Aluminum nitride substrate green body glue removal furnace and glue removal method

Abstract

The application belongs to the technical field of ceramic green body glue removal, and particularly relates to an aluminum nitride substrate green body glue removal furnace and a glue removal method. The glue removal furnace comprises a furnace cavity which is arranged in a furnace body; an air inlet pipe which is arranged on one side of the furnace body and is connected with an air source; an isolation plate which is arranged in the furnace cavity and divides the furnace cavity into an air heating cavity and a glue removal cavity; an air supply hole which is vertically arranged on the surface of the isolation plate; a placing plate which is arranged in the glue removal cavity; an L-shaped air outlet pipe which is communicated with the glue removal cavity; and a hot air supply assembly which is arranged in the air heating cavity. The application can solve the problem of uneven cracking and removal of organic matters in the aluminum nitride substrate green body and the inner and outer green bodies at different positions in the glue removal furnace. Compared with the prior art, the temperature and airflow uniformity of each part in the furnace are improved, so that the glue removal effect of each part is consistent, and the consistency of the products is controlled.

Description

Technical Field

[0001] This invention belongs to the field of ceramic green body glue removal technology, specifically a glue removal furnace and glue removal method for aluminum nitride substrate green bodies. Background Technology

[0002] With the development of industrial production technology, aluminum nitride ceramic substrates are widely used in the electronics industry due to their high strength, fracture toughness, hardness, wear resistance, and good chemical and thermal stability. To remove the organic additives generated during the substrate greening process through high-temperature softening and decomposition, debinding furnaces are used in the processing of aluminum nitride ceramic substrates. Currently, most factories still use hot-air debinding furnaces to produce aluminum nitride ceramic substrates.

[0003] The main process of the aluminum nitride substrate green blank debinding furnace is as follows: The aluminum nitride substrate green blank to be processed is evenly placed on the placement plate in the debinding furnace; the furnace cavity is equipped with an electric heater, which heats the air or heat transfer medium in the furnace through the heating element. The temperature in the furnace cavity gradually increases, and the organic additives are slowly discharged from the green blank and carried out of the debinding furnace with the airflow.

[0004] However, in actual production, due to uneven heating of air or heat transfer medium by electric heaters in the furnace cavity and unreasonable layout, the green substrate blown into the furnace cavity cannot be heated evenly. This results in differences in the discharge rate and residual amount of organic additives in products at different locations, affecting the uniformity of glue discharge products. Consequently, the consistency of products after sintering is poor within the sheet and between batches, leading to unstable product quality. Summary of the Invention

[0005] To overcome the shortcomings of existing technologies and solve the aforementioned technical problems, this invention proposes a debinding furnace and debinding method for aluminum nitride substrate green blanks.

[0006] The technical solution adopted by the present invention to solve its technical problem is: the aluminum nitride substrate green blank debinding furnace of the present invention includes a furnace cavity, which is formed in the furnace body;

[0007] An air intake pipe is located on one side of the furnace body and is connected to an external air source;

[0008] An insulating plate, located inside the furnace cavity, divides the furnace cavity into an air heating cavity and a glue removal cavity, and the air inlet pipe is connected to the air heating cavity;

[0009] Air supply holes are vertically opened on the surface of the partition plate, and the number of them is one or more.

[0010] A placement plate is located inside the glue discharge chamber, and the number of the placement plate is the same as the number of air supply holes. The placement plate has several small holes.

[0011] The L-shaped air outlet pipe is connected to the glue discharge chamber;

[0012] A hot air supply assembly is located inside the air heating chamber; the hot air supply assembly includes:

[0013] The heater, located inside the air heating chamber, is controlled via the control panel;

[0014] A fan is located inside the air heating chamber and is fixed to the insulation plate;

[0015] A cavity is formed within the partition plate, and the cavity and the air supply hole are located on the same horizontal plane.

[0016] Guide rails are provided at the top and bottom of the cavity;

[0017] The baffle is located inside the cavity;

[0018] The slider has one end slidably connected to the guide rail and the other end fixed to the baffle plate, which is used to block the air supply hole;

[0019] A shape memory metal strip, one end of which is fixed to the baffle plate and the other end of which is fixed to the end of the cavity.

[0020] Optionally, it also includes: a take-up reel located outside the air heating chamber at the same horizontal level as the baffle; it is connected to the end of the baffle away from the memory metal strip, and the take-up reel is controlled by the control panel.

[0021] A wind speed sensor is located in the L-shaped air outlet duct, and the data collected by the wind speed sensor is transmitted to the control panel.

[0022] Optionally, two heat exchange tubes are vertically installed on the L-shaped air outlet pipe. The heat exchange tubes enter from the top of the L-shaped air outlet pipe and extend from the bottom. The part of the heat exchange tube inside the L-shaped air outlet pipe has a disc-shaped structure. A gas supply pipe is provided inside the furnace body. The bottom of the heat exchange tube is connected to the gas supply pipe, and the gas supply pipe is connected to the air inlet pipe.

[0023] Optionally, the L-shaped air outlet duct has a placement slot located between the two air exchange ducts. The placement slot contains a collection tray with a hollow center. The collection tray has filter screens at both ends and a handle at the top.

[0024] Optionally, activated carbon may be placed in the hollow part of the collection tray.

[0025] Optionally, the wind speed sensor in the L-shaped air outlet duct is a high-temperature resistant Pitot tube wind speed transmitter wind speed sensor.

[0026] Optionally, the furnace body is provided with a door frame, and a high-temperature resistant rope is installed at the door frame.

[0027] Optionally, the furnace body is equipped with a sealed door, and the handle of the sealed door is a rotary threaded handwheel.

[0028] A method for removing adhesive from a green aluminum nitride substrate, using the aforementioned aluminum nitride substrate green adhesive removal furnace, characterized in that the method includes the following steps:

[0029] S1: One side of the aluminum nitride green billet is coated with a layer of interlayer powder. After the interlayer powder is applied, the green billets are neatly arranged in groups of 4-12 on a high-temperature resistant carrier plate.

[0030] S2: The high-temperature resistant carrier plate containing the green blank in S1 is neatly inserted into the metal glue rack. The spacing between each layer of the metal glue rack is greater than 25mm. Holes are opened at the top and bottom of the metal glue rack.

[0031] S3: Place the metal glue rack described in S2 evenly on the placement plate;

[0032] S4: Slowly raise the temperature of the aluminum nitride substrate green blank debinding furnace to 200-250℃, 380-420℃, and 530-600℃ in sequence, and hold each temperature for 1-5 hours.

[0033] S5: Slowly cool down to 350-400℃ and then allow to cool naturally.

[0034] The beneficial effects of this invention are as follows:

[0035] 1. The aluminum nitride substrate green blank debinding furnace of the present invention, by setting a heater, a fan and shape memory metal, can make the temperature of the air in the air heating chamber relatively uniform. At the same time, during the shrinkage of the shape memory metal strip, the heated gas in the air heating chamber can be uniformly sent into the debinding chamber, reducing the uneven heating of the green blank in different positions caused by the inconsistent temperature of the hot air entering the debinding chamber, which leads to deformation and cracking problems. The difference in the discharge rate and residual amount of organic additives affects the uniformity of the debinded products, resulting in poor consistency within the sheet and between batches after sintering, and unstable product quality.

[0036] 2. The aluminum nitride substrate green blank debinding furnace of the present invention can control the wind take-up device and wind speed sensor to make the air volume of each layer entering the debinding chamber through the air supply hole relatively consistent, thereby reducing the uneven heating of green blanks at different positions of different layers and insufficient carbon-oxygen reaction caused by uneven air volume in each layer of the debinding chamber, resulting in inconsistent residual carbon content.

[0037] 3. The aluminum nitride substrate green blank gluing furnace of the present invention achieves heat exchange with the high-temperature gas in the L-shaped air outlet pipe by setting two heat exchange tubes and an L-shaped air outlet pipe. The gas entering the air heating chamber is preheated by heat exchange, which avoids the problem of low temperature at the outer edge of the furnace and uneven temperature in the furnace caused by the entry of cold air. It also shortens the heating time of the gas in the air heating chamber, solves the problem of constant emission of high-temperature gas, effectively improves the utilization rate of heat in the high-temperature gas, reduces the energy consumption cost of factory production, and can reduce the temperature of the working area and improve the working comfort of employees. Attached Figure Description

[0038] The invention will now be further described with reference to the accompanying drawings.

[0039] Figure 1 This is a perspective view of the present invention;

[0040] Figure 2 This is a perspective view of the box door of the present invention when it is open;

[0041] Figure 3 This is a cross-sectional view of the present invention;

[0042] Figure 4 This is the present invention. Figure 3 Enlarged view of point A in the middle;

[0043] Figure 5 This is the present invention. Figure 3 Enlarged view at point B in the middle;

[0044] Figure 6 This is a diagram showing the initial state of the baffle in this invention;

[0045] Figure 7 This is a diagram showing the working state of the baffle in this invention;

[0046] Figure 8 This is a structural diagram of the disc-shaped structure of the heat exchange tube in this invention;

[0047] Figure 9 This is a top view of the collection tray in this invention;

[0048] Figure 10 This is a cross-sectional view of the top view of the collection tray in this invention;

[0049] In the diagram: 1. Furnace body; 2. Control panel; 3. Furnace cavity; 4. Air inlet pipe; 5. Insulation plate; 6. Air heating chamber; 7. Adhesive discharge chamber; 8. Air outlet; 9. Placement plate; 10. L-shaped air outlet pipe; 11. Hot air supply assembly; 12. Heater; 13. Fan; 14. Cavity; 15. Guide rail; 16. Baffle plate; 17. Slider; 18. Memory metal strip; 19. Cable retractor; 20. Wind speed sensor; 21. Heat exchange tube; 22. Disc structure; 23. Air supply pipe; 24. Placement slot; 25. Collection tray; 26. Filter screen; 27. Handle; 28. Sagger; 29. ​​High-temperature resistant rope; 30. Sealed cabinet door; 31. Rotary threaded handwheel. Detailed Implementation

[0050] To make the technical means, creative features, objectives and effects of this invention easier to understand, the invention will be further described below in conjunction with specific embodiments.

[0051] Example 1, as Figures 1 to 10 As shown, the present invention discloses an aluminum nitride substrate green glue removal furnace; comprising:

[0052] Furnace cavity 3 is formed inside the furnace body 1;

[0053] Air inlet pipe 4 is located on one side of the furnace body 1 and is connected to an external air source;

[0054] The insulating plate 5 is located inside the furnace cavity 3, dividing the furnace cavity 3 into an air heating cavity 6 and a glue discharge cavity 7. The air inlet pipe 4 is connected to the air heating cavity 6.

[0055] Air supply holes 8 are vertically opened on the surface of the partition plate 5, and the number of them is one or more.

[0056] Placement plate 9 is located inside the glue discharge chamber 7, and its number is the same as that of the air supply holes 8. Several small holes are opened on the placement plate 9.

[0057] L-shaped air outlet pipe 10, which is connected to the glue discharge chamber 7;

[0058] The furnace body 1 is equipped with a sealed sealing box door 30;

[0059] Hot air supply assembly 11; located within the air heating chamber 6, the hot air supply assembly 11 includes;

[0060] The heater 12 is located inside the air heating chamber 6 and is controlled by the control panel 2;

[0061] Fan 13 is located inside the air heating chamber 6 and is fixed to the insulating plate 5;

[0062] Cavity 14 is formed inside the partition plate 5, and cavity 14 and air outlet 8 are located on the same horizontal plane;

[0063] Guide rails 15 are provided at the top and bottom of the cavity 14;

[0064] baffle 16 is located inside the cavity 14;

[0065] The slider 17 has one end slidably connected to the guide rail 15 and the other end fixed to the baffle 16, which is used to block the air supply hole 8.

[0066] A memory metal strip 18, one end of which is fixed to the baffle 16 and the other end of which is fixed to the end of the cavity 14;

[0067] Specifically, when the aluminum nitride substrate green blank debinding furnace is put into use, the worker evenly places the aluminum nitride substrate green blank on the placement plate 9 in the debinding chamber 7, closes the sealed door 30, and issues a work command through the control panel 2 to control the debinding furnace to start working. After the debinding furnace starts working, external pressurized air enters the air heating chamber 6 through the air intake pipe 4. After the air enters the air heating chamber 6, the control panel 2 controls the heater 12 to start heating the gas in the air heating chamber 6. During the heating process, the pressurized airflow in the air intake pipe 4 enters the air heating chamber 6 and drives the fan 13 to rotate, so that the temperature of the heated gas in the air heating chamber 6 is relatively uniform. At this time, when the gas temperature in the air heating chamber 6 reaches the deformation temperature of the shape memory strip 18... When heated, the shape memory metal strip 18 shrinks and moves the baffle 16. Since the baffle 16 is fixed with a slider 17, the baffle 16 can move in the direction of shrinkage of the shape memory metal strip 18 through the slider 17 in the guide rail 15. After the baffle 16 moves in the direction of shrinkage of the shape memory metal strip 18, the air outlet 8 is unblocked. At this time, the air with a relatively uniform temperature in the air heating chamber 6 enters the glue removal chamber 7 to remove glue from the aluminum nitride substrate green blank, thereby reducing the uneven temperature of the hot air entering the glue removal chamber 7. The uneven heating of the green blank in different positions will cause deformation and cracking problems. The difference in the discharge rate and residual amount of organic additives will affect the uniformity of the glue-removed products, resulting in poor consistency within the sheet and between batches after sintering, and unstable product quality.

[0068] Therefore, in this invention, through the cooperation of the temperature heater 12, the fan 13, and the shape memory metal strip 18, the air in the air heating chamber 6 can be rapidly heated to the required working temperature, and the temperature of the air in the air heating chamber 6 can be made relatively uniform. At the same time, during the shrinkage of the shape memory metal strip 18, the heated air in the air heating chamber 6 can enter the glue discharge chamber 7 in a relatively uniform time, reducing the temperature inconsistency of the hot air entering the glue discharge chamber 7. This reduces the differences in the discharge rate and residual amount of organic additives in different positions of the product, which affects the uniformity of the glue-discharged product. Consequently, the product sintering results in poor consistency within the sheet and between batches, leading to unstable product quality.

[0069] Example 2: The present invention provides a green glue removal furnace for aluminum nitride substrates; it also includes:

[0070] The take-up coil 19 is located outside the air heating chamber 6 and at the same horizontal level as the baffle plate 16; one end of the high-temperature resistant wire in the take-up coil 19 is fixed to the take-up coil 19, and the other end is connected to the end of the baffle plate 16 away from the shape memory metal strip 18; the take-up coil 19 is controlled by the control panel 2.

[0071] The wind speed sensor 20 is located in the L-shaped air outlet duct 10, and the data collected by the wind speed sensor 20 is transmitted to the control panel 2.

[0072] Specifically, after the gas in the glue discharge chamber 7 decomposes and discharges the organic additives in the aluminum nitride substrate blank, the air in the glue discharge chamber 7 will be discharged through the L-shaped air outlet duct 10. Since the L-shaped air outlet duct 10 is equipped with a wind speed sensor 20, when the air in the glue discharge chamber 7 enters the L-shaped air outlet duct 10, the wind speed sensor 20 will measure the wind speed of each layer of placement board 9 at this time, and transmit the measured data to the control panel 2. After receiving the wind speed data of each layer of placement board 9, the control panel 2 compares and processes the data, and controls the take-up coil 19 to pull the baffle 16 to adjust the size of the air outlet 8. For example, when the wind speed data of each layer of placement board 9 are relatively consistent, the control panel 2 sends a standby command to the take-up coil 19. When the take-up coil 19 is not working, and there is a large difference in the wind speed data of each layer of placement plate 9, the control panel 2 sends a working signal to the take-up coil 19 according to the wind speed data at this time, and controls the take-up coil 19 of the layer with the larger wind speed to pull back, so that the baffle plate 16 blocks part of the air supply hole 8, reduces the ventilation area of ​​the air supply hole 8, and reduces the amount of air entering the glue discharge chamber 7 through the air supply hole 8. This makes the air volume of heated air entering each layer through the air supply port relatively consistent, thereby reducing the difference in the discharge rate and residual amount of organic additives in different positions of the product due to the uneven air volume in each layer of the glue discharge chamber 7, which affects the uniformity of glue discharge products, resulting in poor consistency within the sheet and between batches after product sintering, and unstable product quality.

[0073] Therefore, in this invention, through the cooperation of the control panel 2, the take-up coil 19, and the wind speed sensor 20, firstly, the wind speed sensor 20 in the L-shaped air outlet duct 10 measures the wind speed of each layer and transmits the data to the control panel 2, which can make a preliminary estimate of the air volume of each layer in the glue discharge chamber 7; at the same time, the control panel 2 controls the operation of the take-up coil 19, which can make the air volume of each layer entering the glue discharge chamber 7 through the air supply hole 8 relatively consistent, thereby reducing the difference in the discharge rate and residual amount of organic additives in different positions of the product due to the uneven air volume of each layer in the glue discharge chamber 7, which affects the uniformity of the glue discharge product, resulting in poor consistency within the sheet and between batches after sintering, and unstable product quality.

[0074] Furthermore, since the air temperature inside the glue discharge chamber 7 is relatively high, in order to prevent the wind speed sensor 20 from being damaged by high temperature and resulting in inaccurate measurement results, a high-temperature resistant wind speed sensor 20 with a Pitot tube is selected in this invention.

[0075] It should be noted that the high-temperature resistant wire in the take-up coil 19 is in a slack state when initially connected to the baffle plate 16, which makes it easier for the memory metal strip 18 to pull the baffle plate 16 to move.

[0076] Example 3: The present invention provides a green glue removal furnace for aluminum nitride substrates; it also includes:

[0077] Two heat exchange tubes 21 are vertically installed on the L-shaped air outlet duct 10. The heat exchange tubes 21 enter from the top of the L-shaped air outlet duct 10 and extend from the bottom. The part of the heat exchange tube 21 inside the L-shaped air outlet duct 10 is a disc-shaped structure 22. A gas supply pipe 23 is provided inside the furnace body 1. The bottom of the heat exchange tube 21 is connected to the gas supply pipe 23, and the gas supply pipe 23 is connected to the air inlet pipe 4.

[0078] Specifically, in the prior art or the present invention, the high-temperature air in the glue discharge chamber 7, after carrying the volatilized and decomposed organic additives, still has a large amount of heat when it enters the L-shaped air outlet duct 10. Moreover, dangerous gases are easily generated during the high-temperature glue discharge process. Therefore, if it is discharged directly without treatment, it will not only waste heat resources, but also easily cause environmental pollution.

[0079] Therefore, in this invention, both heat exchange tubes 21 are connected to an external air source, such as an air pump. When the high-temperature gas passes through the air exchange tube and is located at the disc-shaped structure 22 inside the L-shaped air outlet duct 10, the gas in the heat exchange tube 21 will carry away most of the heat. The L-shaped air outlet duct 10 can be connected to an external gas treatment device, and the gas after cooling can be collected and treated by the gas treatment device. After the heat exchange is completed, the gas with heat in the heat exchange tube 21 enters the air inlet pipe 4 through the air delivery pipe 23, and then enters the air heating chamber 6 through the air inlet pipe 4. The gas is preheated in advance through heat exchange, which shortens the heating time of the gas in the air heating chamber 6, solves the problem of inconvenient discharge of high-temperature gas, and effectively improves the utilization rate of heat in the high-temperature gas, reducing the production cost of the factory.

[0080] Therefore, the ventilation pipe and the L-shaped air outlet pipe 10 work together to first cool down the high-temperature gas through the heat exchange pipe 21, which assists in the gas recovery process. At the same time, after the heat exchange pipe 21 cools down the high-temperature gas, it can preheat the gas in the heat exchange pipe, thereby shortening the heating time of the gas in the air heating chamber 6, solving the problem of inconvenient discharge of high-temperature gas, and effectively improving the utilization rate of heat in the high-temperature gas, thus reducing the production cost of the factory.

[0081] Example 4: The present invention provides a green glue removal furnace for aluminum nitride substrates; it also includes:

[0082] The L-shaped air outlet duct 10 has a placement slot 24, which is located between the two air exchange ducts. The placement slot 24 has a collection tray 25 inside, and the middle of the collection tray 25 is a cavity 14. The two ends of the collection tray 25 are equipped with filter screens 26, and the top of the collection tray 25 is designed with a handle 27.

[0083] Activated carbon is placed in the central cavity 14 of the collection tray 25.

[0084] Specifically, during the debinding process of aluminum nitride substrate green blanks, high-temperature gas blows dust and other impurity particles from the surface of the green blank into the L-shaped air duct. Without filtration and collection, this can cause frictional damage to the pipes at the junction of the L-shaped air duct and the disc-shaped structure 22 of the heat exchange tube 21. In this invention, dust and other particles can be collected using a collection tray 25, with filter screens 26 at both ends. Larger particles like dust, after being filtered by the filter screens 26, will cover the mesh openings, reducing the mesh size and allowing the filter screens 26 to intercept more and smaller impurity particles. The activated carbon in the cavity 14 of the collection tray 25 further filters irritating odors from the gas, solving some of the gas treatment and emission problems. This reduces the diffusion of pollutants and further improves the environmental performance of the aluminum nitride substrate green blank debinding furnace.

[0085] Furthermore, when the collection tray 25 accumulates a large amount of dust particles, it can be directly replaced, making its use cheaper and improving production efficiency.

[0086] Furthermore, since the collection tray 25 is placed between the two ventilation pipes, the temperature at the location of the collection tray 25 is the lowest compared to other locations. When the gas entering the L-shaped air outlet duct 10 passes through the disc-shaped structure 22 of the two heat exchange tubes 21, the water vapor and wax vapor in the gas in the L-shaped air outlet duct 10 will liquefy and adhere to the surface of the disc-shaped structure 22 of the heat exchange tubes 21 due to the low temperature of the gas in the heat exchange tubes 21. At the same time, the water droplets formed by the liquefied water vapor can adsorb impurities in the gas in the L-shaped air outlet duct 10. The water droplets that adsorb impurities are absorbed and filtered by the activated carbon in the collection tray 25 along with the airflow in the L-shaped air outlet duct 10, further improving the filtration effect of impurities generated during the glue removal process.

[0087] It should be noted that the L-shaped air outlet pipe 10 is detachably and sealed to the furnace body 1. For example, a sealing ring is wrapped around the surface of the L-shaped air outlet pipe 10 and inserted into the furnace body 1, which facilitates the disassembly and cleaning of the L-shaped air outlet pipe 10 later. At the same time, the L-shaped air outlet pipe 10 is designed in multiple sections, and each section is detachably and sealed to each other. For example, the sections can be spirally connected or interference-fitted to each other, which facilitates the disassembly and cleaning of the L-shaped air outlet pipe 10 in sections. The heat exchange tube 21 and the gas transmission pipe 23 are connected by a snap-fit. When it is necessary to clean the disc structure 22 of the heat exchange tube 21, water can be directly passed through the L-shaped air outlet pipe 10 for flushing.

[0088] Example 5: The present invention demonstrates an aluminum nitride substrate green glue removal furnace; it also includes...

[0089] A sagger 28 is placed at the bottom of the furnace cavity 3;

[0090] Specifically, during the glue removal process of the aluminum nitride substrate green blank, the volatile and decomposed organic additives will be discharged through the bottom placement plate 9. In order to improve the production efficiency of the glue removal furnace and reduce the time spent cleaning the glue removal chamber 7, a sagger 28 is placed at the bottom of the furnace chamber 3 so that the discharged glue enters the sagger 28, which facilitates the collection and treatment of the discharged substances.

[0091] Example 6: The present invention illustrates a debinding furnace for aluminum nitride substrate green blanks; it also includes...

[0092] The furnace body 1 is provided with a door frame, and a high-temperature resistant rope 29 is installed at the door frame;

[0093] The furnace body 1 is equipped with a sealed sealing box door 30, and the handle of the sealed sealing box door 30 is a rotary threaded handwheel 31;

[0094] Specifically, since high-heat gas is mainly used in the glue removal process, the overall sealing of the furnace body 1 is required to be high. In this invention, a high-temperature resistant rope 29 is added to the door frame of the furnace body 1, and a rotary threaded handwheel 31 is used on the sealing door of the furnace body 1. The rotary threaded handwheel 31 can be tightened or loosened according to the degree of sealing, which further improves the overall sealing of the furnace body 1 and reduces the problem of heat leakage of high-temperature gas due to poor sealing of the furnace body 1, which increases the product defect rate.

[0095] Example 7: A method for removing adhesive from a green aluminum nitride substrate; comprising the following adhesive removal steps:

[0096] S1: Punch out a 144×144×0.6mm aluminum nitride substrate blank and evenly apply a layer of interlayer powder on one side of it;

[0097] S2: Arrange the green blanks after applying the interlayer powder in S1 in groups of 10 on a high-temperature resistant carrier plate, and place them in sequence with a top counterweight with a height not exceeding 300mm for 2 hours.

[0098] S3: The high-temperature resistant carrier plate containing the green blank in S2 is neatly inserted into a metal glue rack with six sides open and each layer spaced >25mm apart;

[0099] S4: Place the metal glue rack containing the green blank in S3 evenly on the placement plate 9;

[0100] S5: Air is introduced into the aluminum nitride substrate green blank debinding furnace, the temperature is raised to 250℃ in 8 hours and held for 2 hours; the temperature is raised to 400℃ in 5 hours and held for 2 hours; the temperature is raised to 550℃ in 5 hours and held for 2 hours; the temperature is lowered to 350℃ in 5 hours and naturally cooled to room temperature to obtain the debinding green blank.

[0101] S6: Visually inspect the green blanks from S5 to ensure there is no warping, deformation, or cracking;

[0102] S7: Samples of green bodies from different locations in S5 were taken to test the carbon content, which ranged from 450 to 480 ppm.

[0103] S8: Sinter the green blank in S5 to obtain a uniform aluminum nitride substrate.

[0104] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. A debinding furnace for aluminum nitride substrate green blanks, comprising a furnace body (1) and a control panel (2), characterized in that, Also includes: The furnace cavity (3) is located inside the furnace body (1); An air intake pipe (4) is located on one side of the furnace body (1) and is connected to an external air source; An insulating plate (5) is located inside the furnace cavity (3), dividing the furnace cavity (3) into an air heating cavity (6) and a glue discharge cavity (7). The air inlet pipe (4) is connected to the air heating cavity (6). Air supply holes (8) are vertically opened on the surface of the partition plate (5), and the number of them is one or more; Placement plate (9) is located in the glue discharge cavity (7), and its number is the same as that of the air supply hole (8). The placement plate (9) has several small holes. L-shaped air outlet pipe (10), which is connected to the glue discharge chamber (7); A hot air supply assembly (11) is located inside the air heating chamber (6), and the hot air supply assembly (11) includes: The heater (12) is located inside the air heating chamber (6) and is controlled by the control panel (2); A fan (13) is located inside the air heating chamber (6) and fixed to the insulating plate (5); A cavity (14) is formed inside the insulating plate (5), and the cavity (14) and the air supply hole (8) are located on the same horizontal plane; Guide rails (15) are provided at the top and bottom of the cavity (14); A baffle (16) is located inside the cavity (14); A slider (17) is slidably connected at one end to the guide rail (15) and fixed at the other end to the baffle (16), which is used to block the air supply hole (8); A memory metal strip (18) is fixed at one end to the baffle (16) and at the other end to the end of the cavity (14).

2. The aluminum nitride substrate green glue dispensing furnace according to claim 1, characterized in that: The take-up coil (19) is located outside the air heating chamber (6) and at the same horizontal level as the baffle (16); it is connected to the end of the baffle (16) away from the memory metal strip (18), and the take-up coil (19) is controlled by the control panel (2); A wind speed sensor (20) is located in the L-shaped air outlet duct (10), and the data collected by the wind speed sensor (20) is transmitted to the control panel (2).

3. The aluminum nitride substrate greening debinding furnace according to claim 2, characterized in that: Two heat exchange tubes (21) are vertically arranged on the L-shaped air outlet pipe (10). The heat exchange tubes (21) enter from the top of the L-shaped air outlet pipe (10) and extend from the bottom. The part of the heat exchange tube (21) inside the L-shaped air outlet pipe (10) is a disc-shaped structure (22). The furnace body (1) is provided with a gas transmission pipe (23). The bottom of the heat exchange tube (21) is connected to the gas transmission pipe (23). The gas transmission pipe (23) is connected to the air inlet pipe (4).

4. The aluminum nitride substrate green glue dispensing furnace according to claim 3, characterized in that: The L-shaped air outlet pipe (10) has a placement slot (24) located between the two heat exchange pipes (21). The placement slot (24) has a collection tray (25) inside. The collection tray (25) has a hollow structure in the middle. The collection tray (25) has filter screens (26) at both ends and a handle (27) at the top.

5. The aluminum nitride substrate green glue dispensing furnace according to claim 4, characterized in that: The hollow part in the middle of the collection tray (25) is filled with activated carbon.

6. The aluminum nitride substrate green glue removal furnace according to claim 5, characterized in that: The wind speed sensor (20) in the L-shaped air outlet pipe (10) is a high-temperature resistant Pitot tube wind speed transmitter wind speed sensor (20).

7. The aluminum nitride substrate greening debinding furnace according to claim 6, characterized in that: A sagger (28) is placed at the bottom of the furnace cavity (3).

8. The aluminum nitride substrate greening debinding furnace according to claim 7, characterized in that: The furnace body (1) has a door frame, and a high-temperature resistant rope (29) is installed at the door frame.

9. The aluminum nitride substrate greening debinding furnace according to claim 8, characterized in that: The furnace body (1) is equipped with a sealed box door (30), and the handle of the sealed box door is a rotary threaded handwheel (31).

10. A method for removing adhesive from a green aluminum nitride substrate, using the aluminum nitride substrate green adhesive removal furnace as described in claim 9, characterized in that, The method for removing adhesive from a green aluminum nitride substrate includes the following steps: S1: One side of the aluminum nitride green billet is coated with a layer of interlayer powder. After the interlayer powder is applied, the green billets are neatly arranged in groups of 4-12 on a high-temperature resistant carrier plate. S2: The high-temperature resistant carrier plate containing the green blank in S1 is neatly inserted into the metal glue rack. The spacing between each layer of the metal glue rack is greater than 25mm. Holes are opened at the top and bottom of the metal glue rack. S3: Place the metal glue rack described in S2 evenly on the placement plate (9); S4: Slowly raise the temperature of the aluminum nitride substrate green blank debinding furnace to 200-250℃, 380-420℃, and 530-600℃ in sequence, and hold each temperature for 1-5 hours. S5: Slowly cool down to 350-400℃ and then allow to cool naturally.

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