Control device, system, lithography device, manufacturing method of article, control method, storage medium

Abstract

The present invention provides a control device, a system, a photolithography device, a manufacturing method of an article, a control method, and a storage medium. A control device for controlling a slave device connected to a network includes: a generation unit that generates instruction data for controlling processing in the slave device; and a communication unit that sends and receives data frames with the slave device via the network at fixed periods, and when the communication unit detects that the generation unit has performed a reset, if response data corresponding to the instruction data sent before the reset is performed remains in the data frame, the response data is set to an invalid state.

Description

Technical Field

[0001] The present invention relates to a control device that controls a slave device as a master device, a system having the control device, a photolithography device, a method for manufacturing an article, a control method, and a storage medium. Background Art

[0002] In a system that transmits and receives data between a master device and a slave device, it is sometimes necessary to reset the master device during the operation of the system. Patent document 1 proposes a system in which a transmission canceling unit is provided, and when a state in which a data transmission operation from the master device to the slave device cannot be performed due to the reset of the master device, the transmission canceling unit replaces the master device and completes the operation of the slave device.

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent Document 1: Japanese Patent Application Publication No. 2011-81551 Summary of the invention

[0006] Problems to be solved by the invention

[0007] In a system in which data is transmitted and received between a master device and a slave device via a field network at a fixed period, a generation unit provided in the master device is sometimes reset in order to generate instruction data to be instructed to the slave device. In this case, when response data from the slave device is retained in a data frame of the field network, the response data may be erroneously transmitted, and it may be difficult to operate the system normally.

[0008] Therefore, an object of the present invention is to provide a technique that facilitates normal operation of a system that transmits and receives data between a master device and slave devices via a field network.

[0009] Solutions for solving problems

[0010] In order to achieve the above-mentioned purpose, a control device according to one aspect of the present invention is a control device for controlling a slave device connected to a network, and is characterized in that it includes: a generating unit, which generates indication data for controlling processing in the slave device; and a communication unit, which sends and receives data frames with the slave device via the network at a fixed period, and when the communication unit detects that the generating unit has performed a reset, if response data corresponding to the indication data sent before the reset is performed remains in the data frame, the communication unit sets the response data to an invalid state.

[0011] Further objects and other aspects of the present invention will become apparent from the preferred embodiments described below with reference to the accompanying drawings.

[0012] Effects of the Invention

[0013] According to the present invention, for example, it is possible to provide a technique that is useful for enabling a system that transmits and receives data between a master device and slave devices via a field network to operate normally.

[0014] Other features and advantages of the present invention will become apparent from the following description made with reference to the accompanying drawings. In the accompanying drawings, the same or similar structures are denoted by the same reference numerals. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the present invention and, together with the description, serve to explain the principles of the present invention.

[0016] Figure 1 This is a schematic structural diagram of a system including a master device and slave devices.

[0017] Figure 2 : is a flowchart showing the processing performed in the communication control unit of the master device.

[0018] Figure 3 This is a diagram showing an example of the data flow among the sequence control unit, the generation unit, the communication control unit, and the slave device.

[0019] Figure 4 This is a diagram showing an example of the data flow among the sequence control unit, the generation unit, the communication control unit, and the slave device.

[0020] Figure 5 It is a schematic diagram showing the structure of an exposure device. Figure 1 According to the first embodiment. DETAILED DESCRIPTION

[0021] The following detailed description of the embodiments is made with reference to the accompanying drawings. Moreover, the following embodiments do not limit the invention to which the claims relate. A plurality of features are described in the embodiments, but the present invention is not limited to all of the features that require these features, and a plurality of features can be combined arbitrarily. In addition, in the accompanying drawings, the same reference numerals are used for the same or similar structures, and repeated descriptions are omitted.

[0022] <First Embodiment>

[0023] An embodiment of the present invention will be described. Figure 1 1 is a schematic diagram of the structure of a system 100 of the present embodiment including a slave device and a master device (control device) that controls the slave device. Figure 1As shown, the system 100 of this embodiment may include: a master device 110; a plurality of slave devices 120, which are communicably connected to the master device 110; and a unit 130, which is communicably connected to each slave device 120. The master device 110 and each slave device 120 may be composed of a computer having a CPU, a memory, etc., or may be composed of a single-board computer, or may be composed in a manner that is compatible with a single-board computer. In addition, the unit 130 is a mechanism such as a servo motor, which can be controlled by the slave device 120.

[0024] A plurality of slave devices 120 are connected to the master device 110 in a daisy-chain manner so as to be communicable. The master device 110 and the plurality of slave devices 120 transmit and receive data via the field network 140 at fixed periods. In addition, the plurality of slave devices 120 respectively control the plurality of units 130 based on the data received from the master device 110. In the present embodiment, two slave devices 121 and 122 are illustrated as the slave devices 120 that are communicably connected to the master device 110, but the number of the slave devices 120 is not limited to two, and may be one or more than three. In addition, in the present embodiment, two units 131 and 132 are illustrated as the plurality of units 130 controlled by the plurality of slave devices 120. The unit 131 can be controlled by the slave device 121, and the unit 132 can be controlled by the slave device 122.

[0025] The master device 110 may include a sequence control unit 111, a plurality of generation units (slave control units) 112, and a communication control unit (communication unit) 113. The sequence control unit 111 controls the sequence of processing in each slave device 120. For example, the sequence control unit 111 controls the plurality of generation units 112 according to a predetermined (set) order, sequence, or process. The plurality of generation units 112 respectively generate instruction data, which is used to control (instruct) the processing in the slave device 120 as the control object.

[0026] For example, the number of generators 112 is the same as that of slave devices 120. In the present embodiment, two generators 112a and 112b are provided, which respectively control two slave devices 121 and 122. The generator 112a controls the slave device 121 and generates instruction data for controlling the processing in the slave device 121. On the other hand, the generator 112b controls the slave device 122 and generates instruction data for controlling the processing in the slave device 122.

[0027] The communication control unit 113 transmits and receives data with the plurality of slave devices 120 via the field network 140 at a fixed period. For example, the communication control unit 113 transmits the instruction data generated by the generation units 112a and 112b to the slave devices 121 and 122 via the field network 140 at a fixed period, and receives response data from the slave devices 121 and 122. The response data is, for example, data (flag) indicating whether the processing indicated by the instruction data is completed.

[0028] Then, as Figure 1 As an example of the field network 140 shown, EtherCAT (registered trademark), which is one of the industrial Ethernet (registered trademark), is described. In EtherCAT (registered trademark), since data frames are sent and received at a fixed period (e.g., 1 millisecond), the arrival time of data is ensured. When EtherCAT (registered trademark) is used as the field network 140, at least one of the nodes connected to the field network 140 can function as a master device 110, and the other nodes can function as slave devices 120. The node that functions as the master device 110 manages the sending and receiving timing of data frames in the field network 140.

[0029] exist Figure 1 In the example shown, the master device 110 (communication control unit 113) writes the instruction data generated by the generation units 112a and 112b into the data frame, and transmits the data frame to the slave device 121. The slave device 121 that has received the data frame reads and writes the data in the area allocated to itself in the data of the data frame, and transmits the data frame to the next slave device 122. In addition, the slave device 122 that has received the data frame reads and writes the data allocated to itself in the data of the data frame, and transmits the data frame to the master device 110 via the slave device 121.

[0030] Specifically, the slave device 121 reads the indication data generated by the generator 112a from the received data frame, and after writing the response data, sends the data frame to the next slave device 122. In addition, the slave device 122 reads the indication data generated by the generator 112b from the received data frame, and after writing the response data, sends the data frame to the master device 110 via the slave device 121.

[0031] In the system 100 in which data is transmitted and received between the master device 110 and the slave device 120 via the field network at a fixed period as described above, sometimes only the generator 112 in which an abnormality or failure occurs among the plurality of generators 112 is reset. In this case, when response data from the slave device 120 that is controlled by the generator 112 remains in the data frame of the field network 140, the response data is erroneously transmitted. In addition, in the reset generator 112, since the contents processed before the reset are deleted, an error may occur when receiving the response data corresponding to the instruction data generated before the reset. As a result, it may be difficult to operate the system 100 normally.

[0032] Therefore, when the communication control unit 113 of the present embodiment detects that the generation unit 112 is reset, if the response data from the slave device 120 remains in the data frame of the field network 140, the communication control unit 113 discards the response data. For example, when the communication control unit 113 detects that a generation unit 112 has been reset among the plurality of generation units 112, the communication control unit 113 identifies the slave device 120 that is the control target of the reset generation unit 112 from among the plurality of slave devices 120. Then, if the response data from the identified slave device 120 remains in the data frame of the field network 140, the communication control unit 113 discards the response data.

[0033] Figure 2 1 is a flowchart showing the processing performed in the communication control unit 113 of this embodiment. When the user starts the system 100, the master device 110 and the plurality of slave devices 121 and 122 start to start sending and receiving data via the field network 140 at a fixed period, and start Figure 2 Even when executing Figure 2 In the illustrated flow, the communication control unit 113 also repeatedly executes the transmission and reception of data with the plurality of slave devices 121 and 122 via the field network 140 at regular intervals.

[0034] In S11, the communication control unit 113 monitors (confirms) the reset of each of the multiple generation units 112. And, in S12, the communication control unit 113 determines whether a reset generation unit 112 among the multiple generation units 112 (112a, 112b) is detected. For example, when the generation unit 112 is reset, the indication data sent from the generation unit 112 at a fixed period will not be sent. Therefore, the communication control unit 113 can detect the reset generation unit 112 based on whether the indication data is received. In addition, the communication control unit 113 can detect the reset generation unit 112 based on the data (identification) sent from the generation unit 112 when the generation unit 112 is reset. In the case where the reset generation unit 112 is detected, proceed to S13, and in the case where the reset generation unit 112 is not detected, return to S11.

[0035] In S13, the communication control unit 113 determines the slave device 120 that is controlled by the reset generation unit 112. In the system 100 of the present embodiment, a plurality of generation units 112 are provided that respectively control the plurality of slave devices 120, and the correspondence between the plurality of slave devices 120 and the plurality of generation units 112 is known in advance. Therefore, the communication control unit 113 can determine the slave device 120 that is controlled by the reset generation unit 112 among the plurality of slave devices 120 based on the information indicating the correspondence. In addition, hereinafter, the slave device 120 determined in S13 is sometimes referred to as "determined slave device 120".

[0036] In S14, the communication control unit 113 confirms the state of the process in the determined slave device 120. And, in S15, the communication control unit 113 determines whether the process in the determined slave device 120 is being executed. For example, the communication control unit 113 can determine whether the process in the determined slave device 120 is being executed by confirming the data frame of the field network 140 received at each fixed period. Specifically, the data frame of the field network 140 is provided with an indicator indicating that the process in the determined slave device 120 is completed. In the case where the indicator is established in the data frame of the field network 140, the communication control unit 113 can determine that the process in the determined slave device 120 is completed. On the other hand, in the case where the indicator is not established in the data frame of the field network 140, the communication control unit 113 can determine that the process in the determined slave device 120 is being executed. In the case where the process in the determined slave device 120 is being executed, the process proceeds to S16, and in the case where the process in the determined slave device 120 is completed, the process proceeds to S19.

[0037] S16 to S18 are steps entered when it is determined that the processing in the slave device 120 is being executed. Although the generation unit 112 that determines the slave device 120 as the control target is reset, it may be difficult to operate the system 100 normally when the processing in the slave device 120 is completed. Therefore, in this step, when the processing in the slave device 120 is being executed, the slave device 120 is reset.

[0038] In S16, the communication control unit 113 instructs the determined slave device 120 to reset the determined slave device 120. For example, the communication control unit 113 can instruct the determined slave device 120 to reset by writing an instruction (data) for instructing the determined slave device 120 to reset into a data frame of the field network 140. Here, the determined slave device 120 can maintain the communication with the master device 110 and other slave devices 120 via the field network 140 as it is and reset itself. Thus, even when the reset of the determined slave device 120 is being executed, the communication control unit 113 can maintain the communication with the slave devices 120 other than the determined slave device 120 via the field network 140.

[0039] In S17, the communication control unit 113 confirms the execution state of the reset of the slave device 120. And, in S18, the communication control unit 113 determines whether the reset of the slave device 120 is completed. For example, the communication control unit 113 can determine whether the processing in the slave device 120 is being executed by confirming the data frame of the field network 140 received at each fixed period. Specifically, an indicator indicating that the reset of the slave device 120 is completed is set in the data frame of the field network 140. In the case where the indicator is established in the data frame of the field network 140, the communication control unit 113 can determine that the reset of the slave device 120 is completed. On the other hand, in the case where the indicator is not established in the data frame of the field network 140, the communication control unit 113 can determine that the reset of the slave device 120 is being executed. In the case of determining that the reset of the slave device 120 is completed, the process proceeds to S19, and in the case of determining that the reset of the slave device 120 is not completed, the process returns to S17.

[0040] In S19, the communication control unit 113 confirms the data frame of the field network 140. For example, in the case where the reset of the determined slave device 120 is performed in S16 to S18, the communication control unit 113 may confirm the data frame after the reset of the determined slave device 120 is completed. Furthermore, in S20, the communication control unit 113 determines whether the response data from the determined slave device 120 remains (exists) in the data frame of the field network 140. In the case where the response data from the determined slave device 120 does not remain in the data frame, the process returns to S11. On the other hand, in the case where the response data from the determined slave device 120 remains in the data frame, the process proceeds to S21, and after discarding the response data from the data frame, the process returns to S11.

[0041] Here, "discarding the response data" means setting the response data to a non-valid state (invalid state). For example, the communication control unit 113 may discard the response data by clearing (eliminating) the response data from the determined slave device 120 from the data frame of the field network 140. In addition, in the case where the response data is represented by whether a flag indicating that the processing is completed is established, the communication control unit 113 may discard the response data by removing the flag established in the data frame.

[0042] Next, the flow of data in the system 100 according to the present embodiment will be described. Figure 3 , Figure 4 1 is a diagram showing an example of data flow among the sequence control unit 111 , the generation unit 112 , the communication control unit 113 , and the slave device 120 in the system 100 according to the present embodiment. Figure 3 An example of a data flow when no response data remains in a data frame of the field network 140 (first embodiment) is shown. Figure 4 An example of a data flow when response data remains in the data frame is shown (second embodiment).

[0043] [First embodiment]

[0044] One side reference Figure 3, while explaining the first embodiment. The sequence control unit 111 sends a control instruction for causing the generation unit 112 to generate instruction data to the generation unit 112 according to a predetermined (set) order, sequence or process (S101). The generation unit 112, which has received the control instruction from the sequence control unit 111, generates instruction data for causing the slave device 120 to perform processing based on the control instruction and sends it to the communication control unit 113 (S102). The communication control unit 113, which has received the instruction data from the generation unit 112, sends the instruction data to the slave device 120 by writing the instruction data into the data frame of the field network 140 (S103). The slave device 120, which has received the instruction data from the communication control unit 113, starts to execute the processing indicated by the instruction data and starts to control the unit 130. As a result, the slave device 120 becomes in the process of processing.

[0045] Here, when it is necessary to reset the generator 112, the sequence control unit 111 sends a reset instruction command for causing the generator 112 to execute the reset to the generator 112, and executes the reset of the generator 112 (S104). In addition, the generator 112 that executes the reset sends data indicating the execution of the reset (reset execution instruction) to the communication control unit 113 (S105). Thus, the communication control unit 113 can detect the reset generator 112. The communication control unit 113 determines the slave device 120 that is regarded as the control object by the reset generator 112 (S106), and determines whether the slave device 120 is executing the process by confirming the state of the process in the determined slave device 120 (S107). In this first embodiment, the slave device 120 is executing the process (that is, the response data will not be sent from the slave device 120). Therefore, the communication control unit 113 sends a reset instruction command to instruct the slave device 120 to execute the reset to the slave device 120 (S108). The slave device 120 that has received the reset instruction command performs self-reset, and when the reset is completed, transmits data indicating the reset completion (reset completion command) to the communication control unit 113 via the field network 140 ( S109 ).

[0046] The communication control unit 113 that has received the reset completion instruction checks whether the response data from the slave device 120 remains in the data frame of the field network 140 (S110). In the first embodiment, since the slave device 120 is reset while the slave device 120 is executing a process, the response data indicating that the process in the slave device 120 is completed is not written in the data frame of the field network 140. That is, in the first embodiment, the response data from the slave device 120 does not remain in the data frame, and the communication control unit 113 proceeds to the next control without discarding the response data.

[0047] The sequence control unit 111 sends a control instruction for causing the generation unit 112 to generate the next instruction data to the generation unit 112 according to a predetermined (set) order, sequence or process (S111). The generation unit 112 generates instruction data for causing the slave device 120 to perform processing based on the received control instruction and sends it to the communication control unit 113 (S112). The communication control unit 113 sends the instruction data to the slave device 120 by writing the received instruction data into the data frame of the field network 140 (S113). The slave device 120 that has received the instruction data from the communication control unit 113 starts to execute the processing indicated by the instruction data. Moreover, after the processing is completed, the slave device 120 writes the response data into the data frame of the field network 140, thereby sending the response data to the communication control unit 113 (S114). The response data received by the communication control unit 113 is sent to the sequence control unit 111 via the generation unit 112 (S115) (S116).

[0048] [Second embodiment]

[0049] One side reference Figure 4 , while explaining the second embodiment. The sequence control unit 111 sends a control instruction for causing the generation unit 112 to generate the next indication data to the generation unit 112 according to a predetermined (set) order, sequence or process (S201). Based on the received control instruction, the generation unit 112 generates indication data for causing the slave device 120 to perform processing and sends it to the communication control unit 113 (S202). The communication control unit 113 sends the indication data to the slave device 120 by writing the received indication data into the data frame of the field network 140 (S203). The slave device 120 that has received the indication data from the communication control unit 113 starts to execute the processing indicated by the indication data. Moreover, after the processing is completed, the slave device 120 sends the response data to the communication control unit 113 by writing the response data into the data frame of the field network 140 (S204).

[0050] Here, when it is necessary to reset the generator 112, the sequence control unit 111 sends a reset instruction command for causing the generator 112 to execute the reset to the generator 112, and executes the reset of the generator 112 (S205). In addition, the generator 112 that executes the reset sends data indicating the execution of the reset (reset execution instruction) to the communication control unit 113 (S206). Thus, the communication control unit 113 can detect the reset generator 112. The communication control unit 113 determines the slave device 120 that is regarded as the control object by the reset generator 112 (S207), and determines whether the slave device 120 is executing the processing by confirming the status of the processing in the determined slave device 120 (S208). In this second embodiment, since the processing in the slave device 120 is completed (that is, in S204, the response data is sent from the slave device 120), the reset of the slave device 120 is not executed.

[0051] The communication control unit 113 confirms whether the response data from the slave device 120 remains in the data frame of the field network 140 (S209). In this second embodiment, the following state is reached: the processing in the slave device 120 is completed and the response data is sent from the slave device 120, but the response data is not sent to the generation unit 112 and the sequence control unit 111. In other words, the response data remains in the data frame of the field network 140. Therefore, the communication control unit 113 discards the response data (S210) remaining in the data frame, and then proceeds to the next step (S211 to S216). S211 to S216 are the same as those described in the first embodiment. Figure 3 The same steps as S111 to S116 of S204 can be performed. Thus, it is possible to avoid the situation where the response data sent from the slave device 120 in S204 and remaining in the data frame is sent to the generation unit 112 and the sequence control unit 111. In other words, it is possible to avoid the situation where the past response data sent from the slave device 120 in S204 is sent to the generation unit 112 and the sequence control unit 111 as the response data corresponding to the instruction data sent to the slave device 120 in S213.

[0052] As described above, when the master device 110 (communication control unit 113) of the present embodiment detects the reset of the generation unit 112, it discards the response data when the response data from the slave device 120 remains in the data frame of the field network 140. This can avoid the situation where the response data remaining in the data frame of the field network 140 is erroneously transmitted, and the system 100 can operate normally.

[0053] <Embodiment of Photolithography Apparatus>

[0054] An embodiment of a lithography apparatus to which the system 100 according to the present invention is applied is described. In this embodiment, an exposure apparatus that exposes a substrate and forms a pattern on the substrate is exemplified as a lithography apparatus to which the system 100 is applied, but the invention is not limited thereto. For example, the system 100 can be applied to a lithography apparatus such as an imprint apparatus that forms a pattern of an imprint material on a substrate using a mold, or a drawing apparatus that irradiates a substrate with a charged particle beam to form a pattern on the substrate.

[0055] Figure 5 1 is a schematic diagram showing the structure of the exposure device 10. The exposure device 10 is an exposure device that projects the pattern of the mask M onto the substrate W via the projection optical system 14 to expose the substrate W. The exposure device 10 includes a light source 11, an illumination optical system 12, a mask stage 13, a projection optical system 14, a substrate stage 15, and a main control unit 16. In addition, the exposure device 10 includes: a first drive unit 21 that drives the mask stage 13; a second drive unit 22 that drives the lens 14a of the projection optical system 14; and a third drive unit 23 that drives the substrate stage 15. The first drive unit 21, the second drive unit 22, and the third drive unit 23 are mechanisms that perform at least a part of the process of forming a pattern on the substrate W, and are controlled by the mask stage control unit 31, the projection control unit 32, and the substrate stage control unit 33, respectively. The main control unit 16 includes, for example, a CPU, a memory (storage unit), etc., and controls the entire exposure apparatus 10 (each part of the exposure apparatus 10 ) by controlling the mask stage control unit 31 , the projection control unit 32 , and the substrate stage control unit 33 .

[0056] The light source 11 emits exposure light. The illumination optical system 12 illuminates the mask M using the light emitted from the light source 11. The mask stage 13 can be configured to hold the mask M and to be movable in the XY direction, for example, by the first drive unit 21. The projection optical system 14 projects the pattern of the mask M illuminated by the illumination optical system 12 onto the substrate. The projection optical system 14 includes a lens 14a, which can be moved in the X direction, for example, by the second drive unit 22. The substrate stage 15 can be configured to hold the substrate W and to be movable in the XY direction, for example, by the third drive unit 23.

[0057] exist Figure 5When the system 100 according to the present invention is applied to the exposure apparatus 10 shown in the figure, the main control unit 16 can be configured as a master device 110. In addition, the mask stage control unit 31, the projection control unit 32, and the substrate stage control unit 33 can be respectively configured as slave devices 120. The first drive unit 21, the second drive unit 22, and the third drive unit 23 can be respectively configured as units 130. The transmission and reception of data between the main control unit 16, the mask stage control unit 31, the projection control unit 32, and the substrate stage control unit 33 are performed via the field network at a fixed period.

[0058] <Implementation Method of Manufacturing Article>

[0059] The manufacturing method of the article involved in the embodiment of the present invention is suitable for manufacturing micro devices such as semiconductor devices, components with fine structures and other articles. The manufacturing method of the article of this embodiment includes: a process of forming a pattern on a substrate using the above-mentioned lithography device (exposure device); and a process of processing the substrate on which the pattern is formed in this process. In addition, the manufacturing method includes other well-known processes (oxidation, film formation, evaporation, doping, flattening, etching, resist stripping, cutting, bonding, packaging, etc.). Compared with previous methods, the manufacturing method of the article of this embodiment is advantageous in at least one of the performance, quality, productivity, and production cost of the article.

[0060] <Other embodiments>

[0061] The present invention can also be implemented in the following process: a program capable of implementing one or more functions of the above-mentioned embodiment is provided to a system or device via a network or storage medium, and one or more processors in a computer of the system or device read out and execute the program. In addition, it can also be implemented by a circuit (e.g., ASIC) capable of implementing one or more functions.

[0062] The present invention is not limited to the above-described embodiments, and various changes and modifications can be made without departing from the spirit and scope of the invention. Therefore, claims are appended to disclose the scope of the invention.

[0063] This application claims priority based on Japanese patent application No. 2020-026476 filed on February 19, 2020, the entire contents of which are incorporated herein by reference.

[0064] Description of Reference Numerals

[0065] 100: system; 110: master device; 111: sequence control unit; 112: generation unit; 113: communication control unit; 120: slave device; 130: unit.

Claims

1. A control device as a master device that controls a slave device via a network, characterized in that: include: a generating unit configured to generate instruction data for controlling processing in the slave device; as well as a communication unit, wherein the communication unit sends and receives data frames with the slave device via the network at a fixed period, The communication unit transmits the data frame in which the instruction data generated by the generation unit is written to the slave device, and receives the data frame in which the response data indicating completion of the processing corresponding to the instruction data is written by the slave device, When it is detected that the generation unit has been reset, the communication unit sets the response data to an invalid state when the response data written into the data frame by the slave device according to the instruction data before the generation unit is reset remains in the data frame.

2. The control device according to claim 1, characterized in that: When the communication unit detects that the reset has been executed, it determines whether the slave device is executing the process, and instructs the slave device to execute the reset of the slave device if the slave device is executing the process.

3. The control device according to claim 2, characterized in that: When the communication unit instructs the slave device to execute reset, after the slave device completes the reset, the communication unit sets the response data from the slave device remaining in the data frame to an invalid state.

4. The control device according to claim 2 or 3, characterized in that: When the communication unit instructs the slave device to execute a reset, the communication unit transmits and receives the data frame via the network at regular intervals with the slave device even when the reset is being executed.

5. The control device according to claim 1, characterized in that: The control device further includes a sequence control unit, which controls the sequence of processing in the slave device. The sequence control unit resets the generation unit.

6. The control device according to claim 1, characterized in that: The control device controls each of the plurality of slave devices via the network, so that the control device includes the plurality of generating units that control each of the plurality of slave devices.

7. The control device according to claim 6, characterized in that: When the communication unit detects a reset generation unit among the multiple generation units, it determines the slave device that is controlled by the reset generation unit from among the multiple slave devices, and when response data from the determined slave device remains in the data frame, the communication unit sets the response data to an invalid state.

8. The control device according to claim 6, characterized in that: The plurality of slave devices are connected in a daisy-chain manner.

9. The control device according to claim 6, characterized in that: The data frame includes regions allocated to the respective slave devices, and the plurality of slave devices read and write data in the regions allocated to the respective slave devices.

10. The control device according to claim 1, characterized in that: The communication unit transmits the data frame in which the instruction data is written, and receives the data frame in which the response data is written.

11. The control device according to claim 1, characterized in that: The response data is data indicating whether the processing indicated by the instruction data is completed.

12. A system comprising a slave device and a master device controlling the slave device via a network, wherein: The main device comprises: a generating unit configured to generate instruction data for controlling processing in the slave device; as well as a communication unit, wherein the communication unit sends and receives data frames with the slave device via the network at a fixed period, The communication unit transmits the data frame in which the instruction data generated by the generation unit is written to the slave device, and receives the data frame in which the response data indicating completion of the processing corresponding to the instruction data is written by the slave device, When it is detected that the generation unit has been reset, the communication unit sets the response data to an invalid state when the response data written into the data frame by the slave device according to the instruction data before the generation unit is reset remains in the data frame.

13. A photolithography apparatus for forming a pattern on a substrate, characterized in that: comprising the system of claim 12, The slave device controls a mechanism that performs at least a part of a process of forming a pattern on the substrate.

14. A method for manufacturing an article, characterized in that: include: A process of forming a pattern on a substrate using the photolithography apparatus according to claim 13; and a step of processing the substrate on which the pattern is formed in the above step, An article is manufactured based on the processed substrate.

15. A control method for controlling a slave device by a master device via a network, characterized in that: include: a step of generating, by a generating unit, instruction data for controlling processing in the slave device; The process of sending and receiving data frames via the network with the slave device at a fixed period; The step of sending the data frame in which the instruction data generated by the generating unit is written to the slave device, and receiving the data frame in which response data indicating completion of the processing corresponding to the instruction data is written by the slave device; as well as A step of setting the response data to an invalid state when it is detected that the generation unit has been reset and when the response data written into the data frame by the slave device according to the instruction data before the generation unit is reset remains in the data frame. 16 . A computer-readable storage medium storing a program for causing a computer as a host device to execute each step of the control method according to claim 15 .

Images