An auxiliary positioning mechanism for a material box
By installing an eccentric column on the material box and using the driving component to rotate it, the problem of difficulty in automatically maintaining the gap between the wafer and the material box column in the prior art is solved, and the pick-and-place efficiency and stability of the robot are improved.
Patent Information
- Application Number
- CN202111630115.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2021-12-28
- Publication Date
- 2025-06-24
- Estimated Expiration
- 2041-12-28
AI Technical Summary
During the semiconductor wafer manufacturing and testing process, it is difficult for the prior art to automatically maintain the gap between the wafer and the cartridge cylinder, resulting in the risk of interference and failure when the robot picks up and puts the wafer.
Design an auxiliary positioning mechanism for a material box, including installing an eccentric column on the material box, and rotating the eccentric column by driving components to ensure that an appropriate gap is always maintained between the wafer and the cylinder, so as to facilitate the pick-up and placement operation of the robot.
By automatically adjusting the gap between the wafer and the cylinder, the effective pick-up and release rate of the robot is improved, the risk of manual misoperation is reduced, and the production efficiency and stability are improved.
Smart Images

Figure CN114446848B_ABST
Abstract
Description
Technical Field
[0001] The invention belongs to the technical field of automated manufacturing, and in particular relates to an auxiliary positioning mechanism for a material box. Background Art
[0002] In the process of product production, such as the manufacturing and testing of semiconductor wafers, a material box is usually used as a temporary storage unit, such as Figure 1 As shown, the wafers are placed in layers in the material box through the wafer protection ring, and a column 101 is provided on the side of the material box 10 to prevent the wafers from falling off. The manipulator 20 is provided with two groups of left and right clamping protrusions 21. When the manipulator 20 is used to take out the wafers in the material box 10, the right clamping protrusion 21 reaches the right side of the wafer from above the wafer, and then drops to the side of the wafer. Thereafter, the clamping protrusion 21 on the left side of the manipulator 20 moves to the right under the action of the cylinder, so that the left and right sides of the wafer are both clamped into the clamping protrusion 21. This requires that a certain gap be left between the column 101 and the initial placement position of the wafer. Otherwise, when the left clamping protrusion 21 moves to the right, causing the wafer to move to the right to be clamped into the right clamping protrusion 21, the wafer interferes with the column 101 and cannot move to the right, resulting in the failure of the manipulator 20 to take and place the wafer.
[0003] At present, the placed wafers are generally moved manually, with the wafer being pushed to the left from one side of the column 101 so that the wafer contacts the support block on the left side of the material box 10 on the left side, thereby maintaining a certain gap with the column 101 to facilitate smooth material placement by the robot 20. However, there are risks such as human error in operation, which is not only unstable but also affects efficiency.
[0004] Therefore, it is necessary to provide an auxiliary positioning mechanism that can automatically maintain a gap between the wafer and the cylinder during the placement of the material box. Summary of the invention
[0005] In view of the above-mentioned deficiencies in the prior art, the object of the present invention is to provide an auxiliary positioning mechanism for a material box that can automatically maintain a gap between the wafer and the cylinder during the placement of the material box, thereby ensuring that the robot can effectively take and place the wafer.
[0006] In order to achieve the above-mentioned invention object, the present invention provides the following technical solutions:
[0007] An auxiliary positioning mechanism for a cartridge, comprising a driving assembly and an eccentric column on the cartridge. The cartridge includes a top plate and a bottom plate, and the two ends of the eccentric column are respectively movably connected to the top plate and the bottom plate; the driving assembly is used to drive the eccentric column to rotate so that there is a gap for a manipulator to grab a product between the product in the cartridge and the eccentric column. Since the column is an eccentric structure, the rotation center does not coincide with the center of the column cross-section. Under the action of the driving assembly, it rotates, and the side close to the rotation center on the surface moves towards the product in the cartridge, so that a gap can be generated with the product. The driving assembly can be a linear motion or a rotational motion.
[0008] The driving assembly includes a driving member, a pushing member and a return spring. The driving member drives the pushing member to move. The pushing member touches the eccentric column and pushes the eccentric column to rotate. When the cartridge is placed at a determined position, the pushing member abuts against the eccentric column, so that the eccentric column and the product in the cartridge maintain a gap. The return spring is connected to the pushing member or the eccentric column and is used for the automatic reset of the pushing member or the eccentric column when the cartridge is taken out.
[0009] The driving member is a cylinder. The pushing member is floatingly connected to a hook through a guide post. The hook is connected to the piston rod of the cylinder. The return spring is a compression spring and is sleeved on the guide post. During operation, the cylinder drives the hook to drive the pushing member to move linearly. The pushing member abuts against the eccentric column under the action of the compression spring and pushes the eccentric column to rotate. When the rotation reaches the position, it abuts against the eccentric column to prevent it from moving. During the process of taking out the cartridge, the cylinder moves in the reverse direction, and the pushing block still abuts against the eccentric column under the action of the compression spring, forcing the eccentric column to rotate in the reverse direction.
[0010] The driving member is a cylinder. The pushing member is fixedly connected to a hook. The hook is connected to the piston rod of the cylinder. The return spring is a torsion spring. The torsion spring is sleeved on one end of the eccentric column, and the eccentric column is reset under the action of the torsion spring.
[0011] A limiting block is provided on the top plate. One end of the torsion spring is connected to the top plate by abutting against the limiting block, which is convenient for the installation of the torsion spring.
[0012] The driving member is installed on a positioning seat. The cartridge is placed on the positioning seat. The hook is used to push and clamp the cartridge onto the determined position on the positioning seat. At this time, during the process of the hook pushing the cartridge to the determined position, the pushing member can push the eccentric column to rotate.
[0013] The driving assembly includes a bolt, a connecting rod and a torsion spring. The bolt is longitudinally and movably inserted through the bottom plate, and a bump is provided at the top to prevent the bolt from falling off under its own weight. The connecting rod is slidably arranged on the upper surface of the bottom plate. One end of the connecting rod contacts the bolt, and the other end contacts the eccentric column. The torsion spring is sleeved on one end of the eccentric column. When placing the cartridge, the bolt moves upward, pushing the connecting rod to move linearly and thus pushing the eccentric column to rotate. When removing the cartridge, the eccentric column resets under the action of the torsion spring, pushing the connecting rod to slide back to its original position. During the working process, the upward movement of the bolt is realized by the jacking action of the bottom platform during the placement process of the cartridge. When removing the cartridge, the bolt resets under its own weight.
[0014] The two contact surfaces of the bolt and the connecting rod are opposite inclined surfaces in the longitudinal direction. The contact surface of the connecting rod and the eccentric column is provided with an arc surface, and the corresponding position of the eccentric column is set as an inclined surface. The transmission of motion is gentle and stable throughout the process.
[0015] The bottom plate is provided with a guide block, and the guide block is provided with a chute for accommodating the connecting rod. The connecting rod moves along the chute.
[0016] The eccentric column includes a middle column body and connecting columns on both end faces of the middle column body. The center of the connecting column is offset from the center of the middle column body. The connecting column is installed on the top plate and the bottom plate through bearings. The connecting column and the middle column body can be integral or assembled.
[0017] Compared with the prior art, the beneficial effects of the present invention are as follows: By installing an eccentric column on the cartridge and using the driving assembly to rotate the eccentric column during the placement process of the cartridge, even if the initial placement position of the product contacts the eccentric column, it can maintain a gap with the eccentric column under the rotation action, facilitating the manipulator to pick and place the material. After the cartridge is removed, the eccentric column automatically resets. The driving assembly of the present invention has a simple structure, flexible movement, high stability, reasonably utilizes the driving power or gravity of placing the cartridge, and saves costs. Description of the Drawings
[0018] In order to more clearly illustrate the technical solutions in the specific embodiments of the present invention, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the following described drawings are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.
[0019] Figure 1 It is a schematic structural diagram of a cartridge, a manipulator and an acupoint seat in the prior art;
[0020] Figure 2The front view of the auxiliary positioning mechanism of the cartridge in the first embodiment of the present invention;
[0021] Figure 3 is Figure 2 the sectional view taken along the A-A direction in
[0022] Figure 4 is Figure 3 the enlarged view at B in
[0023] Figure 5 The front view of the auxiliary positioning mechanism of the cartridge in the second embodiment of the present invention;
[0024] Figure 6 is Figure 5 the sectional view taken along the C-C direction in
[0025] Figure 7 is Figure 5 the sectional view taken along the D-D direction in
[0026] Figure 8 The structural schematic diagram of the auxiliary positioning mechanism of the cartridge in the third embodiment of the present invention;
[0027] Figure 9 is Figure 8 the enlarged view at E in
[0028] Figure 10 is Figure 8 the partial front view of the auxiliary positioning mechanism of the cartridge in
[0029] Reference numerals: 10 - cartridge, 100 - wafer, 101 - cylinder, 11 - eccentric column, 12 - top plate, 121 - limit block, 13 - bottom plate, 131 - guide block, 20 - manipulator, 21 - clamping convex column, 30 - acupuncture point seat, 41 - driving member, 42 - pushing member, 421 - hook, 422 - guide post, 43 - return spring, 51 - pin, 511 - convex block, 52 - connecting rod, 53 - torsion spring. Detailed Description of the Invention
[0030] The technical solutions in the specific embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the scope of protection of the present invention.
[0031] Embodiment 1:
[0032] Taking the disc-shaped product wafer as an example, as Figure 1As shown, the wafers 100 are placed in layers in the cassette 10, the cassette 10 is placed on the cavity seat 30, and the manipulator 20 picks and places the wafers 100 by clamping the wafers 100 from both ends through the clamping protrusions 21 on both sides. During the transfer of the cassette 10, the wafer 100 may be tangent to the column 101, and there is no gap between them.
[0033] Combined with Figures 2 - 4 As shown, the auxiliary positioning mechanism of the cassette includes a driving component and an eccentric column 11 on the cassette 10. The cassette 10 includes a top plate 12 and a bottom plate 13. The two ends of the eccentric column 11 are respectively movably connected to the top plate 12 and the bottom plate 13; the driving component is used to drive the eccentric column 11 to rotate so that there is a gap for the manipulator 20 to grab the product between the product in the cassette 10 and the eccentric column 11. The eccentric column 11 includes a middle column body and connecting columns on both end faces of the middle column body. The center of the connecting column deviates from the center of the middle column body. The connecting column is installed on the top plate 12 and the bottom plate 13 through bearings. The connecting column and the middle column body can be integrated or assembled.
[0034] As Figure 2 and Figure 4 As shown, the driving component includes a driving part 41, a pushing part 42 and a return spring 43. The driving part 41 drives the pushing part 42 to move. The pushing part 42 touches the eccentric column 11 and drives the eccentric column 11 to rotate. When the cassette 10 is placed at a determined position on the cavity seat 30, the pushing part 42 abuts against the eccentric column 11, so that there is a gap between the eccentric column 11 and the product in the cassette 10. The driving part 41 is installed on the cavity seat 30, and the hook 421 driven and connected to the driving part 41 pushes and clamps the cassette 10 to the determined position on the cavity seat 30. In this embodiment, the driving part 41 is a cylinder, and the hook 421 is connected to the piston rod of the cylinder. In other embodiments, the driving part 41 can also be other linear motion mechanisms or linear motions converted from rotational motions, such as a rack and pinion, etc. The pushing part 42 is floatingly connected to the hook 421 through a guiding column 422, and the return spring 43 is connected to the pushing part 42. Specifically, the return spring 43 is a compression spring, sleeved on the guiding column 422, and is used for the automatic reset of the eccentric column 11 when the cassette 10 is taken out.
[0035] Working principle:
[0036] The cartridge 10 is placed on the acupoint seat 30 and is pushed to a fixed position on the acupoint seat 30 by the cylinder-driven claw 421. Since the pushing member 42 is floatingly connected to the claw 421 through the guide post 422, the pushing member 42 moves together with the claw 421. During the movement, the return spring 43 ensures that the pushing member 42 is always in contact with the eccentric column 11, driving the eccentric column 11 to rotate around the center of the connecting column. The middle column moves away from the product. Even if the original product is tangent to the eccentric column 11, a gap is generated due to the movement of the eccentric column 11, facilitating the manipulator 20 to grasp the product. When the cartridge 10 is taken out, the claw 421 moves in the reverse direction, driving the eccentric column 11 back to the initial position. The contour of the contact surface between the pushing member 42 and the eccentric column 11 is determined by the moving displacement of the eccentric column 11.
[0037] Embodiment Two:
[0038] Figures 5 - 7 This is the view of the auxiliary positioning mechanism of the cartridge in this embodiment. The difference between Embodiment Two and Embodiment One is that, as Figure 6 shown, the pushing member 42 is fixedly connected to the claw 421 and moves together under the action of the driving member 41; as Figure 7 shown, the return spring 43 is a torsion spring. The torsion spring is sleeved on one end of the eccentric column 11, which is the top end in this embodiment. One end of the torsion spring is connected to the end of the eccentric column 11, and the other end is connected to the top plate 12 for the reset of the eccentric column 11. Specifically, receiving holes can be provided on the axis of the eccentric column 11 and the top plate 12, and the two ends of the torsion spring are respectively placed in the receiving holes. In this embodiment, a limiting block 121 is provided on the top plate 12. One end of the torsion spring abuts against the limiting block 121. In the natural state of the torsion spring, the end of the eccentric column 11 away from the rotation axis is close to the product in the cartridge 10.
[0039] Working Principle:
[0040] The cartridge 10 is placed on the acupoint seat 30 and is pushed to a fixed position on the acupoint seat 30 by the cylinder-driven claw 421. Since the pushing member 42 is fixedly connected to the claw 421, the pushing member 42 moves together with the claw 421. During the movement, the pushing member 42 drives the eccentric column 11 to rotate around the center of the connecting column. The middle column moves away from the product. Even if the original product is tangent to the eccentric column 11, a gap is generated due to the movement of the eccentric column 11, facilitating the manipulator 20 to grasp the product. When the cartridge 10 is taken out, the claw 421 moves in the reverse direction, and the eccentric column 11 returns to the initial position under the action of the torsion spring. The contour of the contact surface between the pushing member 42 and the eccentric column 11 is determined by the moving displacement of the eccentric column 11.
[0041] Embodiment Three:
[0042] Combined Figures 8 - 10 As shown, the auxiliary positioning mechanism of the cartridge in this embodiment includes a driving component and an eccentric column 11 on the cartridge 10. The cartridge 10 includes a top plate 12 and a bottom plate 13. The two ends of the eccentric column 11 are respectively movably connected to the top plate 12 and the bottom plate 13. The driving component is used to drive the eccentric column 11 to rotate so that there is a gap for the manipulator 20 to grasp the product between the product in the cartridge 10 and the eccentric column 11. The eccentric column 11 includes a middle column body and connecting columns on the two end faces of the middle column body. The center of the connecting column is offset from the center of the middle column body. The connecting column is installed on the top plate 12 and the bottom plate 13 through bearings. The connecting column and the middle column body can be integral or assembled.
[0043] As Figure 9 and Figure 10 shown, the driving component includes a plug pin 51, a connecting rod 52 and a torsion spring 53. The plug pin 51 is longitudinally movably inserted through the bottom plate 13, and a convex block 511 for preventing the plug pin 51 from falling off under its own weight is provided at the top. The connecting rod 52 is slidably arranged on the upper surface of the bottom plate 13. One end of the connecting rod 52 touches the plug pin 51, and the other end touches the eccentric column 11. In this embodiment, the torsion spring 53 is sleeved on the lower end of the eccentric column 11. One end of the torsion spring 53 is connected to the end of the eccentric column 11, and the other end is connected to the top plate 12. In another embodiment, the torsion spring 53 can also be installed at the lower end of the eccentric column 11. When the cartridge 10 is placed, the plug pin 51 moves upward, pushing the connecting rod 52 to move linearly and thus pushing the eccentric column 11 to rotate. When the cartridge 10 is taken out, the eccentric column 11 is reset under the action of the torsion spring 53, pushing the connecting rod 52 to slide back to its original position.
[0044] The two contact surfaces of the plug pin 51 and the connecting rod 52 are opposite inclined surfaces in the longitudinal direction. The contact surface of the connecting rod 52 and the eccentric column 11 is provided with an arc surface, and the corresponding position of the eccentric column 11 is set as an inclined surface. In this embodiment, a guiding block 131 is provided on the bottom plate 13, and a sliding groove for accommodating the connecting rod 52 is provided on the guiding block 131. The connecting rod 52 moves along the sliding groove. In another embodiment, elements such as slide rails can also be used as guides.
[0045] Working principle:
[0046] When the cartridge 10 is to be placed on the acupoint seat 30 or other plane, during the downward placement of the cartridge 10, the acupoint seat 30 or other plane pushes the latch 51 upward, causing the connecting rod 52 to move along the chute towards the eccentric column 11, thereby pushing the eccentric column 11 to rotate around the center of the connecting column, and the middle column body moves away from the product. Even if the original product is tangent to the eccentric column 11, a gap is generated due to the movement of the eccentric column 11, facilitating the manipulator 20 to grasp the product. When the cartridge 10 is taken out, the latch 51 resets under the action of its own weight, and the eccentric column 11 rotates reversely under the action of the torsion spring 53. Since the connecting rod 52 is no longer squeezed by the latch 51, it will reset under the squeezing action of the eccentric column 11.
[0047] The above-mentioned first embodiment and the second embodiment are preferably applicable to the case where the acupoint seat 30 is provided with the claw 421, and the third embodiment is preferably applicable to the case where there is no other driving member during the placement of the cartridge 10.
[0048] The above has introduced in detail the auxiliary positioning mechanism of the cartridge provided by the present invention. Specific examples are used in this article to elaborate on the structure and working principle of the present invention. The description of the above embodiments is only used to help understand the method and core idea of the present invention. It should be noted that for those of ordinary skill in the art of this technology, without departing from the principle of the present invention, several improvements and modifications can still be made to the present invention, and these improvements and modifications also fall within the scope of protection of the claims of the present invention.
Claims
1. An auxiliary positioning mechanism for a material box, characterized in that, It includes a driving component and an eccentric column (11) on the cartridge (10). The cartridge (10) includes a top plate (12) and a bottom plate (13). The two ends of the eccentric column (11) are respectively movably connected to the top plate (12) and the bottom plate (13). The driving component is used to drive the eccentric column (11) to rotate so that there is a gap for the manipulator to grab the product between the product in the cartridge (10) and the eccentric column. The driving component includes a pin (51), a connecting rod (52) and a torsion spring (53). The pin (51) is longitudinally movably inserted through the bottom plate (13), and a convex block (511) for preventing the pin (51) from falling off under its own weight is provided at the top. The connecting rod (52) is slidably arranged on the upper surface of the bottom plate (13). One end of the connecting rod (52) is in contact with the pin (51), and the other end is in contact with the eccentric column (11). The torsion spring (53) is sleeved on one end of the eccentric column (11). When the cartridge (10) is placed, the pin (51) moves upward, pushing the connecting rod (52) to move linearly and thus pushing the eccentric column (11) to rotate. When the cartridge (10) is taken out, the eccentric column (11) is reset under the action of the torsion spring (53), pushing the connecting rod (52) to slide back to its original position. The two contact surfaces of the pin (51) and the connecting rod (52) are opposite inclined surfaces in the longitudinal direction. The contact surface between the connecting rod (52) and the eccentric column (11) is provided with an arc surface, and the corresponding position of the eccentric column (11) is set as an inclined surface. A guide block (131) is provided on the bottom plate (13), and a chute for accommodating the connecting rod (52) is provided on the guide block (131). The connecting rod (52) moves along the chute.
2. The auxiliary positioning mechanism of the material box according to claim 1, characterized in that, The eccentric column (11) includes a middle column body and connecting columns on both end faces of the middle column body. The centers of the connecting columns are offset from the center of the middle column body. The connecting columns are installed on the top plate (12) and the bottom plate (13) through bearings.
Citation Information
Patent Citations
Substrate holding device and substrate processing apparatus
CN112103237A
13-groove insert storage tool
CN214898357U