Magnetron sputtering film uniformity detection device and detection method

Abstract

The present invention belongs to the technical field of detection equipment, and discloses a magnetron sputtering film uniformity detection device and a detection method thereof, including a chassis, the right end face of the chassis is provided with an inlet, the inner surface of the inlet is fixedly connected with a fixed frame, the top surface of the fixed frame is fixedly connected with a cleaning brush, and the top surface of the fixed frame is provided with a suction hole. The present invention allows the fixed sleeve to suck air from two groups of fixed frames distributed upward and downward, and uses the cleaning brushes distributed on the upper and lower sides of the film material to sweep away dust on the surface of the film material by friction with the cleaning brush during the film material feeding process, and sucks the dust into the fixed frame with the suction effect, thereby ensuring that the surface of the film material entering the chassis is clean, avoiding dust particles attached to the surface from affecting the uniform detection of the film layer on the surface of the film material by the detector in the detection mechanism, improving the actual detection effect, avoiding the obstruction of detection by attached dust particles, and achieving the cleaning of the upper and lower parts of the film material at the same time, with good use effect.

Description

Technical Field

[0001] The present invention belongs to the technical field of detection equipment, and in particular relates to a magnetron sputtering film uniformity detection device and a detection method thereof. Background Art

[0002] Magnetron sputtering is a type of physical vapor deposition (PVD). The general sputtering method can be used to prepare multiple materials such as metals, semiconductors, insulators, etc., and has the advantages of simple equipment, easy control, large coating area and strong adhesion. The magnetron sputtering method developed in the 1970s has achieved high speed, low temperature and low damage. Because high-speed sputtering is carried out under low pressure, the ionization rate of the gas must be effectively increased. Magnetron sputtering introduces a magnetic field on the surface of the target cathode and uses the magnetic field to constrain charged particles to increase the plasma density and increase the sputtering rate. Magnetron sputtering is usually used for film preparation, including various functional films: such as films with absorption, transmission, reflection, refraction, polarization and other functions, such as low-temperature deposition of silicon nitride anti-reflection film to improve the photoelectric conversion efficiency of solar cells. After the film preparation operation is completed, the sputtered film is usually required to be tested for uniformity.

[0003] In the process of using the existing magnetron sputtering film uniformity detection device, the film material to be detected is usually sent into the detection device, and the surface sputtering uniformity detection is completed in cooperation with the micro-view detector. However, since the film material is adsorbed by dust in the air during transportation, a layer of dust adheres to the surface of the film material, and a large number of dust particles adhere to the surface of the film material during the detection process, and form a barrier to the upper film layer of the film material. When the sputtering uniformity of the film material surface is actually detected, the final detection result is affected, the actual detection error is large, and the distribution uniformity detection effect is not good.

[0004] In addition, the existing magnetron sputtering film uniformity detection device usually uses a detector corresponding to the film layer when performing sputtering uniformity detection of the surface film layer. Different groups of micro-viewing detectors are used according to the diameters of different film layer materials. In order to meet the sputtering coating detection of different materials, it is necessary to arrange multiple groups of detectors, or switch different detectors. The actual arrangement of multiple groups of detectors increases the difficulty of installation. When switching between different groups of detectors, it is necessary to perform rotation switching and fixing operations after switching. The actual operation is more troublesome. When detecting film layers of different materials, it is more difficult and the use effect is not good. Summary of the invention

[0005] The object of the present invention is to provide a magnetron sputtering film uniformity detection device and a detection method thereof to solve the problems raised in the above background technology.

[0006] In order to achieve the above-mentioned purpose, the present invention provides the following technical solutions: a magnetron sputtering film uniformity detection device and a detection method thereof, comprising a chassis, a right end face of the chassis is provided with an inlet, the inner surface of the inlet is fixedly connected with a fixed frame, the top surface of the fixed frame is fixedly connected with a cleaning brush, the top surface of the fixed frame is provided with a suction hole, the inner surface of the fixed frame is movably sleeved with a filter plate, the side of the filter plate is fixedly connected with a connecting rod, the end surface of the connecting rod is fixedly connected with a sealing plate, the interior of the fixed frame is fixedly connected with a fixing rod, the end surface of the fixing rod is fixedly connected with a No. 1 magnetic plate, the No. 1 magnetic plate is magnetically connected to the filter plate, the side of the chassis is fixedly connected with a mounting plate, the top surface of the mounting plate is fixedly installed with a suction pump, the right end face of the chassis is fixedly connected with a fixing sleeve, the fixing sleeve and the fixed frame are fixedly connected with a No. 1 pipe, a detection mechanism is movably installed inside the chassis, and an auxiliary detection mechanism is provided inside the chassis.

[0007] First embodiment: Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 and Figure 6 As shown, when conducting inspection, the film material is passed through the chassis, and the suction pump is started, so that the suction pump sucks air into the fixed sleeve through the No. 2 tube. As the air in the fixed sleeve is sucked out, the air in the fixed frame is sucked into the fixed sleeve through the No. 1 tube. As the film material rubs along the cleaning brush, the dust on the surface of the film material is shaken off and sucked into the fixed frame through the suction hole. The dust is filtered on the side of the filter plate, and the auxiliary detection mechanism is started, so that the detection lamp in the auxiliary detection mechanism emits light downward to the film material. The light passes through the film material and reaches the top surface of the light sensing board. At the same time, the No. 4 tube located on the side of the auxiliary detection mechanism sucks the dust on the top surface of the light sensing board into the fixed frame. The light sensing board senses the light intensity and transmits the signal to the control box. The control box calculates the uniformity according to the light intensity distribution sensed on the light sensing board.

[0008] Firstly, by using a suction pump to suck air, the fixed sleeve sucks air into the two groups of fixed frames distributed upward and downward, and by using cleaning brushes distributed on the upper and lower sides of the film material, the dust on the surface of the film material is swept away by friction with the cleaning brushes during the film material feeding process, and the dust is sucked into the fixed frame with the suction effect, thereby ensuring that the surface of the film material entering the chassis is clean, avoiding dust particles attached to the surface affecting the uniform detection of the film layer on the surface of the film material by the detector in the detection mechanism, improving the actual detection effect, avoiding attached dust particles blocking the detection, and achieving the cleaning of the top and bottom of the film material at the same time, with good use effect.

[0009] In addition, by installing an auxiliary detection mechanism in the chassis, and utilizing the detection light in the auxiliary detection mechanism in conjunction with a light sensing board, the light of the detection light passes through the film material and falls on the light sensing board. Depending on the uniformity of the sputtered film layer on the top surface of the film material, the intensity of the light changes after penetration. By utilizing the light sensing board to sense the change in light intensity, the distribution of the sputtered film layer on the outer surface of the film material is calculated in conjunction with the control box, thereby assisting in obtaining uniformity. In conjunction with the current detector, the actual detection effect is improved, and the use effect is good.

[0010] Preferably, the detection mechanism includes a rotating rod, a detector, a mounting ring, a fixed plate, a second magnetic plate and a controller. The outer surface of the rotating rod is movably connected to the chassis, the detector is fixedly mounted on the outer surface of the rotating rod, the mounting ring is fixedly mounted on the outer surface of the rotating rod and is located on the outside of the chassis, the front and back sides of the chassis are fixedly connected with electromagnets, the electromagnets are located on both sides of the mounting ring, the outer surface of the mounting ring is fixedly connected with a fixed plate, the side of the fixed plate is fixedly connected with the second magnetic plate, the controller is fixedly mounted on the end face of the rotating rod, and the uniformity of the sputtered film layer on the top layer of the film material is detected by utilizing the existing detector, and the detection calculation is completed in cooperation with the controller.

[0011] Preferably, the front and back sides of the chassis are fixedly connected with mounting covers, and the mounting covers are sleeved on the outside of the mounting ring. The mounting covers are used to complete the sealing protection of the electromagnet, avoid affecting the installation position of the electromagnet, and ensure uniform magnetic force.

[0012] Preferably, the number of the detectors is six, and the six detectors are divided into two groups of three each. The number of the detection mechanisms is two, and the two detection mechanisms are symmetrically distributed up and down. The detection mechanisms distributed up and down can realize the detection of the upper and lower surfaces of the film material, and realize the uniformity detection of the upper and lower surfaces of the film material.

[0013] Preferably, the auxiliary detection mechanism includes a mounting frame, a side rod, a detection light and a light sensing board, the side rod is fixedly connected to the side of the mounting frame, the end face of the side rod is fixedly connected to the chassis, the detection light is fixedly connected to the inner surface of the mounting frame, the light sensing board is fixedly installed on the inner surface of the mounting frame, the detection light and the light sensing board are respectively distributed up and down, and the detection light and the light sensing board are used to complete the auxiliary light detection, and the uniformity is judged by detecting the intensity distribution of the light after penetration.

[0014] Preferably, a control box is fixedly installed on the back of the chassis, and a connecting line is fixedly connected between the control box and the auxiliary detection mechanism. The uniformity calculation is achieved by processing the sensing signal of the light sensing board using the control box.

[0015] Preferably, a side hole is opened on the side of the fixed frame, and a No. 4 tube is fixedly connected to the side of the fixed frame. One end of the No. 4 tube is connected to the side hole, and the other end of the No. 4 tube is located on the side of the auxiliary detection mechanism. By utilizing the No. 4 tube to connect with the fixed frame, dust on the top surface of the light sensing plate is sucked out during suction, thereby ensuring the cleanliness of the surface of the light sensing plate and improving the actual detection accuracy.

[0016] Preferably, the top surface of the suction pump is fixedly connected to a No. 2 pipe, the side of the suction pump is fixedly connected to a No. 3 pipe, the number of the fixed frames is two, and the two fixed frames are distributed up and down. By utilizing the fixed frames distributed up and down, the cleaning and dust removal of the upper and lower surfaces of the membrane material are completed, thereby improving the accuracy of the upper and lower surface uniformity detection.

[0017] Preferably, a removal outlet is provided on the left end face of the chassis, the left and right end faces of the chassis are fixedly connected with side panels, and the inner sides of the side panels are fixedly installed with guiding mechanisms. The guiding mechanism is used to guide the film material to ensure stable transportation of the film material.

[0018] Second embodiment: Figure 1 , Figure 2 , Figure 3 , Figure 6 , Figure 7 and Figure 8 As shown, when it is necessary to change the object of detection, according to the sputtered film material that needs to be detected, the electromagnet on one side of the mounting ring is closed, so that the electromagnet on one side of the mounting ring is energized and magnetic, and the other side is de-energized and non-magnetic, and the electromagnets on both sides have the same magnetic properties as the outer side of the No. 2 magnetic plate. When one side is de-energized and non-magnetic, the No. 2 magnetic plate on the side of the fixed plate is pushed by the repulsive force on one side, causing the mounting ring and the rotating rod to rotate, so that the No. 2 magnetic plate on one side of the fixed plate contacts the de-energized electromagnet. At this time, the rotating rod is deflected and causes the detector on one side of the outer surface of the rotating rod to deflect to the bottom, completing the switching. When it is necessary to continue switching, the electromagnets on both sides are controlled to be on and off to complete the reverse switching.

[0019] Firstly, the electromagnets are fixedly connected on the front and back sides of the chassis and are symmetrically distributed on both sides of the mounting ring, so that the electromagnets on both sides have the same polarity after being energized, and a second magnetic plate is added to the side of the fixed plate of the detection mechanism, while the magnetism of the second magnetic plate is kept the same as the magnetism of the electromagnet. When the electromagnets on both sides are energized, the repulsive force on both sides pushes the two sides of the fixed plate to be stable, keeping the detector in the middle directly below, and by changing the on and off of the electromagnets on both sides, the repulsive force on both sides is changed, thereby realizing the deflection of the detection mechanism, and by changing different deflection directions, the switching of the detector is realized.

[0020] A magnetron sputtering film uniformity detection device and a detection method thereof include the following detection methods:

[0021] Step 1: Pass the film material to be tested through the inlet and outlet of the chassis, and keep the film material between the upper and lower guide mechanisms. As the film material is transported, start the suction pump so that the suction pump sucks air into the fixed sleeve through the No. 2 pipe, and then the fixed sleeve sucks the air in the fixed frame through the No. 1 pipe. As the film material rubs along the cleaning brush, the attached dust is shaken off and sucked into the fixed frame through the suction hole, and the dust is filtered on one side of the filter plate;

[0022] Step 2: When the film material is being transported, the auxiliary detection mechanism is started. As the detection lamp in the auxiliary detection mechanism irradiates light downward toward the film material, the top surface of the light sensing plate senses the light intensity and transmits the detection signal to the control box. At the same time, the No. 4 pipe located on the side of the auxiliary detection mechanism sucks air to suck out the dust and impurities on the top surface of the light sensing plate. The control box calculates the surface uniformity of the film material according to the light receiving intensity of the light sensing plate.

[0023] Step 3: After the auxiliary detection, the film material moves to between the upper and lower detection mechanisms and cooperates with the detector for detection. When it is necessary to detect the uniformity of different components, turn off the electromagnet on one side to make the magnetism of the powered-off electromagnet disappear, so that the electromagnet on the other side pushes the fixed plate below to deflect and complete the switch. When it is necessary to replace another set of detectors, start the previously turned-off electromagnet and power off the electromagnet on the other side. The fixed plate is deflected by the reverse thrust and drives the rotating rod to deflect, switch to the detector on the other side, and complete the detection.

[0024] The beneficial effects of the present invention are as follows:

[0025] 1. The present invention utilizes a suction pump to draw air so that the fixed sleeve draws air into the two groups of fixed frames distributed upward and downward, and utilizes cleaning brushes distributed on the upper and lower sides of the film material to sweep away dust on the surface of the film material through friction with the cleaning brushes during the film material feeding process, and cooperates with the suction effect to suck the dust into the fixed frame, thereby ensuring that the surface of the film material entering the chassis is clean, avoiding dust particles attached to the surface from affecting the uniform detection of the film layer on the surface of the film material by the detector in the detection mechanism, improving the actual detection effect, avoiding the obstruction of detection by attached dust particles, and achieving the cleaning of the upper and lower parts of the film material at the same time, with good use effect.

[0026] 2. The present invention installs an auxiliary detection mechanism in the chassis, and uses the detection lamp in the auxiliary detection mechanism to cooperate with the light sensing board. The light of the detection lamp passes through the film material and falls on the light sensing board. According to the uniformity of the sputtered film layer on the top surface of the film material, the intensity of the light changes after penetration. The light intensity change is sensed by the light sensing board, and the distribution of the sputtered film layer on the outer surface of the film material is calculated in cooperation with the control box, thereby assisting in obtaining uniformity. In cooperation with the current detector, the actual detection effect is improved, and the use effect is good.

[0027] 3. The present invention fixes and connects electromagnets on both sides of the chassis, and makes the electromagnets symmetrically distributed on both sides of the mounting ring, so that the electromagnets on both sides have the same polarity after being energized, and adds a second magnetic plate on the side of the fixed plate of the detection mechanism, while keeping the magnetism of the second magnetic plate the same as the magnetism of the electromagnet. When the electromagnets on both sides are energized, the repulsive force on both sides pushes the two sides of the fixed plate to be stable, keeping the detector in the middle directly below, and by changing the on and off of the electromagnets on both sides, the repulsive force on both sides is changed, thereby realizing the deflection of the detection mechanism, and by changing different deflection directions, the switching of the detector is realized. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a structural diagram of the present invention;

[0029] Figure 2 It is a cross-sectional schematic diagram of the present invention;

[0030] Figure 3 is a schematic diagram of a chassis of the present invention;

[0031] Figure 4 It is a schematic diagram of the connection between the fixing frame and the cleaning brush of the present invention;

[0032] Figure 5 It is an exploded schematic diagram of the fixing frame of the present invention;

[0033] Figure 6 is a schematic diagram of the auxiliary detection mechanism of the present invention;

[0034] Figure 7 It is an exploded schematic diagram of the installation cover and the chassis of the present invention;

[0035] Figure 8 It is a schematic diagram of the detection mechanism of the present invention.

[0036] In the figure: 1. chassis; 2. entrance; 3. removal outlet; 4. fixing frame; 5. cleaning brush; 6. suction hole; 7. filter plate; 8. connecting rod; 9. sealing plate; 10. fixing rod; 11. magnetic plate No. 1; 12. fixing sleeve; 13. pipe No. 1; 14. mounting plate; 15. suction pump; 16. pipe No. 2; 17. pipe No. 3; 18. side plate; 19. guiding mechanism; 20. auxiliary detection mechanism; 201. mounting frame; 202. side rod; 203. detection lamp; 204. light sensing board; 21. connecting line; 22. control box; 23. detection mechanism; 231. rotating rod; 232. detector; 233. mounting ring; 234. fixing plate; 235. magnetic plate No. 2; 236. controller; 24. electromagnet; 25. mounting cover; 26. side hole; 27. pipe No. 4. DETAILED DESCRIPTION

[0037] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0038] like Figures 1 to 8 As shown, an embodiment of the present invention provides a magnetron sputtering film uniformity detection device and a detection method thereof, comprising a chassis 1, a right end face of the chassis 1 is provided with an inlet 2, an inner surface of the inlet 2 is fixedly connected with a fixing frame 4, a top surface of the fixing frame 4 is fixedly connected with a cleaning brush 5, a top surface of the fixing frame 4 is provided with a suction hole 6, an inner surface of the fixing frame 4 is movably sleeved with a filter plate 7, a side surface of the filter plate 7 is fixedly connected with a connecting rod 8, an end surface of the connecting rod 8 is fixedly connected with a sealing plate 9, a fixing rod 10 is fixedly connected inside the fixing frame 4, a No. 1 magnetic plate 11 is fixedly connected to the end surface of the fixing rod 10, and the No. 1 magnetic plate 11 is magnetically connected to the filter plate 7, a mounting plate 14 is fixedly connected to the side of the chassis 1, a suction pump 15 is fixedly installed on the top surface of the mounting plate 14, a fixing sleeve 12 is fixedly connected to the right end face of the chassis 1, a No. 1 pipe 13 is fixedly connected between the fixing sleeve 12 and the fixing frame 4, a detection mechanism 23 is movably installed inside the chassis 1, and an auxiliary detection mechanism 20 is provided inside the chassis 1.

[0039] First embodiment: Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 and Figure 6 As shown, when performing detection, the film material passes through the chassis 1, and the suction pump 15 is started, so that the suction pump 15 sucks air into the fixed sleeve 12 through the No. 2 tube 16. As the air in the fixed sleeve 12 is extracted, the air in the fixed frame 4 is sucked into the fixed sleeve 12 through the No. 1 tube 13. As the film material rubs along the cleaning brush 5, the dust on the surface of the film material is shaken off and sucked into the fixed frame 4 through the suction hole 6. The dust is filtered on the side of the filter plate 7, and the auxiliary detection mechanism 20 is started, so that the detection lamp 203 in the auxiliary detection mechanism 20 emits light downward to the film material. The light passes through the film material and reaches the top surface of the light sensing board 204. At the same time, the No. 4 tube 27 located on the side of the auxiliary detection mechanism 20 sucks the dust on the top surface of the light sensing board 204 into the fixed frame 4. The light sensing board 204 senses the light intensity and transmits the signal to the control box 22. The control box 22 calculates the uniformity according to the light intensity distribution sensed on the light sensing board 204.

[0040] First, by using the suction pump 15 to suck air, the fixed sleeve 12 sucks air from the two groups of fixed frames 4 distributed upward and downward, and by using the cleaning brushes 5 distributed on the upper and lower sides of the film material, the dust on the surface of the film material is swept away by friction with the cleaning brush 5 during the film material feeding process, and the dust is sucked into the fixed frame 4 with the suction effect, to ensure that the surface of the film material entering the chassis 1 is clean, to avoid the dust particles attached to the surface affecting the uniform detection of the film layer on the surface of the film material by the detector 232 in the detection mechanism 23, to improve the actual detection effect, to avoid the attached dust particles blocking the detection, and at the same time to achieve the cleaning of the upper and lower parts of the film material, and the use effect is good.

[0041] In addition, by installing an auxiliary detection mechanism 20 in the chassis 1, the detection lamp 203 in the auxiliary detection mechanism 20 is used in conjunction with the light sensing plate 204, and the light of the detection lamp 203 passes through the film material and falls on the light sensing plate 204. According to the uniformity of the sputtered film layer on the top surface of the film material, the intensity of the light changes after penetration. By utilizing the light sensing plate 204 to sense the change in light intensity, the distribution of the sputtered film layer on the outer surface of the film material is calculated in conjunction with the control box 22, thereby assisting in obtaining uniformity, and cooperating with the current detector 232 to improve the actual detection effect, and the use effect is good.

[0042] Among them, the detection mechanism 23 includes a rotating rod 231, a detector 232, a mounting ring 233, a fixed plate 234, a second magnetic plate 235 and a controller 236. The outer surface of the rotating rod 231 is movably connected to the chassis 1, the detector 232 is fixedly installed on the outer surface of the rotating rod 231, the mounting ring 233 is fixedly connected to the outer surface of the rotating rod 231 and is located on the outside of the chassis 1, the front and back sides of the chassis 1 are fixedly connected with electromagnets 24, the electromagnets 24 are located on both sides of the mounting ring 233, the outer surface of the mounting ring 233 is fixedly connected with the fixed plate 234, the side of the fixed plate 234 is fixedly connected with the second magnetic plate 235, and the controller 236 is fixedly installed on the end face of the rotating rod 231. By utilizing the existing detector 232, the uniformity detection of the sputtering film layer on the top layer of the film material is realized, and the detection calculation is completed in cooperation with the controller 236.

[0043] Among them, the front and back sides of the chassis 1 are fixedly connected with a mounting cover 25, and the mounting cover 25 is sleeved on the outside of the mounting ring 233. The mounting cover 25 is used to complete the sealing protection of the electromagnet 24 to avoid affecting the installation position of the electromagnet 24 and ensure uniform magnetic force.

[0044] Among them, the number of detectors 232 is six, and the six detectors 232 are divided into two groups of three each. The number of detection mechanisms 23 is two, and the two detection mechanisms 23 are symmetrically distributed up and down. The upper and lower distributed detection mechanisms 23 can realize the upper and lower surface detection of the film material and the uniformity detection of the upper and lower surfaces of the film material.

[0045] Among them, the auxiliary detection mechanism 20 includes an installation frame 201, a side rod 202, a detection lamp 203 and a light sensing board 204. The side rod 202 is fixedly connected to the side of the installation frame 201, and the end face of the side rod 202 is fixedly connected to the chassis 1. The detection lamp 203 is fixedly connected to the inner surface of the installation frame 201, and the light sensing board 204 is fixedly installed on the inner surface of the installation frame 201. The detection lamp 203 and the light sensing board 204 are respectively distributed up and down. The detection lamp 203 and the light sensing board 204 are used to complete the auxiliary light detection, and the uniformity is judged by detecting the intensity distribution of the light after penetration.

[0046] A control box 22 is fixedly installed on the back of the chassis 1, and a connecting line 21 is fixedly connected between the control box 22 and the auxiliary detection mechanism 20. The control box 22 processes the sensing signal of the light sensing board 204 to achieve uniformity calculation.

[0047] Among them, a side hole 26 is opened on the side of the fixed frame 4, and a No. 4 tube 27 is fixedly connected to the side of the fixed frame 4. One end of the No. 4 tube 27 is connected to the side hole 26, and the other end of the No. 4 tube 27 is located on the side of the auxiliary detection mechanism 20. By utilizing the No. 4 tube 27 to connect with the fixed frame 4, the dust on the top surface of the light sensing plate 204 is sucked out during suction, thereby ensuring that the surface of the light sensing plate 204 is clean and improving the actual detection accuracy.

[0048] Among them, the top surface of the suction pump 15 is fixedly connected to a No. 2 pipe 16, and the side of the suction pump 15 is fixedly connected to a No. 3 pipe 17. There are two fixed frames 4, and the two fixed frames 4 are distributed up and down. By utilizing the fixed frames 4 distributed up and down, the cleaning and dust removal of the upper and lower surfaces of the membrane material are completed, thereby improving the accuracy of the upper and lower surface uniformity detection.

[0049] Among them, the left end face of the chassis 1 is provided with a removal port 3, the left and right end faces of the chassis 1 are fixedly connected with side panels 18, and the inner side faces of the side panels 18 are fixedly installed with guide mechanisms 19. The guiding mechanism 19 is used to guide the film material to ensure stable transportation of the film material.

[0050] Second embodiment: Figure 1 , Figure 2 , Figure 3 , Figure 6 , Figure 7 and Figure 8As shown, when it is necessary to change the object of detection, according to the sputtered film material that needs to be detected, the electromagnet 24 on one side of the mounting ring 233 is closed, so that the electromagnet on one side of the mounting ring 233 is magnetic when energized, and the other side is non-magnetic when de-energized, and the electromagnets 24 on both sides have the same magnetic properties as the outer side of the second magnetic plate 235. When one side is de-energized and non-magnetic, the second magnetic plate 235 on the side of the fixed plate 234 is pushed by the repulsive force on one side, so that the mounting ring 233 and the rotating rod 231 rotate, so that the second magnetic plate 235 on one side of the fixed plate 234 contacts the de-energized electromagnet 24. At this time, the rotating rod 231 deflects and causes the detector 232 on one side of the outer surface of the rotating rod 231 to deflect to the bottom, completing the switching. When it is necessary to continue switching, the electromagnets 24 on both sides are controlled to be turned on and off to complete the reverse switching.

[0051] First, by fixing the electromagnets 24 on both sides of the chassis 1 and symmetrically distributing the electromagnets 24 on both sides of the mounting ring 233, the electromagnets 24 on both sides have the same polarity after being energized, and a second magnetic plate 235 is added to the side of the fixed plate 234 of the detection mechanism 23, while keeping the magnetism of the second magnetic plate 235 the same as the magnetism of the electromagnet 24. When the electromagnets 24 on both sides are energized, the repulsive forces on both sides push the two sides of the fixed plate 234 to be stable, keeping the detector 232 in the middle directly below, and by changing the on and off of the electromagnets 24 on both sides, the repulsive forces on both sides are changed, thereby realizing the deflection of the detection mechanism 23, and by changing different deflection directions, the switching of the detector 232 is realized.

[0052] A magnetron sputtering film uniformity detection device and a detection method thereof include the following detection methods:

[0053] Step 1: The film material to be tested is passed through the inlet 2 and the removal port 3 of the chassis 1, and the film material is kept between the upper and lower guide mechanisms 19. As the film material is transported, the suction pump 15 is started, so that the suction pump 15 sucks air into the fixed sleeve 12 through the No. 2 pipe 16, and then the fixed sleeve 12 sucks air in the fixed frame 4 through the No. 1 pipe 13. As the film material rubs along the cleaning brush 5, the attached dust is shaken off and sucked into the fixed frame 4 through the suction hole 6, and the dust is filtered on one side of the filter plate 7;

[0054] Step 2: When the film material is being transported, the auxiliary detection mechanism 20 is started. As the detection lamp 203 in the auxiliary detection mechanism 20 irradiates light downward toward the film material, the top surface of the light sensing plate 204 senses the light intensity and transmits the detection signal to the control box 22. At the same time, the No. 4 tube 27 located on the side of the auxiliary detection mechanism 20 sucks air to suck out the dust and impurities on the top surface of the light sensing plate 204. The control box 22 calculates the surface uniformity of the film material according to the light receiving intensity of the light sensing plate 204.

[0055] Step 3: After the auxiliary detection, the film material moves to between the upper and lower detection mechanisms 23, and is detected in conjunction with the detector 232. When it is necessary to detect the uniformity of different components, the electromagnet 24 on one side is turned off, so that the magnetism of the powered-off electromagnet 24 disappears, so that the electromagnet 24 on the other side pushes the fixed plate 234 below to deflect, and the switch is completed. When it is necessary to replace another set of detectors 232, the previously turned-off electromagnet 24 is started, and the electromagnet 24 on the other side is powered off. The fixed plate 234 is deflected by the reverse thrust, and the rotating rod 231 is driven to deflect, and the switch is switched to the detector 232 on the other side to complete the detection.

[0056] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0057] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A magnetron sputtering film uniformity detection device, comprising a chassis (1), characterized in that: The right end surface of the chassis (1) is provided with an inlet (2), the inner surface of the inlet (2) is fixedly connected to a fixing frame (4), the top surface of the fixing frame (4) is fixedly connected to a cleaning brush (5), the top surface of the fixing frame (4) is provided with a suction hole (6), the inner surface of the fixing frame (4) is movably sleeved with a filter plate (7), the side surface of the filter plate (7) is fixedly connected to a connecting rod (8), the end surface of the connecting rod (8) is fixedly connected to a sealing plate (9), the interior of the fixing frame (4) is fixedly connected to a fixing rod (10), and the fixing rod (10) is fixedly connected to the inside of the fixing frame (4). The end surface of the chassis (0) is fixedly connected to a first magnetic plate (11), the first magnetic plate (11) is magnetically connected to the filter plate (7), the side surface of the chassis (1) is fixedly connected to a mounting plate (14), the top surface of the mounting plate (14) is fixedly mounted with a suction pump (15), the right end surface of the chassis (1) is fixedly connected to a fixing sleeve (12), the fixing sleeve (12) and the fixing frame (4) are fixedly connected to a first pipe (13), a detection mechanism (23) is movably installed inside the chassis (1), and an auxiliary detection mechanism (20) is provided inside the chassis (1), The detection mechanism (23) comprises a rotating rod (231), a detector (232), a mounting ring (233), a fixing plate (234), a second magnetic plate (235) and a controller (236); the outer surface of the rotating rod (231) is movably connected to the chassis (1); the detector (232) is fixedly mounted on the outer surface of the rotating rod (231); the mounting ring (233) is fixedly mounted on the outer surface of the rotating rod (231) and is located outside the chassis (1); the front and back surfaces of the chassis (1) are fixedly connected to electromagnets (24); the electromagnets (24) are located on both sides of the mounting ring (233); the outer surface of the mounting ring (233) is fixedly connected to the fixing plate (234); the side surface of the fixing plate (234) is fixedly connected to the second magnetic plate (235); and the controller (236) is fixedly mounted on the end surface of the rotating rod (231). The front and back surfaces of the chassis (1) are both fixedly connected with mounting covers (25), and the mounting covers (25) are sleeved on the outside of the mounting ring (233).

2. The magnetron sputtering film uniformity detection device according to claim 1, characterized in that: The number of the detectors (232) is six, and the six detectors (232) are divided into two groups of three each. The number of the detection mechanisms (23) is two, and the two detection mechanisms (23) are symmetrically distributed up and down.

3. The magnetron sputtering film uniformity detection device according to claim 1, characterized in that: The auxiliary detection mechanism (20) comprises a mounting frame (201), a side rod (202), a detection light (203) and a light sensing board (204); the side rod (202) is fixedly connected to a side surface of the mounting frame (201); an end surface of the side rod (202) is fixedly connected to the chassis (1); the detection light (203) is fixedly connected to an inner surface of the mounting frame (201); the light sensing board (204) is fixedly mounted on the inner surface of the mounting frame (201); and the detection light (203) and the light sensing board (204) are respectively distributed up and down.

4. The magnetron sputtering film uniformity detection device according to claim 1, characterized in that: A control box (22) is fixedly mounted on the back of the chassis (1), and a connecting line (21) is fixedly connected between the control box (22) and the auxiliary detection mechanism (20).

5. The magnetron sputtering film uniformity detection device according to claim 1, characterized in that: A side hole (26) is provided on the side of the fixing frame (4), a No. 4 tube (27) is fixedly connected to the side of the fixing frame (4), one end of the No. 4 tube (27) is in communication with the side hole (26), and the other end of the No. 4 tube (27) is located on the side of the auxiliary detection mechanism (20).

6. The magnetron sputtering film uniformity detection device according to claim 1, characterized in that: The top surface of the suction pump (15) is fixedly connected to a No. 2 pipe (16), and the side surface of the suction pump (15) is fixedly connected to a No. 3 pipe (17). The number of the fixed frames (4) is two, and the two fixed frames (4) are distributed up and down.

7. The magnetron sputtering film uniformity detection device according to claim 1, characterized in that: The left end surface of the chassis (1) is provided with a removal opening (3), the left and right end surfaces of the chassis (1) are fixedly connected to side panels (18), and the inner side surfaces of the side panels (18) are fixedly mounted with guide mechanisms (19).

8. The detection method of the magnetron sputtering film uniformity detection device according to any one of claims 1 to 7, characterized in that: The following detection methods are included: The first step: the film material to be tested is passed through the inlet (2) and the removal outlet (3) of the chassis (1), and the film material is kept between the upper and lower guide mechanisms (19). As the film material is transported, the suction pump (15) is started, so that the suction pump (15) sucks air into the fixed sleeve (12) through the second pipe (16), and then the fixed sleeve (12) sucks air in the fixed frame (4) through the first pipe (13). As the film material rubs along the cleaning brush (5), the attached dust is shaken off and sucked into the fixed frame (4) through the suction hole (6), and the dust is filtered on one side of the filter plate (7); Step 2: When the film material is being conveyed, the auxiliary detection mechanism (20) is started, and as the detection lamp (203) in the auxiliary detection mechanism (20) irradiates light downward toward the film material, the top surface of the light sensing plate (204) senses the intensity of the light, and transmits the detection signal to the control box (22). At the same time, the No. 4 pipe (27) located on the side of the auxiliary detection mechanism (20) sucks air to suck out dust and impurities on the top surface of the light sensing plate (204). The control box (22) calculates the surface uniformity of the film material according to the intensity of the light received by the light sensing plate (204); Step 3: After the auxiliary detection, the film material moves between the upper and lower detection mechanisms (23) and is detected by the detector (232). When it is necessary to detect the uniformity of different components, the electromagnet (24) on one side is turned off, so that the magnetism of the electromagnet (24) that is powered off disappears, so that the electromagnet (24) on the other side pushes the fixed plate (234) below to deflect, and the switch is completed. When it is necessary to replace another set of detectors (232), the previously turned off electromagnet (24) is started, and the electromagnet (24) on the other side is powered off. The fixed plate (234) is deflected by the reverse thrust, and the rotating rod (231) is driven to deflect, and the switch is switched to the detector (232) on the other side to complete the detection.

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