Vacuum antifouling film preparation device, preparation system and preparation method

Abstract

The present disclosure provides a vacuum antifouling film preparation device, comprising a liquid medicine system, a heating device, a rotating mechanism and a sliding telescopic device. The liquid medicine system is connected to the heating device and is used to transport the liquid medicine to the heating device. The heating device is driven by the rotating mechanism to move up and down repeatedly to form an active evaporation area, which can meet the needs of 3D special-shaped or large-size coating. The sliding telescopic device is connected to control the heating device to achieve horizontal movement of the heating device. At the same time, a corresponding device system and a preparation method are provided. The vacuum antifouling film preparation device of the present application forms an active evaporation area by repeatedly moving up and down in a cycle, which can effectively increase the coverage of the crucible evaporation film layer, which is significantly improved compared with the coverage of the fixed position; at the same time, the crucible is flipped 90 degrees so that its front mouth faces the product to be coated, thereby achieving the maximum effective divergence angle, so that the uniformity of the film layer can be effectively improved in the coating manufacturing.

Description

Technical Field

[0001] The present disclosure relates to the technical field of vacuum coating, and in particular to a vacuum antifouling film preparation device, a preparation system and a preparation method. Background Art

[0002] Antifouling films can be applied to touch screens, lenses, and other fields. In particular, with the development of information technology in recent years, products such as smart phones and tablets have become highly popular. The rapid growth in demand for the above touch screen products has led to the development of vacuum coating devices. The number of technology display modules is increasing, and the size and shape are constantly being updated with market demand, and the overall direction is infinitely close to full size. However, there will be more and more constraints in the production process, and such problems exist in the coating field. The surface of the cover plate is in direct contact with the user, so surface protection is essential, and the antifouling film layer is particularly important.

[0003] However, the actual production of anti-fouling films is still plagued by problems such as large size, irregular shape and too high arc height. For example, for large-size products and 3D products, traditional coating is prone to uneven coating. At the same time, the fixed and single evaporation point also leads to uneven coating thickness.

[0004] Therefore, there is an urgent need for a new anti-fouling film preparation device or coating system or coating method, which can effectively adapt to large-size and 3D products during the cover plate coating manufacturing process. Summary of the invention

[0005] A technical problem to be solved by the present disclosure is to provide an anti-fouling film preparation device, system and preparation method suitable for large-size and 3D products, which can increase the coverage of the evaporation source in the cover plate coating manufacturing and effectively improve the uniformity of the film layer.

[0006] In order to solve the above technical problems, an embodiment of the present disclosure provides a vacuum anti-fouling film preparation device, which includes a liquid medicine system, a heating device, a rotating mechanism and a sliding and telescopic device. The liquid medicine system is connected to the heating device and is used to transport the liquid medicine to the heating device. The heating device is driven by the rotating mechanism to move up and down repeatedly to form an active evaporation area. The sliding and telescopic device is connected to control the heating device to realize horizontal movement of the heating device.

[0007] In some embodiments, the medicine liquid system includes a medicine liquid storage tank, a transmission pipeline and a dropper. The medicine liquid storage tank is provided with a liquid level monitoring device. The medicine liquid storage tank is connected to the transmission pipeline, and a dropper is provided at the end of the transmission pipeline.

[0008] In some embodiments, a metering pump is provided on the transmission pipeline for extracting and measuring the drug solution.

[0009] In some embodiments, the heating device includes an electric heater, a crucible and a base. The crucible is used to hold the molten potion and is disposed on the base together with the electric heater. The crucible is heated by the electric heater.

[0010] In some embodiments, the crucible contains a mesh carrier for locking the drug solution, and the carrier has high temperature resistance.

[0011] In some embodiments, the heating device further comprises a motor gear, which acts on the 90° flipping action of the crucible.

[0012] In some embodiments, the crucible is configured to change position as the shape of the product changes.

[0013] In some embodiments, the rotating mechanism includes a servo motor, a chain, gears and a continuously variable gear. The servo motor provides kinetic energy for the entire rotating mechanism, which moves up and down through the chain. The gears are installed at both ends of the crucible or in the middle gap. The chain has a telescopic function. The continuously variable gear is used to assist the sliding telescopic device to assist in realizing the chain's propulsion and stretching action.

[0014] On the other hand, a vacuum antifouling film preparation system is provided, comprising the above-mentioned vacuum antifouling film preparation device and a vacuum process chamber, wherein the vacuum process chamber is connected to the vacuum antifouling film preparation device, and the heating device is moved in the vacuum process chamber through a sliding telescopic device.

[0015] On the other hand, a method for preparing a vacuum antifouling film is provided.

[0016] Step 1, the product is subjected to substrate coating, and at the same time, the liquid system drips liquid onto the crucible;

[0017] Step 2, subjecting the product to plasma treatment, while the crucible is preheated by an electric heater;

[0018] Step 3, wait for 30 seconds, during which time the product is moved to the coating area, the crucible is moved to the coating area through the sliding telescopic device, and turned 90 degrees;

[0019] Step 4, when the crucible is heated and evaporated, the servo motor is turned on, the crucible is moved up and down repeatedly, and the evaporation is continued for 10S-1000S;

[0020] Step 5: The crucible is cooled and the coating is completed, and the product and the crucible return to the origin.

[0021] Through the above technical scheme, the vacuum antifouling film preparation provided by the present invention forms an active evaporation area by repeatedly moving up and down in a cycle, which can effectively increase the coverage of the crucible evaporation film layer and meet the needs of 3D special-shaped or large-size coating. Compared with the fixed position, the coverage is significantly improved; at the same time, the crucible is flipped 90° so that its front mouth faces the product to be coated, achieving the maximum effective divergence angle, making the antifouling film deposition effect more uniform, so that the uniformity of the film layer can be effectively improved in the coating manufacturing. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the embodiments of the present disclosure or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present disclosure. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0023] Figure 1 It is a schematic diagram of a vacuum antifouling film preparation system disclosed in an embodiment of the present application;

[0024] Figure 2 It is a liquid medicine system of a vacuum antifouling film preparation device disclosed in an embodiment of the present disclosure;

[0025] Figure 3 It is a heating device of a vacuum antifouling film preparation device disclosed in an embodiment of the present disclosure;

[0026] Figure 4 It is a rotating mechanism of a vacuum antifouling film preparation device disclosed in an embodiment of the present disclosure;

[0027] Figure 5 It is the evaporation coverage of a vacuum antifouling film preparation device disclosed in an embodiment of the present disclosure;

[0028] Figure 6 It is a telescopic structure of a vacuum antifouling film preparation device disclosed in an embodiment of the present disclosure;

[0029] Figure 7 The invention relates to a method for preparing a vacuum antifouling film disclosed in an embodiment of the present invention.

[0030] Description of reference numerals:

[0031] 100. Vacuum antifouling film preparation device; 200. Vacuum process chamber; 300. Liquid system; 301. Liquid storage tank; 302. Liquid level monitoring device; 303. Transmission pipeline; 304. Metering pump; 305. Drip nozzle; 400. Heating device; 401. Crucible; 402 Electric heater; 403. Base; 404. Motor gear; 405. Fixed evaporation area; 406. Movable evaporation area; 500. Rotating mechanism; 501. Continuously variable gear; 502. Chain; 503. Gear; 504. Servo motor; 600. Sliding telescopic device DETAILED DESCRIPTION

[0032] The following is a further detailed description of the embodiments of the present disclosure in conjunction with the accompanying drawings and examples. The detailed description of the following embodiments and the accompanying drawings are used to exemplarily illustrate the principles of the present disclosure, but cannot be used to limit the scope of the present disclosure. The present disclosure can be implemented in many different forms and is not limited to the specific embodiments disclosed herein, but includes all technical solutions that fall within the scope of the claims.

[0033] The present disclosure provides these embodiments to make the present disclosure thorough and complete, and to fully express the scope of the present disclosure to those skilled in the art. It should be noted that unless otherwise specifically stated, the relative arrangement of the parts and steps, the composition of the materials, the numerical expressions and the numerical values ​​set forth in these embodiments should be interpreted as being merely exemplary, and not as limiting.

[0034] It should be noted that, in the description of the present disclosure, unless otherwise specified, the meaning of "multiple" is greater than or equal to two; the terms "upper", "lower", "left", "right", "inner", "outer", etc., indicating the orientation or positional relationship, are only for the convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present disclosure. When the absolute position of the object being described changes, the relative positional relationship may also change accordingly.

[0035] In addition, the words "first", "second" and similar words used in the present disclosure do not indicate any order, quantity or importance, but are only used to distinguish different parts. "Vertical" does not mean vertical in the strict sense, but is within the tolerance range. "Parallel" does not mean parallel in the strict sense, but is within the tolerance range. "Include" or "comprising" and similar words mean that the elements before the word include the elements listed after the word, and do not exclude the possibility of including other elements.

[0036] It should also be noted that in the description of the present disclosure, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present disclosure can be understood according to the specific circumstances. When a specific device is described as being located between a first device and a second device, there may or may not be an intermediate device between the specific device and the first device or the second device.

[0037] All terms used in the present disclosure have the same meanings as those understood by those of ordinary skill in the art to which the present disclosure belongs, unless otherwise specifically defined. It should also be understood that terms defined in general dictionaries, for example, should be interpreted as having meanings consistent with their meanings in the context of the relevant technology, and should not be interpreted in an idealized or extremely formal sense, unless explicitly defined as such herein.

[0038] Technologies, methods, and equipment known to ordinary technicians in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and equipment should be considered part of the specification.

[0039] Example 1

[0040] like Figure 1-6 As shown, an embodiment of the present application provides a vacuum anti-fouling film preparation device, and the preparation device of this embodiment can be used to process the anti-fouling film of a large-sized glass panel or a 3D glass panel.

[0041] The complete set of vacuum antifouling film preparation device 100 includes a liquid medicine system 300, a heating device 400, a rotating mechanism 500 and a sliding telescopic device 600. The liquid medicine system 300 is connected to the heating device 400 and is used to transport the liquid medicine to the heating device 400. The heating device 400 is driven by the rotating mechanism 500 to move up and down repeatedly. The sliding telescopic device 600 is connected to control the heating device 400 to realize horizontal movement of the heating device 400.

[0042] like Figure 2 As shown, in this embodiment, the liquid medicine system 300 includes a liquid medicine storage tank 301, a transmission pipeline 303 and a drip nozzle 305. The liquid medicine storage tank 301 is provided with a liquid level monitoring device 302. The liquid medicine storage tank 301 is connected to the transmission pipeline 303, and a drip nozzle 305 is provided at the end of the transmission pipeline 303. The liquid medicine storage tank 301 is used to store the liquid medicine of the anti-fouling film. Among them, the liquid medicine level monitoring device 302 is used to provide real-time feedback on the liquid medicine level position of the liquid medicine storage tank 301, which is mainly completed through visual monitoring. It can understand the remaining liquid medicine in real time, ensure that the liquid medicine is sufficient, and prevent the pipeline from entering the air due to the lack of liquid medicine, which eventually leads to the inaccurate liquid medicine amount.

[0043] In this embodiment, a metering pump 304 is provided on the transmission pipeline 303, and the metering pump 304 is used to extract an accurate amount of liquid medicine and completely inject it into the crucible through the pipeline and the medicine drop nozzle.

[0044] like Figure 3 As shown, in the specific implementation of this embodiment, the heating device 400 includes an electric heater 402, a crucible 401 and a base 403. The crucible 401 is used to hold the medicine and is arranged on the base 403 together with the electric heater 402. The crucible 401 is heated by the electric heater 402. The electric heater 402 is mainly used for heating the crucible 401. During the assembly process, it is necessary to meet the requirement of close contact with the bottom and side of the crucible 401 to maximize the conduction efficiency. The material of the crucible 401 is selected to be a metal with high thermal conductivity and high melting point. The processing container is mostly round, and no specific requirements are made for this item. During processing, the edge of the container is tilted inward, which can lock part of the medicine, and at the same time, it will be more stable when inlaid with the base 403 and the electric heater 402. The design of the base 403 is convenient for carrying the crucible 401 and the electric heater 402, and at the same time, it can play a role in cooling the crucible 401 after heating. When designed, it can be quickly cooled by a water cooling mechanism.

[0045] In the specific implementation of this embodiment, the crucible 401 contains a mesh carrier for locking the liquid medicine, and the carrier has high temperature resistance and needs to be replaced after a certain period of use.

[0046] like Figure 4 As shown, in the specific implementation of this embodiment, the heating device 400 further includes a motor gear 404, and the motor gear 404 acts on the 90° flipping action of the crucible 401. When adding liquid medicine, the front opening of the crucible 401 needs to face upward, and the liquid medicine accurately drips into the crucible 401. During thermal evaporation, the crucible needs to be rotated 90° so that its front opening faces the product to achieve the maximum divergence angle.

[0047] The sliding telescopic device 600 is mainly used for 3D products produced in practical applications. Its main principle is that the position of the crucible 401 can change with the shape of the product. The main component of the sliding telescopic device 600 is a cylinder. The position change and movement of the crucible 401 depends on the expansion and contraction of the cylinder. In the actual application process, the telescopic position is pushed and changed according to the different forms of the product to make it consistent with the distance. The front end is equipped with a motor gear 404 so that it will not affect the up and down movement of the crucible 401 after it is in place. When the sliding telescopic device 600 is telescopically moved, the chain will perform a corresponding stretching action. The present invention uses gear plates of different sizes designed in the opposite direction to change the size of the disc diameter according to the distance of the telescopic action, and finally achieve variable adjustment.

[0048] The telescopic stroke of the sliding telescopic device 600 is set according to the actual situation of the product coating fixture. The maximum stroke of the sliding telescopic device 600 is d, so all distances between 0-d can be set. At the same time, in order to avoid accidental collisions during operation, the set evaporation position of each product is the maximum position of the stroke, and the cylinder can only move within the range of 0 to the set value.

[0049] like Figure 5 As shown in the sliding coverage diagram of the crucible 401, the heating device 400 drives the crucible 401 to move up and down repeatedly through the rotating mechanism 500, which can effectively increase the coverage of the crucible evaporation film layer, and finally form a movable evaporation area 406, which is significantly improved compared with the coverage of the fixed evaporation area 405. This effect is directly achieved by the free movement of the crucible 401. Different from the fixed position evaporation coating, in the round trip process, the area corresponding to the evaporation of the medicine in a single crucible 401 is much larger than the fixed position. Especially for 3D products with curved surfaces, the purpose of uniform coating can also be achieved by adjusting the position of the crucible.

[0050] The formula for total coverage length is as follows:

[0051] Formula: L=X+2d, where L is the total length of the coverage range; X is the coverage length when the crucible is fixed in position; and d is the upward travel distance of the rotating mechanism (the downward travel distance is the same).

[0052] The formula for coverage emission area is as follows:

[0053] Formula: S = 1 / 2hx+2dh, where S is the coverage emission area; X is the coverage length when the crucible is fixed in position; d is the upward travel distance of the rotating mechanism (the same as the downward travel distance); and h is the distance from the crucible to the product.

[0054] In the specific implementation of this embodiment, the rotating mechanism 500 includes a servo motor 504, a chain 502, a gear 503 and an infinitely variable speed gear 501. The servo motor provides kinetic energy for the entire rotating mechanism 500. The motors are equipped with one each at the top and bottom, and move up and down in a circular motion through the chain 502. Generally, the number of crucibles is greater than or equal to 1, and the number is selected according to actual needs. It is only necessary to equip the drip nozzles 305, transmission pipes 303, potion storage tanks 301 and sliding telescopic devices 600 with the number of crucibles 401. The travel distance is determined by the designed distance between the crucibles; the maximum travel of the mechanism rotation depends on the length of the chain between the crucibles, and the direction of movement can only meet the repeated up and down operation, and the full circle rotation operation is not allowed; the gear 503 is installed at both ends of the crucible 401 or in the middle gap. Its function is to provide a stabilizing device for rotation, and the design quantity is as follows:

[0055] Formula: N=n+1, where N is the number of gear designs and n is the number of crucibles.

[0056] The chain 502 has a telescopic function, and the stepless speed change gear 501 is used to assist the sliding telescopic device 600 to assist in achieving the pushing and stretching action of the chain 502 .

[0057] The chain 502 is used for transmitting kinetic energy and has a telescopic function. The chain 502 is connected to the base 403 at the position of the crucible 401, so it cannot rotate a full circle.

[0058] The rotating mechanism 500 enables the crucible to move up and down, mainly to increase the diffraction range of a single crucible, so that the device can be optimized and reduced in the crucible position, reducing the manufacturing cost, while also saving the amount of liquid medicine, and ultimately making the surface antifouling film layer more uniform.

[0059] Example 2

[0060] like Figure 1 As shown, a vacuum antifouling film preparation system includes the above-mentioned vacuum antifouling film preparation device 100, and also includes a vacuum process chamber 200, the vacuum process chamber 200 is connected to the vacuum antifouling film preparation device 100, and the heating device 400 is moved in the vacuum process chamber 200 through a sliding telescopic device 600. In this embodiment, the vacuum antifouling film preparation device 100 is installed on the side wall of the vacuum process chamber 200, and a mini chamber is built around the side wall of the vacuum process chamber 200, which can form a whole with the vacuum process chamber 200 for operation. In the vacuum setting scheme, the chamber of the preparation device structure has independent vacuum control, and after the liquid addition is completed, it is vacuumed and connected.

[0061] It can also be done in the following way: an annular sealing surface (not shown) is provided at the connection point between the vacuum anti-fouling film preparation device 100 and the vacuum process chamber 200, and a sealing flange is provided on the movable sliding and telescopic device 600 of the crucible 401, and the sealing flange is provided on the side of the crucible close to the center of the vacuum process chamber 200, and the diameter of the sealing flange is larger than the inner diameter of the annular sealing surface; when the sealing flange is driven to reach the annular sealing surface, the sealing flange and the annular sealing surface together constitute a sealing surface, so that the preparation device and the vacuum process chamber 200 are in a separated state.

[0062] Example 3

[0063] like Figure 7 As shown, the present application discloses an embodiment: a method for preparing a vacuum antifouling film, which is used in the above-mentioned vacuum antifouling film preparation device, and the method comprises the following steps:

[0064] Step 1, the product is subjected to substrate coating, and at the same time, the liquid system 300 drips liquid onto the crucible 401;

[0065] Step 2, the product is subjected to plasma treatment, and the crucible 401 is preheated by the electric heater 402; wherein the sliding telescopic device 600 operates when the crucible 401 is preheated, and the continuously variable gear performs corresponding switching actions while the cylinder is extended and retracted, and finally the chain is tightened;

[0066] Step 3, wait for 30 seconds, during which the product is moved to the coating area, the crucible 401 is moved to the coating area through the sliding telescopic device 600, and turned 90 degrees;

[0067] Step 4, when the crucible 401 is heated and evaporated, the servo motor 504 is turned on to move the crucible 401 up and down repeatedly, and the evaporation continues for 10S-1000S;

[0068] Step 5: The crucible 401 is cooled and the coating is completed, and the product and the crucible return to the origin.

[0069] First, the vacuum antifouling film product to be plated must first complete the coating of the base layer. The film layer can be a multi-layer or a single-layer film, as long as the outermost layer reacts with the antifouling film to form SiOx. After the base film layer is completed, the equipment will turn on the plasma to treat the surface of the film layer, which mainly improves the surface properties and increases the bonding strength of the film layer. There are many brands and models of plasma in the current industry, and there is no special limitation in the patent of this invention; wait under vacuum, turn on the relevant process parameters of the main unit of the device, heat it for evaporation coating, and finally form a uniform and firm antifouling film layer. During the preheating process of the crucible, the sliding gear cylinder of the product moves to the specified position, and after the evaporation is completed, the sliding gear cylinder moves back to the origin. The PID parameters are reasonably controlled during the evaporation process of the antifouling film, and the process evaporation rate curve adopts a step-by-step rising form.

[0070] In addition to meeting the needs of small-sized coating, the innovative structural features of the present invention can also meet the needs of 3D special-shaped or large-sized coating. The vacuum anti-fouling film preparation device provided by the present invention realizes a fixed evaporation area and a movable evaporation area by repeatedly moving up and down in a cycle, which can effectively increase the coverage of the crucible evaporation film layer, which is significantly improved compared to the coverage of the fixed position; at the same time, the crucible is flipped 90° so that its front mouth faces the product to be coated, achieving the maximum effective divergence angle, which can effectively reduce the consumption of medicine in the coating manufacturing, increase the coverage of the evaporation source, and improve the uniformity of the anti-fouling film deposition.

[0071] So far, various embodiments of the present disclosure have been described in detail. In order to avoid obscuring the concept of the present disclosure, some details known in the art are not described. Based on the above description, those skilled in the art can fully understand how to implement the technical solution disclosed here.

[0072] Although some specific embodiments of the present disclosure have been described in detail by way of examples, it should be understood by those skilled in the art that the above examples are for illustration only and are not intended to limit the scope of the present disclosure. It should be understood by those skilled in the art that the above embodiments may be modified or some technical features may be replaced by equivalents without departing from the scope and spirit of the present disclosure. In particular, the various technical features mentioned in the various embodiments may be combined in any manner as long as there is no structural conflict.

Claims

1. A vacuum antifouling film preparation device, characterized in that: The vacuum antifouling film preparation device (100) comprises a liquid medicine system (300), a heating device (400), a rotating mechanism (500) and a sliding telescopic device (600); wherein the liquid medicine system (300) is connected to the heating device (400) and is used to transport the liquid medicine to the heating device (400); the heating device (400) is driven by the rotating mechanism (500) to move up and down repeatedly to form a movable evaporation area (406); the sliding telescopic device (600) is connected to control the heating device (400) to achieve horizontal movement of the heating device (400); the heating device (400) comprises a crucible (401) and a motor gear (404); the motor gear (404) acts on the crucible ( The rotating mechanism (500) is a rotating mechanism for performing a 90° flipping action of the crucible (401), wherein the rotating mechanism (500) comprises a servo motor (504), a chain (502), a gear (503) and a stepless speed gear (501); wherein the servo motor (504) provides kinetic energy for the entire rotating mechanism (500) and moves up and down in a circular motion through the chain (502); the gear (503) is installed at both ends or in the middle gap of the crucible (401); the chain (502) has a telescopic function; the stepless speed gear (501) is used to assist the sliding telescopic device (600) to assist in realizing the pushing and stretching action of the chain (502); the main component of the sliding telescopic device (600) is a cylinder, and the position change and movement of the crucible (401) is completed by the telescopic movement of the cylinder.

2. The vacuum antifouling film preparation device according to claim 1, characterized in that: The liquid medicine system (300) comprises a liquid medicine storage tank (301), a transmission pipeline (303) and a drip nozzle (305); wherein the liquid medicine storage tank (301) is provided with a liquid level monitoring device (302), the liquid medicine storage tank (301) is connected to the transmission pipeline (303), and the end of the transmission pipeline (303) is provided with a drip nozzle (305).

3. The vacuum antifouling film preparation device according to claim 2, characterized in that: The transmission pipeline (303) is provided with a metering pump (304) for extracting and measuring the liquid medicine.

4. The vacuum antifouling film preparation device according to claim 1, characterized in that: The heating device (400) comprises an electric heater (402) and a base (403); wherein the crucible (401) is used to contain liquid medicine and is arranged on the base (403) together with the electric heater (402), and the crucible (401) is heated by the electric heater (402).

5. The vacuum antifouling film preparation device according to claim 4, characterized in that: The crucible (401) contains a mesh carrier for locking the drug solution, and the carrier has high temperature resistance.

6. The vacuum antifouling film preparation device according to claim 4, characterized in that: The crucible (401) is configured to change its position as the shape of the product changes.

7. A vacuum antifouling film preparation system, characterized in that: The vacuum antifouling film preparation device (100) comprises the vacuum process chamber (200) as described in any one of claims 1 to 6, wherein the vacuum process chamber (200) is connected to the vacuum antifouling film preparation device (100), and the heating device (400) is moved in the vacuum process chamber (200) via a sliding telescopic device (600).

8. A method for preparing a vacuum antifouling film, the method being carried out by using the device according to any one of claims 1 to 6, characterized in that: The preparation method comprises the following steps: Step 1, coating the product with a substrate, while the liquid medicine system (300) drips liquid onto the crucible (401); Step 2, subjecting the product to plasma treatment, while the crucible (401) is preheated by an electric heater (402); Step 3, waiting for 30 seconds, during which the product is moved to the coating area, the crucible (401) is moved to the coating area through the sliding telescopic device (600), and turned 90 degrees; Step 4, when the crucible (401) is heated and evaporated, the servo motor (504) is turned on, the crucible (401) is repeatedly moved up and down, and the evaporation is continued for 10S-1000S; Step 5, the crucible (401) is cooled and coated, and the product and the crucible return to the origin.

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