Portable precision position adjuster for planarity of semiconductor coating shower head

Abstract

The application discloses a kind of for semiconductor coating shower head planar portable fine position regulator, three locking micrometer heads are uniformly distributed on adjusting disc, the bottom of locking micrometer head is connected with connecting shaft, connecting shaft is pressed to deep groove ball bearing, deep groove ball bearing is installed in ceramic gasket ring, the bottom of ceramic gasket ring is installed with threaded connecting rod, threaded connecting rod is sleeved with sealing unit, sealing unit is installed on adjusting rod ceramic sleeve.The adjusting part is placed outside the cavity, which isolates the influence of high temperature inside the cavity and improves the adjustment efficiency;The locking micrometer head is directly connected with up-down movement, which improves the overall adjustment accuracy.In addition, the micrometer head itself has an axis lock, which locks the adjusting rod position stable and fast, further improving the efficiency;Insulating parts are used between the regulator and the upper cavity to avoid discharge during the opening process of the equipment, and the precision and stability of the ceramic parts are good, which improves the stability of the equipment itself.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor coating technology, and particularly relates to a portable fine position adjuster for planarity of a semiconductor coating spray head. BACKGROUND

[0002] In the process of the existing semiconductor coating equipment, due to the special properties of the film, the planarity of the spray device and the corresponding heating body needs to be ensured during the film deposition process. In this case, the spray device itself needs to have high planarity or be designed with a device for adjusting the planarity. The traditional adjusting method is to use a lead screw inside a cavity for adjustment. However, the adjustment efficiency is not high due to the high temperature inside the cavity, and the accuracy of the lead screw is affected by its own precision, which leads to poor accuracy. SUMMARY

[0003] The present application provides a portable fine position adjuster for planarity of a semiconductor coating spray head to solve the above problems.

[0004] To solve the above technical problems, the technical scheme of the present application is as follows: a portable fine position adjuster for planarity of a semiconductor coating spray head, comprising a spray head ceramic sleeve and an adjusting disc, the adjusting disc is uniformly provided with three locking micrometer heads, the bottom of the locking micrometer head is connected with a connecting shaft, the connecting shaft is press-connected to a deep groove ball bearing, the deep groove ball bearing is installed in a ceramic gasket ring, the bottom of the ceramic gasket ring is provided with a threaded connecting rod, the threaded connecting rod is sleeved with a sealing unit, and the sealing unit is installed on an adjusting rod ceramic sleeve.

[0005] Further, the bottom of the locking micrometer head is connected with the connecting shaft through a clamping cover.

[0006] Further, the connecting shaft is press-connected to the deep groove ball bearing through a gland and an internal hexagon countersunk screw.

[0007] Further, the deep groove ball bearing is installed in the ceramic gasket ring through an upper gland and a screw.

[0008] Further, the sealing unit comprises a semicircular pressing block, a welded corrugated pipe, an O-shaped sealing ring three and a sealing flange, the welded corrugated pipe and the sealing flange are sleeved on the threaded connecting rod, the two end faces of the welded corrugated pipe are welded with the threaded connecting rod and the sealing flange respectively, the sealing flange is threadedly connected with the adjusting rod ceramic sleeve and fixed through the semicircular pressing block, and the O-shaped sealing ring three is arranged between the sealing flange and the adjusting rod ceramic sleeve.

[0009] Further, the sealing unit comprises a pressing flange and an O-shaped sealing ring five, and the O-shaped sealing ring five is arranged between the threaded connecting rod and the adjusting rod ceramic sleeve and fixed through the pressing flange.

[0010] Further, the threaded connecting rod is threadedly connected with a 6 / 8 inch spray head 1.

[0011] Further, the air inlet pipe of the 6 / 8 inch shower head 1 is inserted and sealed in the shower head ceramic sleeve through the O-shaped sealing ring 1 and the sealing baffle.

[0012] Further, the adjusting disc is connected to the support column through a screw, the O-shaped sealing ring 2 is sleeved on the adjusting rod ceramic sleeve, the O-shaped sealing ring 4 is sleeved on the shower head ceramic sleeve, and the support column, the shower head ceramic sleeve and the adjusting rod ceramic sleeve are connected to the upper cavity.

[0013] The adjusting part is arranged outside the cavity, the influence of high temperature inside the cavity is isolated, and the adjusting efficiency is improved; the micrometer head is directly connected to the upper and lower movements with locking, the precision of the micrometer itself is 0.5mm / 50=0.01mm, the overall adjusting precision is improved, in addition, the micrometer head itself has an axis lock, the position of the adjusting rod is locked, stable and fast, and the efficiency is further improved; the insulating parts such as the shower head ceramic sleeve, the ceramic gasket ring and the adjusting rod ceramic sleeve are used between the regulator and the upper cavity to isolate and assemble, so that the discharge of the cavity in the opening process of the equipment is avoided, and the stability of the equipment itself is improved. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 is a structural schematic view of example one;

[0015] Figure 2 is a front view of example one;

[0016] Figure 3 is an A-A sectional view of Figure 2 ;

[0017] Figure 4 is a partial enlarged view of Figure 3 ;

[0018] Figure 5 is a structural schematic view of example one assembled to the upper cavity;

[0019] Figure 6 is a sectional view of example one assembled to the upper cavity;

[0020] Figure 7 is a sectional view of example two.

[0021] 1. 6 / 8 inch shower head 2. Shower head ceramic sleeve 3. Adjusting disc 4. Support column 5. Sealing baffle 6. Ceramic gasket ring 7. Connecting shaft 8. Cover 9. Micrometer head with locking 10. Upper cover 11. Clamping cover 12. Adjusting rod ceramic sleeve 13. Half-round pressing block 14. Welded corrugated pipe 15. O-shaped sealing ring 1 16. O-shaped sealing ring 2 17. Deep groove ball bearing 18. O-shaped sealing ring 3 19. Internal hexagonal countersunk head screw 20. O-shaped sealing ring 4 21. Threaded connecting rod 22. Sealing flange 23. Pressing flange 24. O-shaped sealing ring 5. DETAILED DESCRIPTION

[0022] The application will be further described in conjunction with the accompanying drawings Figures 1-7 The application will be further described in conjunction with the accompanying drawings

[0023] Example one

[0024] The portable fine position adjuster for the planarity of semiconductor coating spray head comprises a spray head ceramic sleeve 2 and an adjusting disc 3, the adjusting disc 3 is uniformly provided with three locking micrometer heads 9, the bottom of the locking micrometer head 9 is connected with a connecting shaft 7 through a clamping cover 11, the connecting shaft 7 is pressed to a deep groove ball bearing 17 through a gland 8 and an internal hexagon countersunk head screw 19, the deep groove ball bearing 17 is installed in a ceramic gasket ring 6 through an upper gland 10 and a screw, the bottom of the ceramic gasket ring 6 is provided with a threaded connecting rod 21, the threaded connecting rod 21 is sleeved with a sealing unit, and the sealing unit is installed on an adjusting rod ceramic sleeve 12. The sealing unit comprises a semicircular pressing block 13, a welded bellows 14, an O-shaped sealing ring three 18 and a sealing flange 22, the welded bellows 14 and the sealing flange 22 are sleeved on the threaded connecting rod 21, the two end faces of the welded bellows 14 are welded with the threaded connecting rod 21 and the sealing flange 22 respectively, the sealing flange 22 is threadedly connected with the adjusting rod ceramic sleeve 12 and is fixed through the semicircular pressing block 13, the O-shaped sealing ring three 18 is arranged between the sealing flange 22 and the adjusting rod ceramic sleeve 12, so that the welded bellows 14 is vacuum insulated inside and outside, and the welded bellows 14 can be extended and retracted up and down without affecting the vacuum insulation. The threaded connecting rod 21 is threadedly connected with a 6 / 8-inch spray head 1. The 6 / 8-inch spray head 1 is sealingly inserted into the spray head ceramic sleeve 2 through an O-shaped sealing ring one 15 and a sealing baffle 5. The adjusting disc 3 is connected to a support column 4 through a screw, the adjusting rod ceramic sleeve 12 is sleeved with an O-shaped sealing ring two 16, the spray head ceramic sleeve 2 is sleeved with an O-shaped sealing ring four 20, and the support column 4, the spray head ceramic sleeve 2 and the adjusting rod ceramic sleeve 12 are connected to an upper cavity.

[0025] When the locking dial head 9 is rotated clockwise, the locking dial head 9 will be extended, the extension rod drives the connecting shaft 7 to move downward, the connecting shaft 7 drives the upper cover 10, the cover 8, the clamping cover 11 and the ceramic gasket ring 6 to move downward through the deep groove ball bearing 17, the ceramic gasket ring 6 drives the threaded connecting rod 21 to move downward, the threaded connecting rod 21 drives one of the threaded points of the 6 / 8 inch shower head 1 to move downward, when the required movement point is obtained, the locking nut of the locking dial head 9 is locked. The entire above movement process is sealed, realizing the movement form of internal vacuum and external atmosphere. Conversely, if the 6 / 8 inch shower head 1 needs to move upward, the locking dial head 9 is rotated counterclockwise. In this way, the three connecting points of the 6 / 8 inch shower head 1 are adjusted upward and downward, realizing the planar adjustment of the disc surface of the 6 / 8 inch shower head 1. In actual operation, the fixing screw of the sealing baffle 5 is loosened, and then the locking dial head 9 is adjusted.

[0026] Example two

[0027] The structural difference between example two and example one lies in the sealing unit. The sealing unit structure in example one can be replaced by the sealing unit structure in example two. The sealing unit in example two includes a pressing flange 23 and an O-shaped sealing ring five 24. The threaded connecting rod 21 and the adjusting rod ceramic sleeve 12 are provided with the O-shaped sealing ring five 24 and fixed through the pressing flange 23.

[0028] The above is only the preferred specific embodiment of the present application, but the protection scope of the present application is not limited to this. Any person skilled in the art can make equivalent replacement or change according to the technical scheme and the inventive concept of the present application within the technical range disclosed by the present application, which should be covered in the protection scope of the present application.

Claims

1. A portable precision position adjuster for planarity of semiconductor coating showerhead, characterized in that, The application relates to a ceramic nozzle sleeve (2) and an adjusting disc (3), wherein the adjusting disc (3) is uniformly provided with three locking micrometer heads (9), the bottom of the locking micrometer head (9) is connected with a connecting shaft (7), the connecting shaft (7) is press-connected to a deep groove ball bearing (17), the deep groove ball bearing (17) is installed in a ceramic gasket ring (6), the bottom of the ceramic gasket ring (6) is provided with a threaded connecting rod (21), a sealing unit is sleeved on the threaded connecting rod (21), the sealing unit is installed on an adjusting rod ceramic sleeve (12), the threaded connecting rod (21) is screwed with a 6 / 8-inch shower head (1), the air inlet pipe of the 6 / 8-inch shower head (1) is sealingly inserted into the ceramic nozzle sleeve (2) through an O-shaped sealing ring (15) and a sealing baffle (5), the sealing unit comprises a semicircular pressing block (13), a welded corrugated pipe (14), an O-shaped sealing ring (18) and a sealing flange (22), the welded corrugated pipe (14) and the sealing flange (22) are sleeved on the threaded connecting rod (21), the two end faces of the welded corrugated pipe (14) are welded with the threaded connecting rod (21) and the sealing flange (22) respectively, the sealing flange (22) is screwed with the adjusting rod ceramic sleeve (12) and is fixed through the semicircular pressing block (13), and the O-shaped sealing ring (18) is arranged between the sealing flange (22) and the adjusting rod ceramic sleeve (12).

2. The planarity portable fine position adjuster for semiconductor coating showerhead according to claim 1, wherein, The bottom of the locking micrometer head (9) is connected with the connecting shaft (7) through a clamping cover (11).

3. The planarity portable fine position adjuster for semiconductor coating showerhead according to claim 1, wherein, The connecting shaft (7) is press-connected to the deep groove ball bearing (17) through a gland (8) and an internal hexagon countersunk screw (19).

4. The planarity portable fine position adjuster for semiconductor coating showerhead according to claim 1, wherein, The deep groove ball bearing (17) is installed in the ceramic gasket ring (6) through an upper gland (10) and a screw.

5. The planarity portable micro-position adjuster for semiconductor coating showerhead according to claim 1, wherein, The adjusting disc (3) is screwed with a supporting column (4), the adjusting rod ceramic sleeve (12) is sleeved with an O-shaped sealing ring (16), the ceramic nozzle sleeve (2) is sleeved with an O-shaped sealing ring (20), and the supporting column (4), the ceramic nozzle sleeve (2) and the adjusting rod ceramic sleeve (12) are connected to an upper cavity.

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