A coating correction system and method for electron beam evaporation coating machine

Abstract

The present invention relates to the field of coating correction technology, and specifically to a coating correction system and method for an electron beam evaporation coating machine, comprising a coating data acquisition unit, a cloud storage unit, a coating data analysis unit, a coating deviation monitoring unit and a coating adjustment correction unit. The present invention performs three-dimensional imaging processing and comparison on the images of the coating machine during operation, performs signal judgment on the position of a device that needs coating, facilitates a more intuitive understanding of the position change of the device that needs coating, increases the accuracy of coating, divides the data during coating into regions, performs data analysis based on the divided regions, reflects the real-time situation of coating through numerical values, evaluates the analyzed numerical values ​​together with the judged signals, presents the evaluation results in the form of data, analyzes and determines the presented numerical values, divides the coating situation into levels, performs analysis and adjustment based on different division levels, and increases coating efficiency.

Description

Technical Field

[0001] The present invention relates to the technical field of coating correction, and in particular to a coating correction system and method for an electron beam evaporation coating machine. Background Art

[0002] The electronic coating machine is a universal coating machine, which is used to coat various single-layer films and multi-layer films; it can coat various hard films and metal films; it can be used to prepare metal electrodes for nano devices and organic optoelectronic devices, as well as to prepare catalyst film layers for growing nano materials.

[0003] During the use of the coating machine, technicians often need to perform coating inspections on the equipment after coating. There are manual inspections and intelligent inspections for coating inspections. The technicians determine whether the coating machine needs to be adjusted based on the data obtained from the inspection, which is time-consuming and inefficient. It is impossible to automatically collect real-time data from the coating machine, perform data analysis based on the collected data, and perform automatic evaluation and judgment based on the analyzed data, so as to accurately determine whether the coating machine needs to be corrected, increase the persuasiveness of the data analysis, and save the time consumed by data analysis. Summary of the invention

[0004] The object of the present invention is to provide a coating correction system and method for an electron beam evaporation coating machine, which collects data on images of the electron beam evaporation coating machine during operation, performs three-dimensional imaging processing and comparison based on the collected data, thereby performing signal judgment on the position of the equipment that needs to be coated, so as to facilitate a more intuitive understanding of the position change of the equipment that needs to be coated, increase the accuracy of the coating, divide the data during coating into regions based on the judged signal, perform data analysis based on the divided regions, thereby reflecting the real-time situation of the coating through numerical values, evaluate the analyzed numerical values ​​together with the judged signal, thereby presenting the evaluation results in the form of data, analyze and determine the presented numerical values, thereby classifying the coating situation, and performing analysis and adjustment based on different classification levels to increase the coating efficiency.

[0005] The object of the present invention can be achieved by the following technical solutions: A coating correction system for an electron beam evaporation coating machine, comprising a coating data acquisition unit, a cloud storage unit, a coating data analysis unit, a coating deviation monitoring unit, and a coating adjustment correction unit;

[0006] The coating data acquisition unit is used to collect coating data when the electron beam evaporation coating machine is running, and to sort and divide the data according to the collected data to obtain coating information, wherein the coating information includes coating sequence data and corresponding coating image data, coating time data, coating thickness data, zone coating data and zone temperature data;

[0007] The cloud storage unit is used to store coating information;

[0008] The coating data analysis unit is used to perform coating division operation on the coating information to obtain a division data group, wherein the division data group includes a fixed signal, a moving signal, a standard coating thickness value, a standard coating thickness range value, a standard area coating value, a standard area coating range value, a standard area temperature value, and a standard area temperature range value;

[0009] The coating deviation monitoring unit is used to perform deviation monitoring operations on the sub-data groups to obtain coating evaluation values. The coating adjustment and correction unit performs adjustment and correction processing operations based on the coating evaluation values ​​to obtain correction data groups. The correction data groups include adjustable prompts, adjustment prompts, correction prompts, correction warnings, calibration alarms and corresponding coating sequence data.

[0010] Furthermore, the specific process of data sorting and division is as follows:

[0011] The coating data of the electron beam evaporation coating machine during operation is obtained and calibrated as coating information, and the coating information is divided into coating sequence data, coating image data, coating time data, coating thickness data, zone coating data and zone temperature data;

[0012] The plating sequence data is represented by the number of the electron beam evaporation coating machine, the coating image data is represented by the image when the electron beam evaporation coating machine is running, the plating time data is represented by the time when the electron beam evaporation coating machine is running, the plating thickness data is represented by the thickness of each area when the electron beam evaporation coating machine is coating, the zone plating data is represented by the plating time of each area when the electron beam evaporation coating machine is coating, and the zone temperature data is represented by the temperature of each area when the electron beam evaporation coating machine is coating;

[0013] Corresponding coating image data, coating time data, coating thickness data, zone coating data and zone temperature data are selected according to the coating sequence data and transmitted to the cloud storage unit.

[0014] Furthermore, the specific operation process of the coating sub-operation is as follows:

[0015] Establish a virtual space rectangular coordinate system, perform three-dimensional imaging of the coating image data corresponding to the coating sequence data in the virtual space rectangular coordinate system, select the corner points of the coating equipment required in the coating image data, mark the selected corner points of the equipment required to be coated as corner coordinates, select the corner coordinate points corresponding to two different coating time data, match the corner coordinate points corresponding to the two different coating time data, generate a fixed signal when the matching results are consistent, and generate a moving signal when the matching results are inconsistent;

[0016] Extracting plating thickness data, matching and selecting a number of plating thickness data, calibrating the plating thickness data of each area, selecting the plating thickness data with the most occurrences and calibrating it as the selected plating thickness data, counting the number of occurrences of the selected plating thickness data and the total number of areas, calculating the proportion of the number of occurrences of the selected plating thickness data and the total number of areas, calculating the proportion value of the selected thickness data, comparing the proportion value of the selected thickness data with the proportion threshold of the selected thickness data, and obtaining the standard plating thickness value or the standard plating thickness range value;

[0017] According to the processing method of the standard plating thickness value and the standard plating thickness range value, the zone plating data is processed to obtain the standard zone plating value or the standard zone plating range value;

[0018] According to the processing method of the standard plating thickness value and the standard plating thickness range value, the zone temperature data is processed to obtain the standard zone temperature value or the standard zone temperature range value;

[0019] According to the plating sequence data, the corresponding fixed signal, moving signal, standard plating thickness value, standard plating thickness range value, standard area plating value, standard area plating range value, standard area temperature value and standard area temperature range value are transmitted to the coating deviation monitoring unit.

[0020] Furthermore, the specific process of selecting the thickness data ratio value and comparing it with the thickness data ratio threshold is as follows:

[0021] When the selected thickness data ratio is greater than or equal to the selected thickness data ratio threshold, the selected plating thickness data is determined to be the standard plating thickness value;

[0022] When the proportion of selected thickness data is less than the threshold of selected thickness data proportion, several thickness data except the selected thickness data are selected and calibrated as floating thickness data, and the difference between several floating thickness data and the selected thickness data is calculated to obtain several floating thickness differences, and the average of several floating thickness differences is calculated to obtain the floating thickness average, and the selected thickness data and the floating thickness average are calculated to perform standard range calculation: standard thickness range value = selected thickness data ± floating thickness average.

[0023] Furthermore, the specific operation process of the deviation monitoring operation is as follows:

[0024] Extract fixed signals and moving signals, identify and assign values ​​to them, calibrate the fixed signals and moving signals with product trend values, mark the product trend values ​​as CDXi, i=1,2, identify the product trend values, and process the plating thickness data, zone plating data, and zone temperature data of each area with the standard plating thickness value, standard plating thickness range value, standard zone plating value, standard zone plating range value, standard zone temperature value, and standard zone temperature range value according to the identified product trend values, and obtain the plating thickness measurement value BDHv, the zone plating measurement value QDHa, and the zone temperature measurement value QWHb;

[0025] The plating thickness data, zone plating data and zone temperature data are matched and calculated with the corresponding plating thickness measurement value, zone plating measurement value and zone temperature measurement value respectively to obtain the thickness variation times ratio value, zone variation times ratio value and temperature variation times ratio value;

[0026] Mark product movement value as CDX i , mark the thickness difference ratio as HYC t , mark the difference ratio as QYC t , mark the temperature difference ratio as WYC t ;

[0027] According to the calculation formula: Calculate the coating evaluation value P t , where e i It is represented as the product trend value deviation correction conversion factor, u1 is represented as the preset weight coefficient of the thickness difference ratio, u2 is represented as the preset weight coefficient of the area difference ratio, and u3 is represented as the preset weight coefficient of the temperature difference ratio;

[0028] The coating evaluation value P t Transmitted to the coating adjustment correction unit.

[0029] Furthermore, the specific process of product trend processing is as follows:

[0030] The standard plating thickness value, standard plating thickness range value, standard zone plating value, standard zone plating range value, standard zone temperature value and standard zone temperature range value are identified and marked, the standard plating thickness value and the standard plating thickness range value are calibrated as plating thickness measurement values, the plating thickness measurement values ​​are marked as BDHv, v=1,2, the standard zone plating value and the standard zone plating range value are calibrated as zone plating measurement values, the zone plating measurement values ​​are marked as QDHa, a=1,2, the standard zone temperature value and the standard zone temperature range value are calibrated as zone temperature measurement values, the zone temperature measurement values ​​are marked as QWHb, b=1,2.

[0031] Furthermore, the specific process of matching calculation processing is as follows:

[0032] Match the plating thickness data of different regions with the plating thickness measurement value. When the matching results of the two are consistent, a thickness signal is generated. When the matching results of the two are inconsistent, a thickness difference signal is generated. Match the zone plating data of different regions with the zone plating measurement value. When the matching results of the two are consistent, a zone signal is generated. When the matching results of the two are inconsistent, a zone difference signal is generated. Match the zone temperature data of different regions with the zone temperature measurement value. When the matching results of the two are consistent, a temperature signal is generated. When the matching results of the two are inconsistent, a temperature difference signal is generated.

[0033] Count the number of occurrences of thick symbol signals and thick difference signals, and mark them as thick symbol times value and thick difference times value respectively, substitute the thick symbol times value and thick difference times value into the proportion calculation formula: thick difference times proportion value = thick difference times value / (thick symbol times value + thick difference times value), and calculate the thick difference times proportion value;

[0034] According to the processing method of the thickness difference ratio, the area difference ratio and the temperature difference ratio are obtained.

[0035] Furthermore, the specific operation process of adjusting and correcting the processing operation is as follows:

[0036] The coating evaluation value P t The difference calculation is performed with the coating evaluation threshold value KH to calculate the coating evaluation difference, and the coating evaluation difference is divided into correction levels, specifically: the coating evaluation difference is marked as FA, and the threshold of the coating evaluation difference is calibrated as FC. When FA>2FC, a first-level fine-tuning repair signal is generated, when FC<FA≤2FC, a second-level repair signal is generated, and when FA<FC, a third-level recalibration signal is generated;

[0037] Identify the first-level fine-tuning repair signal, the second-level repair signal and the third-level recalibration signal. When the first-level fine-tuning repair signal is identified, count the number of occurrences of the first-level fine-tuning repair signal. When the number of occurrences of the first-level fine-tuning repair signal is less than the first-level set threshold, issue an adjustable prompt. When the number of occurrences of the first-level fine-tuning repair signal is greater than or equal to the first-level set threshold, issue an adjustment prompt. When the second-level repair signal is identified, count the number of occurrences of the second-level repair signal. When the number of occurrences of the second-level repair signal is less than the second-level set threshold, issue a correction prompt. When the number of occurrences of the second-level repair signal is greater than or equal to the second-level set threshold, issue a correction warning. When the third-level recalibration signal is identified, issue a calibration alarm. The first-level set threshold and the second-level set threshold are both preset values. Extract corresponding plating sequence data based on the adjustable prompt, adjustment prompt, correction prompt, correction warning and calibration alarm.

[0038] The adjustable prompts, repair prompts, correction prompts, correction warnings, calibration alarms and corresponding plating sequence data are sent to the management personnel's communication terminal. The management personnel arrange different personnel to correct the coating machine corresponding to the plating sequence data according to the received adjustable prompts, repair prompts, correction prompts, correction warnings and calibration alarms.

[0039] Furthermore, a coating correction method for an electron beam evaporation coating machine is provided, the method specifically comprising the following steps:

[0040] Step 1: The coating data of the electron beam evaporation coating machine during operation is collected by the coating data collection unit, and the data is sorted and divided according to the collected data to obtain the coating sequence data and the corresponding coating image data, coating time data, coating thickness data, zone coating data and zone temperature data, and the data are transmitted to the cloud storage unit for storage;

[0041] Step 2: Performing a coating separation operation on the coating sequence data and the corresponding coating image data, coating time data, coating thickness data, zone coating data and zone temperature data through a coating data analysis unit to obtain a fixed signal, a moving signal, a standard coating thickness value, a standard coating thickness range value, a standard zone coating value, a standard zone coating range value, a standard zone temperature value and a standard zone temperature range value;

[0042] Step three: Perform deviation monitoring operations on the fixed signal, moving signal, standard plating thickness value, standard plating thickness range value, standard area plating value, standard area plating range value, standard area temperature value and standard area temperature range value through the coating deviation monitoring unit to obtain a correction data group. The management personnel correct the coating machine of the corresponding plating sequence data based on the correction data group.

[0043] Beneficial effects of the present invention:

[0044] The present invention collects data from images of an electron beam evaporation coating machine during operation, performs three-dimensional imaging processing and comparison based on the collected data, thereby performing signal judgment on the position of a device that needs coating, thereby facilitating a more intuitive understanding of the position change of the device that needs coating and increasing the accuracy of coating. According to the judged signal, the data during coating is divided into regions, and data analysis is performed based on the divided regions, thereby reflecting the real-time situation of coating through numerical values, evaluating the analyzed numerical values ​​together with the judged signal, thereby presenting the evaluation results in the form of data, analyzing and determining the presented numerical values, thereby classifying the coating situation, performing analysis and adjustment based on different classification levels, and increasing the coating efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0045] The present invention will be further described below in conjunction with the accompanying drawings.

[0046] Figure 1 It is a system block diagram of the present invention. DETAILED DESCRIPTION

[0047] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0048] See also Figure 1 As shown, the present invention is a coating correction system for an electron beam evaporation coating machine, comprising a coating data acquisition unit, a cloud storage unit, a coating data analysis unit, a coating deviation monitoring unit, and a coating adjustment correction unit;

[0049] The coating data acquisition unit is used to collect coating data when the electron beam evaporation coating machine is running, and calibrate the collected data as coating information, and organize and divide the data according to the coating information. The specific process of data organization and division is as follows:

[0050] Acquire coating information, calibrate the number of the electron beam evaporation coating machine in the coating information as coating sequence data, calibrate the image of the electron beam evaporation coating machine in operation in the coating information as coating image data, calibrate the time of the electron beam evaporation coating machine in operation in the coating information as coating time data, calibrate the thickness of each area of ​​the electron beam evaporation coating machine in the coating information as coating thickness data, calibrate the coating time of each area of ​​the electron beam evaporation coating machine in the coating information as zone plating data, and calibrate the temperature of each area of ​​the electron beam evaporation coating machine in the coating information as zone temperature data;

[0051] Extracting plating sequence data, selecting corresponding plating image data, plating time data, plating thickness data, zone plating data and zone temperature data according to the plating sequence data, and transmitting the plating sequence data and the corresponding plating image data, plating time data, plating thickness data, zone plating data and zone temperature data to a cloud storage unit;

[0052] The cloud storage unit is used to receive the plating sequence data and the corresponding plating image data, plating time data, plating thickness data, zone plating data and zone temperature data and store the data therein;

[0053] The coating data analysis unit is used to obtain the coating sequence data and the corresponding coating image data, coating time data, coating thickness data, zone coating data and zone temperature data from the cloud storage unit, and perform coating division operation according to the coating sequence data and the corresponding coating image data, coating time data, coating thickness data, zone coating data and zone temperature data. The specific operation process of the coating division operation is as follows:

[0054] Selecting corresponding coating image data according to the coating sequence data;

[0055] Establish a virtual space rectangular coordinate system, perform three-dimensional imaging of the coating image data in the virtual space rectangular coordinate system, select the corner points of the coating equipment required in the coating image data, mark the coordinates of the selected corner points of the equipment required to be coated as corner coordinates Bi (Xi, Yi, Zi), select the corner coordinate points corresponding to two different coating time data, mark the corresponding corner coordinate points as B1 and B2 respectively, match the corner coordinate points corresponding to the two different coating time data, when the matching results of the corner coordinate points corresponding to the two different coating time data are consistent, it is determined that the equipment required to be coated has not changed position, and a fixed signal is generated, when the matching results of the corner coordinate points corresponding to the two different coating time data are inconsistent, it is determined that the equipment required to be coated has changed position, and a moving signal is generated;

[0056] Extract the plating thickness data, match and select several plating thickness data, calibrate the plating thickness data of each area, select the plating thickness data with the most occurrences and calibrate it as the selected plating thickness data, count the number of occurrences of the selected plating thickness data and the total number of areas, calculate the proportion of the number of occurrences of the selected plating thickness data and the total number of areas, calculate the proportion of the selected thickness data, and compare the proportion of the selected thickness data with the threshold of the selected thickness data proportion, specifically:

[0057] When the selected thickness data ratio is greater than or equal to the selected thickness data ratio threshold, the selected plating thickness data is determined to be the standard plating thickness value;

[0058] When the selected thickness data proportion value is less than the selected thickness data proportion threshold value, several plating thickness data other than the selected plating thickness data are selected and calibrated as floating plating thickness data, and several floating plating thickness differences are calculated by difference calculation, and several floating plating thickness differences are calculated by average calculation, and the floating plating thickness average is calculated, and the selected plating thickness data and the floating plating thickness average are calculated by standard range calculation: standard plating thickness range value = selected plating thickness data ± floating plating thickness average;

[0059] Extract the area plating data, match and select several area plating data, calibrate the area plating data of each area, select the area plating data with the most occurrences and calibrate it as the selected area plating data, count the number of occurrences of the selected area plating data and the total number of areas, calculate the proportion of the number of occurrences of the selected area plating data and the total number of areas, calculate the proportion of the selected area plating data, and compare the proportion of the selected area plating data with the threshold of the proportion of the selected area plating data, specifically:

[0060] When the selected area plating data ratio is greater than or equal to the selected area plating data ratio threshold, the selected area plating data is determined to be the standard area plating value;

[0061] When the proportion of selected area plating data is less than the selected area plating data proportion threshold, several area plating data except the selected area plating data are selected and calibrated as floating area plating data, and several floating area plating differences are calculated between the several floating area plating data and the selected area plating data, and several floating area plating differences are calculated, and the floating area plating mean is calculated, and the selected area plating data and the floating area plating mean are calculated in a standard range: the standard area plating range value = selected area plating data ± floating area plating mean;

[0062] Extract the zone temperature data, match and select several zone temperature data, calibrate the zone temperature data of each area, select the zone temperature data with the most occurrences and calibrate it as the selected zone temperature data, count the number of occurrences of the selected zone temperature data and the total number of areas, calculate the proportion of the number of occurrences of the selected zone temperature data and the total number of areas, calculate the proportion of the selected zone temperature data, and compare the proportion of the selected zone temperature data with the threshold of the proportion of the selected zone temperature data, specifically:

[0063] When the selected zone temperature data ratio is greater than or equal to the selected zone temperature data ratio threshold, the selected zone temperature data is determined to be the standard zone temperature value;

[0064] When the proportion of the selected zone temperature data is less than the threshold of the proportion of the selected zone temperature data, several zone temperature data other than the selected zone temperature data are selected and calibrated as floating zone temperature data, and several floating zone temperature difference values ​​are calculated by difference calculation, and several floating zone temperature difference values ​​are averaged to calculate the floating zone temperature average value, and the selected zone temperature data and the floating zone temperature average value are calculated for the standard range: standard zone temperature range value = selected zone temperature data ± floating zone temperature average value;

[0065] Transmitting corresponding fixed signals, moving signals, standard plating thickness values, standard plating thickness range values, standard area plating values, standard area plating range values, standard area temperature values, and standard area temperature range values ​​to a coating deviation monitoring unit according to the plating sequence data;

[0066] The coating deviation monitoring unit is used to perform deviation monitoring operations on the coating sequence data and the corresponding fixed signals, moving signals, standard coating thickness values, standard coating thickness range values, standard area coating values, standard area coating range values, standard area temperature values ​​and standard area temperature range values. The specific operation process of the deviation monitoring operation is as follows:

[0067] The fixed signal and the moving signal are extracted, and the identification and value assignment marks are performed on them. The fixed signal and the moving signal are calibrated with product trend values, and the product trend values ​​are marked as CDXi, i=1,2. The product trend values ​​are identified, and the plating thickness data, zone plating data and zone temperature data corresponding to each area are extracted according to the identified product trend values, and the plating thickness data, zone plating data and zone temperature data corresponding to each area are processed with the standard plating thickness value, standard plating thickness range value, standard zone plating value, standard zone plating range value, standard zone temperature value and standard zone temperature range value for product trend processing, specifically:

[0068] The standard plating thickness value, the standard plating thickness range value, the standard zone plating value, the standard zone plating range value, the standard zone temperature value and the standard zone temperature range value are identified and marked, and the standard plating thickness value and the standard plating thickness range value are calibrated as the plating thickness measurement value, and the plating thickness measurement value is marked as BDHv, v = 1, 2, when v = 1, the identification value of the plating thickness measurement value is determined to be the standard plating thickness value, when v = 2, the identification value of the plating thickness measurement value is determined to be the standard plating thickness range value, and the standard zone plating value and the standard zone plating range value are calibrated as the zone plating measurement value , mark the zone plating measurement value as QDHa, a=1,2, when a=1, the identification value of the zone plating measurement value is the standard zone plating value, when a=2, the identification value of the zone plating measurement value is the standard zone plating range value, standardize the standard zone temperature value and the standard zone temperature range value as the zone temperature measurement value, mark the zone temperature measurement value as QWHb, b=1,2, when b=1, the identification value of the zone temperature measurement value is the standard zone temperature value, when b=2, the identification value of the zone temperature measurement value is the standard zone temperature range value;

[0069] Match the plating thickness data, zone plating data and zone temperature data with the corresponding plating thickness measurement value, zone plating measurement value and zone temperature measurement value, specifically:

[0070] Match the coating thickness data of different areas with the coating thickness measurement value. When the matching results of the two are consistent, it is determined that the coating thickness of the area meets the coating requirements and a thickness compliance signal is generated. When the matching results of the two are inconsistent, it is determined that the coating thickness of the area does not meet the coating requirements and a thickness deviation signal is generated.

[0071] The zone plating data of different areas are matched with the zone plating measurement value. When the matching results of the two are consistent, it is determined that the zone plating time of the area meets the coating requirements and a zone compliance signal is generated. When the matching results of the two are inconsistent, it is determined that the zone plating time of the area does not meet the coating requirements and a zone error signal is generated.

[0072] The zone temperature data of different areas are matched with the zone temperature measurement value. When the matching results of the two are consistent, it is determined that the zone temperature size of the area meets the coating requirements and a temperature signal is generated. When the matching results of the two are inconsistent, it is determined that the zone temperature size of the area does not meet the coating requirements and a temperature difference signal is generated.

[0073] Count the number of occurrences of thick symbol signals and thick difference signals, and mark them as thick symbol times value and thick difference times value respectively, substitute the thick symbol times value and thick difference times value into the proportion calculation formula: thick difference times proportion value = thick difference times value / (thick symbol times value + thick difference times value), and calculate the thick difference times proportion value;

[0074] Count the number of occurrences of the zone symbol signal and the zone difference signal, and mark them as the zone symbol number value and the zone difference number value in turn, substitute the zone symbol number value and the zone difference number value into the proportion calculation formula: the zone difference number proportion value = the zone difference number value / (zone symbol number value + the zone difference number value), and calculate the zone difference number proportion value;

[0075] Count the number of occurrences of the temperature symbol signal and the temperature difference signal, and mark them as the temperature symbol number value and the temperature difference number value in turn, substitute the temperature symbol number value and the temperature difference number value into the proportion calculation formula: temperature difference number proportion value = temperature difference number value / (temperature symbol number value + temperature difference number value), and calculate the temperature difference number proportion value;

[0076] According to the calculation formula: Calculate the coating evaluation value P t , among which, CDX i Expressed as product trend value, e i Expressed as product trend value deviation correction conversion factor, HYC t It is expressed as the ratio of thickness variation times, u1 is the preset weight coefficient of thickness variation times, QYC t It is expressed as the percentage of the number of differences, u2 is expressed as the preset weight coefficient of the percentage of the number of differences, WYC t It is represented by the percentage of temperature variation times, and u3 is represented by the preset weight coefficient of the percentage of temperature variation times;

[0077] The coating evaluation value P t Transmitted to the coating adjustment correction unit;

[0078] The coating adjustment correction unit is used to adjust the coating evaluation value P t Perform adjustment and correction processing operations. The specific operation process of the adjustment and correction processing operation is as follows:

[0079] Extract coating evaluation value P t , the coating evaluation value P tThe difference calculation is performed with the coating evaluation threshold KH to calculate the coating evaluation difference, and the coating evaluation difference is divided into correction levels, specifically: when the coating evaluation difference is greater than twice the evaluation difference threshold, it is determined that the coating deviation is small, and a first-level fine-tuning repair signal is generated; when the coating evaluation difference is less than or equal to twice the evaluation difference threshold, and the coating evaluation difference is greater than the evaluation difference threshold, it is determined that the coating deviation is general, and a second-level repair signal is generated; when the coating evaluation difference is less than or equal to the evaluation difference threshold, it is determined that the coating deviation is medium, and a third-level recalibration signal is generated;

[0080] Identify the first-level fine-tuning repair signal, the second-level repair signal and the third-level recalibration signal. When the first-level fine-tuning repair signal is identified, count the number of occurrences of the first-level fine-tuning repair signal. When the number of occurrences of the first-level fine-tuning repair signal is less than the first-level set threshold, issue an adjustable prompt. When the number of occurrences of the first-level fine-tuning repair signal is greater than or equal to the first-level set threshold, issue an adjustment prompt. When the second-level repair signal is identified, count the number of occurrences of the second-level repair signal. When the number of occurrences of the second-level repair signal is less than the second-level set threshold, issue a correction prompt. When the number of occurrences of the second-level repair signal is greater than or equal to the second-level set threshold, issue a correction warning. When the third-level recalibration signal is identified, issue a calibration alarm. The first-level set threshold and the second-level set threshold are both preset values. Extract corresponding plating sequence data based on the adjustable prompt, adjustment prompt, correction prompt, correction warning and calibration alarm.

[0081] The adjustable prompt, the adjustment prompt, the correction prompt, the correction warning, the calibration alarm and the corresponding plating sequence data are sent to the communication terminal of the manager, and the manager arranges different personnel to correct the coating machine corresponding to the plating sequence data according to the received adjustable prompt, the adjustment prompt, the correction prompt, the correction warning and the calibration alarm;

[0082] A coating correction method for an electron beam evaporation coating machine, the method specifically comprising the following steps:

[0083] Step 1: The coating data of the electron beam evaporation coating machine during operation is collected by the coating data collection unit, and the data is sorted and divided according to the collected data to obtain the coating sequence data and the corresponding coating image data, coating time data, coating thickness data, zone coating data and zone temperature data, and the data are transmitted to the cloud storage unit for storage;

[0084] Step 2: Performing a coating separation operation on the coating sequence data and the corresponding coating image data, coating time data, coating thickness data, zone coating data and zone temperature data through a coating data analysis unit to obtain a fixed signal, a moving signal, a standard coating thickness value, a standard coating thickness range value, a standard zone coating value, a standard zone coating range value, a standard zone temperature value and a standard zone temperature range value;

[0085] Step three: Perform deviation monitoring operations on the fixed signal, moving signal, standard plating thickness value, standard plating thickness range value, standard area plating value, standard area plating range value, standard area temperature value and standard area temperature range value through the coating deviation monitoring unit to obtain a correction data group. The management personnel correct the coating machine of the corresponding plating sequence data based on the correction data group.

[0086] The above contents are merely examples and explanations of the structure of the present invention. The technicians in this technical field may make various modifications or additions to the specific embodiments described or replace them in a similar manner. As long as they do not deviate from the structure of the invention or exceed the scope defined by the claims, they should all fall within the protection scope of the present invention.

Claims

1. A coating correction system for an electron beam evaporation coating machine, characterized in that: It includes a coating data acquisition unit, a cloud storage unit, a coating data analysis unit, a coating deviation monitoring unit and a coating adjustment correction unit; The coating data acquisition unit is used to collect coating data when the electron beam evaporation coating machine is running, and to sort and divide the data according to the collected data to obtain coating information, which includes coating sequence data and corresponding coating image data, coating time data, coating thickness data, zone coating data and zone temperature data; the specific process of data sorting and division is as follows: The coating data of the electron beam evaporation coating machine during operation is obtained and calibrated as coating information, and the coating information is divided into coating sequence data, coating image data, coating time data, coating thickness data, zone coating data and zone temperature data; The plating sequence data is represented by the number of the electron beam evaporation coating machine, the coating image data is represented by the image when the electron beam evaporation coating machine is running, the plating time data is represented by the time when the electron beam evaporation coating machine is running, the plating thickness data is represented by the thickness of each area when the electron beam evaporation coating machine is coating, the zone plating data is represented by the plating time of each area when the electron beam evaporation coating machine is coating, and the zone temperature data is represented by the temperature of each area when the electron beam evaporation coating machine is coating; Select corresponding coating image data, coating time data, coating thickness data, zone coating data and zone temperature data according to the coating sequence data and transmit them to the cloud storage unit; The cloud storage unit is used to store coating information; The coating data analysis unit is used to perform coating division operation on the coating information to obtain a division data group, wherein the division data group includes a fixed signal, a moving signal, a standard coating thickness value, a standard coating thickness range value, a standard area coating value, a standard area coating range value, a standard area temperature value, and a standard area temperature range value; The coating deviation monitoring unit is used to perform deviation monitoring operations on the sub-data groups to obtain coating evaluation values, and the coating adjustment and correction unit performs adjustment and correction processing operations according to the coating evaluation values ​​to obtain correction data groups, which include adjustable prompts, adjustment prompts, correction prompts, correction warnings, calibration alarms and corresponding coating sequence data; The specific operation process of the coating sub-operation is as follows: Establish a virtual space rectangular coordinate system, perform three-dimensional imaging of the coating image data corresponding to the coating sequence data in the virtual space rectangular coordinate system, select the corner points of the coating equipment required in the coating image data, mark the selected corner points of the equipment required to be coated as corner coordinates, select the corner coordinate points corresponding to two different coating time data, match the corner coordinate points corresponding to the two different coating time data, generate a fixed signal when the matching results are consistent, and generate a moving signal when the matching results are inconsistent; Extracting plating thickness data, matching and selecting a number of plating thickness data, calibrating the plating thickness data of each area, selecting the plating thickness data with the most occurrences and calibrating it as the selected plating thickness data, counting the number of occurrences of the selected plating thickness data and the total number of areas, calculating the proportion of the number of occurrences of the selected plating thickness data and the total number of areas, calculating the proportion value of the selected thickness data, comparing the proportion value of the selected thickness data with the proportion threshold of the selected thickness data, and obtaining the standard plating thickness value or the standard plating thickness range value; According to the processing method of the standard plating thickness value and the standard plating thickness range value, the zone plating data is processed to obtain the standard zone plating value or the standard zone plating range value; According to the processing method of the standard plating thickness value and the standard plating thickness range value, the zone temperature data is processed to obtain the standard zone temperature value or the standard zone temperature range value; Transmitting corresponding fixed signals, moving signals, standard plating thickness values, standard plating thickness range values, standard area plating values, standard area plating range values, standard area temperature values, and standard area temperature range values ​​to a coating deviation monitoring unit according to the plating sequence data; The specific process of selecting the thickness data ratio value and comparing it with the thickness data ratio threshold is as follows: When the selected thickness data ratio is greater than or equal to the selected thickness data ratio threshold, the selected plating thickness data is determined to be the standard plating thickness value; When the selected thickness data proportion value is less than the selected thickness data proportion threshold value, several plating thickness data other than the selected plating thickness data are selected and calibrated as floating plating thickness data, and several floating plating thickness differences are calculated by difference calculation, and several floating plating thickness differences are calculated by average calculation, and the floating plating thickness average is calculated, and the selected plating thickness data and the floating plating thickness average are calculated by standard range calculation: standard plating thickness range value = selected plating thickness data ± floating plating thickness average; The specific operation process of deviation monitoring operation is as follows: Extract fixed signals and moving signals, identify and assign values ​​to them, calibrate the fixed signals and moving signals with product trend values, mark the product trend values ​​as CDXi, i=1,2, identify the product trend values, and process the plating thickness data, zone plating data, and zone temperature data of each area with the standard plating thickness value, standard plating thickness range value, standard zone plating value, standard zone plating range value, standard zone temperature value, and standard zone temperature range value according to the identified product trend values, and obtain the plating thickness measurement value BDHv, the zone plating measurement value QDHa, and the zone temperature measurement value QWHb; The plating thickness data, zone plating data and zone temperature data are matched and calculated with the corresponding plating thickness measurement value, zone plating measurement value and zone temperature measurement value respectively to obtain the thickness variation times ratio value, zone variation times ratio value and temperature variation times ratio value; Mark product movement value as CDX i , mark the thickness difference ratio as HYC t , mark the difference ratio as QYC t , mark the temperature difference ratio as WYC t ; According to the calculation formula: Calculate the coating evaluation value P t , where e i It is represented as the product trend value deviation correction conversion factor, u1 is represented as the preset weight coefficient of the thickness difference ratio, u2 is represented as the preset weight coefficient of the area difference ratio, and u3 is represented as the preset weight coefficient of the temperature difference ratio; The coating evaluation value P t Transmitted to the coating adjustment and correction unit; The specific process of product trend processing is as follows: Identify and mark the standard plating thickness value, standard plating thickness range value, standard zone plating value, standard zone plating range value, standard zone temperature value and standard zone temperature range value, calibrate the standard plating thickness value and the standard plating thickness range value as plating thickness measurement value, mark the plating thickness measurement value as BDHv, v=1,2, calibrate the standard zone plating value and the standard zone plating range value as zone plating measurement value, mark the zone plating measurement value as QDHa, a=1,2, calibrate the standard zone temperature value and the standard zone temperature range value as zone temperature measurement value, mark the zone temperature measurement value as QWHb, b=1,2; The specific process of matching calculation is as follows: Match the plating thickness data of different regions with the plating thickness measurement value. When the matching results of the two are consistent, a thickness signal is generated. When the matching results of the two are inconsistent, a thickness difference signal is generated. Match the zone plating data of different regions with the zone plating measurement value. When the matching results of the two are consistent, a zone signal is generated. When the matching results of the two are inconsistent, a zone difference signal is generated. Match the zone temperature data of different regions with the zone temperature measurement value. When the matching results of the two are consistent, a temperature signal is generated. When the matching results of the two are inconsistent, a temperature difference signal is generated. Count the number of occurrences of thick symbol signals and thick difference signals, and mark them as thick symbol times value and thick difference times value respectively, substitute the thick symbol times value and thick difference times value into the proportion calculation formula: thick difference times proportion value = thick difference times value / (thick symbol times value + thick difference times value), and calculate the thick difference times proportion value; According to the processing method of the thickness difference frequency ratio value, the area difference frequency ratio value and the temperature difference frequency ratio value are obtained; The specific operation process of adjusting and correcting the processing operation is as follows: The coating evaluation value P t The difference calculation is performed with the coating evaluation threshold value KH to calculate the coating evaluation difference, and the coating evaluation difference is divided into correction levels, specifically: the coating evaluation difference is marked as FA, and the threshold of the coating evaluation difference is calibrated as FC. When FA>2FC, a first-level fine-tuning repair signal is generated, when FC<FA≤2FC, a second-level repair signal is generated, and when FA<FC, a third-level recalibration signal is generated; Identify the first-level fine-tuning repair signal, the second-level repair signal and the third-level recalibration signal. When the first-level fine-tuning repair signal is identified, count the number of occurrences of the first-level fine-tuning repair signal. When the number of occurrences of the first-level fine-tuning repair signal is less than the first-level set threshold, issue an adjustable prompt. When the number of occurrences of the first-level fine-tuning repair signal is greater than or equal to the first-level set threshold, issue an adjustment prompt. When the second-level repair signal is identified, count the number of occurrences of the second-level repair signal. When the number of occurrences of the second-level repair signal is less than the second-level set threshold, issue a correction prompt. When the number of occurrences of the second-level repair signal is greater than or equal to the second-level set threshold, issue a correction warning. When the third-level recalibration signal is identified, issue a calibration alarm. The first-level set threshold and the second-level set threshold are both preset values. Extract corresponding plating sequence data based on the adjustable prompt, adjustment prompt, correction prompt, correction warning and calibration alarm. The adjustable prompts, repair prompts, correction prompts, correction warnings, calibration alarms and corresponding plating sequence data are sent to the management personnel's communication terminal. The management personnel arrange different personnel to correct the coating machine corresponding to the plating sequence data according to the received adjustable prompts, repair prompts, correction prompts, correction warnings and calibration alarms.

2. A coating correction method for an electron beam evaporation coating machine, characterized in that The coating correction system for an electron beam evaporation coating machine according to claim 1 specifically comprises the following steps: Step 1: The coating data of the electron beam evaporation coating machine during operation is collected by the coating data collection unit, and the data is sorted and divided according to the collected data to obtain the coating sequence data and the corresponding coating image data, coating time data, coating thickness data, zone coating data and zone temperature data, and the data are transmitted to the cloud storage unit for storage; Step 2: Performing a coating separation operation on the coating sequence data and the corresponding coating image data, coating time data, coating thickness data, zone coating data and zone temperature data through a coating data analysis unit to obtain a fixed signal, a moving signal, a standard coating thickness value, a standard coating thickness range value, a standard zone coating value, a standard zone coating range value, a standard zone temperature value and a standard zone temperature range value; Step three: Perform deviation monitoring operations on the fixed signal, moving signal, standard plating thickness value, standard plating thickness range value, standard area plating value, standard area plating range value, standard area temperature value and standard area temperature range value through the coating deviation monitoring unit to obtain a correction data group. The management personnel correct the coating machine of the corresponding plating sequence data based on the correction data group.

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