A mask plate manufacturing method for reducing mask deformation, a supporting mask plate and a mask plate

Abstract

The present invention discloses a mask plate manufacturing method, a supporting mask plate and a mask plate for reducing mask deformation, which specifically include the following steps: S1, obtaining the offset of at least part of the mask opening of the experimental supporting mask plate after the net is stretched; S2, calculating the position accuracy of the mask opening; S3, obtaining the compensation amount corresponding to the mask opening according to the position accuracy and offset of the mask opening; S4, according to the compensation amount of the mask opening, compensating the preset mask opening position on the supporting mask plate to obtain the compensated mask opening position, and forming the mask opening on the supporting mask plate according to the compensated mask opening position. The present invention reduces the frame warping while meeting the flatness requirements by reducing the tension around it, and at the same time reduces the possibility of the overall verticality change of the integrated supporting mask plate.

Description

Technical Field

[0001] The present invention relates to the technical field of mask plates, and in particular to a mask plate manufacturing method for reducing mask deformation, a supporting mask plate and a mask plate. Background Art

[0002] Precision metal mask is used for RGB organic material evaporation. Its support mask plate mainly includes CH support and integrated support. At present, integrated support has become the main way to support mask. The integrated support mask plate is composed of mask plate frame and mask plate welding. However, the integrated support also has problems. Since the tension of the integrated support mask plate is concentrated at the edges of the four corners of the mask, the tension at the edge is much greater than the tension in the middle position, and the mask frame as a whole is greatly deformed, and then warping occurs; in addition, when the tension at the corner position is much greater than that in the middle position, due to the following reasons: 1. The mask plate frame may cause uneven lattice after heat treatment; 2. There are deviations in the production of mask plate and mask plate frame; 3. The mask plate design is asymmetric; which increases the possibility that the overall verticality of the mask plate cannot be guaranteed after the integrated mask plate and the mask plate frame are welded, and it is more likely to appear non-rectangular shape; or there is a trend of changing in the direction of non-rectangular shape. In the subsequent precision metal mask net stretching process or after repeated use of evaporation cleaning, the precision metal mask pixel position accuracy changes. Summary of the invention

[0003] The purpose of the present invention is to provide a mask plate manufacturing method, a supporting mask plate and a mask plate that reduce the deformation of the mask. After reducing the tension on all sides, the frame warping is reduced while meeting the flatness requirements of the mask plate, and the possibility of changes in the overall verticality of the integrated supporting mask plate is reduced, so as to solve the existing problems.

[0004] A method for manufacturing a mask plate for reducing Mask deformation specifically comprises the following steps:

[0005] S1, obtaining the offset of at least part of the mask opening of the experimental support mask plate after the net is stretched;

[0006] S2, calculating the position accuracy of the mask opening;

[0007] S3, obtaining a compensation amount corresponding to the mask opening according to the position accuracy and offset of the mask opening;

[0008] S4. According to the compensation amount of the mask opening, the preset mask opening position on the supporting mask plate is compensated to obtain a compensated mask opening position, and a mask opening is formed on the supporting mask plate according to the compensated mask opening position.

[0009] Furthermore, the step S2 also includes a zoning process to divide the mask opening of the supporting mask plate into a central area and a non-central area, wherein the central area is the mask opening located within a preset central area of ​​the supporting mask plate, and the non-central area is the mask opening within a preset non-central area of ​​the supporting mask plate.

[0010] Furthermore, the step S3 specifically includes the following steps:

[0011] Determining whether the mask opening belongs to the central area;

[0012] If yes, the translation compensation amount is directly calculated according to the offset of the mask opening;

[0013] If not, determining based on the position accuracy of the mask opening;

[0014] If the position accuracy is greater than a preset value, at least one of a rotation compensation amount, a warping compensation amount and a translation compensation amount is calculated according to the offset of the mask opening;

[0015] If the position accuracy is less than a preset value, the translation compensation amount is calculated according to the offset of the mask opening.

[0016] Further, the mask opening is rectangular, and the compensation process is at least one of the following operations:

[0017] 1. According to the rotation compensation amount, the position of the mask opening preset on the supporting mask plate relative to the two short sides is rotated accordingly to obtain the rotated mask opening position;

[0018] Second: According to the warping compensation amount, the mask opening preset on the supporting mask plate is warped correspondingly relative to the positions of the two long sides to obtain the mask opening position after warping;

[0019] Third, according to the translation compensation amount, the mask opening preset on the supporting mask plate is correspondingly translated to obtain the position of the mask opening after the translation.

[0020] Furthermore, the net stretching of the support mask plate is a net stretching force acting on each side of the support mask plate, wherein the tension value at the four corners is much greater than that at other positions, wherein:

[0021] The operation of rotating based on the rotation compensation amount is: rotating relative to the two short sides at a rotation angle Z1 in the opposite direction of the corresponding offset.

[0022] The operation of warping based on the warping compensation amount is: warping is performed relative to the two long sides with an arc Z2 (not marked in the figure) tending to the opposite direction of the corresponding offset;

[0023] The operation of warping based on the translation compensation amount is as follows: the entire mask opening is translated along the opposite direction of the corresponding offset by a length L, that is, the entire mask opening is translated away from the center of the supporting mask plate.

[0024] Furthermore, the compensation amount satisfies:

[0025] The farther away from the central area, the larger the rotation angle Z1, the larger the arc Z2, and the larger the length L.

[0026] Specifically, the mask opening position after compensation is an arc-shaped opening;

[0027] Simplified, the mask opening position after compensation is a V-shaped opening;

[0028] Simplified, the mask opening position after the simplification compensation is a parallelogram opening.

[0029] Furthermore, flatness compensation is also included, specifically including at least one of the following methods:

[0030] Add dummy openings at the edge of the support mask plate;

[0031] A half-engraving method is used on the upper part of the support mask plate to thin some areas;

[0032] The lower part of the support mask plate is supported by Cover or Howling method;

[0033] Stress is applied on the mask plate by coating.

[0034] A supporting mask plate comprises at least one mask opening; the mask opening is formed according to the above-mentioned mask plate manufacturing method for reducing Mask deformation.

[0035] A support mask plate, the support mask plate comprising mask openings arranged in an array, the mask openings having position and / or shape compensation amounts with respective corresponding preset mask opening positions, the compensation amounts comprising at least one of the following:

[0036] The rotation compensation amount is configured as a rotation angle Z1 between two relative short sides of the mask opening and two relative short sides of the corresponding preset mask opening, and a rotation direction;

[0037] The warping compensation amount is configured as the arc Z2 of the warping of the two relatively long sides of the mask opening, and the warping direction;

[0038] The translation compensation amount is configured as the distance L between the reference point M of the entire mask opening and the reference point of the corresponding preset mask opening in the tension direction.

[0039] A mask plate comprises the supporting mask plate; the supporting mask plate is welded on a mask plate frame.

[0040] It should be noted that the compensation in the present application is an inventive point, which includes not only compensation for the opening position, but also compensation for the opening shape. When the opening position accuracy exceeds the set value, the mask opening is set to an arc-shaped mask opening. Of course, it can be simplified to a V-shaped mask opening, and further simplified to a parallelogram mask opening.

[0041] The present invention has the beneficial effects:

[0042] 1. After reducing the tension around the mesh during the stretching process, the warping of the mask frame is reduced while meeting the flatness requirements of the mask, and the possibility of changes in the overall verticality of the integrated support mask is reduced;

[0043] 2. Perform a net stretching experiment on the support mask plate to obtain the simulated displacement data of the net stretching, and calculate the offset of the mask opening after the support mask plate is stretched according to the simulated displacement data of the net stretching, and form a mask opening on the support mask plate according to the offset of the mask opening and the preset mask opening position, so that after the support mask plate is stretched by the net, the mask opening is located at the preset mask opening position. In the manufacturing process of the support mask plate, the embodiment of the present invention pre-compensates the offset of the mask opening during the net stretching process, so as to ensure the high position accuracy of the mask opening after the net stretching, and then ensure the high position accuracy of the pixels evaporated by the support mask plate, so as to avoid display abnormalities such as color spots and color deviation caused by reduced pixel accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] Figure 1 It is a schematic diagram of a standard support mask plate of the present invention;

[0045] Figure 2 It is a schematic diagram of the structure of the experimental support mask plate of the present invention;

[0046] Figure 3 It is a schematic diagram of reverse curve compensation of the present invention;

[0047] Figure 4 The structure of the compensation back support mask of the present invention

[0048] Figure 5 A schematic diagram of compensation of the upper right corner mask opening of the present invention;

[0049] Figure 6 A schematic diagram of compensation in a straight line form of the present invention;

[0050] Figure 7 A compensation schematic diagram in the form of a broken line of the present invention;

[0051] Figure 8 It is a schematic diagram of the compensation amount calculation process of the present invention; DETAILED DESCRIPTION

[0052] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments. The following description of at least one exemplary embodiment is actually only illustrative and is by no means intended to limit the present invention and its application or use. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0053] The relative arrangement of components and steps, the numerical expressions and numerical values ​​set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise.

[0054] At the same time, it should be understood that for the convenience of description, the sizes of the various parts shown in the drawings are not drawn according to the actual proportional relationship.

[0055] Additionally, descriptions of well-known structures, functions, and configurations may be omitted for clarity and conciseness.One of ordinary skill in the art will recognize that various changes and modifications may be made to the examples described herein without departing from the spirit and scope of the present disclosure.

[0056] Technologies, methods, and apparatus known to ordinary technicians in the relevant field may not be discussed in detail, but where appropriate, such technologies, methods, and apparatus should be considered part of the authorization specification.

[0057] In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limiting. Therefore, other examples of the exemplary embodiments may have different values.

[0058] Example 1

[0059] In the prior art, reference Figure 1 and Figure 2 , Figure 1 is a structural schematic diagram of a supporting mask plate in the prior art. Figure 2 This is a structural diagram of a web-stretching process in the prior art, refer to Figure 1 The support mask plate is provided with a plurality of mask openings for evaporation to form each sub-pixel. Figure 1The support mask plate shown is welded to the mask plate frame through the stretching process. For example, in the plane formed by the mutually perpendicular X and Y directions, the support mask plate is stretched and welded to the mask plate frame. However, when the support mask plate is stretched, the tension at the four corners is much greater than the tension at other positions. Therefore, the support mask plate causes a large deformation to the mask plate frame after welding, and the flatness and verticality of the mask plate frame deteriorate or have a tendency to deteriorate, so that the deformation of the mask plate frame of the subsequent precision metal mask plate is further increased after the stretching, resulting in a large offset in the pixel position accuracy and further deterioration in the flatness of the mask plate frame, thereby affecting the pixel position accuracy when evaporating the organic light-emitting material.

[0060] In order to solve the problem that the mask plate frame has a large deformation after the stretching process of the supporting mask plate, an embodiment of the present invention provides a method for manufacturing a supporting mask plate, comprising:

[0061] S0. Obtain the simulated displacement data of the mask opening of the experimental support mask plate when the stretching machine is stretched.

[0062] Specifically, obtaining the stretching simulation displacement data may include: forming an experimental support mask plate with a mask opening located at a preset mask opening position; stretching the experimental support mask plate to obtain the stretching simulation displacement data.

[0063] refer to Figure 1 , Figure 1 The support mask plate shown in FIG. 1 is the experimental support mask plate, and the mask opening on the experimental support mask plate is located at a preset mask opening position. The preset mask opening position is the mask opening position that is consistent with the position of the sub-pixel to be evaporated. For example, referring to Figure 1 If the shape of the mask openings is arranged in a matrix, then each mask opening is arranged in a matrix that is consistent with the size and position of the sub-pixels to be evaporated. By stretching the experimental support mask plate, the stretching simulation displacement data of each mask opening in the experimental support mask plate can be obtained. That is, this embodiment obtains the change in the position of the mask opening before and after the stretching by performing a stretching experiment on the experimental support mask plate.

[0064] S1. Calculate the offset of the mask opening of the experimental support mask plate according to the simulated displacement data of the tensioning network.

[0065] The simulated displacement data of the stretching of each mask opening refers to the displacement of each mask opening from the preset mask opening position after the experimental support mask plate is stretched, that is, the offset of the mask opening. For the non-experimental mask unit 1, after the stretching process, the offset of the mask opening at each position is similar to that of the experimental mask unit, so this embodiment calculates and obtains the offset of the mask opening at each position of the support mask plate by measuring the simulated displacement data of the stretching of the experimental support mask plate.

[0066] In this embodiment, each mask opening shrinks in the Y direction, and the offset of each mask opening can record the shrinkage of each mask opening in the Y direction. Of course, each mask opening also has a certain offset along the X direction, and the offset of each mask opening in the X direction can be obtained based on the simulated displacement data of the stretching of the experimental support mask plate.

[0067] In the prior art, when actually generating the required support mask plate, it is necessary to refer to the offset of the mask opening of the experimental support mask plate after the net stretching, as well as the preset mask opening position, to set the position of the generated mask opening, so that the mask opening of the support mask plate after the net stretching is located at the preset mask opening position. For example, in the above-mentioned X direction and Y direction, after a mask opening in the experimental support mask plate is stretched by the net, the offset is D(-5,4). If the preset opening position is P(m,n), in order to ensure that the position of the mask opening of the manufactured support mask plate is still at the preset opening position P after the net stretching, when manufacturing the support mask plate, the coordinates of the mask opening are set to P'(m+5,n-4). Then, after the mask opening is offset by an offset of D(-5,4), it just falls at the preset opening position P.

[0068] The manufacturing method of the support mask plate provided by the embodiment of the present invention performs a net stretching experiment on the support mask plate to obtain the net stretching simulation displacement data, and calculates the offset of the mask opening after the support mask plate is stretched according to the net stretching simulation displacement data, calculates the position accuracy of the mask opening, obtains the compensation amount corresponding to the mask opening according to the position accuracy and offset of the mask opening, and performs compensation processing on the preset mask opening position on the support mask plate according to the compensation amount of the mask opening to obtain the compensated mask opening position, and forms a mask opening on the support mask plate according to the compensated mask opening position, so that after the support mask plate is stretched by the net, the mask opening is located at the preset mask opening position. In the manufacturing process of the support mask plate of the embodiment of the present invention, the offset of the mask opening occurring during the net stretching process is pre-compensated, so that after the net stretching, the frame flatness is greatly improved compared with the prior art, and the mask opening has a high position accuracy, thereby ensuring the high position accuracy of the pixels evaporated by the support mask plate, and avoiding the display abnormality problems such as color spots and color deviation caused by the reduction of pixel accuracy.

[0069] Those skilled in the art will appreciate that calculating the offset of the mask opening of the supporting mask plate based on the simulated displacement data of the stretching mesh may include: selecting a plurality of mask opening test points on the experimental supporting mask plate; obtaining the offset of the plurality of mask opening test points based on the simulated displacement data of the stretching mesh of the experimental supporting mask plate; and obtaining the offset of the mask opening based on the offset of the plurality of mask opening test points.

[0070] Because it is impossible to directly obtain the tension network stretching simulation displacement data of all positions on the experimental support mask plate based on the tension network stretching simulation displacement image, it is necessary to select multiple mask openings as test points to obtain the offsets of multiple mask opening test points. Optionally, all mask openings on the support mask plate can be used as test points to obtain the offset of each mask opening. Alternatively, in order to speed up the test process, multiple representative mask openings can be selected as mask opening test points to obtain the offsets of the mask opening test points, and then the offsets of all mask openings on the experimental support mask plate can be inferred or calculated based on the offsets of the mask opening test points.

[0071] S2, calculating the position accuracy of the mask opening;

[0072] S3, obtaining a compensation amount corresponding to the mask opening according to the position accuracy and offset of the mask opening;

[0073] Preferably, different compensation methods are used for different position accuracies. For the deformation of the opening after the tension is reduced, a reverse compensation method is used to compensate the opening accuracy to the theoretical position. When the opening position accuracy exceeds a certain value, a reverse curve compensation method is used. When the opening position accuracy is less than a certain value, a simple position translation compensation method is used.

[0074] Specifically, for the opening in the upper right corner, as the position with the largest deformation variable, the opening is compensated by rotating to the upper right as a whole, the upper and lower positions of the opening are tilted upward in a small arc, and the left and right short sides are rotated clockwise; the compensation methods for the other openings at the four corners are the same as that for the upper right corner, and the compensation values ​​are symmetrical; for those that produce a certain amount of displacement, the changes in this area are taken into consideration when designing the compensation, and compensation for translation is made.

[0075] S4. According to the compensation amount of the mask opening, the preset mask opening position on the supporting mask plate is compensated to obtain a compensated mask opening position, and a mask opening is formed on the supporting mask plate according to the compensated mask opening position.

[0076] Specifically, the step S2 also includes a zoning process to divide the mask opening of the supporting mask plate into a central area and a non-central area, wherein the central area is the mask opening located within a preset central area of ​​the supporting mask plate, and the non-central area is the mask opening within a preset non-central area of ​​the supporting mask plate.

[0077] The central area is determined by performing multiple stretching tests on the supporting mask plate, and the position where the mask opening at the center of the opening area and the preset mask opening position have only a translational deformation amount is selected as the central area.

[0078] Specifically, step S3 includes the following steps:

[0079] Determining whether the mask opening belongs to the central area;

[0080] If yes, the translation compensation amount is directly calculated according to the offset of the mask opening;

[0081] If not, determining based on the position accuracy of the mask opening;

[0082] If the position accuracy is greater than a preset value, at least one of a rotation compensation amount, a warping compensation amount and a translation compensation amount is calculated according to the offset of the mask opening;

[0083] If the position accuracy is less than a preset value, the translation compensation amount is calculated according to the offset of the mask opening.

[0084] It should be noted that the translation compensation amount refers to the case of opening position compensation, while the rotation compensation amount and the warping compensation amount refer to the case of opening shape compensation.

[0085] In a specific embodiment, it is concluded through a limited number of experiments that the mask openings in the central area correspond to more situations of position compensation, so the mask openings in the central area are given a translation compensation amount, while the mask openings in the non-central area determine the situation of position compensation or shape compensation according to the position accuracy of the corresponding mask openings, so the mask openings in the non-central area are given a translation compensation amount or a rotation compensation amount, or a curling compensation amount.

[0086] Specifically, the mask opening is rectangular, and the compensation process is at least one of the following operations:

[0087] 1. According to the rotation compensation amount, the position of the mask opening preset on the supporting mask plate relative to the two short sides is rotated accordingly to obtain the rotated mask opening position;

[0088] Second: According to the warping compensation amount, the mask opening preset on the supporting mask plate is warped correspondingly relative to the positions of the two long sides to obtain the mask opening position after warping;

[0089] Third, according to the translation compensation amount, the mask opening preset on the supporting mask plate is correspondingly translated to obtain the position of the mask opening after the translation.

[0090] Specifically, the net stretching of the support mask plate is a net tension acting on each side of the support mask plate, wherein the tension values ​​at the four corners are much greater than those at other positions, wherein:

[0091] The operation of rotating based on the rotation compensation amount is: rotating relative to the two short sides at a rotation angle Z1 in the opposite direction of the corresponding offset.

[0092] The operation of warping based on the warping compensation amount is: warping with an arc Z2 toward the opposite direction of the corresponding offset relative to the two long sides;

[0093] The operation of warping based on the translation compensation amount is: the entire mask opening is translated along the opposite direction of the corresponding offset by a length L, that is, the entire mask opening is translated away from the center of the supporting mask plate.

[0094] like Figure 3 As shown, the longer the arrow is, the greater the tension value is. The tension distribution acting on the four sides of the supporting mask plate is that the tension value close to the four corners is greater than the tension value at the center of the corresponding side.

[0095] Specifically, the compensation amount satisfies:

[0096] The farther away from the central area, the larger the rotation angle Z1, the larger the arc Z2, and the larger the length L.

[0097] Specifically, the mask opening position after compensation is an arc-shaped opening;

[0098] Preferably, if the compensation processing includes multiple types, the preset mask opening will be compensated once in a specific order set, for example, the mask opening at the upper right corner of the supporting mask plate is first compensated for by translation, then by rotation, and finally by curling.

[0099] Those skilled in the art will appreciate that by performing a mesh stretching experiment on the support mask plate, simulated displacement data of the mesh stretching is obtained, and the offset of the mask opening after the support mask plate is stretched is calculated based on the simulated displacement data of the mesh stretching, thereby establishing a one-to-one correspondence list of offsets and compensation amounts. Specifically, the offset may be multi-dimensional data, such as an offset in a first direction and an offset in a second direction, thereby establishing a two-dimensional offset compensation table, and obtaining the compensation amount by a table lookup method when the offset is detected.

[0100] While improving the warpage of the frame mask, it is also necessary to consider improving the overall verticality of the mask;

[0101] In particular, for products with asymmetric openings, a larger pulling force is required on one side to stretch the opening to the theoretical position. In this case, compensation will be made for the asymmetry so that the pulling forces on the left and right sides are the same when the net is stretched, that is, the compensation amounts on the left and right sides are different. If the center point is to the left of the opening, the compensation value on the left side should be smaller than the compensation value on the right side, so that the opening can be stretched to the theoretical position under the same pulling force.

[0102] In particular, during the etching process of the sheet support mask, the sheet film support frame may deform regularly after being stressed due to process reasons. At this time, uniform deformation after being stressed can also be achieved through position and shape compensation:

[0103] Specifically, the compensation amount corresponding to the mask opening at the upper right corner of the supporting mask plate includes a rotation compensation amount and a warping compensation amount, and the compensation processing includes rotation and warping compensation processing.

[0104] In one embodiment, in case of simplified compensation, the curve compensation of the mask opening may be compensated in the form of a straight line.

[0105] In one embodiment, in the case of simplified compensation, the curve of the mask opening can be compensated in the form of a broken line. The specific method for making the V-shaped mask opening specifically includes the following steps:

[0106] Determining whether the mask opening belongs to the central area;

[0107] If yes, the translation compensation amount is directly calculated according to the offset of the mask opening;

[0108] If not, determining based on the position accuracy of the mask opening;

[0109] If the position accuracy is greater than a preset value, determining a first rotational translational compensation amount and a second rotational translational compensation amount according to the offset of the mask opening;

[0110] If the position accuracy is less than a preset value, the translation compensation amount is calculated according to the offset of the mask opening.

[0111] Specifically, the first rotational translation compensation amount includes a first rotational compensation amount and a first translational compensation amount, and the second rotational translational compensation amount includes a first rotational compensation amount and a first translational compensation amount, and the compensation specifically includes the following steps:

[0112] According to the first rotation compensation amount and the first translation compensation amount, the mask opening preset on the supporting mask plate is translated and rotated to obtain a first rotational translation opening position;

[0113] According to the second rotation compensation amount and the second translation compensation amount, the mask opening preset on the supporting mask plate is translated and rotated to obtain a second rotational and translational opening position;

[0114] Obtain two intersection points of the two side edges of the first rotational translation opening position and the second rotational translation opening position parallel to the stretching direction, take the intersection points as reference points, and determine the opening position to the left of the reference point of the first rotational translation opening position and the opening position to the right of the reference point of the second rotational translation opening position as the compensated mask opening positions.

[0115] In one embodiment, the step S3 specifically includes the following steps:

[0116] Making a determination based on the position accuracy of the mask opening;

[0117] If the position accuracy is greater than a preset value, deformation deviation data is calculated according to the offset of the mask opening, wherein the deformation deviation data includes first direction deviation data and second direction deviation data, wherein the first direction and the second direction are respectively the length direction and the width direction of the mask opening;

[0118] If the position accuracy is less than a preset value, the deformation deviation data in the translation direction is calculated according to the offset of the mask opening, and the translation direction is parallel to the stretching direction;

[0119] The compensation amount of the mask opening is determined according to the deformation deviation data.

[0120] Specifically, determining the compensation amount of each opening according to the deformation deviation data includes:

[0121] Partitioning the mask opening according to position accuracy and deformation deviation data of the mask opening in the first direction and the second direction;

[0122] For each of the openings in the same partition, the same position deviation compensation method is used to determine the position deviation compensation amount, and the same deformation compensation method is used to determine the compensation amount.

[0123] Preferably, flatness compensation is also included, specifically including at least one of the following methods:

[0124] Add dummy openings at the edge of the support mask plate;

[0125] A half-engraving method is used on the upper part of the support mask plate to thin some areas;

[0126] The lower part of the support mask plate is supported by Cover or Howling method;

[0127] Stress is applied on the mask plate by coating.

[0128] Preferably, the step S1 further includes symmetry determination, which specifically includes the following steps:

[0129] Acquiring an image of the support mask and determining the centroid of the image;

[0130] In the image of the support mask, determine a straight line passing through the centroid of the image, wherein the straight line is parallel to the length direction or the width direction;

[0131] Dividing the image into a first sub-image and a second sub-image using the straight line as a boundary;

[0132] Flipping the first sub-image to obtain a flipped first sub-image;

[0133] Determine whether the flipped first sub-image is similar to the second sub-image;

[0134] If they are not similar, then the offsets of all mask openings of the supporting mask plate are obtained, and compensation processing is performed on the corresponding mask openings according to the offsets;

[0135] If they are similar, the offset of the mask opening in the first sub-image is obtained, and compensation processing is performed on the corresponding mask opening group according to the offset. The mask opening group is two mask openings whose positions are symmetrical to each other in the first sub-image and the second sub-image.

[0136] Example 2

[0137] A supporting mask plate comprises a supporting mask plate;

[0138] The supporting mask plate includes at least one mask opening; the mask opening is formed according to the above-mentioned mask plate manufacturing method for reducing Mask deformation.

[0139] Example 3

[0140] A mask plate comprises a supporting mask plate; the supporting mask plate is welded on a mask plate frame.

[0141] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any form. According to the technical essence of the present invention, within the spirit and principles of the present invention, any simple modification, equivalent replacement and improvement made to the above embodiment still falls within the protection scope of the technical solution of the present invention.

Claims

1. A method for manufacturing a mask plate to reduce mask deformation, characterized in that: The specific steps include: S1. Obtaining the offset of at least part of the mask opening of the experimental support mask plate after the net stretching; the net stretching of the support mask plate is the net stretching force acting on each side of the support mask plate, wherein the tension value at the four corners is much greater than that at other positions; S2, calculating the position accuracy of the mask opening; S3, obtaining a compensation amount corresponding to the mask opening according to the position accuracy and offset of the mask opening, the mask opening compensation amount including opening position compensation and opening shape compensation, the translation compensation amount is the case of opening position compensation, and the rotation compensation amount and the warping compensation amount are the case of opening shape compensation; S4, compensating the preset mask opening position on the supporting mask plate according to the compensation amount of the mask opening to obtain a compensated mask opening position, and forming a mask opening on the supporting mask plate according to the compensated mask opening position; The step S2 also includes a partitioning process, where the mask opening of the supporting mask plate is divided into a central area and a non-central area, wherein the central area is the mask opening located within a central preset area of ​​the supporting mask plate, and the non-central area is the mask opening located within a non-central preset area of ​​the supporting mask plate; The central area is the position of the mask opening at the center of the opening area, which is only a translation deformation amount away from the preset mask opening position; The step S3 specifically comprises the following steps: Determining whether the mask opening belongs to the central area; If yes, the translation compensation amount is directly calculated according to the offset of the mask opening; If not, determining based on the position accuracy of the mask opening; If the position accuracy is greater than a preset value, at least one of a rotation compensation amount, a warping compensation amount and a translation compensation amount is calculated according to the offset of the mask opening; If the position accuracy is less than a preset value, the translation compensation amount is calculated according to the offset of the mask opening.

2. A method for manufacturing a mask plate for reducing mask deformation according to claim 1, characterized in that: The mask opening is rectangular, and the compensation process is at least one of the following operations: One: according to the rotation compensation amount, the position of the mask opening preset on the supporting mask plate relative to the two short sides is rotated accordingly to obtain the rotated mask opening position; Second: According to the warping compensation amount, the positions of the mask opening preset on the supporting mask plate relative to the two long sides are warped accordingly to obtain the mask opening position after warping; Third, according to the translation compensation amount, the mask opening preset on the supporting mask plate is correspondingly translated to obtain the position of the mask opening after the translation.

3. The method for manufacturing a mask plate for reducing mask deformation according to claim 2, characterized in that: The operation of rotating based on the rotation compensation amount is: rotating relative to the two short sides at a rotation angle Z1 in the opposite direction of the corresponding offset. The operation of warping based on the warping compensation amount is: warping with an arc Z2 toward the opposite direction of the corresponding offset relative to the two long sides; The operation of translation based on the translation compensation amount is: the entire mask opening is translated along the opposite direction of the corresponding offset by a length L, that is, the entire mask opening is translated away from the center of the supporting mask plate.

4. The method for manufacturing a mask plate for reducing mask deformation according to claim 3, characterized in that: The compensation amount satisfies: The farther away from the central area, the larger the rotation angle Z1, the longer the arc Z2, and the larger the length L.

5. The method for manufacturing a mask plate for reducing mask deformation according to claim 1, characterized in that: The compensated mask opening position is a V-shaped opening.

6. The method for manufacturing a mask plate for reducing mask deformation according to claim 1, characterized in that: It also includes flatness compensation, which specifically includes at least one of the following methods: Add dummy openings at the edge of the support mask plate; A half-engraving method is used on the upper part of the support mask plate to thin some areas; The lower part of the support mask plate is supported by Cover or Howling method; Stress is applied on the mask plate by coating.

7. A support mask plate, characterized in that: The supporting mask plate includes at least one mask opening; the mask opening is formed according to the mask plate manufacturing method for reducing mask deformation as claimed in claim 1.

8. The support mask plate according to claim 7, characterized in that: The supporting mask plate includes a rectangular mask opening, and the mask opening has a position and / or shape compensation amount with the corresponding preset mask opening position, and the compensation amount includes at least one of the following: The rotation compensation amount is configured as a rotation angle Z1 between two relative short sides of the mask opening and two relative short sides of the corresponding preset mask opening, and a rotation direction that tends to be opposite to the direction of the respective corresponding offset; The warping compensation amount is configured as an arc Z2 of the warping of the two relatively long sides of the mask opening, and a warping direction that tends to be opposite to the direction of the corresponding offset; The translation compensation amount is configured as the distance L between the reference point M of the entire mask opening and the reference point M' of the corresponding preset mask opening in the tension direction.

9. A mask plate, characterized in that: It comprises a plurality of supporting mask plates as claimed in claim 8; the supporting mask plates are welded on the mask plate frame.

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