A vertical multi-phase inductor and a manufacturing method thereof

By alternately stacking the misaligned first and second coils in the magnetic body, and adjusting the inductance amount and coupling coefficient using the interlayer, the high integration and electrical performance consistency of multiphase inductors are achieved, which solves the problem of large space occupancy of traditional inductors and promotes the miniaturization of electrical components.

CN114496518BActive Publication Date: 2025-08-08SHENZHEN SUNLORD ELECTRONICS
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Patent Information

Application Number
CN202111623304.X
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2021-12-28
Publication Date
2025-08-08
Estimated Expiration
2041-12-28

AI Technical Summary

Technical Problem

Traditional inductors are independent components, which leads to the circuit where multiple driver chips are located to require multiple inductors, which is high cost and occupies a large space for PCB circuits, which is not conducive to the miniaturization of electrical components.

Method used

Using a vertical multiphase inductor, multiple inductors are integrated into one inductor. The first and second coils are arranged alternately stacked in the magnetic body, and the inductance amount and coupling coefficient are adjusted through misalignment settings and interlayers to achieve consistency of inductance parameters.

Benefits of technology

It reduces the space occupied by PCB circuits, improves the degree of integration of inductors, ensures the consistency of signal stability and electrical performance, and is conducive to the miniaturization design of electrical components.

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Abstract

The present application discloses a vertical multi-phase inductor and a manufacturing method thereof. The vertical multi-phase inductor includes a magnetic body and a plurality of first coils and a plurality of second coils. The plurality of first coils and the plurality of second coils are stacked and spaced apart in the magnetic body along a second direction, and a second coil is arranged between two adjacent first coils along the second direction, and the orthographic projection of the first coil falls within the orthographic projection of the second coil. The present application can integrate multiple inductors into a multi-phase inductor, and the electrical parameters of the multi-phase inductor, such as inductance L, RDC, and coupling coefficient K, have high consistency. The high electrical performance consistency can maintain signal stability during circuit operation and can also reduce the occupied PCB circuit space.
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Description

Technical Field

[0001] The present application relates to the technical field of electromagnetic components, and in particular to a vertical multi-phase inductor and a manufacturing method thereof. Background Art

[0002] Traditional inductors are typically standalone components, commonly known as single-phase inductors. A single packaged inductor can only operate in the circuit containing a single driver chip. If circuits containing multiple driver chips are required, multiple independent inductors are required. This is not only costly but also occupies a large amount of PCB (Printed Circuit Board) space, hindering the miniaturization of electrical components. Summary of the Invention

[0003] The embodiments of the present application provide a vertical multi-phase inductor and a manufacturing method thereof, which can integrate multiple inductors into one multi-phase inductor, thereby reducing the occupied PCB circuit space.

[0004] In a first aspect, an embodiment of the present application provides a vertical multi-phase inductor, comprising a magnetic body and a plurality of first coils and a plurality of second coils. The plurality of first coils and the plurality of second coils are stacked and spaced apart in the magnetic body along a second direction, and a second coil is arranged between two adjacent first coils along the second direction, and an orthographic projection of the first coil falls within the orthographic projection of the second coil.

[0005] Optionally, two adjacent first coils may form an original coil connected end to end, and / or two adjacent second coils may form an original coil connected end to end.

[0006] Optionally, along the axis where the first direction is located, two adjacent first coils may be symmetrically arranged, and / or, two adjacent second coils may be symmetrically arranged, and the first direction and the second direction are perpendicular to each other.

[0007] Optionally, the multi-phase inductor includes a plurality of first solder pads and second solder pads exposed to the magnetic body, and each first coil is connected to a first solder pad at both ends to serve as the input and output ends of the first coil; each second coil is connected to a second solder pad at both ends to serve as the input and output ends of the second coil; the two first solder pads of the first coil are located between the two second solder pads of the second coil.

[0008] Optionally, along the first direction, a distance between the first pad and the second pad is W, and 0.3 mm ≤ W ≤ 0.4 mm.

[0009] Optionally, the magnetic permeability of the vertical multi-phase inductor is 50H / m≥μ≥5H / m, and the vertical multi-phase inductor further includes an interlayer, which is arranged in the magnetic body and located between adjacent first coils and second coils.

[0010] Optionally, the magnetic permeability of the interlayer is μ1, and when the temperature is above 25° C., μ1<20%*μ.

[0011] Optionally, the thickness of the interlayer is D, and 0.5 mm ≤ D ≤ 1.2 mm.

[0012] In a second aspect, an embodiment of the present application provides a method for manufacturing a vertical multi-phase inductor, comprising:

[0013] Printing to form a plurality of first coils and a plurality of second coils;

[0014] A plurality of first coils and a plurality of second coils are stacked and spaced apart in a magnetic body along a second direction, and a second coil is arranged between two adjacent first coils along the second direction, and the orthographic projection of the first coil falls within the orthographic projection of the second coil.

[0015] Optionally, printing and forming a plurality of first coils and a plurality of second coils comprises:

[0016] Printing to form at least one original coil connected end to end;

[0017] The original coil is cut along an axis where a first direction is located to form at least two first coils and / or at least two second coils, and the first direction is perpendicular to the second direction.

[0018] As described above, in the embodiment of the present application, a plurality of first coils and second coils are alternately stacked and spaced along the second direction in a magnetic body, and an inductor is formed by each coil in the magnetic body, so that the plurality of inductors can be integrated into a multi-phase inductor, with a high degree of integration, reducing the occupied PCB circuit space, and being conducive to the miniaturization design of electrical components; and the orthographic projection of the first coil falls within the orthographic projection of the second coil, which is equivalent to staggering the two adjacent coils, and the mutual inductance between the inductors can be adjusted by adjusting the overlapping area of the upper and lower adjacent coils (i.e., the overlapping area of the orthographic projections of the two coils along the second direction y); of course, by adjusting other designs of each coil, such as the coil size, etc., the electrical parameters of the multi-phase inductor, such as the inductance L, RDC, and coupling coefficient K, can be made more consistent, and its higher electrical performance consistency can maintain signal stability during circuit operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 Schematic diagram of the structure of a multi-phase inductor according to an embodiment of the present application;

[0020] Figure 2 A schematic diagram of a printed coil according to an embodiment of the present application;

[0021] Figure 3 A schematic diagram of printing and forming a coil according to another embodiment of the present application;

[0022] Figure 4 This is a schematic structural diagram of a solder pad according to an embodiment of the present application;

[0023] Figure 5 A schematic structural diagram of a multi-phase inductor according to another embodiment of the present application;

[0024] Figure 6 1 is a flow chart of a method for manufacturing a multi-phase inductor according to an embodiment of the present application;

[0025] Figure 7 FIG. 1 is a flow chart of a method for manufacturing a multi-phase inductor according to another embodiment of the present application. DETAILED DESCRIPTION

[0026] To make the objectives, technical solutions, and advantages of this application more clear, the technical solutions of this application will be clearly described below in conjunction with specific embodiments and corresponding drawings. Obviously, the embodiments described below are only some of the embodiments of this application, not all of them. Unless there is a conflict, the following embodiments and their technical features can be combined with each other and also belong to the technical solutions of this application.

[0027] It should be understood that in the description of the embodiments of the present application, the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the technical solutions and simplified descriptions of the corresponding embodiments of the present application, and do not indicate or imply that the device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0028] Figure 1 FIG. 1 is a schematic diagram of the structure of a multi-phase inductor according to an embodiment of the present application. Figure 1 As shown, the vertical multi-phase inductor 1 includes a magnetic body 10, a plurality of first coils 21, and a plurality of second coils 22. The plurality of first coils 21 and the plurality of second coils 22 are stacked and spaced apart within the magnetic body along the second direction y. A second coil 22 is disposed between two adjacent first coils 21, or in other words, a first coil 21 is disposed between two adjacent second coils 22. In other words, the first coils 21 and the second coils 22 are alternately disposed, and the orthographic projection of the first coil 21 falls within the orthographic projection of the second coil 22.

[0029] The so-called stacking spacing setting can be understood as follows: among the plurality of first coils 21 and the plurality of second coils 22, any single coil is located on the same plane layer, and the distance between the first coil 21 and the second coil 22 adjacent to each other in the second direction y is greater than zero, that is, Figure 1 In the illustrated scenario, the material of the magnetic body 10 is disposed between the first coil 21 and the second coil 22 adjacent to each other.

[0030] Along the second direction y, the orthographic projection of the first coil 21 falls within the orthographic projection of the second coil 22, which is equivalent to staggering the upper and lower adjacent first coils 21 and second coils 22. The so-called staggered setting can be understood as: when viewed along the second direction y, the orthographic projections of the upper and lower adjacent first coils 21 and second coils 22 do not completely overlap. Figure 1 In the illustrated scenario, both ends of the orthographic projection of the first coil 21 (which may be regarded as the input end and the output end) fall within the orthographic projection of the second coil 22 .

[0031] Each coil in the magnetic body 10 forms an inductor, such as Figure 1 As shown, six inductors are formed by six coils, so that multiple inductors can be integrated into a vertical multi-phase inductor 1, reducing the occupied PCB circuit space and facilitating the miniaturization design of electrical components.

[0032] The shape of the vertical multi-phase inductor 1 is not limited in the present embodiment, and can be, for example, Figure 1 It should be noted that for the sake of intuitive display, Figure 1 FIG. 2 shows how the first coil 21 and the second coil 22 are arranged in the magnetic body 10 . However, it should be understood that in actual scenarios, the magnetic body 10 may be non-transparent and the user cannot see the coils.

[0033] The size of the vertical multi-phase inductor 1 is not limited in this embodiment. Figure 1 Taking the rectangular vertical multiphase inductor 1 shown in FIG. as an example, the vertical multiphase inductor 1 (i.e., along Figure 1 The length of the first direction x shown in FIG) is 3.0 mm, the height (i.e., the length along the first direction x) is 3.0 mm, and the height (i.e., the length along the first direction x) is 3.0 mm. Figure 1 The length of the second direction y shown is 2.2 mm, the thickness (i.e., the length of the second direction y shown in FIG. Figure 1 The first direction x, the second direction y, and the third direction z are perpendicular to each other and can be regarded as three coordinate axes of a three-dimensional rectangular coordinate system.

[0034] The magnetic body 10 can be made of a material with relatively high magnetic permeability. For example, the material of the magnetic body 10 includes at least one of ferrite, iron-nickel alloy, amorphous alloy, nanocrystalline alloy, and the like.

[0035] It should be understood that the number of first coils 21 and second coils 22 can be determined based on actual adaptability, and is not limited in the present embodiment. The three first coils 21 and three second coils 22 shown in the figures are merely exemplary.

[0036] Optionally, any two first coils 21 can form an original coil connected end to end, and any two second coils 22 can form an original coil connected end to end. Figure 1 and Figure 2 The mth coil and the m+2th coil can form an original coil 20a connected end to end. The mth coil and the m+2th coil can both be the first coil 21 or the second coil 22. The original coil 20a that can be connected end to end in this article does not mean that the mth coil and the m+2th coil form an original coil 20a connected end to end in the magnetic body 10, but that these two coils can be placed in different positions to form an original coil 20a connected end to end. Figure 2 As shown, a primary coil 20a connected end to end is formed on a substrate through a printing process; along the axis O where the first direction x is located x The original coil 20a is cut to obtain the mth coil and the m+2th coil. The one-time printing process for forming the original coil 20a can be implemented by a process including but not limited to a dry printing process.

[0037] Of course, if Figure 3 As shown, the embodiment of the present application can also form two (or more) original coils 20a arranged along the first direction x through a single printing process, along the axis O where the first direction x is located. x , multiple first coils 21 or second coils 22 are obtained through a single cutting process.

[0038] In other embodiments, any two first coils 21 may be configured to form an original coil 20a connected end to end, and a single printing process and a single cutting process may be used to obtain multiple first coils 21. Alternatively, any two first coils 21 and second coils 22 may be configured to form an original coil 20a connected end to end, and a single printing process and a single cutting process may be used to obtain multiple second coils 22.

[0039] The base substrate can be made of the same material as the magnetic body 10 . The cut base substrate and the coil thereon can be directly placed on the corresponding layer to facilitate combination with the magnetic body 10 .

[0040] Further optionally, along the axis O where the first direction x is located x , two adjacent first coils 21 can be symmetrically arranged, and / or, two adjacent second coils 22 can be symmetrically arranged. The so-called symmetrical arrangement herein does not mean that the mth coil and the m+2th coil are symmetrically arranged in the magnetic body 10, but that the two coils can be arranged in a symmetrical manner along the axis O where the first direction x is located by changing their placement. xSymmetrical arrangement: Here, the structures of the mth coil and the m+2th coil are exactly the same, which is more conducive to manufacturing, and the coil sizes are consistent, which is conducive to maintaining the consistency of the RDC (direct current resistance) of the inductance of each phase.

[0041] The shapes of the first coil 21 and the second coil 22 can be determined according to actual needs and are not limited in the present embodiment. For example, they can be Figure 2 or Figure 3 U-shape shown.

[0042] Optionally, the vertical multi-phase inductor 1 includes a plurality of pads exposed on the magnetic body 10, namely a first pad 21a and a second pad 21b. The pads are connected to the coil and can be regarded as the lead-out electrodes of the coil, which are used to electrically connect the coil to the external circuit, thereby electrically connecting the corresponding inductor to the external circuit. Figure 1 、 Figure 4 and Figure 5 The two ends of each first coil 21 are respectively connected to a first soldering pad 21a to serve as the input and output ends of the first coil 21; the two ends of each second coil 22 are respectively connected to a second soldering pad 21b to serve as the input and output ends of the second coil 22; the two first soldering pads 21a of the first coil 21 are located between the two second soldering pads 21b of the second coil 22.

[0043] Based on the arrangement of the above multiple coils, please refer to Figure 1 、 Figure 4 and Figure 5 As shown, the first end and the second end of each coil are arranged opposite to each other along the first direction x, and the two first pads 21 a of the first coil 21 are located between the two second pads 21 b of the second coil 22 along the first direction x.

[0044] In some scenarios, these pads can be the same, which is conducive to modular design and manufacturing. The size of each pad can be determined according to the actual adaptability required, and is not limited in the embodiments of the present application. For example, when the length, width and height of the vertical multi-phase inductor 1 are 3.0mm*2.2mm*1.4mm respectively, the width of a single pad (i.e., the dimension along the second direction y) is 0.3mm, and the length (i.e., the dimension along the first direction x) is 0.4mm; optionally, the distance W between the first pad 21a and the second pad 21b satisfies 0.3mm≤W≤0.4mm, preferably 0.38mm. By controlling the distance threshold, the overlapping area of the first coil 21 and the second coil 22 can be adjusted, so that the mutual inductance between the phase inductors is reduced and within a preset range. Optionally, the material of the single pad can be a high-conductivity metal material such as silver or copper.

[0045] In the embodiment of the present application, multiple coils are staggered, and the mutual inductance between the inductors can be adjusted by adjusting the overlapping area of two adjacent coils (i.e., the overlapping area of the orthographic projections of the two coils along the second direction y). For example, in a scenario where the magnetic permeability μ of the vertical multi-phase inductor 1 (magnetic body 10) is less than 10H / m, the overlapping area between the upper and lower adjacent coils can be reduced so that the inductance L and the coupling coefficient k both meet a predetermined deviation range, such as a deviation range of ±10%.

[0046] When the magnetic permeability of the vertical multi-phase inductor 1 is 50H / m≥μ≥5H / m, since the multi-phase inductances L have a greater influence on each other, the embodiment of the present application can adjust the size of each coil, for example, increase the size of the coil, to reduce the mutual inductance between the inductors; or, do not adjust the size of each coil, such as Figure 5 As shown, an interlayer 40 is provided in the magnetic body 10. The interlayer 40 is located between two adjacent coils. The interlayer 40 is isolated by the interlayer 40 to reduce the mutual inductance between the inductors, thereby reducing the coupling coefficient k of the vertical multi-phase inductor 1, which is conducive to stabilizing the consistency of the vertical multi-phase inductor 1 within a predetermined deviation range. Further, optionally, the interlayer 40 is also provided on opposite sides of the magnetic body 10 along the second direction y, for example Figure 1 and Figure 5 In the orientation shown, the inductors are arranged on the upper and lower side surfaces of the magnetic body 10, which can also reduce the mutual inductance between the inductors.

[0047] The magnetic permeability of the interlayer 40 is μ1. At room temperature (e.g., 25°C) or above, the magnetic permeability μ1 is less than 20%*μ. The material of the interlayer 40 can be at least one of resin, ceramic, glass, and a magnetic material with a Curie temperature below room temperature. In some scenarios, the interlayer 40 can be considered a non-magnetic layer with a magnetic permeability μ1 less than 1 H / m. Optionally, each edge of the interlayer 40 is exposed on the corresponding side of the vertical multi-phase inductor 1.

[0048] The following describes the consistency of inductance L for vertical multiphase inductors 1 with different magnetic permeabilities. The inductance L values are measured at a frequency of 50 MHz. Please refer to Table 1 below.

[0049]

[0050] Table 1

[0051] The inductors L1 to L6 can be regarded as the inductors formed by the six coils shown along the second direction y. The scheme 1# and the scheme 2# can be regarded as Figure 1 The vertical multi-phase inductor 1 of the embodiment shown, Scheme 3# can be regarded as Figure 5 The vertical multi-phase inductor 1 of the illustrated embodiment is provided with an interlayer 40 .

[0052] As shown in Table 1, combining Scheme 1# and Scheme 3#, it can be seen that providing interlayer 40 reduces the inductance L of each inductor, and the consistency of the inductance L of each inductor is high. Combining Scheme 1# and Scheme 2#, it can be seen that increasing the magnetic permeability μ of the material of magnetic body 10 increases the inductance L of each inductor. Although the consistency of the inductance L of each inductor is also increased, the increase is small, and the consistency of the inductance L can also be achieved at a high level.

[0053] In addition, it should be noted that adjusting the thickness and magnetic permeability μ1 corresponding to the interlayer 40 can also reduce the inductance L of each inductor and the coupling coefficient K of each inductor. For example, the thickness D of the interlayer 40 can satisfy 0.5mm≤D≤1.2mm, thereby making the inductance L of each inductor more consistent and the coupling coefficient K more consistent.

[0054] The present application also provides a method for manufacturing a multi-phase inductor, which can be used to manufacture the vertical multi-phase inductor 1. Figure 6 As shown, the manufacturing method includes the following steps S11 and S12.

[0055] S11: Printing to form a plurality of first coils and a plurality of second coils.

[0056] S12: stacking and spacing a plurality of first coils and a plurality of second coils in a magnetic body along a second direction, and disposing a second coil between two adjacent first coils along the second direction, with the orthographic projection of the first coil falling within the orthographic projection of the second coil.

[0057] Optionally, in step S11, the first coil and the second coil may be formed by combining Figure 2 and Figure 3 As shown, printing forms at least one original coil 20a connected end to end; along the axis O where the first direction x is located x The original coil 20a is cut to form at least two coils, and the at least two coils are both first coils or both second coils.

[0058] This method can produce the vertical multi-phase inductor 1 of any of the aforementioned embodiments, thereby producing the beneficial effects of the vertical multi-phase inductor 1 of the corresponding embodiment. It should be understood that the materials used in each step and the dimensions obtained can be referred to above and will not be repeated here.

[0059] It should be understood that the above-mentioned method for manufacturing a multi-phase inductor is only an exemplary summary. In actual scenarios, the specific process of each step should be adjusted according to actual needs. Figure 7As shown, first, each coil is formed by a dry printing process, and then these coils are stacked as described above, and the magnetic body is cut to obtain a size that meets the requirements, and then sintered to form a magnetic body 10 having multiple first coils 21 and second coils 22, that is, a semi-finished product. Further, the first solder pad 21a and the second solder pad 21b are formed by, for example, a sputtering process or other processes (such as silver dipping).

[0060] An embodiment of the present application further provides an electronic device, which includes the vertical multi-phase inductor 1 according to any of the above embodiments. The vertical multi-phase inductor 1 is disposed in a circuit of the electronic device.

[0061] The electronic device can be implemented in various specific forms, for example, smart phones, wearable devices, drones, electric vehicles, electric cleaning tools, energy storage products, electric vehicles, electric bicycles, electric navigation tools, and other electronic products. It will be understood by those skilled in the art that, in addition to components specifically for mobile purposes, the configuration according to the embodiments of the present application can also be applied to fixed-type electronic devices.

[0062] Since the electronic device includes the vertical multi-phase inductor 1 according to any of the aforementioned embodiments, the electronic device can produce the beneficial effects of the vertical multi-phase inductor 1 according to the corresponding embodiment.

[0063] It should be understood that the above description is only part of the embodiments of the present application and does not limit the patent scope of the present application. For ordinary technicians in this field, all equivalent structural changes made using the contents of this specification and drawings are also included in the patent protection scope of the present application.

[0064] Although the terms "first," "second," and the like are used herein to describe various information, such information should not be limited to these terms. These terms are used only to distinguish information of the same type from one another. As used herein, the singular forms "a," "an," and "the" are intended to include the plural forms as well. The terms "or" and "and / or" are to be interpreted as inclusive, or to mean any one or any combination. Exceptions to this definition occur only when a combination of elements, functions, steps, or operations are inherently mutually exclusive in some manner.

Claims

1. A vertical multi-phase inductor, characterized in that: It includes a magnetic body and multiple first coils and multiple second coils, as well as multiple first soldering pads and second soldering pads exposed on the magnetic body, a single first coil and a single second coil are 1 / 2 turns respectively, and the multiple first coils and the multiple second coils are stacked and spaced apart in the magnetic body along the second direction, wherein the second direction is the direction in which the winding axis of the first coil or the second coil extends, and along the second direction, a second coil is arranged between two adjacent first coils, and the orthographic projection of the first coil falls within the orthographic projection of the second coil; each of the two ends of the first coil is connected to a first soldering pad respectively to serve as the input end and output end of the first coil, and each of the two ends of the second coil is connected to a second soldering pad respectively to serve as the input end and output end of the second coil, along the first direction, the two first soldering pads of the first coil are located between the two second soldering pads of the second coil, and the first direction and the second direction are perpendicular to each other.

2. The vertical multi-phase inductor according to claim 1, characterized in that: Any two of the first coils may form an original coil connected end to end, and / or any two of the second coils may form an original coil connected end to end.

3. The vertical multi-phase inductor according to claim 2, characterized in that: Along the first direction where the winding axis is located, any two of the first coils can be symmetrically arranged, and / or any two of the second coils can be symmetrically arranged.

4. The vertical multi-phase inductor according to claim 1, characterized in that: Along the first direction, a distance between the first pad and the second pad is W, and 0.3 mm ≤ W ≤ 0.4 mm.

5. The vertical multi-phase inductor according to any one of claims 1 to 4, characterized in that: The vertical multi-phase inductor has a magnetic permeability of 50H / m≥μ≥5H / m. The vertical multi-phase inductor further includes an interlayer disposed in the magnetic body and located between adjacent first coils and second coils.

6. The vertical multi-phase inductor according to claim 5, characterized in that: The magnetic permeability of the interlayer is μ1, and when the temperature is above 25° C., μ1 is less than 20%*μ.

7. The vertical multi-phase inductor according to claim 5, characterized in that: The thickness of the interlayer is D, and 0.5 mm ≤ D ≤ 1.2 mm.

8. A method for manufacturing a vertical multi-phase inductor, characterized in that: include: Printing to form a plurality of first coils and a plurality of second coils includes: printing to form at least one original coil connected end to end, and then cutting the original coil along a first direction of a winding axis to form at least two of the first coils and / or at least two of the second coils; The plurality of first coils and the plurality of second coils are stacked and spaced apart in a magnetic body along a second direction, wherein the second direction is a direction in which a winding axis of the first coil or the second coil extends, the first direction is perpendicular to the second direction, and along the second direction, a second coil is disposed between two adjacent first coils, and an orthographic projection of the first coil falls within an orthographic projection of the second coil; The two ends of each first coil are respectively connected to a first soldering pad to serve as the input end and output end of the first coil, and the two ends of each second coil are respectively connected to a second soldering pad to serve as the input end and output end of the second coil, wherein along the first direction, the two first soldering pads of the first coil are located between the two second soldering pads of the second coil.

Citation Information

Patent Citations

  • Multi-phase inductor and manufacturing method thereof

    CN114334398A