A method for reducing the amount of outgassing of a rubber sealing pad for vacuum sealing

Abstract

The present invention discloses a method for reducing the degassing of a rubber gasket for vacuum sealing, the method comprising: step 1, under the condition that the absolute pressure is less than 30Pa and the temperature is the maximum allowable use temperature of the rubber gasket, the rubber gasket is vacuum dried for 24 to 200 hours; step 2, after the high-temperature vacuum drying of the rubber gasket is completed, the rubber gasket is placed in an atmospheric environment, the rubber gasket is installed in a target installation position, and the target installation position is placed in a vacuum environment or filled with dry neutral gas. The present invention can remove the volatile components of the rubber gasket before the rubber gasket is installed in the target installation position, and at the same time, reduce the absorption of moisture in the air by the rubber gasket after the vacuum drying process, and reduce the degassing of the rubber gasket in the vacuum system.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum sealing, and in particular to a method for reducing the degassing amount of a rubber sealing pad for vacuum sealing. Background Art

[0002] There are many types of sealing for vacuum pipes, valves, and equipment, and rubber seals are a common type. Rubber seals are cheap, have good sealing performance, and are easy to disassemble and assemble. However, during long-term operation, rubber sealing materials will volatilize trace amounts of water vapor and organic gases, which will react chemically with process gases in the vacuum pipe, such as molybdenum hexafluoride, tungsten hexafluoride, boron trifluoride, and other chemically active gases used in the semiconductor industry. This not only causes the process gas to be consumed, but also leads to the generation of impurity gases and solid powders, and causes the corrosion of various materials in the vacuum system to increase, affecting the various performances of the vacuum system.

[0003] Generally, vacuum rubber gaskets need to be dried during the production process to remove moisture introduced during the processing. However, the drying process is short, the temperature is low, and it is carried out under atmospheric conditions, so only some organic matter with low boiling points and some moisture can be removed. In addition, since the rubber gaskets are stored in the atmosphere for a long time after production, the moisture in the air will be adsorbed in the gap structure on the surface of the rubber gaskets. When these rubber gaskets are used for a long time in the vacuum system, there are still many volatile components released into the process pipeline and react with the process gas. Summary of the invention

[0004] The purpose of the present invention is to provide a method for reducing the air release of a rubber sealing pad for vacuum sealing in view of the technical defects in the prior art.

[0005] The technical solution adopted to achieve the purpose of the present invention is:

[0006] A method for reducing the amount of air released by a rubber sealing pad for vacuum sealing, the method comprising:

[0007] Step 1, vacuum drying the rubber sealing gasket for 24 to 200 hours under the condition that the absolute pressure is less than 30 Pa and the temperature is the maximum allowable use temperature of the rubber sealing gasket;

[0008] Step 2, after the high-temperature vacuum drying of the rubber sealing gasket is completed, the rubber sealing gasket is placed in an atmospheric environment, the rubber sealing gasket is installed at a target installation position, and the target installation position is placed in a vacuum environment or filled with dry neutral gas.

[0009] In the above technical solution, making the target installation position in a vacuum environment in step 2 includes: the target installation position is under a condition where the absolute pressure is less than 30Pa.

[0010] In the above technical solution, the time for which the rubber sealing gasket is placed in the atmospheric environment in step 2 cannot exceed 48 hours.

[0011] In the above technical solution, the rubber sealing gasket includes a vacuum rubber sealing gasket made of type A rubber and a vacuum rubber sealing gasket made of type B rubber; the vacuum rubber sealing gasket made of type A rubber has a maximum allowable operating temperature of 100°C; the vacuum rubber sealing gasket made of type B rubber has a maximum allowable operating temperature of 250°C.

[0012] A method for reducing the degassing amount of a vacuum rubber sealing pad made of type A rubber for vacuum sealing, the method comprising:

[0013] Step 1, placing a vacuum rubber sealing pad made of type A rubber in a heatable vacuum container;

[0014] Step 2, using a vacuum pump to continuously evacuate the container so that the absolute pressure in the container is less than 30 Pa, heating the rubber sealing gasket to 50° C. and maintaining it for 120 hours;

[0015] Step 3: within 24 hours after the vacuum rubber sealing gasket made of type A rubber is subjected to high-temperature vacuum drying, the vacuum rubber sealing gasket made of type A rubber is installed on the vacuum system pipeline, and dry nitrogen is filled into the pipeline.

[0016] In the above technical solution, after the high-temperature vacuum drying of the vacuum rubber sealing gasket made of type A rubber is completed, the rubber sealing gasket is taken out of the container and weighed. If the weight of the rubber sealing gasket is 0.3% lower than the weight of the rubber sealing gasket before the high-temperature vacuum drying, it means that volatile components have overflowed from the rubber sealing gasket during the vacuum drying process.

[0017] A method for reducing the degassing amount of a vacuum rubber sealing pad made of B-type rubber for vacuum sealing, the method comprising:

[0018] Step 1, placing a vacuum rubber sealing pad made of type B rubber in a heatable vacuum container;

[0019] Step 2, using a vacuum pump to continuously evacuate the container so that the absolute pressure in the container is less than 30 Pa, heating the rubber sealing gasket to 120° C. and maintaining it for 30 hours;

[0020] Step 3, after the vacuum rubber sealing gasket made of type B rubber is subjected to high-temperature vacuum drying, the vacuum rubber sealing gasket made of type B rubber is placed in a plastic bag, and the air in the plastic bag is replaced with dry nitrogen until the plastic bag is completely filled with dry nitrogen, and then the plastic bag is sealed to keep the rubber sealing gasket stored in a dry nitrogen environment.

[0021] In the above technical solution, after the high-temperature vacuum drying of the vacuum rubber sealing gasket made of type B rubber is completed, the rubber sealing gasket is taken out of the container and weighed. If the weight of the rubber sealing gasket is 0.1% lower than the weight of the rubber sealing gasket before the high-temperature vacuum drying, it means that volatile components have overflowed from the rubber sealing gasket during the vacuum drying process.

[0022] In the above technical solution, if the quality of the vacuum rubber sealing gasket made of type B rubber does not change significantly after long-term storage in a dry nitrogen environment, it means that it does not absorb water vapor in the air.

[0023] Compared with the prior art, the present invention has the following beneficial effects:

[0024] 1. A method for reducing the amount of outgassing of a rubber gasket for vacuum sealing according to the present invention can remove volatile components of the rubber gasket by vacuum drying before installing the rubber gasket to a target installation position.

[0025] 2. The present invention reduces the absorption of moisture in the air by the rubber sealing gasket after vacuum drying by placing the target installation position in a vacuum environment or filling it with dry neutral gas, thereby ensuring that the rubber sealing gasket after vacuum drying will not increase the amount of degassing due to absorbing moisture again.

[0026] 3. The present invention can effectively reduce the amount of organic gas and water vapor volatilized into the vacuum environment by the rubber sealing gasket during long-term use, that is, reduce its outgassing volume, reduce the chemical reaction between these volatile components and the process gas in the vacuum system, reduce the consumption of process gas, reduce the generation of impurity gas and solid powder, and at the same time reduce the corrosion of various materials, effectively improving the economy and safety of the operation of the vacuum system. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 Shown is a flow chart of a method for reducing the amount of air released by a rubber sealing pad for vacuum sealing according to the present invention.

[0028] Figure 2 The flowchart of the method for reducing the degassing amount of a vacuum rubber sealing pad made of type A rubber for vacuum sealing is shown in the present invention.

[0029] Figure 3The flowchart of the method for reducing the degassing amount of a vacuum rubber sealing pad made of B-type rubber for vacuum sealing is shown in the present invention. DETAILED DESCRIPTION

[0030] The present invention is further described in detail below in conjunction with specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0031] Example 1

[0032] A method for reducing the amount of outgassing of a rubber gasket for vacuum sealing, see Figure 1 , the method comprising:

[0033] Step 1, vacuum drying the rubber sealing gasket for 24 to 200 hours under the condition that the absolute pressure is less than 30 Pa and the temperature is the maximum allowable use temperature of the rubber sealing gasket;

[0034] Step 2, after the high-temperature vacuum drying of the rubber sealing gasket is completed, the rubber sealing gasket is placed in an atmospheric environment, the rubber sealing gasket is installed at a target installation position, and the target installation position is placed in a vacuum environment or filled with dry neutral gas.

[0035] Furthermore, in step 2, placing the target installation position in a vacuum environment includes: placing the target installation position in a condition where the absolute pressure is less than 30Pa.

[0036] Among them, placing the target installation position in a vacuum environment or filling it with dry neutral gas can reduce the absorption of moisture in the air by the rubber sealing gasket placed in the atmospheric environment after the rubber sealing gasket is subjected to high-temperature vacuum drying.

[0037] Furthermore, the rubber seal includes a vacuum rubber seal made of type A rubber and a vacuum rubber seal made of type B rubber. The vacuum rubber seal made of type A rubber has a maximum allowable operating temperature of 100°C; the vacuum rubber seal made of type B rubber has a maximum allowable operating temperature of 250°C.

[0038] In step 1, the rubber sealing gasket is vacuum dried for 24 to 200 hours, so that the volatile components in the rubber sealing gasket can be removed from the rubber sealing gasket.

[0039] Furthermore, the rubber sealing gasket may be placed in the atmospheric environment for no more than 48 hours.

[0040] Example 2

[0041] Based on Example 1, a method for reducing the degassing amount of a vacuum rubber sealing pad made of type A rubber for vacuum sealing is provided. Figure 2 , the method comprising:

[0042] Step 1, placing a vacuum rubber sealing pad made of type A rubber in a heatable vacuum container;

[0043] Step 2, using a vacuum pump to continuously evacuate the container so that the absolute pressure in the container is less than 30 Pa, heating the rubber sealing gasket to 50° C. and maintaining it for 120 hours;

[0044] Step 3: within 24 hours after the vacuum rubber sealing gasket made of type A rubber is subjected to high-temperature vacuum drying, the vacuum rubber sealing gasket made of type A rubber is installed on the vacuum system pipeline, and dry nitrogen is filled into the pipeline.

[0045] Furthermore, after high-temperature vacuum drying is completed for the vacuum rubber sealing gasket made of type A rubber, the rubber sealing gasket is taken out of the container and weighed. If the weight of the rubber sealing gasket is 0.3% lower than the weight of the rubber sealing gasket before the high-temperature vacuum drying, it indicates that volatile components have overflowed from the rubber sealing gasket during the vacuum drying process.

[0046] Among them, a vacuum rubber sealing gasket made of type A rubber is installed on the vacuum system pipeline, and dry nitrogen is filled into the pipeline, which can reduce the absorption of moisture in the air by the surface of the rubber sealing gasket in contact with the internal space of the vacuum system.

[0047] Example 3

[0048] Based on Examples 1 and 2, a method for reducing the degassing amount of a vacuum rubber sealing pad made of type B rubber for vacuum sealing is provided. Figure 3 , the method comprising:

[0049] Step 1, placing a vacuum rubber sealing pad made of type B rubber in a heatable vacuum container;

[0050] Step 2, using a vacuum pump to continuously evacuate the container so that the absolute pressure in the container is less than 30 Pa, heating the rubber sealing gasket to 120° C. and maintaining it for 30 hours;

[0051] Step 3, after the vacuum rubber sealing gasket made of type B rubber is subjected to high-temperature vacuum drying, the vacuum rubber sealing gasket made of type B rubber is placed in a plastic bag, and the air in the plastic bag is replaced with dry nitrogen until the plastic bag is completely filled with dry nitrogen, and then the plastic bag is sealed to keep the rubber sealing gasket stored in a dry nitrogen environment.

[0052] Furthermore, after high-temperature vacuum drying is completed for the vacuum rubber sealing gasket made of type B rubber, the rubber sealing gasket is taken out of the container and weighed. If the weight of the rubber sealing gasket is 0.1% lower than the weight of the rubber sealing gasket before the high-temperature vacuum drying, it indicates that volatile components have overflowed from the rubber sealing gasket during the vacuum drying process.

[0053] Among them, if the quality of the vacuum rubber sealing gasket made of type B rubber does not change significantly after long-term storage in a dry nitrogen environment, it means that it does not absorb water vapor in the air.

[0054] The present invention is described above by way of example. It should be noted that, without departing from the core of the present invention, any simple deformation, modification or other equivalent replacement that can be made by those skilled in the art without inventive effort falls within the protection scope of the present invention.

Claims

1. A method for reducing the amount of air released by a rubber gasket for vacuum sealing, characterized in that: The method comprises: Step 1, vacuum drying the rubber sealing gasket for 24 to 200 hours under the condition that the absolute pressure is less than 30 Pa and the temperature is the maximum allowable use temperature of the rubber sealing gasket; Step 2, after the high-temperature vacuum drying of the rubber sealing gasket is completed, the rubber sealing gasket is placed in an atmospheric environment to remove volatile components of the rubber sealing gasket; the rubber sealing gasket is installed at a target installation position, and the target installation position is placed in a vacuum environment or filled with dry neutral gas; In step 2, the rubber sealing gasket is placed in the atmospheric environment for no more than 48 hours.

2. The method according to claim 1, characterized in that In step 2, placing the target installation position in a vacuum environment includes: placing the target installation position in a condition where the absolute pressure is less than 30Pa.

3. The method according to claim 1, characterized in that The rubber sealing gasket includes a vacuum rubber sealing gasket made of type A rubber and a vacuum rubber sealing gasket made of type B rubber; the vacuum rubber sealing gasket made of type A rubber has a maximum allowable operating temperature of 100°C; the vacuum rubber sealing gasket made of type B rubber has a maximum allowable operating temperature of 250°C.

4. The method according to claim 3, characterized in that A method for reducing the degassing amount of a vacuum rubber sealing pad made of type A rubber for vacuum sealing, comprising: Step 1, placing a vacuum rubber sealing pad made of type A rubber in a heatable vacuum container; Step 2, using a vacuum pump to continuously evacuate the container so that the absolute pressure in the container is less than 30 Pa, heating the rubber sealing gasket to 50° C. and maintaining it for 120 hours; Step 3: within 24 hours after the vacuum rubber sealing gasket made of type A rubber is subjected to high-temperature vacuum drying, the vacuum rubber sealing gasket made of type A rubber is installed on the vacuum system pipeline, and dry nitrogen is filled into the pipeline.

5. The method according to claim 4, characterized in that After high-temperature vacuum drying of a vacuum rubber sealing gasket made of type A rubber is completed, the rubber sealing gasket is taken out of the container and weighed. If the weight of the rubber sealing gasket is 0.3% lower than the weight of the rubber sealing gasket before the high-temperature vacuum drying, it means that volatile components have overflowed from the rubber sealing gasket during the vacuum drying process.

6. The method according to claim 3, characterized in that A method for reducing the degassing amount of a vacuum rubber sealing pad made of B-type rubber for vacuum sealing, comprising: Step 1, placing a vacuum rubber sealing pad made of type B rubber in a heatable vacuum container; Step 2, using a vacuum pump to continuously evacuate the container so that the absolute pressure in the container is less than 30 Pa, heating the rubber sealing gasket to 120° C. and maintaining it for 30 hours; Step 3, after the vacuum rubber sealing gasket made of type B rubber is subjected to high-temperature vacuum drying, the vacuum rubber sealing gasket made of type B rubber is placed in a plastic bag, and the air in the plastic bag is replaced with dry nitrogen until the plastic bag is completely filled with dry nitrogen, and then the plastic bag is sealed to keep the rubber sealing gasket stored in a dry nitrogen environment.

7. The method according to claim 6, characterized in that After high-temperature vacuum drying of a vacuum rubber gasket made of type B rubber is completed, the rubber gasket is taken out of the container and weighed. If the weight of the rubber gasket is 0.1% lower than the weight of the rubber gasket before the high-temperature vacuum drying, it means that volatile components have overflowed from the rubber gasket during the vacuum drying process.

8. The method according to claim 6, characterized in that If the quality of the vacuum rubber sealing gasket made of type B rubber does not change significantly after long-term storage in a dry nitrogen environment, it means that the vacuum rubber sealing gasket has not absorbed water vapor in the air.

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