Semiconductor laser aging test system and method

By designing a semiconductor laser aging test system and automatically controlling the test equipment with the control device, the performance test integration before, during and after aging is achieved, the traditional test process has been solved, the testing efficiency and intelligence level are improved, and the cost is reduced.

CN114594358BActive Publication Date: 2025-03-21SHENZHEN VIVLASER TECH CO LTD

Patent Information

Application Number
CN202210060957.X
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-01-19
Publication Date
2025-03-21
Estimated Expiration
2042-01-19

AI Technical Summary

Technical Problem

The testing process of traditional semiconductor lasers has many steps and is complicated, resulting in low testing efficiency and high cost, and requires disassembly and assembly and mobile laser products, increasing labor costs and equipment costs.

Method used

Design a semiconductor laser aging test system, and automatically controls the power supply, switching device, mobile device and laser testing device through the control device, so as to integrate performance tests before, during and after aging in the same position, reducing the number of steps and movements.

Benefits of technology

It improves testing efficiency, reduces labor costs and equipment costs, simplifies and automates the testing steps, and improves the intelligence level of the test laser.

✦ Generated by Eureka AI based on patent content.

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Abstract

The present application relates to a semiconductor laser aging test system and method, the system includes: a power supply; at least two laser test stations for installing lasers to be tested for aging; a laser test device for collecting the optoelectronic parameters of the laser on each laser test station; a mobile device for moving the laser test device to the corresponding laser test station; a switch device, one end of which is connected to the power supply and the other end of which is connected to the laser on each laser test station, and which is used to control the power-on state between the power supply and the laser on each laser test station; a control device, which is connected to the laser test device, the mobile device, and the switch device. During the test, the control device controls the power supply through the switch device to power on the lasers on the laser test station one by one, and controls the laser test device to test the powered lasers; during aging, the control device controls the power supply through the switch device to power on the lasers on the laser test station.
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Description

Technical Field

[0001] The present application relates to the technical field of semiconductor laser testing, and in particular to a semiconductor laser aging testing system and method. Background Art

[0002] High-power semiconductor lasers are widely used in many fields such as communications, military medicine, etc., and the reliability detection of semiconductor lasers is becoming increasingly important. This is mainly due to the following reasons: ① Through the reliability research of semiconductor lasers, the failure mechanism of semiconductor laser products can be accurately determined; ② The actual working life of semiconductor lasers can be tested; ③ It provides a basis for the aging research of semiconductor lasers; ④ It improves the reliability of semiconductor lasers to improve device design and process technology.

[0003] To accurately measure the reliability of semiconductor lasers, it is necessary to test various parameters of semiconductor laser products. That is, semiconductor laser products need to test various technical parameters before aging, and then work for a period of time (usually not less than 24 hours, most of them are 24, 48, 72 or 96 hours of continuous work) at the highest rated working current or exceeding the rated current (usually 1.2 times the rated current); after the aging is completed, the semiconductor laser is tested again for various technical parameters, and then the change rate of various parameters such as its photoelectric performance is compared to see whether it meets the regulations. Usually, the change rate of each parameter is no more than 5%, which meets the regulations.

[0004] At present, the traditional mass-produced semiconductor laser production process is: packaging - optics - performance test before aging - aging - performance test after aging. After the semiconductor laser products are completed, their performance indicators will be collected and calculated one by one at the test station and a test report will be generated. Then they will be transferred to the aging station for centralized high-current aging. After aging is completed, they will be transferred to the test station again to collect and calculate their performance indicators and generate a test report. Then, the changes in the test indicators before and after aging are compared to determine whether the laser products meet the regulations.

[0005] The traditional process of batch testing semiconductor lasers has the following defects: First, because the pre-aging performance test, aging and post-aging performance test all require the disassembly and movement of the laser product, the testing process has many steps and the testing process is relatively cumbersome, which reduces the efficiency of testing laser products; Second, because the traditional testing process has many steps and the testing process is relatively cumbersome, more people are involved in the testing of laser products, which increases labor costs and further increases the cost of testing laser products; Third, because the testing of laser products is carried out at a testing station and the aging of laser products is carried out at an aging station, the setting of testing stations and aging stations leads to high equipment costs for testing laser products, which leads to high testing costs. Summary of the invention

[0006] The main purpose of this application is to provide a semiconductor laser aging test system and method, which optimizes and improves the traditional process and has the advantages of fewer test steps, high test efficiency and low cost.

[0007] The above purpose of this application is achieved through the following scheme:

[0008] A semiconductor laser aging test system, comprising:

[0009] Power supply for laser aging test;

[0010] At least two laser test stations for installing lasers to be tested for aging;

[0011] A laser testing device, used for collecting photoelectric parameters of the laser at each laser testing station;

[0012] A moving device, used for moving the laser testing device to the corresponding laser testing station;

[0013] A switch device, one end of which is connected to the power supply, and the other end of which is used to connect to the laser on each of the laser test stations, and is used to control the power-on state between the power supply and the laser on each of the laser test stations;

[0014] A control device connected to the laser testing device, the moving device, and the switch device, and used for:

[0015] Before aging the laser, control the switch device so that the power supply is powered on to the lasers on each of the laser test stations one by one, and control the moving device to move the laser test device to the corresponding laser test station in turn to test the powered lasers;

[0016] During the aging process of the laser, controlling the switch device so that the power supply and the laser on the laser testing station are powered on;

[0017] After aging the laser, controlling the switch device to power on the lasers on each of the laser test stations one by one, and controlling the moving device to move the laser test device to the corresponding laser test station in turn to test the powered lasers;

[0018] Based on the photoelectric parameters collected by the laser testing device for each laser before and after aging the laser, an aging test result of each laser is obtained.

[0019] The present application is further configured as follows: the control device is also connected to the power supply, and the control device is also used for:

[0020] When the laser starts to age, the output current of the power supply is controlled to gradually increase to a preset ageing current according to a predetermined current step amplitude;

[0021] When the aging of the laser is completed, the output current of the power supply is controlled to slowly decrease from the aging current to zero.

[0022] The present application is further configured as follows: the switch device comprises:

[0023] A first relay, whose connecting end is connected to the positive electrode of the power supply, whose controlled end is connected to the control device, and whose at least two strobe ends are used to be connected to the positive electrodes of the lasers on at least two laser test stations in a one-to-one correspondence, and which is used to connect the connecting end and the corresponding strobe end under the control of the control device;

[0024] A second relay, whose connecting end is connected to the negative pole of the power supply, whose controlled end is connected to the control device, and whose at least two enabling ends are used for one-to-one connection with the negative poles of the lasers on at least two laser test stations, and which is used for connecting the connecting end with the corresponding enabling end under the control of the control device.

[0025] The present application is further configured as follows: the lasers on at least two of the laser test stations are in a series relationship;

[0026] When testing the laser on the laser testing station, the control device controls the first relay and the second relay so that the power supply is powered on to the lasers on the laser testing station one by one;

[0027] When aging the laser on the laser test station, the control device controls the connection end of the first relay to connect to the first enable end, and the connection end of the first relay is disconnected from the remaining enable ends, and controls the connection end of the second relay to connect to the second enable end, and the connection end of the second relay is disconnected from the remaining enable ends; the first enable end is the enable end connected to the positive pole of the first laser connected in series among at least two lasers on the laser test stations by the first relay, and the second enable end is the enable end connected to the negative pole of the last laser connected in series among at least two lasers on the laser test stations.

[0028] The present application is further configured as follows: the test system further includes:

[0029] A heat dissipation device is provided with at least two of the laser test stations and is used to dissipate heat for the lasers on the at least two laser test stations.

[0030] The present application is further configured as follows: the heat dissipation device includes a heat dissipation platform, the heat dissipation platform is provided with a loading surface, and at least two of the laser test stations are arranged on the loading surface.

[0031] The present application is further configured as follows: a heat dissipation fin is provided on the side of the loading surface away from the laser testing station, a heat dissipation liquid for heat dissipation circulates in the heat dissipation platform, the heat dissipation liquid is located below the loading surface, and the heat dissipation fin is dissolved in the heat dissipation liquid.

[0032] The present application is further configured as follows: the heat dissipation platform is provided with a semiconductor refrigerator for controlling the temperature, and the semiconductor refrigerator is located on the side of the loading surface away from the laser testing station.

[0033] The present application is further configured as follows: the moving device is located in front of at least two of the laser testing stations, and the moving device is an electric slide rail or a linear motor.

[0034] The present application is further configured as follows: the laser testing device includes an integrating sphere, and the integrating sphere is fixedly mounted on a moving bracket of the moving device.

[0035] The present application is further configured as follows: a photoelectric detector and a spectrometer are installed on the integrating sphere, and the integrating sphere is provided with a light inlet. During testing, the light inlet of the integrating sphere corresponds to the light output end of the laser on each of the laser testing stations.

[0036] Another object of the present application is achieved through the following scheme:

[0037] A semiconductor laser aging test method, applied to the semiconductor laser aging system described above, comprising:

[0038] Before aging the laser, control the switch device so that the power supply is powered on to the lasers on each of the laser test stations one by one, and control the moving device to move the laser test device to the corresponding laser test station in turn to test the powered lasers;

[0039] During the aging process of the laser, controlling the switch device so that the power supply and the laser on the laser testing station are powered on;

[0040] After aging the laser, controlling the switch device to power on the lasers on each of the laser test stations one by one, and controlling the moving device to move the laser test device to the corresponding laser test station in turn to test the powered lasers;

[0041] Based on the photoelectric parameters collected by the laser testing device for each laser before and after aging the laser, an aging test result of each laser is obtained.

[0042] The present application is further configured as follows: after the laser testing device tests the laser on the laser testing station, the power supply is controlled so that the power supply stops energizing the corresponding laser.

[0043] The present application is further configured as follows: after the laser testing device tests the laser on the laser testing station, the switching device is controlled to disconnect the power supply from the laser on the laser testing station, and the switching device is controlled to connect the power supply to the laser on another laser testing station.

[0044] In summary, the beneficial technical effects of this application are:

[0045] Compared with the prior art, the present application integrates the performance test of the laser before aging, the performance test of the laser after aging and aging at the same location, reducing the steps of moving and disassembling the laser during the performance test of the laser before aging, the performance test of the laser after aging and aging, so as to reduce the steps of testing the laser. On the one hand, it is beneficial to improve the efficiency of testing the laser, and on the other hand, it reduces labor costs, thereby reducing the cost of testing the laser; the test system controls the power supply, the switch device, the moving device and the laser test device through the control device to automatically complete the laser performance test before aging, the aging and the performance test after aging on the laser test station. On the one hand, the test system is more intelligent, and on the other hand, it can effectively improve the efficiency of testing the laser; the test system automatically compares the photoelectric parameters of the laser before and after aging, reducing the steps of manually comparing the photoelectric parameters of the laser before and after aging, which is beneficial to improving the efficiency of testing the laser; the test system only needs to set up a laser test station, and does not need to set up a laser aging station, thereby reducing the cost of setting up a laser aging station, thereby reducing the cost of the test system. BRIEF DESCRIPTION OF THE DRAWINGS

[0046] The present application will illustrate the implementation methods in conjunction with the accompanying drawings. The accompanying drawings of the present application are only used to describe the embodiments for the purpose of demonstration. Without departing from the principles of the present application, those skilled in the art can easily make other embodiments according to the steps described below through the following description.

[0047] Figure 1 Schematic diagram of the structure of the semiconductor laser aging test system in the embodiment of the present application.

[0048] Figure 2 Schematic diagram of a semiconductor laser aging test system in an embodiment of the present application.

[0049] Figure 3 This is a flow chart of a semiconductor laser aging test method in an embodiment of the present application.

[0050] Description of main components and symbols:

[0051] 1. Power supply; 2. Switch device; 21. First relay; 22. Second relay; 3. Laser test device; 4. Moving device; 5. Heat dissipation device; 6. Laser test station; 7. Control device; 8. Connection end; 9. Selection end. DETAILED DESCRIPTION

[0052] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. It will be understood that the specific embodiments described herein are only used to explain the present application, rather than to limit the present application. It should also be noted that, for ease of description, only some but not all structures related to the present application are shown in the drawings. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of the present application.

[0053] The terms "first", "second", etc. in this application are used to distinguish different objects, rather than to describe a specific order. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device that includes a series of steps or units is not limited to the listed steps or units, but optionally includes steps or units that are not listed, or optionally includes other steps or units inherent to these processes, methods, products or devices.

[0054] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0055] See also Figure 1 and Figure 2A semiconductor laser aging system provided by an embodiment of the present invention comprises a power supply 1 for laser aging test, at least two laser test stations 6, a laser test device 3, a moving device 4, a switch device 2 and a control device 7; wherein the laser is installed on the laser test station 6 to facilitate testing of the laser; the laser test device 3 is installed on the moving device 4 so that the moving device 4 moves the laser test device 3 to each laser test station 6 so that the laser test device 3 collects the photoelectric parameters of the laser on the corresponding laser test station 6; one end of the switch device 2 is connected to the power supply 1, and the other end is connected to the laser on each laser test station 6 so that the switch device 2 controls the power-on state between the power supply 1 and the laser on each laser test station 6; the control device 7 is respectively connected to the laser test device 3, the moving device 4 and the switch device 2. On the one hand, the control device 7 controls the laser test device 3, the moving device 4 and the switch device 2 The lasers on the laser test station 6 are tested by cooperating with each other, making the test system more intelligent. On the other hand, the control device 7 can control the power supply 1 and the switch device 2 so that the power supply 1 is powered on one by one with the lasers on the laser test station 6 to achieve aging of the corresponding lasers. The control device 7 can also control the power supply 1 and the switch device 2 so that the power supply 1 is powered on in series with at least two lasers on the laser test stations 6 to achieve aging of the corresponding at least two lasers.

[0056] Before aging the laser, the control device 7 controls the switch device 2 so that the power supply 1 is powered on to the laser on each laser test station 6 one by one, and controls the moving device 4 to move the laser test device 3 to the corresponding laser test station 6 in turn, so that the laser test device 3 can test the powered lasers one by one. For example: the control device 7 controls the moving device 4 to move the laser test device 3 to the first laser test station 6, and controls the switch device 2 so that the power supply 1 and the laser on the first laser test station 6 are powered, so that the light output end of the laser on the first laser test station 6 emits light energy, and the laser test device 3 collects the light energy emitted by the laser light output end to test the laser; when the laser test device 3 completes the test of the laser on the first laser test station 6, the control device 7 controls the switch device 2 so that the power supply 1 and the laser on the first laser test station 6 are disconnected from power. , and controls the switch device 2 to power on the power supply 1 and the laser on the second laser test station 6, so that the light-emitting end of the laser on the second laser test station 6 emits light energy. At the same time, the control device 7 controls the moving device 4 to move the laser test device 3 to the second laser test station 6, so that the laser test device 3 can collect the light energy emitted by the light-emitting end of the laser on the second laser test station 6 to test the laser; repeat the previous step to test the laser on the third laser test station 6, until the lasers on all the laser test stations 6 are tested;

[0057] After the laser testing device 3 tests all the lasers, the control device 7 controls the moving device 4 to move the laser testing device 3 to the initial position before testing the lasers;

[0058] During the aging process of the laser, the control device 7 controls the switch device 2 so that the power supply 1 and the laser on the laser test station 6 are powered on; the power-on time is 24 hours, and it can also be powered on for 48 hours, 72 hours, or other suitable times according to actual needs; wherein, the control device 7 can control the switch device 2 so that the power supply 1 is powered on one by one with the lasers on the laser test station 6 to achieve aging of the lasers on the laser test station 6, and the control device 7 can also control the switch device 2 so that the power supply 1 is powered on in series with the lasers on at least two laser test stations 6 to achieve aging of the lasers on at least two laser test stations 6;

[0059] After aging the laser, the control device 7 controls the switch device 2 so that the power supply 1 is powered on to the laser on each laser test station 6 one by one, and controls the moving device 4 to move the laser test device 3 to the corresponding laser test station 6 in turn, so that the laser test device 3 can test the powered lasers one by one again; that is, the control device 7 controls the moving device 4 to move the laser test device 3 to the first laser test station 6, and controls the switch device 2 so that the power supply 1 and the laser on the first laser test station 6 are powered, so that the light output end of the laser emits light energy, and the laser test device 3 collects the light energy emitted by the laser light output end to test the laser; when the laser test device 3 completes the test of the laser on the first laser test station 6, the control device 7 controls the switch device 2 so that the power supply 1 is disconnected from the laser on the first laser test station 6 and controls the switch device 2 so that the power supply 1 The laser on the second laser test station 6 is powered on, so that the light-emitting end of the laser on the second laser test station 6 emits light energy. At the same time, the control device 7 controls the moving device 4 to move the laser test device 3 to the second laser test station 6, so that the laser test device 3 can collect the light energy emitted by the light-emitting end of the laser on the second laser test station 6 to test the laser; repeat the previous step to test the laser on the third laser test station 6 until all the lasers on the laser test stations 6 are tested;

[0060] After the laser testing device 3 tests all the lasers, the control device 7 controls the moving device 4 to move the laser testing device 3 to the initial position before testing the lasers;

[0061] Based on the photoelectric parameters collected by the laser test device 3 for each laser before and after aging the laser, the aging test results of each laser are obtained. Among them, the test results include LIV curves and spectrum test reports. The LIV curve includes optical power, voltage and current. The voltage and current are provided by the power supply 1. The power supply 1 is integrated with tools for testing output voltage and output current. The test system automatically compares the LIV curves and spectrum test reports of the laser before and after aging on each laser test station 6, and determines whether the laser is qualified based on the comparison results. The test system of the present application integrates the performance test of the laser before aging, the performance test of the laser after aging and aging at the same location, that is, the performance test of the laser before aging, the performance test of the laser after aging and aging are all performed on the laser test station 6, reducing the steps of moving the laser and disassembling the laser during the performance test of the laser before aging, the performance test of the laser after aging and aging, so as to reduce the steps of testing the laser. On the one hand, it is beneficial to improve the efficiency of testing the laser, and on the other hand, it reduces the labor cost, thereby reducing the cost of testing the laser; the test system controls the power supply 1, the switch device 2, the moving device 4 and the laser test device 3 through the control device 7 to automatically complete the laser performance test before aging, the aging and the performance test after aging on the laser test station 6. On the one hand, the test system is more intelligent, and on the other hand, it can effectively improve the efficiency of testing the laser; the test system automatically compares the photoelectric parameters of the laser before and after aging, reducing the steps of manually comparing the photoelectric parameters of the laser before and after aging, which is beneficial to improving the efficiency of testing the laser; the test system only needs to set up the laser test station 6, and does not need to set up the laser aging station, thereby reducing the cost of setting up the laser aging station, thereby reducing the cost of the test system.

[0062] In one embodiment, the control device 7 is also connected to the power supply 1 so that the control device 7 can control the power supply 1. When the laser test device 3 is testing the laser on the first laser test station 6, the control device 7 controls the switch device 2 so that the power supply 1 is connected in series with the laser on the first laser test station 6, and the power supply 1 and the lasers on other laser test stations 6 are in an open circuit state, and the power supply 1 outputs a predetermined voltage and current to power the laser. When the laser test device 3 completes the test of the laser, that is, when the laser test device 3 completes the acquisition of the photoelectric parameters of the laser, the control device 7 controls the voltage and current of the power supply 1 to slowly drop from the predetermined voltage and current to zero; at this time, the control device 7 controls The moving device 4 moves the laser testing device 3 from the first laser testing station 6 to the second laser testing station 6, and controls the switching device 2 to connect the power supply 1 to the laser on the second laser testing station 6, and the power supply 1 and the lasers on other laser testing stations 6 are in an open circuit state. The control device 7 controls the power supply 1 to power the laser on the second laser testing station 6, so that the laser testing device 3 can test the laser on the second laser testing station 6 until the laser testing device 3 completes testing of the lasers on all laser testing stations 6. When the laser aging starts, the control device 7 controls the switch device 2 so that the power supply 1 is connected in series with the lasers on at least two laser test stations 6, and controls the power supply 1 to supply power to the lasers on at least two laser test stations 6. The control device 7 controls the voltage and current output by the power supply 1 to gradually increase from a predetermined voltage and current step amplitude to a preset voltage and current for laser aging, and the power-on usually lasts for 24 hours; when the laser aging is completed, the control device 7 controls the output voltage and current of the power supply 1 to slowly decrease from the voltage and current used for aging to zero. Of course, the control device 7 can also control the switch device 2 so that the power supply 1 is energized with the lasers on the laser test station 6 one by one, and controls the voltage and current output by the power supply 1 to gradually increase from a predetermined voltage and current step amplitude to a preset voltage and current for laser aging, and the power-on usually lasts for 24 hours.

[0063] In one embodiment, the switch device 2 includes a first relay 21 and a second relay 22, wherein the connection terminal 8 of the first relay 21 is connected to the positive pole of the power supply 1, the controlled terminal of the first relay 21 is connected to the control device 7, and at least two strobe terminals 9 of the first relay 21 are connected one-to-one with the positive poles of the lasers on at least two laser test stations 6, so that the first relay 21 is connected to the power supply 1 and the laser circuit on the laser test station 6 respectively, and under the control of the control device 7, the connection terminal 8 of the first relay 21 is connected to the corresponding strobe terminal 9; the connection terminal 8 of the second relay 22 is connected to the negative pole of the power supply 1, the controlled terminal of the second relay 22 is connected to the control device 7, and at least two strobe terminals 9 of the second relay 22 are connected one-to-one with the negative poles of the lasers on at least two laser test stations 6, so that the second relay 22 is connected to the power supply 1 and the laser on the laser test station 6 respectively, and under the control of the control device 7, the connection terminal 8 of the second relay 22 is connected to the corresponding strobe terminal 9. The lasers on at least two laser test stations 6 are connected in series. Taking the lasers on two adjacent laser test stations 6 as an example, the negative electrode of the laser on the first laser test station 6 is connected to the positive electrode of the laser on the second laser test station 6, so as to realize the series connection of the laser on the first laser test station 6 and the laser on the second laser test station 6. The gating end 9 of the first relay 21 and the second relay 22 can be in a normally open state or a normally closed state. The opening and closing states of the gating end 9 of the first relay 21 and the second relay 22 are set according to actual needs; since the control device 7 is respectively connected to the first relay 21 and the second relay 22, the control device 7 can realize the following by controlling the first relay 21 and the second relay 22:

[0064] First, the power supply 1 is powered on by the first relay 21 and the second relay 22 with the laser on one of the laser test stations 6 and is in an open circuit state with the other lasers. Taking the laser on the first laser test station 6 as an example: the first relay 21 is controlled by the control device 7 to connect the connection terminal 8 with the first gating terminal 9, that is, the switch of the first gating terminal 9 of the first relay 21 is closed to achieve connection with the connection terminal 8, and the switches of the other gating terminals 9 of the first relay 21 are opened, wherein the first gating terminal 9 of the first relay 21 is connected to the positive electrode of the laser on the first laser test station 6; the second relay 22 is controlled by the control device 7 to connect the connection terminal 8 with the first gating terminal 9, that is, the switch of the first gating terminal 9 of the second relay 22 is closed to achieve connection with the connection terminal 8, and the switches of the other gating terminals 9 of the second relay 22 are opened, wherein the first gating terminal 9 of the second relay 22 is connected to the negative electrode of the laser on the first laser test station 6; the power supply 1 is powered on by the first relay 21 and the first gating terminal 9 is connected. The first relay 21 and the second relay 22 are connected to the laser on the first laser test station 6, and the control device 7 controls the power supply 1 to supply power to the laser on the first laser test station 6; usually, when testing the laser on the laser test station 6, the control device 7 controls the first relay 21 and the second relay 22 so that the power supply 1 is energized with the lasers on the laser test station 6 one by one, so that the light output end of the laser on the laser test station 6 emits light energy, so that the laser test device 3 can collect and analyze the light energy;

[0065] Second, the power supply 1 is connected in series with the lasers on at least two laser test stations 6 through the first relay 21 and the second relay 22 and supplies power. Preferably, the power supply 1 is connected in series with the lasers on all laser test stations 6 through the first relay 21 and the second relay 22 and supplies power. In the lasers connected in series on at least two laser test stations 6, the control device 7 controls the connection end 8 of the first relay 21 to connect to the first gating end 9, and the connection end 8 of the first relay 21 is disconnected from the remaining gating ends, and controls the connection end 8 of the second relay 22 to connect to the second gating end 9, and the connection end 8 of the second relay 22 is disconnected from the remaining gating ends; the first gating end 9 is the gating end 9 connected between the first relay 21 and the positive pole of the first laser connected in series among the lasers on the at least two laser test stations 6, and the second gating end 9 is the gating end 9 connected between the second relay 22 and the negative pole of the last laser connected in series among the lasers on the at least two laser test stations 6. More specifically, taking the lasers on two adjacent laser test stations 6 as an example, the positive electrode of the laser on the first laser test station 6 is connected to the first enable terminal 9 of the first relay 21, the negative electrode of the laser on the second laser test station 6 is connected to the second enable terminal 9 of the second relay 22, and the negative electrode of the laser on the first laser test station 6 is connected to the positive electrode of the laser on the second laser test station 6; the first relay 21 is controlled by the control device 7 so that the connection terminal 8 is connected to the first enable terminal 9, that is, the switch of the first enable terminal 9 of the first relay 21 is closed to achieve connection with the connection terminal 8. The other enable terminal 9 switch of the first relay 21 is opened; the second relay 22 is controlled by the control device 7 so that the connection terminal 8 is connected to the second enable terminal 9, that is, the switch of the second enable terminal 9 of the second relay 22 is closed to achieve connection with the connection terminal 8, and the other enable terminal 9 switch of the second relay 22 is opened; thereby, the power supply 1 is connected in series with the laser on the first laser test station 6 and the laser on the second laser test station 6 through the first relay 21 and the second relay 22, and the control device 7 controls the power supply 1 to supply power to the laser on the first laser test station 6 and the laser on the second laser test station 6.

[0066] In one embodiment, the first relay 21 and the second relay 22 are both programmable relays, which are relays controlled by programmable logic, so that the programmable relays can be programmed with logic programs according to actual needs to control the programmable relays; the control device 7 is connected to the two programmable relays respectively, and the control device 7 controls the two programmable relays to achieve a more regular and orderly coordination of the two programmable relays. According to needs, the control device 7 can control the two programmable relays to realize the power supply 1 and the laser on a laser test station 6 to supply power, and the control device 7 can also control the two programmable relays to realize the power supply 1 and the lasers on at least two laser test stations 6 to supply power in series.

[0067] In one embodiment, the test system further includes a heat sink 5, and at least two laser test stations 6 are arranged on the heat sink 5, so that the heat sink 5 can dissipate heat for the laser installed on the laser test station 6. The heat sink 5 includes a heat sink, and the heat sink is provided with a loading surface, and at least two laser test stations 6 are arranged on the loading surface; preferably, a plurality of laser test stations 6 are arranged on the loading surface, and the plurality of laser test stations 6 are distributed in a straight line on the loading surface. Among them, the laser is fixed to the laser test station 6 on the loading surface by screws or bolts, and the structure is simple. Screws or bolts are commonly used fixing parts, which are conducive to improving the efficiency of loading the laser on the laser test station 6; the laser can also be fixed to the laser test station 6 on the loading surface by a pressing fixture, and the pressing fixture can be a manual fixture, a pneumatic fixture, or an electric fixture according to actual needs. The laser is loaded on the laser test station 6 by a manual fixture, a pneumatic fixture, or an electric fixture, which is conducive to improving the efficiency of installing and removing the laser.

[0068] In one embodiment, a plurality of heat dissipation fins are provided on the side of the loading surface away from the laser test station 6. The heat dissipation fins are located below the loading surface, and the heat dissipation fins are located in the heat dissipation platform. The plurality of heat dissipation fins are regularly distributed. The heat generated by the laser on the laser test station 6 is transferred to the heat dissipation fins through the laser test station 6 and the loading surface to improve the heat dissipation efficiency of the laser. Furthermore, a heat dissipation liquid for heat dissipation is circulated in the heat dissipation platform. The heat dissipation liquid is located below the loading surface, and the heat dissipation fins are dissolved in the heat dissipation liquid, which is conducive to improving the heat dissipation efficiency of the heat dissipation fins, thereby improving the heat dissipation efficiency of the laser on the laser test station 6. The heat dissipation liquid can be water. On the one hand, water has good heat dissipation performance and can take away the heat from the heat dissipation fins well. On the other hand, the price of water is cheap, so as to reduce costs. Of course, the heat dissipation liquid can also be other liquids specifically used for heat dissipation.

[0069] In one embodiment, the heat sink is provided with a semiconductor cooler (tec, Thermo Electric Cooler) for controlling the temperature of the laser on the laser test station 6. The semiconductor cooler is located on the side of the loading surface away from the laser test station 6. The semiconductor cooler is preferably located inside the heat sink. The semiconductor cooler contacts the loading surface so that the semiconductor cooler controls the temperature of the laser on the laser test station 6 through the loading surface and the laser test station 6. Further, the semiconductor cooler is connected to the control device 7 so that the control device 7 controls the temperature installed on the laser test station 6 through the semiconductor cooler, making the test system more intelligent.

[0070] In one embodiment, the mobile device 4 is located in front of the heat sink, that is, the mobile device 4 is located in front of at least two laser test stations 6, and the mobile device 4 is arranged along the length direction of at least two laser test stations 6; there is a gap between the mobile device 4 and the heat sink to prevent the heat sink from limiting the movement of the mobile device 4; the laser test device 3 is installed on the mobile bracket of the mobile device 4, and there is a gap between the laser test device 3 and the heat sink to prevent the heat sink from limiting the movement of the laser test device 3 through the mobile device 4, so that the laser test device 3 can reciprocate back and forth on the movement track of the mobile device 4. The mobile device 4 can be an electric slide rail, and the mobile bracket of the electric slide rail can reciprocate back and forth in a straight line. The length direction of the electric slide rail is arranged along the length direction of at least two laser test stations 6, and the laser test device 3 is installed on the mobile bracket of the electric slide rail, and the electric slide rail drives the laser test device 3 to move one by one to the front of the laser test station 6, so that the laser test device 3 can test the laser installed on the laser test station 6. Of course, the moving device 4 can also be a linear motor. The linear motor is a transmission device that directly converts electrical energy into linear motion mechanical energy without any intermediate conversion mechanism. The moving bracket of the linear motor can reciprocate back and forth in a straight line. The laser test device 3 is installed on the moving bracket of the linear motor, so that the linear motor drives the laser test device 3 to move one by one to the front of the laser test station 6, so that the laser test device 3 is installed on the laser test station 6. It can be understood that the moving device 4 is not limited to the electric slide rail and the linear motor. The moving device 4 can be other devices that can control and realize the automatic displacement of the moving bracket to the front of the laser test station 6.

[0071] In one embodiment, the laser test device 3 includes an integrating sphere, which is fixedly mounted on a mobile bracket of the mobile device 4, so that the mobile device 4 drives the integrating sphere to reciprocate back and forth in the length direction of the mobile device 4, thereby realizing that the integrating sphere moves one by one to the front of the laser test station 6; wherein, the light inlet of the integrating sphere and the light outlet of the laser on the laser test station 6 are located at the same height, and when the mobile device 4 drives the integrating sphere to move to the front of the laser on the laser test station 6, the light inlet of the integrating sphere corresponds to the light outlet of the laser; more specifically, the center of the light inlet of the integrating sphere corresponds to the center of the light outlet of the laser, so that all the light energy emitted by the light outlet of the laser enters the light inlet of the integrating sphere, so that the integrating sphere collects the photoelectric parameters of the laser. A photoelectric detector and a spectrometer are installed on the integrating sphere. When the integrating sphere collects the photoelectric parameters of the laser, the photoelectric detector and the spectrometer analyze the photoelectric parameters of the laser collected by the integrating sphere, and generate a corresponding LIV curve and a spectrum test report in combination with the output voltage and output current of the power supply 1.

[0072] In one embodiment, the control device 7 is an industrial computer, which is connected to the power supply 1, the switch device 2, the mobile device 4 and the laser testing device 3 through a communication module, so that the industrial computer can control the power supply 1, the switch device 2, the mobile device 4 and the laser testing device 3, so that the coordination between the power supply 1, the switch device 2, the mobile device 4 and the laser testing device 3 is more regular and orderly, which is conducive to improving the testing efficiency.

[0073] In one embodiment, in order to test the divergence angle, near-field spot quality and other testing needs, corresponding equipment can be installed on the mobile bracket of the mobile device 4 to enable the test system to test the divergence angle, near-field spot quality and other parameters that need to be tested.

[0074] See also Figure 3 Based on the same inventive concept, the present invention also provides a semiconductor laser aging test method, which is applied to the above-mentioned semiconductor laser aging system and includes the following steps:

[0075] S1: Before aging the laser, control the switch device 2 so that the power supply 1 is powered on to the lasers on each laser test station 6 one by one, and control the moving device 4 to move the laser test device 3 to the corresponding laser test station 6 in turn to test the powered lasers.

[0076] In one embodiment, the industrial computer controls the first relay 21 and the second relay 22 through the communication module so that the power supply 1 is connected to the laser on each laser test station 6 one by one and powered on one by one. The laser emits light energy from the light output end of the laser due to power on. The industrial computer controls the electric slide rail to move the integrating sphere to the front of the corresponding laser test station 6 in sequence, so that the center of the light inlet of the integrating sphere corresponds to the center of the light output end of the laser; wherein, the light energy emitted by the corresponding laser light output end enters the light inlet of the integrating sphere. In order for the integrating sphere to complete the collection of the light energy emitted by the laser light output end, the integrating sphere is close to the laser. More specifically, the center of the light inlet of the integrating sphere is close to and corresponds to the center of the laser light output end, so that the integrating sphere can collect the photoelectric parameters of the laser; the photoelectric detector and the spectrometer analyze the photoelectric parameters collected by the integrating sphere, and generate corresponding LIV curves and spectrum test reports in combination with the output voltage and output current of the power supply 1.

[0077] For example, when the industrial computer controls the electric slide to move the integrating sphere to the front of the laser on the first laser test station 6, the industrial computer controls the connection terminal 8 of the first relay 21 to be connected with the first gating terminal 9, that is, the switch of the first gating terminal 9 of the first relay 21 is closed to achieve connection with the connection terminal 8, and the switches of the other gating terminals 9 of the first relay 21 are opened; the industrial computer controls the connection terminal 8 of the second relay 22 to be connected with the first gating terminal 9, that is, the switch of the first gating terminal 9 of the second relay 22 is closed to achieve connection with the connection terminal 8, and the switches of the other gating terminals 9 of the second relay 22 are opened; the power supply 1 is connected to the laser on the first laser test station 6 through the first relay 21 and the second relay 22, and the industrial computer controls the power supply 1 to power on the laser on the first laser test station 6, and the first laser test station 6 The laser on the first laser test station 6 emits light energy from the light output end due to power on, and the light energy enters the light inlet of the integrating sphere and is collected by the integrating sphere. The photoelectric detector and spectrometer analyze the photoelectric parameters collected by the integrating sphere, and generate the corresponding LIV curve and spectrum test report in combination with the output voltage and output current of the power supply 1. When the integrating sphere completes the test of the laser on the first laser test station 6, the industrial computer controls the power supply 1 to stop powering on the laser on the first laser test station 6, which reduces the waste of electricity on the one hand, and reduces the aging of the laser on the other hand. At this time, the industrial computer controls the electric slide to move the integrating sphere from the front of the first laser test station 6 to the front of the second laser test station 6; the industrial computer controls the first enable terminal 9 of the first relay 21 to be disconnected from the connection terminal 8, and controls the second enable terminal 9 of the first relay 21 to be connected to the connection terminal 8, that is, the first enable terminal 9 switch of the first relay 21 is opened to disconnect from the connection terminal 8, the second enable terminal 9 switch of the first relay 21 is closed to connect to the connection terminal 8, and the other enable terminal 9 switches of the first relay 21 are all opened; the industrial computer controls the first enable terminal 9 of the second relay 22 to be disconnected from the connection terminal 8, and controls the second enable terminal 9 of the second relay 22 to be connected to the connection terminal 8, that is, the first enable terminal 9 switch of the second relay 22 is opened to disconnect from the connection terminal 8, and the second enable terminal 9 of the second relay 22 is closed to connect to the connection terminal 8. The switch is closed to connect with the connection terminal 8, and the other selection terminals 9 switches of the second relay 22 are all opened; the power supply 1 is connected to the laser on the second laser test station 6 through the first relay 21 and the second relay 22, and the industrial computer controls the power supply 1 to power on the laser on the second laser test station 6. The laser on the second laser test station 6 emits light energy from the light output end due to power-on, and the light energy is collected by the integrating sphere through the light input port of the integrating sphere. The photoelectric detector and the spectrometer analyze the photoelectric parameters collected by the integrating sphere, and generate corresponding LIV curves and spectrum test reports in combination with the output voltage and output current of the power supply 1.When the integrating sphere completes the test on the laser at the second laser test station 6, the industrial computer controls the power supply 1 to stop energizing the laser at the second laser test station 6. The industrial computer controls the electric slide to move the integrating sphere to the front of the laser at the third laser test station 6 for testing until the test on all the lasers at the laser test stations 6 is completed.

[0078] When the integrating sphere completes the test on all the lasers on the laser testing stations 6, the industrial computer controls the electric slide rail to move the integrating sphere to the initial position before the test.

[0079] S2: During the laser aging process, the switch device 2 is controlled so that the power supply 1 and the laser on the laser testing station 6 are powered on.

[0080] In one embodiment, the industrial computer controls the first relay 21 and the second relay 22 so that the power supply 1 is connected in series with the laser on each laser test station 6 one by one, and controls the power supply 1 to power on the laser on each laser test station 6 one by one. The power-on time is 24 hours, and it can also be powered on for 48 hours, 72 hours or other suitable aging time according to actual needs to achieve aging of the laser on the laser test station 6.

[0081] In one embodiment, the industrial computer controls the first relay 21 and the second relay 22 so that the power supply 1 is connected in series with the lasers on at least two laser test stations 6, and controls the power supply 1 to power on the lasers on at least two laser test stations 6. The power-on time is 24 hours, and the power-on time can also be 48 hours, 72 hours or other suitable aging time according to actual needs to achieve aging of the lasers on the laser test station 6.

[0082] S3: After aging the laser, control the switch device 2 so that the power supply 1 is powered on to the lasers on each laser test station 6 one by one, and control the moving device 4 to move the laser test device 3 to the corresponding laser test station 6 in turn to test the powered lasers.

[0083] In one embodiment, the industrial computer controls the first relay 21 and the second relay 22 through the communication module so that the power supply 1 is connected to the laser on each laser test station 6 one by one and powered on one by one. The laser emits light energy from the light output end of the laser due to power on. The industrial computer controls the electric slide rail to move the integrating sphere to the front of the corresponding laser test station 6 in sequence, so that the center of the light inlet of the integrating sphere corresponds to the center of the light output end of the laser; wherein, the light energy emitted by the corresponding laser light output end enters the light inlet of the integrating sphere. In order for the integrating sphere to complete the collection of the light energy emitted by the laser light output end, the integrating sphere is close to the laser. More specifically, the center of the light inlet of the integrating sphere is close to and corresponds to the center of the laser light output end, so that the integrating sphere can collect the photoelectric parameters of the laser; the photoelectric detector and the spectrometer analyze the photoelectric parameters collected by the integrating sphere, and generate corresponding LIV curves and spectrum test reports in combination with the output voltage and output current of the power supply 1.

[0084] For example, when the industrial computer controls the electric slide to move the integrating sphere to the front of the laser on the first laser test station 6, the industrial computer controls the connection terminal 8 of the first relay 21 to be connected with the first gating terminal 9, that is, the switch of the first gating terminal 9 of the first relay 21 is closed to achieve connection with the connection terminal 8, and the switches of the other gating terminals 9 of the first relay 21 are opened; the industrial computer controls the connection terminal 8 of the second relay 22 to be connected with the first gating terminal 9, that is, the switch of the first gating terminal 9 of the second relay 22 is closed to achieve connection with the connection terminal 8, and the switches of the other gating terminals 9 of the second relay 22 are opened; the power supply 1 is connected to the laser on the first laser test station 6 through the first relay 21 and the second relay 22, and the industrial computer controls the power supply 1 to power on the laser on the first laser test station 6, and the first laser test station 6 The laser on the first laser test station 6 emits light energy from the light output end due to power on, and the light energy enters the light inlet of the integrating sphere and is collected by the integrating sphere. The photoelectric detector and spectrometer analyze the photoelectric parameters collected by the integrating sphere, and generate the corresponding LIV curve and spectrum test report in combination with the output voltage and output current of the power supply 1. When the integrating sphere completes the test of the laser on the first laser test station 6, the industrial computer controls the power supply 1 to stop powering on the laser on the first laser test station 6, which reduces the waste of electricity on the one hand, and reduces the aging of the laser on the other hand. At this time, the industrial computer controls the electric slide to move the integrating sphere from the front of the first laser test station 6 to the front of the second laser test station 6; the industrial computer controls the first enable terminal 9 of the first relay 21 to be disconnected from the connection terminal 8, and controls the second enable terminal 9 of the first relay 21 to be connected to the connection terminal 8, that is, the first enable terminal 9 switch of the first relay 21 is opened to disconnect from the connection terminal 8, the second enable terminal 9 switch of the first relay 21 is closed to connect to the connection terminal 8, and the other enable terminal 9 switches of the first relay 21 are all opened; the industrial computer controls the first enable terminal 9 of the second relay 22 to be disconnected from the connection terminal 8, and controls the second enable terminal 9 of the second relay 22 to be connected to the connection terminal 8, that is, the first enable terminal 9 switch of the second relay 22 is opened to disconnect from the connection terminal 8, and the second enable terminal 9 of the second relay 22 is closed to connect to the connection terminal 8. The switch is closed to connect with the connection terminal 8, and the other selection terminals 9 switches of the second relay 22 are all opened; the power supply 1 is connected to the laser on the second laser test station 6 through the first relay 21 and the second relay 22, and the industrial computer controls the power supply 1 to power on the laser on the second laser test station 6. The laser on the second laser test station 6 emits light energy from the light output end due to power-on, and the light energy is collected by the integrating sphere through the light input port of the integrating sphere. The photoelectric detector and the spectrometer analyze the photoelectric parameters collected by the integrating sphere, and generate corresponding LIV curves and spectrum test reports in combination with the output voltage and output current of the power supply 1.When the integrating sphere completes the test on the laser at the second laser test station 6, the industrial computer controls the power supply 1 to stop energizing the laser at the second laser test station 6. The industrial computer controls the electric slide to move the integrating sphere to the front of the laser at the third laser test station 6 for testing until the test on all the lasers at the laser test stations 6 is completed.

[0085] When the integrating sphere completes the test on all the lasers on the laser testing stations 6, the industrial computer controls the electric slide rail to move the integrating sphere to the initial position before the test.

[0086] S4: Based on the photoelectric parameters collected by the laser testing device 3 for each laser before and after aging the laser, an aging test result of each laser is obtained.

[0087] The test results include LIV curves and spectrum test reports. The test system automatically compares the LIV curves and spectrum test reports of the laser before and after aging on each laser test station 6, and determines whether the laser is qualified based on the comparison results. The test system of the present application integrates the performance test of the laser before aging, the performance test of the laser after aging and aging at the same location, namely, the laser test station 6, thereby reducing the steps of moving and disassembling the laser during the performance test of the laser before aging, the performance test of the laser after aging and aging, so as to reduce the steps of testing the laser. On the one hand, it is beneficial to improve the efficiency of testing the laser, and on the other hand, it reduces the labor cost, thereby reducing the cost of testing the laser. The test system controls the power supply 1, the switch device 2, the moving device 4 and the laser test device 3 through the control device 7 to automatically complete the performance test before aging, the aging and the performance test after aging of the laser on the laser test station 6. On the one hand, the test system is more intelligent, and on the other hand, it can effectively improve the efficiency of testing the laser. The test system automatically compares the photoelectric parameters of the laser before and after aging, thereby reducing the steps of manually comparing the photoelectric parameters of the laser before and after aging, thereby improving the efficiency of testing the laser. The test system only needs to set up the laser test station 6, and does not need to set up the laser aging station, thereby reducing the cost of setting up the laser aging station, thereby reducing the cost of the test system.

[0088] The above are only preferred implementations of the present application, and are not intended to limit the patent scope of the present application. Any equivalent structure or equivalent process transformation made using the contents of the present application specification and drawings, or directly or indirectly used in other related technical fields, are also included in the patent protection scope of the present application.

Claims

1. A semiconductor laser aging test system, characterized in that: include: Power supply for laser aging test (1); At least two laser test stations (6) for installing lasers to be tested for aging; A laser testing device (3) for collecting photoelectric parameters of the laser at each of the laser testing stations (6); A moving device (4) for moving the laser testing device (3) to a corresponding laser testing station (6); A switch device (2), one end of which is connected to the power supply (1), and the other end of which is used to connect to the laser on each of the laser test stations (6), and is used to control the power-on state between the power supply (1) and the laser on each of the laser test stations (6); A control device (7) connected to the laser testing device (3), the moving device (4) and the switch device (2) and used for: Before aging the laser, the switch device (2) is controlled so that the power supply (1) is powered on to each laser on the laser test station (6) one by one, and the moving device (4) is controlled to move the laser test device (3) to the corresponding laser test station (6) in turn to test the powered laser; During the aging process of the laser, the switch device (2) is controlled so that the power supply (1) and the laser on the laser testing station (6) are powered on; After aging the laser, controlling the switch device (2) so that the power supply (1) is powered on to each laser on the laser test station (6) one by one, and controlling the moving device (4) to move the laser test device (3) to the corresponding laser test station (6) in turn to test the powered laser; Based on the photoelectric parameters collected by the laser testing device (3) for each laser before and after aging the laser, an aging test result of each laser is obtained; Wherein, the switch device (2) comprises: A first relay (21), whose connecting end (8) is connected to the positive electrode of the power source (1), whose controlled end is connected to the control device (7), and whose at least two strobe ends (9) are used to be connected to the positive electrodes of the lasers on at least two laser test stations (6) in a one-to-one correspondence, and which is used to connect the connecting end (8) and the corresponding strobe end (9) under the control of the control device (7); a second relay (22), whose connection end (8) is connected to the negative electrode of the power supply (1), whose controlled end is connected to the control device (7), and whose at least two strobe ends (9) are used to be connected to the negative electrodes of the lasers on at least two laser test stations (6) in a one-to-one correspondence, and which is used to connect the connection end (8) and the corresponding strobe end (9) under the control of the control device (7); Wherein, the lasers on at least two of the laser testing stations (6) are connected in series; When testing the laser on the laser testing station (6), the control device (7) controls the first relay (21) and the second relay (22) so that the power supply (1) is energized to the lasers on the laser testing station (6) one by one; When aging the laser on the laser test station (6), the control device (7) controls the connection end (8) of the first relay (21) to connect to the first gating end (9), and the connection end (8) of the first relay (21) is disconnected from the remaining gating ends (9), and controls the connection end (8) of the second relay (22) to connect to the second gating end (9), and the connection end (8) of the second relay (22) is disconnected from the remaining gating ends (9); the first gating end (9) is the gating end (9) connecting the first relay (21) to the positive pole of the first laser connected in series among the at least two lasers on the laser test station (6), and the second gating end (9) is the gating end (9) connecting the second relay (22) to the negative pole of the last laser connected in series among the at least two lasers on the laser test station (6).

2. The semiconductor laser aging test system according to claim 1, characterized in that: The control device (7) is also connected to the power source (1), and the control device (7) is also used for: When the laser starts to age, the output current of the power supply (1) is controlled to gradually increase to a preset ageing current according to a predetermined current step amplitude; When the aging of the laser is completed, the output current of the power supply (1) is controlled to gradually decrease from the aging current to zero.

3. The semiconductor laser aging test system according to claim 1, characterized in that: The test system further comprises: A heat dissipation device (5) is provided with at least two of the laser test stations (6) and is used to dissipate heat for the lasers on the at least two laser test stations (6).

4. The semiconductor laser aging test system according to claim 3, characterized in that: The heat dissipation device (5) comprises a heat dissipation platform, the heat dissipation platform is provided with a loading surface, and at least two laser test stations (6) are arranged on the loading surface.

5. The semiconductor laser aging test system according to claim 4, characterized in that: A heat dissipation fin is provided on the side of the loading surface away from the laser test station (6), and a heat dissipation liquid for heat dissipation circulates in the heat dissipation platform. The heat dissipation liquid is located below the loading surface, and the heat dissipation fin is dissolved in the heat dissipation liquid.

6. The semiconductor laser aging test system according to claim 4, characterized in that: The heat dissipation platform is provided with a semiconductor refrigerator for controlling the temperature, and the semiconductor refrigerator is located on the side of the loading surface away from the laser testing station (6).

7. The semiconductor laser aging test system according to claim 1, characterized in that: The moving device (4) is located in front of at least two of the laser test stations (6), and the moving device (4) is an electric slide rail or a linear motor.

8. The semiconductor laser aging test system according to claim 1, characterized in that: The laser testing device (3) comprises an integrating sphere, which is fixedly mounted on a moving bracket of the moving device (4).

9. The semiconductor laser aging test system according to claim 8, characterized in that: A photoelectric detector and a spectrometer are installed on the integrating sphere. The integrating sphere is provided with a light inlet. During testing, the light inlet of the integrating sphere corresponds to the light output end of the laser on each laser testing station (6).

10. A semiconductor laser aging test method, characterized in that: The semiconductor laser aging test system as described in any one of claims 1 to 9 above comprises: Before aging the laser, the switch device (2) is controlled so that the power supply (1) is powered on to each laser on the laser test station (6) one by one, and the moving device (4) is controlled to move the laser test device (3) to the corresponding laser test station (6) in turn to test the powered laser; During the aging process of the laser, the switch device (2) is controlled so that the power supply (1) and the laser on the laser testing station (6) are powered on; After aging the laser, controlling the switch device (2) so that the power supply (1) is powered on to each laser on the laser test station (6) one by one, and controlling the moving device (4) to move the laser test device (3) to the corresponding laser test station (6) in turn to test the powered laser; Based on the photoelectric parameters collected by the laser testing device (3) for each laser before and after aging the laser, an aging test result of each laser is obtained.

11. The semiconductor laser aging test method according to claim 10, characterized in that: After the laser testing device (3) tests the laser on the laser testing station (6), the power supply (1) is controlled so that the power supply (1) stops energizing the corresponding laser.

12. The semiconductor laser aging test method according to claim 10, characterized in that: After the laser testing device (3) tests the laser on the laser testing station (6), the switching device (2) is controlled to disconnect the power supply (1) from the laser on the laser testing station (6), and the switching device (2) is controlled to connect the power supply (1) to the laser on another laser testing station (6).

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