Infrared detector packaging structure and implementation method sharing cavity with low-temperature optical machine cold box

Abstract

The present invention discloses an infrared detector packaging structure and implementation method that shares a cavity with a cryogenic optical machine cold box. The present invention effectively reduces the noise of the infrared detector refrigeration assembly by designing a specific structure and introducing a corresponding processing method, so that the low-temperature packaged infrared detector module can be quickly replaced, so that the infrared detector refrigeration assembly has the vacuum environment required for performance testing and evaluation, and at the same time provides a multi-degree-of-freedom flexible assembly airtight assembly method with a cryogenic optical machine cold box. The present invention solves the problems of multi-degree-of-freedom flexible adjustment of optical alignment after the infrared detector assembly shares a cavity with the cryogenic optical machine cold box, low heat load, product safety, and low noise of the infrared detector assembly, and solves the problems of detector testing and safety protection during the development of the detector assembly. The present invention is suitable for the packaging of detectors for medium and long-wave infrared hyperspectral imaging technology, and is also suitable for the airtight packaging of optoelectronic components of other cryogenic optical machine systems.

Description

Technical Field

[0001] The present invention relates to low-temperature packaging technology for infrared detectors, and specifically refers to an infrared detector packaging structure that shares a cavity with a low-temperature optical machine cold box and an implementation method. The infrared detector packaging structure is suitable for the packaging of detectors used in medium- and long-wave infrared hyperspectral imaging technologies, and is also suitable for the airtight packaging of optoelectronic components of other low-temperature optical machine systems. Background Art

[0002] Hyperspectral imaging technology integrates image and spectrum, with nanometer-level high spectral resolution, while obtaining the target's two-dimensional spatial image information, it also obtains the target's continuous and fine spectral information, greatly improving the detection capability of space remote sensing. Compared with visible, near-infrared, and short-wave infrared, medium- and long-wave infrared (5.0μm-15μm) hyperspectral imaging technology has unique advantages. The spectral coverage range reaches nearly 10,000 nanometers, and it can obtain the target's own fine spectral information of thermal radiation. It can not only effectively identify the composition of the ground object, but also effectively distinguish the structural characteristics of the ground object, and obtain the temperature and emissivity of the ground object. Parameter information, can be widely used in land, atmosphere, ocean and other observations. The key technology of medium- and long-wave infrared hyperspectral imager lies in the suppression of background radiation. Several background suppression methods abroad include cooling-type gradient filters, full optical path low-temperature refrigeration, and low-temperature refrigeration of spectrometer components. At present, most of the domestic use is to cool the spectrometer components in a vacuum cold box, and the medium- and long-wave infrared detector refrigeration components and vacuum cold boxes share the same cavity to suppress background radiation.

[0003] Chinese Patent 202110514169.9 "A device for suppressing background radiation of medium and long wave infrared hyperspectral remote sensors" integrates three spectrometer components in a cold box, uses two refrigeration refrigerators to cool the three spectrometers, and the detector refrigeration component obtains the corresponding target detection information with background radiation suppression. There is no description of how the detector refrigeration component is integrated with the cold box. The infrared detector refrigeration component described in Chinese Patent 201510295754.9 "A practical thermal infrared hyperspectral imager payload system" and Chinese Patent 201910618722.6 "Cryogenic optomechanical system based on SiC particle reinforced aluminum matrix composite vacuum cold box" is an integrated crank-connecting rod Stirling refrigerator, which cools 320×256 mercury cadmium telluride. The stainless steel bellows SUS316L welded on the front shell of the detector refrigeration component and the vacuum cold box are sealed to form a common cavity, and the vacuum cold box is at vacuum and low temperature inside and normal temperature and pressure outside. A cold screen and a low-temperature filter are designed in front of the photosensitive surface of the detector to suppress the response of the detector outside the thermal infrared spectrum. The detector dewar assembly described in the patent is a bellows welded from the dewar lead ring position, and the dewar assembly has no window and its supporting shell. There are the following shortcomings: 1) The inner lead of the dewar is a bonding metal bare wire, and the dewar assembly has no window and its supporting shell. When the infrared detector dewar assembly is optically assembled with the cold box, the inner lead of the dewar is easily damaged; 2) The external lead of the dewar assembly is first welded with a metal wire, and then the bellows are airtightly welded, which results in poor noise reduction processing of the detector signal line; 3) The external lead of the dewar assembly is welded with a metal wire, and then the bellows are airtightly welded outside the lead, resulting in reduced maintainability of the assembly; 4) As the scale of the detector assembly increases, especially when the number of external leads is large, it becomes more difficult to weld the external wire outside the dewar lead ring and in the narrow space of the bellows. In addition, as the scale of the medium and long wave infrared detector refrigeration components used in the low temperature optical machine cold box system increases, the above problem will become more obvious, and a new method must be explored to solve this problem. Summary of the invention

[0004] The purpose of the present invention is to provide an infrared detector packaging structure and implementation method that shares a cavity with a cryogenic optical machine cold box, solve the multi-degree-of-freedom flexible adjustment of optical registration after the infrared detector assembly shares a cavity with the cryogenic optical machine cold box, the low heat load, product safety, and low noise of the infrared detector assembly, and solve the detector testing and safety protection problems in the development process of the detector assembly. It is suitable for the packaging of detectors for mid- and long-wave infrared hyperspectral imaging technology, and is also suitable for the hermetic packaging of optoelectronic components of other cryogenic optical machine systems.

[0005] The infrared detector packaging structure of the present invention, which shares a cavity with a low-temperature optical machine cold box, is shown in the attached figure. Figure 1As shown, it is composed of a cold platform 1, a core column 2, a shell 3, a connector group 4, a three-dimensionally adjustable flexible bellows 5, a bellows support ring 6, a cold box mounting flange 7, a detector 8, a spliced ​​substrate 9, a low-leakage thermal line 10, a ceramic electrode plate 11, a low-temperature capacitor 12, a cold shield with a filter 13, and a test window tooling 14. The cold platform is vacuum brazed on the core column 2, and the shell 3 is connected to the lower end surface of the core column 2 by laser welding. The connector group 4 is composed of a Dewar external plug 401, a socket 402 and a Dewar internal plug 403. The socket 402 of the connector group 4 is laser welded to the corresponding position of the shell 3. The lower end of the three-dimensionally adjustable flexible bellows 5 is connected to the shell 3, and the upper end of the three-dimensionally adjustable flexible bellows 5 is connected to the cold box mounting flange 7. In order to ensure that the three-dimensionally adjustable flexible bellows 5 has a certain rigidity during the Dewar assembly process, a bellows support ring 6 is installed between the shell 3 and the cold box mounting flange. The bellows support ring 6 is cut into two halves after being processed as a whole. The detector 8 is glued to the splicing substrate 9 according to a certain position relationship. The ceramic electrode plate 11 is glued to the splicing substrate 9 in a certain position in the electrode lead-out direction of the detector 8. A low-temperature capacitor 12 is installed at a reserved position on the ceramic electrode plate 11. The low-temperature end of the low-leakage thermal line 10 is installed on the splicing substrate 9 through a pressing block. The room temperature end of the low-leakage thermal line 10 is welded to the Dewar plug 403 of the connector group through a pad. A cold shield 13 with a filter is installed on the splicing substrate 9. The test window fixture 14 is installed on the cold box mounting flange 7 so that the infrared detector assembly forms a closed environment to provide a vacuum environment for the detector performance test.

[0006] The infrared detector packaging structure that shares a cavity with the low-temperature optical machine cold box is as follows Figure 2 As shown, the noise reduction function of the detector is achieved by using a low-temperature capacitor, and the implementation method is as follows: (1) A ceramic electrode plate 11 is installed at the position closest to the detector 8; (2) The ceramic electrode plate 11 is 95 ceramic and uses multi-layer wiring. Part of the detector leads and the detector ground wire are led to the corresponding position of the top layer of ceramic through vias to form two groups of electrode pads to facilitate the installation of low-temperature capacitors 12; (3) Two groups of electrode pads are respectively installed with two types of low-temperature capacitors 12 in parallel to achieve decoupling of low frequency and high frequency respectively; (3) The low-temperature capacitors 12 of the same specification are installed in each group of electrode pads, which are connected in series to avoid damage to the detector;

[0007] The infrared detector packaging structure that shares a cavity with the low-temperature optical machine cold box is as follows Figure 1As shown, the low-temperature packaged detector module can realize the function of rapid replacement, and its implementation method is as follows: (1) the detector 8 and the ceramic electrode plate 11 with the low-temperature capacitor 12 are glued on the splicing substrate 9 according to a certain position relationship; the detector 8 and the ceramic electrode plate 11 are electrically connected through the lead wire; (2) the low-temperature end of the low-leakage heat line 10 is fixedly installed on the splicing substrate 9 through a pressing block, and then the low-temperature end of the low-leakage heat line 10 is electrically connected to the ceramic electrode plate 11; (3) the room temperature end of the low-leakage heat line 10 is welded to the Dewar plug 403 of the connector group; at this time, the Dewar of the connector group The plug 403 inside the dewar is not connected to the socket 402 of the connector group; (4) the splicing substrate 9 with the detector 8, the ceramic electrode plate 11, the low-temperature capacitor 12, the low-leakage thermal line 10 and the plug 403 inside the dewar of the connector group is fixed on the cold platform through the countersunk light holes and screws on the splicing substrate; (5) the plug 403 inside the dewar of the connector group is connected to the socket 402 of the connector group through reinforcing screws, and the circuit of the electronic system outside the dewar is connected to the socket 402 of the connector group through the dewar external plug 401 of the connector group through reinforcing screws.

[0008] The infrared detector packaging structure that shares a cavity with the low-temperature optical machine cold box is as follows Figure 1 As shown, the vacuum environment required for the performance test of the infrared detector assembly is completed by assembling the bellows support ring 6 and the test window fixture 14, and the implementation method is as follows: (1) the cold platform 1, the core column 2, the shell 3, the connector group 4, the three-dimensionally adjustable flexible bellows 5 and the cold box mounting flange 7 are connected. In order to ensure that the three-dimensionally adjustable flexible bellows 5 has a certain rigidity during the dewar assembly process, the bellows support ring 6 is installed between the shell 3 and the cold box mounting flange 7. This ensures that when the assembly forms a vacuum cavity, the distance between the shell 3 and the cold box mounting flange 7 will not change due to the vacuum back pressure; (2) the test window fixture 14 is composed of a window cap 1401 of the test window fixture, a window 1402 of the test window fixture, a window exhaust pipe 1403 of the test window fixture and a rotating pressing block 1404 of the test window fixture. The window exhaust pipe 1403 of the test window fixture is welded to the window cap 1401 of the test window fixture by vacuum brazing, and the window 1402 of the test window fixture is welded to the window cap 1401 of the test window fixture by eutectic welding. The test window fixture 14 is sealed with the cold box mounting flange 7 through the lower surface of the window cap 1401 of the test window fixture and the sealing ring in the window sealing groove 702 of the cold box mounting flange, and is fixed with the outer circle of the cold box mounting flange 7 through the rotating pressing block 1404 of the test window fixture. (3) The window exhaust pipe 1403 of the test window fixture is connected to the exhaust device for exhaust, so as to achieve the vacuum sealing operation to complete the vacuum environment required for the performance test of the infrared detector assembly;

[0009] The infrared detector assembly that shares a cavity with the low-temperature optical machine cold box is as follows Figure 1 As shown, the implementation method of its integration with the low-temperature optical machine cold box assembly is as follows: (1) first fill the protective gas from the window exhaust pipe 1403 of the test window fixture; (2) rotate the rotating pressing block 1404 of the test window fixture to separate the window fixture 14 from the cold box mounting flange 7, and then remove it; (3) remove the fixing screws on the left half or right side of the bellows support ring 6 and the cold box mounting flange 7 and the shell 3, and remove the left half or right side of the bellows support ring 6; (4) in the cold box sealing groove 70 of the cold box mounting flange 1, install the sealing ring and the low-temperature optical machine cold box, first complete the screw fixation of the left half of the cold box mounting flange 7 and the cold box mounting flange; (5) repeat steps (3) and (4) complete the screw fixation of the remaining half of the cold box mounting flange 7 and the cold box mounting flange; (6) through the position of the lower flange of the core column 2 of the infrared detector assembly that shares a cavity with the low-temperature optical machine cold box, through the flexible margin of the three-dimensionally adjustable flexible bellows 5, the detector 8 of the infrared detector assembly that shares a cavity with the low-temperature optical machine cold box can be adjusted to the specified position in the low-temperature optical machine cold box.

[0010] The advantages of the present invention are:

[0011] (1) The present invention has a simple structure, is easy to operate and has low cost;

[0012] (2) Good compatibility. The ceramic substrate with integrated detectors, capacitors, cold shields and low-leakage thermal lines can be used as a single module or as a multi-module splicing system.

[0013] (3) Good interchangeability. If the detector is damaged, it is only necessary to remove the ceramic substrate that integrates the detector, capacitor, cold shield and low-leakage thermal line and replace it;

[0014] (4) The low temperature end integrates a capacitor of a certain capacity, which can effectively suppress the noise of the detector;

[0015] (5) The component is equipped with a window and its window cap assembly, and uses a low-leakage thermal line, which can effectively protect the detector and also provide the vacuum environment required for the detector performance test: BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is the general diagram of the infrared detector packaging structure that shares the same cavity with the low-temperature optical machine cold box;

[0017] In the figure: 1—cold platform;

[0018] 2—core column;

[0019] 3—housing;

[0020] 4—Connector group;

[0021] 401—Dewar external plug;

[0022] 402—connect to the socket;

[0023] 403—Dewarner plug;

[0024] 5—Flexible bellows with three-dimensional adjustment;

[0025] 6—Bellows support ring;

[0026] 7—Cold box mounting flange;

[0027] 701-cold box sealing groove of cold box mounting flange;

[0028] 702-Window sealing groove of cold box mounting flange;

[0029] 8—Detector;

[0030] 9—Splicing substrate;

[0031] 10—low leakage tropical line;

[0032] 11—ceramic electrode plate;

[0033] 12—Low temperature capacitor;

[0034] 13—cold screen with filter;

[0035] 14—Test window tooling;

[0036] 1401—Window caps for test window fixtures;

[0037] 1402—window of the test window tooling;

[0038] 1403—Window exhaust pipe for test window tooling;

[0039] 1404—rotating pressing block for testing window fixture;

[0040] Figure 2 This is a top view of the infrared detector package that shares a cavity with the low-temperature optical machine cold box. DETAILED DESCRIPTION

[0041] The specific embodiments of the present invention are further described in detail below in conjunction with the accompanying drawings:

[0042] The example is that a certain aerospace project uses two long-wave 640×128 arrays to form a 640×256 dual-wave band Dewar assembly. The detector is required to work at 40K, and the cold box temperature is required to be 100K. It consists of a cold platform 1, a core column 2, a shell 3, a connector group 4, a three-dimensionally adjustable flexible bellows 5, a bellows support ring 6, a cold box mounting flange 7, a detector 8, a splicing substrate 9, a low-leakage thermal line 10, a ceramic electrode plate 11, a low-temperature capacitor 12, a cold screen with a filter 13, and a test window tooling 14. The specific implementation of the present invention is as follows:

[0043] 1. The packaging structure of the infrared detector assembly that shares the same cavity with the cryogenic optical machine cold box is as follows:

[0044] 1) The cold platform is vacuum brazed on the core column 2, and the shell 3 is connected to the lower end surface of the core column 2 by laser welding. The connector group 4 consists of a Dewar external plug 401, a socket 402 and a Dewar internal plug 403. The socket 402 of the connector group is laser welded to the corresponding position of the shell 3. The lower end of the three-dimensionally adjustable flexible bellows 5 is connected to the shell 3, and the upper end of the three-dimensionally adjustable flexible bellows 5 is connected to the cold box mounting flange 7. In order to ensure that the three-dimensionally adjustable flexible bellows 5 has a certain rigidity during the Dewar assembly process, a bellows support ring 6 is installed between the shell 3 and the cold box mounting flange. The bellows support ring 6 is cut into left and right halves after integral processing. The detector 8 is glued to the splicing substrate 9 according to a certain position relationship. The ceramic electrode plate 11 is glued to the splicing substrate 9 in the electrode lead-out direction of the detector 8 at a certain position. A low-temperature capacitor 12 is installed at a reserved position on the ceramic electrode plate 11. The low temperature end of the low leakage heat line 10 is mounted on the splicing substrate 9 through a pressing block. The room temperature end of the low leakage heat line 10 is welded to the Dewar plug 403 of the connector assembly through a pad. The cold shield 13 with a filter is mounted on the splicing substrate 9. The test window fixture 14 is mounted on the cold box mounting flange 7 so that the infrared detector assembly forms a closed environment to provide a vacuum environment for the detector performance test.

[0045] 2) The noise reduction function of the detector is realized by using a cryogenic capacitor, and the design method is as follows: (1) A ceramic electrode plate 11 is installed at the position closest to the detector 8; (2) The ceramic electrode plate 11 is 95 ceramic and uses multi-layer wiring. Part of the detector leads and the detector ground wire are led to the corresponding position of the top layer of the ceramic through vias to form two groups of electrode pads, so as to facilitate the installation of the cryogenic capacitor 12; (3) The two groups of electrode pads use two types of cryogenic capacitors 12 in parallel to achieve decoupling of low frequency and high frequency respectively; (4) Two cryogenic capacitors 12 of the same specification are used in series in each group to avoid damage to the detector.

[0046] 2. The vacuum environment required for the performance test of the infrared detector assembly is completed by assembling the bellows support ring 6 and the test window fixture 14, and the implementation method is as follows:

[0047] 1) The cold platform 1, the core column 2, the shell 3, the connector group 4, the three-dimensionally adjustable flexible bellows 5 and the cold box mounting flange 7 are connected. In order to ensure that the three-dimensionally adjustable flexible bellows 5 has a certain rigidity during the Dewar assembly process, a bellows support ring 6 is installed between the shell 3 and the cold box mounting flange 7. This ensures that when the assembly forms a vacuum cavity, the distance between the shell 3 and the cold box mounting flange 7 will not change due to the vacuum back pressure;

[0048] 2) The test window fixture 14 is composed of a window cap 1401 of the test window fixture, a window 1402 of the test window fixture, a window exhaust pipe 1403 of the test window fixture and a rotating pressing block 1404 of the test window fixture. The window exhaust pipe 1403 of the test window fixture is welded to the window cap 1401 of the test window fixture by vacuum brazing, and the window 1402 of the test window fixture is welded to the window cap 1401 of the test window fixture by eutectic welding. The test window fixture 14 is sealed with the cold box mounting flange 7 by the sealing ring inside the window sealing groove 702 of the cold box mounting flange through the lower surface of the window cap 1401 of the test window fixture and the cold box mounting flange 7, and is fixed to the outer circle of the cold box mounting flange 7 by the rotating pressing block 1404 of the test window fixture;

[0049] 3) The exhaust device is used to connect the window exhaust pipe 1403 of the test window tooling to exhaust air, thereby achieving a vacuum sealing operation to complete the vacuum environment required for the performance test of the infrared detector assembly.

[0050] 3. The steps for implementing the integration of the infrared detector assembly that shares the same cavity with the cryogenic optical machine cold box and the cryogenic optical machine cold box are as follows:

[0051] 1) First, fill the protective gas from the window exhaust pipe 1403 of the test window tooling;

[0052] 2) Rotate the rotating pressing block 1404 of the test window fixture to separate the window fixture 14 from the cold box mounting flange 7, and then remove it;

[0053] 3) Remove the fixing screws on the left half or right side of the bellows support ring 6, the cold box mounting flange 7 and the shell 3, and remove the left half or right side of the bellows support ring 6;

[0054] 4) Install the sealing ring and the low-temperature optical machine cold box in the cold box sealing groove 701 of the cold box mounting flange, and first complete the screw fixation of the left half of the cold box mounting flange 7 and the cold box mounting flange;

[0055] 5) Repeat steps (3) and (4) to complete the screw fixation of the remaining half of the cold box mounting flange 7 to the cold box mounting flange;

[0056] 6) By adjusting the position of the lower flange of the core column 2 of the infrared detector assembly that shares a cavity with the cryogenic optical machine cold box and the flexible margin of the three-dimensionally adjustable flexible bellows 5, the detector 8 of the infrared detector assembly that shares a cavity with the cryogenic optical machine cold box can be adjusted to a specified position in the cryogenic optical machine cold box.

[0057] The above realizes the assembly of the infrared detector component packaging structure sharing the same cavity with the cryogenic optical and mechanical cold box, the acquisition of vacuum and the integration with the cryogenic optical and mechanical cold box.

Claims

1. An infrared detector packaging structure sharing a cavity with a low-temperature optical machine cold box, comprising a cold platform (1), a core column (2), a shell (3), a connector assembly (4), a three-dimensionally adjustable flexible bellows (5), a bellows support ring (6), a cold box mounting flange (7), a detector (8), a spliced ​​substrate (9), a low-leakage thermal line (10), a ceramic electrode plate (11), a low-temperature capacitor (12), a cold shield with a filter (13), and a test window tooling (14); characterized in that: The cold platform (1) is vacuum brazed on the core column (2), the shell (3) is connected to the lower end surface of the core column (2) by laser or argon arc welding, and the socket (402) of the connector group (4) is welded to the corresponding position of the shell (3) by laser or argon arc welding; the lower end of the three-dimensionally adjustable flexible bellows (5) is connected to the shell (3), and the upper end of the three-dimensionally adjustable flexible bellows (5) is connected to the cold box mounting flange (7); a bellows support ring (6) is installed between the shell (3) and the cold box mounting flange; the detector (8) is glued to the splicing substrate (9) according to a certain position relationship, and a ceramic electrode is installed at the low temperature position closest to the detector (8). The ceramic electrode plate (11) adopts multi-layer wiring, and part of the lead wires of the detector and the detector ground wire are led to the corresponding position of the uppermost layer of the ceramic through via holes to form two groups of electrode pads, so as to facilitate the installation of low-temperature capacitors (12); two groups of pads respectively select two types of low-temperature capacitors (12) of parallel connection to achieve low-frequency and high-frequency decoupling, respectively, so as to reduce the noise of the detector; two low-temperature capacitors (12) of the same specification are connected in series in each group to protect the detector; the low-temperature end of the low-leakage heat line (10) is installed on the splicing substrate (9) through a pressing block; in order to realize the function that the detector module can be quickly replaced, the detector (8) and the low-temperature capacitor (12) are connected in series. ) is glued to the splicing substrate (9) according to a certain position relationship, and the detector (8) and the ceramic electrode plate (11) are electrically connected through the lead wire; the low-temperature end of the low-leakage thermal line (10) is fixedly installed on the splicing substrate (9) through a pressing block, and then the low-temperature end of the low-leakage thermal line (10) is electrically connected to the ceramic electrode plate (11); the room temperature end of the low-leakage thermal line (10) is welded to the Dewar plug (403) of the connector group (4); the splicing substrate (9) with the detector (8), the ceramic electrode plate (11), the low-temperature capacitor (12), the low-leakage thermal line (10) and the Dewar plug (403) of the connector group (4) is connected. ) is fixed on the cold platform (1) through the countersunk light hole and screws on the splicing substrate (9); the inner plug (403) of the connector group (4) is connected to the socket (402) of the connector group through reinforcing screws, and the circuit of the electronic system outside the dewar is connected to the socket (402) of the connector group (4) through the outer plug (401) of the dewar of the connector group (4) through reinforcing screws; the cold shield (13) with the filter is installed on the splicing substrate (9), and the test window tooling (14) is installed on the cold box mounting flange (7) so that the infrared detector assembly forms a closed environment to provide a vacuum environment for the detector performance test.

2. A method for realizing the vacuum environment required for the performance test of a true infrared detector assembly based on the infrared detector packaging structure that shares a cavity with a low-temperature optical machine cold box as described in claim 1, characterized in that The steps of achieving the vacuum environment required for the performance test of the infrared detector assembly by using the bellows support ring (6) and the test window fixture (14) are as follows: 1) The cold platform (1), the core column (2), the shell (3), the connector assembly (4), the three-dimensionally adjustable flexible bellows (5) and the cold box mounting flange (7) are connected, and a bellows support ring (6) is installed between the shell (3) and the cold box mounting flange (7) so that the three-dimensionally adjustable flexible bellows (5) has a certain rigidity during the dewar assembly process; 2) The window exhaust pipe (1403) of the test window fixture is welded to the window cap (1401) of the test window fixture by vacuum brazing, and the window (1402) of the test window fixture is welded to the window cap (1401) of the test window fixture by eutectic welding; the test window fixture (14) is sealed with the cold box mounting flange (7) through the lower surface of the window cap (1401) of the test window fixture and the inner sealing ring of the window sealing groove (702) on the cold box mounting flange, and is fixed with the outer circle of the cold box mounting flange (7) by the rotating pressing block (1404) of the test window fixture; 3) The exhaust device is connected to the window exhaust pipe (1403) of the test window tooling to exhaust air, thereby achieving a vacuum sealing operation to complete the vacuum environment required for the performance test of the infrared detector assembly.

3. A method for implementing the assembly and integration of the infrared detector packaging structure sharing a cavity with the cryogenic optical machine cold box according to claim 1, characterized in that The steps are as follows: 1) First, fill the protective gas from the window exhaust pipe (1403) of the test window tooling; 2) rotating the rotating pressing block (1404) of the test window fixture to separate the window fixture (14) from the cold box mounting flange (7), and then removing it; 3) Remove the fixing screws between the left half or right side of the bellows support ring (6) and the cold box mounting flange (7) and the housing (3), and remove the left half or right side of the bellows support ring (6); 4) Install the sealing ring and the low-temperature optical machine cold box in the cold box sealing groove (701) of the cold box mounting flange, and first complete the screw fixation of the left half of the cold box mounting flange (7) and the cold box mounting flange; 5) Repeat steps 3) and 4) to complete screw fixation of the remaining half of the cold box mounting flange (7) to the cold box mounting flange; 6) By adjusting the position of the lower flange of the core column (2) of the infrared detector assembly that shares a cavity with the cryogenic optical machine cold box and the flexible margin of the three-dimensionally adjustable flexible bellows (5), the detector (8) of the infrared detector assembly that shares a cavity with the cryogenic optical machine cold box can be adjusted to a specified position in the cryogenic optical machine cold box.

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