Display substrate, manufacturing method thereof, and evaporation equipment

Abstract

The present application provides a display substrate, a manufacturing method thereof, and an evaporation device. The display substrate has a display area and an overlap area. The overlap area includes two first overlap areas extending along a first direction and located on opposite sides of the display area. The display substrate includes a base substrate and a light-emitting functional layer and an electrode layer located on the base substrate. The light-emitting functional layer includes two second portions located in the two first overlap areas, each second portion including a plurality of first block structures spaced apart along the first direction. The electrode layer includes two fourth portions located in the two first overlap areas, each fourth portion including a plurality of second block structures spaced apart along the first direction. The orthographic projections of the first block structures and the second block structures located in the same first overlap area on the base substrate at least partially do not overlap. The light-emitting functional layer and the electrode layer of the display substrate provided in the present application can share the same mask plate in the evaporation device, thereby simplifying the manufacturing process and reducing production costs.

Description

Technical Field

[0001] The present application relates to the field of display technology, and in particular to a display substrate, a manufacturing method thereof, and an evaporation device. Background Art

[0002] With the continuous advancement of technology, people have higher and higher requirements for the quality of display devices. Organic Light Emitting Diode (OLED) displays have advantages such as self-luminescence, wide viewing angle, low power consumption, and fast response speed, and are gradually being used on a large scale.

[0003] OLED displays include a light-emitting functional layer and a cathode layer stacked on the light-emitting functional layer. The light-emitting functional layer and the cathode layer are generally formed by vapor deposition. To achieve the display function, both the light-emitting functional layer and the cathode layer need to be provided with corresponding structures in the display area of ​​the OLED display. In addition, because the cathode layer needs to be overlapped with the external circuit to receive electrical signals, the cathode layer also needs to be provided with corresponding structures in the overlap area surrounding the display area of ​​the OLED display. This results in the use of mask plates of different sizes during the vapor deposition process of the light-emitting functional layer and the cathode layer, and the corresponding need to be equipped with a series of cavities to meet the process requirements, resulting in a significant increase in the production and manufacturing costs of OLED displays. This problem needs to be solved urgently. Summary of the Invention

[0004] The present application provides a display substrate, a manufacturing method thereof, and an evaporation device, which can realize evaporation film formation of a light-emitting functional layer and a cathode layer while sharing a set of mask plates, thereby greatly reducing the production cost of the display substrate.

[0005] In order to achieve the above-mentioned objectives, the display substrate, its manufacturing method, and evaporation equipment of the present application adopt the following technical solutions.

[0006] The present application provides a display substrate, the display substrate having a display area and an overlapping area surrounding the display area, the overlapping area including two first overlapping areas, the two first overlapping areas extending along a first direction and respectively located on opposite sides of the display area, each of the first overlapping areas being provided with a plurality of signal traces, the display substrate comprising a base substrate and a light-emitting functional layer and an electrode layer stacked on the base substrate;

[0007] The light-emitting functional layer includes a first portion located in the display area and two second portions located in the two first overlapping areas, each of the second portions includes a plurality of first block structures arranged at intervals along a first direction, and each of the first block structures is connected to the first portion; the electrode layer includes a third portion located in the display area and two fourth portions located in the two first overlapping areas, each of the fourth portions includes a plurality of second block structures arranged at intervals along the first direction, and each of the second block structures is connected to the third portion;

[0008] In the same first overlapping region, the orthographic projections of the first block structures and the second block structures on the substrate at least partially do not overlap, and the second block structures correspond one-to-one to the ends of the signal traces and are electrically connected.

[0009] Optionally, in the same first overlapping region, the orthographic projection areas of the first block structure and the second block structure on the substrate are the same, and the number of the first block structures and the number of the second block structures are the same.

[0010] Optionally, each of the first block structures on one of the first overlapping regions is symmetrically arranged with each of the first block structures on another of the first overlapping regions; each of the second block structures on one of the first overlapping regions is symmetrically arranged with each of the second block structures on another of the first overlapping regions.

[0011] Optionally, in the same first overlapping area, the spacing between two adjacent first block structures is a, the spacing between two adjacent second block structures is a, the width of the first block structure in the first direction is b, and the width of the second block structure in the first direction is b, wherein the orthographic projection of the second block structure on the light-emitting functional layer covers the gap area between adjacent first block structures, wherein b≥a>0.

[0012] Optionally, the overlapping area also includes two second overlapping areas, which extend along the second direction and are respectively located on opposite sides of the display area, wherein the light-emitting functional layer includes a fifth part corresponding to the second overlapping area, and the fifth part is connected to the first part; the electrode layer includes a sixth part corresponding to the second overlapping area, and the sixth part is connected to the third part; wherein the fifth part and the sixth part are respectively located on different second overlapping areas, and the first direction is perpendicular to the second direction.

[0013] On the other hand, the present application also provides an evaporation device, the evaporation device comprising:

[0014] A carrier platform, the carrier platform being used to carry a display substrate, the display substrate having a display area and an overlapping area surrounding the display area, the overlapping area including two first overlapping areas, the two first overlapping areas extending along a first direction and respectively located on opposite sides of the display area, each of the first overlapping areas being provided with a plurality of signal traces;

[0015] a mask plate, located above the display substrate and capable of moving relative to the display substrate in the first direction, the mask plate comprising: a solid portion and a hollow portion, the hollow portion comprising a first hollow portion and a plurality of second hollow portions, a plurality of second hollow portions spaced apart along the first direction being provided on opposite sides of the first hollow portion, each second hollow portion being in communication with the first hollow portion;

[0016] In which, the mask plate has a first state before movement and a second state after movement. In the first state and the second state, the orthographic projection of the first hollow portion on the display substrate always covers the display area, the orthographic projection of the second hollow portion on the display substrate is always located in the first overlapping area, and the orthographic projection of the second hollow portion on the display substrate in the second state does not at least partially overlap with the orthographic projection of the second hollow portion on the display substrate in the first state.

[0017] Optionally, each of the second hollow portions on one of the first overlapping regions is symmetrically arranged with each of the second hollow portions on another of the first overlapping regions.

[0018] Optionally, in the same first overlapping area, the second hollow portions are arranged at equal intervals.

[0019] Optionally, in the same first overlapping area, the spacing between two adjacent second hollow portions is a, the width of the second hollow portion in the first direction is b, and the movement distance of the mask plate in the second state relative to the display substrate in the first direction is equal to a, where b>a>0.

[0020] Optionally, in the same first overlapping area, the spacing between two adjacent second hollow portions is a, the width of the second hollow portion in the first direction is b, and the movement distance of the mask plate in the second state relative to the display substrate in the first direction is equal to b, where 0<b≤a.

[0021] Optionally, the overlapping area also includes two second overlapping areas, which extend along the second direction and are respectively located on opposite sides of the display area, the width of the first hollow portion in the first direction is c, and the width of the display area in the first direction is e, wherein the difference between c and e is equal to the movement distance of the mask plate relative to the display substrate in the first direction in the second state, and c>e>0.

[0022] In another aspect, the present application further provides a method for manufacturing a display substrate, the method comprising the following steps:

[0023] A vapor deposition apparatus is provided, comprising a carrier platform and a mask plate, wherein the mask plate comprises: a solid portion and a hollow portion, the hollow portion comprising a first hollow portion and a plurality of second hollow portions, a plurality of second hollow portions spaced apart along a first direction are provided on opposite sides of the first hollow portion, and each second hollow portion is connected to the first hollow portion;

[0024] A display substrate is provided and disposed on the supporting platform, wherein the display substrate has a display area and an overlapping area surrounding the display area, the overlapping area including two first overlapping areas, the two first overlapping areas extending along a first direction and respectively located on opposite sides of the display area, and a plurality of signal traces are disposed on each of the first overlapping areas;

[0025] The mask plate is placed above the display substrate and adjusted to a first state. The mask plate is then used to form a patterned light-emitting functional layer on the display substrate, wherein, in the first state, the orthographic projection of the first hollow portion on the display substrate covers the display area, and the orthographic projection of the second hollow portion on the display substrate is located in the first overlapping area.

[0026] The mask plate is moved relative to the display substrate in the first direction to adjust the mask plate from the first state to the second state, and a patterned electrode layer is formed on the display substrate using the mask plate, wherein, in the second state, the orthographic projection of the first hollow portion on the display substrate covers the display area, the orthographic projection of the second hollow portion on the display substrate is located in the first overlapping area, and the orthographic projection of the second hollow portion on the display substrate in the second state does not at least partially overlap with the orthographic projection of the second hollow portion on the display substrate in the first state.

[0027] The present application provides a display substrate, a manufacturing method thereof, and an evaporation device. The light-emitting functional layer and the electrode layer of the display substrate prepared by the evaporation device can share a mask plate during the preparation process, and achieve normal overlap between the electrode layer of the display area and the signal line of the first overlap area, thereby greatly reducing the production cost of the display substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For those skilled in the art, other drawings can be obtained based on these drawings without creative work.

[0029] Figure 1 This is a bottom view of a light-emitting functional layer and an electrode layer in a display substrate in the prior art;

[0030] Figure 2 A top view of the display area and the overlapping area of ​​the display substrate on the supporting platform provided in an embodiment of the present application;

[0031] Figure 3 A top view of the mask provided in Example 1 of the present application;

[0032] Figure 4 A top view of the light-emitting functional layer and the electrode layer in the display substrate provided in Example 1 of the present application;

[0033] Figure 5 A top view of the light-emitting functional layer provided in Example 1 of the present application;

[0034] Figure 6 A top view of the electrode layer provided in Example 1 of the present application;

[0035] Figure 7 A top view of the mask provided in Example 2 of the present application;

[0036] Figure 8 A top view of the light-emitting functional layer and the electrode layer in the display substrate provided in Example 2 of the present application;

[0037] Figure 9 A top view of the light-emitting functional layer provided in Example 2 of the present application;

[0038] Figure 10 This is a top view of the electrode layer provided in Example 2 of the present application. DETAILED DESCRIPTION

[0039] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without making creative work are within the scope of protection of the present application. In addition, it should be understood that the specific implementation methods described herein are only used to illustrate and explain the present application, and are not used to limit the present application. In the present application, unless otherwise specified, the directional words used, such as "upper" and "lower", generally refer to the upper and lower parts of the device in actual use or working state, specifically the drawing direction in the accompanying drawings; and "inside" and "outside" refer to the outline of the device.

[0040] The disclosure below provides many different embodiments or examples for realizing different structures of the present application. In order to simplify the disclosure of the present application, the components and settings of specific examples are described below. Of course, they are merely examples and are not intended to limit the present application. In addition, the present application may repeat reference numbers and / or reference letters in different examples. Such repetition is for the purpose of simplicity and clarity and does not in itself indicate the relationship between the various embodiments and / or settings discussed. In addition, examples of various specific processes and materials are provided in the present application, but a person of ordinary skill in the art will recognize the application of other processes and / or the use of other materials. Each of the following is described in detail. It should be noted that the order of description of the following embodiments is not intended to limit the preferred order of the embodiments.

[0041] Figure 1 This is a bottom view of the light-emitting functional layer and electrode layer in the display substrate of the prior art. Figure 1As shown, the existing display substrate 01' includes a light-emitting functional layer 10' and an electrode layer 20' covering the light-emitting functional layer 10', wherein the light-emitting functional layer 10' is used to perform a display function and has insulating properties; the electrode layer 20' is used to cooperate with another electrode (not shown in the figure) located under the light-emitting functional layer 10' to form an electric field to drive the light-emitting functional layer 10' to emit light, and the electrode layer 20' has conductivity. The display substrate 01' has a display area 100' and a overlap area 200' arranged around the display area 100', wherein the display area 100' is provided with the light-emitting functional layer 10' and the electrode layer 20'; the overlap area 200' includes two first overlap areas 201' extending along the first direction Y and arranged opposite to each other, and two second overlap areas 202' extending along the second direction X and arranged opposite to each other, and the two first overlap areas 201' are provided with a plurality of signal traces (not shown in the figure) for transmitting electrical signals. The display substrate 01' uniformly transmits electrical signals to the electrode layer 20' of the display area 100' through the plurality of signal traces, so that the electrode layer 20' at each position of the display area 100' has a fixed potential. Correspondingly, the electrode layer 20' also needs to be provided on the two first overlap areas 201' to achieve overlap between the electrode layer 20' of the display area 100' and each of the signal traces. In other words, for the display substrate 01' to properly perform its display function, the light-emitting functional layer 10' and the electrode layer 20' must be provided on the display area 100', and the electrode layer 20' must also be provided on the two first overlapping areas 201'. Consequently, the conventional process of fabricating the light-emitting functional layer 10' and the electrode layer 20' requires the use of two masks, one large and one small, and two corresponding sets of evaporation film-forming equipment, resulting in a complex production process and significantly increased costs.

[0042] The present application provides a display substrate, a manufacturing method thereof, and an evaporation device. The light-emitting functional layer and the electrode layer of the display substrate prepared by the evaporation device can share a mask plate during the preparation process, and achieve normal overlap between the electrode layer of the display area and the signal line of the first overlap area, thereby greatly reducing the production cost of the display substrate.

[0043] Example 1

[0044] Figure 2 A top view of the display area and the overlapping area of ​​the display substrate on the supporting platform provided in Example 1 of the present application; Figure 3 This is a top view of the mask provided in Example 1 of the present application. Figure 2 and Figure 3 As shown, the evaporation equipment provided in this application includes a carrier platform 02 and a mask plate 03.

[0045] In this embodiment, the carrier platform 02 is used to support a display substrate 01. The display substrate 01 has a display area 100 and a bonding area 200 disposed around the display area 100. The bonding area 200 includes two first bonding areas 201 extending along a first direction Y and located on opposite sides of the display area, and two second bonding areas 202 extending along a second direction X and located on opposite sides of the display area. The first direction Y is perpendicular to the second direction X. The two first bonding areas 201 are located on the left and right sides of the display area 100, and the two second bonding areas 202 are located on the front and back sides of the display area 100. The display substrate 01 also includes a plurality of signal traces (not shown) located on the two first bonding areas 201 and a plurality of signal traces (not shown) located on one of the second bonding areas 202. As an example, signal lines and binding terminals (not shown in the figure) are provided on the second overlapping area 202 located on the front side of the display area 100, and the binding terminals are used to electrically connect to an external driving circuit board; no signal lines are provided on the second overlapping area 202 located on the rear side of the display area 100.

[0046] In this embodiment, the signal traces on the first bonding area 201 and the second bonding area 202 are, for example, VSS traces.

[0047] In this embodiment, the mask plate 03 is located above the display substrate 01 and is movable relative to the display substrate 01 in the first direction Y. The mask plate 03 includes a solid portion 31 and a hollow portion 32. During the evaporation film formation process, the solid portion 31 can block the film-forming material, while the film-forming material can pass through the hollow portion 32 and form a film on the display substrate 01 below the hollow portion 32.

[0048] In this embodiment, the evaporation equipment further includes an alignment system, which controls the movement of the mask plate 03 in the first direction relative to the display substrate 01. The display substrate 01 includes a first alignment mark (Glass Mark) m1, and the mask plate 03 includes a second alignment mark (Mask Mark) m2. The alignment system includes an alignment camera, which can capture the relative position of the first alignment mark m1 and the second alignment mark m2. The alignment system controls the movement distance of the mask plate 03 in the first direction Y by comparing the relative distance between the first alignment mark m1 and the second alignment mark m2. The maximum distance that the mask plate 03 moves in the first direction Y relative to the display substrate 01 does not exceed the field of view of the alignment camera.

[0049] In this embodiment, the hollow portion 32 includes a first hollow portion 321 and a plurality of second hollow portions 322, and a plurality of second hollow portions 322 are provided on opposite sides of the first hollow portion 321 and arranged at intervals along the first direction Y, and each second hollow portion 322 is connected to the first hollow portion 321, wherein the mask plate 03 has a first state before movement and a second state after movement, wherein in the first state and the second state, the orthographic projection of the first hollow portion 321 on the display substrate 01 always covers the display area 100, and the orthographic projection of the second hollow portion 322 on the display substrate 01 is always located in the first overlapping area 201; and the orthographic projection of the second hollow portion 322 on the display substrate 01 in the second state does not overlap with the orthographic projection of the second hollow portion 322 on the display substrate 01 in the first state. Therefore, the film-forming material formed in the first overlapping area 201 in the second state can avoid part of the film-forming material formed in the first overlapping area 201 in the first state, so that the film-forming material formed in the first overlapping area 201 in the second state can overlap with the signal line located in the first overlapping area 201.

[0050] In this embodiment, in the first state, the film layer formed by the evaporation device on the display substrate 01 is a first film layer; in the second state, the film layer formed by the evaporation device on the display substrate 01 is a second film layer. As an example, the first film layer is a light-emitting functional layer, and the second film layer is an electrode layer. Furthermore, the electrode layer is a cathode layer.

[0051] In this embodiment, since the plurality of second hollow portions 322 corresponding to the first overlap area 201 are arranged at intervals along the first direction Y, correspondingly, in the subsequent film forming process, the film forming patterns of the light-emitting functional layer and the electrode layer on the first overlap area 201 are also arranged at intervals along the first direction Y, so that the width of the two first overlap areas 201 in the second direction X can be designed to be narrower, thereby achieving a narrow frame.

[0052] The mask plate 03 provided in the present application has the first hollow portion 321 whose orthographic projection on the display substrate 01 always covers the display area 100 regardless of whether it is in the first state or the second state. Therefore, the light-emitting functional layer evaporated in the first state and the electrode layer evaporated in the second state can be completely set on the display area, thereby forming a complete pixel structure in the display area 100.

[0053] The mask plate 03 provided in the present application has an orthographic projection of the second hollow portion 322 on the display substrate 01 always located in the first overlapping area 201 in the second state, and the second hollow portion 322 is connected to the first hollow portion 321, thereby enabling the electrode layer vapor-deposited in the first overlapping area 201 in the second state to be connected to the electrode layer vapor-deposited in the display area 100, thereby realizing electrical connection between the electrode layer of the display area 100 and the electrode layer of the first overlapping area 201.

[0054] The mask plate 03 provided in the present application has an orthographic projection of the second hollow portion 322 on the display substrate 01 always located in the first overlapping area 201 in the first state and the second state, and the orthographic projection of the second hollow portion 322 on the display substrate 01 in the second state does not at least partially overlap with the orthographic projection of the second hollow portion 322 on the display substrate 01 in the first state. Therefore, the orthographic projection of the electrode layer evaporated on the first overlapping area 201 in the second state on the display substrate 01 does not at least partially overlap with the orthographic projection of the light-emitting functional layer evaporated on the first overlapping area 201 in the first state on the display substrate 01, thereby enabling the conductive electrode layer located in the first overlapping area 201 to avoid the insulating light-emitting functional layer located at least partially in the first overlapping area 201, thereby providing a structural basis for the overlap of the electrode layer in the first overlapping area 201 with the signal wiring in the first overlapping area 201, thereby achieving normal conduction between the signal wiring in the first overlapping area 201 and the electrode layer in the display area 100.

[0055] In this embodiment, the second hollow portions 322 on one first overlapping region 201 are symmetrically arranged with the second hollow portions 322 on another first overlapping region 201. Furthermore, because the second hollow portions 322 on the two first overlapping regions 201 located on opposite sides of the display region are symmetrically arranged, the signal traces on the two first overlapping regions 201 located on opposite sides of the display region 100 of the display substrate 01 can also be symmetrically arranged, thereby optimizing the structural layout of the overlapping region 200 of the display substrate 01.

[0056] In this embodiment, the second hollow portions 322 have the same shape and area, and within the same first overlap region 201, the spacing between two adjacent second hollow portions 322 is constant. That is, within the same first overlap region 201, the second hollow portions 322 are arranged at equal intervals. Furthermore, because the second hollow portions 322 are arranged at equal intervals within the same first overlap region 201, the connection points between the signal traces and the electrode layer are also arranged at equal intervals within the same first overlap region 201, thereby further optimizing the structural layout of the overlap region 200 of the display substrate 01.

[0057] In this embodiment, within the same first overlapping region 201, the spacing between two adjacent second hollow portions 322 is a, and the width of each second hollow portion in the first direction Y is b. The distance that the mask plate 03 moves relative to the display substrate 01 in the first direction Y in the second state is equal to a, where b>a>0. That is, the distance that the mask plate 03 moves relative to the display substrate 01 in the first direction Y in the second state is equal to the spacing between two adjacent second hollow portions 322. Because the distance that the mask plate 03 moves relative to the display substrate 01 in the first direction Y in the second state is equal to a, during the subsequent film formation process, within the first overlapping region 201, the orthographic projection of the electrode layer on the light-emitting functional layer covers all gaps in the light-emitting functional layer in the first overlapping region 201, maximizing the overlap area of ​​the electrode layer in the first overlapping region 201 and ensuring the connection quality between the signal traces in the first overlapping region 201 and the electrode layer.

[0058] In this embodiment, the width of the first hollow portion 321 in the first direction Y is c, and the width of the first hollow portion 321 in the second direction X is d; the width of the display area 100 in the first direction Y is e, that is, the distance between the two second overlapping areas 202 is e, and the width of the display area 100 in the second direction X is f, that is, the distance between the two first overlapping areas 201 is f; wherein, c>e>0, d=f>0.

[0059] In this embodiment, the first hollow portion 321 is rectangular, and includes two first edges 3211 extending along the first direction Y and oppositely arranged, and two second edges 3212 extending along the second direction X and oppositely arranged. Accordingly, the side length of the first edge 3211 is c, and the side length of the second edge 3212 is d; the display area is rectangular, and includes two third edges 1001 extending along the first direction Y and oppositely arranged, and two fourth edges 1002 extending along the second direction X and oppositely arranged. Accordingly, the side length of the third edge 1001 is e, and the side length of the fourth edge 1002 is f.

[0060] In the first state, in a direction perpendicular to the display substrate 01, two first edges 3211 of the first hollow portion 321 are arranged opposite two third edges 1001 of the display area 100. One second edge 3212 of the first hollow portion 321 is arranged opposite one fourth edge 1002 of the display area 100. Furthermore, the fourth edge 1002, which is arranged opposite the second edge 3212, is adjacent to the second overlapping region 202 where the signal trace is located. Furthermore, because the side length of the first edge 3211 is greater than the side length of the third edge 1001, the orthographic projection of the first hollow portion 321 on the display substrate 01 includes a protruding portion located in the second overlapping region 202 where the signal trace is not located. The width of the protruding portion in the first direction Y is equal to ce, and the width of the protruding portion in the second direction X is equal to d and f. Accordingly, the light-emitting functional layer formed in the first state not only covers the display area 100, but also forms an ineffective light-emitting portion in the second overlapping region 202 where the signal trace is not located.

[0061] In the second state, the mask plate 03 moves relative to the display substrate 01 in the first direction Y, the movement distance being a, where ce = a. At this point, in a direction perpendicular to the display substrate 01, the two first edges 3211 of the first hollow portion 321 remain opposite the two third edges 1001 of the display area 100. One second edge 3212 of the first hollow portion 321 is opposite one fourth edge 1002 of the display area 100, and the fourth edge 1002, which is opposite the second edge 3212, is adjacent to the second overlapping region 202 where the signal trace is not disposed. Furthermore, because the side length of the first edge 3211 is greater than the side length of the third edge 1001, the orthographic projection of the first hollow portion 321 on the display substrate 01 includes a protruding portion located in the second overlapping region 202 where the signal trace is disposed. The width of the protruding portion in the first direction Y is equal to ce, and the width of the protruding portion in the second direction X is equal to d and f. Correspondingly, the electrode layer formed in the second state, while covering the display area 100, also forms an electrode structure on the second overlapping area 202 where the signal line is provided. The electrode structure can be electrically connected to the signal line of the second overlapping area 202, further improving the uniformity of the display substrate.

[0062] In this embodiment, in the second state, the distance the mask 03 moves relative to the display substrate 01 in the first direction Y is equal to the width of the protruding portion in the first direction Y, that is, ce = a. This structure minimizes material costs and narrows the upper and lower bezels while ensuring the overlap effect and display quality, achieving a narrow bezel effect.

[0063] On the other hand, the present application also provides a display substrate having a display function, and the display substrate is an OLED display substrate.

[0064] Figure 4 A top view of the light-emitting functional layer and the electrode layer in the display substrate provided in Example 1 of the present application;

[0065] Figure 5 A top view of the light-emitting functional layer provided in Example 1 of the present application; Figure 6 This is a top view of the electrode layer provided in Example 1 of the present application. Figure 2-Figure 6As shown, the display substrate 01 has a display area 100 and an overlapping area 200 surrounding the display area 100, the overlapping area 200 includes two first overlapping areas 201 extending along a first direction Y and respectively located on opposite sides of the display area, and two second overlapping areas 202 extending along a second direction X and respectively located on opposite sides of the display area. The display substrate 01 includes a base substrate and a light-emitting functional layer 10 and an electrode layer 20 stacked on the base substrate, wherein the first direction is perpendicular to the second direction.

[0066] The light-emitting functional layer 10 includes a first portion 11 corresponding to the display area 100 and two second portions 12 corresponding to the two first overlapping areas 201. Each of the second portions 12 includes a plurality of first block structures 120 arranged at intervals along a first direction Y, and each of the first block structures 120 is connected to the first portion 11. The electrode layer 20 includes a third portion 21 corresponding to the display area 100 and two fourth portions 22 corresponding to the two first overlapping areas 201. Each fourth portion 22 includes a plurality of second block structures 220 arranged at intervals along the first direction Y, and each of the second block structures 220 is connected to the third portion 21.

[0067] In the same first overlapping area 201, the orthographic projections of the first block structures 120 and the second block structures 220 on the substrate do not overlap, and the second block structures 220 correspond one-to-one to the ends of the signal traces and are electrically connected.

[0068] In this embodiment, a driving circuit layer (not shown in the figure) is further provided between the base substrate and the light-emitting functional layer 10. The driving circuit layer is provided with a plurality of signal lines for transmitting electrical signals on the two first overlapping areas 201 and one of the second overlapping areas 202. The signal lines are, for example, VSS lines.

[0069] In this embodiment, the two first overlap areas 201 are located on the left and right sides of the display area 100, the second overlap area 202 provided with the signal line is located on the front side of the display area, and the second overlap area 202 without the signal line is located on the back side of the display area. In the display substrate 01 provided by the present application, since each of the first overlap areas 201 is provided with a plurality of first block-shaped 120 structures arranged at intervals, and the orthographic projections of the first block-shaped structures 120 and the second block-shaped structures 220 located in the same first overlap area 201 on the base substrate do not overlap, the second block-shaped structures 220 can electrically connect the signal lines located in the first overlap area 201 with the third part 21 located in the display area 100, so that the electrical signal can be evenly transmitted from the left and right sides of the display substrate 01 to the third part 21 of the display area 100, thereby ensuring the display uniformity of the display substrate 01. Furthermore, within the same first bonding area 201 , each of the second block structures 220 corresponds to and is electrically connected to an end portion of each of the signal traces.

[0070] In this embodiment, within the same first overlapping region 201, the orthographic projections of the first block structures 120 and the second block structures 220 on the base substrate are identical in area, and the number of the first block structures 120 and the number of the second block structures 220 are identical. During the actual manufacturing process of the display substrate 01, since the first block structures 120 and the second block structures 220 are manufactured using the same mask plate 03, and therefore, given that the hollowing pattern of the mask plate 03 remains unchanged, the orthographic projections of the first block structures 120 and the second block structures 220 on the base substrate within the same first overlapping region 201 are identical in shape, area, and number.

[0071] In this embodiment, each of the first block structures 120 on one of the first overlapping areas 201 is symmetrically arranged with each of the first block structures 120 on another of the first overlapping areas 201; each of the second block structures 220 on one of the first overlapping areas 201 is symmetrically arranged with each of the second block structures 220 on another of the first overlapping areas 201.

[0072] In this embodiment, within the same first overlapping region 201, the spacing between two adjacent first block structures 120 is a, and the spacing between two adjacent second block structures 220 is a, where a>0. That is, within the same first overlapping region 201, the width of the gap region between adjacent first block structures 120 is a, and the width of the gap region between adjacent second block structures 220 is also a.

[0073] In this embodiment, the width of the first block structure 120 in the first direction Y is b, and the width of the second block structure 220 in the first direction Y is b, wherein b>a>0.

[0074] In this embodiment, the orthographic projection of the second block structure 220 on the light-emitting functional layer 10 covers the gap region between adjacent first block structures 120. Since the orthographic projection of the second block structure 220 on the light-emitting functional layer 10 covers the gap region between adjacent first block structures 120, the overlap area of ​​the electrode layer 20 in the first overlap region 201 can be maximized, thereby ensuring the connection quality between the second block structure 220 and the connection end of the signal trace on the first overlap region 201 and ensuring the transmission effect of the electrical signal.

[0075] In this embodiment, the light-emitting functional layer 10 further includes a fifth portion 13 corresponding to the second overlapping region 202, the fifth portion 13 being connected to the first portion 11. The electrode layer 20 includes a sixth portion 23 corresponding to the second overlapping region 202, the sixth portion 23 being connected to the third portion 21. The fifth portion 13 and the sixth portion 23 are respectively located on two different second overlapping regions 202. Furthermore, the sixth portion 23 is disposed corresponding to the second overlapping region 202 where the signal trace is disposed. The sixth portion 23 electrically connects the signal trace in the second overlapping region 202 to the third portion 21 located in the display region 100, thereby enabling the electrical signal to be transmitted from the front side of the display substrate 01 to the third portion 21 of the display region 100.

[0076] On the other hand, the present application further provides a method for manufacturing a display substrate 01, the method for manufacturing the display substrate 01 comprising the following steps:

[0077] A vapor deposition apparatus is provided, comprising a carrier 02 and a mask plate 03, wherein the mask plate 03 comprises: a solid portion 31 and a hollow portion 32, wherein the hollow portion 32 comprises a first hollow portion 321 and a plurality of second hollow portions 322, wherein the first hollow portion 321 is provided with a plurality of second hollow portions 322 arranged at intervals along a first direction Y on opposite sides thereof, and each second hollow portion 322 is connected to the first hollow portion 321;

[0078] A display substrate 01 is provided and placed on the supporting platform 02. The display substrate 01 has a display area 100 and an overlapping area 200 disposed around the display area 100. The overlapping area 200 includes two first overlapping areas 201 extending along a first direction Y and located on either side of the display area 100.

[0079] The mask plate 03 is placed above the display substrate 01 and adjusted to a first state. A patterned light-emitting functional layer 10 is formed on the display substrate 01 using the mask plate 03. In the first state, the orthographic projection of the first hollow portion 321 on the display substrate 01 covers the display area 100, and the orthographic projection of the second hollow portion 322 on the display substrate 01 is located in the first overlapping area 201. A plurality of signal traces are provided on each of the first overlapping areas 201.

[0080] The mask plate 03 is moved relative to the display substrate 01 in the first direction Y to adjust the mask plate 03 from the first state to the second state, and a patterned electrode layer 20 is formed on the display substrate 01 using the mask plate 03, wherein, in the second state, the orthographic projection of the first hollow portion 321 on the display substrate 01 covers the display area 100, the orthographic projection of the second hollow portion 322 on the display substrate 01 is located in the first overlapping area 201, and the orthographic projection of the second hollow portion 322 on the display substrate 01 in the second state does not overlap with the orthographic projection of the second hollow portion 322 on the display substrate 01 in the first state.

[0081] Example 2

[0082] Figure 7 The top view of the mask provided in the second embodiment of the present application, combined with Figure 2 and Figure 7As shown, the second embodiment of the present application provides an evaporation device, which is similar to the evaporation device in the first embodiment. Specifically, the evaporation device includes: a carrier 02, the carrier 02 is used to carry a display substrate 01, the display substrate 01 has a display area 100 and an overlap area 200 arranged around the display area 100, the overlap area 200 includes two first overlap areas 201 extending along a first direction Y and respectively located on opposite sides of the display area; a mask plate 03, located above the display substrate 01 and capable of moving in the first direction Y relative to the display substrate 01, the mask plate 03 includes: a solid portion 31 and a hollow portion Part 32, the hollow part 32 includes a first hollow part 321 and a plurality of second hollow parts 322, and the first hollow part 321 is provided with a plurality of second hollow parts 322 arranged at intervals along the first direction Y on opposite sides of the first hollow part 321, and each second hollow part 322 is connected to the first hollow part 321; wherein, the mask plate 03 has a first state before movement and a second state after movement, in the first state and the second state, the orthographic projection of the first hollow part 321 on the display substrate 01 always covers the display area 100, and the orthographic projection of the second hollow part 322 on the display substrate 01 is always located in the first overlapping area 201.

[0083] The evaporation equipment in this embodiment is similar to the evaporation equipment in Example 1, and this application will not repeat the same parts.

[0084] The difference is that the orthographic projection of the second hollow portion 322 on the display substrate 01 in the second state does not overlap with the orthographic projection of the second hollow portion 322 on the display substrate 01 in the first state.

[0085] Specifically, within the same first overlap region 201, the spacing between two adjacent second hollow portions 322 is a, the width of the second hollow portion 322 in the first direction Y is b, and the movement distance of the mask plate 03 relative to the display substrate 01 in the first direction Y in the second state is equal to b, where 0<b≤a. Preferably, the spacing between two adjacent second hollow portions 322 is equal to the width of the second hollow portion 322 in the first direction Y, that is, a=b. In this case, the orthographic projection of the second block structure 220 on the light-emitting functional layer covers the gap area between adjacent first block structures 120, thereby maximizing the overlap area.

[0086] In this embodiment, the overlapping area 200 also includes two second overlapping areas 202 extending along the second direction X and located on opposite sides of the display area 100. The width of the first hollow portion 321 in the first direction Y is c, and the width of the display area in the first direction Y is e, that is, the spacing between the two second overlapping areas 202 is e, wherein the difference between c and e is equal to the movement distance of the mask plate 03 in the second state relative to the display substrate 01 in the first direction Y, c>e>0, that is, ce=b.

[0087] On the other hand, the second embodiment of the present application further provides a display substrate having a display function, and the display substrate is an OLED display substrate. Figure 8 A top view of the light-emitting functional layer and the electrode layer in the display substrate provided in Example 2 of the present application; Figure 9 A top view of the light-emitting functional layer provided in Example 2 of the present application;

[0088] Figure 10 This is a top view of the electrode layer provided in Example 2 of the present application. Figure 2 、 Figure 7-10 As shown, the display substrate 01 has a display area 100 and an overlap area 200 surrounding the display area 100, the overlap area 200 includes two first overlap areas 201 extending along a first direction Y and located on opposite sides of the display area, and two second overlap areas 202 extending along a second direction X and located on opposite sides of the display area. The display substrate 01 includes a base substrate and a light-emitting functional layer 10 and an electrode layer 20 stacked on the base substrate; wherein the light-emitting functional layer 10 includes a first portion 11 corresponding to the display area 100 and an electrode layer 20. The two second parts 12 corresponding to the two first overlapping areas 201, each of the second parts 12 includes a plurality of first block structures 120 arranged at intervals along the first direction Y, and each of the first block structures 120 is connected to the first part; the electrode layer 20 includes a third part 21 corresponding to the display area 100 and two fourth parts 22 corresponding to the two first overlapping areas 201, each of the fourth parts 22 includes a plurality of second block structures 220 arranged at intervals along the first direction Y, and each of the second block structures 220 is connected to the third part 21.

[0089] The display substrate 01 in this embodiment is similar to the display substrate 01 in the first embodiment, and the same parts will not be described in detail in this application.

[0090] The difference is that, in the same first overlapping area 201, the orthographic projections of each first block structure 120 and each second block structure 220 on the substrate do not overlap, and each second block structure 220 corresponds to the end of each signal trace one by one and is electrically connected.

[0091] In this embodiment, within the same first overlapping region 201, the spacing between two adjacent first block structures 120 is a, and the spacing between two adjacent second block structures 220 is a, where a>0. That is, within the same first overlapping region 201, the width of the gap region between adjacent first block structures 120 is a, and the width of the gap region between adjacent second block structures 220 is also a.

[0092] In this embodiment, the width of the first block structure 120 in the first direction Y is b, and the width of the second block structure 220 in the first direction Y is b, where 0<b≤a, and a schematic diagram of b<a is specifically shown in the figure.

[0093] When b<a, the orthographic projection of the second block structure 220 on the display substrate 01 is spaced apart from the orthographic projection of the first block structure 120 on the display substrate 01 .

[0094] When b=a, the orthographic projection of the second block structure 220 on the display substrate 01 is adjacent to the orthographic projection of the first block structure 120 on the display substrate 01, that is, in the same first overlapping area 201, the width of the first block structure 120 in the first direction Y is equal to the spacing between adjacent first block structures 120, and the width of the second block structure 220 in the first direction Y is equal to the spacing between adjacent second block structures 220, so that the orthographic projection of the second block structure 220 on the light-emitting functional layer 10 covers the gap area between adjacent first block structures 120.

[0095] On the other hand, the present application further provides a method for manufacturing a display substrate 01, the method for manufacturing the display substrate 01 comprising the following steps:

[0096] A vapor deposition apparatus is provided, comprising a carrier 02 and a mask plate 03, wherein the mask plate 03 comprises: a solid portion 31 and a hollow portion 32, wherein the hollow portion 32 comprises a first hollow portion 321 and a plurality of second hollow portions 322, wherein the first hollow portion 321 is provided with a plurality of second hollow portions 322 arranged at intervals along a first direction Y on opposite sides thereof, and each second hollow portion 322 is connected to the first hollow portion 321;

[0097] A display substrate 01 is provided and placed on the carrier 02. The display substrate 01 has a display area 100 and a bonding area 200 disposed around the display area 100. The bonding area 200 includes two first bonding areas 201 extending along a first direction Y and located on either side of the display area 100. Each of the first bonding areas 201 is provided with a plurality of signal traces.

[0098] The mask plate 03 is placed above the display substrate 01 and adjusted to a first state. A patterned light-emitting functional layer 10 is formed on the display substrate 01 using the mask plate 03. In the first state, the orthographic projection of the first hollow portion 321 on the display substrate 01 covers the display area 100, and the orthographic projection of the second hollow portion 322 on the display substrate 01 is located in the first overlapping area 201.

[0099] The mask plate 03 is moved relative to the display substrate 01 in the first direction Y to adjust the mask plate 03 from the first state to the second state, and a patterned electrode layer 20 is formed on the display substrate 01 using the mask plate 03, wherein, in the second state, the orthographic projection of the first hollow portion 321 on the display substrate 01 covers the display area 100, the orthographic projection of the second hollow portion 322 on the display substrate 01 is located in the first overlapping area 201, and the orthographic projection of the second hollow portion 322 on the display substrate 01 in the second state does not overlap with the orthographic projection of the second hollow portion 322 on the display substrate 01 in the first state.

[0100] In summary, the present application provides a display substrate, a manufacturing method thereof, and an evaporation device, wherein the display substrate has a display area and an overlap area surrounding the display area, wherein the overlap area includes two first overlap areas, the two first overlap areas extend along a first direction and are respectively located on opposite sides of the display area, and a plurality of signal traces are provided on each of the first overlap areas. The display substrate includes a base substrate and a light-emitting functional layer and an electrode layer stacked on the base substrate; wherein the light-emitting functional layer includes a first portion located in the display area and two second portions respectively located in the two first overlap areas, and each of the second portions includes A plurality of first block structures are arranged at intervals along a first direction, each of the first block structures is connected to the first portion; the electrode layer includes a third portion located in the display area and two fourth portions located in the two first overlapping areas, each fourth portion includes a plurality of second block structures arranged at intervals along the first direction, each of the second block structures is connected to the third portion; wherein, within the same first overlapping area, the orthographic projections of the first block structures and the second block structures on the base substrate at least partially do not overlap, and each second block structure corresponds to and is electrically connected to the end of each signal trace. The light-emitting functional layer and the electrode layer of the display substrate provided in the present application can share the same mask plate in the evaporation equipment, thereby simplifying the manufacturing process and reducing production costs.

[0101] The above is a detailed introduction to a display substrate, a manufacturing method thereof, and an evaporation equipment provided in the embodiments of the present application. Specific examples are used herein to illustrate the principles and implementation methods of the present application. The description of the above embodiments is only used to help understand the method of the present application and its core idea; at the same time, for technical personnel in this field, based on the ideas of the present application, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as a limitation on the present application.

Claims

1. A display substrate, characterized in that: A display substrate having a display area and an overlap area surrounding the display area, wherein the overlap area includes two first overlap areas, the two first overlap areas extending along a first direction and respectively located on opposite sides of the display area, and a plurality of signal traces are provided on each of the first overlap areas. The display substrate includes a base substrate and a light-emitting functional layer and an electrode layer stacked on the base substrate; The light-emitting functional layer includes a first portion located in the display area and two second portions located in the two first overlapping areas, each of the second portions includes a plurality of first block structures arranged at intervals along a first direction, and each of the first block structures is connected to the first portion; the electrode layer includes a third portion located in the display area and two fourth portions located in the two first overlapping areas, each of the fourth portions includes a plurality of second block structures arranged at intervals along the first direction, and each of the second block structures is connected to the third portion; In the same first overlapping region, the orthographic projections of the first block structures and the second block structures on the substrate at least partially do not overlap, and the second block structures correspond one-to-one to the ends of the signal traces and are electrically connected.

2. The display substrate according to claim 1, wherein: In the same first overlapping region, the orthographic projection areas of the first block structure and the second block structure on the base substrate are the same, and the number of the first block structures and the number of the second block structures are the same.

3. The display substrate according to claim 1, wherein The first block structures on one of the first overlapping areas are symmetrically arranged with the first block structures on another of the first overlapping areas; the second block structures on one of the first overlapping areas are symmetrically arranged with the second block structures on another of the first overlapping areas.

4. The display substrate according to claim 3, wherein: In the same first overlapping area, the spacing between two adjacent first block structures is a, the spacing between two adjacent second block structures is a, the width of the first block structure in the first direction is b, and the width of the second block structure in the first direction is b, wherein the orthographic projection of the second block structure on the light-emitting functional layer covers the gap area between adjacent first block structures, wherein b≥a>0.

5. The display substrate according to claim 1, wherein The overlapping area also includes two second overlapping areas, which extend along the second direction and are respectively located on opposite sides of the display area, wherein the light-emitting functional layer includes a fifth part corresponding to the second overlapping area, and the fifth part is connected to the first part; the electrode layer includes a sixth part corresponding to the second overlapping area, and the sixth part is connected to the third part; wherein the fifth part and the sixth part are respectively located on different second overlapping areas, and the first direction is perpendicular to the second direction.

6. A vapor deposition device, characterized in that: include: A carrier platform, the carrier platform being used to carry a display substrate, the display substrate having a display area and an overlapping area surrounding the display area, the overlapping area including two first overlapping areas, the two first overlapping areas extending along a first direction and respectively located on opposite sides of the display area, each of the first overlapping areas being provided with a plurality of signal traces; a mask plate, located above the display substrate and capable of moving relative to the display substrate in the first direction, the mask plate comprising: a solid portion and a hollow portion, the hollow portion comprising a first hollow portion and a plurality of second hollow portions, a plurality of second hollow portions spaced apart along the first direction being provided on opposite sides of the first hollow portion, each second hollow portion being in communication with the first hollow portion; In which, the mask plate has a first state before movement and a second state after movement. In the first state and the second state, the orthographic projection of the first hollow portion on the display substrate always covers the display area, the orthographic projection of the second hollow portion on the display substrate is always located in the first overlapping area, and the orthographic projection of the second hollow portion on the display substrate in the second state does not at least partially overlap with the orthographic projection of the second hollow portion on the display substrate in the first state.

7. The evaporation device according to claim 6, characterized in that The second hollow portions on one of the first overlapping regions are symmetrically arranged with respect to the second hollow portions on another of the first overlapping regions.

8. The evaporation equipment according to claim 7, characterized in that In the same first overlapping area, the second hollow portions are arranged at equal intervals.

9. The evaporation equipment according to claim 8, characterized in that In the same first overlapping area, the spacing between two adjacent second hollow portions is a, the width of the second hollow portion in the first direction is b, and the movement distance of the mask plate in the second state relative to the display substrate in the first direction is equal to a, where b>a>0.

10. The evaporation equipment according to claim 8, characterized in that In the same first overlapping area, the spacing between two adjacent second hollow portions is a, the width of the second hollow portion in the first direction is b, and the movement distance of the mask plate in the second state relative to the display substrate in the first direction is equal to b, where 0<b≤a.

11. The evaporation device according to claim 9 or 10, characterized in that: The overlapping area also includes two second overlapping areas, which extend along the second direction and are respectively located on opposite sides of the display area. The width of the first hollow portion in the first direction is c, and the width of the display area in the first direction is e, wherein the difference between c and e is equal to the movement distance of the mask plate relative to the display substrate in the first direction in the second state, and c>e>0.

12. A method for manufacturing a display substrate, characterized in that: The following steps are involved: A vapor deposition apparatus is provided, comprising a carrier platform and a mask plate, wherein the mask plate comprises: a solid portion and a hollow portion, the hollow portion comprising a first hollow portion and a plurality of second hollow portions, a plurality of second hollow portions spaced apart along a first direction are provided on opposite sides of the first hollow portion, and each second hollow portion is connected to the first hollow portion; A display substrate is provided and disposed on the supporting platform, wherein the display substrate has a display area and an overlapping area surrounding the display area, the overlapping area including two first overlapping areas, the two first overlapping areas extending along a first direction and respectively located on opposite sides of the display area, and a plurality of signal traces are disposed on each of the first overlapping areas; The mask plate is placed above the display substrate and adjusted to a first state. The mask plate is then used to form a patterned light-emitting functional layer on the display substrate, wherein, in the first state, the orthographic projection of the first hollow portion on the display substrate covers the display area, and the orthographic projection of the second hollow portion on the display substrate is located in the first overlapping area. The mask plate is moved relative to the display substrate in the first direction to adjust the mask plate from the first state to the second state, and a patterned electrode layer is formed on the display substrate using the mask plate, wherein, in the second state, the orthographic projection of the first hollow portion on the display substrate covers the display area, the orthographic projection of the second hollow portion on the display substrate is located in the first overlapping area, and the orthographic projection of the second hollow portion on the display substrate in the second state does not at least partially overlap with the orthographic projection of the second hollow portion on the display substrate in the first state.

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