A grinding device for graphite parts for silicon carbide

Abstract

This invention discloses a grinding device for graphite parts used in silicon carbide, relating to the field of grinding technology. The device includes a base with an internal cavity and an opening at the top. A grinding base is disposed within the cavity, and multiple grinding surfaces are provided on the grinding base. When the grinding surfaces face upwards, they extend beyond the opening at the top of the cavity. The grinding base is rotatably disposed within the cavity. One end of the base is connected to a vertical plate, and a lifting plate is connected to the vertical plate. The top of the vertical plate is driven by a driving unit to raise or lower the lifting plate. A graphite part mounting unit is installed on the lifting plate to fix the graphite part and drive it to rotate. This invention, by making the grinding base rotatable and providing multiple grinding surfaces on it, satisfies the need for alternating grinding of graphite parts with different precisions.

Description

Technical Field

[0001] This invention relates to the field of grinding technology, specifically to a grinding device for graphite parts used in silicon carbide. Background Technology

[0002] In the physical vapor transport (PVT) process for growing SiC crystals, the bonding technology between the seed crystal and graphite material is a crucial factor determining crystal quality. Currently, the basic approach involves bonding the graphite component to graphite paper, and then bonding the graphite paper to the seed crystal. However, when using graphite components as the growth stage, some manufacturers fail to achieve the required processing quality. Unevenness directly affects the bonding effect between the graphite component, graphite paper, and seed crystal, which in turn affects the heat distribution at the initial growth interface of the SiC crystal and the wafer surface energy, ultimately impacting the crystal growth process.

[0003] Existing grinding equipment mainly uses sandpaper and sanding discs to polish the surface of graphite parts. Currently, manual or machine grinding can be selected. Machine grinding can be performed by fixing the graphite part and using the grinding equipment to polish it. Alternatively, the grinding equipment can be fixed to control the relative position between the graphite part and the grinding equipment. Regardless of the grinding method used, the grinding equipment needs to be stopped for cleaning or replacement after a period of use, which has the disadvantages of low efficiency and the need for manual cleaning. Therefore, we propose a grinding device for graphite parts of silicon carbide. Summary of the Invention

[0004] The purpose of this invention is to provide a grinding apparatus for graphite parts for silicon carbide, so as to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a graphite grinding device for silicon carbide, comprising a base, a cavity inside the base, an opening at the upper end of the cavity, a grinding base part disposed within the cavity, a plurality of grinding surfaces disposed on the grinding base part, the grinding surfaces extending beyond the opening at the upper end of the cavity when facing upwards, the grinding base part being rotatably disposed within the cavity, a vertical plate connected to one end of the base, a lifting plate connected to the vertical plate, the top of the vertical plate being driven by a driving unit to raise or lower the lifting plate, a graphite part mounting unit mounted on the lifting plate, the graphite part mounting unit being used to fix the graphite part and drive the graphite part to rotate.

[0006] As a preferred embodiment of the present invention: the grinding base includes a fixed shaft that passes through the base. The connection between the fixed shaft and the base is fixed by a locking member. A frame is provided in the cavity. The frame and the fixed shaft are rotatably connected by a bearing and the frame does not contact the cavity. The frame has multiple grinding seats, and the surface of the grinding seats forms a grinding surface. A drive unit for rotating the frame is provided on the base.

[0007] As a preferred embodiment of the present invention: the frame consists of two side plates and a plurality of connecting rods connected between the two side plates, and a plurality of through holes are formed between the plurality of connecting rods, and a grinding seat is respectively engaged in the plurality of through holes.

[0008] In a preferred embodiment of the present invention, the side plate and the connecting rod are integrally formed or welded together, and the side plate and the fixed shaft are rotatably connected by bearings.

[0009] As a preferred embodiment of the present invention: a driving block is provided on the fixed shaft and placed inside the frame. The driving block is cylindrical and has a plane formed by transverse cutting one-third of the distance from the center of the circumference. In its natural state, the plane is located at the bottom and parallel to the ground. The bottom of the grinding seat is an arc-shaped surface. The grinding seat can extend outward or retract inward through the through hole. When the arc-shaped surface at the bottom of the grinding seat is in contact with the circumference of the driving block, the grinding seat is at the limit position of extending outward and cannot retract inward. When the grinding seat is located in the planar area of ​​the driving block, the grinding seat can retract inward, and the retraction distance is the distance between the arc-shaped surface of the grinding seat and the plane.

[0010] As a preferred embodiment of the present invention: the base has a cleaning mechanism located below the frame. When the grinding surface of the grinding seat is horizontally downward, the output end of the cleaning mechanism contacts the grinding surface and drives the grinding seat to move in the corresponding through hole.

[0011] As a preferred embodiment of the present invention: the cleaning mechanism includes cylinders installed on both sides of the base, symmetrical sliding grooves b are provided on both sides of the base, and a moving rod is slidably connected in the sliding groove b. There are two cylinders located on both sides of the base respectively, and the output ends of the two cylinders are respectively connected to the two ends of the moving rod. The moving rod passes through the cavity, and a brush is provided at the upper end of the moving rod. A vibrator is provided at the bottom of the moving rod. When the grinding surface of the grinding seat is facing down, the brush contacts the grinding surface.

[0012] As a preferred embodiment of the present invention: the circumferential surface of the driving block has multiple recesses on both sides.

[0013] As a preferred embodiment of the present invention: the grinding base is provided with locking blocks on both sides, and the locking blocks can abut or separate from the connecting rod, thereby limiting the outward extension distance of the grinding base.

[0014] In a preferred embodiment of the present invention: the graphite component mounting unit includes a motor b mounted on a lifting plate, the output end of motor b being connected to a clamp via a rotating shaft, the clamp being located above the lifting plate; the driving unit for driving the lifting plate to rise or fall includes two bearing seats a mounted on a vertical plate, the two bearing seats a being connected to a screw via tapered bearings, a motor a mounted on the bearing seats a, the output end of motor a being connected to the screw, and a threaded sleeve that engages with the screw on the lifting plate; the driving unit for rotating the frame includes a mounting plate mounted on the top of the base, a motor c mounted on the top of the mounting plate, the output end of motor c being connected to a driving bevel gear, and a driven bevel gear meshing with the driving bevel gear mounted on one of the side plates of the frame, the driven bevel gear having a hole for a fixed shaft to pass through, so that the driven bevel gear does not contact the fixed shaft.

[0015] Compared with the prior art, the beneficial effects of the present invention are as follows: the drive unit drives the frame to rotate, thereby switching the grinding surface on the base surface, thus satisfying the alternating grinding of graphite parts with different precisions; when one grinding surface needs to be used to grind the graphite part, it ensures that the grinding seat will not cause surface precision errors of the graphite part due to displacement; when the grinding surface of the grinding seat is facing down, the inward contraction of the grinding seat is unrestricted, thus facilitating the cleaning mechanism to clean the grinding surface; when the grinding seat moves on the circumferential surface of the drive block, when the arc surface of the grinding seat contacts the recess, the grinding seat can generate vibration, thereby causing the waste on the grinding surface to fall from the inside of the base, thus improving the effect of cleaning waste. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of a graphite grinding device for silicon carbide according to the present invention.

[0017] Figure 2 This is a schematic diagram of the structure of a graphite grinding device for silicon carbide according to the present invention.

[0018] Figure 3 This is a schematic diagram of the structure of a graphite grinding device for silicon carbide according to the present invention.

[0019] Figure 4 This is a schematic diagram of the structure of a graphite grinding device for silicon carbide according to the present invention.

[0020] Figure 5 This is a schematic diagram of the structure of a graphite grinding device for silicon carbide according to the present invention.

[0021] Figure 6 This is a schematic diagram of the structure of a graphite grinding device for silicon carbide according to the present invention.

[0022] Figure 7 This is a schematic diagram of the structure of a graphite grinding device for silicon carbide according to the present invention.

[0023] Figure 8 This is a schematic diagram of the structure of a graphite grinding device for silicon carbide according to the present invention.

[0024] Figure 9 This is a schematic diagram of the structure of a graphite grinding device for silicon carbide according to the present invention.

[0025] Figure 10 This is a schematic diagram of the structure of a graphite grinding device for silicon carbide according to the present invention.

[0026] In the diagram: 100, base; 101, connector a; 102, cavity; 103, upright plate; 104, slide groove a; 105, lifting plate; 106, bearing seat a; 107, motor a; 108, screw; 109, support; 200, grinding base; 201, side plate; 2011, connecting rod; 202, through hole; 203, grinding seat; 204, locking block; 205, fixed shaft; 206, drive block; 207, plane; 208, recess; 400, motor b; 401, clamp; 500, cylinder; 501, moving rod; 502, slide groove b; 503, brush; 504, vibrator; 600, mounting plate; 601, motor c; 602, driving bevel gear; 603, driven bevel gear. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of this invention, and not all of them. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this invention.

[0028] It should be understood that the terms "comprising / including," "consisting of," or any other variations are intended to cover non-exclusive inclusion, such that a product, apparatus, process, or method that comprises a list of elements includes not only those elements but may also include, where necessary, other elements not expressly listed, or elements inherent to such a product, apparatus, process, or method. Without further limitation, an element defined by the phrases "comprising / including," "consisting of," does not exclude the presence of additional identical elements in the product, apparatus, process, or method that includes said element.

[0029] It should also be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device, component or structure referred to must have a specific orientation, be constructed or operated in a specific orientation, and should not be construed as a limitation of the present invention.

[0030] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0031] The technical solutions provided by the various embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0032] Please see Figures 1-10 This invention proposes a grinding device for graphite parts used in silicon carbide, comprising a base 100, with connecting members a101 on both sides of the base 100. The connecting members a101 are stepped and have connecting grooves, allowing bolts to be inserted into the grooves to fix them to a worktable. After installation, a gap exists between the base 100 and the worktable for cleaning waste materials. The base 100 has a cavity 102 inside, with an opening at its upper end. A grinding base 200 is disposed within the cavity 102, and the grinding base 200 is equipped with... Multiple grinding surfaces are provided, with the grinding surface facing upwards and extending beyond the opening at the upper end of the cavity 102. The grinding base 200 is rotatably disposed within the cavity 102. A drive unit for driving the grinding base 200 to rotate is provided on the base 100. One end of the base 100 is connected to a vertical plate 103, and a lifting plate 105 is connected to the vertical plate 103. The top of the vertical plate 103 drives the lifting plate 105 to rise or fall through a drive unit. A graphite component mounting unit is installed on the lifting plate 105, which is used to fix the graphite component and drive the graphite component to rotate.

[0033] The invention employs a solution in which a graphite component is fixed and rotated by a graphite component mounting unit, and a lifting plate 105 moves downward to bring the graphite component into contact with the grinding surface, thereby achieving the grinding of the graphite component.

[0034] In one embodiment, the grinding base 200 includes a fixed shaft 205 that passes through the base 100. The connection between the fixed shaft 205 and the base 100 is fixed by a locking member. A frame is provided inside the cavity 102. The frame is rotatably connected to the fixed shaft 205 by a bearing and the frame does not contact the cavity 102. The frame consists of two side plates 201 and a plurality of connecting rods 2011 connected between the two side plates 201. The side plates 201 and the connecting rods 2011 are integrally formed or welded together. The side plates 201 and the fixed shaft 205 are rotatably set by bearings. A plurality of through holes 202 are formed between the plurality of connecting rods 2011. A grinding seat 203 is respectively engaged in the plurality of through holes 202. The surface of the grinding seat 203 forms a grinding surface. A drive unit for rotating the frame is provided on the base 100.

[0035] With this approach, the frame is rotated by a drive unit, which in turn switches the grinding surfaces on the base 100, thereby satisfying the need for alternating grinding of graphite parts with different precision.

[0036] In one embodiment, a drive block 206 is provided on the fixed shaft 205. The drive block 206 is similar to a cylinder, except that a plane 207 is formed by transversely cutting along the circumference one-third of the distance from the center. In its natural state, the plane 207 is located at the bottom and parallel to the ground. The drive block 206 is placed inside the frame. The bottom of the grinding seat 203 is an arc-shaped surface. The grinding seat 203 can extend outward or retract inward through the through hole 202. When the arc-shaped surface at the bottom of the grinding seat 203 is in contact with the circumference of the drive block 206, the grinding seat 203 is at the limit position of extending outward and cannot retract inward. When the grinding seat 203 is located in the area of ​​the plane 207 of the drive block 206, the grinding seat 203 can retract inward. The retraction distance is the distance between the arc-shaped surface of the grinding seat 203 and the plane 207.

[0037] The base 100 has a cleaning mechanism located below the frame. When the grinding surface of the grinding seat 203 is horizontally downward, the output end of the cleaning mechanism contacts the grinding surface and drives the grinding seat 203 to move within the corresponding through hole 202.

[0038] With this approach, when one of the grinding surfaces needs to be used to grind the graphite part, it is ensured that the grinding seat will not cause surface accuracy errors due to displacement. When the grinding surface of the grinding seat 203 is facing down, the inward retraction of the grinding seat 203 is unrestricted, which facilitates the cleaning mechanism to clean the grinding surface. The cleaning method can be tapping, sweeping, etc.

[0039] In one embodiment, the circumferential surface of the drive block 206 has a plurality of recesses 208 on both sides. The cross-section of the recesses 208 can be an arc, a triangle, a prism, or the like, and the plurality of recesses 208 are equidistantly distributed.

[0040] With this design, when the grinding seat 203 moves on the circumferential surface of the drive block 206, and when the arc-shaped surface of the grinding seat 203 contacts the recess 208, the grinding seat 203 can vibrate, thereby causing the waste chips on the grinding surface to fall off from the inside of the base 100.

[0041] In one implementation, such as Figure 3 As shown, the cleaning mechanism includes cylinders 500 installed on both sides of the base 100. Symmetrical sliding grooves b502 are provided on both sides of the base 100. A moving rod 501 is slidably connected in the sliding groove b502. There are two cylinders 500 located on both sides of the base 100. The output ends of the two cylinders 500 are respectively connected to the two ends of the moving rod 501. The moving rod 501 passes through the cavity 102. A brush 503 is provided at the upper end of the moving rod 501. A vibrator 504 is provided at the bottom of the moving rod 501. When the grinding surface of the grinding seat 203 is facing down, the brush 503 contacts the grinding surface.

[0042] In this scheme, the cylinder 500 drives the moving rod 501 to reciprocate within the slide groove b502, thereby cleaning the grinding surface through the brush 503 at the top of the moving rod 501. At the same time, the vibrator 504 is activated to drive the grinding block 203 to vibrate up and down within the through hole 202, further improving the cleaning effect of waste.

[0043] In one implementation, please refer to Figure 4 The grinding base 203 is provided with locking blocks 204 on both sides. The locking blocks 204 can abut or separate from the connecting rod 2011. The locking blocks 204 limit the outward extension distance of the grinding base 203.

[0044] In one embodiment, the graphite component mounting unit includes a motor b400 mounted on a lifting plate 105. The output end of the motor b400 is connected to a clamp 401 via a rotating shaft. The clamp 401 is located above the lifting plate 105. The clamp 401 can be a pneumatic clamp 401, a triangular chuck, a four-corner chuck, or other clamping structure capable of fixing the graphite component.

[0045] In one embodiment, the drive unit for driving the lifting plate 105 to rise or fall includes two bearing seats a106 mounted on the vertical plate 103. The two bearing seats a106 are connected to the screw 108 by tapered bearings. One of the bearing seats a106 is equipped with a motor a107. The output end of the motor a107 is connected to the screw 108. The lifting plate 105 is provided with a threaded sleeve that is threadedly engaged with the screw 108.

[0046] Optionally, the bottom of the lifting plate 105 is provided with a support member 109, which consists of an L-shaped plate and a triangular rib plate connected to the inner side of the L-shaped plate. One side of the L-shaped plate is fixed to the lifting plate 105, and the other side slides against the upright plate 103.

[0047] Optionally, the end of the lifting plate 105 is provided with a slider, and the vertical plate 103 is provided with a sliding groove a104, which slides within the sliding groove a104.

[0048] In one embodiment, the drive unit that drives the grinding base 200 to rotate includes a mounting plate 600 mounted on the top of the base 100. A motor c601 is provided on the top of the mounting plate 600. The output end of the motor c601 is connected to a driving bevel gear 602. A driven bevel gear 603 that meshes with the driving bevel gear 602 is mounted on one of the side plates 201 of the frame. It should be noted that the driven bevel gear 603 is provided with a hole for the fixed shaft 205 to pass through, so that the driven bevel gear 603 does not contact the fixed shaft 205.

[0049] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A grinding apparatus for graphite parts used in silicon carbide grinding, characterized in that: Includes a base (100), the base (100) has a cavity (102) inside, the cavity (102) has an opening at the upper end, a grinding base (200) is provided in the cavity (102), the grinding base (200) has multiple grinding surfaces, when the grinding surfaces face upwards, they extend beyond the opening at the upper end of the cavity (102), the grinding base (200) is rotatably set in the cavity (102), one end of the base (100) is connected to a vertical plate (103), a lifting plate (105) is connected to the vertical plate (103), the top of the vertical plate (103) drives the lifting plate (105) to rise or fall through a driving unit, a graphite part mounting unit is installed on the lifting plate (105), the graphite part mounting unit is used to fix the graphite part and drive the graphite part to rotate; The grinding base (200) includes a fixed shaft (205) that passes through the base (100). The connection between the fixed shaft (205) and the base (100) is fixed by a locking member. A frame is provided in the cavity (102). The frame and the fixed shaft (205) are rotatably connected by a bearing and the frame does not contact the cavity (102). The frame has multiple grinding seats (203). The surface of the grinding seats (203) forms a grinding surface. A drive unit for rotating the frame is provided on the base (100). The frame consists of two side plates (201) and multiple connecting rods (2011) connecting the two side plates (201). Multiple through holes (202) are formed between the multiple connecting rods (2011), and grinding seats (203) are respectively engaged in the multiple through holes (202). A drive block (206) is provided on the fixed shaft (205). The drive block (206) is placed inside the frame. The drive block (206) is cylindrical. A plane (207) is formed by transversely cutting the circumferential surface one-third of the distance from the center. In its natural state, the plane (207) is located at the bottom and parallel to the ground. The bottom of the grinding seat (203) is an arc-shaped surface. The grinding seat (203) can extend outward or retract inward through the through hole (202). When the arc-shaped surface at the bottom of the grinding seat (203) is in contact with the circumferential surface of the drive block (206), the grinding seat (203) is at the limit position of extending outward and cannot retract inward. When the grinding seat (203) is located in the area of ​​the plane (207) of the drive block (206), the grinding seat (203) can retract inward. The retraction distance is the distance between the arc-shaped surface of the grinding seat (203) and the plane (207). The circumferential surface of the drive block (206) has multiple recesses (208) on both sides.

2. The grinding apparatus for graphite parts for silicon carbide as described in claim 1, characterized in that: The side plate (201) and the connecting rod (2011) are integrally formed or welded together, and the side plate (201) and the fixed shaft (205) are rotatably connected by bearings.

3. The grinding apparatus for graphite parts for silicon carbide as described in claim 1, characterized in that: The base (100) has a cleaning mechanism located below the frame. When the grinding surface of the grinding seat (203) is horizontally downward, the output end of the cleaning mechanism contacts the grinding surface and drives the grinding seat (203) to move in the corresponding through hole (202).

4. The grinding apparatus for graphite parts for silicon carbide as described in claim 3, characterized in that: The cleaning mechanism includes cylinders (500) installed on both sides of the base (100). Symmetrical sliding grooves b (502) are provided on both sides of the base (100). A moving rod (501) is slidably connected in the sliding groove b (502). There are two cylinders (500) located on both sides of the base (100). The output ends of the two cylinders (500) are respectively connected to the two ends of the moving rod (501). The moving rod (501) passes through the cavity (102). A brush (503) is provided at the upper end of the moving rod (501). A vibrator (504) is provided at the bottom of the moving rod (501). When the grinding surface of the grinding seat (203) is facing down, the brush (503) contacts the grinding surface.

5. The grinding apparatus for graphite parts for silicon carbide as described in claim 3, characterized in that: The grinding base (203) is provided with locking blocks (204) on both sides. The locking blocks (204) can abut or separate from the connecting rod (2011). The locking blocks (204) limit the outward extension distance of the grinding base (203).

6. The grinding apparatus for graphite parts for silicon carbide as described in claim 1, characterized in that: The graphite component mounting unit includes a motor b (400) mounted on a lifting plate (105), the output end of which is connected to a clamp (401) via a rotating shaft, and the clamp (401) is located above the lifting plate (105); the drive unit for driving the lifting plate (105) to rise or fall includes two bearing seats a (106) mounted on a vertical plate (103), and a screw (108) connected to the two bearing seats a (106) via tapered bearings. A motor a (107) is mounted on the bearing seats a (106), and the output end of the motor a (107) is connected to the screw (108). The lifting plate (105) is mounted on the vertical plate (105). 05) is provided with a threaded sleeve that engages with the screw (108); the drive unit for rotating the frame includes a mounting plate (600) mounted on the top of the base (100), a motor c (601) is provided on the top of the mounting plate (600), the output end of the motor c (601) is connected to a drive bevel gear (602), a driven bevel gear (603) that meshes with the drive bevel gear (602) is mounted on one of the side plates (201) of the frame, and the driven bevel gear (603) is provided with a hole for the fixed shaft (205) to pass through, so that the driven bevel gear (603) does not contact the fixed shaft (205).

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