Micro-nano indentation test device and test method for in-situ characterization of indentation area

Abstract

The invention relates to a micro-nano indentation testing device and a testing method for an in-situ indentation area, which realizes dynamic in-situ micro-Raman testing of phase change and strain process of indentation micro-area materials during indentation testing, and has good application prospects. The device comprises a macro-motion unit, a micro-motion unit, a signal detection unit and a control unit, wherein the relative position of a test piece relative to a light-transmitting indenter is adjusted by the macro-motion unit; the light-transmitting indenter is driven by the micro-motion unit to realize precise indentation and outdentation movement of the test sample; the indentation load, indentation displacement and micro-Raman test data during the test are detected and acquired by the signal detection unit, and the acquisition of the indentation displacement comes directly from the movement between the light-transmitting indenter and the test piece, thereby eliminating the compliance error caused by the force sensor; and the macro-motion unit, the micro-motion unit and the detection unit are controlled by an upper computer through the control unit.

Description

Technical Field

[0001] The invention belongs to the field of material micro-nano mechanical property testing, and in particular relates to a micro-nano indentation testing device and a testing method for an in-situ indentation area. Background Art

[0002] With the development of precision and ultra-precision machining technology, the mechanical properties of materials at the micro-nano scale have attracted great attention. Research on microelectronics and microelectronics processing has shown that materials at this scale often exhibit completely different properties from those under macroscopic conditions.

[0003] Nanoindentation is an important part of material testing. It is used to determine the plasticity and elasticity of materials, such as indentation elastic modulus, indentation hardness, indentation creep and other mechanical information. Depending on the selected test area, it can achieve targeted testing of different tissues of the same specimen. It is widely used in the mechanical properties research of micro-components, thin film coatings, special functional materials and biological tissues in micro-electromechanical systems. It is one of the most mainstream material micro-nanomechanical testing technologies in the world. During the indentation test, the transparent indenter is pressed into the object to be tested according to the predetermined loading curve. When the set maximum force value is reached, the transparent indenter is unloaded again in a controllable manner. The indentation depth is recorded during the loading and unloading process, and various performance parameters can be calculated based on the applied load, the shape of the transparent indenter and the indentation depth.

[0004] In-situ nanomechanical properties testing is one of the future development trends of nanomechanical properties testing. Combined with the continuous development of observation technologies such as optical microscopes, atomic force microscopes, scanning electron microscopes and transmission electron microscopes, in-situ observation can intuitively understand the stress deformation process and damage mechanism of materials. However, the indentation test is a micro-area mechanical properties test, and the transparent indenter is in close contact with the test area of ​​the specimen, so it is difficult to integrate other in-situ observation methods. At present, the scanning electron microscope, which is most closely integrated with the indentation test, can only observe the material state around the indentation area at a specific angle, and cannot effectively characterize the material state of the core area of ​​the test. The transmission electron microscope needs to thin the specimen to the level of hundreds of nanometers, which is cumbersome to operate and destroys the original three-dimensional solid structure of the material. The existing micro-nano indentation test method combined with Raman technology has a Raman irradiation direction parallel to the specimen surface and perpendicular to the indentation direction. Therefore, it can only perform in-situ characterization of in-situ micro-column compression test on micro-column specimens.

[0005] If it is possible to use the Raman method to directly characterize the core area of ​​the indentation test process in situ, it will greatly expand the application scope and characterization information of the micro-nano indentation test technology, which is of great significance to the development of material micro-nano mechanical properties testing technology. Summary of the invention

[0006] In order to solve the above technical problems, the present invention provides a micro-nano indentation testing device for in-situ characterization of the indentation area. Micro-Raman spectroscopy testing is integrated in the indentation testing process to perform in-situ spectral characterization on the indentation area, thereby solving the problems that it is difficult to add other in-situ characterization methods to the existing micro-nano indentation testing and the characterization effect is not significant. The testing process is simple and can effectively provide more abundant in-situ characterization information for the micro-nano indentation testing process.

[0007] The present invention is achieved through the following technical solutions:

[0008] A micro-nano indentation testing device for an in-situ indentation area, comprising a macro-motion unit, a micro-motion unit, a signal detection unit and a base 9; the macro-motion unit comprises an X / Y axial drive platform and a Z axial workbench 12, the Z axial workbench 12 is fixed on the upper surface of the X / Y axial drive platform, and the X / Y axial drive platform is fixedly connected to the base 9; the micro-motion unit comprises an actuator 11 and a flexible hinge 10, the actuator 11 is pre-tightened and fixed inside the flexible hinge 10, and the flexible hinge 10 is fixed on the Z axial workbench 12, the signal detection unit comprises a U-shaped fixing frame 7 and a micro-Raman probe 1, a light-transmitting indenter 3, a hollow force sensor 5, and a stage 1 arranged from top to bottom. 6. The stage mounting sleeve 18 and the laser interferometer probe 6; the bottom of the U-shaped fixing frame 7 is fixed to the upper end of the flexible hinge 10 through the connecting block 8, the hollow force sensor 5 is fixed inside the U-shaped fixing frame 7, the stage mounting sleeve 18 passes through the inside of the hollow force sensor 5 and is fixed as a whole, and the bottom protrusion of the stage 16 is fixed in the stage mounting sleeve 18; the laser interferometer probe 6 is connected to the Z-axis workbench through the probe fixing rod 23; the micro-Raman probe 1 and the transparent pressure head 3 are fixedly connected to the base 9, the laser focus position of the micro-Raman probe 1 passes through the transparent pressure head 3 and is focused below it, and the bottom protrusion of the stage 16 is located in the working area of ​​the laser interferometer probe 6.

[0009] As a more optimal technical solution of the present invention, the X / Y axial driving platform includes an X-axial driving platform 14 and a Y-axial driving platform 13 , and the Y-axial driving platform 13 is fixedly connected to the X-axial driving platform 14 .

[0010] As a more optimal technical solution of the present invention, the micro-Raman probe 1 is a conventional lens or an external light path lead-out lens of an external micro-Raman tester.

[0011] As a more optimal technical solution of the present invention, the laser interferometer probe 6 is a probe of an external laser interferometer.

[0012] As a more optimal technical solution of the present invention, the probe fixing rod 23 is fixedly connected to the Z-axis workbench 12 through a probe fixing rod sleeve 25 .

[0013] As a more optimal technical solution of the present invention, the transparent pressure head 3 is fixedly connected to the side of the base 9 through the pressure head fixing rod 2. The transparent pressure head 3 is inserted into the through hole of the pressure head fixing rod 2 and is tightened and fixed by the pressure head fixing screw 15 on the side.

[0014] As a more preferred technical solution of the present invention, the hollow force sensor 5 is fixed to the inside of the U-shaped fixing frame 7 by means of a set screw 19. The hollow force sensor 5 timely detects the pressure of the transparent pressure head 3 pressing into the material, and uses the detected signal as a feedback signal of the power supply of the actuator 11 to form a closed-loop control.

[0015] As a more optimal technical solution of the present invention, the hollow force sensor 5 is fixed to the outside of the stage sleeve 18 by using a shaft shoulder and a flange 20 .

[0016] As a more optimal technical solution of the present invention, the stage 16 is fixed inside the stage sleeve 18 by means of set screws 17 .

[0017] As a more optimal technical solution of the present invention, the light-transmitting indenter 3 is made of sapphire or other materials that can allow Raman light to pass through its axial direction.

[0018] As a more optimal technical solution of the present invention, it also includes a control unit, and the control unit is controllably connected with the macro-motion unit, the micro-motion unit and the signal detection unit.

[0019] Another object of the present invention is to provide a micro-nano indentation testing method for an in-situ indentation area, comprising the following steps:

[0020] First, the light-transmitting indenter 3 is placed directly below the micro-Raman probe 1, and the longitudinal position of the light-transmitting indenter 3 in the indenter fixing rod 2 is adjusted so that the Raman laser can pass through the light-transmitting indenter 3 and be focused below it;

[0021] Then adjust the position and angle of the laser interferometer probe 6. By loosening the probe fixing rod sleeve screw 26, the position of the probe fixing rod 23 in the z direction can be adjusted. At the same time, due to the gap between the probe fixing rod 23 and the inner wall of the probe fixing rod sleeve 25, the probe fixing rod 23 can be slightly deflected around the x direction. By loosening the probe fixing rod sleeve screw 26, the probe fixing rod sleeve 25 can be adjusted to deflect around the y direction.

[0022] The polished surface of the test piece 4 is bonded and fixed on the stage 16 upward, and the stage 16 is fixedly connected to the force sensor 5 through its lower thread, and the X-axis driving platform 14, the Y-axis driving platform 13 and the Z-axis workbench 12 are driven to make the test piece 4 located at a macroscopic position relative to the transparent indenter 3 for indentation testing;

[0023] Finally, the input voltage of the actuator 11 is adjusted to drive the specimen 4 to move along the z direction, realizing the micro-nano indentation process of the transparent indenter 3 on the specimen 4, and the indentation test curve is obtained by collecting data from the hollow force sensor 5 and the laser interferometer probe 6. According to the test requirements, a load holding process of about 60 seconds is performed at a specific stage of each indentation test. During this process, the micro-Raman probe 1 is turned on and the Raman acquisition and analysis process is performed.

[0024] The beneficial effects are as follows:

[0025] The device provided by the present invention has the in-situ characterization capability of additional Raman light during the micro-nano indentation test process, and the Raman light is directly irradiated on the core area of ​​the indentation test, which can directly characterize the molecular structure of the material during the indentation test, enriching the richness of information acquisition of micro-nano indentation test materials; the displacement acquisition method adopted by the present invention can directly obtain the relative displacement between the transparent indenter and the test piece during the test, eliminate the error caused by the flexible deformation of the force sensor, and provide a new technical means for in-situ observation of the indentation test process.

[0026] The present invention is beneficial in that:

[0027] The device and method proposed in the present invention can add the in-situ characterization capability of Raman light to the micro-nano indentation test process, and the Raman light is directly irradiated on the core area of ​​the indentation test, which can directly characterize the molecular structure of the material during the indentation test, enriching the richness of micro-nano indentation test material information acquisition. The displacement acquisition method adopted can directly obtain the relative displacement between the transparent indenter and the test piece during the test, eliminate the error caused by the flexible deformation of the force sensor, and provide a new technical means for in-situ observation of the indentation test process. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 is an axonometric view of the present invention;

[0029] Figure 2 for Figure 1 The main view;

[0030] Figure 3 for Figure 1 Left view of

[0031] Figure 4 It is a structural schematic diagram of a signal detection unit of the present invention;

[0032] Figure 5 A schematic diagram of the principle of the Raman in-situ characterization indentation test process involved in the present invention;

[0033] Figure 6 It is a front view of the clamping and adjustment structure of the laser interferometer probe in the present invention;

[0034] Figure 7 for Figure 6 Left view of

[0035] Figure 8 for Figure 6 A top view of

[0036] Fig. 9 It is a schematic diagram of the degrees of freedom of adjustment of the laser interferometer probe relative to the test piece in the present invention;

[0037] In the figure: 1-micro Raman probe; 2-pressure head fixing rod; 3-light-transmitting pressure head; 4-test piece; 5-hollow force sensor; 6-laser interferometer probe; 7-U-shaped fixing frame; 8-connecting block; 9-base; 10-flexible hinge; 11-actuator; 12-Z-axial workbench 12; 13-Y-axial driving platform 13; 14-X-axial driving platform 14; 15-pressure head fastening screw; 16-stage; 17-stage fastening screw; 18-stage sleeve; 19-force sensor fastening screw; 20-flange; 21-flange fixing screw; 22-probe fastening screw; 23-probe fixing rod; 24-fixing rod fastening screw; 25-probe fixing rod sleeve; 26-probe fixing rod sleeve screw. DETAILED DESCRIPTION

[0038] The details of the present invention and its specific implementation methods are further described below in conjunction with the accompanying drawings.

[0039] Reference Figures 1 to 5The present invention provides a micro-nano indentation testing device for an in-situ indentation area, comprising a macro-motion unit, a micro-motion unit, a signal detection unit, a base 9 and a control unit; the macro-motion unit comprises an X / Y axial driving platform and a Z axial working table 12, the Z axial working table 12 is fixed on the upper surface of the X / Y axial driving platform, and the X / Y axial driving platform is fixedly connected to the base 9; the micro-motion unit comprises an actuator 11 and a flexible hinge 10, the actuator 11 is pre-tightened and fixed inside the flexible hinge 10, and the input voltage of the actuator 11 can cause different degrees of elastic deformation of the upper part of the flexible hinge 10, so as to realize the movement of the upper end of the flexible hinge 10 in the z direction; the flexible hinge 10 is fixed on the Z axial working table 12, and the signal detection unit comprises a U-shaped fixing frame 7 and a micro-Raman probe 1, a light-transmitting indenter 3, and a hollow force sensor arranged from top to bottom. 5, stage 16, stage mounting sleeve 18 and laser interferometer probe 6; the bottom of the U-shaped fixing frame 7 is fixed to the upper end of the flexible hinge 10 through the connecting block 8, and can realize the movement in the z direction with the application of the input voltage of the actuator 11, the hollow force sensor 5 is fixed inside the U-shaped fixing frame 7, the stage mounting sleeve 18 passes through the inside of the hollow force sensor 5 and is fixed as a whole, and the bottom protrusion of the stage 16 is fixed in the stage mounting sleeve 18; the laser interferometer probe 6 is connected to the Z-axis workbench through the probe fixing rod 23; the micro-Raman probe 1 and the transparent pressure head 3 are fixedly connected to the base 9, the laser focus position of the micro-Raman probe 1 passes through the transparent pressure head 3 and is focused below it, the bottom protrusion of the stage 16 is located in the working area of ​​the laser interferometer probe 6, and the control unit is controlled and connected with the macro-motion unit, the micro-motion unit and the signal detection unit.

[0040] like Figures 3 to 7As shown, the relative positions of the components of the signal detection unit during the indentation test of the present invention are as follows: the micro-Raman probe 1 is located above the light-transmitting indenter 3, the laser focus position of the micro-Raman probe 1 passes through the light-transmitting indenter 3 and is focused below it, the light-transmitting indenter 3 is located above the specimen 4, the specimen 4 is located at a macroscopic position relative to the light-transmitting indenter 3 for indentation testing, the specimen 4 is fixedly placed on the stage 16, the laser interferometer probe 6 is located below the stage 16, and the relative displacement between the light-transmitting indenter 3 and the specimen 4. The laser interferometer probe 6 is located directly below the stage 16. The laser interferometer probe 6 is placed in the cylindrical through hole at the upper part of the probe fixing rod 23. The two are clearance-matched. The probe fixing screw 22 is screwed into the threaded hole at the other side through the through hole at the upper side of the probe fixing rod 23. The pressure generated after tightening causes the upper part of the probe fixing rod 23 to produce elastic deformation, thereby completely fixing the laser interferometer probe 6. The lower part of the probe fixing rod 23 is inserted into the lower part of the probe fixing rod sleeve 25. The fixing rod fixing screw 24 is screwed into the threaded hole at the lower part of the probe fixing rod sleeve 25 to completely fix the probe fixing rod 23 and the probe fixing rod sleeve 25. The probe fixing rod sleeve screw 2 6 is inserted into the through hole at the bottom of the probe fixing rod sleeve 25 and screwed into the threaded hole of the Z-axis workbench 12 to completely fix the probe fixing rod sleeve 25 and the Z-axis workbench 12. Since the relative angle between the probe fixing rod sleeve 25 and the Z-axis workbench 12 around the y-axis, the relative angle between the probe fixing rod 23 and the probe fixing rod sleeve 25 around the x-axis, and the relative position of the probe fixing rod 23 and the probe fixing rod sleeve 25 in the z-direction can be changed before being completely fixed, the laser interferometer probe 6 can be adjusted relative to the transparent pressure head 3 with three adjustment degrees of freedom in the z-direction, around the x-axis direction, and around the y-axis direction, thereby ensuring that the laser interferometer probe 6 can receive signals and work normally.

[0041] The test process is as follows: after the laser is emitted from the microscopic Raman probe 1, it passes through a section of air and enters the interior of the transparent indenter 3 made of transparent material. The upper end surface of the transparent indenter 3 should be smooth enough. Since the laser inside the transparent indenter 3 is not in a focused state and the transparent indenter material is transparent, the Raman scattered light of the excited transparent indenter material is very weak and has no effect on the subsequent process. In terms of the specimen, since its macro and micro drives are both below, the indentation test process involved in the present invention is achieved by the specimen contacting the transparent indenter upward, and the active end of the hollow force sensor 5 is placed upward. During the indentation test, the relative displacement between the transparent indenter 3 and the specimen 4 is directly collected by the laser interferometer probe 6. Therefore, the flexibility deformation of the force sensor generated during the test will not be collected by the laser interferometer probe 6, which can effectively improve the accuracy and stability of the test data.

[0042] like Figure 4As shown, the principle of the Raman in-situ characterization indentation test process involved in the present invention is: after the Raman laser emitted by the microscopic Raman probe 1 enters the transparent indenter 3 made of transparent material, it passes through the transparent indenter 3 from a specific geometric tip position below the transparent indenter. In order to obtain a better microscopic Raman characterization result, a transparent indenter type with a tiny flat tip can be selected. During the indentation test, the contact part of the specimen can also be guaranteed to be flat, so as to achieve the purpose of reflecting Raman light.

[0043] In some embodiments, the X / Y axial drive platform includes an X axial drive platform 14 and a Y axial drive platform 13, and the Y axial drive platform 13 is fixedly connected to the X axial drive platform 14. The X axial drive platform 14 is placed above the plane at the bottom of the base 9 and is fixedly connected, the Y axial drive platform 13 is placed above the X axial drive platform 14 and is fixedly connected, and the Z axial workbench 12 is placed above the Y axial drive platform 13 and is fixedly connected. Through the movement of the above three drive platforms, the components fixed on the Z axial workbench 12 can perform macroscopic movements in the three directions of x, y and z.

[0044] In some embodiments, the micro-Raman probe 1 is a conventional lens or an external optical path lead-out lens of an external micro-Raman tester. The top micro-Raman probe 1 is a part of an external instrument micro-Raman tester, and its position is basically immovable or difficult to move. It can be a conventional lens or an external optical path lead-out lens, the latter having a more open space for integrating the micro-nano indentation test component part. In order to achieve the smooth passage of Raman light through the transparent indenter 3, the transparent indenter 3 is in a fixed state, which is located directly below the micro-Raman probe 1, and the height allows the focal position of the micro-Raman laser to be sufficient to pass through the transparent indenter body and focus at least 1 micron below it.

[0045] In some embodiments, the laser interferometer probe 6 is a probe of an external laser interferometer.

[0046] In some embodiments, the probe fixing rod 23 is fixedly connected to the Z-axis workbench 12 via a probe fixing rod sleeve 25 .

[0047] In some embodiments, the light-transmitting pressure head 3 is fixedly connected to the side of the base 9 via the pressure head fixing rod 2. The light-transmitting pressure head 3 is inserted into the through hole of the pressure head fixing rod 2 and is tightened and fixed by the pressure head fixing screw 15 on the side.

[0048] In some embodiments, the hollow force sensor 5 is fixed inside the U-shaped fixing frame 7 by a set screw 19. The hollow force sensor 5 detects the pressure of the transparent pressure head 3 pressing into the material in a timely manner, and uses the detected signal as a feedback signal of the power supply of the actuator 11 to form a closed-loop control.

[0049] In some embodiments, the hollow force sensor 5 is fixed to the outside of the stage sleeve 18 by using a shaft shoulder and a flange 20. The stage sleeve 18 passes through the interior of the hollow force sensor 5 and is fixed to the flange 20 at the bottom by threads. The flange 20 and the stage sleeve 18 assembly are fixed to the interior of the hollow force sensor 5 by pressure through the flange fixing screws 21-1 and the screws 21-2.

[0050] In some embodiments, the stage 16 is fixed inside the stage sleeve 18 by means of set screws 17 .

[0051] In some embodiments, the light-transmitting indenter 3 is made of a light-transmitting material throughout, such as sapphire or other materials that can allow Raman light to pass through its axial direction.

[0052] The specific testing process of the present invention is as follows:

[0053] First, by adjusting the position of the base 9, the transparent pressure head 3 is located directly below the microscopic Raman probe 1, and by adjusting the longitudinal position of the transparent pressure head in the pressure head fixing rod 2, the Raman laser can pass through the transparent pressure head 3 and focus below it.

[0054] According to Figure 4 The position and angle of the laser interferometer probe 6 are adjusted. By loosening the probe fixing rod sleeve screw 26, the position of the probe fixing rod 23 in the z direction can be adjusted. At the same time, due to the gap between the probe fixing rod 23 and the inner wall of the probe fixing rod sleeve 25, the probe fixing rod 23 can be slightly deflected around the x direction. By loosening the probe fixing rod sleeve screw 26, the probe fixing rod sleeve 25 can be adjusted to deflect around the y direction, thereby achieving the following Figure 5 The laser interferometer probe 6 shown has adjustment freedom in three directions relative to the test piece 4, namely, in the z direction, around the x direction and around the y direction, so as to realize the feasibility of emitting and receiving laser signals.

[0055] Before the micro-nano indentation test, the test piece 4 should be single-sided ground and polished to obtain a good surface roughness, and then the polished surface of the test piece 4 should be fixed on the stage 16 with paraffin wax or the like, and the stage is fixedly connected to the force sensor 5 through its lower thread, and the X-axis driving platform 14, the Y-axis driving platform 13 and the Z-axis workbench 12 are driven to make the test piece 4 in a macro position relative to the transparent indenter 3 for indentation testing. The transparent indenter 3 and the micro Raman probe 1 are both fixed and immovable. The relative position between the transparent indenter 3 and the micro Raman probe 1 should be carefully adjusted when the base 9 is placed so that the Raman light can pass through the transparent indenter smoothly. During the indentation test, the relative macro and micro movements between the transparent indenter 3 and the test piece 4 are all achieved by the movement of the test piece side;

[0056] The input voltage of the actuator 11 is adjusted to drive the specimen 4 to move along the z direction, so as to realize the micro-nano indentation process of the specimen 4 by the transparent indenter 3. The indentation test curve is obtained by collecting data from the hollow force sensor 5 and the laser interferometer probe 6. According to the test requirements, a load holding process of about 60 seconds is performed at a specific stage of each indentation test. During this process, the micro-Raman probe 1 is turned on and the Raman acquisition and analysis process is performed. For example, a micro-nano indentation test with a maximum loading load of 100mN is performed on the single crystal silicon material. During the loading process, the load is held every 10mN, i.e., 10mN, 20mN, ..., 100mN, and a micro-Raman test is performed. During the unloading process, the load is held every 10mN, i.e., 100mN, 90mN, ..., 10mN, and a micro-Raman test is performed. In this way, the in-situ micro-Raman characterization of the indentation area during the loading and unloading processes of the micro-nano indentation test of the single crystal silicon material can be realized.

[0057] In the description of the present invention, it is necessary to understand that the terms "center", "longitudinal", "up", "down", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0058] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0059] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0060] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may change, modify, replace and vary the above embodiments within the scope of the present invention.

Claims

1. A micro-nano indentation testing device for an in-situ indentation area, characterized by: The invention comprises a macro-motion unit, a micro-motion unit, a signal detection unit and a base (9); the macro-motion unit comprises an X / Y axial drive platform and a Z axial workbench (12); the Z axial workbench (12) is fixed on the upper surface of the X / Y axial drive platform; the X / Y axial drive platform is fixedly connected to the base (9); the micro-motion unit comprises an actuator (11) and a flexible hinge (10); the actuator (11) is pre-tightened and fixed inside the flexible hinge (10); the flexible hinge (10) is fixed on the Z axial workbench (12); The signal detection unit comprises a U-shaped fixing frame (7) and a microscopic Raman probe (1), a light-transmitting pressure head (3), a hollow force sensor (5), a stage (16), a stage mounting sleeve (18) and a laser interferometer probe (6) arranged from top to bottom; the bottom of the U-shaped fixing frame (7) is fixed to the upper end of the flexible hinge (10) through a connecting block (8), the hollow force sensor (5) is fixed inside the U-shaped fixing frame (7), and the stage mounting sleeve (18) passes through the hollow force sensor (5) and fixed as one, the bottom protrusion of the stage (16) is fixed in the stage mounting sleeve (18); the laser interferometer probe (6) is connected to the Z-axis workbench through the probe fixing rod (23); the micro-Raman probe (1) and the light-transmitting pressure head (3) are fixedly connected to the base (9), the laser focus position of the micro-Raman probe (1) passes through the light-transmitting pressure head (3) and is focused below it, and the bottom protrusion of the stage (16) is located in the working area of ​​the laser interferometer probe (6).

2. The micro-nano indentation testing device for in-situ indentation area according to claim 1, characterized in that: The X / Y axial drive platform comprises an X-axial drive platform (14) and a Y-axial drive platform (13), and the Y-axial drive platform (13) is fixedly connected to the X-axial drive platform (14).

3. The micro-nano indentation testing device for in-situ indentation area according to claim 1, characterized in that: The micro-Raman probe (1) is a conventional lens or an external light path lead-out lens of an external micro-Raman tester.

4. The micro-nano indentation testing device for in-situ indentation area according to claim 1, characterized in that: The laser interferometer probe (6) is a probe of an external laser interferometer.

5. The micro-nano indentation testing device for in-situ indentation area according to claim 1, characterized in that: The probe fixing rod (23) is fixedly connected to the Z-axis workbench (12) via a probe fixing rod sleeve (25).

6. The micro-nano indentation testing device for in-situ indentation area according to claim 1, characterized in that: The light-transmitting pressure head (3) is fixedly connected to the side of the base (9) via a pressure head fixing rod (2); the light-transmitting pressure head (3) is inserted into the through hole of the pressure head fixing rod (2) and is pressed and fixed by a pressure head fixing screw (15) on the side.

7. The micro-nano indentation testing device for in-situ indentation area according to claim 1, characterized in that: The hollow force sensor (5) is fixed to the inside of the U-shaped fixing frame (7) by means of a set screw (19); the hollow force sensor (5) is fixed to the outside of the stage sleeve (18) by means of a shaft shoulder and a flange (20).

8. The micro-nano indentation testing device for in-situ indentation area according to claim 1, characterized in that: The loading platform (16) is fixed inside the loading platform sleeve (18) via a set screw (17).

9. The micro-nano indentation testing device for in-situ indentation area according to claim 1, characterized in that: The light-transmitting indenter (3) is made of sapphire or other materials that can allow Raman light to pass through its axial direction.

10. A micro-nano indentation test method for an in-situ indentation area, characterized in that: Based on the micro-nano indentation testing device for the in-situ indentation area of ​​claim 1, The steps include: First, place the light-transmitting indenter directly below the micro-Raman probe; Then adjust the position and angle of the laser interferometer probe: loosen the probe fixing rod sleeve screw to adjust the position of the probe fixing rod in the z direction. At the same time, due to the gap between the probe fixing rod and the inner wall of the probe fixing rod sleeve, the probe fixing rod is deflected around the x direction. Loosen the probe fixing rod sleeve screw to adjust the probe fixing rod sleeve to deflect around the y direction. The specimen is fixed on the stage, and the stage is fixedly connected to the force sensor through the lower thread, and the X-axis driving platform, the Y-axis driving platform and the Z-axis working table are driven to make the specimen be located at a macroscopic position relative to the transparent indenter for indentation testing; Finally, the input voltage of the actuator is adjusted to drive the specimen to move along the z direction. The transparent indenter performs micro-nano indentation test on the specimen, and the data of the hollow force sensor and the laser interferometer probe are collected to obtain the indentation test curve. At the same time, the micro-Raman probe is turned on and the Raman acquisition and analysis process is carried out.

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