Electromagnetic heating and water cooling dual-function casting mold and casting method

Abstract

The present invention relates to an electromagnetic heating and water cooling dual-function casting mold and a casting method, and belongs to the technical field of casting methods. An electromagnetic heating and water cooling dual-function casting mold, comprising a base, an ingot mold body and a pouring pipe both mounted on the base, and a riser mounted above the ingot mold body, characterized in that a spiral water channel is arranged inside the shell wall of the ingot mold shell of the ingot mold body, and a spiral copper tube A for electromagnetic induction heating is arranged on the outside of the ingot mold shell. At the same time, the use method of the electromagnetic heating and water cooling dual-function casting mold is also disclosed. The mold and casting method of the present application can obtain consistent internal and external grains, and the grain size is controlled within a small range of 500-1000 microns. The inconsistency and coarseness of the grains of the final product caused by the difference between the internal and external grains are avoided.

Description

Technical Field

[0001] The invention relates to a casting mould with dual functions of electromagnetic heating and water cooling and a casting method, belonging to the technical field of casting methods. Background Art

[0002] Metal targets are one of the core materials used in the semiconductor field, especially large-tonnage targets (over 1000kg). At present, there are a series of problems with domestic targets: 1. The purity of the base metal is usually only 4N, and the impurity content of 100ppm is very unstable; 2. Conventional open smelting cannot accurately control the oxygen content, nor can it remove volatile impurities; 3. Due to the huge size of the ingot, the core continues to be high temperature after casting. The core of an ingot of more than 1000kg is still liquid within 2 hours after casting, and the grains continue to grow, resulting in huge core grain size, which can reach centimeter-level grains, and also causes huge differences in the grain size inside and outside; 4. Pollution of the material by the high temperature of the crucible body.

[0003] The casting molds currently in use have the following problems: 1. The mold needs to be dried before use. For example, for copper casting, the mold needs to be dried to 380-400°C in a drying bag; 2. In the operation of the vacuum furnace, due to the need to dry the mold, a double chamber needs to be set up. The mold can only be hoisted into the ingot mold chamber for assembly after it is dried, which is time-consuming and labor-intensive, and the thermal efficiency of the natural gas drying bag is also low; 3. The ingot mold body needs to be made very thick, which increases the latent heat and has little effect on the cooling speed; 4. The riser cannot be heated, which will cause the ingot to shrink very deeply. The shrinkage cannot be used and needs to be cut off, resulting in a decrease in the yield.

[0004] In order to solve the problems existing in existing casting molds when casting large-tonnage targets, those skilled in the art have been studying and improving the casting molds. Summary of the invention

[0005] In view of the problems existing in the prior art, a dual-function casting mold with electromagnetic heating and water cooling is provided, and a corresponding casting method is designed based on the designed casting mold.

[0006] The present invention solves the above technical problems through the following technical solutions:

[0007] A dual-function casting mold with electromagnetic heating and water cooling, comprising a base, an ingot mold body and a pouring pipe both mounted on the base, and a riser mounted above the ingot mold body. The mold is special in that a spiral water channel is arranged inside the shell wall of the ingot mold shell of the ingot mold body, an inlet and an outlet of the water channel are arranged on the ingot mold shell, and a spiral copper tube A for electromagnetic induction heating is arranged on the outer side of the ingot mold shell.

[0008] On the basis of the above technical solution, this application makes the following improvements and perfections to the above technical solution:

[0009] Furthermore, a spiral copper tube B for electromagnetic induction heating is arranged on the outer side of the riser shell of the riser.

[0010] Furthermore, a spiral copper tube for electromagnetic induction heating is arranged on the outer side wall of the pouring tube.

[0011] Furthermore, a spiral copper tube for electromagnetic induction heating is arranged on the outer side wall of the base, and a spiral water channel is arranged inside the shell wall of the base.

[0012] Furthermore, the base is provided with an ingot mold body mounting groove and a pouring tube mounting groove, and a flow channel is provided between the ingot mold body mounting groove and the pouring tube mounting groove.

[0013] The electromagnetic induction heated spiral copper tube, spiral copper tube A and spiral copper tube B all have corresponding inlets and outlets.

[0014] A casting method using a dual-function casting mold of electromagnetic heating and water cooling, characterized in that it comprises the following steps:

[0015] Step 1, preheating: When the melting is about to be cast, turn on the electromagnetic induction heating, and perform electromagnetic induction heating on the spiral through tube A on the ingot mold body, the spiral copper tube B on the riser, the spiral copper tube on the pouring tube, and the spiral copper tube on the base, and heat the mold to 0-00℃ to ensure the surface quality of the ingot after casting, because the continuous adjustability of electromagnetic heating and temperature monitoring can very accurately control the temperature range to fluctuate within a very small range, and control the high quality and consistency of the surface quality of ingots of different furnaces;

[0016] Step 2, casting. The temperature of the melt is controlled to be 80-150℃ above the melting point for different materials. The casting speed is controlled within 10-90s according to the composition and capacity. The molten metal liquid is injected from the pouring pipe, and the metal liquid is injected into the ingot mold body through the runner on the base. The bottom casting process helps to fill the melt and reduce defects.

[0017]

[0018] The table above shows: different materials control the melt temperature.

[0019] Step 3: After casting is completed, the surface will solidify in 10 minutes, and the shrinkage compensation at the top riser of the ingot is completed. The electromagnetic induction heating is stopped, and the internal flow of the electromagnetic induction heated spiral copper tube is increased (the pressure is increased from 0.2MPa to more than 0.5MPa) at a high flow rate to improve heat exchange and enhance the cooling temperature gradient. At the same time, water is passed into the water channel with a water pressure of more than 0.5MPa to form a continuous cold source. The dual-channel high-pressure and high-flow cooling channel can provide a temperature gradient of 50-80℃ / mm from the outer wall to the inner wall of the ingot mold, promote rapid crystallization inside, and make the internal grains grow normally without being too large, while being consistent inside and outside.

[0020] The electromagnetic heating and water cooling dual-function casting mold and casting method designed in this application have the following advantages:

[0021] 1. The riser, ingot mold body, base and even the casting tube of the mold are equipped with spiral copper tubes for electromagnetic induction heating. The whole set of molds can be assembled as a whole when the furnace is initially loaded, so one cavity of the vacuum furnace is sufficient;

[0022] 2. When the melting is about to start casting, turn on the electromagnetic induction heating of the coil to heat the mold to 380-400℃ to ensure the surface quality of the ingot after casting. Because the continuous adjustability of electromagnetic heating and temperature monitoring can very accurately control the temperature range to fluctuate within a very small range, the high quality and consistency of the surface quality of ingots in different furnaces can be controlled;

[0023] 3. After the surface solidifies 10 minutes after casting, stop the electromagnetic induction heating. At the same time, the induction coil continues to flow and the water pressure and high flow rate are increased to form a continuous cold source, promote rapid internal crystallization, so that the internal grains will not grow too large normally, and the inside and outside are consistent; the consistency of the grains inside and outside can reduce the difficulty of subsequent forging and crushing; the consistency of the grains inside and outside, and the grain size is controlled within a small range of 500-1000 microns, avoiding the inconsistency and coarseness of the grains of the final product caused by the difference between the grains inside and outside. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 A schematic diagram of the three-dimensional structure of a dual-function casting mold of electromagnetic heating and water cooling in the present application;

[0025] Figure 2 for Figure 1 A front view of

[0026] Figure 3 is a cross-sectional view of the ingot mold body;

[0027] Figure 4 Schematic diagram of the riser structure.

[0028] The reference numerals are recorded as follows: base-1, ingot mold body-2, pouring tube-3, riser-4,

[0029] Ingot mold shell-2.1, water channel-2.2, spiral copper tube A-2.3, riser shell-4.1, spiral copper tube B-4.2. DETAILED DESCRIPTION

[0030] The following embodiments, in conjunction with the accompanying drawings, are only intended to illustrate the technical solutions described in the claims and are not intended to limit the protection scope of the claims.

[0031] Combined with Figure 1-4 A dual-function casting mold for electromagnetic heating and water cooling, comprising a base 1, an ingot mold body 2 and a pouring pipe 3 both mounted on the base 1, and a riser 4 mounted above the ingot mold body 2, a spiral water channel 2.2 is arranged inside the shell wall of the ingot mold shell 2.1 of the ingot mold body 2, and a spiral copper tube A2.3 for electromagnetic induction heating is arranged outside the ingot mold shell 2.1;

[0032] Wherein, a spiral copper tube B4.2 for electromagnetic induction heating is arranged on the outer side of the riser shell 4.1 of the riser 4;

[0033] The outer side wall of the pouring tube 3 is provided with a spiral copper tube for electromagnetic induction heating;

[0034] A spiral copper tube for electromagnetic induction heating is arranged on the outer wall of the base 1, and a spiral water channel is arranged inside the shell wall of the base 1; and an ingot mold body mounting groove and a pouring tube mounting groove are arranged on the base 1, and a flow channel is arranged between the ingot mold body mounting groove and the pouring tube mounting groove.

[0035] The casting method of the above-mentioned electromagnetic heating and water cooling dual-function casting mold comprises the following steps:

[0036] Step 1, preheating: When the smelting is about to be cast, turn on the electromagnetic induction heating, and perform electromagnetic induction heating on the spiral through pipe A2.3 on the ingot mold body 2, the spiral copper pipe B4.2 on the riser 4, the spiral copper pipe on the pouring pipe 3, and the spiral copper pipe on the base 1, and heat the mold to 380-400℃ to ensure the surface quality of the ingot after casting, because the continuous adjustability of electromagnetic heating and temperature monitoring can very accurately control the temperature range to fluctuate within a very small range, and control the high quality and consistency of the surface quality of ingots of different furnaces;

[0037] Step 2, casting, the temperature of the melt is controlled to be 80-150°C above the melting point for different materials, and the casting speed is controlled to be completed within 10-90s according to the composition and capacity. The molten metal liquid is injected from the pouring pipe, and the metal liquid is injected into the ingot mold body 2 through the runner on the base. The bottom casting process helps to fill the melt and reduce defects.

[0038] Step 3, after casting is completed and the surface solidifies for 10 minutes, the electromagnetic induction heating is stopped. At the same time, the electromagnetic induction heated spiral copper tube continues to flow and the water pressure is increased (the pressure is increased from 0.2MPa to above 0.5MPa) at a high flow rate to improve heat exchange and enhance the cooling temperature gradient. At the same time, water is passed into the water channel with a water pressure of more than 0.5MPa to form a continuous cold source. The dual-channel high-pressure and high-flow cooling channel can provide a temperature gradient of 50-80℃ / mm from the outer wall to the inner wall of the ingot mold, promote rapid crystallization inside, and prevent the internal grains from growing too large normally, while being consistent inside and outside.

[0039] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A casting method using a casting mold, wherein the casting mold comprises a base (1), an ingot mold body (2) and a pouring pipe (3) both mounted on the base (1), and a riser (4) mounted above the ingot mold body (2), characterized in that: A spiral water channel (2.2) is arranged inside the shell wall of the ingot mold shell (2.1) of the ingot mold body (2), and a spiral copper tube A (2.3) for electromagnetic induction heating is arranged outside the ingot mold shell (2.1); An electromagnetic induction heated spiral copper tube B (4.2) is arranged on the outer side of the riser shell (4.1) of the riser (4); The outer side wall of the pouring tube (3) is provided with a spiral copper tube for electromagnetic induction heating; A spiral copper tube for electromagnetic induction heating is arranged on the outer side wall of the base (1), and a spiral water channel is arranged inside the shell wall of the base (1); The base (1) is provided with an ingot mold body mounting groove and a pouring pipe mounting groove, and a flow channel is provided between the ingot mold body mounting groove and the pouring pipe mounting groove; It is characterized by comprising the following steps: Step 1, preheating: When the smelting is about to start casting, turn on the electromagnetic induction heating, and perform electromagnetic induction heating on the spiral through pipe A (2.3) on the ingot mold body (2), the spiral copper pipe B (4.2) on the riser (4), the spiral copper pipe on the pouring pipe (3), and the spiral copper pipe on the base (1), and heat the mold to 380-400°C to ensure the surface quality of the ingot after casting, because the continuous adjustability of electromagnetic heating and temperature monitoring can very accurately control the temperature range to fluctuate within a very small range, and control the high quality and consistency of the surface quality of ingots of different furnaces; Step 2, casting, the temperature of the melt is controlled to be 80-150°C above the melting point for different materials, and the casting speed is controlled to be completed within 10-90 seconds according to the composition and capacity, and the molten metal liquid is injected from the pouring pipe (3), and the metal liquid is injected into the ingot mold body (2) through the runner on the base (1); Step 3, after the casting is completed and the surface solidifies for 10 minutes, the electromagnetic induction heating is stopped. At the same time, the inner part of the electromagnetic induction heated spiral copper tube continues to flow and the water pressure and high flow rate are increased to improve the heat exchange and enhance the cooling temperature gradient. At the same time, water is passed into the water channel (2.2) with a water pressure of more than 0.5MPa to form a continuous cold source; the double-channel high-pressure and high-flow cooling channel can provide a temperature gradient of 50-80℃ / mm from the outer wall to the inner wall of the ingot mold, promote rapid crystallization inside, so that the internal grains will not grow too large normally, and the inside and outside are consistent.

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