Handling devices and carriers

Abstract

The present invention provides a transport device and carrier that can reduce the influence of magnetism on magnetic position detection during magnetic transport. The transport device includes: a carrier for carrying a substrate; a transport mechanism for transporting the carrier using magnetic force; and a magnetic detection mechanism for detecting the position of the carrier in the transport direction. The carrier includes: a substrate support portion for supporting the substrate; a magnet support portion connected to an end of the substrate support portion via a connecting portion and supporting a permanent magnet of the transport mechanism that acts as a magnet. The detection mechanism is positioned closer to the substrate support portion than the connecting portion, and the connecting portion is formed of a magnetic material.

Description

Technical Field

[0001] The present invention relates to a substrate transport technology, and in particular to a transport device and a carrier. Background Art

[0002] Organic EL displays (OLEDs) are used not only in smartphones, televisions, and automotive displays, but also in VR-HMDs (Virtual Reality Head Mount Displays). Displays for VR-HMDs, in particular, require highly precise pixel patterns. In the manufacture of OLEDs, the organic light-emitting elements (OLEDs) that make up the OLEDs are formed by depositing a film material from a deposition source in a film-forming apparatus through a mask with a pixel pattern formed on the substrate, forming an organic layer and a metal layer.

[0003] In such film-forming equipment, it is necessary to prevent contaminants from adhering to the substrate during film formation. However, the substrate transport mechanism can be a source of contaminants. One transport mechanism that generates relatively little contaminants is magnetic transport, which uses magnets to move the transport carrier. In particular, magnetic levitation transport is a contactless transport method that minimizes contact between the carrier holding the substrate and mask and the components of the transport mechanism, thus suppressing the generation of contaminants.

[0004] In this magnetic levitation transport, in order to control the transport carrier, it is necessary to measure the carrier's position and obtain it as control information. One method for this is known to be magnetic position detection technology. This method uses a magnetic detection head (magnetic sensor) and a magnetic scale with a recorded magnetic pattern to detect position non-contact and with high precision (Patent Document 1, etc.).

[0005] Prior art literature

[0006] Patent Literature

[0007] Patent Document 1: Japanese Patent Application Laid-Open No. 2004-56892 Summary of the Invention

[0008] Problems to be solved by the invention

[0009] When magnetic transport is used for transporting a carrier and a magnetic position detection technology is used for detecting the position of the carrier, the magnetism in the magnetic transport may affect the position detection of the magnetic sensor.

[0010] An object of the present invention is to provide a technology for reducing the influence of magnetism on magnetic position detection during magnetic transport.

[0011] Solutions to Problems

[0012] According to the present invention, there is provided a transport device comprising:

[0013] a carrier that carries a substrate;

[0014] a transport mechanism that transports the carrier using magnetic force; and

[0015] A magnetic detection mechanism detects the position of the carrier in the transport direction.

[0016] The transport device is characterized in that

[0017] The carrier has:

[0018] a substrate support portion that supports the substrate; and

[0019] A magnet support portion is connected to the end of the substrate support portion via a connecting portion, and supports the permanent magnet of the conveying mechanism.

[0020] The detection mechanism is arranged at a position closer to the substrate support portion than the connection portion.

[0021] The connecting portion is formed of a magnetic material.

[0022] In addition, according to the present invention, a carrier is provided,

[0023] The carrier carries the substrate, is transported by the transport mechanism using magnetic force, and the position in the transport direction is detected by the magnetic detection mechanism.

[0024] The carrier is characterized in that

[0025] The carrier has:

[0026] a substrate support portion that supports the substrate; and

[0027] A magnet support portion is connected to the end of the substrate support portion via a connecting portion, and supports the permanent magnet of the conveying mechanism.

[0028] The detection mechanism is arranged at a position closer to the substrate support portion than the connection portion.

[0029] The connecting portion is formed of a magnetic material.

[0030] Effects of the Invention

[0031] According to the present invention, it is possible to provide a technique for reducing the influence of magnetism during magnetic transport on magnetic position detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1It is a schematic diagram schematically showing a film forming apparatus to which a conveying device according to an embodiment of the present invention is applied.

[0033] Figure 2 It is along Figure 1 Cross-sectional view of the carrier and handling device of the A-A line.

[0034] Figure 3 is a top view of the carrier.

[0035] FIG. 4(A) is a diagram showing magnetic flux lines in a comparative example, and FIG. 4(B) is a diagram showing magnetic flux lines in an embodiment.

[0036] FIG. 5(A) is a diagram illustrating magnetic flux lines in a conveying device, and FIG. 5(B) is a diagram illustrating a configuration example of another embodiment.

[0037] Figure 6 It is a diagram showing a configuration example of another embodiment.

[0038] 7(A) and 7(B) are diagrams showing a configuration example of another embodiment.

[0039] Description of Reference Numerals

[0040] 100 film forming device, 110 substrate, 111 mask, 1 carrier, 2 transport device, 3 position detection unit, 10 substrate support portion, 11 magnet support portion, 12 connection portion DETAILED DESCRIPTION

[0041] The following embodiments are described in detail with reference to the accompanying drawings. It should be noted that the following embodiments are not intended to limit the inventions set forth in the claims. While various features are described in the embodiments, not all of these features are essential to the inventions. Furthermore, any combination of features is possible. Furthermore, in the accompanying drawings, identical or similar structures are denoted by the same reference numerals, and duplicate descriptions are omitted.

[0042] <First embodiment>

[0043] <Overview of Film Formation Equipment>

[0044] Figure 1: This is a simplified diagram schematically showing a film forming device 100 to which the conveying device 2 involved in an embodiment of the present invention is applied. The film forming device 100 is a device for forming a film of a vapor-deposited substance on a substrate 110, and a thin film of the vapor-deposited substance of a predetermined pattern is formed using a mask 111. The material of the substrate 110 on which the film forming device 100 is used for film formation can be appropriately selected from materials such as glass, resin, and metal, and a substrate having a resin layer such as polyimide formed on glass is preferably used. As the vapor-deposited substance, there are organic materials, inorganic materials (metals, metal oxides, etc.) and the like. The film forming device 100 can be applied to manufacturing devices for manufacturing electronic devices such as display devices (flat panel displays, etc.), thin-film solar cells, organic photoelectric conversion elements (organic thin-film imaging elements), optical components, etc., and can be applied in particular to manufacturing devices for manufacturing organic EL panels. In the following description, it is assumed that the film forming device 100 forms a film on the substrate 110 by vacuum evaporation, but the present invention is not limited to this, and various film forming methods such as sputtering and CVD can be applied. In addition, in each figure, the arrow Z indicates the up-down direction (the direction of gravity), and the arrow X and the arrow Y indicate horizontal directions that are orthogonal to each other.

[0045] The film-forming apparatus 100 is an inline film-forming apparatus that deposits a deposition material while transporting a substrate 110. It includes a substrate loading chamber 101, a mask loading chamber 102, an alignment chamber 103, a film-forming chamber 104, a mask unloading chamber 105, and a substrate unloading chamber 110, which are arranged in the X direction. The substrate 110 and mask 111 are transported in the X direction by a transport device 2 via a carrier 1. In the illustrated example, the substrate 110 is rectangular.

[0046] The carrier 1 and the substrate 5 on which the film has not been formed are put into the substrate carrying-in chamber 101, and the substrate 5 is loaded onto the carrier 1 in the substrate carrying-in chamber 101. The carrier 1 carrying the substrate 110 is carried into the mask carrying-in chamber 102, where the mask 111 is also loaded onto the carrier 1. The carrier 1 carrying the substrate 110 and the mask 111 is transported to the alignment chamber 103, where the substrate 110 and the mask 111 are aligned. The mask 111 is held so as to overlap with the substrate 110 below the substrate 110. Then, the carrier 1 carrying the substrate 110 and the mask 111 is transported to the film forming chamber 104. In the film forming chamber 104, when passing over the evaporation source, the evaporation material is evaporated through the mask 111. The film forming chamber 104 includes a plurality of evaporation chambers, and the evaporation material can be evaporated onto the substrate 110 in each evaporation chamber.

[0047] The carrier 1 carrying the film-formed substrate 110 and mask 111 is transported to the mask unloading chamber 105, where the mask 111 is separated from the carrier 1 and unloaded. The carrier 1 carrying the film-formed substrate 110 is then transported to the substrate unloading chamber 106, where the substrate 110 is separated from the carrier 1 and unloaded. The carrier 1 is also unloaded.

[0048] Regarding the structure of the transport device 2 and the carrier 1, Figure 1 Based on this, we also refer to Figure 2 and Figure 3 Provide explanation. Figure 2 It is along Figure 1 A cross-sectional view of the transport device 2 of the A-A line, Figure 3 is a top view of the carrier 1.

[0049] The transport device 2 includes a pair of transport units CU separated in the width direction of the substrate 110. Each transport unit CU extends in the X direction to form an X-direction transport path for the carrier 1. The transport unit CU is a unit that uses magnetic force to suspend and transport the carrier 1. The transport unit CU includes a plurality of electromagnets (coils) 21 and permanent magnets 23 arranged in the X direction, which are separated in the Z direction in the frame 20. Magnetic shields 22 are provided on both sides of the electromagnet 21 in the Y direction. The magnetic shield 22 is, for example, a plate-shaped component made of a magnetic material.

[0050] The conveying device 2 also includes a limiting unit 24 for limiting the moving range of the carrier 1. The limiting unit 24 is supported by the frame 20 and extends in the X direction. The limiting unit 24 includes a roller R1 for limiting the moving range of the carrier 1 in the Y direction and rollers R2 and R3 for limiting the moving range of the carrier 1 in the Z direction. The roller R1 is a free-rotating body that can rotate freely around a rotation axis in the Z direction, and is opposite to the end face in the Y direction of the abutment portion 13 located at the extreme end in the Y direction of the carrier 1. When the carrier 1 wants to detach from the conveying path in the Y direction, the roller R1 abuts against the abutment portion 13 to prevent detachment. The rollers R2 and R3 are free-rotating bodies that can rotate freely around a rotation axis in the Y direction, and are separated in the Z direction. Roller R2 faces the upper surface of abutment portion 13, and roller R3 faces the lower surface of abutment portion 13. When carrier 1 reaches the upper or lower limit position, roller R2 or R3 abuts against abutment portion 13, restricting further Z-direction movement of carrier 1. Rollers R1-R3 can also be used as support members for carrier 1 when carrier 1 is not suspended (in the non-suspended position).

[0051] The carrier 1 has a rectangular shape when viewed from above and includes a substrate support portion 10 that supports a substrate 110, a pair of magnet support portions 11, and a mask support portion 14. The substrate support portion 10 is located in the center in the Y direction. The pair of magnet support portions 11 are connected to the Y-direction ends of the substrate support portion 10 via connecting portions 12 and are arranged along two opposing sides of the substrate support portion 10 in the Y direction. Both the substrate support portion 10 and the magnet support portion 11 are rectangular plate-shaped components.

[0052] The substrate support 10 supports the substrate 110 on its lower surface. The substrate support 10 includes a holding portion for holding the substrate 110. The holding portion may be, for example, an adhesive portion using an adhesive material or a suction portion using air suction. The holding portion may also be a clamping mechanism that mechanically clamps the substrate. The substrate 110 is supported in a horizontal position on the XY plane.

[0053] The mask support 14 supports the mask 111 below the substrate 110, overlapping the substrate 110 supported by the substrate support 10. The mask support 14 includes a holding portion for holding the mask 111. The holding portion may be, for example, an adhesive portion using an adhesive material or a suction portion using air suction. The holding portion may also be a clamp mechanism that mechanically clamps the substrate. The mask 111 is supported in a horizontal position on the XY plane.

[0054] Each magnet support 11 has an end on the connection portion 12 side and an end on the opposite side in the Y direction. The contact portion 13 that contacts the restriction unit 24 is a plate-shaped member connected to the opposite end and extends in the X direction.

[0055] A plurality of permanent magnets M1 and M2 are supported on each magnet support 11. The plurality of permanent magnets M1 and M2 are arranged in the X direction and are provided with a yoke (not shown). The permanent magnet M1 is fixed to the lower surface of the magnet support 11 in such a manner as to be opposed to the permanent magnet 23 of the transport unit CU in the Z direction. The repulsive force between the permanent magnet 23 and the permanent magnet M1 is used to generate a levitation force on the carrier 1. The permanent magnet M2 is fixed to the upper surface of the magnet support 11 in such a manner as to be opposed to the electromagnet 21 of the transport unit CU in the Z direction. By sequentially switching the electromagnet 21 that generates the magnetic force, the attraction between the electromagnet 21 and the permanent magnet M2 can be used to generate a moving force in the X direction for the carrier 1.

[0056] It should be noted that in this embodiment, the electromagnet 21 and the permanent magnet 23 are arranged inside each chamber (101 to 106) of the film forming apparatus 100 (inside the chamber), but they may also be arranged outside the chamber. Furthermore, in order to levitate and transport the carrier 1, a levitation force is generated by the repulsive force between the permanent magnet 23 and the permanent magnet M1. However, even if the permanent magnet 23 and the permanent magnet M1 are omitted and only the permanent magnet M2 and the electromagnet 21 are used, levitation and transport of the carrier 1 can still be achieved.

[0057] Each connecting portion 12 is formed of a magnetic material. For example, the magnetic material is a soft magnetic material such as iron. The other components of the carrier 1 (the substrate support portion 10, the magnet support portion 11, and the contact portion 13) are formed of non-magnetic materials such as aluminum or an aluminum alloy. By forming the connecting portions 12 from a magnetic material, the range of the magnetic effect generated by the permanent magnets M1 and M2 is limited. Details will be described later.

[0058] Next, the transport device 2 includes a magnetic detection unit 3 for detecting the position of the carrier 1 in the transport direction (X direction). The detection unit 3 includes a magnetic scale 31 and a magnetic sensor 32. In the present embodiment, the magnetic scale 31 is provided on the carrier 1, which is the movable side, and the magnetic sensor 32 is provided on the frame 20, which is the fixed side.

[0059] The magnetic scale 31 is a strip-shaped component extending in the X direction, and a magnetic pattern is recorded in the X direction. In the case of this embodiment, the magnetic scale 31 is provided at one end of the substrate support portion 10 in the Y direction. The magnetic sensor 32 is a sensor (magnetic detection head) that reads the magnetic pattern of the magnetic scale 31, and is arranged at a position opposite to the magnetic scale 31. The detection result of the magnetic sensor 32 can be used to determine the position of the carrier 1 in the X direction, and the electromagnet 21 is driven by feedback control based on the determined position, so that the transportation control of the carrier 1 can be performed. Figure 1 As shown, the magnetic sensors 32 are arranged at multiple locations along the transport path in the film forming apparatus 1. Note that, in this embodiment, the magnetic scale 31 and the magnetic sensor 32 are arranged only at one end of the substrate support 10 in the Y direction, but they may be arranged at both ends.

[0060] The detection unit 3 is positioned closer to the substrate support portion 10 than the connection portion 12 in the Y direction. By forming the connection portion 12 from a magnetic material as described above, the influence of the magnetism of the permanent magnets M1 and M2 supported by the magnet support portion 11 on the position detection of the detection unit 3 can be reduced. Figures 4(A) and 4(B) are explanatory diagrams of this.

[0061] FIG4(A) shows, as a comparative example, a structure in which the substrate support portion 10 and the magnet support portion 11 are connected, without a structure corresponding to the connecting portion 12. The illustrated example schematically illustrates magnetic flux lines F1 of the magnetic flux generated by the permanent magnets M1 and M2. The magnets of the permanent magnets M1 and M2 influence each other, generating leakage flux that does not contribute to the movement or levitation of the carrier 1. FIG4(A) shows only the magnetic flux lines of this leakage flux. This magnetic flux may affect the magnetic scale 31 and the magnetic sensor 32, reducing their position detection accuracy.

[0062] Figure 4(B) shows the magnetic flux lines F1 and F2 in this embodiment. By forming the connecting portion 12 from a magnetic material, the magnetic flux generated by the permanent magnets M1 and M2 is attracted toward the connecting portion 12, as indicated by the magnetic flux line F2. This prevents leakage magnetic flux from reaching the magnetic scale 31 and the magnetic sensor 32. The connecting portion 12 in this embodiment includes a portion 12a extending upward in the Z direction from the magnet support portion 11. Portion 12a is configured to be at the same height as, or higher than, the Z direction height of the permanent magnet M2. Furthermore, the connecting portion 12 includes a portion 12b extending downward in the Z direction from the magnet support portion 11. Portion 12b is configured to be at the same height as, or lower than, the Z direction height of the permanent magnet M1. This more effectively attracts the magnetic flux generated by the permanent magnets M1 and M2 toward the connecting portion 12. This reduces the effect of the magnetism of the permanent magnets M1 and M2 on position detection by the detection unit 3.

[0063] FIG5(A) illustrates the effect of shielding the magnetic flux generated by the electromagnet 21 using the magnetic shield 22. The magnetic shield 14 shields the leakage magnetic flux F3 generated by the electromagnet 21, which does not contribute to the movement of the carrier 1, thereby reducing the effect of the magnetism generated by the electromagnet 21 on the position detection of the detection unit 3.

[0064] <Second embodiment>

[0065] In the first embodiment, only the connection portion 12 made of magnetic material is used to reduce the influence of the magnetism of the permanent magnets M1 and M2 on the position detection of the detection unit 3, but it can also be used together with a magnetic shield. Figure 5(B) shows an example. In the example shown in the figure, the connection portion 12' corresponding to the connection portion 12 is a structure that does not have the portion 12a. Instead, a magnetic shielding component 15 is provided in the connection portion 12'. The magnetic shielding component 15 is an L-shaped component extending in the X direction and is formed of a magnetic material. The magnetic shielding component 15 plays the same role as the portion 12a, mainly attracting the magnetic flux generated by the permanent magnet M2 to reduce the influence on the detection unit 3.

[0066] <Third embodiment>

[0067] In the first embodiment, an example of a structure in which the carrier 1 is floated and transported in the X direction has been described. However, a structure in which the carrier 1 is floated and transported in two directions intersecting with each other may also be employed. Figure 6 7(A) is a plan view of the carrier 1 of this embodiment, and FIG7(A) is a plan view of the conveying device 2 of this embodiment. In this embodiment, an example in which the carrier 1 can be conveyed in the X direction and the Y direction will be described.

[0068] The carrier 1 has a cross shape when viewed from above. Similar to the first embodiment, magnet support portions 11 are arranged along two opposing sides of the substrate support portion 10 in the Y direction. Furthermore, magnet support portions 11' are arranged along two opposing sides in the X direction. The magnet support portions 11' have the same structure as the magnet support portions 11. Furthermore, the magnet support portions 11' are connected to the substrate support portion 10 via connectors 12, and abutment portions 13 are provided at their ends.

[0069] The conveying device 2 includes the same conveying unit CU as that of the first embodiment, and also includes a conveying unit CU′ having the same structure as the conveying unit CU. The conveying unit CU is extended in the Y direction.

[0070] The detection unit 3 has multiple magnetic sensors 32 installed along the transport path of the transport unit CU and the transport path of the transport unit CU'. Furthermore, the detection unit 3 has a magnetic scale 31 extending in the X direction and a magnetic scale 31 extending in the Y direction. These magnetic scales 31 are arranged at the ends of the substrate support 10.

[0071] In the transport device 2 formed with this structure, the carrier 1 can be transported in the X direction using the transport unit CU and the permanent magnets M1 and M2 of the magnet support 11. From the end point of the transport unit CU, the carrier 1 can be transported in the Y direction using the transport unit CU' and the permanent magnets M1 and M2 of the magnet support 11'. In this structure, the connection portion 12 made of a magnetic material also prevents the magnetism of the permanent magnets M1 and M2 of the magnet support 11 and 11' from affecting the detection unit 3. It should be noted that in this embodiment, when the transport direction of the carrier 1 is changed, the carrier 1 is transported without changing its orientation. However, a structure in which the carrier 1 is rotated 90 degrees can also be used.

[0072] <Fourth embodiment>

[0073] In the first embodiment, the magnetic scale 31 is provided on the carrier 1, which is the movable side, and the magnetic sensor 32 is provided on the frame 20, which is the fixed side. However, the reverse configuration can also be adopted. Figure 7(B) shows an example. In the illustrated example, the magnetic sensor 32 is mounted on the carrier 1, and the magnetic scale 31 is supported by the frame 20. At least one magnetic sensor 32 can be provided for each carrier 1. The magnetic scale 31 is provided along the transport path of the carrier 1, but it can also be provided in areas where precise positioning accuracy is not required.

[0074] The present invention is not limited to the above-described embodiment, and various changes and modifications can be made without departing from the spirit and scope of the invention. Therefore, the appended claims are hereby appended to disclose the scope of the invention.

Claims

1. A transport device comprising: a carrier that carries a substrate; a transport mechanism that transports the carrier using magnetic force; and A magnetic detection mechanism detects the position of the carrier in the transport direction. The transport device is characterized in that The carrier has: a substrate support portion that supports the substrate; and A magnet support portion is connected to the end of the substrate support portion via a connecting portion, and supports the permanent magnet of the conveying mechanism. The detection mechanism is arranged at a position closer to the substrate support portion than the connection portion. The connecting portion is formed of a magnetic material.

2. The transport device according to claim 1, wherein: The testing organization has: a magnetic scale supported on the carrier; and A magnetic sensor is disposed on the transport path of the carrier and reads the magnetic scale.

3. The transport device according to claim 1, wherein: The connection portion is provided with a magnetic shield member disposed between the permanent magnet and the detection mechanism.

4. The transport device according to claim 1, wherein: The transport mechanism can transport the carrier along a first direction and a second direction intersecting the first direction. The magnet support portion includes: a first magnet support portion arranged along the first direction; and The second magnet support portion is arranged along the second direction.

5. The transport device according to claim 1, wherein: The magnet support portion supports: a first permanent magnet, which utilizes the first magnetism from the transport mechanism to generate a levitation force on the carrier; as well as The second permanent magnet utilizes the second magnetism from the transport mechanism to cause the carrier to generate a moving force in the transport direction.

6. The transport device according to claim 1, wherein: The carrier includes a mask support portion that supports the mask so as to overlap with the substrate.

7. The transport device according to claim 1, wherein: The substrate support portion is in the shape of a rectangular plate. The magnet support portion includes a pair of first magnet support portions arranged along two opposing sides of the substrate support portion.

8. The transport device according to claim 4, wherein: The first direction is orthogonal to the second direction, The substrate support portion is in the shape of a rectangular plate. The magnet support portion includes: a pair of first magnet support portions arranged along two opposing sides of the substrate support portion; and A pair of second magnet support portions is arranged along two opposite sides of the substrate support portion that are different from the two sides.

9. The transport device according to claim 1, wherein: The transport device includes a freely rotating body for limiting the range of movement of the carrier in a direction intersecting the transport direction. The magnet support portion includes a first end portion connected to the connection portion and a second end portion opposite to the first end portion. The second end portion is connected to a contact portion capable of contacting the freely rotatable body.

10. A carrier that carries a substrate, is transported by a transport mechanism using magnetic force, and has its position in the transport direction detected by a magnetic detection mechanism. The carrier is characterized in that The carrier has: a substrate support portion that supports the substrate; and A magnet support portion is connected to the end of the substrate support portion via a connecting portion, and supports the permanent magnet of the conveying mechanism. The detection mechanism is arranged at a position closer to the substrate support portion than the connection portion. The connecting portion is formed of a magnetic material.

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