A wafer processing process upgrade control method

Abstract

The present invention discloses a method for controlling the upgrade of a wafer processing process, and relates to the technical field of process upgrade control; including: designing a process framework, wherein the process framework is composed of sites, sub-process routes, process operations, and main process routes from the upper layer to the lower layer; designing each site according to process requirements; arranging multiple sites into sub-process routes according to process requirements, and the sub-process routes have version control. The present invention sets a scheme for upgrading the main process route and the sub-process route, and in the process of constantly upgrading the version, it can not only ensure that the products being produced on the old version of the process route are not affected, but also ensure that the products can jump from the old version of the process to the new version of the process and continue to be produced; by modifying the process route partially or as a whole, the user's operating efficiency is greatly improved, time is saved, and product quality is guaranteed.

Description

Technical Field

[0001] The present invention relates to the technical field of process upgrade control, and in particular to a method for controlling the upgrade of a wafer processing process. Background Art

[0002] In wafer processing, the process flow may be upgraded due to technology upgrades or different process requirements. Since multiple nodes are usually set in the entire process to check the information of the current production batch, it is difficult to flexibly change the process route because many factors are involved in the process route, such as: the production batches that are already in operation, equipment capabilities, masks, etc. Usually, if only a small part of the process flow needs to be changed, the entire process flow must be upgraded, and the old process route can no longer be used normally, resulting in the inability to continue production of the production batches on the old route. Therefore, the current upgrade method is usually to upgrade the current production batch after the processing is completed, which will cause the production line to stop for a long time, especially for longer production lines, which greatly affects the production efficiency. Therefore, there is an urgent need for an upgrade control method for wafer processing process flow to overcome the above problems. Summary of the invention

[0003] The purpose of the present invention is to solve the shortcomings of the prior art and to propose a method for upgrading the wafer processing process flow.

[0004] In order to achieve the above object, the present invention adopts the following technical solutions:

[0005] A wafer processing process upgrade control method, comprising:

[0006] S1: Design the process framework. The process framework is composed of sites, sub-process routes, process operations, and main process routes from top to bottom.

[0007] S2: Design each site according to process requirements;

[0008] S3: According to process requirements, multiple sites are combined and arranged into sub-process routes, and sub-process routes are version controlled;

[0009] S4: Create a process operation and add a sub-process route under a process operation;

[0010] S5: Create a main process route. The main process route has version control, and the same process route corresponds to multiple version numbers;

[0011] S6: When the process needs to be modified, upgrade the sub-process route or main process route as needed.

[0012] Preferably: different planning types can be set for the sub-process route, and the sub-process route must be activated to be used normally; the name of the process operation is consistent with the name of the sub-process route.

[0013] Preferably: in the version upgrade control method, when upgrading the sub-process route:

[0014] After the sub-process route is upgraded and activated, the sub-process routes under the process operation will be automatically upgraded; when any version of the sub-process route is activated, the sub-process routes of other versions will automatically become frozen and will not affect the normal processing of the old version of the production batch.

[0015] Preferably, in the version upgrade control method, when the process flow has a large modification range and the sequence of sub-process routes needs to be readjusted, the main process route is upgraded.

[0016] Preferably: when the main process route is upgraded:

[0017] The new process is activated synchronously, and all running production batches on the production line are transferred to the latest main process route through the process change (reallocation) function; when new production batches are put into production subsequently, they will be processed directly on the new version of the process.

[0018] Preferably: in the version upgrade control method, if the main process route is selected for version upgrade, all routes are updated; if the sub-process route is selected for version upgrade, only the process flow of the changed sub-process route will be updated, and the remaining sub-process route processes remain unchanged.

[0019] Preferably, the following solutions are also included:

[0020] S11: Adding and identifying production batch node marking information;

[0021] S12: Record and backup of version upgrade information;

[0022] S13: Visual management of production batches put into production.

[0023] Preferably: the addition and identification of the production batch node marking information is implemented based on a process management system, and the process management system includes a node marking module set at the first site of each sub-process route, and a node identification module set at the site at the end of each sub-process route; wherein the node marking module adds an electronic mark to each wafer in the production batch as an identification of the wafer entering the current sub-process route; the node identification module is used to identify the electronic mark, thereby determining whether the wafer is output from the current sub-process route.

[0024] Preferably, the recording and backup of the version upgrade information is implemented based on a process management system, and the process management system further includes:

[0025] The upgrade information recording module is used to record the time information and version information of the upgrade;

[0026] The upgrade information backup module is used to back up iterative version information and provide version recovery function.

[0027] Preferably, the visual management of the production batches is implemented based on a process management system, and the process management system further includes:

[0028] A visualization module, which visualizes the processing progress of the production batch according to the information fed back by the node marking module and the node identification module;

[0029] Task allocation module: The task allocation module provides management functions for production batches to be released. Relevant personnel adjust the release order and time of each production batch based on the task allocation module, and generate relevant tasks. On-site personnel perform work according to the tasks.

[0030] The beneficial effects of the present invention are:

[0031] The present invention sets up two schemes of main process route version upgrade and sub-process route version upgrade, wherein the main process route version upgrade refers to the modification of a whole process route, while the sub-process route version upgrade refers to the modification of part of the processes in the whole process route; in the continuous version upgrade process, it can be ensured that the products being produced on the old version of the process route are not affected, and it can also be ensured that the products can jump from the old version of the process to the new version of the process to continue to be produced; through this partial or overall modification of the process route, the user's operating efficiency is greatly improved, time is saved, and the quality of the product is guaranteed.

[0032] The present invention can better manage production batches by setting a node marking module and a node identification module, and can query the processing progress of the current product according to the serial number of the product, which is conducive to better discovery and solution of problems. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 A flow chart is created for the process route of a wafer processing process upgrade control method proposed in the present invention. DETAILED DESCRIPTION

[0034] The technical solution of this patent is further described in detail below in conjunction with specific implementation methods. Example

[0035] A wafer processing process upgrade control method, comprising:

[0036] S1: Design the process framework. The process framework is composed of sites, sub-process routes, process operations, and main process routes from top to bottom.

[0037] S2: Design each site according to process requirements;

[0038] S3: According to process requirements, multiple sites are combined and arranged into sub-process routes, and sub-process routes are version controlled;

[0039] S4: Create a process operation and add a sub-process route under a process operation;

[0040] S5: Create a main process route. The main process route has version control, and the same process route corresponds to multiple version numbers;

[0041] S6: When the process needs to be modified, upgrade the sub-process route or main process route as needed.

[0042] In order to improve reliability, the sub-process route can set different plan types, and the sub-process route must be activated to be used normally.

[0043] To improve reliability, the name of the process operation is consistent with the name of the sub-process route.

[0044] In the version upgrade control method, when upgrading a sub-process route:

[0045] After the sub-process route is upgraded and activated, the sub-process routes under the process operation will be automatically upgraded; when any version of the sub-process route is activated, the sub-process routes of other versions will automatically become frozen and will not affect the normal processing of the production batches of the old version.

[0046] In the version upgrade control method, when the process flow has a large modification range and the order of the sub-process routes needs to be readjusted, the main process route is upgraded.

[0047] When the main process route is upgraded:

[0048] The new process is activated synchronously, and through the reallocation function, all running production batches on the production line are transferred to the latest main process route; when new production batches are put into production subsequently, they will be directly processed using the new version of the process.

[0049] In the version upgrade control method, if the main process route is selected for version upgrade, all routes will be updated; if the sub-process route is selected for version upgrade, only the process flow of the changed sub-process route will be updated, and the remaining sub-process route processes will remain unchanged.

[0050] The present invention sets up two schemes of main process route version upgrade and sub-process route version upgrade, wherein the main process route version upgrade refers to the modification of a whole process route, while the sub-process route version upgrade refers to the modification of part of the processes in the whole process route; in the continuous version upgrade process, it can be ensured that the products being produced on the old version of the process route are not affected, and it can also be ensured that the products can jump from the old version of the process to the new version of the process to continue to be produced; through this partial or overall modification of the process route, the user's operating efficiency is greatly improved, time is saved, and the quality of the product is guaranteed. Example

[0051] A wafer processing process upgrade control method, based on embodiment 1, this embodiment also includes the following scheme:

[0052] S11: Adding and identifying production batch node marking information;

[0053] S12: Record and backup of version upgrade information;

[0054] S13: Visual management of production batches put into production.

[0055] The addition and identification of the production batch node marking information is implemented based on a process management system, which includes a node marking module set at the first site of each sub-process route and a node identification module set at the site at the end of each sub-process route; wherein the node marking module adds an electronic mark to each wafer in the production batch as an identification of the wafer entering the current sub-process route; the node identification module is used to identify the electronic mark, thereby determining whether the wafer is output from the current sub-process route;

[0056] By setting up the node marking module and the node identification module, production batches can be better managed, and the processing progress of the current product can be queried based on the product serial number, which is conducive to better discovery and resolution of problems.

[0057] The recording and backup of the upgrade information is implemented based on a process management system, which also includes:

[0058] The upgrade information recording module is used to record the time information and version information of the upgrade;

[0059] The upgrade information backup module is used to back up iterative version information and provide version recovery function.

[0060] The visual management of the production batches is implemented based on a process management system, which further includes:

[0061] A visualization module, which visualizes the processing progress of the production batch according to the information fed back by the node marking module and the node identification module;

[0062] Task allocation module: The task allocation module provides management functions for production batches to be released. Relevant personnel adjust the release order and time of each production batch based on the task allocation module, and generate relevant tasks. On-site personnel perform work according to the tasks.

[0063] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A wafer processing process upgrade control method, characterized in that: include: S1: Design the process framework. The process framework is composed of sites, sub-process routes, process operations, and main process routes from top to bottom. S2: Design each site according to process requirements; S3: According to process requirements, multiple sites are combined and arranged into sub-process routes, and sub-process routes are version controlled; S4: Create a process operation and add a sub-process route under a process operation; S5: Create a main process route. The main process route has version control, and the same process route corresponds to multiple version numbers; S6: When the process needs to be modified, upgrade the sub-process route or main process route as needed; The sub-process route sets different plan types, and the sub-process route must be activated to be used normally; the name of the process operation is consistent with the name of the sub-process route; In the version upgrade control method, when upgrading a sub-process route: After the sub-process route is upgraded and activated, the sub-process routes under the process operation will be automatically upgraded; when any version of the sub-process route is activated, the sub-process routes of other versions will automatically become frozen and will not affect the normal processing of the production batches of the old version; In the version upgrade control method, when the process flow has a large modification range, when the order of the sub-process routes needs to be readjusted, the main process route is upgraded; When the main process route is upgraded: The new process is activated synchronously, and through the reallocation function, all running production batches on the production line are transferred to the latest main process route; when new production batches are put into production subsequently, they will be directly processed using the new version of the process.

2. The wafer processing process upgrade control method according to claim 1, characterized in that: In the version upgrade control method, if the main process route is selected for version upgrade, all routes will be updated; if the sub-process route is selected for version upgrade, only the process flow of the changed sub-process route will be updated, and the remaining sub-process route processes will remain unchanged.

3. The wafer processing process upgrade control method according to claim 1, characterized in that: The following options are also included: S11: adding and identifying node marking information of production batches; S12: Record and backup of version upgrade information; S13: Visual management of production batches put into production.

4. The wafer processing process upgrade control method according to claim 3, characterized in that: The addition and identification of the production batch node marking information is implemented based on a process management system, which includes a node marking module set at the first site of each sub-process route, and a node identification module set at the site at the end of each sub-process route; wherein the node marking module adds an electronic mark to each wafer in the production batch as an identification of the wafer entering the current sub-process route; the node identification module is used to identify the electronic mark, so as to determine whether the wafer is output from the current sub-process route.

5. The wafer processing process upgrade control method according to claim 4, characterized in that: The recording and backup of the version upgrade information is implemented based on a process management system, and the process management system also includes: The upgrade information recording module is used to record the time information and version information of the upgrade; The upgrade information backup module is used to back up iterative version information and provide version recovery function.

6. The wafer processing process upgrade control method according to claim 5, characterized in that: The visual management of the production batch is realized based on the process management system, and the process management system also includes: A visualization module, which visualizes the processing progress of the production batch according to the information fed back by the node marking module and the node identification module; Task allocation module: The task allocation module provides management functions for production batches to be released. Relevant personnel adjust the release order and time of each production batch based on the task allocation module, and generate relevant tasks. On-site personnel perform work according to the tasks.

Images