semiconductor process equipment

Abstract

The present application discloses a semiconductor process equipment, comprising a complete machine support, an upper electrode system, a reaction chamber, a vacuum system, an electrical trolley, and an electrical cabinet, wherein: the upper electrode system, the reaction chamber, and the vacuum system are all arranged on the complete machine support; the electrical trolley comprises a frame, a first support device, and at least two movable devices, and the electrical cabinet is arranged on the frame; one end of the frame is hinged to the complete machine support so that the electrical trolley can rotate and switch between a working position and a stowage position; at least two movable devices are arranged at the bottom of the frame; the complete machine support has a load-bearing platform, the first support device is arranged on the bottom surface of the frame and is located at the hinged side edge of the frame; the end of the first support device facing away from the frame abuts against the top surface of the load-bearing platform, and the first support device can move on the top surface of the load-bearing platform as the electrical trolley rotates. The above solution can optimize the support effect on the bottom of the frame of the electrical trolley.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular to a semiconductor process equipment. Background Art

[0002] Some semiconductor processing equipment, such as etching equipment, requires an electrical trolley. This trolley is a core electrical component of semiconductor processing equipment, enabling electrical control of the equipment. The trolley is a rotating structure that can be rotated between a working position and a stowed position. In the working position, the trolley electrically connects to components such as the reaction chamber and vacuum system. In the stowed position, the trolley clears these components to facilitate maintenance.

[0003] In related art, the electric trolley's frame is supported by casters at one end and pivotally connected to the semiconductor processing equipment's support frame at the other end. With this structural layout, when the trolley is in a dodge position or rotating, a portion of the frame's hinged side becomes suspended. This suspended area can bend and sink under the trolley's own weight, posing a risk of damage. Summary of the Invention

[0004] The present application discloses a semiconductor process equipment to optimize the support effect on the bottom of the frame of an electric vehicle.

[0005] In order to solve the above technical problems, this application adopts the following technical solutions:

[0006] The present application provides a semiconductor process equipment, including a whole machine support, an upper electrode system, a reaction chamber, a vacuum system, an electrical trolley and an electrical cabinet, wherein:

[0007] The upper electrode system, the reaction chamber and the vacuum system are all arranged on the whole machine support;

[0008] The electric trolley comprises a frame, a first supporting device and at least two moving devices, the electrical cabinet is arranged on the frame; one end of the frame is hinged to the whole machine bracket so that the electric trolley can be rotated and switched between a working position and a avoidance position; the at least two moving devices are arranged at the bottom of the frame;

[0009] The whole machine bracket has a load-bearing platform, and the first supporting device is arranged on the bottom surface of the frame and is located at the hinged side edge of the frame; the end of the first supporting device facing away from the frame is in contact with the top surface of the load-bearing platform, and the first supporting device can move on the top surface of the load-bearing platform as the electric trolley rotates.

[0010] The technical solution adopted in this application can achieve the following beneficial effects:

[0011] In the semiconductor process equipment disclosed in the present application, the electric trolley includes a first supporting device arranged on the bottom surface of the frame and at least two movable devices arranged on the bottom of the frame, and the first supporting device is located at the hinged side edge of the frame. Under this structural layout, when the electric trolley is in an avoidance position or in the process of rotation, the frame can obtain support from the hinge part, the first supporting device and the at least two movable devices, so that the frame maintains a state of at least four-point support.

[0012] Compared with related technologies, the semiconductor process equipment of the present application greatly optimizes the support function for the bottom of the electric trolley frame, which can effectively avoid the bending and sinking problem of the frame due to suspension, thereby extending the service life of the electric trolley. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0014] Figure 1 This is a structural diagram of the electric trolley disclosed in an embodiment of the present application when it is in a working position;

[0015] Figure 2 This is a structural diagram of the electric trolley disclosed in an embodiment of the present application when it is in an avoidance position;

[0016] Figure 3 This is a structural schematic diagram of the electric trolley disclosed in an embodiment of the present application in the process of rotation;

[0017] Figure 4 A schematic structural diagram of a vehicle frame disclosed in an embodiment of the present application;

[0018] Figure 5 A schematic structural diagram of a carrier plate disclosed in an embodiment of the present application;

[0019] Figure 6 This is a schematic structural diagram of a second supporting device disclosed in an embodiment of the present application;

[0020] Figure 7 and Figure 8 They are respectively isometric views of the rotating assembly disclosed in the embodiments of the present application at different viewing angles;

[0021] Figure 9 This is a cross-sectional view of the rotating assembly disclosed in an embodiment of the present application.

[0022] Description of reference numerals:

[0023] 100-complete machine bracket, 110-bearing beam, 120-bottom plate, 121-avoidance area, 130-bearing plate, 131-second supporting device, 132-third supporting device, 133-mounting ear, G-accommodating groove,

[0024] 200-electric trolley, 210-frame, 211-hinged portion, 220-first supporting device, 230-moving device,

[0025] 300-rotating assembly, 310-bearing base, 320-rotating shaft, 330-first adapter, 331-first limiting portion, 332-second limiting portion, 340-second adapter, 350-limiting member, 360-bearing end cover, 370-third adapter,

[0026] 400-upper electrode system, 500-reaction chamber, 600-vacuum system, 700-electrical cabinet, etc. DETAILED DESCRIPTION

[0027] To make the purpose, technical solutions, and advantages of this application more clear, the technical solutions of this application will be clearly and completely described below in conjunction with the specific embodiments of this application and the corresponding drawings. Obviously, the embodiments described are only part of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0028] The technical solutions disclosed in various embodiments of the present application are described in detail below with reference to the accompanying drawings.

[0029] In order to solve the problem of bending and sinking of the electric trolley due to the suspended bottom plate in the semiconductor process equipment of the related art, an embodiment of the present application provides a semiconductor process equipment.

[0030] See Figures 1 to 9 The semiconductor process equipment disclosed in the embodiment of the present application includes a whole machine support 100, an upper electrode system 400, a reaction chamber 500, a vacuum system, an electrical trolley 200 and an electrical cabinet 700.

[0031] The complete machine support 100 is the foundational component of the semiconductor process equipment, providing a mounting base for other components. Specifically, the upper electrode system 400, reaction chamber 500, and vacuum system 600 are all mounted on the complete machine support 100. The upper electrode system 400 and reaction chamber 500 can be stacked on the complete machine support 100. Under the reaction chamber 500, the complete machine support 100 defines an installation space within which the vacuum system 600 can be located. This installation space can also be equipped with a cooling system, a dual-zone helium backing system, and the like. Of course, the complete machine support 100 also provides support for the electric trolley 200.

[0032] Reaction chamber 500 provides the process environment and lower radio frequency for semiconductor processing. Wafers undergo processing within reaction chamber 500. Vacuum system 600 evacuates reaction chamber 500 to create a vacuum process environment. Upper electrode system 400 provides process gases and upper radio frequency.

[0033] The electric trolley 200 includes a frame 210, a first support device 220, and at least two moving devices 230. The electrical cabinet 700 is mounted on the frame 210. The electrical cabinet 700 is a core electrical component of the semiconductor process equipment. It can provide power to other components of the semiconductor process equipment and realize signal interaction, thereby realizing electrical control. The electric trolley 200 is generally a rotating structure, which can be rotated and switched between a working position and a avoidance position, such as Figure 1 As shown, the electrical trolley 200 is located in the working position, which is opposite to the reaction chamber 500, the vacuum system 600 and other components, so that the electrical cabinet 700 can be smoothly electrically connected to these components; Figure 2 As shown, the electrical trolley 200 is in the avoidance position, and the electrical trolley 200 avoids the reaction chamber 500, the vacuum system 600 and other components, and the installation space of the whole machine bracket 100 is also completely exposed, so that it is convenient for the staff to perform maintenance operations on the vacuum system 600, the reaction chamber 500 and other components.

[0034] In the embodiment of the present application, one end of the frame 210 is hinged to the whole machine bracket 100 so that the electric trolley 200 can be rotated and switched between the working position and the avoidance position; at least two moving devices are provided at the bottom of the frame 210; the whole machine bracket 100 has a load-bearing platform, and the first support device 220 is provided on the bottom surface of the frame 210 and is located at the hinged side edge of the frame 210; the end of the first support device 220 facing away from the frame 210 is in contact with the top surface of the load-bearing platform, and the first support device 220 can move on the top surface of the load-bearing platform as the electric trolley 200 rotates.

[0035] Specifically, through the rotational cooperation between the frame 210 and the whole machine support 100, the electric trolley 200 and the whole machine support 100 can realize relative rotation, and by rotating the frame 210, the electric trolley 200 can be switched between the working position and the avoidance position. Figure 4 As shown, the bottom of the vehicle frame 210 has a hinge portion 211, which is rotatably matched with the whole machine support 100 through the hinge portion 211. The whole machine support 100 provides support for the vehicle frame 210 through the bearing platform.

[0036] It should be noted that the moving device 230 can provide a certain support for the frame 210. At the same time, when the electric trolley 200 rotates, it can move smoothly on the supporting surface through the moving device 230. Figure 1 As shown, the moving device 230 is a caster, or the moving device 230 can also be a slider assembly.

[0037] In the related art, the caster is provided at the bottom of the frame and is located on the side opposite to the hinge side, and the hinge side of the frame is supported only by the hinge portion. Therefore, when the electric trolley 200 is in the avoidance position, or when the electric trolley 200 is in the process of rotating between the working position and the avoidance position, part of the bottom of the frame will be in a suspended state. For details, please refer to Figure 2 A and Figure 3 At point B.

[0038] In the embodiment of the present application, the first support device 220 is a supplementary support structure that is always in contact with the top surface of the load-bearing platform, that is, it always provides support for the vehicle frame 210. Because the first support device 220 is provided on the bottom surface of the vehicle frame 210 and is located at the edge of the hinge side of the vehicle frame 210, the first support device 220 and the hinge portion 211 jointly provide support on the hinge side of the vehicle frame 210. In other words, the electric trolley 200 of the embodiment of the present application is not supported at a single point on its hinge side, which effectively prevents a portion of the bottom surface of the electric trolley 200 from being suspended in the air.

[0039] like Figure 3 and Figure 4 As shown, under this structural layout, at least two moving devices 230 can form at least two support points, the hinge portion 211 can serve as a support point, and the first support device 220 can serve as a supplementary support point, so that at least four support points can be provided at the bottom of the frame 210. In other words, the solution of the embodiment of the present application can at least have the performance of four-point support. Of course, in the case of multiple first support devices 220, the support points of the electric trolley 200 will increase accordingly, for example, Figure 4 As shown, there are two first supporting devices 220 and there are five supporting points at the bottom of the frame 210 .

[0040] Based on the above analysis, it can be seen that even if the electric trolley 200 has a large weight when loaded with the electrical cabinet 700, the semiconductor process equipment of the embodiment of the present application can provide better support for the electric trolley 200, thereby avoiding the problem of bending and sinking of the frame 210 due to suspension, and extending the service life of the electric trolley 200.

[0041] like Figure 4 As shown, in an embodiment where there are multiple first support devices 220, the first support devices 220 can be arranged in a row along the hinged side edge of the frame 210 along the hinged portion 211 of the frame 210. In this arrangement, the multiple first support devices 220 are equivalent to being arranged radially along a circular ring with the hinged portion 211 as the rotation center. When the electric trolley 200 is rotated, the multiple first support devices 220 are all located on the same linear path. Therefore, it is convenient to uniformly abut all of the first support devices 220 against the top surface of the load-bearing platform, avoiding the situation where some first support devices 220 abut against the top surface of the load-bearing platform while others are located outside the load-bearing platform, thereby improving reliability.

[0042] Among the options, Figure 2 、 Figure 3 and Figure 5 As shown, the whole machine bracket 100 of the embodiment of the present application may include a plurality of second supporting devices 131 , which are arranged on the top surface of the carrying platform, and the second supporting devices 131 are used to support the bottom surface of the frame 210 .

[0043] With this structural layout, the second support device 131 increases the number of support points for the vehicle frame 210, further optimizing the support effect on the vehicle frame 210. Because the second support device 131 is arranged on the top surface of the load-bearing platform, as the electric trolley 200 rotates from the working position to the avoidance position, the bottom surface of the vehicle frame 210 gradually separates from the second support device 131, meaning that the support function provided by the second support device 131 gradually weakens. As the electric trolley 200 rotates from the avoidance position to the working position, the bottom surface of the electric trolley 200 gradually abuts against more second support devices 131, meaning that the support function provided by the second support device 131 gradually strengthens.

[0044] When the electric trolley 200 is in the working position, the bottom surface of the frame 210 is in contact with all the second support devices 131. At this time, the supporting role played by the second support devices 131 is at its maximum, thereby providing a more stable working environment for the electric trolley 200 and ensuring smooth process processing of the semiconductor process equipment.

[0045] Furthermore, if Figure 5As shown, in this embodiment of the present application, multiple second support devices 131 can be arranged in an n×m matrix, where n and m are both positive integers, n being the number of columns in the matrix and m being the number of rows in the matrix. This structural layout allows the second support devices 131 to be evenly distributed on the top surface of the support platform, providing more balanced support for the vehicle frame 210. Furthermore, the matrix arrangement allows for a more regular and standardized distribution of the second support devices 131 on the support platform, making it easier to manufacture and process.

[0046] The embodiment of the present application does not limit the specific distribution of the second supporting device 131. Figure 5 As shown, the second supporting devices 131 may be distributed in a 3×3 matrix form; of course, they may also be distributed in other matrix forms such as 3×4, 5×5, etc.

[0047] In the embodiment of the present application, the specific types of the first supporting device 220 and the second supporting device 131 are not limited. In an optional solution, both can be roller assemblies. In this configuration, the roller assemblies can convert the friction between the bottom surface of the frame 210 and the whole machine support 100 into rolling friction. Compared with sliding friction, rolling friction has lower friction resistance, which can significantly improve the rotation efficiency of the electric trolley 200 and also reduce wear between components.

[0048] like Figure 6 The figure shows the specific structure of the second support device 131 as a roller assembly. The roller assembly may include a base, a roller, and fasteners. The roller rotates within the base, which is mounted on the support platform via fasteners. The roller can be made of SWRM8 low-carbon steel, and the base can be made of SUS304 stainless steel. Of course, other materials can be used for both the roller and the base, and this embodiment of the application does not limit them. More specifically, the roller assembly can be a steel ball roller.

[0049] It should be noted that, in the embodiment where the first supporting device 220 is a roller assembly, the specific structure may also be as follows: Figure 6 As shown, no further details are given here.

[0050] Of course, in the embodiment of the present application, the first supporting device 220 and the second supporting device 131 may be of other types, such as a slider assembly, a magnetic suspension assembly, etc.

[0051] Among the options, Figure 2 and Figure 3As shown, the whole machine bracket 100 of the embodiment of the present application may include two load-bearing beams 110, a base plate 120 and a load-bearing plate 130. The two load-bearing beams 110 are connected to the base plate 120, and the two load-bearing beams 110 are arranged at intervals and in parallel. A receiving groove G is defined between the two load-bearing beams 110 and the base plate 120; the load-bearing plate 130 is positioned and installed in the receiving groove G, and the top surface of the load-bearing plate 130 is coplanar with the top surface of the load-bearing beam 110; the load-bearing plate 130 and the two load-bearing beams 110 form a load-bearing platform, and a plurality of second support devices 131 are arranged on the top surface of the load-bearing plate 130.

[0052] In this structural layout, the load-bearing beam 110 and the load-bearing plate 130 jointly support the vehicle, meaning that the first support device 220 can move on the top surfaces of the load-bearing beam 110 and the load-bearing plate 130. The two load-bearing beams 110 can be positioned at opposite ends of the load-bearing plate 130, enabling quick positioning during installation of the load-bearing plate 130. Furthermore, the restraining effect of the load-bearing beams 110 on the load-bearing plate 130 prevents the second support device 131 from shifting due to friction when it abuts the bottom surface of the vehicle frame 210, thereby enhancing the stability of the internal structure.

[0053] Since the top surface of the supporting plate 130 and the top surface of the supporting beam 110 are coplanar, there is no height difference between the top surfaces of the two, thereby ensuring that the top surface of the supporting platform has better flatness, so that the electric trolley 200 can rotate smoothly.

[0054] like Figure 2 As shown, when the electric trolley 200 is in the avoidance position, the first supporting device 220 abuts against the load-bearing beam 110 located on the hinged side of the whole machine bracket 100. In this case, the hinged side edge of the frame 210 is supported by both its hinged portion 211 and the first supporting device 220, thereby avoiding the problem of the hinged side edge of the frame 210 being suspended and sinking.

[0055] like Figure 5 As shown, mounting ears 133 may be provided at the four corners of the supporting plate 130 , and the supporting plate 130 may be assembled with the two supporting beams 110 through the mounting ears 133 .

[0056] Among the options, Figure 2 and Figure 3 As shown, the base plate 120 of this embodiment of the present application is provided with an escape area 121, and the support plate 130 includes a third support device 132 disposed on its bottom surface. The third support device 132 can contact the support surface through the escape area 121. This arrangement improves the stability of the electric vehicle 200 by supporting the vehicle frame 210 through the third support device 132. The specific type of the third support device 132 is not limited in this embodiment of the present application, and it can be selected from footings, support suction cups, etc.

[0057] At the same time, the embodiments of the present application do not limit the specific number and arrangement of the third support devices 132. For example, there may be four third support devices 132, arranged in a square shape and located at the four corners of the square; or there may be eight third support devices 132, arranged in an inner and outer ring, with five third support devices 132 in the outer ring and three third support devices in the inner and outer rings, and the third support devices 132 in the inner and outer rings are staggered along the circumferential direction. The above-mentioned layout of the third support devices 132 can further improve the support stability of the electric vehicle.

[0058] Among the options, Figure 1 、 Figure 2 、 Figures 7 to 9 As shown, the semiconductor process equipment includes a rotating assembly 300, which includes a bearing base 310, a rotating shaft 320, a first adapter 330, a second adapter 340 and a limit member 350, wherein: the bottom end of the rotating shaft 320 is rotatably engaged with the bearing base 310, the top end of the rotating shaft 320 is rotatably engaged with the first adapter 330, the second adapter 340 is fixedly connected to the rotating shaft 320 and is located between the bearing base 310 and the first adapter 330; among the first adapter 330 and the second adapter 340, one is connected to the whole machine bracket 100, and the other is connected to the frame 210; the limit member 350 is provided on the top surface of the second adapter 340 and is located on the rotation path of the first adapter 330, and the limit member 350 can be limitedly engaged with the first adapter 330 to limit the rotation stroke of the first adapter 330 relative to the second adapter 340.

[0059] In this structural layout, the first adapter 330 and the rotating shaft 320 are able to rotate relative to each other, while the second adapter 340 is fixedly connected to the rotating shaft 320. This means that the two components move in unison, allowing the first adapter 330 to rotate relative to the second adapter 340. Because the entire machine bracket 100 and the vehicle frame 210 are connected to the first adapter 330 and the second adapter 340, respectively, relative rotation between the entire machine bracket 100 and the vehicle frame 210 can be smoothly achieved using the rotating assembly 300.

[0060] Of course, the embodiment of the present application does not limit the specific matching relationship between the internal components of the rotating assembly 300 and the complete machine bracket 100 and the frame 210. Optionally, the first adapter 330 is connected to the frame 210, and the second adapter 340 is connected to the complete machine bracket 100, or the second adapter 340 is connected to the frame 210, and the first adapter 330 is connected to the complete machine bracket 100.

[0061] like Figures 7 to 9As shown, in an embodiment where the first adapter 330 is connected to the vehicle frame 210 and the second adapter 340 is connected to the complete machine bracket 100, the rotating assembly 300 may further include a third adapter 370 connected to the second adapter 340. The second adapter 340 is connected to the complete machine bracket 100 via the third adapter 370. The structural form of the third adapter 370 may be set to a structural form that is compatible with the complete machine bracket 100, and will not be limited by the influence of the cooperation with the rotating shaft 320 and the first adapter 330 like the second adapter 340.

[0062] At the same time, the limit member 350 can cooperate with the first adapter 330 on the top surface of the second adapter 340 to limit the rotational stroke of the frame 210 by limiting the rotational stroke of the first adapter 330 relative to the second adapter 340. This can prevent the rotational stroke of the frame 210 from being too large and interfering with the entire machine bracket 100.

[0063] like Figure 9 As shown, the top end of the rotating shaft 320 and the first adapter 330 can also be rotated together via a bearing, thereby improving rotation efficiency and reducing wear. Furthermore, the rotating assembly 300 can also include a bearing end cap 360 provided on the first adapter 330 to improve the installation reliability of the above-mentioned bearing.

[0064] The embodiments of the present application do not limit the specific rotational range of the frame 210. Since the rotational range of the first adapter 330 can represent the rotational range of the frame 210, in one embodiment, the rotational range of the first adapter 330 relative to the second adapter 340 can be 90°, in which case the rotational range of the frame 210 is 90°. Alternatively, the rotational range of the first adapter 330 relative to the second adapter 340 can be 60°, 100°, 120°, etc., and accordingly, the rotational range of the frame 210 is 60°, 100°, 120°, etc.

[0065] Among the options, Figure 7 and Figure 8 As shown, the first adapter 330 includes a first limiting portion 331 and a second limiting portion 332 arranged on its edge, and the limiting member 350 is located between the first limiting portion 331 and the second limiting portion 332, and is located on the rotation path of the first limiting portion 331 and the second limiting portion 332. The limiting member 350 can be limited and matched with the first limiting portion 331 or the second limiting portion 332.

[0066] Under this structural layout, when the first adapter 330 rotates clockwise, the limit member 350 will cooperate with the second limit portion 332, and when the first adapter 330 rotates counterclockwise, the limit member 350 will cooperate with the first limit portion 331. It can be seen that the first limit portion 331 and the second limit portion 332 define a rotation range in the circumferential direction of the first adapter 330, and this rotation range matches the rotation stroke of the first adapter 330 relative to the second adapter 340.

[0067] For example, the rotational travel of the first adapter 330 relative to the second adapter 340 is 90°. Under this structural layout, the angle between the first limiting portion 331 and the second limiting portion 332 along the circumference of the first adapter 330 can be configured to be 90°, thereby ensuring the aforementioned rotational travel setting.

[0068] The embodiments of the present application do not limit the specific type of the semiconductor process equipment, which may also be etching equipment, plasma immersion ion implantation equipment, etc.

[0069] The above embodiments of this application focus on the differences between the various embodiments. As long as the different optimization features between the various embodiments are not contradictory, they can be combined to form a better embodiment. Considering the simplicity of the text, they will not be repeated here.

[0070] The foregoing is merely an embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various changes and variations. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present application should all be included within the scope of the claims of the present application.

Claims

1. A semiconductor process equipment, characterized in that: It includes the whole machine support, upper electrode system, reaction chamber, vacuum system, electrical trolley and electrical cabinet, including: The upper electrode system, the reaction chamber and the vacuum system are all arranged on the whole machine support; The electric trolley comprises a frame, a first supporting device and at least two movable devices, wherein the electrical cabinet is arranged on the frame; one end of the frame is hinged to the complete machine bracket so that the electric trolley can be rotated and switched between a working position and a avoidance position; the at least two movable devices are arranged at the bottom of the frame, and the movable devices are located on a side of the frame opposite to the hinged side and are used to support the frame; The whole machine bracket has a load-bearing platform, and the first supporting device is arranged on the bottom surface of the frame and is located at the hinged side edge of the frame; the end of the first supporting device facing away from the frame is in contact with the top surface of the load-bearing platform, and the first supporting device can move on the top surface of the load-bearing platform as the electric trolley rotates.

2. The semiconductor process equipment according to claim 1, wherein: There are a plurality of first supporting devices, and the first supporting devices are arranged in a row with respect to the hinged portion of the frame along the hinged side edge of the frame.

3. The semiconductor process equipment according to claim 1, wherein: The whole machine bracket includes a plurality of second supporting devices, which are arranged on the top surface of the bearing platform, and the second supporting devices are used to support the bottom surface of the frame.

4. The semiconductor process equipment according to claim 3, wherein: The plurality of second supporting devices are arranged in an n×m matrix form, wherein n and m are both positive integers, n is the number of columns of the matrix, and m is the number of rows of the matrix.

5. The semiconductor process equipment according to claim 3, wherein: The first supporting device and the second supporting device are both roller assemblies.

6. The semiconductor process equipment according to claim 3, wherein: The whole machine bracket includes two load-bearing beams, a bottom plate and a load-bearing plate, wherein the two load-bearing beams are connected to the bottom plate, the two load-bearing beams are spaced apart and arranged in parallel, and a receiving groove is defined between the two load-bearing beams and the bottom plate; The bearing plate is positioned and installed in the accommodating groove, and the top surface of the bearing plate is coplanar with the top surface of the bearing beam; the bearing plate and the two bearing beams form the bearing platform, and the multiple second supporting devices are arranged on the top surface of the bearing plate.

7. The semiconductor process equipment according to claim 6, wherein: The bottom plate is provided with an avoidance area, and the carrying plate includes a third supporting device provided on the bottom surface thereof, and the third supporting device can contact the supporting surface through the avoidance area.

8. The semiconductor process equipment according to any one of claims 1 to 7, characterized in that: The semiconductor process equipment includes a rotating assembly, which includes a bearing base, a rotating shaft, a first adapter, a second adapter and a limiter, wherein: The bottom end of the rotating shaft is rotatably engaged with the bearing base, the top end of the rotating shaft is rotatably engaged with the first adapter, and the second adapter is fixedly connected to the rotating shaft and is located between the bearing base and the first adapter; Among the first adapter and the second adapter, one is connected to the whole machine bracket, and the other is connected to the vehicle frame; The limiting member is provided on the top surface of the second adapter and is located on the rotation path of the first adapter. The limiting member can cooperate with the first adapter to limit the rotation stroke of the first adapter relative to the second adapter.

9. The semiconductor process equipment according to claim 8, wherein: The rotation stroke of the first adapter relative to the second adapter is 90°.

10. The semiconductor process equipment according to claim 8, wherein: The first adapter includes a first limiting portion and a second limiting portion arranged on its edge. The limiting portion is located between the first limiting portion and the second limiting portion, and is located on the rotation path of the first limiting portion and the second limiting portion. The limiting portion can be limited and cooperated with the first limiting portion or the second limiting portion.

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