Rack, plate assembly and ageing chamber apparatus comprising the same

Abstract

The present invention relates to an aging chamber apparatus including: a chamber assembly; a bracket detachably mounted to the chamber assembly; and one or more board assemblies supported by the bracket. Each of the board assemblies includes: a base providing a space in which electronic components are arranged in a predetermined arrangement direction; a board frame supporting the base; and a guide portion configured to guide flow of a fluid applied to the electronic components arranged on the base in a direction parallel to the arrangement direction, the guide portion being configured to rotate with respect to the base. The bracket includes a lifting unit pressing the guide portion upward or downward to rotate the guide portion.

Description

TECHNICAL FIELD

[0001] The present application relates to a rack, a board assembly, and an aging chamber apparatus including the same. BACKGROUND

[0002] An aging chamber apparatus is a device that supports testing of electronic components such as semiconductor devices manufactured through a predetermined manufacturing process and classifying the grades of the electronic components according to the test results. Such an aging chamber apparatus can test electronic components such as semiconductor devices by electrically connecting the electronic components to a tester.

[0003] Meanwhile, an aging test for reliability verification can be performed on electronic components that are rated as good after electrical inspection using a predetermined inspection apparatus. In such an aging test process, heat stress and electrical stress are applied to the electronic components to detect defects therein. The electronic components are loaded onto an aging board for the aging test process and are seated on the aging board for the test process. Further, after the test process is completed, the electronic components are unloaded from the aging board and are classified according to the test results.

[0004] An aging chamber apparatus can detect defects in electronic components by applying high-temperature air having the same temperature as the electronic components through an aging test.

[0005] However, since the electronic components in a conventional aging chamber apparatus are placed perpendicular to the direction of air flow, air flow in the aging chamber apparatus is resisted by the electronic components, and thus the electronic components generate vortex flow. Accordingly, the conventional aging chamber apparatus has a problem in that vortex flow is discontinuously generated in the air flow.

[0006] Another problem of the conventional aging chamber apparatus is that high-temperature air supplied is not fully applied to the electronic components. For example, when the high-temperature air flows toward the electronic components, it is dispersed in a direction deviated from the flow direction, and some of the air leaks out of the aging chamber apparatus. Accordingly, the amount of high-temperature air applied to the electronic components is insufficient to meet proper target test conditions.

[0007] If these target test conditions are not met when an aging test is performed on electronic components, accurate aging test results cannot be obtained. SUMMARY

[0008] In view of the above, the present application provides an aging chamber apparatus that allows high-temperature air supplied to electronic components to be sufficiently applied to the electronic components during an aging test.

[0009] According to a first embodiment of the present application, there is provided a rack including a support frame, a lifting unit configured to be movable up and down with respect to the support frame, and an extension unit that applies an upward restoring force to the lifting unit when the lifting unit moves downward.

[0010] According to a second embodiment of the present application, the present application provides a board assembly including a base providing a space in which electronic components are arranged in a predetermined arrangement direction, a board frame supporting the base, and a guide portion configured to guide a flow of a fluid applied to the electronic components arranged on the base in a direction parallel to the arrangement direction, one side of the guide portion being configured to be movable up and down with respect to the board frame, wherein the board frame has an avoidance space preventing the one side of the guide portion from interfering with the board frame when the one side of the guide portion moves up and down.

[0011] According to a third embodiment of the present application, the present application provides an aging chamber apparatus including a chamber assembly, a bracket detachably mounted to the chamber assembly, and one or more board assemblies supported by the bracket, wherein each of the board assemblies includes a base providing a space in which electronic components are arranged in a predetermined arrangement direction, a board frame supporting the base, and a guide portion configured to guide a flow of a fluid applied to the electronic components arranged on the base in a direction parallel to the arrangement direction, the guide portion being configured to be rotated with respect to the base, wherein the bracket includes a lifting unit pressing the guide portion upward or downward to rotate the guide portion.

[0012] The chamber assembly can include a chamber frame, a driving shaft including a first driving shaft disposed near an edge of the chamber frame and configured to be driven up and down or to be rotated around a rotation shaft extending in the up and down direction, and a catching portion connected to the first driving shaft, wherein the lifting unit has a catching support protrusion which is lowered by pressing of the catching portion and protrudes in a direction deviated from the arrangement direction and the up and down direction, one side of the guide portion is rotatably connected to the lifting unit, and when the first driving shaft is driven downward, the one side of the guide portion is lowered by pressure applied to the catching support protrusion.

[0013] The one side of the guide portion can be configured to be rotated with respect to a first rotation axis provided by the lifting unit and to extend in a direction perpendicular to the arrangement direction and the up and down direction, and the guide portion can be configured to be rotated around a second rotation axis disposed at the other side opposite to the one side and extending perpendicular to the arrangement direction and the up and down direction.

[0014] The other side of the guide portion can be configured to be moved up and down with respect to the base, and a distance by which the other side of the guide portion is lowered is less than a distance by which the one side of the guide portion is lowered.

[0015] The one side of the guide portion can rotate about the second rotation axis to approach the base portion as the first driving shaft descends, and rotate about the second rotation axis to move away from the base portion as the descending first driving shaft ascends.

[0016] The driving shafts can further include a second driving shaft configured to rotate about a rotation axis extending in the up-down direction, and the chamber assembly can further include a cradle holder connected to the second driving shaft and rotating with the second driving shaft, thereby placing the cradle in a detachable state in which the cradle can be detached from the chamber assembly or in a non-detachable state in which the cradle mounted to the chamber assembly is prevented from being detached from the chamber assembly.

[0017] The first driving shaft can be driven such that the capturing portion is directed toward a direction deviated from the arrangement direction when the cradle holder is in the detachable state, and directed toward a direction parallel to the arrangement direction when the cradle holder is in the non-detachable state.

[0018] The cradle can further include an extension unit that applies an upward restoring force to the lifting unit when the lifting unit moves downward.

[0019] The extension unit can include a support plate connected to an upper portion of the cradle, an elastic member having one end fixed to a front side of the support plate and the other end configured to be movable with respect to the support plate, and a wire connected to the other end of the elastic member, wherein the lifting unit has a wire support protrusion that supports the wire and protrudes in a direction deviated from the arrangement direction and the up-down direction, and the wire extends between the other end of the elastic member and the wire support protrusion.

[0020] The cradle can further include a support frame to support the plate assembly, and a roller rotatably connected to an upper side of the support frame to rotate about the support frame, wherein, when the roller is in contact with the wire, the roller guides movement of the wire as the wire moves.

[0021] Each of the plate assemblies can further include a gas guide plate that guides the flow of the fluid such that the fluid flows in the arrangement direction, wherein the gas guide plate is spaced apart from the base and extends in the arrangement direction, the gas guide plate includes a plurality of gas guide plates disposed on both sides of the base, wherein the plurality of gas guide plates includes a first gas guide plate disposed on one side of the base and a second gas guide plate disposed on the other side opposite to the one side of the base, and a vertical distance between a lower end of the first gas guide plate and the base is less than a vertical distance between a lower end of the second gas guide plate and the base.

[0022] The aging chamber apparatus can further include an air supply portion that generates the flow of the fluid in the arrangement direction, wherein the air supply portion includes an inlet air supply portion spaced apart from the bracket to introduce the fluid into the plate assembly in the arrangement direction toward the electronic component, and an outlet air supply portion disposed at a position spaced apart from the bracket to discharge the fluid out of the plate assembly in the arrangement direction.

[0023] The aging chamber apparatus according to the embodiment of the present application has an effect of allowing high-temperature air supplied to the electronic component to be sufficiently applied to the electronic component during an aging test.

[0024] The drawings simply illustrate

[0025] Figure 1 is a perspective view of an aging chamber apparatus in which a bracket according to an embodiment of the present application is detached from a chamber;

[0026] Figure 2 is a perspective view of the bracket mounted to the chamber;

[0027] Figure 3 is a partially exploded perspective view of the bracket and a plate assembly;

[0028] Figure 4 is a partial enlarged view showing one side of a guide portion before being lowered by a capturing portion;

[0029] Figure 5 is a partial enlarged view showing one side of the guide portion after being lowered by the capturing portion;

[0030] Figure 6 is a perspective view showing that a fluid flows in a direction parallel to an arrangement direction of an electronic component;

[0031] Figure 7 is a side view showing a plate assembly in which no electronic component is interposed;

[0032] Figure 8 is a side view showing the guide portion in which both sides have equal heights;

[0033] Figure 9 is a side view showing one side of the guide portion descending in response to Figure 7 the descent of the electronic element in FIG. 10;

[0034] is a side view showing one side of the guide portion descending in response to Figure 9 the descent of the electronic element in FIG. 10;

[0035] is a side view showing one side of the guide portion descending in response to

[0036] is a side view showing both sides of the guide portion having the same height;

[0037] is a side view showing both sides of the guide portion descending in response to

[0038] is a side view showing both sides of the guide portion descending in response to

[0039] is a side view showing both sides of the guide portion descending in response to DETAILED DESCRIPTION

[0040] Hereinafter, specific embodiments for implementing the technical idea of the present application will be described in detail with reference to the accompanying drawings.

[0041] In the description of the present application, detailed descriptions of known configurations or functions can be omitted to clarify the present application.

[0042] When an element is referred to as being "connected", "supported", "guided", "flowed", "inflowed", "outflowed", or "driven" to another element, it can be understood that the element can be directly connected, supported, guided, flowed, inflowed, outflowed, or driven to the other element, but another element can be present in between.

[0043] The terms used herein are only used to explain specific embodiments and not to limit the present application. Unless the context clearly indicates otherwise, singular expressions include plural expressions.

[0044] Terms including ordinal numbers such as first, second, etc. can be used to explain various elements, but the corresponding elements are not limited by the terms. The terms are used only to distinguish one element from another element.

[0045] It should be understood that terms such as "include" used in the present specification are intended to denote the presence of certain features, regions, integers, steps, operations, elements, combinations and / or combinations of the application, but do not exclude the presence or addition of other features, regions, integers, steps, operations, elements, combinations and / or combinations.

[0046] The upper, upper surface and the like used herein are described based on the illustration in the drawing, and it should be noted that they can be replaced by other expressions when the direction of the object changes. The arrangement direction used herein can refer to the longitudinal direction.

[0047] In the following description, one side of the guide portion can be referred to as the rear guide portion, and the other side of the guide portion can be referred to as the front guide portion. In addition, the vertical distance between the front guide portion and the base portion 500 can be referred to as the first distance h1, and the vertical distance between the rear guide portion and the base portion 500 can be referred to as the second distance h2.

[0048] In the following description, the specific structure of the aging chamber apparatus 1 according to the embodiment of the present application will be described with reference to the accompanying drawings.

[0049] In the following description, reference is made to Figure 1 and Figure 2 The aging chamber apparatus 1 according to the embodiment of the present application can be used for aging test of electronic components. The aging test described herein is a test in which electronic components D are not used under normal operating conditions that allow their expected life to be achieved by normal use, but are operated under high temperature conditions to detect early defects that can occur during use by the operator. The aging chamber apparatus 1 can include a support 10, a blowing portion 20, a plate assembly 30, a driving module 40, a chamber assembly 50, and a controller 60.

[0050] Further reference is made to Figures 3 to 6 For example, the electronic component D can be a solid state drive (SSD) having a certain thickness and a certain width. The thickness of the electronic component D is defined as the length of the electronic component D extending in the left-right direction. Likewise, the width of the electronic component D is defined as the length of the electronic component D extending in the front-rear direction. The width of the electronic component D can be greater than the thickness of the electronic component D. The electronic component D can have a plate shape, in which the area of the front-rear surface is narrower than the area of the left-right side surface.

[0051] The bracket 10 can support one or more plate assemblies 30. The bracket 10 can be detachably mounted to the chamber assembly 50. For example, the bracket 10 can be moved rearward and mounted to the chamber assembly 50, or the bracket 10 mounted on the chamber assembly 50 can be moved forward with respect to the chamber assembly 50 to be detached from the chamber assembly 50. Also, the bracket 10 can include a plurality of brackets 10. The plurality of brackets 10 can be arranged vertically. Also, the plurality of brackets 10 can be individually mounted to or detached from the chamber assembly 50. The bracket 10 can include a support frame 100, a lifting unit 200, a roller 300, and an extension unit 400.

[0052] The support frame 100 can support the plate assembly 30, the lifting unit 200, the roller 300, and the extension unit 400. The support frame 100 can include a horizontal support frame 110 and a vertical support frame 120. The horizontal support frame 110 can be a frame extending horizontally. For example, the horizontal support frame 110 can be a plurality of frames extending in the front-rear direction and the left-right direction. The horizontal support frame 110 can be connected to the upper end and the lower end of the vertical support frame 120.

[0053] The vertical support frame 120 can be a frame extending in the up-down direction. The vertical support frame 120 can be a plurality of frames extending in the up-down direction from points intersecting the respective corners of the horizontal support frame 110. The vertical support frame 120 can include a guide rail extending in the up-down direction to guide the lifting unit 200 to be lifted.

[0054] Referring again to Figure 4 and Figure 5 , the lifting unit 200 can move in the up-down direction. For example, the lifting unit 200 can move vertically along the guide rail. The lifting unit 200 can selectively apply a pressure to a guide portion 600 described below. The guide portion 600 can be rotated about a base portion 500 described below by the lifting unit 200. A plurality of lifting units 200 can be provided. For example, the plurality of lifting units 200 can be placed close to the left and right sides of the plate assembly 30. The lifting unit 200 can have a wire support protrusion 200a and a catch support protrusion 200b.

[0055] The wire support protrusion 200a can support the wire 420 described below. The wire support protrusion 200a can have a wire groove in which the wire 420 is caught. The wire groove can be an annular groove having a central axis extending in the front-rear direction. The wire support protrusion 200a can have a shape protruding toward the plate assembly 30. For example, the wire support protrusion 200a of the lifting unit 200 placed adjacent to the right side of the plate assembly 30 can protrude to the left. Likewise, the wire support protrusion 200a of the lifting unit 200 placed adjacent to the left side of the plate assembly 30 can protrude to the right.

[0056] The capture support protrusion 200b can selectively support the capture portion 53. The capture support protrusion 200b can support the capture portion 53 while in contact with it. In other words, when the capture support protrusion 200b is not in contact with the capture portion 53, the capture portion 53 may not be supported by the capture support protrusion 200b. The capture support protrusion 200b can protrude toward the plate assembly 30. For example, the capture support protrusion 200b of the lifting unit 200 placed adjacent to the right side of the plate assembly 30 can protrude to the left. Similarly, the capture support protrusion 200b of the lifting unit 200 placed adjacent to the left side of the plate assembly 30 can protrude to the right.

[0057] As the wire 420 moves, the roller 300 can reduce the frictional force applied to the wire 420. The roller 300 can guide the movement of the wire 420 while in contact with it. The roller 300 can be configured to rotate while in contact with the wire 420. For example, the roller 300 can have a roller groove 300a in which the wire 420 is contained, and the roller 300 can rotate while the wire 420 is in contact with the roller groove 300a. The roller groove 300a can be an annular groove with a central axis extending in the left-right direction. The central axis of the roller groove 300a and the central axis of the wire groove can extend in different directions to offset them from each other. The roller 300 can rotate about a rotation axis extending in the left-right direction. The roller 300 can be connected to a horizontal support frame 110. The roller 300 can include multiple rollers 300. The multiple rollers 300 can be configured to be spaced apart from each other in the left-right direction. For example, multiple rollers 300 can be connected between the rear horizontal support frame 110 extending in the left-right direction and the left horizontal support frame 110 extending in the front-back direction, and between the rear horizontal support frame 110 extending in the left-right direction and the right horizontal support frame 110 extending in the front-back direction.

[0058] The extension unit 400 can extend or retract as the lifting unit 200 rises or falls. For example, the extension unit 400 can extend as the lifting unit 200 falls. Therefore, the extension unit 400 can provide an upward restoring force to the lifting unit 200. Furthermore, the extension unit 400 can retract as the lifting unit 200 rises. Therefore, the extension unit 400 can provide an upward restoring force to the lifting unit 200. The extension unit 400 may include an elastic element 410, a guide wire 420, and a support plate 430.

[0059] The elastic member 410 can provide a restoring force to the lead wire 420. For example, when the lead wire 420 moves away from the elastic member 410, the elastic member 410 can provide a restoring force to the lead wire 420, thereby being closer to the elastic member 410. An example of the elastic member 410 can be a compression coil spring. One end of the elastic member 410 can be fixed to the front of the support plate 430, and the other end thereof can move with respect to the support plate 430. In other words, one end of the elastic member 410 can be a fixed end, and the other end of the elastic member 410 can be a free end, which moves without being restricted. The lead wire 420 can be connected to the other end of the elastic member 410. For example, a plurality of holes for supporting the two lead wires 420 can be formed in the other end of the elastic member 410. The elastic member 410 can extend in the front-rear direction.

[0060] The lead wire 420 can extend between the other end of the elastic member 410 and the lead wire support protrusion 200a. For example, the lead wire 420 can apply a rearward pressure to the other end of the elastic member 410 and an upward pressure to the lead wire support protrusion 200a, while being pulled tight between the other end of the elastic member 410 and the lead wire support protrusion 200a. The lead wire 420 can be inserted into the roller groove 300a and move while being in contact with the roller 300.

[0061] The support plate 430 can fix and support one end of the elastic member 410. The support plate 430 can be supported by the horizontal support frames 110 disposed on the upper side of the plurality of horizontal support frames 110. The support plate 430 can have a plate shape extending in the horizontal direction.

[0062] Referring again to Figure 2 , the air supply part 20 can supply or discharge fluid to or from one or more plate assemblies 30. The air supply part 20 can flow fluid from the front to the rear. The fluid moved by the air supply part 20 can be perpendicular to the front and rear surfaces of the electronic component D. In other words, the fluid moved by the air supply part 20 can be guided from the front to the rear, while being perpendicular to an imaginary straight line extending in the left-right direction between the left and right side surfaces of the plate assembly 30. In addition, the fluid moved by the air supply part 20 can be perpendicular to the direction in which the bracket 10 is accommodated in the chamber frame 51. The air supply part 20 can include an inlet air supply part 20a and an outlet air supply part 20b, which are disposed at the front and rear sides, respectively, while being spaced apart from the bracket 10 by a predetermined distance.

[0063] The inlet air supply part 20a can introduce fluid to the board assembly 30 in a direction in which the electronic components D are arranged. For example, the inlet air supply part 20a can be spaced apart from the bracket 10 at a front of the bracket 10. The outlet air supply part 20b can cause fluid to flow out of the board assembly 30 in the arrangement direction. For example, the outlet air supply part 20b can be spaced apart from the bracket 10 at a back of the bracket 10. The inlet air supply part 20a and the outlet air supply part 20b can be configured in the same manner or in different manners. For example, the inlet air supply part 20a and the outlet air supply part 20b can each include an air blower, an air blower bracket, and a duct.

[0064] The air blower can cause fluid to flow from front to back. The air blower can include a plurality of air blowers. For example, the plurality of air blowers can be disposed in the up-down direction. However, the idea of the present application is not necessarily limited thereto, and the air blower can be disposed above the plurality of board assemblies 30. In addition, the air blower can be disposed above the plurality of board assemblies 30 and supply fluid to the duct.

[0065] The air blower bracket can support the plurality of air blowers. The air blower bracket can extend in the up-down direction. The plurality of air blowers can be fixedly disposed in the air blower bracket. The duct can suction fluid from the air blower and supply the fluid to the plurality of board assemblies 30. The duct can provide a flow path through which fluid supplied from the air blower flows to the board assembly 30. In other words, the duct can guide fluid supplied from the air blower to be supplied to the board assembly 30.

[0066] The board assembly 30 can provide a space in which the plurality of electronic components D are seated, and can fix and support the seated electronic components D. In addition, the board assembly 30 can move while supporting the plurality of electronic components D. The board assembly 30 can include a base 500, a guide 600, a board frame 700, hinge parts 810 and 820, and a gas guide plate 900.

[0067] The base 500 can provide a part in which the electronic components D are seated. The plurality of electronic components D can be arranged in a grid pattern horizontally on the base 500. For example, the plurality of electronic components D can be disposed on the base 500 such that their front and back surfaces face left and right. In other words, fluid suctioned into the board assembly 30 can flow in parallel to the front and back surfaces of the electronic components D. The base 500 can include a plurality of sockets 510 and a base plate 520 that supports the plurality of sockets 510.

[0068] The socket 510 can be configured in such a manner that the electronic component D is inserted in a vertical direction (i.e., in an upright position). In other words, the electronic component D can be inserted into the socket 510 in a direction in which the electronic component D extends relatively long (the up-down direction described in the present application). In addition, a plurality of sockets 510 can be provided to seat the plurality of electronic components D therein. The plurality of sockets 510 can be arranged in a grid pattern in the front-back direction and the left-right direction.

[0069] Further reference Figure 7 Among the plurality of sockets 510, the electronic components D can not be disposed in at least some sockets 510 arranged in the center between the front side and the rear side of the plurality of sockets 510. In other words, the electronic components D can not be disposed in one or more rows of sockets 510 arranged in the center of the plurality of sockets 510 in the left-right direction. The state in which the electronic components D are not disposed can be confirmed by the perforations 900a described below. For example, the disposition state of the electronic components D can be confirmed by the perforations 900a with the naked eye of the operator, or can be detected by the height sensor described below. In this way, the disposition state of the electronic components D can be confirmed by the perforations 900a. When the electronic components D are not disposed in one or more rows of sockets 510 arranged in the center of the plurality of sockets 510 in the left-right direction, it is possible to prevent the generation of eddy currents due to the interruption of fluid flow in the fluid flow space S, or the temperature non-uniformity of the fluid when the fluid stagnates in the fluid flow space S.

[0070] The substrate 520 can be a PCB substrate that allows the plurality of electronic components D disposed in the sockets 510 to be electrically connected to each other. The plurality of sockets 510 can be disposed on the upper surface of the substrate 520. The substrate 520 can extend in the front-rear direction and the left-right direction.

[0071] Further reference Figures 8 to 1 1, The guide portion 600 can guide the movement of the fluid within the fluid movement space S. The fluid movement space S can be a space between the base portion 500 and the guide portion 600. The guide portion 600 can guide the movement of the fluid in the upper side of each plate assembly 30. The guide portion 600 can extend in the front-rear direction and the left-right direction. For example, the guide portion 600 can be formed of a member having a shape overlapping the plurality of sockets 510 disposed in the base portion 500 when protruding downward toward the base portion 500 adjacent to the lower side.

[0072] The guide portion 600 can be spaced upward from the base portion 500. The guide portion 600 can be configured to be raised or lowered by the driving module 40. The guide portion 600 can be configured such that the first distance h1 is equal to or different from the second distance h2. For example, at least one of the front guide portion 610 and the second guide portion 620 can be raised or lowered such that the first distance h1 is equal to or different from the second distance h2.

[0073] In addition, the guide portion 600 can be connected by a predetermined rotation axis to rotate around the predetermined rotation axis such that the first distance h1 is equal to or different from the second distance h2. For example, the guide portion 600 can be configured to rotate around the predetermined rotation axis with respect to the bracket 10 such that the first distance h1 is equal to or different from the second distance h2.

[0074] The guide portion 600 can be supported by the stand 10. The guide portion 600 can be rotatably connected to the stand 10. For example, the front guide portion 610 can be connected to the front side of the stand 10 to rotate with respect to the stand 10 about a predetermined rotation axis. For example, the guide portion 600 can rotate about a predetermined rotation axis such that one side of the guide portion 600 is away from or close to the base 500. Here, the predetermined rotation axis extends in the left-right direction, and can be provided in the front guide portion 610 or the rear guide portion 620. For example, the predetermined rotation axis can be included in the front hinge portion 810 connected to the front guide portion 610 or the rear hinge portion 820 connected to the rear guide portion 620.

[0075] The guide portion 600 can include the front guide portion 610 and the rear guide portion 620. In other words, the front guide portion 610 refers to the front side (the other side) of the guide portion 600, and the rear guide portion 620 refers to the rear side (one side) of the guide portion 600.

[0076] The front guide portion 610 can be disposed to be spaced apart from the upper surface of the base 500 by a predetermined distance. The front guide portion 610 can include a hinge catching portion that can be caught on the rotation axis of the front hinge portion 810. The hinge catching portion can protrude forward from the left and right sides of the front guide portion 610. In addition, the hinge catching portion can have the shape of a hook that can be caught on the rotation axis of the front hinge portion 810. The front guide portion 610 can be connected to the upper side and the front side of one of the stand 10, the chamber assembly 50, and the plate frame 700 through the front hinge portion 810.

[0077] The rear guide portion 620 can guide the movement of the fluid flowing out of the fluid moving space S. In addition, the rear guide portion 620 can be raised or lowered by the driving module 40. The rear guide portion 620 can move in the up-down direction. For example, when the catching support protrusion 200b is pressed downward, the rear guide portion 620 can be lowered. In addition, when the pressure applied to the catching support protrusion 200b is released, the rear guide portion 620 can be raised. The rear guide portion 620 can be rotatably connected to the lifting unit 200. For example, the rear guide portion 620 can be configured to rotate about a rotation axis provided by the lifting unit 200.

[0078] The rear guide portion 620 can be configured to rotate about the rotation axis of the rear hinge portion 820. For example, when the catching support protrusion 200b is pressed downward, the rear guide portion 620 can rotate about the rotation axis of the rear hinge portion 820 to be closer to the base 500. In addition, when the pressure applied to the catching support protrusion 200b is released, the rear guide portion 600 can rotate about the rotation axis of the rear hinge portion 820 to be away from the base 500. The rotation axis provided by the lifting unit 200 can be, for example, an imaginary straight line extending in the left-right direction perpendicular to the up-down direction and the front-rear direction.

[0079] If no external force is applied to the rear guide portion 620, the rear guide portion 620 can be supported by the guide wire 420 to be disposed at the upper side and the rear side of the plate assembly 30. The rear guide portion 620 can have a shape in which a portion thereof (e.g., left and right sides) further extends rearward.

[0080] The second distance h2 for the rear guide portion 620 can be adjusted to the height of the electronic component D. For example, in the case where the electronic component D is replaced with an electronic component D having a shorter height, the rear guide portion 620 can be lowered so that the guide portion 600 is spaced apart from the top of the electronic component D by a predetermined distance. For another example, when the electronic component D is replaced with an electronic component D having a higher height, the rear guide portion 620 can be raised so that the guide portion 600 is spaced apart from the top of the electronic component D by a predetermined distance.

[0081] However, the idea of the present application is not necessarily limited thereto, and further with reference to FIGS. 12 to 15, the front guide portion 610 can be configured to be raised or lowered. For example, at least one of the front guide portion 610 and the rear guide portion 620 can be raised or lowered to adjust the distance between the first distance h1 and the second distance h2. In this case, the front guide portion 610 can be raised or lowered while being in contact with the auxiliary capturing portion 54. In addition, the front guide portion 610 can be raised or lowered by the rotation of the guide portion 600.

[0082] The plate frame 700 can support the base 500. Also, the plate frame 700 can be connected to the upper surface of the base 500. The plate frame 700 can include a horizontal plate frame 710 and a vertical plate frame 720.

[0083] The horizontal plate frame 710 can protect the electronic component D arranged on the base 500 from the outside of the plate assembly 30. The horizontal plate frame 710 can extend horizontally along the edges of the base 500. For example, the horizontal plate frame 710 can extend in the front-rear direction and the left-right direction. Also, the horizontal plate frame 710 can be connected to the vertical plate frame 720. The horizontal plate frame 710 can include a lower horizontal plate frame and an upper horizontal plate frame.

[0084] The vertical plate frame 720 can protect the electronic components D arranged on the base 500 from external influences of the plate assembly 30. The vertical plate frame 720 can extend in the up-and-down direction from the upper surface of the base 500 toward the horizontal plate frame 710. A plurality of vertical plate frames 720 can be provided. The vertical plate frames 720 can be spaced apart to correspond to the left-and-right length of the rear guide portion 620 of the rear side. For example, a plurality of vertical plate frames 720 can be arranged spaced apart in the left-and-right direction on the rear side of the base 500. More specifically, two vertical plate frames 720 can be provided on the left side of the rear of the base 500, and another two vertical plate frames 720 can be provided on the right side of the rear of the base 500. The lower ends of the two vertical plate frames 720 located on the left side of the rear of the base 500 can be connected to the horizontal plate frame 710, and the upper ends thereof can be open upward. Also, the lower ends of the two vertical plate frames 720 provided in the vertical plate frames 720 on the right side of the rear of the base 500 can be connected to the lower horizontal plate frame 710, and the upper ends thereof can be open upward. Also, the upper ends of the vertical plate frames 720 provided on the opposite left side of the two vertical plate frames 720 provided on the right side of the rear of the base 500 can be connected to the upper horizontal plate frame 710, and the upper ends of the vertical plate frames 720 provided on the opposite right side of the two vertical plate frames 720 provided on the left side of the rear of the base 500 can be connected to the upper horizontal plate frame 710.

[0085] One or more avoidance spaces 700a can be formed between the vertical plate frame 720 and the lower horizontal plate frame 710. The avoidance spaces 700a can prevent interference of the guide portion 600 with the plate frame 700 when the rear guide portion 620 is raised or lowered. For example, the rear guide portion 620 can have a shape in which the left-and-right end portions thereof are further extended rearward. The width of the left-and-right end portions of the rear guide portion 620 can be smaller than the length of the lower horizontal plate frame 710.

[0086] Accordingly, even if an unpredictable force is applied from the outside in a state in which a vertically long electronic component is seated in the socket 510, is erected by the plate frame 700, and is transferred from a handler (a pick-and-place machine) or is transferred from the outside by a cart, the electronic component can be protected from damage and maintained in a stable support state.

[0087] The front hinge portion 810 can provide a predetermined rotation axis for the guide portion 600. For example, the front hinge portion 810 can be provided adjacent to the front guide portion 610 and provide a rotation axis for the guide portion 600. Also, the front hinge portion 810 can be configured to be raised or lowered together with the front guide portion 610 by the driving module 40. Also, the front hinge portion 810 can be provided to the front guide portion 610 or the rear guide portion 620. For example, in a case in which the front hinge portion 810 is provided to the front guide portion 610 and is connected to the front portion of the bracket 10, the guide portion 600 can be rotated about the front portion of the bracket 10.

[0088] For example, in a case where the front hinge part 810 is disposed to the rear guide part 620 and connected to the rear of the bracket 10, the guide part 600 can rotate with respect to the rear of the bracket 10. Preferably, the front hinge part 810 can be disposed to the front guide part 610.

[0089] The air guide plate 900 can prevent fluid entering the plate assembly 30 from leaking in the left-right direction. In other words, the air guide plate 900 can provide a fluid movement path through which most of the fluid from the front of the plate assembly 30 flows out to the rear of the plate assembly 30. In addition, the air guide plate 900 and the plate frame 700 can provide an open portion O. The air guide plate 900 can include a first air guide plate 910 and a second air guide plate 920.

[0090] The first air guide plate 910 can be disposed at one side of the base 500. An upper end of the first air guide plate 910 can be vertically spaced apart from the plate frame 700. A lower end of the first air guide plate 910 can be disposed close to an upper surface of the base 500.

[0091] In addition, the first air guide plate 910 and the second air guide plate 920 can have different areas when viewed from the left side or the right side. For example, a distance between the upper end of the first air guide plate 910 and the base 500 can be equal to a distance between the upper end of the second air guide plate 920 and the base 500. In addition, a distance between the lower end of the first air guide plate 910 and the base 500 can be less than a distance between the lower end of the second air guide plate 920 and the base 500. In other words, a height of the lower end of the first air guide plate 910 can be less than a height of the lower end of the second air guide plate 920. In addition, the first air guide plate 910 can be disposed such that the lower end thereof is not spaced apart from the base 500.

[0092] The second air guide plate 920 can be disposed at the other side of the base 500. For example, the second air guide plate 920 can be disposed at an opposite side of the first air guide plate 910. The second air guide plate 920 can be disposed to face the first air guide plate 910. The second air guide plate 920 can be spaced upward from the substrate terminal to prevent a short circuit from occurring at the substrate terminal included in the base 500.

[0093] A length of the first air guide plate 910 extending in the up-down direction can be longer than a length of the second air guide plate 920 extending in the up-down direction. In addition, a height of the upper end of the first air guide plate 910 can be the same as a height of the upper end of the second air guide plate 920. For example, a spaced distance between the upper end of the first air guide plate 910 and the horizontal plate frame 710 can be the same as a spaced distance between the upper end of the second air guide plate 920 and the horizontal plate frame 710.

[0094] The opening portion O can include a first opening portion O1 and a second opening portion O2. The first opening portion O1 can be disposed between the upper end of the first air guide plate 910 and the plate frame 700. The first opening portion O1 can prevent fluid supplied from front to back from accumulating in the fluid moving space S. More specifically, the first opening portion O1 can prevent vortex or backflow of fluid from occurring due to fluid stagnation in the fluid flow space S.

[0095] The second opening portion O2 can be disposed between the lower end of the first air guide plate 910 and the base 500. The substrate terminal can be exposed through the second opening portion O2. In addition, the second opening portion O2 can have a predetermined height to prevent the air guide plate 900 from contacting the substrate terminal or the semiconductor device disposed around the substrate terminal.

[0096] In addition, the air guide plate 900 can have a plurality of perforations 900a spaced apart from each other in the front-rear direction. Through the perforations 900a, an operator can check the state of the plurality of electronic components D seated on the base 500. The plurality of perforations 900a can be disposed in a row in the front-rear direction. The plurality of perforations 900a disposed in a row can have a height lower than the upper end of the electronic component D. In other words, even if the height of the electronic component D is lowered, the operator can check the state of the electronic component D through the perforations 900a.

[0097] The plurality of perforations 900a can be disposed in a plurality of rows. For example, the plurality of perforations 900a can be spaced apart from each other in the up-down direction and the front-rear direction. For example, through the perforations 900a formed in the up-down direction, an operator can check the arrangement state of the electronic components D having different heights. In addition, through the perforations 900a formed in the front-rear direction, an operator can check whether the electronic components D are tilted in the front-rear direction (whether they are improperly seated).

[0098] For another example, a defect detection sensor (not shown) disposed in the chamber assembly 50 can detect whether the electronic components D are tilted in the front-rear direction (whether they are improperly seated) through the perforations 900a.

[0099] For another example, the chamber assembly 50 can further include a height sensor for measuring the height of the electronic components D. The height of the electronic components D can be defined as the distance between the upper end of the electronic components D seated on the base 500 and the base 500.

[0100] A plurality of plate assemblies 30 can be provided. The plurality of plate assemblies 30 can be disposed in the up-down direction. The plurality of plate assemblies 30 can be fixedly supported by being coupled to the stand 10. The plate assembly 30 can include a first plate assembly 31 and a second plate assembly 32.

[0101] The first plate assembly 31 can be disposed above the second plate assembly 32. Also, the guide portion 600 of the second plate assembly 32 can be disposed below the base portion 500 of the first plate assembly 31. In other words, the first plate assembly 31 and the second plate assembly 32 can be spaced apart from each other in the up-down direction. The guide portion 600 of the second plate assembly 32 can be configured to rotate about the base portion 500 of the first plate assembly 31. Also, the front guide portion 610 of the second plate assembly 32 can be disposed between the bottom of the first plate assembly 31 and the top of the second plate assembly 32.

[0102] The driving module 40 can drive the air supply portion 20. Also, the driving module 40 can drive the driving shaft 52 described below. The driving module 40 can include a lifting driver 41 and a rotation driver 42. The lifting driver 41 can move the driving shaft 52 in the up-down direction. For example, the lifting driver 41 can move the first driving shaft 52-1 included in the driving shaft 52 in the up-down direction. Also, the lifting driver 41 can move the auxiliary driving shaft 55 described below up and down. An example of the lifting driver 41 can be a brake.

[0103] The rotation driver 42 can include a first rotation driver 42-1 that can rotate the second driving shaft 52-2 included in the driving shaft 52 about a rotation shaft extending in the up-down direction, and a second driver 42-2 that can rotate the first driving shaft 52-1 about a rotation shaft extending in the up-down direction.

[0104] The chamber assembly 50 can provide an accommodation space for accommodating the cradle 10. The cradle 10 can be selectively detached from the accommodation space of the chamber assembly 50. For example, the cradle 10 can be manually or automatically held in or detached from the accommodation space provided by the chamber frame 51. The chamber assembly 50 can include a chamber frame 51, a driving shaft 52, a capturing portion 53, an auxiliary capturing portion 54, an auxiliary driving shaft 55, and a cradle holder 56.

[0105] The chamber frame 51 can support the driving shaft 52, the capturing portion 53, the auxiliary capturing portion 54, and the auxiliary driving shaft 55. The chamber frame 51 can support the cradle 10 held in the accommodation space. The chamber frame 51 can have a chamber roller that allows the cradle 10 to slide into and be held in the accommodation space. By the chamber roller, the frictional force applied to the cradle 10 when the cradle 10 is accommodated in the accommodation space can be reduced.

[0106] The driving shaft 52 can include a first driving shaft 52-1 and a second driving shaft 52-2. The first driving shaft 52-1 can be driven in the up-down direction or rotated about a rotation shaft extending in the up-down direction. The first driving shaft 52-1 can be connected to the chamber frame 51 to be close to the edge of the chamber frame 51.

[0107] The second driving shaft 52-2 can be driven to rotate about a rotation axis extending in the up-down direction. The second driving shaft 52-2 can be connected to the chamber frame 51 to be close to the edge of the chamber frame 51. The second driving shaft 52-2 can be spaced apart from the first driving shaft 52-1 in the front-rear direction.

[0108] The capturing portion 53 can be connected to the first driving shaft 52-1 and move together with the first driving shaft 52-1. For example, when the first driving shaft 52-1 is driven in the up-down direction, the capturing portion 53 can move together with the first driving shaft 52-1 in the up-down direction. The capturing portion 53 can apply a downward pressure to the capturing support protrusion 200b by moving downward, or can release the pressure on the capturing support protrusion 200b by moving upward. When the first driving shaft 52-1 is driven to rotate, the capturing portion 53 can rotate together with the first driving shaft 52-1. For example, when the bracket holder 56 is in the detachable state, the first driving shaft 52-1 can be driven to rotate so that the capturing portion 53 faces a direction deviated from the front-rear direction. Also, when the bracket holder 56 is in the anti-detachable state, the first driving shaft 52-1 can be driven to rotate so that the capturing portion 53 faces a direction parallel to the front-rear direction.

[0109] The detachable state can refer to a state in which the bracket 10 is detachable from the chamber assembly 50. The anti-detachable state can refer to a state in which the bracket 10 is prevented from being detached from the chamber assembly 50 by an external force or vibration applied to the aging chamber apparatus 1 when the bracket 10 is mounted to the chamber assembly 50.

[0110] Even though not illustrated, a plurality of capturing portions 53 can be provided. The plurality of capturing portions 53 can be arranged to be spaced apart from each other in the up-down direction, and the number thereof can correspond to the number of the capturing support protrusions 200b.

[0111] The auxiliary capturing portion 54 can be connected to the auxiliary driving shaft 55 and move together with the auxiliary driving shaft 55. For example, when the auxiliary driving shaft 55 is driven in the up-down direction, the auxiliary capturing portion 54 can move together with the auxiliary driving shaft 55 in the up-down direction. The auxiliary capturing portion 54 can apply a downward pressure to the front guide portion 610 by moving downward, and release the pressure on the front guide portion 610 by moving upward.

[0112] The rack holder 56 can be connected to the second driving shaft 52-2 and rotate together with the second driving shaft 52-2. When the rack 10 is mounted to the chamber assembly 50, the rack holder 56 can be put in a tamper-proof state by rotating to a position adjacent to one side of the rack 10. Also, before the rack 10 is mounted to the chamber assembly 50 or when the rack 10 is detached from the chamber assembly 50, the rack holder 56 can be put in a detachable state by rotating away from the rack 10. The rack holder 56 can be provided at the left or right side of the chamber frame 51. A plurality of rack holders 56 can be provided. For example, a plurality of rack holders 56 can be provided at the left or right side of the chamber frame 51 while being spaced apart from each other in the front-rear direction. The rack holder 56 can be a connector that connects the terminals of a plurality of board assemblies 30 to the connection sockets of the chamber assembly 50 at the same time.

[0113] The controller 60 can control the lifting driver 41, the first rotation driver 42-1, and the second rotation driver 42-2. Also, the controller 60 can determine whether to perform the burn-in test based on the detection result of the defect detection sensor. For example, when the defect detection sensor detects that the electronic component D is improperly seated, the controller 60 can interrupt the operation of the driving module 40. Also, the controller 60 can control the driving module 40 to adjust the rotation angle of the guide portion 600 based on the detection result of the height sensor. The controller 60 can be implemented by a computing device including a microprocessor, the implementation method of which will be obvious to those skilled in the art, and thus a further description thereof will be omitted.

[0114] Hereinafter, the operation and effects of the burn-in chamber apparatus 1 according to an embodiment of the present application will be described.

[0115] The burn-in chamber apparatus 1 can mount the rack 10, on which a plurality of electronic components D required for a burn-in test are seated, to the chamber assembly 50. The rack 10 can be moved to the chamber assembly 50 while being supported by a transport tool (e.g., a cart).

[0116] As the rack 10 gets closer to the chamber assembly 50, a chamber door (not shown) provided on the chamber assembly 50 is opened, and the rack holder 56 is rotated, thereby fully opening the chamber assembly 50 facing the rack 10. Thereafter, in the opened state of the chamber assembly 50, the rack 10 is accommodated in the accommodation space of the chamber assembly 50, so that the rack 10 can be mounted to the chamber assembly 50.

[0117] Once the rack 10 is mounted to the chamber assembly 50, the rack holder 56 can be rotated so that the rack holder 56 is adjacent to the left or right side of the rack 10. Through the rotation of the rack holder 56, the rack holder 56 can be put in a tamper-proof state. Thereafter, the chamber door can be closed.

[0118] Once the chamber door is closed, the capturing portion 53 can be driven to face the capturing support protrusion 200b in a direction parallel to the arrangement direction. The capturing portion 53 can be driven to move downward while facing the capturing support protrusion 200b, thereby lowering the lifting unit 200 and thus adjusting the height of the rear guide portion 620. On the other hand, the capturing portion 53 can not move downward. In addition, as the height of the electronic component D decreases, preferably, the height of the rear guide portion 620 decreases, and further, the height of the front guide portion 610 can also decrease. However, the height of the front guide portion 610 can be greater than or equal to the height of the rear guide portion 620.

[0119] When the height of the guide portion 600 is adjusted, the air supply portion 20 can be driven to perform an aging test on the electronic component D.

[0120] Since the guide portion 600 is driven according to the height of the electronic component D, the aging chamber apparatus 1 can create the same temperature conditions for different types of electronic components D without replacing parts, thereby eliminating the inconvenience of replacing parts.

[0121] The above, the examples of the present application are described as specific embodiments, but these are only examples, the present application is not limited thereto, according to the technical idea disclosed by the present specification, it should be interpreted as having the broadest scope. Those skilled in the art can realize the pattern of the shape not disclosed by combining / replacing the disclosed embodiments, which does not deviate from the scope of the present application. In addition, those skilled in the art can easily change or modify the disclosed embodiments according to the present specification, obviously such changes or modifications all belong to the scope of the present application.

Claims

1. A panel assembly, characterized by Comprising: a base providing a space in which electronic components are arranged in a predetermined arrangement direction; a plate frame supporting the base; and a guide portion configured to guide flow of fluid applied to the electronic components arranged on the base in a direction parallel to the arrangement direction, one side of the guide portion being configured to be movable up and down with respect to the plate frame, a fluid movement space being formed between the base and the guide portion, the guide portion extending in a front-rear direction and a left-right direction; wherein the plate frame has an avoidance space that prevents the one side of the guide portion from interfering with the plate frame when the one side of the guide portion moves up and down. Comprising:

2. An aging chamber apparatus, characterized by, a chamber assembly; a bracket detachably mounted to the chamber assembly; and one or more plate assemblies supported by the bracket, wherein each of the plate assemblies comprises: a base providing a space in which electronic components are arranged in a predetermined arrangement direction; a plate frame supporting the base; and a guide portion configured to guide flow of fluid applied to the electronic components arranged on the base in a direction parallel to the arrangement direction, the guide portion being configured to rotate with respect to the base, a fluid movement space being formed between the base and the guide portion, the guide portion extending in a front-rear direction and a left-right direction; wherein the bracket comprises a lifting unit that presses the guide portion upward or downward to rotate the guide portion. The chamber assembly comprises: a chamber frame; 3. The aging chamber apparatus of claim 2, wherein, a driving shaft including a first driving shaft disposed near an edge of the chamber frame and configured to drive upward or downward or rotate around a rotation shaft extending in an upward or downward direction; and a catching portion connected to the first driving shaft, wherein the lifting unit has a catching support protrusion that is lowered by pressing of the catching portion, and protrudes in a direction deviated from the arrangement direction and the upward or downward direction, one side of the guide portion is rotatably connected to the lifting unit, and when the first driving shaft is driven downward, one side of the guide portion is lowered by pressure applied to the catching support protrusion. The one side of the guide portion is configured to rotate with respect to a first rotation axis provided by the lifting unit, and extends in a direction perpendicular to the arrangement direction and the upward or downward direction, the guide portion is configured to rotate around a second rotation axis disposed at the other side opposite to the one side and extending perpendicular to the arrangement direction and the upward or downward direction.

4. The aging chamber apparatus of claim 3, wherein, The other side of the guide portion is configured to move up and down with respect to the base, and a distance by which the other side of the guide portion is lowered is less than a distance by which the one side of the guide portion is lowered. When the first driving shaft is lowered, the one side of the guide portion rotates around the second rotation axis to approach the base, and when the lowered first driving shaft is raised, the one side of the guide portion rotates around the second rotation axis to move away from the base.

5. The aging chamber apparatus of claim 4, wherein, ​ 6. The aging chamber apparatus of claim 4, wherein, ​ 7. The aging chamber apparatus of claim 3, wherein, The driving shaft further includes a second driving shaft configured to rotate about a rotation axis extending in the up-and-down direction, The chamber assembly further includes a bracket holder connected to the second driving shaft and rotating with the second driving shaft, thereby placing the bracket in a detachable state in which the bracket can be detached from the chamber assembly or in a non-detachable state in which the bracket mounted to the chamber assembly is prevented from being detached from the chamber assembly.

8. The aging chamber apparatus of claim 7, wherein, The first driving shaft is driven such that the capturing portion is directed toward a direction deviated from the arrangement direction when the bracket holder is in the detachable state, and the capturing portion is directed toward a direction parallel to the arrangement direction when the bracket holder is in the non-detachable state.

9. The aging chamber apparatus of claim 2, wherein, The bracket further includes an extension unit that applies an upward restoring force to the lifting unit when the lifting unit moves downward.

10. The aging chamber apparatus of claim 9, wherein, The extension unit includes: a support plate connected to an upper portion of the bracket; a resilient member having one end fixed to a front side of the support plate and the other end configured to be movable with respect to the support plate; and a wire connected to the other end of the resilient member, wherein the lifting unit has a wire support protrusion that supports the wire and protrudes in a direction deviated from the arrangement direction and the up-and-down direction, the wire extending between the other end of the resilient member and the wire support protrusion.

11. The aging chamber apparatus of claim 10, wherein, The bracket further includes: a support frame for supporting the plate assembly; and a roller rotatably connected to an upper side of the support frame to rotate about the support frame, wherein, when the roller is in contact with the wire, the roller guides movement of the wire as the wire moves.

12. The aging chamber apparatus of claim 2, wherein, Each of the plate assemblies further includes a gas guide plate that guides flow of the fluid such that the fluid flows in the arrangement direction, wherein the gas guide plate is spaced apart from the base and extends in the arrangement direction, the gas guide plate including a plurality of gas guide plates disposed on both sides of the base, wherein the plurality of gas guide plates include a first gas guide plate disposed on one side of the base and a second gas guide plate disposed on the other side opposite to the one side of the base, a vertical distance between a lower end of the first gas guide plate and the base being smaller than a vertical distance between a lower end of the second gas guide plate and the base.

13. The aging chamber apparatus of claim 2, wherein, Further includes: a blowing portion that generates flow of the fluid in the arrangement direction, wherein the blowing portion includes: an inlet blowing portion spaced apart from the bracket to introduce the fluid into the plate assembly in the arrangement direction toward the electronic component; and an outlet blowing portion placed at a position spaced apart from the bracket to discharge the fluid from the plate assembly in the arrangement direction. Further includes: a blowing portion that generates flow of the fluid in the arrangement direction, wherein the blowing portion includes: an inlet blowing portion spaced apart from the bracket to introduce the fluid into the plate assembly in the arrangement direction toward the electronic component; and an outlet blowing portion placed at a position spaced apart from the bracket to discharge the fluid from the plate assembly in the arrangement direction.

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