A glass substrate surface inspection apparatus

Abstract

The application discloses a kind of glass substrate surface detection device, when the application is used, first glass substrate surface detection push frame assembly, first glass substrate surface detection guide rail support arm assembly and first glass substrate fixed arm assembly between formation first transposition detection rack structure, second glass substrate surface detection push frame assembly, second glass substrate surface detection guide rail support arm assembly and second glass substrate fixed arm assembly between formation second transposition detection rack structure, first transposition detection rack structure and second transposition detection rack structure are respectively symmetric mirror image and set in the top and bottom of support main rack, when actual glass substrate detection, the detection light emitting lamp and detection shooting camera between first transposition detection rack structure and second transposition detection rack structure form glass substrate surface double-sided detection mechanism.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of glass substrate surface detection, and particularly relates to a glass substrate surface detection device. BACKGROUND

[0002] The glass substrate is a kind of thin glass sheet with extremely flat surface, and is one of the key basic materials for flat panel display industry.

[0003] The prior art has the following problems: during the production process of the glass substrate, continuous processing and handling of multiple processes are required, such as cutting, polishing and cleaning, etc. After all the procedures are processed, it must be ensured that there is no scratch or dust accumulation on both sides of the glass substrate, otherwise it will directly affect the subsequent packaging or use of the glass substrate. However, there is a lack of a glass substrate surface detection device which is convenient to use and can be continuously connected and transposed, which is not conducive to the actual detection of the surface of the glass substrate. SUMMARY

[0004] To solve the problems raised in the background art, the present application provides a glass substrate surface detection device, which has the characteristics of facilitating the detection of the surface of the glass substrate.

[0005] To achieve the above-mentioned purpose, the present application provides the following technical scheme: a glass substrate surface detection device, comprising a first glass substrate surface detection push-moving chassis assembly, a second glass substrate surface detection push-moving chassis assembly and a support main frame, the end of the telescopic arm of the first glass substrate surface detection push-moving chassis assembly is provided with a first glass substrate surface detection guide rail support arm assembly, the top of the first glass substrate surface detection guide rail support arm assembly is provided with a first glass substrate fixed arm assembly which is movably arranged in all directions, the first glass substrate surface detection guide rail support arm assembly forms a guide rail arm assembly which can move forward and backward and up and down on the first glass substrate surface detection push-moving chassis assembly, the end of the telescopic arm of the second glass substrate surface detection push-moving chassis assembly is provided with a second glass substrate surface detection guide rail support arm assembly, the top of the second glass substrate surface detection guide rail support arm assembly is provided with a second glass substrate fixed arm assembly which is movably arranged in all directions, the second glass substrate surface detection guide rail support arm assembly forms a guide rail arm assembly which can move forward and backward and up and down on the second glass substrate surface detection push-moving chassis assembly, a first transposition detection rack structure is formed between the first glass substrate surface detection push-moving chassis assembly, the first glass substrate surface detection guide rail support arm assembly and the first glass substrate fixed arm assembly, a second transposition detection rack structure is formed between the second glass substrate surface detection push-moving chassis assembly, the second glass substrate surface detection guide rail support arm assembly and the second glass substrate fixed arm assembly, and the first transposition detection rack structure and the second transposition detection rack structure are respectively symmetrically and mirror-imaged arranged on the top and the bottom of the support main frame.

[0006] The first glass substrate surface detection push carriage assembly comprises a fixed carriage, a two-way threaded screw rod and a driving motor are arranged on the fixed carriage, two internally threaded seat blocks are arranged on the two-way threaded screw rod, two push telescopic arms are arranged between the two internally threaded seat blocks, a hole supporting end table is arranged at the end of the two push telescopic arms, a glass substrate surface detection support is arranged on the top and bottom of the fixed carriage, and a guide rail side table is arranged on the glass substrate surface detection support, a Z-shaped guide rail sliding groove is arranged on the guide rail side table, and a detection light emitting lamp and a detection shooting camera are arranged on the glass substrate surface detection support.

[0007] The first glass substrate surface detection guide rail support arm assembly comprises a guide rail support arm rod, a cross arm rod is fixedly arranged at the bottom of the guide rail support arm rod, a servo motor and a ball groove seat table are fixedly arranged at the top of the guide rail support arm rod through a first fixed arm and a second fixed arm, an inclined handle is arranged on the output shaft of the servo motor, and a pushing spring and a pushing limiting top table are arranged on the top rod body of the guide rail support arm rod.

[0008] Preferably, the first glass substrate fixed arm assembly comprises a glass substrate fixed arm rod, a movable ball head and a glass substrate fixed arm plate are arranged on the glass substrate fixed arm rod, and a suction cup is arranged on the glass substrate fixed arm plate.

[0009] Preferably, the guide rail support arm rod body penetrates and slides with the hole supporting end table, the two ends of the pushing spring abut against the hole supporting end table and the pushing limiting top table respectively, an upward supporting pushing force structure is formed at the top of the first glass substrate surface detection guide rail support arm assembly through the pushing of the pushing spring, and the cross arm rod at the bottom of the guide rail support arm rod is inserted into the Z-shaped guide rail sliding groove.

[0010] Preferably, through cooperation of the Z-shaped guide rail sliding groove and the push telescopic arm, the first glass substrate surface detection guide rail support arm assembly forms a forward moving or lifting support arm structure on the first glass substrate surface detection push carriage assembly.

[0011] Preferably, the first glass substrate surface detection push carriage assembly, the first glass substrate surface detection guide rail support arm assembly and the first glass substrate fixed arm assembly are arranged at the bottom of the support main rack, the second glass substrate surface detection push carriage assembly, the second glass substrate surface detection guide rail support arm assembly and the second glass substrate fixed arm assembly are arranged at the top of the support main rack, the first glass substrate surface detection push carriage assembly is identical in structure to the second glass substrate surface detection push carriage assembly, the first glass substrate surface detection guide rail support arm assembly is identical in structure to the second glass substrate surface detection guide rail support arm assembly, the first glass substrate fixed arm assembly is identical in structure to the second glass substrate fixed arm assembly, and the connection relationship between the first glass substrate surface detection push carriage assembly, the first glass substrate surface detection guide rail support arm assembly and the first glass substrate fixed arm assembly is identical to the connection relationship between the second glass substrate surface detection push carriage assembly, the second glass substrate surface detection guide rail support arm assembly and the second glass substrate fixed arm assembly.

[0012] Preferably, the movable ball head is movable in all directions in the ball groove seat, the inclined holding pipe is fixedly arranged on the output shaft of the servo motor, and the inclined holding pipe is sleeved on the rod body at the bottom of the glass substrate fixed arm rod, and the servo motor drives the inclined holding pipe to perform a circle drawing action, and at this time, the first glass substrate fixed arm assembly at the bottom forms a circle drawing swing arm structure in all directions.

[0013] Preferably, the first glass substrate surface detection push carriage assembly, the first glass substrate surface detection guide rail support arm assembly and the first glass substrate fixed arm assembly are symmetrically and mirror-imaged with the second glass substrate surface detection push carriage assembly, the second glass substrate surface detection guide rail support arm assembly and the second glass substrate fixed arm assembly at the top and the bottom of the support main rack, and the second glass substrate surface detection guide rail support arm assembly forms an arm body structure of forward and backward movement or downward movement on the second glass substrate surface detection push carriage assembly.

[0014] Preferably, when the second glass substrate surface detection push carriage assembly and the first glass substrate surface detection push carriage assembly are synchronously stretched, the suction cups on the second glass substrate fixed arm assembly and the suction cups on the first glass substrate fixed arm assembly are inclined and misaligned to be close to and face each other.

[0015] Compared with the prior art, the beneficial effects of the present application are: when the present application is used, a first transposition detection rack structure is formed between the first glass substrate surface detection push carriage assembly, the first glass substrate surface detection guide rail support arm assembly and the first glass substrate fixing arm assembly, a second transposition detection rack structure is formed between the second glass substrate surface detection push carriage assembly, the second glass substrate surface detection guide rail support arm assembly and the second glass substrate fixing arm assembly, the first transposition detection rack structure and the second transposition detection rack structure are respectively symmetrically arranged on the top and bottom of the support main rack, when the actual glass substrate is detected, the detection light emitting lamp and the detection shooting camera between the first transposition detection rack structure and the second transposition detection rack structure form a glass substrate surface double-sided detection mechanism, the detection light emitting lamp and the detection shooting camera respectively provide the light source and the shooting for the glass substrate surface detection, the surface exploration shot image is uploaded to the external system for analysis and viewing, in actual use, the guide rail support arm rod body penetrates and slides with the hole support end table, an upward support thrust structure is formed at the top of the first glass substrate surface detection guide rail support arm assembly through the thrust of the top pushing spring, the inserted cross arm rod at the bottom of the guide rail support arm rod is inserted into the Z-shaped slide rail groove, through the cooperation of the Z-shaped slide rail groove and the push and pull telescopic arm, the first glass substrate surface detection guide rail support arm assembly forms a forward moving or lifting support arm structure on the first glass substrate surface detection push carriage assembly, the movable ball head moves in all directions in the ball groove seat table, the inclined holding pipe is fixedly arranged on the output shaft of the servo motor, and the inclined holding pipe is sleeved on the rod body at the bottom of the glass substrate fixing arm rod, the servo motor drives the inclined holding pipe to rotate, at this time, a full-range rotating swing arm structure is formed at the bottom of the first glass substrate fixing arm assembly, in this way, the glass substrate moves in all directions during the movement, in this way, the glass substrate is illuminated and shot for detection at all angles and directions, avoiding the blind area, at the same time, the second glass substrate surface detection guide rail support arm assembly forms an arm body structure of forward and backward action or downward action on the second glass substrate surface detection push carriage assembly, when the second glass substrate surface detection push carriage assembly and the first glass substrate surface detection push carriage assembly are synchronously stretched, the suction cups on the second glass substrate fixing arm assembly and the first glass substrate fixing arm assembly are inclined and misaligned and close to each other, in this way, the glass substrate is transposed between the first transposition detection rack structure and the second transposition detection rack structure, in this way, the suction cups can be adsorbed on different positions on the top surface and the bottom surface of the glass substrate, realizing the non-blind area detection of the glass substrate surface detection, avoiding the blind area caused by the suction cup. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 is a perspective view of the present application;

[0017] Figure 2 is an exploded view of the present application;

[0018] Figure 3 This is a perspective view of part of the structure of the present invention;

[0019] Figure 4 This is an exploded view of part of the structure of the present invention;

[0020] Figure 5 This is a perspective view of the first glass substrate surface detection and pushing frame assembly of the present invention;

[0021] Figure 6 This is a perspective view of the first glass substrate surface detection guide rail support arm assembly and the first glass substrate fixing arm assembly of the present invention.

[0022] Figure 7 This is an exploded view of the first glass substrate surface detection guide rail support arm assembly and the first glass substrate fixing arm assembly of the present invention.

[0023] In the figure: 100, First glass substrate surface inspection pushing base assembly; 101, Fixed base frame; 102, Internal threaded seat block; 103, Pushing telescopic arm; 104, Bidirectional threaded screw; 105, Glass substrate surface inspection bracket; 106, Inspection light; 107, Inspection camera; 108, Perforated support end platform; 109, Z-shaped slide rail groove; 110, Guide rail side platform; 111, Drive motor; 200, First glass substrate surface inspection guide rail support arm assembly; 201, Guide rail support arm; 202, Through cross arm; 203, Top 204. Push spring; 205. Push limiting top platform; 206. First fixed arm; 207. Second fixed arm; 208. Ball groove base; 209. Servo motor; 200. Inclined grip tube; 300. First glass substrate fixing arm assembly; 301. Glass substrate fixing arm rod; 302. Movable ball head; 303. Glass substrate fixing arm plate; 304. Suction cup; 400. Second glass substrate surface detection pushing base frame assembly; 500. Second glass substrate surface detection guide rail support arm assembly; 600. Second glass substrate fixing arm assembly; 700. Support main frame. Detailed Implementation

[0024] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0025] Please see Figures 1-7The application provides the following technical scheme: a glass substrate surface detection device, comprising a first glass substrate surface detection push-moving chassis assembly 100, a second glass substrate surface detection push-moving chassis assembly 400 and a support main frame 700, a telescopic arm end portion of the first glass substrate surface detection push-moving chassis assembly 100 is provided with a first glass substrate surface detection guide rail support arm assembly 200, a first glass substrate fixing arm assembly 300 is movably arranged on the top of the first glass substrate surface detection guide rail support arm assembly 200, the first glass substrate surface detection guide rail support arm assembly 200 forms a guide rail arm assembly capable of moving forward and backward and up and down on the first glass substrate surface detection push-moving chassis assembly 100, a telescopic arm end portion of the second glass substrate surface detection push-moving chassis assembly 400 is provided with a second glass substrate surface detection guide rail support arm assembly 500, a second glass substrate fixing arm assembly 600 is movably arranged on the top of the second glass substrate surface detection guide rail support arm assembly 500, the second glass substrate surface detection guide rail support arm assembly 500 forms a guide rail arm assembly capable of moving forward and backward and up and down on the second glass substrate surface detection push-moving chassis assembly 400, a first transposition detection frame structure is formed between the first glass substrate surface detection push-moving chassis assembly 100, the first glass substrate surface detection guide rail support arm assembly 200 and the first glass substrate fixing arm assembly 300, a second transposition detection frame structure is formed between the second glass substrate surface detection push-moving chassis assembly 400, the second glass substrate surface detection guide rail support arm assembly 500 and the second glass substrate fixing arm assembly 600, the first transposition detection frame structure and the second transposition detection frame structure are respectively arranged symmetrically and in mirror image on the top and the bottom of the support main frame 700, the first glass substrate surface detection push-moving chassis assembly 100, the first glass substrate surface detection guide rail support arm assembly 200 and the first glass substrate fixing arm assembly 300 are arranged on the bottom of the support main frame 700, the second glass substrate surface detection push-moving chassis assembly 400, the second glass substrate surface detection guide rail support arm assembly 500 and the second glass substrate fixing arm assembly 600 are arranged on the top of the support main frame 700, the first glass substrate surface detection push-moving chassis assembly 100 is identical in structure to the second glass substrate surface detection push-moving chassis assembly 400, the first glass substrate surface detection guide rail support arm assembly 200 is identical in structure to the second glass substrate surface detection guide rail support arm assembly 500, the first glass substrate fixing arm assembly 300 is identical in structure to the second glass substrate fixing arm assembly 600, the connection relationship between the first glass substrate surface detection push-moving chassis assembly 100, the first glass substrate surface detection guide rail support arm assembly 200 and the first glass substrate fixing arm assembly 300 is identical to the connection relationship between the second glass substrate surface detection push-moving chassis assembly 400, the second glass substrate surface detection guide rail support arm assembly 500 and the second glass substrate fixing arm assembly 600,The first glass substrate surface detection push carriage assembly 100, the first glass substrate surface detection guide rail support arm assembly 200 and the first glass substrate fixing arm assembly 300 are symmetrically and mirror-imaged with the second glass substrate surface detection push carriage assembly 400, the second glass substrate surface detection guide rail support arm assembly 500 and the second glass substrate fixing arm assembly 600 on the top and bottom of the support main rack 700, the second glass substrate surface detection guide rail support arm assembly 500 forms an arm body structure of forward and backward movement or downward movement on the second glass substrate surface detection push carriage assembly 400, when the second glass substrate surface detection push carriage assembly 400 and the first glass substrate surface detection push carriage assembly 100 are synchronously stretched, the suction cups on the second glass substrate fixing arm assembly 600 and the suction cups on the first glass substrate fixing arm assembly 300 are inclined and dislocated to close and face each other,

[0026] The first glass substrate surface detection push carriage assembly 100 comprises a fixed carriage 101, a bidirectional threaded screw 104 and a driving motor 111 are arranged on the fixed carriage 101, two internal threaded seat blocks 102 are arranged on the bidirectional threaded screw 104, two push and pull telescopic arms 103 are arranged between the two internal threaded seat blocks 102, a hole supporting end table 108 is arranged at the end of the two push and pull telescopic arms 103, a glass substrate surface detection support 105 and a guide rail side table 110 are arranged on the top and bottom of the fixed carriage 101 respectively, a Z-shaped slide rail sliding groove 109 is arranged on the guide rail side table 110, a detection light emitting lamp 106 and a detection shooting camera 107 are arranged on the glass substrate surface detection support 105, through the cooperation of the Z-shaped slide rail sliding groove 109 and the push and pull telescopic arms 103, the first glass substrate surface detection guide rail support arm assembly 200 forms a support arm structure of forward movement or lifting on the first glass substrate surface detection push carriage assembly 100;

[0027] The first glass substrate surface detection guide rail support arm assembly 200 comprises a guide rail support arm rod 201, a penetrating cross arm rod 202 is fixedly arranged at the bottom of the guide rail support arm rod 201, a servo motor 208 and a ball groove seat table 207 are fixedly arranged at the top of the guide rail support arm rod 201 through a first fixing arm 205 and a second fixing arm 206, an inclined holding pipe 209 is arranged on the output shaft of the servo motor 208, a push spring 203 and a push limiting top table 204 are arranged on the top rod body of the guide rail support arm rod 201, the guide rail support arm rod 201 rod body penetrates and slides with the hole supporting end table 108, the two ends of the push spring 203 respectively abut against the hole supporting end table 108 and the push limiting top table 204, through the pushing of the push spring 203, an upward supporting pushing force structure is formed at the top of the first glass substrate surface detection guide rail support arm assembly 200, the penetrating cross arm rod 202 at the bottom of the guide rail support arm rod 201 is inserted into the Z-shaped slide rail sliding groove 109;

[0028] The first glass substrate fixing arm assembly 300 comprises a glass substrate fixing arm rod 301, a movable ball head 302 and a glass substrate fixing arm plate 303 are arranged on the glass substrate fixing arm rod 301, a suction cup 304 is arranged on the glass substrate fixing arm plate 303, the movable ball head 302 is omnidirectional movable in the ball groove seat table 207, the inclined holding pipe 209 is fixedly arranged on the output shaft of the servo motor 208, and the inclined holding pipe 209 is sleeved on the rod body at the bottom of the glass substrate fixing arm rod 301, and the inclined holding pipe 209 is driven to circle by the servo motor 208, at this time, the first glass substrate fixing arm assembly 300 at the bottom forms an omnidirectional circle swinging arm structure.

[0029] The working principle and usage process of this invention: When this invention is used, a first transposition detection frame structure is formed between the first glass substrate surface detection pushing base assembly 100, the first glass substrate surface detection guide rail support arm assembly 200, and the first glass substrate fixing arm assembly 300. A second transposition detection frame structure is formed between the second glass substrate surface detection pushing base assembly 400, the second glass substrate surface detection guide rail support arm assembly 500, and the second glass substrate fixing arm assembly 600. The first and second transposition detection frame structures are symmetrically mirrored at the top and bottom of the supporting main frame 700, respectively. During actual glass substrate detection, the detection light emitted between the first and second transposition detection frame structures... The lamp 106 and the detection camera 107 form a double-sided detection mechanism for the glass substrate surface. The detection lamp 106 and the detection camera 107 provide the light source and capture images of the glass substrate surface, respectively. The captured surface images can be uploaded to an external system for analysis and viewing. In actual use, the guide rail support arm 201 slides through the perforated support end plate 108. Through the pushing of the push spring 203, the top of the first glass substrate surface detection guide rail support arm assembly 200 forms an upward support thrust structure. The through-arm 202 at the bottom of the guide rail support arm 201 is inserted into the Z-shaped slide rail groove 109. Through the cooperation of the Z-shaped slide rail groove 109 and the push telescopic arm 103, the first glass substrate surface detection... The guide rail support arm assembly 200 forms a forward-moving or lifting support arm structure on the first glass substrate surface detection and pushing base assembly 100. The movable ball head 302 moves omnidirectionally within the ball groove base 207. The tilting grip tube 209 is tilted and fixedly mounted on the output shaft of the servo motor 208, and the tilting grip tube 209 is sleeved on the rod at the bottom of the glass substrate fixing arm 301. The servo motor 208 drives the tilting grip tube 209 to make a circular motion. At this time, the bottom of the first glass substrate fixing arm assembly 300 forms an omnidirectional circular rocking arm structure. In this way, the glass substrate moves omnidirectionally during the movement. In this way, the glass substrate is detected by illumination imaging from various angles and orientations, avoiding blind spots. At the same time, the second glass... The substrate surface detection guide rail support arm assembly 500 forms an arm structure on the second glass substrate surface detection push frame assembly 400 for forward and backward or downward movement. When the second glass substrate surface detection push frame assembly 400 and the first glass substrate surface detection push frame assembly 100 extend synchronously, the suction cup on the second glass substrate fixing arm assembly 600 and the suction cup on the first glass substrate fixing arm assembly 300 are tilted and misaligned to face each other. In this way, the substrate glass can be repositioned between the first and second repositioning detection frame structures. This method allows the suction cup to be adsorbed at different positions on the top and bottom surfaces of the substrate glass, achieving blind-zone-free detection of the glass substrate surface and avoiding blind zones caused by suction cup caps.

[0030] While embodiments of the present application have been shown and described, it is to be understood that various modifications, substitutions, replacements and variations can be made to these embodiments without departing from the principles and spirit of the present application, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A glass substrate surface inspection device, comprising a first glass substrate surface inspection pushing base assembly (100), a second glass substrate surface inspection pushing base assembly (400), and a supporting main frame (700), characterized in that: The telescopic arm end of the first glass substrate surface detection push base assembly (100) is provided with a first glass substrate surface detection guide rail support arm assembly (200). The top of the first glass substrate surface detection guide rail support arm assembly (200) is omnidirectionally swingable and is provided with a first glass substrate fixing arm assembly (300). The first glass substrate surface detection guide rail support arm assembly (200) forms a guide rail arm assembly for forward and backward and vertical movement on the first glass substrate surface detection push base assembly (100). The telescopic arm end of the second glass substrate surface detection push base assembly (400) is provided with a second glass substrate surface detection guide rail support arm assembly (500). The top of the second glass substrate surface detection guide rail support arm assembly (500) is omnidirectionally swingable and is provided with a second glass substrate fixing arm assembly. The second glass substrate surface detection guide rail support arm assembly (500) forms a guide rail arm assembly that moves back and forth and up and down on the second glass substrate surface detection push base assembly (400). A first displacement detection frame structure is formed between the first glass substrate surface detection push base assembly (100), the first glass substrate surface detection guide rail support arm assembly (200) and the first glass substrate fixing arm assembly (300). A second displacement detection frame structure is formed between the second glass substrate surface detection push base assembly (400), the second glass substrate surface detection guide rail support arm assembly (500) and the second glass substrate fixing arm assembly (600). The first displacement detection frame structure and the second displacement detection frame structure are respectively symmetrically mirrored on the top and bottom of the supporting main frame (700). The first glass substrate surface detection pushing base assembly (100), the first glass substrate surface detection guide rail support arm assembly (200), and the first glass substrate fixing arm assembly (300) are disposed at the bottom of the supporting main frame (700). The second glass substrate surface detection pushing base assembly (400), the second glass substrate surface detection guide rail support arm assembly (500), and the second glass substrate fixing arm assembly (600) are disposed at the top of the supporting main frame (700). The first glass substrate surface detection pushing base assembly (100) and the second glass substrate surface detection pushing base assembly (400) have the same structure. The structure of the rail support arm assembly (200) and the second glass substrate surface detection guide rail support arm assembly (500) is the same. The structure of the first glass substrate fixing arm assembly (300) and the second glass substrate fixing arm assembly (600) is the same. The connection relationship between the first glass substrate surface detection push base assembly (100), the first glass substrate surface detection guide rail support arm assembly (200) and the first glass substrate fixing arm assembly (300) is the same as the connection relationship between the second glass substrate surface detection push base assembly (400), the second glass substrate surface detection guide rail support arm assembly (500) and the second glass substrate fixing arm assembly (600). The first glass substrate surface detection push-pull base assembly (100) includes a fixed base (101), on which a bidirectional threaded screw (104) and a drive motor (111) are provided. The bidirectional threaded screw (104) is provided with two internal threaded blocks (102), and two push-pull telescopic arms (103) are provided between the two internal threaded blocks (102). The ends of the two push-pull telescopic arms (103) are provided with perforated support end platforms (108). The top and bottom of the fixed base (101) are respectively provided with a glass substrate surface detection bracket (105) and a guide rail side platform (110). The guide rail side platform (110) is provided with a Z-shaped slide rail groove (109). The glass substrate surface detection bracket (105) is provided with a detection light lamp (106) and a detection camera (107). The first glass substrate surface detection guide rail support arm assembly (200) includes a guide rail support arm rod (201). The bottom of the guide rail support arm rod (201) is fixedly provided with an interpenetrating cross arm rod (202), and the top of the guide rail support arm rod (201) is fixedly provided with a servo motor (208) and a ball groove seat (207) through a first fixed arm (205) and a second fixed arm (206). An inclined grip tube (209) is provided on the output shaft of the servo motor (208), and a push spring (203) and a push limiting top platform (204) are provided on the top rod of the guide rail support arm rod (201). The guide rail support arm (201) slides through the perforated support end platform (108). The two ends of the push spring (203) abut against the perforated support end platform (108) and the push limiting top platform (204) respectively. Through the push of the push spring (203), an upward support thrust structure is formed at the top of the first glass substrate surface detection guide rail support arm assembly (200). The through cross arm (202) at the bottom of the guide rail support arm (201) is inserted into the Z-shaped slide rail groove (109).

2. The glass substrate surface inspection device according to claim 1, characterized in that: The first glass substrate fixing arm assembly (300) includes a glass substrate fixing arm rod (301), on which a movable ball head (302) and a glass substrate fixing arm plate (303) are provided, and on which a suction cup (304) is provided.

3. The glass substrate surface inspection device according to claim 1, characterized in that: Through the cooperation of the Z-shaped slide rail groove (109) and the push telescopic arm (103), the first glass substrate surface detection guide rail support arm assembly (200) forms a forward-moving or lifting support arm structure on the first glass substrate surface detection push base assembly (100).

4. The glass substrate surface inspection device according to claim 2, characterized in that: The movable ball head (302) moves in all directions within the ball groove base (207). The inclined grip tube (209) is inclinedly fixed on the output shaft of the servo motor (208), and the inclined grip tube (209) is sleeved on the rod at the bottom of the glass substrate fixing arm (301). The servo motor (208) drives the inclined grip tube (209) to make a circular motion. At this time, the bottom of the first glass substrate fixing arm assembly (300) forms an all-round circular rocking arm structure.

5. The glass substrate surface inspection device according to claim 1, characterized in that: The first glass substrate surface detection push base assembly (100), the first glass substrate surface detection guide rail support arm assembly (200), and the first glass substrate fixing arm assembly (300) are symmetrically mirrored with the second glass substrate surface detection push base assembly (400), the second glass substrate surface detection guide rail support arm assembly (500), and the second glass substrate fixing arm assembly (600) at the top and bottom of the supporting main frame (700). The second glass substrate surface detection guide rail support arm assembly (500) forms an arm structure on the second glass substrate surface detection push base assembly (400) that can move back and forth or descend.

6. The glass substrate surface inspection device according to claim 1, characterized in that: When the second glass substrate surface detection push base assembly (400) and the first glass substrate surface detection push base assembly (100) extend synchronously, the suction cup on the second glass substrate fixing arm assembly (600) and the suction cup on the first glass substrate fixing arm assembly (300) are tilted and misaligned and close to face each other.

Images