An exhaust gas burner

Abstract

This invention discloses an exhaust gas burner, relating to the field of burner technology. The invention includes a base, a one-way pipe valve, an outer air duct, an exhaust gas combustion core, a combustion protection cover, and an auxiliary combustion core. The base includes a cylindrical section with vertically connected sections; a circular plate is fixed to the upper end of the cylinder; an internally threaded pipe is fixed through the center of the circular plate; a first flange is fixed to the lower end of the circular pipe; the output end of the one-way pipe valve is installed at the lower end of the internally threaded pipe inside the cylinder; the outer air duct is bolted to the upper end of the circular plate; the lower end of the exhaust gas combustion core mates with the inner wall of the outer air duct. Through the combination of the base, one-way pipe valve, outer air duct, exhaust gas combustion core, combustion protection cover, auxiliary combustion core, and igniter, the exhaust gas burns between the combustion protection cover and the auxiliary combustion core after ignition. During combustion, the auxiliary combustion core is at a high temperature, and the auxiliary combustion ring is red-hot. The combustible exhaust gas and oxygen undergo a strong oxidation reaction, effectively reducing the hazards caused by exhaust gas emissions.

Description

Technical Field

[0001] This invention belongs to the field of burner technology, and in particular relates to an exhaust gas burner. Background Technology

[0002] Waste gases emitted during semiconductor or display manufacturing processes, particularly those containing SiH4, DCS, NH3, F2, and NF3, are highly toxic, explosive, and corrosive. They are not only harmful to human health but also pose a serious environmental pollution risk if released directly into the atmosphere without purification. Legal regulations stipulate that the content of harmful components in these waste gases must not exceed permissible concentrations, requiring a harmless treatment process before release into the atmosphere. The harmless treatment of these waste gases employs various gas scrubbing devices, including combustion, humidification, adsorption, cooling, and catalytic methods. Combustion methods typically involve using heaters and ignition burners to treat the waste gases to achieve harmlessness or reduce their harmfulness.

[0003] In order to fully combust exhaust gas and utilize some of the energy from the combustion, thereby achieving the goal of energy conservation and emission reduction, this application provides an exhaust gas burner. Summary of the Invention

[0004] The purpose of this invention is to provide an exhaust gas burner, which combines a base, a one-way pipe valve, an outer air duct, an exhaust gas combustion core, a combustion protection cover, an auxiliary combustion core, and an igniter. After ignition, the exhaust gas burns between the combustion protection cover and the auxiliary combustion core. During the combustion process, the auxiliary combustion core is in a high-temperature state, and the auxiliary combustion ring is in a red-hot state. The combustible exhaust gas and oxygen undergo a strong oxidation reaction during this process, which effectively reduces the harm caused by exhaust gas emissions.

[0005] To solve the above-mentioned technical problems, the present invention is achieved through the following technical solution:

[0006] This invention relates to an exhaust gas burner, comprising a base, a one-way pipe valve, an outer air guide pipe, an exhaust gas receiving combustion core, a combustion protection cover, and a combustion-supporting core. The base includes a cylindrical section with vertically connected sections. A circular plate is fixed to the upper end of the cylindrical section. An internally threaded pipe is fixed through the center of the circular plate. A first flange is fixed to the lower end of the circular pipe. The output end of the one-way pipe valve is installed on the lower end of the internally threaded pipe inside the cylindrical section. The outer air guide pipe is bolted to the upper end of the circular plate. The lower end of the exhaust gas receiving combustion core mates with the inner wall of the outer air guide pipe, and the lower end of the exhaust gas receiving combustion core is threadedly connected to the upper end of the internally threaded pipe. The combustion-supporting core is installed on the upper end of the exhaust gas receiving combustion core. An igniter is installed through the outer wall of the upper end of the outer air guide pipe. The combustion protection cover is installed on the upper end of the outer air guide pipe and covers the outside of the combustion-supporting core.

[0007] As a preferred embodiment of the present invention, the air guide pipe includes a circular pipe; a first conical cylinder with an outwardly flared opening is fixed at the upper end of the circular pipe; the igniter is installed through the wall of the first conical cylinder; an air inlet pipe is fixed through the middle of the circular pipe; a second flange that connects and cooperates with the base is fixed at the lower end of the circular pipe; and a third flange that connects and cooperates with the combustion protection cover is fixed at the upper end of the first conical cylinder.

[0008] As a preferred embodiment of the present invention, the exhaust gas combustion core includes a gas guide tube; an external thread is formed on the outer wall of the lower end of the gas guide tube; a plurality of annular plates that mate with the inner wall of the tube are fixed to the lower end of the gas guide tube; a second cone with an outwardly flared opening is fixed to the upper end of the gas guide tube; a plurality of air outlet holes are formed on the circumferential side of the second cone; a top sealing plate is fixed to the upper end of the second cone; and a coaxially arranged connecting stud is fixed to the upper end of the top sealing plate.

[0009] As a preferred embodiment of the present invention, the combustion protection cover includes a fourth flange that is connected and fitted with the third flange; a protective outer cylinder is fixedly and coaxially disposed on the upper end of the fourth flange; a frustum-shaped protective cover is fixed to the upper end of the outer cylinder; and an exhaust pipe is fixed to the upper end of the frustum-shaped protective cover.

[0010] As a preferred embodiment of the present invention, an annular water tank is fixed between the lower outer wall of the protective outer cylinder and the outer wall of the exhaust pipe; an inlet pipe is fixedly inserted through the lower outer wall of the annular water tank; and an outlet pipe is fixedly inserted through the upper outer wall of the annular water tank.

[0011] As a preferred embodiment of the present invention, the combustion-supporting inner core includes a solid cylinder; the upper end of the solid cylinder is configured as a frustum structure; and the lower end of the solid cylinder has an internal threaded hole that mates with the connecting stud.

[0012] As a preferred embodiment of the present invention, a plurality of combustion-supporting ring plates are fixed to the lower circumferential side of the solid cylinder; a plurality of flame-passing holes are evenly distributed on the combustion-supporting ring plates.

[0013] As a preferred embodiment of the present invention, multiple columns are fixed on the upper surface of the annular water tank, and rainproof cone covers are installed on the multiple columns; a spiral guide plate is fixed on the inner wall of the annular water tank.

[0014] The present invention has the following beneficial effects:

[0015] 1. This invention combines a base, a one-way pipe valve, an outer air duct, a combustion core for receiving waste gas, a combustion protection cover, a combustion-supporting core, and an igniter. Waste gas and compressed air are mixed at the bottom. After ignition, the waste gas burns between the combustion protection cover and the combustion-supporting core. During the combustion process, the combustion-supporting core is in a high-temperature state, and the combustion-supporting ring plate is in a red-hot state. Combustible waste gas and oxygen undergo a strong oxidation reaction, generating harmless or low-hazard waste gas that is discharged, effectively reducing the harm caused by waste gas emissions.

[0016] 2. The base, one-way pipe valve, air guide pipe, exhaust gas combustion core, combustion protection cover, combustion aid core and igniter of this invention are assembled by splicing and installing multiple parts, resulting in low overall production and maintenance costs, making it suitable for widespread use.

[0017] 3. The combustion protection cover of this invention can heat the water in the annular water tank by using the heat of the outer cylinder while ensuring the combustion of internal exhaust gas. Water is continuously supplied through the inlet pipe and hot water is continuously output through the outlet pipe, realizing the energy utilization during exhaust gas combustion and increasing the economic value of exhaust gas treatment.

[0018] Of course, any product implementing this invention does not necessarily need to achieve all of the advantages described above at the same time. Attached Figure Description

[0019] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the structure of an exhaust gas burner according to the present invention.

[0021] Figure 2 This is a schematic diagram of the axial cross-section of the present invention.

[0022] Figure 3 This is a schematic diagram of the base structure.

[0023] Figure 4 This is a schematic diagram of the external air duct structure.

[0024] Figure 5 A schematic diagram of the structure of the combustion core for receiving exhaust gas.

[0025] Figure 6 This is a schematic diagram of the combustion protection shield.

[0026] Figure 7 This is a schematic diagram of the combustion-supporting inner core.

[0027] The attached diagram lists the components represented by each number as follows:

[0028] 1-Base, 2-One-way pipe valve, 3-Outer air guide pipe, 4-Inner core for exhaust gas combustion, 5-Combustion protection cover, 6-Inner core for combustion, 7-Igniter, 11-Cylinder, 12-Circular plate, 13-Internal threaded pipe, 14-First flange, 31-Circular pipe, 32-First conical cylinder, 33-Air inlet pipe, 34-Second flange, 35-Third flange, 41-Air guide circular pipe, 42-External thread, 43-Circular ring plate, 44-Second conical cylinder, 45-Air outlet, 46-Top sealing plate, 47-Connecting stud, 51-Fourth flange, 52-Protective outer cylinder, 53-Frustum protective cover, 54-Exhaust pipe, 55-Annular water tank, 56-Water inlet pipe, 57-Water outlet pipe, 61-Solid cylinder, 62-Internal threaded hole, 63-Combustion ring plate, 64-Flame passage hole. Detailed Implementation

[0029] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention. Specific Implementation Example 1:

[0031] Please see Figure 1-3 As shown, the present invention is an exhaust gas burner, including a base 1, a one-way pipe valve 2, an outer air guide pipe 3, an exhaust gas combustion core 4, a combustion protection cover 5, and a combustion-supporting core 6. The base 1 includes a cylindrical tube 11 with vertically connected components. A circular plate 12 is fixed to the upper end of the cylindrical tube 11. An internally threaded pipe 13 is fixed through the center of the circular plate 12. A first flange 14 is fixed to the lower end of the circular tube 11. The output end of the one-way pipe valve 2 is installed at the lower end of the internally threaded pipe 13 inside the cylindrical tube 11. The outer air guide pipe 3 is installed on the upper end of the circular plate 12 by bolts. The lower end of the exhaust gas combustion core 4 is fitted with the inner wall of the outer air guide pipe 3, and the lower end of the exhaust gas combustion core 4 is threadedly connected to the upper end of the internally threaded pipe 13. The combustion-supporting core 6 is installed on the upper end of the exhaust gas combustion core 4. An igniter 7 is installed through the outer wall of the upper end of the outer air guide pipe 3. The combustion protection cover 5 is installed on the upper end of the outer air guide pipe 3 and covers the outside of the combustion-supporting core 6.

[0032] like Figure 4 As shown, the air guide pipe 3 includes a circular pipe 31; a first conical cylinder 32 with an outwardly flared opening is fixed at the upper end of the circular pipe 31; an igniter 7 is installed through the wall of the first conical cylinder 32; an air inlet pipe 33 is fixed through the middle of the circular pipe 31; a second flange 34 that connects and cooperates with the base 1 is fixed at the lower end of the circular pipe 31; and a third flange 35 that connects and cooperates with the combustion protection cover 5 is fixed at the upper end of the first conical cylinder 32.

[0033] like Figure 5 As shown, the exhaust gas combustion core 4 includes a gas guide tube 41; an external thread 42 is opened on the outer wall of the lower end of the gas guide tube 41; several annular plates 43 that mate with the inner wall of the tube 31 are fixed at the lower end of the gas guide tube 41; a second cone 44 with an outwardly flared opening is fixed at the upper end of the gas guide tube 41; several air outlet holes 45 are opened on the circumferential side of the second cone 44; a top sealing plate 46 is fixed at the upper end of the second cone 44; and a coaxial connecting stud 47 is fixed at the upper end of the top sealing plate 46.

[0034] like Figure 2 and Figure 6 As shown, the combustion protection cover 5 includes a fourth flange 51 that is connected and fitted with the third flange 35; a protective outer cylinder 52 coaxially fixed to the upper end of the fourth flange 51; a frustum-shaped protective cover 53 fixed to the upper end of the outer cylinder 52; an exhaust pipe 54 fixed to the upper end of the frustum-shaped protective cover 53; an annular water tank 55 fixed between the lower outer wall of the protective outer cylinder 52 and the outer wall of the exhaust pipe 54; an inlet pipe 56 fixed through the lower outer wall of the annular water tank 55; and an outlet pipe 57 fixed through the upper outer wall of the annular water tank 55. While ensuring the combustion of internal exhaust gases, the combustion protection cover 5 can also utilize the heat from the protective outer cylinder 52 to heat the water in the annular water tank 55. Water is continuously supplied through the inlet pipe 56 and hot water is continuously output through the outlet pipe 57, realizing energy utilization during exhaust gas combustion and increasing the economic value of exhaust gas treatment.

[0035] like Figure 7 As shown, the combustion-supporting core 6 includes a solid cylinder 61; the upper end of the solid cylinder 61 is configured as a frustum structure; the lower end of the solid cylinder 61 has an internally threaded hole 62 that mates with the connecting stud 47; multiple combustion-supporting ring plates 63 are fixed to the circumferential side of the lower end of the solid cylinder 61; several flame-passing holes 64 are evenly distributed on the combustion-supporting ring plates 63. The combustion-supporting core 6 is continuously heated during the combustion of the exhaust gas. The high heat of the solid cylinder 61 is beneficial for promoting the oxidation reactions of Si, H4, DCS, NH3, F2, NF3, etc. in the exhaust gas. The two combustion-supporting ring plates 63 at the lower end of the solid cylinder 61 remain in a red-hot state during combustion. The flame passes through the flame-passing holes 64 on the red-hot combustion-supporting ring plates 63, allowing the combustible exhaust gas to react strongly with oxygen during this process.

[0036] Multiple columns are fixed to the upper surface of the annular water tank 55, and rainproof cones are installed on the columns; a spiral guide plate is fixed to the inner wall of the annular water tank 55. The installation of the rainproof cones prevents heavy rainfall from flowing back into the exhaust pipe 54 and affecting the burner.

[0037] A specific application of this embodiment is as follows: The base 1 is stably installed outdoors by bolts. The exhaust gas is connected to the inlet end of the one-way valve 2 via a pressurized exhaust pipe. The air inlet pipe 33 of the outer air duct 3 is connected to the compressed gas. The exhaust gas combustion core 4 is connected to the outlet end of the one-way valve 2 via an internal threaded pipe 13 to transport the exhaust gas to the bottom of the combustion core 6. The exhaust gas is sprayed out from the outlet hole 45 and ignited by the igniter 7. Compressed air enters the middle of the outer air duct 3 and converges with the combustible exhaust gas at the upper end of the outer air duct 3, increasing the intake volume. The flame-through hole 64 on the combustion ring plate 63 in the red-hot state passes through it. The two combustion ring plates 63 are always in a red-hot state during the combustion process. The combustible exhaust gas and oxygen undergo a strong oxidation reaction during this process. The combustion core 6 is continuously heated during the combustion of the exhaust gas. The high-heat solid cylinder 61 is conducive to promoting the oxidation reaction of exhaust gas SiH4, DCS, NH3, F2, NF3, etc.

[0038] In the description of this specification, references to terms such as "an embodiment," "example," "specific example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0039] The preferred embodiments of the present invention disclosed above are merely illustrative of the invention. These preferred embodiments do not exhaustively describe all details, nor do they limit the invention to the specific implementations described. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the invention, thereby enabling those skilled in the art to better understand and utilize the invention. The invention is limited only by the claims and their full scope and equivalents.

Claims

1. A waste gas burner, comprising a base (1) and a one-way pipe valve (2), characterized in that: It also includes an outer air duct (3), an inner core for receiving exhaust gas combustion (4), a combustion protection cover (5), and an inner core for assisting combustion (6); The base (1) includes a cylindrical tube (11) that is open at the top and bottom; a circular plate (12) is fixed at the upper end of the cylindrical tube (11); an internally threaded pipe (13) is fixed through the center of the circular plate (12); and a first flange (14) is fixed at the lower end of the cylindrical tube (11). The output end of the one-way pipe valve (2) is installed at the lower end of the internally threaded pipe (13) inside the cylinder (11); The air guide pipe (3) is installed on the upper end of the circular plate (12) by bolts; The lower end of the exhaust gas combustion core (4) is fitted with the inner wall of the air guide pipe (3), and the lower end of the exhaust gas combustion core (4) is threadedly connected to the upper end of the internal threaded pipe (13). The combustion-supporting inner core (6) is installed at the upper end of the exhaust gas combustion inner core (4); An igniter (7) is installed through the outer wall of the upper end of the air guide pipe (3). The combustion protection cover (5) is installed on the upper end of the air guide pipe (3) and covers the outside of the combustion-supporting inner core (6); The air guide pipe (3) includes a circular pipe (31); the upper end of the circular pipe (31) is fixed with a first conical cylinder (32) that flares outward; the igniter (7) is installed through the wall of the first conical cylinder (32); the middle part of the circular pipe (31) is fixed with an air inlet pipe (33); the lower end of the circular pipe (31) is fixed with a second flange (34) that connects and cooperates with the base (1); the upper end of the first conical cylinder (32) is fixed with a third flange (35) that connects and cooperates with the combustion protection cover (5); The exhaust gas combustion core (4) includes a gas guide tube (41); the lower end of the gas guide tube (41) has an external thread (42) on its outer wall; the lower end of the gas guide tube (41) is fixed with several annular plates (43) that mate with the inner wall of the tube (31); the upper end of the gas guide tube (41) is fixed with a second cone (44) that flares outward; several air outlets (45) are opened on the circumferential side of the second cone (44); the upper end of the second cone (44) is fixed with a top sealing plate (46); the upper end of the top sealing plate (46) is fixed with a coaxially arranged connecting stud (47). The combustion protection cover (5) includes a fourth flange (51) that is connected and cooperates with the third flange (35); a protective outer cylinder (52) is fixed coaxially at the upper end of the fourth flange (51); a frustum-shaped protective cover (53) is fixed at the upper end of the protective outer cylinder (52); and an exhaust pipe (54) is fixed at the upper end of the frustum-shaped protective cover (53). An annular water tank (55) is fixed between the lower outer wall of the protective outer cylinder (52) and the outer wall of the exhaust pipe (54); an inlet pipe (56) is fixed through the lower outer wall of the annular water tank (55); and an outlet pipe (57) is fixed through the upper outer wall of the annular water tank (55).

2. The exhaust gas burner according to claim 1, characterized in that, The combustion-supporting inner core (6) includes a solid cylinder (61); the upper end of the solid cylinder (61) is configured as a frustum structure; the lower end of the solid cylinder (61) is provided with an internal threaded hole (62) that mates with the connecting stud (47).

3. The exhaust gas burner according to claim 2, characterized in that, Multiple combustion-supporting ring plates (63) are fixed to the lower circumferential side of the solid cylinder (61); several flame-passing holes (64) are evenly distributed on the combustion-supporting ring plates (63).

4. The exhaust gas burner according to claim 3, characterized in that, Multiple columns are fixed on the upper surface of the annular water tank (55), and rainproof cone covers are installed on the multiple columns; a spiral guide plate is fixed on the inner wall of the annular water tank (55).

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