Program-controlled electrode polarity changing device for vacuum plasma cleaning machine

Abstract

The present invention discloses a program-controlled electrode polarity changing device for a vacuum plasma cleaning machine, which relates to the field of vacuum plasma cleaning machines, and includes a main body and two groups of cylinders. The output ends of the two groups of cylinders are respectively fixedly connected with a first connection block and a second connection block. The first connection block and the second connection block are both fixedly provided with a slider on one side, and the two groups of sliders are both slidably connected with a slide rail on one side. The present invention can drive the first electric contact and the second electric contact to adjust the connection position through the two groups of cylinders. When the first electric contact is connected to the first electrode, the second electric contact is connected to the second electrode. Then, under the adjustment of the two groups of cylinders, the first electric contact is connected to the second electrode, and the second electric contact is connected to the first electrode, thereby completing the conversion of the electrodes, effectively avoiding the problem of different cleaning effects of different parts of the workpiece due to the fixed distribution state of the electrodes, greatly improving the efficiency of comprehensive cleaning of the workpiece, and making the workpiece cleaning process more uniform.

Description

Technical Field

[0001] The invention relates to the field of vacuum plasma cleaning machines, in particular to a program-controlled electrode polarity changing device for a vacuum plasma cleaning machine. Background Art

[0002] Plasma cleaning machine, also known as plasma cleaning machine, or plasma surface treatment machine, is a new high-tech technology that uses plasma to achieve effects that conventional cleaning methods cannot achieve. It is usually used for cleaning lead frame IC packaging products before lead bonding and injection molding. The principle is that the gas exposed to the electronic area forms plasma, and the resulting ionized gas and gas composed of released high-energy electrons form plasma or ions. When the ionized gas atoms are accelerated by the electric field, they will release enough force to tightly bond the material with the surface expelling force or etch the surface.

[0003] The vacuum plasma cleaning machines currently used by customers on the market cannot change the existing electrode properties during the cleaning process. If the electrodes are fixed in layout during the cleaning process, it is found that there will be differences in the cleaning effects of different parts of the material during the actual operation. Since the electrode polarity distribution state is unique, the plasma impact area is relatively fixed and has the characteristics of uneven distribution, resulting in uneven cleaning of the cleaned material. Summary of the invention

[0004] Based on this, the purpose of the present invention is to provide a program-controlled electrode polarity changing device for a vacuum plasma cleaning machine to solve the technical problem in the prior art that the electrode polarity distribution state is unique, the plasma influence area is relatively fixed, and has an uneven distribution characteristic, resulting in uneven cleaning of the cleaned material.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solution: a program-controlled electrode polarity changing device for a vacuum plasma cleaning machine, comprising a main body and two groups of cylinders, wherein the output ends of the two groups of cylinders are respectively fixedly connected with a first connecting block and a second connecting block, wherein one side of the first connecting block and the second connecting block are both fixedly provided with a slider, and one side of the two groups of sliders are both slidably connected with a slide rail;

[0006] A first electrode and a second electrode are respectively provided at the top and bottom between the two groups of slide rails, one side of which extends into the interior of the main body; a first electrical contact located between the first electrode and the second electrode is fixedly provided at one end of the first connecting block; and a second electrical contact located outside the first electrode and the second electrode is fixedly provided at one end of the second connecting block.

[0007] By adopting the above technical solution, the first electric contact and the second electric contact can be driven by two groups of cylinders to adjust the connection position. When the first electric contact is connected to the first electrode, the second electric contact is connected to the second electrode. Then, under the adjustment of the two groups of cylinders, the first electric contact is connected to the second electrode, and the second electric contact is connected to the first electrode, thereby completing the electrode conversion. This effectively avoids the problem of different cleaning effects on different parts of the workpiece due to the fixed distribution state of the electrodes, greatly improves the efficiency of comprehensive cleaning of the workpiece, and makes the workpiece cleaning process more uniform.

[0008] The present invention is further configured such that a fixing plate is fixedly provided on one side inside the main body, a first pole piece and a second pole piece connected to the first electrode and the second electrode are alternately provided inside the fixing plate, and a cover plate is fixedly provided on one side of the fixing plate.

[0009] By adopting the above technical solution, the first electrode and the second electrode are used for connection conversion purposes.

[0010] The present invention is further configured such that a plurality of groups of cleaning plates are evenly arranged inside the main body, and a bottom of one side of the plurality of groups of cleaning plates are all provided with connectors which are respectively staggeredly connected with the first pole piece and the second pole piece.

[0011] By adopting the above technical solution, the workpiece can be placed in the partitions between multiple groups of cleaning plates for cleaning.

[0012] The present invention is further configured such that a protective shell located outside the two groups of cylinders is fixedly provided on one side of the main body, and a cover door matching the main body is provided on the side of the main body away from the protective shell.

[0013] By adopting the above technical solution, the protective shell can protect the cylinder, electric contacts and other structures, and the cover door can close the main body.

[0014] To sum up, the present invention mainly has the following beneficial effects: the present invention can drive the first electric contact and the second electric contact to adjust the connection position through two groups of cylinders. When the first electric contact is connected to the first electrode, the second electric contact is connected to the second electrode. Then, under the adjustment of the two groups of cylinders, the first electric contact is connected to the second electrode, and the second electric contact is connected to the first electrode, thereby completing the electrode conversion, effectively avoiding the problem of different cleaning effects on different parts of the workpiece due to the fixed distribution state of the electrodes, greatly improving the efficiency of comprehensive cleaning of the workpiece, and making the workpiece cleaning process more uniform. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 An exploded view of the present invention;

[0016] Figure 2 It is an exploded and enlarged view of the first state of the present invention;

[0017] Figure 3 It is an exploded and enlarged view of the second state of the present invention;

[0018] Figure 4 It is a schematic diagram of the local structure of the present invention.

[0019] In the figure: 1. main body; 2. cylinder; 3. slide rail; 4. slider; 5. first electrode; 6. second electrode; 7. first connecting block; 8. first electrical contact; 9. second connecting block; 10. second electrical contact; 11. fixing plate; 12. first pole piece; 13. second pole piece; 14. cover plate; 15. cleaning plate; 16. connector; 17. cover door; 18. protective shell. DETAILED DESCRIPTION

[0020] The following will be combined with the accompanying drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0021] The following describes an embodiment of the present invention based on its overall structure.

[0022] Vacuum plasma cleaning machine program controlled electrode polarity change device, such as Figure 1 , Figure 2 and Figure 3 As shown, it includes a main body 1 and two groups of cylinders 2, the output ends of the two groups of cylinders 2 are respectively fixedly connected with a first connecting block 7 and a second connecting block 9, one side of the first connecting block 7 and the second connecting block 9 are both fixedly provided with a slider 4, and one side of the two groups of sliders 4 are both slidably connected with a slide rail 3;

[0023] The top and bottom between the two groups of slide rails 3 are respectively provided with a first electrode 5 and a second electrode 6 extending to the inside of the main body 1 on one side, a first connecting block 7 is fixedly provided with a first electrical contact 8 located between the first electrode 5 and the second electrode 6 on one end, a second connecting block 9 is fixedly provided with a second electrical contact 10 located outside the first electrode 5 and the second electrode 6 on one end, a fixing plate 11 is fixedly provided on one side inside the main body 1, a first pole piece 12 and a second pole piece 13 connected to the first electrode 5 and the second electrode 6 are staggeredly provided inside the fixing plate 11, a cover plate 14 is fixedly provided on one side of the fixing plate 11, and a plurality of cleaning plates 15 are evenly provided inside the main body 1, and the plurality of cleaning plates 15 are evenly provided inside the main body 1. 5, a connector 16 is disposed at the bottom of one side thereof and is staggeredly connected with the first pole piece 12 and the second pole piece 13 respectively. The first electric contact 8 and the second electric contact 10 can be driven to adjust the connection position through the two groups of cylinders 2. When the first electric contact 8 is connected to the first electrode 5, the second electric contact 10 is connected to the second electrode 6. Then, under the adjustment of the two groups of cylinders 2, the first electric contact 8 is connected to the second electrode 6, and the second electric contact 10 is connected to the first electrode 5, thereby completing the electrode conversion. This effectively avoids the problem of different cleaning effects of different parts of the workpiece due to the fixed distribution state of the electrodes, greatly improves the efficiency of comprehensive cleaning of the workpiece, and makes the workpiece cleaning process more uniform.

[0024] See also Figure 1 and Figure 4 A protective shell 18 is fixedly provided on one side of the main body 1 and is located outside the two groups of cylinders 2. A cover door 17 that cooperates with the main body 1 is provided on the side of the main body 1 away from the protective shell 18. By setting the above structure, the protective shell 18 protects the cylinder 2, electrical contacts and other structures, and the cover door 17 can close the main body 1.

[0025] The working principle of the present invention is as follows: when in use, the power is turned on, the workpiece to be cleaned is placed in the compartment between the multiple cleaning plates 15 inside the main body 1, the cover door 17 is closed, and the external vacuum pump is started. When the pressure inside the main body 1 reaches the parameter set pressure value, the process gas is injected into the main body 1;

[0026] At the same time, the external plasma power supply is started to perform the first plasma cleaning operation. At this time, when the first electrical contact 8 is connected to the first electrode 5, the second electrical contact 10 is connected to the second electrode 6;

[0027] When the first discharge time set by the parameter is reached, the discharge is stopped, and the two groups of cylinders 2 drive the first electric contact 8 and the second electric contact 10 to adjust the connection position. At this time, the first electric contact 8 is connected to the second electrode 6, and the second electric contact 10 is connected to the first electrode 5. After the position switching is completed, the plasma power supply is started to perform the second plasma cleaning operation;

[0028] After the second discharge time is reached, the process gas and the plasma power supply are turned off, and the cover door 17 is opened to take out the cleaned workpiece;

[0029] The present invention as a whole can drive the first electric contact 8 and the second electric contact 10 to adjust the connection position through two groups of cylinders 2. When the first electric contact 8 is connected to the first electrode 5, the second electric contact 10 is connected to the second electrode 6. Then, under the adjustment of the two groups of cylinders 2, the first electric contact 8 is connected to the second electrode 6, and the second electric contact 10 is connected to the first electrode 5, thereby completing the electrode conversion, effectively avoiding the problem of different cleaning effects on different parts of the workpiece due to the fixed electrode distribution state, greatly improving the efficiency of comprehensive cleaning of the workpiece, and making the workpiece cleaning process more uniform.

[0030] Although an embodiment of the present invention has been shown and described, this specific embodiment is merely an explanation of the present invention and is not a limitation of the invention. The specific features, structures, materials or characteristics described may be combined in a suitable manner in any one or more embodiments or examples. After reading this specification, those skilled in the art may make modifications, substitutions and variations to the embodiments without creative contributions as needed without departing from the principles and purpose of the present invention. However, as long as they are within the scope of the claims of the present invention, they are protected by patent law.

Claims

1. A program-controlled electrode polarity changing device for a vacuum plasma cleaning machine, comprising a main body (1) and two groups of cylinders (2), characterized in that: The output ends of the two groups of cylinders (2) are respectively fixedly connected to a first connection block (7) and a second connection block (9); one side of each of the first connection block (7) and the second connection block (9) is fixedly provided with a slide block (4); one side of each of the two groups of slide blocks (4) is slidably connected to a slide rail (3); A first electrode (5) and a second electrode (6) are respectively arranged at the top and bottom between the two groups of slide rails (3), one side of which extends into the interior of the main body (1); a first electrical contact (8) located between the first electrode (5) and the second electrode (6) is fixedly arranged at one end of the first connection block (7); and a second electrical contact (10) located outside the first electrode (5) and the second electrode (6) is fixedly arranged at one end of the second connection block (9); A fixing plate (11) is fixedly arranged on one side inside the main body (1), a first pole piece (12) and a second pole piece (13) connected to the first electrode (5) and the second electrode (6) are arranged alternately inside the fixing plate (11), and a cover plate (14) is fixedly arranged on one side of the fixing plate (11); A plurality of groups of cleaning plates (15) are evenly arranged inside the main body (1), and a connector (16) which is alternately connected to the first pole piece (12) and the second pole piece (13) is arranged at the bottom of one side of the plurality of groups of cleaning plates (15).

2. The program-controlled electrode polarity changing device for a vacuum plasma cleaning machine according to claim 1, characterized in that: A protective shell (18) located outside the two groups of cylinders (2) is fixedly arranged on one side of the main body (1), and a cover door (17) matching with the main body (1) is arranged on a side of the main body (1) away from the protective shell (18).

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