A dual-processor plasma digital power system

Abstract

The invention discloses a dual-processor plasma digital power supply system, including: a power circuit module for processing the alternating current input by a three-phase alternating current power supply, and outputting high-voltage and high-frequency alternating current for a plasma generator load; a signal acquisition and control circuit module including a DSP processor module for acquiring circuit parameters of the power circuit module, and the DSP processor module performs data calculation and processing control according to the collected circuit parameters; and after isolating and amplifying the drive control signal, the signal is fed back to the power circuit module; a state monitoring and human-computer interaction module including an STM32 processor module for monitoring the power supply state, and realizing data communication and human-computer interaction. The power supply system of the present invention adopts the powerful computing power and digital signal processing capability of DSP for power supply control management, adopts the advantages of STM32 multitasking and process transaction management for state monitoring, and can be widely used in the field of plasma.

Description

Technical Field

[0001] The invention relates to the field of plasma, and in particular to a dual-processor plasma digital power supply system. Background Art

[0002] Plasma technology has been widely used in waste gas treatment, material modification, biomedicine, aerospace and other fields due to its superior characteristics. At present, the main ways to generate plasma include electric field, light, high-energy rays or high temperature. The low-temperature plasma used in industry is usually generated by controlling the plasma generator device with an excitation power supply. Common plasma generators include plasma jet type, dielectric barrier discharge (DBD) type, sliding arc discharge type, etc. These generators can be equivalent to capacitive loads, but the load equivalent parameters of different generators are not the same, and traditional power supplies are difficult to adapt to a variety of plasma loads. Moreover, when the plasma power supply is working, due to the drastic instantaneous changes in its load, it has high requirements on the dynamic characteristics of the power supply. Most traditional plasma power supplies use medium-frequency high-voltage excitation, and their hardware circuit design and control mode are single, the power supply volume and weight are large, the control accuracy is not high, the gas discharge is unstable, and at the same time, due to the gradual increase in the switching frequency of the power supply, the overall machine loss continues to increase. With the development of plasma applications, traditional power supplies are increasingly unable to meet the growing performance requirements. Summary of the invention

[0003] In order to solve one of the technical problems existing in the prior art to at least a certain extent, an object of the present invention is to provide a dual-processor plasma digital power supply system.

[0004] The technical solution adopted by the present invention is:

[0005] A dual-processor plasma digital power system, including a power circuit module, a signal acquisition and control circuit module, a state monitoring and human-computer interaction module;

[0006] The power circuit module is used to process the alternating current input by the three-phase alternating current power supply and output high-voltage and high-frequency alternating current for the plasma generator load;

[0007] The signal acquisition and control circuit module includes a DSP processor module, which is used to acquire circuit parameters of the power circuit module, and the DSP processor module performs data calculation and processing control according to the acquired circuit parameters; and isolates and amplifies the drive control signal and feeds it back to the power circuit module;

[0008] The state monitoring and human-computer interaction module includes an STM32 processor module, which is used to monitor the power state and realize data communication and human-computer interaction;

[0009] Wherein, the DSP processor module and the STM32 processor module are communicatively connected.

[0010] Furthermore, the power circuit module includes a rectifier filter circuit module, a dual-tube cascade Buck-Boost circuit module, a full-bridge inverter circuit module, a resonant inductor module and a high-frequency transformer module which are connected in sequence;

[0011] The rectifier and filter circuit module is used to rectify and smooth the AC power input by the three-phase AC power supply into DC power;

[0012] The dual-tube cascade Buck-Boost circuit module is used to chop the rectified and filtered DC power into a DC power with adjustable voltage according to the plasma load of the power supply;

[0013] The full-bridge inverter circuit module adopts a phase-shifted full-bridge soft switch topology structure, and is combined with the resonant inductor module to convert the chopped direct current into high-frequency alternating current;

[0014] The high-frequency alternating current is converted into high-voltage high-frequency alternating current by the high-frequency transformer module;

[0015] The transformed high-voltage and high-frequency alternating current enters the plasma generator load as the output of the plasma power supply, thereby exciting the plasma load to generate plasma.

[0016] Furthermore, the signal acquisition and control circuit module also includes a signal sampling and conditioning module and a driving circuit module;

[0017] The signal sampling and conditioning module is used to collect the bus voltage V_bus after filtering by the rectifier and filter circuit module, the current I_b and the output voltage V_b of the dual-tube cascade Buck-Boost circuit module, the primary current I_hv and the bridge current I_p of the full-bridge inverter circuit module, and the transformer secondary output voltage V_out, and transmit the collected voltage and current signals to the DSP processor module;

[0018] The DSP processor module is used to process the received circuit parameters and use the bus voltage V_bus to determine the power input state; according to different plasma loads, different inductances of the resonant inductor module are combined to achieve load resonance parameter matching, and then the switching frequency of the power supply is adjusted through a digital phase-locked loop to achieve series resonance of the load; the drive control signal is transmitted to the drive circuit module for isolation and amplification;

[0019] The driving circuit module is connected to the dual-tube cascade Buck-Boost circuit module and the full-bridge inverter circuit module, and uses the driving control signal after isolation and amplification to perform circuit driving control.

[0020] Further, the state monitoring and human-computer interaction module also includes a state monitoring module and a human-computer interaction module;

[0021] The state monitoring module includes a temperature sensor, an air pressure sensor, a speed sensor, a buzzer, and an LED indicator light, which are used to obtain a monitoring signal and transmit the monitoring signal to the STM32 processor module to realize real-time monitoring of the power supply state;

[0022] The human-computer interaction module includes a serial port screen, a button, an encoder, a relay and a FLASH memory, and the STM32 processor module is used to control the human-computer interaction module to achieve the setting of power supply parameters and the display of operating status;

[0023] The DSP processor module and the STM32 processor module communicate based on the Modbus protocol; the STM32 processor module serves as a host, and the DSP processor module serves as a slave. The host sends a request to the slave, and the slave responds to the request and returns data in a protocol message format.

[0024] Furthermore, in addition to the control of the peak current mode of the double closed loop, the frequency of the output voltage of the full-bridge inverter circuit module is adjusted by the digital phase-locked loop of the DSP processor module;

[0025] The digital phase-locked loop adjusts the value of the period register of the PWM output by the DSP processor module by detecting the phase difference between the output voltage V_out and the current I_p of the full-bridge inverter circuit module, so as to achieve the matching of the resonant frequency.

[0026] Furthermore, the output voltage parameters of the dual-tube cascade Buck-Boost circuit module are determined by the plasma load. Different plasma loads have different equivalent parameters and have quite different requirements for discharge voltage. The dual-tube cascade Buck-Boost circuit module is used to operate in the Buck step-down state or the Boost step-up state to increase the input voltage range of the full-bridge inverter circuit module, so that the power supply can adapt to a variety of plasma loads without changing the transformer parameters.

[0027] Furthermore, the resonant inductor module includes two groups of different inductors connected in series, each group consisting of two relays and two inductors. According to the equivalent capacitance of the plasma load used, the DSP processor module controls the attraction of the relay to switch different inductor connections to achieve load resonance parameter matching.

[0028] Furthermore, the high-frequency transformer module includes two high-frequency transformers with the same number of turns and transformation ratio, which are connected in parallel at the primary and in series at the secondary, thereby reducing the transformation ratio of a single high-frequency transformer;

[0029] The primary of the high-frequency transformer is connected in series with the inductance of the resonant inductor module, and a secondary of a high-frequency transformer leads to a coil for collecting the output voltage V_out, and the output closed-loop control and overvoltage protection are performed through the voltage V_out.

[0030] Furthermore, the DSP processor module uses a state machine for power management and communication, and the state machine includes three states: standby state, working state, and fault state;

[0031] In standby mode, the system continuously polls to detect the power status. When all data are detected to be normal, the power is in standby mode. In this state, the user can adjust relevant working parameters.

[0032] When receiving the trigger signal, the system switches from the standby state to the working state. In the working state, the system executes the control program, outputs the driving signal after processing the sampled signal, and controls the output of the power supply in real time;

[0033] When the system detects a parameter abnormality, it enters a fault state. At this time, the system shuts down all outputs, issues an alarm, transmits the alarm signal to the state monitoring and human-computer interaction module, and displays the fault type.

[0034] Furthermore, the STM32 processor module performs task scheduling and real-time control through the FreeRTOS operating system;

[0035] The FreeRTOS operating system adopts blocking waiting task scheduling, and the order of task running is strictly executed according to the pre-assigned task priority; according to the different priorities, the system assigns five tasks of different priorities, including Ctrl_task, Uart_task, DSP_task, Screen_task, and LED_task in turn;

[0036] The Ctrl_task task is responsible for responding to and processing the control of the power signals of buttons, screen touch, status lights, switches, and alarm lights; the Uart_task task is responsible for the data transmission control of the serial port screen; the DSP_task task is responsible for the communication control between the DSP processor module and the STM32 processor module; the Screen_task task is responsible for displaying different power parameter information on different pages of the serial port screen; the LED_task task is responsible for controlling the power status display light.

[0037] The beneficial effects of the present invention are as follows: the power supply system of the present invention adopts DSP and STM32 dual processor modules, uses the powerful computing power and digital signal processing capabilities of DSP to perform power supply control management, and uses the advantages of STM32 multi-tasking and process transaction management to perform status monitoring, data communication and human-computer interaction, thereby preventing the single processor from being easily stuck due to too many tasks during control, and improving the control accuracy of the power supply and the stability of the system. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the embodiments of the present invention or the drawings of related technical solutions in the prior art are introduced below. It should be understood that the drawings introduced below are only for the convenience of clearly describing some embodiments of the technical solutions of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative work.

[0039] Figure 1 is a general structural block diagram of a plasma digital power supply system in an embodiment of the present invention;

[0040] Figure 2 is a power circuit schematic diagram of a plasma digital power supply system according to an embodiment of the present invention;

[0041] Figure 3 is a functional block diagram of a dual processor module of a plasma digital power system according to an embodiment of the present invention;

[0042] Figure 4 is a DSP state machine system flow chart of a plasma digital power system in an embodiment of the present invention;

[0043] Figure 5 is a digital phase-locked loop control timing diagram of a plasma digital power system in an embodiment of the present invention;

[0044] Figure 6 This is a flow chart of the STM32 control system of the plasma digital power system in an embodiment of the present invention;

[0045] Figure 7 It is a communication flow chart of dual processor modules of the plasma digital power system in an embodiment of the present invention. DETAILED DESCRIPTION

[0046] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and are not to be construed as limitations of the present invention. For the step numbers in the following embodiments, they are only provided for the convenience of explanation, and the order between the steps is not limited in any way, and the execution order of each step in the embodiment can be adaptively adjusted according to the understanding of those skilled in the art.

[0047] In the description of the present invention, it should be understood that descriptions involving orientations, such as up, down, front, back, left, right, etc., and orientations or positional relationships indicated are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0048] In the description of the present invention, "several" means one or more, "more" means more than two, "greater than", "less than", "exceed" etc. are understood as not including the number itself, and "above", "below", "within" etc. are understood as including the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0049] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0050] like Figure 1 As shown, this embodiment provides a dual-processor plasma digital power system, including a power circuit module, a signal acquisition and control circuit module, an auxiliary power circuit module, and a state monitoring and human-computer interaction module;

[0051] A power circuit module is used to process the alternating current input by the three-phase alternating current power supply and output high-voltage and high-frequency alternating current for the plasma generator load;

[0052] The signal acquisition and control circuit module includes a DSP processor module, which is used to acquire circuit parameters of the power circuit module. The DSP processor module performs data calculation and processing control according to the acquired circuit parameters; and isolates and amplifies the drive control signal and feeds it back to the power circuit module;

[0053] The state monitoring and human-computer interaction module includes an STM32 processor module, which is used to monitor the power supply state and realize data communication and human-computer interaction; wherein, the DSP processor module and the STM32 processor module are communicated and connected;

[0054] The auxiliary power circuit module is used to supply power to the signal acquisition and control circuit module and the status monitoring and human-computer interaction module.

[0055] In some optional embodiments, such as Figure 2 As shown, the power circuit module includes a rectifier filter circuit module, a dual-tube cascade Buck-Boost circuit module, a full-bridge inverter circuit module, a resonant inductor module, a high-frequency transformer module and a plasma generator load which are connected in sequence.

[0056] The rectifier and filter circuit module is connected to the three-phase AC input power supply; the dual-tube cascade Buck-Boost circuit module and the full-bridge inverter circuit module are connected to the signal acquisition and control circuit module, so as to realize the output control of the power supply; the resonant inductor module is connected to the primary of the high-frequency transformer module and is connected to the full-bridge inverter circuit module at the same time, and the secondary of the high-frequency transformer module is connected to the plasma generator load.

[0057] like Figure 2 As shown, the working principle of the power circuit module is as follows:

[0058] The rectifier and filter circuit module rectifies and smoothes the AC power input by the three-phase AC power supply to convert it into DC power; the dual-tube cascade Buck-Boost circuit module chops the DC power after rectification and filtering into DC power with adjustable voltage according to the plasma load of the power supply; the full-bridge inverter circuit module adopts a phase-shifted full-bridge soft switch topology structure, and combines with the resonant inductor module to convert the chopped DC power into high-frequency AC power; the high-frequency AC power is converted into high-voltage and high-frequency AC power through the high-frequency transformer module; the high-voltage and high-frequency AC power after conversion enters the plasma generator load as the output of the plasma power supply, thereby exciting the plasma load to generate plasma.

[0059] In some optional embodiments, such as Figure 2 As shown, the high-frequency transformer module includes two high-frequency transformers with the same number of turns and transformation ratio, which are connected in parallel with the primary and in series with the secondary, thereby reducing the transformation ratio of a single high-frequency transformer, making the coupling better, generating less heat, and having smaller leakage inductance; the primary of the high-frequency transformer is connected in series with the inductance of the resonant inductor module, and a turn of coil is led out from the secondary of one of the high-frequency transformers for collecting the output voltage V_out, and this voltage is used for closed-loop control of the output and overvoltage protection.

[0060] In some optional embodiments, such as Figure 1As shown, the signal acquisition and control circuit module includes a signal sampling and conditioning module, a DSP processor module, and a drive circuit module; the signal sampling and conditioning module is connected to the power circuit module and the DSP processor module, and collects relevant circuit parameters and transmits them to the DSP processor module for data calculation and processing control; the DSP processor module is connected to the drive circuit module, and transmits the drive control signal to the drive circuit module for isolation and amplification according to the corresponding control algorithm; the drive circuit module is connected to the dual-tube cascade Buck-Boost circuit module and the full-bridge inverter circuit module, and uses the drive signal after isolation and amplification to drive the circuit.

[0061] like Figure 3 As shown, the working principle of the signal acquisition and control circuit module is as follows:

[0062] The signal sampling and conditioning module collects the bus voltage V_bus after filtering by the rectifier filter circuit module, the current I_b and the output voltage V_b of the dual-tube cascade Buck-Boost circuit module, the primary current I_hv and the bridge current I_p of the full-bridge inverter circuit module, and the secondary output voltage V_out of the transformer, and transmits the collected voltage and current signals to the DSP processor module; the DSP processor module processes the input signal and uses the bus voltage V_bus to judge the power input state; the dual-tube cascade Buck-Boost circuit module and the full-bridge inverter circuit module both control the opening and closing of the power switch tubes therein according to the peak current control mode to achieve high-precision control of the power output, and at the same time, according to different plasma loads, different inductances of the resonant inductor module are combined to achieve matching of load resonance parameters, and then the switching frequency of the power supply is adjusted through a digital phase-locked loop, thereby realizing series resonance of the load, making it easier for the power output to reach the plasma load discharge voltage, thereby improving the power factor of the power supply.

[0063] The output voltage parameters of the dual-tube cascade Buck-Boost circuit module are determined by the plasma load. Different plasma loads have different equivalent parameters and different requirements for discharge voltage. Using the dual-tube cascade Buck-Boost circuit module to work in the Buck step-down state or the Boost step-up state can increase the input voltage range of the full-bridge inverter circuit module, so that the power supply can adapt to a variety of plasma loads without changing the transformer parameters.

[0064] In addition to the control of the peak current mode in the dual closed loop, the frequency of the output voltage of the full-bridge inverter circuit module is adjusted by the digital phase-locked loop of the DSP processor module; the digital phase-locked loop adjusts the value of the period register of the PWM output by the DSP processor module by detecting the phase difference between the output voltage V_out and the current I_p of the full-bridge inverter circuit module to achieve matching of the resonant frequency.

[0065] like Figure 2 As shown, the resonant inductor module includes two groups of different inductors connected in series, each group consists of two relays and two inductors. According to the equivalent capacitance of the plasma load used, the DSP processor module controls the attraction of the relay to switch different inductor connections to achieve load resonance parameter matching. The two groups of inductors can achieve 9 different connection forms, and the inductor parameters can be adjusted within a wide range to adapt to the resonant matching of most plasma loads.

[0066] In some optional embodiments, such as Figure 4 As shown, the DSP processor module uses a state machine for power management and communication. The state machine can be divided into three states: standby state, working state, and fault state. In the standby state, the system continuously polls to detect the power state, including various sampling signals and communication with the STM32 processor module. When all data are normal, the power supply is in standby state, and the user can adjust the relevant working parameters at this time. When the user triggers the work button, the system switches from the standby state to the working state. In the working state, the system executes the control program, outputs the drive signal after processing the sampling signal, and controls the output of the power supply in real time. When the system detects that there is an abnormal parameter, it enters the fault state. At this time, the system shuts down all outputs, and alarms through indicator lights and buzzers. At the same time, the alarm signal is transmitted to the human-computer interaction module, and the fault type is displayed on the serial port screen.

[0067] In some optional embodiments, such as Figure 5 As shown, the use of DSP to implement a digital phase-locked loop is mainly to complete the functions of current and voltage phase difference calculation, low-pass filtering, and frequency adjustment. The calculation of the voltage and current phase difference is mainly achieved through the ePWM module and eCAP module of the DSP. First, the eCAP module is used to capture the rising edge of the square wave signal generated by the load current sampling and the zero-crossing comparison circuit. At this time, the rising edge triggered interrupt enters and the timer is turned on. Then, the rising edge of the PWM output in the ePWM module triggers the interrupt, and the timer is turned off in the interrupt. The time difference between the timers is the phase difference between the voltage and current. In addition, it is also necessary to measure the working cycle of the output current. The cycle value T i The eCAP module can count the two consecutive rising edges of the current comparison square wave signal. Then, the phase difference value is compared with the half-duty cycle value to determine the relationship between the output voltage and current at this moment. When the measured phase difference is θ(n-1), the eCAP module starts to capture the rising edge of the square wave, and the output current period is T i(n-1), the output PWM cycle is T(n-1), and then the next output PWM cycle value is adjusted to compensate for the phase difference. The nth PWM output cycle is adjusted to T(n-1)+θ(n-1), and the PWM output cycle is adjusted to T in the n+1th cycle. i (n-1) to achieve resonant frequency matching.

[0068] In some optional embodiments, such as Figure 1 As shown, the state monitoring and human-computer interaction module also includes a state monitoring module, an STM32 processor module and a human-computer interaction module.

[0069] like Figure 3 As shown, the status monitoring module includes a temperature sensor, an air pressure sensor, a speed sensor, a buzzer, and an LED indicator light, and transmits the monitoring signal of the status monitoring module to the STM32 processor module to realize real-time monitoring of the power status.

[0070] like Figure 3 As shown, the human-computer interaction module includes a serial port screen, buttons, encoders, relays, and FLASH memory. The STM32 processor module is used to control the human-computer interaction module to achieve the setting of power supply parameters and the display of operating status, which is convenient for user operation and observation.

[0071] In some optional embodiments, such as Figure 6 As shown in the figure, the STM32 processor module performs task scheduling and real-time control through the FreeRTOS operating system; FreeRTOS adopts blocking waiting task scheduling, and the order of task running is strictly executed according to the pre-assigned task priority; according to the different priorities, the system assigns five tasks of different priorities, including Ctrl_task, Uart_task, DSP_task, Screen_task, and LED_task; the Ctrl_task task is responsible for responding and processing the control of the power signal of the button, screen touch, status light, switch, and alarm light; the Uart_task task is responsible for the data transmission control of the serial port screen; the DSP_task task is responsible for the communication control between the DSP processor module and the STM32 processor module; the Screen_task task is responsible for displaying different power parameter information on different pages of the serial port screen; the LED_task task is responsible for controlling the power status display light.

[0072] In some optional embodiments, such as Figure 7As shown in the figure, the DSP processor module and the STM32 processor module communicate based on the Modbus protocol using the SCI interface; the STM32 processor module acts as the host and the DSP processor module acts as the slave. The host can send requests and the slave can only respond to the host's requests. The communication process is as follows:

[0073] STM32 sends a request message to DSP, and DSP starts to receive the requested data packet through the SCI interface. When SCI completes receiving a byte, SCI enters the receive interrupt, stores the received byte in the given array, and opens and resets the timer at the same time. The timer counts for 1ms, exits the interrupt, continues to receive, and repeats in sequence; when the timer count time ends, it enters the timer interrupt, at which time the timer is turned off, and the receive flag is set to 1 to indicate that the reception is complete; the receive flag is polled and detected in the state machine. When the flag is detected to be 1, the data packet is parsed according to the Modbus protocol data frame format, and a response message is sent back through the SCI interface after the parsing is completed.

[0074] In some optional embodiments, the auxiliary power supply circuit module includes a flyback auxiliary circuit module and an LDO voltage regulator module; the auxiliary power supply circuit module is connected to the signal acquisition and control circuit module and the status monitoring and human-computer interaction module to provide power for each part of the circuit; the LDO voltage regulator module is connected to the flyback auxiliary circuit module, and the LDO voltage regulator module is used to provide a high-precision power supply voltage for the control chip.

[0075] In some optional embodiments, the control process of the above plasma digital power system includes the following steps:

[0076] S1. When the power supply system is powered on, the system is initialized and checked to ensure that the auxiliary power supply is normal and all parts are in normal standby state;

[0077] S2. The user selects corresponding parameters for setting according to the type of plasma load used;

[0078] S3, start the power supply to enter the working state, observe the sampling data and indicator lights of the human-computer interaction module to see if they are normal. If an abnormality occurs at this time, the power supply stops and an alarm message is displayed to remind the user to handle the fault; if it works normally, the user turns off the power supply when finished using it and returns to the standby state.

[0079] In summary, the power supply system of this embodiment has the following beneficial effects compared with the prior art:

[0080] (1) Improved power control accuracy and system stability. This power system uses DSP and STM32 dual processor modules, and uses the powerful computing power and digital signal processing capabilities of DSP to control and manage the power supply. At the same time, it uses the advantages of STM32 multi-tasking and process transaction management to perform status monitoring, data communication, and human-computer interaction, etc., to prevent the single processor from being stuck due to too many tasks, and improve the power control accuracy and system stability.

[0081] (2) Improved adaptability of the power supply to various plasma loads. On the one hand, the input voltage range of the full-bridge inverter circuit module is increased by operating the dual-tube cascade Buck-Boost circuit module in the Buck step-down state or the Boost step-up state, so that the power supply can adapt to various plasma loads without changing the transformer parameters; on the other hand, by matching the different inductance combinations of the resonant inductor module with the resonant parameters of the load, the power supply can operate in a resonant state for most plasma loads, thereby improving the load adaptability of the power supply.

[0082] (3) Improved power efficiency and power factor. The full-bridge inverter module adopts a phase-shifted full-bridge soft switching topology, which enables the full-bridge switch tube to operate in a zero-voltage switching state, reducing the switching loss of the switch tube; at the same time, the load resonance parameters are matched through the resonant inductor, and the digital phase-locked loop adjusts the switching frequency to adapt to the resonant frequency, so that the circuit operates in a resonant state, improving the efficiency and power factor of the power supply.

[0083] It should also be noted that in this specification, terms such as "comprises", "includes" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also includes other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of more restrictions, an element defined by the sentence "comprises a ..." does not exclude the presence of other identical elements in the process, method, article or device including the element.

[0084] In the above description of this specification, the description with reference to the terms "one embodiment / example", "another embodiment / example" or "certain embodiments / examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0085] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

[0086] The above is a specific description of the preferred implementation of the present invention, but the present invention is not limited to the above embodiments. Those skilled in the art may make various equivalent modifications or substitutions without violating the spirit of the present invention. These equivalent modifications or substitutions are all included in the scope defined by the claims of this application.

Claims

1. A dual-processor plasma digital power system, characterized in that: Including power circuit module, signal acquisition and control circuit module, status monitoring and human-computer interaction module; The power circuit module is used to process the alternating current input by the three-phase alternating current power supply and output high-voltage and high-frequency alternating current for the plasma generator load; The signal acquisition and control circuit module includes a DSP processor module, which is used to acquire circuit parameters of the power circuit module, and the DSP processor module performs data calculation and processing control according to the acquired circuit parameters; and isolates and amplifies the drive control signal and feeds it back to the power circuit module; The state monitoring and human-computer interaction module includes an STM32 processor module, which is used to monitor the power state and realize data communication and human-computer interaction; Wherein, the DSP processor module and the STM32 processor module are communicatively connected; The state monitoring and human-computer interaction module also includes a state monitoring module and a human-computer interaction module; The state monitoring module includes a temperature sensor, an air pressure sensor, a speed sensor, a buzzer, and an LED indicator light, which are used to obtain a monitoring signal and transmit the monitoring signal to the STM32 processor module to realize real-time monitoring of the power supply state; The human-computer interaction module includes a serial port screen, a button, an encoder, a relay and a FLASH memory, and the STM32 processor module is used to control the human-computer interaction module to achieve the setting of power supply parameters and the display of operating status; The DSP processor module and the STM32 processor module communicate based on the Modbus protocol; the STM32 processor module serves as a host, and the DSP processor module serves as a slave. The host sends a request to the slave, and the slave responds to the request and transmits data back in a protocol message format; The STM32 processor module performs task scheduling and real-time control through the FreeRTOS operating system; The FreeRTOS operating system adopts blocking waiting task scheduling, and the order of task running is strictly executed according to the pre-assigned task priority; according to the different priorities, the system assigns five tasks of different priorities, including Ctrl_task, Uart_task, DSP_task, Screen_task, and LED_task in turn; The Ctrl_task task is responsible for responding to and processing the control of the power signals of buttons, screen touch, status lights, switches, and alarm lights; the Uart_task task is responsible for the data transmission control of the serial port screen; the DSP_task task is responsible for the communication control between the DSP processor module and the STM32 processor module; the Screen_task task is responsible for displaying different power parameter information on different pages of the serial port screen; the LED_task task is responsible for controlling the power status display light.

2. A dual-processor plasma digital power system according to claim 1, characterized in that: The power circuit module includes a rectifier filter circuit module, a dual-tube cascade Buck-Boost circuit module, a full-bridge inverter circuit module, a resonant inductor module and a high-frequency transformer module which are connected in sequence; The rectifier and filter circuit module is used to rectify and smooth the AC power input by the three-phase AC power supply into DC power; The dual-tube cascade Buck-Boost circuit module is used to chop the rectified and filtered DC power into a DC power with adjustable voltage according to the plasma load of the power supply; The full-bridge inverter circuit module adopts a phase-shifted full-bridge soft switch topology structure, and is combined with the resonant inductor module to convert the chopped direct current into high-frequency alternating current; The high-frequency alternating current is converted into high-voltage high-frequency alternating current by the high-frequency transformer module; The transformed high-voltage and high-frequency alternating current enters the plasma generator load as the output of the plasma power supply, thereby exciting the plasma load to generate plasma.

3. A dual-processor plasma digital power system according to claim 2, characterized in that: The signal acquisition and control circuit module also includes a signal sampling and conditioning module and a driving circuit module; The signal sampling and conditioning module is used to collect the bus voltage V_bus after filtering by the rectifier and filter circuit module, the current I_b and the output voltage V_b of the dual-tube cascade Buck-Boost circuit module, the primary current I_hv and the bridge current I_p of the full-bridge inverter circuit module, and the secondary output voltage V_out of the high-frequency transformer, and transmit the collected voltage and current signals to the DSP processor module; The DSP processor module is used to process the received circuit parameters and use the bus voltage V_bus to determine the power input state; according to different plasma loads, different inductances of the resonant inductor module are combined to achieve load resonance parameter matching, and then the switching frequency of the power supply is adjusted through a digital phase-locked loop to achieve series resonance of the load; the drive control signal is transmitted to the drive circuit module for isolation and amplification; The driving circuit module is connected to the dual-tube cascade Buck-Boost circuit module and the full-bridge inverter circuit module, and uses the driving control signal after isolation and amplification to perform circuit driving control.

4. A dual-processor plasma digital power system according to claim 3, characterized in that: In addition to the control of the peak current mode of the double closed loop, the frequency of the output voltage of the full-bridge inverter circuit module is adjusted by the digital phase-locked loop of the DSP processor module; The digital phase-locked loop adjusts the value of the period register of the PWM output by the DSP processor module by detecting the phase difference between the output voltage of the full-bridge inverter circuit module and the current I_p in the bridge, so as to achieve the matching of the resonant frequency.

5. A dual-processor plasma digital power system according to claim 3, characterized in that: The output voltage parameters of the dual-tube cascade Buck-Boost circuit module are determined by the plasma load. Different plasma loads have different equivalent parameters and have greatly different requirements for discharge voltage. The dual-tube cascade Buck-Boost circuit module is used to work in the Buck step-down state or the Boost step-up state to increase the input voltage range of the full-bridge inverter circuit module, so that the power supply can adapt to a variety of plasma loads without changing the parameters of the high-frequency transformer.

6. A dual-processor plasma digital power system according to claim 3, characterized in that: The resonant inductor module includes two groups of different inductors connected in series, each group consisting of two relays and two inductors. According to the equivalent capacitance of the plasma load used, the DSP processor module controls the attraction of the relay to switch different inductor connections to achieve load resonance parameter matching.

7. A dual-processor plasma digital power system according to claim 2, characterized in that: The high-frequency transformer module includes two high-frequency transformers with the same number of turns and transformation ratio, which are connected in parallel at the primary and in series at the secondary, thereby reducing the transformation ratio of a single high-frequency transformer; The primary of the high-frequency transformer is connected in series with the inductance of the resonant inductor module, and a secondary of a high-frequency transformer leads to a coil for collecting the output voltage V_out, and the output closed-loop control and overvoltage protection are performed through the voltage V_out.

8. A dual-processor plasma digital power system according to claim 3, characterized in that: The DSP processor module uses a state machine for power management and communication, and the state machine includes three states: standby state, working state, and fault state; In standby mode, the system continuously polls to detect the power status. When all data are detected to be normal, the power is in standby mode. In this state, relevant working parameters can be adjusted. When receiving the trigger signal, the system switches from the standby state to the working state. In the working state, the system executes the control program, outputs the driving signal after processing the sampled signal, and controls the output of the power supply in real time; When the system detects a parameter abnormality, it enters a fault state. At this time, the system shuts down all outputs, issues an alarm, transmits the alarm signal to the state monitoring and human-computer interaction module, and displays the fault type.

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