Intelligent access method for photolithography mask

Abstract

The present invention discloses an intelligent access method for a mask plate of a photolithography machine, comprising the following steps: S1, providing an intelligent access device; S2, placing masks of various specifications in corresponding mask boxes; S3, placing each mask box in a corresponding storage box, and the corresponding relationship is stored through an operation panel; S4, starting an exhaust fan; S5, inputting the specifications of the mask plate to be taken out from the operation panel; S6, the electric control cabinet drives the push mechanism to move to the rear of the storage box; S7, the push mechanism moves to push the storage box out; S8, taking out the mask box in the storage box and closing the storage box. The intelligent access method can access the mask plate better and faster, avoid the adhesion of dust, and avoid misplacing the mask plate.

Description

Technical Field

[0001] The invention relates to an intelligent access method, which is used for intelligently accessing a mask plate of a photolithography machine. Background Art

[0002] A photolithography machine is a semiconductor production equipment. During the photolithography process, a mask is used. Since there are many kinds of patterns for photolithography on wafers, a lot of masks are needed. This leads to a lot of mask specifications. The current storage method of masks is to place them in a mask box. The mask boxes are stacked in one area. When the corresponding mask is needed, the mask box needs to be manually turned over. After finding the corresponding mask box, the mask is taken out for use. This storage method has the following disadvantages: 1. This storage method is more cumbersome when looking for masks of corresponding specifications, and the search time is long; 2. Although the current mask Placed in the mask box, but the mask box is placed in the working space, dust in the space may enter the mask box, and then adhere to the mask, which will affect the accuracy and quality of lithography; 3. The current storage method can cause mistakes when storing the mask. Since there are a lot of mask boxes stacked together, when the mask needs to be put back after use, the worker may take the wrong mask box, so the mask box and the mask do not correspond one to one, so it is difficult to find the next time it is used or the wrong mask is used directly, which will cause a large number of wafers to have graphic errors during lithography, causing very large economic losses. Summary of the invention

[0003] The technical problem to be solved by the present invention is to provide an intelligent access method for a mask of a lithography machine, which can access the mask better and faster, avoid the adhesion of dust, and avoid misplacing the mask.

[0004] In order to solve the above technical problems, the technical solution of the present invention is: an intelligent access method for a mask of a lithography machine, comprising the following steps:

[0005] S1. Preparation

[0006] Provided is an intelligent storage and retrieval device, comprising a cabinet, wherein an upper horizontal partition plate and a lower horizontal partition plate are installed in the cabinet, wherein the upper horizontal partition plate and the lower horizontal partition plate divide the cabinet into an upper cavity, a middle cavity and a lower cavity, wherein a vertical partition plate is installed between the upper horizontal partition plate and the lower horizontal partition plate, wherein the middle cavity is divided into a front cavity and a rear cavity, wherein a plurality of storage boxes for placing mask boxes of corresponding specifications are drawably installed in the front cavity, and wherein the rear cavity is provided with a plurality of storage boxes for placing mask boxes of corresponding specifications. A filter is installed in the cavity, an air inlet is provided on the rear cavity, an electric control cabinet and an exhaust fan are provided on the lower cavity, an air inlet of the exhaust fan is connected to the rear cavity, an air outlet of the exhaust fan is connected to the front cavity, the front cavity is connected to the upper cavity, an exhaust port is provided on the upper cavity, a push mechanism is installed in the front cavity at the front side of the vertical partition plate, the push mechanism moves and pushes any storage box in the front cavity, and an operation panel is provided on the front panel of the cabinet;

[0007] S2, placing masks of various specifications in corresponding mask boxes, each mask box corresponds to a mask of one specification, and numbering the mask boxes;

[0008] S3, numbering the storage boxes, and placing each mask box into the corresponding storage box one by one, and the corresponding relationship is stored through the operation panel;

[0009] S4. The electric control cabinet controls the exhaust fan to start, making the air inside the cabinet clean;

[0010] S5. When a mask of a certain specification needs to be taken out, the specification of the mask to be taken out is input from the operation panel;

[0011] S6, the electric control cabinet drives the push mechanism to move to the rear of the storage box corresponding to the mask of this specification;

[0012] S7, the pushing mechanism is actuated to push the storage box out;

[0013] S8, taking out the mask box in the storage box and closing the storage box.

[0014] Preferably, the storage box is closed by a magnetic suction assembly, and a position detection sensor is provided for detecting whether the storage box is closed in place. If a worker forgets to close the storage box, an alarm is prompted, thus ensuring that the storage box is closed accurately and reliably and avoiding accidents.

[0015] Preferably, the operation panel is also provided with an external barcode scanning device, and the mask box is provided with a barcode, which stores the number information of the mask box. When the worker puts the mask box back, the external barcode scanning device scans the code to obtain the number of the storage box corresponding to the mask box, and the electric control cabinet controls the pushing mechanism to move to the rear of the storage box to push the storage box, and the external barcode scanning device can be used for better and faster access.

[0016] Preferably, each storage box is also equipped with a built-in barcode scanning device for detecting the barcode on the mask box in the storage box. When the mask box is placed in the storage box, the built-in barcode scanning device scans the barcode of the mask box and checks the correspondence between the mask box number obtained by scanning and the storage box number. If the correspondence is wrong, an alarm is issued, and the push mechanism moves to the rear of the storage box to push the storage box out. The built-in barcode scanning device can be used to identify and feedback the mask box in the storage box, further avoiding misplacing the storage box.

[0017] Preferably, the pushing contact between the pushing mechanism and the storage box is elastic contact.

[0018] After adopting the above technical scheme, the effect of the present invention is: the intelligent access method has the following advantages compared with the current storage method: 1. Each mask box is placed in a storage box. When it needs to be taken out, the corresponding storage box can be automatically opened, thus avoiding the search process and reducing the probability of manual search errors; 2. The mask box is stored as a whole in a cabinet, and the cabinet is continuously air-purified to avoid dust adhesion, especially when taking the mask box, the front cavity continuously maintains a positive pressure state, thus preventing external dust from entering the cabinet; 3. The intelligent access method can automatically address and automatically open the storage box, reducing manual participation and avoiding errors due to worker negligence. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0020] Figure 1 is a three-dimensional structural diagram of an embodiment of the present invention;

[0021] Figure 2 is a cross-sectional view of an embodiment of the present invention;

[0022] Figure 3 is an enlarged schematic diagram of an embodiment of the present invention at point A;

[0023] Figure 4 is an enlarged schematic diagram of an embodiment of the present invention at point B;

[0024] Figure 5 It is a front view schematic diagram of the push mechanism;

[0025] In the attached drawings: 1, cabinet; 2, storage box; 3, filter; 4, temperature and humidity sensor; 5, buzzer; 6, fill light; 7, operation panel; 8, external bar code scanning device; 9, label paper; 10, upper horizontal partition plate; 11, lower horizontal partition plate; 12, lower cavity; 13, front cavity; 14, rear cavity; 15, upper cavity; 16, vertical partition plate 16; 17, push mechanism; 171, vertical guide rail; 172, horizontal beam; 173, horizontal slide seat; 174, push force device; 175. Push rod; 1751. Main rod body; 1752. Mounting blind hole; 1753. Compression spring; 1754. Push rod body; 1755. Sealing cap; 1756. Limit block; 18. Mounting plate; 19. Through hole; 20. Magnetic suction assembly; 21. Built-in barcode scanning device; 22. Guide rail assembly; 23. Position detection sensor; 24. Exhaust fan; 25. Electric control cabinet. DETAILED DESCRIPTION

[0026] The present invention is further described in detail below through specific examples.

[0027] like Figures 1 to 5 As shown, a smart access method for a mask plate of a lithography machine comprises the following steps:

[0028] S1. Preparation

[0029] Provided is an intelligent storage and retrieval device, comprising a cabinet 1, wherein an upper horizontal partition plate 10 and a lower horizontal partition plate 11 are installed in the cabinet 1, wherein the upper horizontal partition plate 10 and the lower horizontal partition plate 11 divide the cabinet 1 into an upper cavity 15, an intermediate cavity and a lower cavity 12, wherein a vertical partition plate 16 is installed between the upper horizontal partition plate 10 and the lower horizontal partition plate 11, wherein the vertical partition plate 16 divides the intermediate cavity into a front cavity 13 and a rear cavity 14, wherein a plurality of storage boxes 2 for placing mask boxes of corresponding specifications are drawn out and installed in the front cavity 13, and the rear cavity 14 A filter 3 is installed inside, an air inlet is provided on the rear cavity 14, an electric control cabinet 25 and an exhaust fan 24 are provided on the lower cavity 12, the air inlet of the exhaust fan 24 is connected to the rear cavity 14, the air outlet of the exhaust fan 24 is connected to the front cavity 13, the front cavity 13 is connected to the upper cavity 15, and the upper cavity 15 is provided with an exhaust port, a push mechanism 17 is installed in the front side of the vertical partition plate 16 in the front cavity 13, and the push mechanism 17 moves and pushes any storage box 2 in the front cavity 13, and an operation panel 7 is provided on the front panel of the cabinet 1;

[0030] S2, placing masks of various specifications in corresponding mask boxes, each mask box corresponds to a mask of one specification, and numbering the mask boxes;

[0031] S3, numbering the storage boxes 2, and placing each mask box into the corresponding storage box 2 one by one, and the corresponding relationship is stored through the operation panel 7;

[0032] S4, the electric control cabinet 25 controls the exhaust fan 24 to start, so that the air in the cabinet 1 is clean;

[0033] S5. When a mask of a certain specification needs to be taken out, the specification of the mask to be taken out is input from the operation panel 7;

[0034] S6, the electric control cabinet 25 drives the push mechanism 17 to move to the rear of the storage box 2 corresponding to the mask of this specification;

[0035] S7, the pushing mechanism 17 is actuated to push the storage box 2 out, and the pushing contact between the pushing mechanism 17 and the storage box 2 is elastic;

[0036] S8, taking out the mask box in the storage box 2 and closing the storage box 2.

[0037] Preferably, the storage box 2 is closed by a magnetic suction assembly 20, and a position detection sensor is provided for detecting whether the storage box 2 is closed in place. If a worker forgets to close the storage box 2, an alarm is prompted, thus ensuring that the storage box 2 is closed accurately and reliably and avoiding accidents.

[0038] Preferably, the operation panel 7 is also provided with an external barcode scanning device 8, and the mask box is provided with a barcode, which stores the number information of the mask box. When the worker puts the mask box back, the external barcode scanning device scans the code to obtain the number of the storage box 2 corresponding to the mask box, and the electric control cabinet 25 controls the pushing mechanism 17 to move to the rear of the storage box 2 to push the storage box 2. The external barcode scanning device 8 can be used for better and faster access.

[0039] Preferably, each storage box 2 is also equipped with a built-in barcode scanning device 21 for detecting the barcode on the mask box in the storage box 2. When the mask box is placed in the storage box 2, the built-in barcode scanning device 21 scans the barcode of the mask box, and checks the correspondence between the mask box number obtained by scanning and the storage box 2 number. If the correspondence is wrong, an alarm is issued, and the push mechanism 17 moves to the rear of the storage box 2 to push the storage box 2 out. The built-in barcode scanning device 21 can be used to identify and feedback the mask box in the storage box 2, further avoiding the storage box 2 from being placed in the wrong place.

[0040] The present invention also discloses an intelligent access device for a mask box of a lithography machine that implements the above-mentioned intelligent access method, such as Figures 1 to 5As shown, it includes a cabinet 1, in which an upper horizontal partition plate 10 and a lower horizontal partition plate 11 are installed, and the upper horizontal partition plate 10 and the lower horizontal partition plate 11 divide the cabinet 1 into an upper cavity 15, a middle cavity and a lower cavity 12, and a vertical partition plate 16 is installed between the upper horizontal partition plate 10 and the lower horizontal partition plate 11, and the vertical partition plate 16 divides the middle cavity into a front cavity 13 and a rear cavity 14, and a plurality of storage boxes 2 for placing mask boxes of corresponding specifications are pull-out installed in the front cavity 13, and a filter 3 is installed in the rear cavity 14, and the filter 3 adopts a HEPA filter 3, which has high filtering accuracy and better filtering effect. The rear cavity 14 is provided with an air inlet, the lower cavity 12 is provided with an electric control cabinet 25 and an exhaust fan 24, the air inlet of the exhaust fan 24 is connected to the rear cavity 14, the air outlet of the exhaust fan 24 is connected to the front cavity 13, the front cavity 13 is connected to the upper cavity 15, and the upper cavity 15 is provided with an exhaust port. The flow direction of the entire gas is that the external gas enters the rear cavity 14 and is filtered by the filter 3, and then is discharged through the lower cavity 12, the front cavity 13 and the upper cavity 15 in turn. The upper cavity 15 is provided with a temperature and humidity sensor 4 for detecting the temperature and humidity inside the cavity.

[0041] A pushing mechanism 17 is installed in the front cavity 13 in front of the vertical partition plate 16. The pushing mechanism 17 moves in the front cavity 13 to push any storage box 2. An operation panel 7 is arranged on the front panel of the cabinet 1, and a fill light 6 is arranged above the front panel of the cabinet 1.

[0042] In this embodiment, a plurality of horizontal support plates are installed in the front cavity 13, and the horizontal support plates divide the front cavity 13 into a plurality of placement cavities for placing storage boxes 2. The placement cavities are provided with guide rail assemblies 22, and the storage boxes 2 are installed on the guide rail assemblies 22. A vertical mounting plate 18 is installed in the placement cavity at the rear side of the storage box 2, and a magnetic attraction assembly 20 for magnetically attracting each storage box 2 is fixed on the mounting plate 18. The magnetic attraction assembly 20 is selected according to the material of the storage box 2. In this embodiment, the storage box 2 is made of hard plastic material. Therefore, the magnetic attraction assembly 20 includes a pair of magnets. The mounting plate 18 is also provided with through holes 19 corresponding to the storage boxes 2 one by one for facilitating the passage of the push rod body 1754.

[0043] In this embodiment, the push mechanism 17 includes two vertical guide rails 171 installed between the upper horizontal partition plate 10 and the lower horizontal partition plate 11, and a horizontal beam 172 driven by a lifting power device is installed on the vertical guide rails 171 in a lifting and sliding manner, and the horizontal beam 172 extends in the left and right directions. A horizontal slide 173 driven by a horizontal power device is installed on the horizontal beam 172 in a horizontal sliding manner, and a push rod 175 driven by a push power device 174 is installed on the horizontal slide 173. The lifting power device and the horizontal power device both use linear modules that can be purchased on the market.

[0044] The pushing force device 174 is a cylinder, and the pushing rod 175 includes a main rod body 1751. The tail end of the main rod body 1751 is fixed on the piston rod of the cylinder. The front end of the main rod body 1751 is provided with a mounting blind hole 1752, and a push rod body 1754 is movably installed in the mounting blind hole 1752. The push rod body 1754 is provided with a limit block 1756 in the mounting blind hole 1752, and a compression spring 1753 is pre-pressed between the limit block 1756 and the bottom of the mounting blind hole 1752. A sealing cap 1755 is installed at the front end of the main rod body 1751, and the push rod body 1754 passes through the sealing cap 1755.

[0045] A position detection sensor 23 for detecting whether the storage box 2 is closed in place is also installed in each placement cavity, and a buzzer 5 is arranged outside the cabinet 1, and the buzzer 5 and the position sensor are electrically connected to the electric control cabinet 25. The position sensor is a contact sensor.

[0046] The operation panel 7 is also provided with an external bar code scanning device 8, and the mask box is provided with a bar code, so that the operation panel 7 can be used for operation during access, and the bar code can also be scanned for storage. When storage is needed, it only needs to be scanned by the external bar code scanning device 8, and the electric control cabinet 25 can control the pushing mechanism 17 to move to the rear of the storage box 2 at the specified position, and push the corresponding storage box 2 to open it, which is convenient for storage. Of course, the operation panel 7 can be used for operation when taking it out.

[0047] Each storage box 2 is also equipped with a built-in barcode scanning device 21 for detecting the barcode on the mask box in the storage box 2, and the built-in barcode scanning device 21 is electrically connected to the electric control cabinet 25. The main function of the built-in barcode scanning device 21 is to identify whether the mask box stored in the storage box 2 corresponds to the position of the storage box 2, and an alarm prompt will be issued when it does not correspond.

[0048] The front panel of each storage box 2 is provided with a label paper 9 for reflecting the specifications of the mask box, which is convenient for manual inspection.

[0049] During production, the worker only needs to input the specifications of the mask box that needs to be stored or taken out through the operation panel 7. At this time, the pushing mechanism 17 can move to the corresponding storage box 2 to push out the storage box 2, and then the worker can take out the mask box for use. During the whole process, other mask boxes are still in the storage box 2 and will not interfere with the storage of the mask. In this way, it can be ensured that the mask box and the storage box 2 can correspond one to one when taking and putting back. At the same time, the mask box is placed in the cabinet 1, and the air is sucked by the exhaust fan 24 and filtered through the filter 3, so that the air in the cabinet 1 is clean and dust is prevented from falling on the mask. Of course, in the process of opening the storage box 2, since the front cavity 13 is in a positive pressure state, the clean gas will escape from the front cavity 13, so that the external air is prevented from entering from the opening of the opened storage box 2, and the cleanliness of the internal environment is further ensured.

[0050] The above-described embodiments are merely descriptions of preferred implementations of the present invention and are not intended to limit the scope of the present invention. Various modifications and alterations to the technical solutions of the present invention without departing from the spirit of the present invention should fall within the scope of protection defined by the claims of the present invention.

Claims

1. An intelligent access method for a mask of a lithography machine, characterized in that: The following steps are involved: S1. Preparation Provided is an intelligent storage and retrieval device, comprising a cabinet, wherein an upper horizontal partition plate and a lower horizontal partition plate are installed in the cabinet, wherein the upper horizontal partition plate and the lower horizontal partition plate divide the cabinet into an upper cavity, a middle cavity and a lower cavity, wherein a vertical partition plate is installed between the upper horizontal partition plate and the lower horizontal partition plate, wherein the middle cavity is divided into a front cavity and a rear cavity, wherein a plurality of storage boxes for placing mask boxes of corresponding specifications are drawably installed in the front cavity, and wherein the rear cavity is provided with a plurality of storage boxes for placing mask boxes of corresponding specifications. A filter is installed in the cavity, an air inlet is provided on the rear cavity, an electric control cabinet and an exhaust fan are provided on the lower cavity, an air inlet of the exhaust fan is connected to the rear cavity, an air outlet of the exhaust fan is connected to the front cavity, the front cavity is connected to the upper cavity, an exhaust port is provided on the upper cavity, a push mechanism is installed in the front cavity at the front side of the vertical partition plate, the push mechanism moves and pushes any storage box in the front cavity, and an operation panel is provided on the front panel of the cabinet; S2, placing masks of various specifications in corresponding mask boxes, each mask box corresponds to a mask of one specification, and numbering the mask boxes; S3, numbering the storage boxes, and placing each mask box into the corresponding storage box one by one, and the corresponding relationship is stored through the operation panel; S4. The electric control cabinet controls the exhaust fan to start, making the air inside the cabinet clean; S5. When a mask of a certain specification needs to be taken out, the specification of the mask to be taken out is input from the operation panel; S6, the electric control cabinet drives the push mechanism to move to the rear of the storage box corresponding to the mask of this specification; S7, the pushing mechanism is actuated to push the storage box out; S8, taking out the mask box in the storage box and closing the storage box, the storage box is closed by a magnetic suction component, and a position detection sensor is provided for detecting whether the storage box is closed in place. If the worker forgets to close the storage box, an alarm is prompted; The operation panel is also provided with an external barcode scanning device. The mask box is provided with a barcode, which stores the number information of the mask box. When the worker puts the mask box back, the external barcode scanning device scans the code to obtain the number of the storage box corresponding to the mask box, and the electric control cabinet controls the pushing mechanism to move to the rear of the storage box to push the storage box. Each storage box is also equipped with a built-in barcode scanning device for detecting the barcode on the mask box in the storage box. When the mask box is placed in the storage box, the built-in barcode scanning device scans the barcode of the mask box, and checks the correspondence between the mask box number and the storage box number obtained by scanning. If the correspondence is wrong, an alarm is issued, and the pushing mechanism moves to the rear of the storage box to push the storage box out.

2. The intelligent access method for a photolithography mask according to claim 1, characterized in that: The pushing contact between the pushing mechanism and the storage box is elastic contact.

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