greater than the second threshold value, that is, within the working angle range of the reading head, the plane grating position measurement system 200 has higher requirements for the second parameter in the reading head 120. If the second parameter of the reading head 120 is not less than the first threshold value within the working angle range of the reading head, and the second parameter of the reading head 120 is not less than the second threshold value when the reading head 120 rotates to the extreme position, it is judged that the reading head 120 is normal and no maintenance is required.

[0071] Therefore, the reader head maintenance method provided in this embodiment can quickly determine the cause of the failure of the reader head 120 on site without returning it to the factory for inspection, thereby shortening the maintenance cycle and reducing costs.

[0072] See also Figure 1-Figure 4 The above step of debugging the reading head 120 until the second parameter reaches a predetermined value or above may specifically include the following steps:

[0073] The workpiece stage 100 is transferred from the whole machine frame to the frame calibration fixture 200, and the first plane grating 220 on the frame calibration fixture 200 is used to provide a reference benchmark for the signal of the reading head 120;

[0074] Debugging the reading head 120 until the second parameter reaches a predetermined value or above;

[0075] The workpiece stage 100 is reset.

[0076] In this way, in the event of an abnormality in the reading head 120, the abnormal reading head 120 can be debugged and repaired on site without returning it to the factory, thereby further shortening the maintenance cycle and reducing costs.

[0077] The step of replacing the reading head 120 and debugging the replaced reading head 120 until the second parameter reaches a predetermined value or above may specifically include the following steps:

[0078] When the damaged reading heads 120 are one or two adjacent reading heads 120, the damaged reading heads 120 are replaced first, and then the workpiece stage 100 is transferred from the whole machine frame to the frame calibration fixture 200, and the first plane grating 220 on the frame calibration fixture 200 is used to provide a reference benchmark for the signal of the reading heads 120;

[0079] Debugging the reading head 120 until the second parameter reaches above the predetermined value;

[0080] The workpiece stage 100 is reset.

[0081] In this way, when the reading head 120 is damaged, and the damaged reading heads 120 are one or two adjacent reading heads 120, the reading heads 120 can be replaced and debugged and repaired on site without returning to the factory, further shortening the maintenance cycle and reducing costs.

[0082] It should be noted that the method of calibrating the reading head 120 using the frame calibration tool 200 is relatively easy to operate. Therefore, when there is one or two adjacent reading heads 120 damaged, this method can improve the calibration efficiency and shorten the maintenance cycle.

[0083] See also Figure 1 , Figure 2 , Figure 5 and Figure 6 The step of replacing the reading head 120 and debugging the replaced reading head 120 until the second parameter reaches a predetermined value or above may further include the following steps:

[0084] When the number of damaged reading heads 120 is three, four or two opposite ones, the damaged reading heads 120 are first removed, and then the workpiece table 100 is transferred to the maintenance station;

[0085] Install the reading head calibration fixture 300 to the position of the workpiece stage 100 where the reading head 120 is missing;

[0086] The second plane grating 320 on the reading head calibration fixture 300 is used to provide a reference benchmark for the signal of the reading head 120;

[0087] Installing and debugging the reading head 120 until the second parameter reaches above the predetermined value;

[0088] Remove the reading head calibration fixture 300;

[0089] The workpiece stage 100 is reset.

[0090] In this way, when the reading heads 120 are damaged, and there are three, four or two opposite reading heads 120 that are damaged, the reading heads 120 can also be replaced and debugged and repaired on site without returning to the factory, further shortening the maintenance cycle and reducing costs.

[0091] It should be noted that the reading head calibration jig 300 can calibrate one reading head 120 and has higher accuracy than the frame calibration jig 200. Therefore, when the number of damaged reading heads 120 is large (three or four) or two are diagonally located, multiple reading head calibration jigs 300 can be used to calibrate the damaged reading heads 120 separately at the same time, so as to obtain good installation consistency. After the installation is completed, the reading heads 120 have higher accuracy.

[0092] Between the step of installing the read head calibration jig 300 to the portion of the workpiece table 100 where the read head 120 is missing and the step of using the second plane grating 320 on the read head calibration jig 300 to provide a reference datum for the signal of the read head 120, there is also a step of adjusting the read head calibration jig 300. Specifically, a three-coordinate measuring machine is used to measure the position accuracy of the read head calibration jig 300, and the read head calibration jig 300 is adjusted based on the measurement results of the three-coordinate measuring machine. The measurement and adjustment are repeated until the measurement results of the three-coordinate measuring machine meet the installation requirements.

[0093] It should be noted that the installation accuracy of the reading head calibration jig 300 directly affects the subsequent calibration of the reading head 120, thereby affecting the installation accuracy of the reading head 120. Therefore, using a three-coordinate measuring machine to measure the position accuracy of the reading head calibration jig 300 can make the installation accuracy of the reading head calibration jig 300 higher, thereby improving the calibration accuracy of the reading head 120 and facilitating ensuring the installation accuracy of the reading head 120.

[0094] As an alternative, when the reading heads 120 are damaged, no matter how many reading heads 120 are damaged or how the damaged reading heads 120 are distributed, the reading head calibration tool 300 is used for calibration.

[0095] The first parameter may be optical power, that is, whether the reading head is damaged is determined by detecting the optical power of the reading head 120 .

[0096] Specifically, when the optical power is equal to zero, it is determined that the reading head 120 is damaged; when the optical power is greater than zero, it is determined that the reading head 120 is not damaged.

[0097] The second parameter of the reading head 120 may be a ratio of an AC signal to a DC signal of the reading head 120 .

[0098] Specifically, the planar grating position measurement system can be directly used to obtain the optical power of each reading head 120 and the ratio of the AC signal to the DC signal without adding other systems.

[0099] Specifically, the first threshold is set to 50%, the second threshold is set to 10%, and the predetermined value is set to be greater than 70% within the working angle range of the reading head. Preferably, the predetermined value is set to 90%.

[0100] See also Figure 3 and Figure 4 This embodiment also provides a frame calibration tool 200, which includes a support frame 210 and a first plane grating 220, the first plane grating 220 is installed on the support frame 210, and the first plane grating 220 is used to cooperate with the upper end surface of the reading head 120 of the workpiece stage 100.

[0101] When the reading head 120 is calibrated using the above-mentioned frame calibration tool 200, the workpiece stage 100 is moved into the supporting frame 210, and the first plane grating 220 is matched with the upper end surface of the reading head 120 of the workpiece stage 100. The first plane grating 220 is used to replace the plane grating component of the whole machine frame to provide a reference benchmark for the signal debugging of the reading head 120. On this basis, the reading head 120 can be debugged so that the second parameter of the reading head 120 reaches above the predetermined value.

[0102] Therefore, the frame calibration tool 200 provided in this embodiment can achieve the purpose of on-site debugging of the reading head 120.

[0103] In the specific structure of the frame calibration tool 200 provided in this embodiment, any one or more of the following structures may also be provided:

[0104] The positioning device 230 is fixedly connected to the support frame 210 and is used to position the workpiece stage 100 in the width direction, thereby ensuring the matching accuracy between the workpiece stage 100 and the frame calibration tool 200 in the width direction, thereby achieving a better calibration effect.

[0105] The substrate 240 is mounted on the support frame 210 . The first plane grating 220 is mounted on the substrate 240 , so that the first plane grating 200 and the support frame 210 can be indirectly mounted. The arrangement of the substrate 240 can improve the relative position accuracy of the first plane grating 220 .

[0106] The caster 250 is installed at the bottom of the support frame 210, so that the caster 250 touches the ground and pushes the support frame 210, so that the support frame 210 can be moved without lifting, which is very convenient.

[0107] The foot 260 is installed at the bottom of the support frame 210, and the foot 260 can be adjusted in height, thereby realizing the height adjustment of the support frame 210. In addition, when the height is lowered, the caster 250 can touch the ground, and at this time, the support frame 210 can be pushed to move; when the height is raised, the caster 250 can leave the ground, and at this time, the support frame 210 can be stably located at the current position, which is convenient for ensuring the subsequent calibration accuracy.

[0108] See also Figure 5-Figure 7 The present embodiment also provides a read head calibration tool 300, which includes a base 310 and a second plane grating 320. The second plane grating 320 is mounted on the base 310. The base 310 is used to be mounted on the read head mounting disk 110 of the workpiece table 100. The second plane grating 320 is used to be opposite to the upper end surface of the read head 120 mounted on the read head mounting disk 110.

[0109] When the reading head 120 is calibrated using the above-mentioned reading head calibration fixture 300, the base 310 is installed to the position of the reading head mounting plate 110 of the workpiece table 100 where the reading head 120 is missing. After the installation of the reading head calibration fixture 300 is completed, the reading head 120 is installed. At this time, the upper end surface of the reading head 120 is opposite to the second plane grating 320. The second plane grating 320 can replace the plane grating component on the overall frame to provide a reference benchmark for the signal debugging of the reading head 120. On this basis, the reading head 120 can be debugged so that the second parameter of the reading head 120 reaches above the predetermined value.

[0110] Therefore, the reading head calibration tool 300 provided in this embodiment can achieve the purpose of on-site debugging of the reading head 120.

[0111] Specifically, the base 310 and the reading head mounting plate 110 can be connected and fixed by a threaded connector, which has high reliability and is detachable.

[0112] In the specific structure of the reading head calibration tool 300 provided in this embodiment, any one or more of the following structures may also be provided:

[0113] At least two first adjustment members 330 are installed at the bottom of the base 310 to abut against the reading head mounting disk 110. The first adjustment members 330 can adjust the height difference between the top surface of the base 310 and the top surface of the reading head mounting disk 110, and can also adjust the horizontality of the base 310. Therefore, by operating the first adjustment members 330, the position and deflection angle of the second plane grating 320 on the base 310 can obtain higher installation accuracy to meet the requirements of the reference datum.

[0114] The first adjusting member 330 can be an adjusting pad or an adjusting bolt. When the first adjusting member 330 is an adjusting pad, it can be directly placed between the bottom of the base 310 and the reading head mounting disk 110; during debugging, the height difference between the top surface of the base 310 and the top surface of the reading head mounting disk 110, as well as the levelness of the base 310 can be adjusted by replacing pads of different thicknesses. When the first adjusting member 330 is an adjusting bolt, it can be directly screwed onto the base 310; during adjustment, the height difference between the top surface of the base 310 and the reading head mounting disk 110, as well as the levelness of the base 310 can be adjusted by screwing the adjusting bolt.

[0115] At least two second adjustment members 340 are installed on the side of the base 310 opposite to the reading head mounting disk 110, and are used to abut against the reading head mounting disk 110. The second adjustment members 340 can adjust the deflection angle of the base 310 relative to the reading head mounting disk 110 in the horizontal direction. Therefore, by operating the second adjustment members 340, the deflection angle of the second plane grating 320 on the base 310 can obtain a higher installation accuracy to meet the requirements of the reference datum.

[0116] The second adjusting member 340 may be an adjusting pad or an adjusting bolt, and the operation method is similar to that of the first adjusting member.

[0117] The limiting post 350 is disposed on the base 310 and can be used to abut against the edge of the reading head mounting disk 110 for limiting position, thereby making the base 310 and the reading head mounting disk 110 more accurately matched.

[0118] In summary, the embodiments of the present invention disclose a reading head maintenance method, a frame calibration tool, and a reading head calibration tool, which overcome many technical defects of the traditional reading head maintenance method. The reading head maintenance method, the frame calibration tool, and the reading head calibration tool provided by the embodiments of the present invention can quickly determine the cause of the failure of the reading head 120 on site without returning to the factory for inspection, thereby shortening the maintenance cycle and reducing the cost.

[0119] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A method for repairing a reading head, characterized in that: include: Acquiring a first parameter of a reading head (120), and judging whether the reading head (120) is damaged according to the first parameter; If the result of the judgment is negative, a second parameter of the reading head (120) is obtained; if the second parameter is less than a first threshold value within the working angle range of the reading head, or the second parameter is less than a second threshold value when the reading head (120) is rotated to an extreme position, it is judged that the reading head (120) is abnormal, and the reading head (120) is debugged until the second parameter reaches a predetermined value or above, and the first threshold value is greater than the second threshold value; otherwise, it is judged that the reading head (120) is normal; If the judgment result is yes, the reading head (120) is replaced and the replaced reading head (120) is debugged until the second parameter reaches a predetermined value or above.

2. The method for repairing a reading head according to claim 1, characterized in that: The step of debugging the reading head (120) until the second parameter reaches a predetermined value or above comprises: The workpiece platform (100) is transferred from the whole machine frame to the frame calibration tool (200), and a first plane grating (220) on the frame calibration tool (200) is used to provide a reference benchmark for the signal of the reading head (120); Debugging the reading head (120) until the second parameter reaches a predetermined value or above; The workpiece table (100) is reset.

3. The method for repairing a reading head according to claim 1, characterized in that: The step of replacing the reading head (120) and debugging the replaced reading head (120) until the second parameter reaches a predetermined value or above comprises: When one or two adjacent reading heads (120) are damaged, the damaged reading heads (120) are replaced first, and then the workpiece table (100) is transferred from the whole machine frame to the frame calibration tool (200), and the first plane grating (220) on the frame calibration tool (200) is used to provide a reference benchmark for the signal of the reading head (120); Debugging the reading head (120) until the second parameter reaches above the predetermined value; The workpiece table (100) is reset.

4. The method for repairing a reading head according to claim 1, characterized in that: The step of replacing the reading head (120) and debugging the replaced reading head (120) until the second parameter reaches a predetermined value or above comprises: When the number of damaged reading heads (120) is three, four or two opposite ones, the damaged reading heads (120) are first removed, and then the workpiece table (100) is transferred to a maintenance station; Installing a reading head calibration tool (300) to the part of the workpiece platform (100) where the reading head (120) is missing; Using a second plane grating (320) on a reading head calibration tool (300) to provide a reference datum for a signal of the reading head (120); Installing and debugging a reading head (120) until the second parameter reaches above the predetermined value; Remove the reading head calibration fixture (300); The workpiece table (100) is reset.

5. The method for repairing a reading head according to claim 4, characterized in that: Between the step of installing the reading head calibration tool (300) to the portion of the workpiece platform (100) where the reading head (120) is missing and the step of using the second plane grating (320) on the reading head calibration tool (300) to provide a reference datum for the signal of the reading head (120), the method further comprises: The position accuracy of the reading head calibration fixture (300) is measured by a three-coordinate measuring machine, and the reading head calibration fixture (300) is adjusted according to the measurement result of the three-coordinate measuring machine until the measurement result of the three-coordinate measuring machine meets the installation requirements.

6. The method for repairing a reading head according to any one of claims 1 to 5, characterized in that: The first parameter is optical power, and the second parameter is a ratio of an alternating current signal to a direct current signal.

7. The method for repairing a reading head according to claim 6, characterized in that: The step of determining that the result is negative includes: the optical power is greater than zero; And / or, the step in which the judgment result is yes includes: the optical power is equal to zero.

8. The method for repairing a reading head according to claim 6, characterized in that: The first threshold is 50%; and / or, the second threshold is 10%; And / or, the predetermined value is greater than 70%, preferably 90%, within the working angle range of the reading head.

9. A frame calibration tool, characterized in that: It comprises a support frame (210) and a first plane grating (220), wherein the first plane grating (220) is mounted on the support frame (210), and the first plane grating (220) is used to cooperate with the upper end surface of a reading head (120) of a workpiece stage (100); The frame calibration tool (200) further comprises a positioning device (230), wherein the positioning device (230) is fixedly connected to the support frame (210), and the positioning device (230) is used to position the workpiece platform (100) in the width direction.

10. The frame calibration tool according to claim 9, characterized in that: The frame calibration tool (200) further comprises a substrate (240), wherein the substrate (240) is mounted on the support frame (210), and the first plane grating (220) is mounted on the substrate (240); And / or, the frame calibration tool (200) further includes a caster (250), and the caster (250) is installed at the bottom of the support frame (210); And / or, the frame calibration tool (200) further includes a height-adjustable foot (260), wherein the foot (260) is installed at the bottom of the support frame (210).

11. A reading head calibration tool, characterized in that: The invention comprises a base (310) and a second plane grating (320), wherein the second plane grating (320) is mounted on the base (310), the base (310) is used to be mounted on a reading head mounting plate (110) of a workpiece stage (100), and the second plane grating (320) is used to be opposite to an upper end surface of a reading head (120) mounted on the reading head mounting plate (110); At least two first adjustment members (330) are installed at the bottom of the base (310), and the first adjustment members (330) are used to abut and cooperate with the reading head mounting disk (110); at least two second adjustment members (350) are installed on the side of the base (310) opposite to the reading head mounting disk (110), and the second adjustment members (350) are used to abut and cooperate with the reading head mounting disk (110).

12. The reading head calibration tool according to claim 11, characterized in that: The base (310) and the reading head mounting plate (110) are connected and fixed via a threaded connection piece; And / or, the reading head calibration tool (300) further includes a limiting column (350), wherein the limiting column (350) is arranged on the base (310), and the limiting column (350) is used to abut against the edge of the reading head mounting plate (110) for limiting.

Images