A laser automatic testing device with grading and process sampling and a method of using the same

Abstract

The application relates to a laser automatic testing device with grading and process sampling and a use method thereof. The device comprises a feeding system and a discharging system arranged on the upper surface of a work platform, a testing turntable, a testing system and a transverse sliding arm, the feeding system and the discharging system are arranged on the two sides of the testing turntable, the upper surface of the testing turntable is provided with a testing seat, and the testing system is arranged directly above the testing seat. The application realizes automatic testing of semiconductor lasers, carries out sampling during the testing process, places the tested lasers in a product area to be sampled, and automatically tests, classifies and samples the products to be sampled again, so that the process sampling and the production testing are mutually monitored, manual sampling after the testing is not needed, work efficiency is improved, and the problem that sampling equipment cannot accurately monitor the precision of automatic equipment and the mutual calibration of the testing equipment is solved.

Description

TECHNICAL FIELD

[0001] The application relates to a laser automatic testing device with grading and process sampling and a use method thereof, and belongs to the technical field of semiconductor laser testing and sampling. BACKGROUND

[0002] After decades of development, the semiconductor laser is more and more known by the society, and has been applied in many fields. The photoelectric conversion efficiency of the semiconductor laser is more than 60%, which is much higher than that of other similar products. The semiconductor laser has the advantages of low energy consumption, less heat accumulation in the device, long service life, good collimation, long illumination distance and the like, and is widely used as a new technology in the society. The various advantages of the semiconductor laser determine that it is more and more highly valued by the society.

[0003] The semiconductor laser needs to go through multiple production processes before it can be shaped and put into use. After the semiconductor laser is packaged, in order to ensure the quality, speed, stability and compatibility of the semiconductor laser in use and other related problems, detection work is usually performed to eliminate defective semiconductor lasers, and the tested semiconductor lasers are classified and processed.

[0004] At present, in the field of semiconductor lasers, the test items of the semiconductor laser mainly include the power and the wavelength of the spectrum after the product is powered on. At present, the testing and classification of the semiconductor laser are mainly carried out in a manual mode. The semiconductor laser is manually installed on a special socket, and then manually powered on for testing. The test result on the display screen is used to judge the good grade of the semiconductor laser. The tested product is put into different product boxes according to the good grade, so as to achieve the purpose of classification. The manual testing mode is too low in efficiency, and the wavelength and power of the product need to be tested separately. In the testing process, the product is mainly observed and judged by the naked eye, which is bound to have deviations. At the same time, manual testing inevitably causes pollution to the product, affecting the quality of the product.

[0005] Chinese patent document CN110856845A relates to an automatic testing and classification system for semiconductor lasers and its application. The automatic testing and classification system for semiconductor lasers comprises a feeding system, a testing turntable, a classification system and a transverse sliding arm. The operation process is as follows: first, the semiconductor laser to be tested is placed in the standby position of the feeding system, then the semiconductor laser to be tested is sequentially moved to the testing turntable for testing to ensure that the semiconductor laser functions normally and can operate, and after the testing of the semiconductor laser to be tested is completed, the semiconductor laser to be tested is classified according to the product grade set by the system and placed in the classification system for the next process. However, this patent can only perform normal production testing and grading according to the process. If the parameters of a certain device deviate, the grading of product wavelength, power, etc. is inaccurate and cannot be determined in time. Only manual sampling inspection can be performed after grading, and the manual sampling inspection method is inefficient and discontinuous. By the time the manual sampling inspection is performed, multiple batches of products have been tested. The machine needs to be re-adjusted for re-testing, which is very time-consuming. Moreover, the operation methods of different inspectors are different, which affects the measurement accuracy and is extremely slow.

[0006] Therefore, it is necessary to develop a laser automatic testing device that combines grading and process sampling. SUMMARY

[0007] In view of the deficiencies of the prior art, the present application provides a laser automatic testing device that combines grading and process sampling and its use method. The device provided by the present application can perform testing and grading simultaneously and separate the process sampling samples, which is convenient and fast, can meet the production requirements, and can also consider process inspection and monitor the quality consistency of products.

[0008] The technical solutions of the present application are as follows:

[0009] A laser automatic testing device that combines grading and process sampling comprises a feeding system, a discharging system, a testing turntable, a testing system and a transverse sliding arm arranged on the upper surface of a work platform. The feeding system and the discharging system are arranged on the two sides of the testing turntable. The upper surface of the testing turntable is provided with a testing seat. The testing system is arranged directly above the testing seat.

[0010] The feeding system comprises a feeding disc and a feeding suction nozzle arranged directly above the feeding disc. The discharging system comprises a discharging disc and a discharging suction nozzle arranged directly above the discharging disc. The feeding disc and the discharging disc are respectively arranged on the upper surface of the work platform through front and rear direction sliding rails. The surfaces of the feeding disc and the discharging disc are both provided with grooves.

[0011] The testing system comprises an integrating sphere. A spectrometer is arranged above the integrating sphere, and a power meter is arranged on the side surface. The spectrometer is connected with a control computer. The power meter is connected with a power supply. The power supply is connected with the control computer.

[0012] According to the application, preferably, 3-4 testing seats are evenly arranged on the circumference of the upper surface of the testing turntable.

[0013] According to the application, preferably, 4 rows of grooves are arranged on the upper feeding disc and the lower feeding disc respectively.

[0014] According to the application, preferably, 1-3 rows of grooves of the lower feeding disc are normal testing grading areas, and the 4th row of grooves is a sampling product area.

[0015] According to the application, preferably, the testing turntable is driven by a driving motor.

[0016] According to the application, preferably, the upper feeding suction nozzle and the lower feeding suction nozzle are slidably arranged on the transverse sliding arm through the vertically arranged upper feeding sliding arm and the lower feeding sliding arm respectively; and the upper feeding suction nozzle and the lower feeding suction nozzle are slidably arranged on the upper feeding sliding arm and the lower feeding sliding arm respectively.

[0017] According to the application, preferably, the transverse sliding arm is provided with an upper feeding x-axis motor and a lower feeding x-axis motor for sliding the upper feeding sliding arm and the lower feeding sliding arm along the left-right direction respectively; the upper feeding sliding arm and the lower feeding sliding arm are respectively provided with an upper feeding z-axis motor and a lower feeding z-axis motor for sliding the upper feeding suction nozzle and the lower feeding suction nozzle along the vertical direction; and the upper surface of the working platform is provided with an upper feeding y-axis motor and a lower feeding y-axis motor for sliding the upper feeding disc and the lower feeding disc along the front-back direction.

[0018] The above-mentioned method for using the laser automatic testing device with grading and sampling functions comprises the following steps:

[0019] (1) Turn on the power supply and the control computer, set the feeding box containing the laser to be tested in the groove of the upper feeding disc, place the empty feeding box with the grade and sampling marks on the lower feeding disc, turn on the testing software to set the normal grading test current and voltage, and increase the sampling sample size rule in the program;

[0020] (2) The upper feeding y-axis motor and the upper feeding x-axis motor work in cooperation to move the laser to be tested to the position directly below the upper feeding suction nozzle; the upper feeding z-axis motor works to control the upper feeding suction nozzle to move vertically downward to the upper surface of the laser to be tested, and the upper feeding suction nozzle sucks the laser to be tested through vacuum adsorption; the upper feeding z-axis motor and the upper feeding x-axis motor work in sequence to move the laser to be tested to the position above the testing turntable and close to the upper feeding system on one side;

[0021] (3) After the to-be-tested laser reaches above the test turntable, the test turntable rotates to make the test base reach directly below the feeding suction nozzle; then, the feeding z-axis motor operates to control the feeding suction nozzle to move vertically downward, and the to-be-tested laser is placed on the upper surface of the test base; the vacuum of the feeding suction nozzle is cancelled, the to-be-tested laser falls on the test base, the feeding z-axis motor controls the feeding suction nozzle to move away from the test base, and the feeding x-axis motor controls the feeding suction nozzle to return to the feeding system;

[0022] (4) The to-be-tested laser is tested by the test system on the test base to collect data and determine the grade of the laser; the test turntable rotates to move the tested laser to the side close to the discharging disc; the discharging x-axis motor and the discharging z-axis motor operate in sequence to move the discharging suction nozzle to the upper surface of the laser, and the discharging suction nozzle sucks the laser by vacuum adsorption; the discharging z-axis motor and the discharging x-axis motor operate in sequence to carry the laser to the upper surface of the discharging disc; the discharging y-axis motor operates to determine the grade according to the performance parameters of the laser, and then the laser reaching the qualified grade is placed above the empty storage box of the corresponding grade and area on the discharging disc according to the sampling inspection sample quantity rule; the vacuum of the discharging suction nozzle is cancelled, and the laser falls into the empty storage box of the corresponding grade and area;

[0023] (5) After the test is completed, the sampled products separated in step (1) to step (4) are tested again, and the measurement error is less than 1%, and then the products are determined to be qualified, otherwise the products are determined to be unqualified.

[0024] According to the application, in step (1), the sampling inspection sample quantity rule is that when the input number is less than 150, the laser reaching the qualified grade is placed in the normal test grading area and the sampling product area according to 1:1; when 151 is less than or equal to the input number and is less than or equal to 1200, the laser reaching the qualified grade is placed in the normal test grading area and the sampling product area according to 4:1; when 1201 is less than or equal to the input number and is less than or equal to 10000, the laser reaching the qualified grade is placed in the normal test grading area and the sampling product area according to 9:1; when the input number is greater than or equal to 10000, the laser reaching the qualified grade is placed in the normal test grading area and the sampling product area according to 19:1; when the qualified grade laser placed in the sampling product area is less than the standard in the AQL sampling inspection plan table after the proportional distribution, the sampling is performed according to the AQL sampling inspection plan table.

[0025] In the application, the test completed by the laser on the test base includes power test and spectral wavelength test. The test software is the existing software, which can give the grade of the laser according to the performance parameters of the laser, and the discharging suction nozzle places the laser in the corresponding empty storage box according to the grade of the laser.

[0026] The application has the following beneficial effects:

[0027] 1. The laser automatic testing device with grading and process sampling provided by the application realizes automatic testing of semiconductor lasers, and sampling is performed through a testing system during the testing process. According to sampling sample size rules, the spectral line intensity at different wavelength positions and the emitted optical power of the laser are measured by a spectrometer, an integrating sphere and a power meter. The tested lasers are placed in a normal testing grading area and a product area to be sampled, respectively. After the production batch number ends, the products to be sampled are tested again to classify them, i.e., testing is performed against a standard, so as to achieve the purpose of mutual monitoring of process sampling and production testing. The device does not need to continue manual sampling after testing, improves work efficiency, and overcomes the problem that sampling equipment cannot accurately monitor the precision of automatic equipment and the alignment between testing equipment.

[0028] 2. The laser automatic testing device with grading and process sampling and the use method thereof provided by the application have high testing precision and speed, avoid pollution of products caused by manual testing, realize automatic testing grading of semiconductor lasers and grading of products in the process of sampling, solve the problems of slow manual sampling and low precision, and improve product consistency.

[0029] 3. Compared with the prior art, the application has obvious advantages. After the sampling product placement area is added, the device can automatically separate the qualified lasers according to the sampling sample size rules, and human factor interference is reduced. Meanwhile, the efficiency of the laser automatic testing device with grading and process sampling provided by the application is about 2.5 times the efficiency of grading + manual sampling using the prior art, and product testing and alignment between equipment can be performed in time. If deviation occurs, it can be analyzed and solved in time, the re-sampling rework time caused by equipment fluctuation is reduced, and production efficiency is further improved. BRIEF DESCRIPTION OF DRAWINGS

[0030] Figure 1 FIG. 1 is a structural schematic diagram of the laser automatic testing grading and process sampling combination device according to the application.

[0031] Figure 2 FIG. 4 is an enlarged schematic diagram of the feeding disc according to the application.

[0032] Figure 3 FIG. 5 is an enlarged schematic diagram of the testing system according to the application.

[0033] In the figure: 1. Loading tray; 2. Unloading tray; 3. Test turntable; 4. Test base; 5. Loading nozzle; 6. Unloading nozzle; 7. Groove; 8. Loading y-axis motor; 9. Unloading y-axis motor; 10. Loading z-axis motor; 11. Unloading z-axis motor; 12. Loading x-axis motor; 13. Unloading x-axis motor; 14. Loading sliding arm; 15. Horizontal sliding arm; 16. Unloading sliding arm; 17. Test system; 18. Normal test grading area; 19. Product sampling area; 20. Spectrometer; 21. Power meter; 22. Integrating sphere. DETAILED DESCRIPTION

[0034] The present invention will be further described below with reference to the embodiments and drawings, but is not limited thereto.

[0035] Example 1

[0036] like Figures 1-3 As shown, a laser automatic testing device with both grading and process sampling functions includes a loading system, an unloading system, a test turntable 3, a test system 17, and a transverse sliding arm 15 arranged on the upper surface of a work platform. The loading system and the unloading system are arranged on both sides of the test turntable 3. A test base 4 is arranged on the upper surface of the test turntable 3, and the test system 17 is arranged directly above the test base 4.

[0037] The loading system includes a loading tray 1 and a loading nozzle 5 arranged directly above the loading tray 1, and the unloading system includes a unloading tray 2 and a unloading nozzle 6 arranged directly above the unloading tray 2; the loading tray 1 and the unloading tray 2 are respectively slidably arranged on the upper surface of the working platform through slide rails in the front and rear directions; the surfaces of the loading tray 1 and the unloading tray 2 are both provided with grooves 7;

[0038] The test system includes an integrating sphere 22 , a spectrometer 20 is arranged above the integrating sphere, and a power meter 21 is arranged on the side. The spectrometer 20 is connected to a power supply, and the power supply is connected to a control computer.

[0039] Four test seats 4 are evenly arranged on the circumference of the upper surface of the test turntable 3 .

[0040] The upper material tray 1 and the lower material tray 2 are respectively provided with 4 rows of grooves. The 1st to 3rd rows of grooves 7 of the lower material tray 2 are normal test bins 18, and the 4th row of grooves 7 is a sampling product area 19. The test turntable 3 is driven by a drive motor.

[0041] The loading suction nozzle 5 and the unloading suction nozzle 6 are respectively slidably set on the horizontal sliding arm 15 through the vertically set loading sliding arm 14 and the unloading sliding arm 16; the loading suction nozzle 5 and the unloading suction nozzle 6 are respectively slidably set on the loading sliding arm 14 and the unloading sliding arm 16.

[0042] The transverse sliding arm 15 is provided with an upper feeding x-axis motor 12 and a lower feeding x-axis motor 13 for sliding the upper feeding sliding arm 14 and the lower feeding sliding arm 16 along the left-right direction respectively; the upper feeding sliding arm 14 and the lower feeding sliding arm 16 are respectively provided with an upper feeding z-axis motor 10 and a lower feeding z-axis motor 11 for sliding the upper feeding nozzle 5 and the lower feeding nozzle 6 along the vertical direction; the upper surface of the working platform is provided with an upper feeding y-axis motor 8 and a lower feeding y-axis motor 9 for sliding the upper feeding disc 1 and the lower feeding disc 2 along the front-back direction.

[0043] Embodiment 2

[0044] A method for automatically testing and classifying semiconductor lasers and process sampling by using the device of embodiment 1, comprising the following steps:

[0045] (1) Turn on the power supply and control computer, set the magazine containing the laser to be tested in the groove of the upper feeding disc, place the empty magazine with gear and sampling identification on the lower feeding disc, open the test software to set the normal test current and voltage, and increase the sampling sample size rule in the program;

[0046] The sampling sample size rule is: when the number of input is less than 150, the tested lasers are placed in the normal test grading area and the sampling product area according to the ratio of 1:1; when 151≤input number≤1200, the tested lasers are placed in the normal test grading area and the sampling product area according to the ratio of 4:1; when 1201≤input number≤10000, the tested lasers are placed in the normal test grading area and the sampling product area according to the ratio of 9:1; when the number of input is greater than or equal to 10000, the tested lasers are placed in the normal test grading area and the sampling product area according to the ratio of 19:1; when the number of qualified lasers in the sampling product area is less than the standard in the AQL sampling inspection plan after the proportional distribution, sampling is carried out according to the AQL sampling inspection plan;

[0047] (2) The upper feeding y-axis motor and the upper feeding x-axis motor work together to move the laser to be tested to the position directly below the upper feeding nozzle; the upper feeding z-axis motor works to control the upper feeding nozzle to move vertically downward to the upper surface of the laser to be tested, and the upper feeding nozzle absorbs the laser to be tested by vacuum adsorption; the upper feeding z-axis motor and the upper feeding x-axis motor work in turn to move the laser to be tested to the side near the upper feeding system above the test turntable;

[0048] (3) After the to-be-tested laser reaches above the test turntable, the test turntable rotates to make the test seat reach directly below the feeding suction nozzle; then, the feeding z-axis motor is actuated to control the feeding suction nozzle to move vertically downward to place the to-be-tested laser on the upper surface of the test seat; the vacuum of the feeding suction nozzle is cancelled, the to-be-tested laser falls on the test seat, the feeding z-axis motor controls the feeding suction nozzle to move away from the test seat, and the feeding x-axis motor controls the feeding suction nozzle to return to the feeding system;

[0049] (4) The to-be-tested laser is tested by the test system on the test seat to collect data and determine the grade of the laser; the test turntable rotates to move the tested laser to the side close to the discharging disc; the discharging x-axis motor and the discharging z-axis motor are sequentially actuated to move the discharging suction nozzle to the upper surface of the laser, the discharging suction nozzle sucks the laser by vacuum adsorption; the discharging z-axis motor and the discharging x-axis motor are sequentially actuated to carry the laser to the upper surface of the discharging disc; the discharging y-axis motor is actuated to determine the grade according to the performance parameters of the laser, and then the laser reaching the qualified grade is placed above the empty box in the corresponding grade and area on the discharging disc according to the sampling rule; the vacuum of the discharging suction nozzle is cancelled, and the laser falls into the empty box in the corresponding grade and area;

[0050] (5) After the test is completed, the sampled products separated are tested again according to steps (1)-(4), and the measurement error is less than 1%, and then the products are determined to be qualified, otherwise the products are determined to be unqualified.

[0051] Test example

[0052] The device provided in Example 1 is used to automatically test and sample 200 lasers according to the method provided in Example 2.

[0053] The device and method provided in Chinese patent document CN110856845A Automatic testing and classification system for semiconductor lasers and application thereof are used to automatically test and manually sample 200 lasers.

[0054] The results are shown in Table 1.

[0055] Table 1

[0056] Subdivision + sampling time (min) Consistency (%) The present invention 20 99％ Comparative patent 50 92％

[0057] As shown in Table 1, compared with the comparative patent, the present application has obvious advantages, that is, after adding the sampling product placement area, the device can automatically separate the laser reaching the qualified grade according to the sampling rule, and the human factor interference is reduced. The efficiency of the laser automatic testing device with grading and process sampling in the present application is 2.5 times that of the comparative patent with grading and manual sampling, and product inspection and comparison between devices can be performed in time, and if there is a deviation, it can be analyzed and solved in time, the re-sampling rework time caused by device fluctuation is reduced, and the production efficiency is further improved.

Claims

1. A method for using a laser automatic testing device with both grading and process sampling, characterized in that: The laser automatic testing device with both grading and process sampling functions includes a loading system, an unloading system, a test turntable, a test system, and a transverse sliding arm arranged on the upper surface of a work platform. The loading system and the unloading system are arranged on both sides of the test turntable. A test base is arranged on the upper surface of the test turntable, and the test system is arranged directly above the test base. The loading system includes a loading tray and a loading nozzle arranged directly above the loading tray, and the unloading system includes a unloading tray and a unloading nozzle arranged directly above the unloading tray; the loading tray and the unloading tray are respectively slidably arranged on the upper surface of the working platform through slide rails in the front and rear directions; the surfaces of the loading tray and the unloading tray are both provided with grooves; The test system includes an integrating sphere, a spectrometer is provided above the integrating sphere, a power meter is provided on the side, the spectrometer is connected to a control computer, the power meter is connected to a power supply, and the power supply is connected to the control computer; The loading tray and the unloading tray are respectively provided with 4 rows of grooves; the 1st to 3rd rows of grooves of the unloading tray are normal test bins, and the 4th row of grooves is a sampling product area; The loading suction nozzle and the unloading suction nozzle are respectively slidably arranged on the horizontal sliding arm through the vertical loading sliding arm and the unloading sliding arm; the loading suction nozzle and the unloading suction nozzle are respectively slidably arranged on the loading sliding arm and the unloading sliding arm; The horizontal sliding arm is provided with a loading x-axis motor and a unloading x-axis motor for respectively sliding the loading sliding arm and the unloading sliding arm in the left and right directions; the loading sliding arm and the unloading sliding arm are respectively provided with a loading z-axis motor and a unloading z-axis motor for respectively sliding the loading suction nozzle and the unloading suction nozzle in the vertical direction; the upper surface of the working platform is provided with a loading y-axis motor and a unloading y-axis motor for sliding the loading tray and the unloading tray in the front and rear directions; The method for using the laser automatic testing device with both grading and process sampling includes the following steps: (1) Turn on the power of the equipment and the control computer, place the material box containing the laser to be tested in the groove of the loading tray, place the empty material box with the gear position and the mark to be sampled on the unloading tray, open the test software to set the normal grading test current and voltage, and add the sampling sample size rule in the program; (2) The loading y-axis motor and the loading x-axis motor work together to move the laser to be tested to the bottom of the loading nozzle; the loading z-axis motor works to control the loading nozzle to move vertically downward to the upper surface of the laser to be tested, and the loading nozzle absorbs the laser to be tested through vacuum adsorption; the loading z-axis motor and the loading x-axis motor work in sequence, and the loading nozzle moves the laser to be tested to the side above the test turntable close to the loading system; (3) After the laser to be tested reaches the top of the test turntable, the test turntable rotates so that the test base reaches directly below the loading nozzle; then, the loading z-axis motor is activated to control the loading nozzle to move vertically downward, placing the laser to be tested on the upper surface of the test base; the vacuum of the loading nozzle is canceled, and the laser to be tested falls on the test base. The loading z-axis motor controls the loading nozzle to leave the test base, and the loading x-axis motor controls the loading nozzle to return to the loading system; (4) The laser to be tested is tested on the test seat through the test system to collect data and determine the laser gear position; the test turntable rotates to move the tested laser to the side close to the unloading tray; the unloading x-axis motor and the unloading z-axis motor are operated in sequence to move the unloading nozzle to the upper surface of the laser, and the unloading nozzle absorbs the laser through vacuum adsorption; the unloading z-axis motor and the unloading x-axis motor are operated in sequence to transport the laser to the upper surface of the unloading tray; the unloading y-axis motor is operated to determine the gear position according to the performance parameters of the laser, and then the laser that reaches the qualified gear is placed on the unloading tray in accordance with the sampling sample size rules, just above the empty material box in the corresponding normal test grading area and the sampling product area; the vacuum of the unloading nozzle is cancelled, and the laser falls into the empty material box in the corresponding normal test grading area and the sampling product area; (5) After the test is completed, repeat steps (1) to (4) for the sampled items that have been sorted and tested again. If the error of the two measurements is less than 1%, it is considered qualified; otherwise, it is considered unqualified.

2. The method for using the laser automatic testing device with both grading and process sampling as claimed in claim 1, characterized in that: Three to four test machine seats are evenly arranged on the circumference of the upper surface of the test turntable.

3. The method for using the laser automatic testing device with both grading and process sampling as claimed in claim 1, characterized in that: The test turntable is driven by a drive motor.

4. The method for using the laser automatic testing device with both grading and process sampling as claimed in claim 1, characterized in that: In step (1), the sampling sample size rule is as follows: when the input number is ≤150, the qualified lasers will be placed in the normal test bin area and the sampling product area at a ratio of 1:1; when 151 ≤ the input number ≤1200, the qualified lasers will be placed in the normal test bin area and the sampling product area at a ratio of 4:1; when 1201 ≤ the input number ≤10000, the qualified lasers will be placed in the normal test bin area and the sampling product area at a ratio of 9:1; when the input number is greater than 10000, the qualified lasers will be placed in the normal test bin area and the sampling product area at a ratio of 19:1; when the qualified lasers placed in the sampling product area after proportional distribution are less than the standard in the AQL sampling inspection plan table, sampling will be carried out according to the AQL sampling inspection plan table.

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