Electrostatic chuck power supply loop current detection device and semiconductor process equipment

Abstract

The present application discloses a detection device for the loop current of an electrostatic chuck power supply and a semiconductor process equipment. The device includes: a sampling resistor, the sampling resistor is connected in series to the output end of the electrostatic chuck power supply; an operational amplifier, the input positive end of the operational amplifier is connected to the input end of the sampling resistor, the input negative end of the operational amplifier is connected to the output end of the sampling resistor, the reference potential end of the operational amplifier is used to input a first reference voltage, the absolute voltage difference between the first reference voltage and the output voltage of the output end of the electrostatic chuck power supply is less than the tolerance voltage difference of the operational amplifier, the power supply end of the operational amplifier is used to input a first power supply voltage, the first power supply voltage is higher than the first reference voltage by a preset first voltage value, and the output end of the operational amplifier is used to output a voltage signal proportional to the loop current. The present application can use an ordinary operational amplifier without high-voltage isolation, which reduces costs and improves the accuracy of current detection.

Description

Technical Field

[0001] The present application belongs to the field of semiconductor technology, and in particular relates to a detection device for a current in an electrostatic chuck power supply loop and semiconductor process equipment. Background Art

[0002] A chuck is a support platform located in a processing chamber for fixing and supporting a wafer to be processed or a tray loaded with wafers during wafer processing in semiconductor process equipment. An electrostatic chuck (ESC) is a chuck that uses the principle of electrostatic adsorption to fix a wafer or a tray. The ESC base is embedded with a chuck electrode, and the ESC power supply provides a DC high voltage to the chuck electrode, thereby generating an electrostatic force between the chuck and the wafer, fixing the wafer or tray on the chuck.

[0003] In order to understand the operation of semiconductor process equipment and protect the safety of equipment and personnel, it is necessary to accurately detect the current of the ESC power supply circuit and design necessary short-circuit protection circuits. The ESC power supply has the characteristics of outputting high voltage and micro current, which brings certain difficulties to current detection.

[0004] In the related art, the detection scheme of ESC power supply circuit current is as follows: Figure 1 As shown, a sampling resistor R is connected in series at the output end of the electrostatic chuck power supply 10, and the current signal flowing through the sampling resistor R is converted into a voltage signal, and the voltage signal is amplified by the operational amplifier 12. + , IN-) to ground (GND) voltage HV + 、HV + -U (U is generally less than 10V) are both DC high voltage (generally one thousand to tens of thousands of volts), and the reference potential terminal of the operational amplifier 12 is grounded (GND), so the input terminal (IN + There is a voltage difference of one thousand to tens of thousands of volts between the input and output terminals of the operational amplifier 12 and the reference potential terminal. To ensure the withstand voltage requirement of the operational amplifier 12, the operational amplifier 12 needs to use a high-voltage isolated operational amplifier, that is, the input and output terminals of the operational amplifier 12 are isolated, and the isolation voltage Uiso ≥ the voltage HV output from the ESC power supply to the load. + Output. By detecting the voltage at the output of the operational amplifier 12 and according to the amplification ratio, the magnitude of the ESC power supply loop current can be calculated. However, the high-voltage isolated operational amplifier is expensive and the isolation voltage value is limited. When the voltage at the output of the electrostatic chuck power supply is too large, the accuracy of current detection is poor. Summary of the invention

[0005] The purpose of the embodiments of the present application is to provide a detection device for the loop current of an electrostatic chuck power supply and semiconductor process equipment to solve the problems in the related art that the high-voltage isolated operational amplifier has a high cost and a limited isolation voltage value, and when the voltage at the output end of the electrostatic chuck power supply is too large, the accuracy of current detection is poor.

[0006] To achieve the above objectives, the present application embodiment adopts the following technical solutions:

[0007] In a first aspect, an embodiment of the present application provides a device for detecting the loop current of an electrostatic chuck power supply, comprising: a sampling resistor, the sampling resistor being connected in series to the output end of the electrostatic chuck power supply; an operational amplifier, the positive input end of the operational amplifier being connected to the input end of the sampling resistor, the negative input end of the operational amplifier being connected to the output end of the sampling resistor, the reference potential end of the operational amplifier being used to input a first reference voltage, the absolute voltage difference between the first reference voltage and the output voltage of the output end of the electrostatic chuck power supply being less than the tolerance voltage difference of the operational amplifier, the power supply end of the operational amplifier being used to input a first power supply voltage, the first power supply voltage being higher than the first reference voltage by a preset first voltage value, and the output end of the operational amplifier being used to output a voltage signal proportional to the loop current.

[0008] In a second aspect, an embodiment of the present application provides a semiconductor process equipment, including: an electrostatic chuck, an electrostatic chuck power supply, and a detection device for the electrostatic chuck power supply loop current as described in the first aspect of the present application.

[0009] At least one of the above technical solutions adopted in the embodiments of the present application can achieve the following beneficial effects:

[0010] In the embodiment of the present application, the reference potential terminal of the operational amplifier is used to input a first reference voltage, and the absolute voltage difference between the first reference voltage and the output voltage of the output terminal of the electrostatic chuck power supply is less than the withstand voltage difference of the operational amplifier, and the power supply terminal of the operational amplifier is used to input a first supply voltage, and the first supply voltage is higher than the first reference voltage by a preset first voltage value. By setting the first reference voltage of the reference potential terminal of the operational amplifier to have an absolute voltage difference with the output voltage of the output terminal of the electrostatic chuck power supply that is less than the withstand voltage difference of the operational amplifier, the voltage to ground of the input terminal (input positive terminal, input negative terminal) and the output terminal of the operational amplifier are both DC high voltage, but the voltage difference between any two is very low, so the operational amplifier can use a common operational amplifier without high-voltage isolation, avoiding the high cost of the high-voltage isolated operational amplifier and the limited value of the isolation voltage. When the high voltage voltage at the output terminal of the electrostatic chuck power supply is too large, the accuracy of current detection is poor, which reduces the cost and improves the accuracy of current detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0012] Figure 1 It is a structural schematic diagram of a device for detecting current of a power supply loop of an electrostatic chuck in the related art;

[0013] Figure 2 A schematic diagram of an electrostatic chuck electrical system provided for one embodiment of the present application;

[0014] Figure 3 A schematic diagram of the structure of a device for detecting current of an electrostatic chuck power supply loop provided in one embodiment of the present application;

[0015] Figure 4 A schematic structural diagram of a device for detecting current in an electrostatic chuck power supply loop provided in another embodiment of the present application;

[0016] Figure 5 A schematic diagram of the structure of a power supply unit provided for one embodiment of the present application;

[0017] Figure 6 A schematic diagram of the structure of a power supply unit provided in another embodiment of the present application;

[0018] Figure 7 A schematic structural diagram of a semiconductor process equipment provided for one embodiment of the present application. DETAILED DESCRIPTION

[0019] In order to make the purpose, technical solution and advantages of the present application clearer, the technical solution of the present application will be clearly and completely described below in combination with the specific embodiments of the present application and the corresponding drawings. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present application.

[0020] The terms "first", "second", etc. in this application are used to distinguish similar objects, and are not used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable under appropriate circumstances, so that the embodiments of the present application can be implemented in an order other than those illustrated or described here. In addition, the "and / or" in this application represents at least one of the connected objects, and the character " / " generally represents that the front and back associated objects are in an "or" relationship. It should be noted that the data involved in this application are all obtained on the premise of obtaining user authorization.

[0021] A chuck is a support platform located in a processing chamber for fixing and supporting a wafer to be processed or a tray loaded with wafers during wafer processing in semiconductor process equipment. An electrostatic chuck (ESC) is a chuck that uses the principle of electrostatic adsorption to fix a wafer or a tray. The ESC base is embedded with a chuck electrode, and the ESC power supply provides a DC high voltage to the chuck electrode, thereby generating an electrostatic force between the chuck and the wafer, fixing the wafer or tray on the chuck.

[0022] Figure 2 is a schematic diagram of the electrical system of the electrostatic chuck, such as Figure 2 As shown, the base of the electrostatic chuck 23 includes a first ceramic layer 22 and a second ceramic layer 26, in which a first electrode 21 and a second electrode 25 are respectively buried. The first electrode 21 and the second electrode 25 are made of metal and are surrounded by the first ceramic layer 22 and the second ceramic layer 26 on all four sides. The two high-voltage output terminals HV + Output and HV-Output are connected to the first electrode 21 and the second electrode 25 respectively through the first filter circuit 24 and the second filter circuit 27 .

[0023] The voltage value of the two high-voltage output terminals of the electrostatic chuck power supply 10 is generally one thousand to tens of thousands of volts (V). Since both ceramic layers are insulating materials, the loop current of the electrostatic chuck power supply 10 is extremely small. For example, in a Coulomb type electrostatic chuck, both ceramic layers are high-purity ceramic materials, and generally the resistance between the two electrodes and the ground is required to be greater than 1000 gigaohms (GΩ) or the loop current I of the electrostatic chuck power supply 10 is required to be less than 10 microamperes (μA). In a JR type electrostatic chuck, the two ceramic layers are doped with conductive materials, and the loop current I is slightly larger, and generally the loop current I is required to be less than 200μA.

[0024] In order to understand the operation of semiconductor process equipment and protect the safety of equipment and personnel, it is necessary to accurately detect the current of the ESC power supply circuit and design necessary short-circuit protection circuits. The ESC power supply has the characteristics of outputting high voltage and micro current, which brings certain difficulties to current detection.

[0025] In the related art, a high-voltage isolated operational amplifier is used to detect the current in the ESC power supply loop. However, the high-voltage isolated operational amplifier is relatively expensive, and the value of the isolation voltage is limited. When the voltage at the output end of the electrostatic chuck power supply is too large, the accuracy of the current detection is poor. To this end, the present application proposes a detection device for the current in the electrostatic chuck power supply loop and a semiconductor process equipment to solve the problem that the high-voltage isolated operational amplifier in the related art is relatively expensive, and the value of the isolation voltage is limited. When the voltage at the output end of the electrostatic chuck power supply is too large, the accuracy of the current detection is poor.

[0026] The technical solutions provided by various embodiments of the present application are described in detail below in conjunction with the accompanying drawings.

[0027] Figure 3 A schematic diagram of a detection device for a current in an electrostatic chuck power supply circuit is provided in accordance with an embodiment of the present application. Figure 3 As shown, the device for detecting the current of the electrostatic chuck power supply loop in the embodiment of the present application may specifically include: a sampling resistor R and a voltage detection unit 31.

[0028] The sampling resistor R is connected in series to the output end of the electrostatic chuck power supply 10 .

[0029] It should be noted that the output terminal of the electrostatic chuck power supply 10 can be the positive output terminal of the electrostatic chuck power supply 10 or the negative output terminal of the electrostatic chuck power supply 10. The output voltage of the positive output terminal of the electrostatic chuck power supply 10 is HV + The output voltage of the negative output terminal of the electrostatic chuck power supply 10 is HV-, and the voltage output to the load is recorded as HV + Output, HV - For the convenience of description, the following description will be made by taking the output end of the electrostatic chuck power supply 10 as the positive output end of the electrostatic chuck power supply 10 as an example.

[0030] The voltage detection unit 31 is used to amplify the sampling voltage U across the sampling resistor R, generate a detection voltage, and output the detection voltage through the output end of the voltage detection unit 31. The sampling voltage U across the sampling resistor R can be calculated based on the detection voltage, and then the loop current I of the electrostatic chuck power supply 10 flowing through the sampling resistor R can be calculated based on the sampling voltage U and the resistance R of the sampling resistor R, where I=U / R.

[0031] The voltage detection unit 31 may specifically include an operational amplifier 12 .

[0032] The positive input terminal IN of the operational amplifier 12 + Connected to the input terminal 1 of the sampling resistor R, the negative input terminal IN of the operational amplifier 12 - Connected to the output terminal 2 of the sampling resistor R, the output terminal of the operational amplifier 12 is used to output a voltage signal proportional to the loop current. The input voltage U of the operational amplifier 12 is R*I, and the operational amplifier 12 amplifies the voltage U. The gain (amplification factor) of the operational amplifier 12 is adjustable and is recorded as K. 12 The voltage U at the output of the operational amplifier 12 is 12 =K 12 *U=K 12 *R*I,U 12∝I, through circuit conversion, the current signal I of the sampling resistor R is converted into a voltage signal U 12 .

[0033] To overcome Figure 1 To overcome the shortcomings of the medium and high voltage isolation operational amplifier 12, the operational amplifier 12 in the embodiment of the present application adopts an ordinary operational amplifier, and the isolation voltage between the input and output ends> the preset voltage (for example, 12V) can meet the condition.

[0034] In an electric field, when the reference voltage is different, the voltage at a certain point is different. In electronic circuits, the metal base plate is usually used as the reference voltage, that is, the ground in the electronic circuit is the reference voltage, and the reference voltage is set to zero, so that a voltage lower than the reference voltage is a negative voltage, and a voltage higher than the reference voltage is a positive voltage. If the voltage at a certain point is positive, it means that the voltage at that point is higher than the reference voltage; if the voltage at a certain point is negative, it means that the voltage at that point is lower than the reference voltage. The voltage between each point and the reference voltage is the voltage at each point. The voltage value at a certain point in the circuit is relative. If the reference voltage is different, the voltage at each point in the circuit will also change. The voltage value between two points in the circuit is fixed and will not change due to different reference voltages, that is, it has nothing to do with the selection of the reference voltage. The reference voltage can also be selected as a specific voltage value.

[0035] Figure 1 The supply voltage VDD of the operational amplifier 12 + =12V, Figure 1 The reference potential terminal of the operational amplifier 12 is grounded (GND), and the corresponding reference voltage VDD - =0V, namely the supply voltage VDD of the operational amplifier 12 + Compared to reference voltage VDD - High 12V.

[0036] and Figure 1 Unlike the operational amplifier 12 in the embodiment of the present application, the reference potential terminal of the operational amplifier 12 is used to input the first reference voltage VDD1 - , the first reference voltage VDD1 - The output voltage HV of the output terminal of the electrostatic chuck power supply 10 + The absolute voltage difference △VDD1 between them is less than the tolerance voltage difference U1 of the operational amplifier 12 max , that is, VDD1 - The value range is (HV + -U1 max , H.V. + +U1 max ), for example, the reference potential terminal of the operational amplifier 12 can be connected to the output terminal of the electrostatic chuck power supply 10 (the corresponding voltage is recorded as HV +) connection, that is, the reference potential terminal of the operational amplifier 12 is connected to the first reference voltage VDD1-=HV + Correspondingly, the power supply terminal of the operational amplifier 12 is used to input the first power supply voltage VDD1 + , the first supply voltage VDD1 + than the first reference voltage VDD1 - The first voltage value △v1, namely VDD1, is high. + =VDD1 - +△v1. The value range of the first voltage value △v1 is 3.3V~36V, for example, the value can be 12V, at this time VDD1 + =VDD1 - +12V. With the first reference voltage VDD1 - -HV + =△VDD1 as an example, where △VDD1 is less than the withstand voltage difference U1 of the operational amplifier 12 max , if HV + The voltage to ground is positive 2000V, then VDD1 - The voltage to ground is positive 2000V+△VDD1, that is, the first reference voltage of the operational amplifier 12 is positive 2000V+△VDD1 (relative to ground), VDD1 + The voltage to ground is positive 2012V+△VDD1. The voltage IN of the positive input terminal of the operational amplifier 12 is + and the first reference voltage VDD1 - The voltage difference between + -VDD1 - =2000-2000-△VDD1=-△VDD1, the voltage difference between the voltage IN- at the negative input terminal of the operational amplifier 12 and the first reference voltage VDD1- is HV + -U-VDD1-=2000-U-2000-△VDD1=-U-△VDD1, U is the voltage difference across the sampling resistor R (i.e., the sampling voltage). In general, U<10V, that is, the voltage difference between the input and output of the operational amplifier 12 is <10V+△VDD1, and △VDD1<the withstand voltage difference U1 of the operational amplifier 12 max Therefore, a common non-high voltage isolated operational amplifier can be used, such as the withstand voltage difference U1 max It can be selected as 10V, then VDD1 - The value range is (1990, 2010) V. In an optional implementation, ΔVDD1=0. In this case, the reference potential terminal of the operational amplifier 12 has a first reference voltage VDD1 to ground. - =HV + , that is, the first reference voltage VDD1 - With HV+ Same potential, first supply voltage VDD1 + =HV + +△v1, namely the first power supply voltage VDD1 + HV + High △v1, the voltage IN of the positive input terminal of the operational amplifier 12 + and the first reference voltage VDD1 - The voltage difference between them is 0, and the voltage IN at the negative input terminal of the operational amplifier 12 is - and the first reference voltage VDD1 - The voltage difference between them is -U, so an ordinary non-high-voltage isolated operational amplifier can be used.

[0037] Furthermore, the voltage detection unit 31 may also include a photocoupler 13 .

[0038] Since the input terminal (IN + , IN - ) to ground voltage HV + 、HV + -U are both DC high voltages. After amplification, the voltage U at the output of the operational amplifier 12 12 The device receiving the detection voltage output by the voltage detection unit 31 for calculating the current I is generally a low-voltage device, so the voltage U at the output end of the operational amplifier 12 needs to be 12 High voltage isolation is performed to ensure the accuracy of current detection.

[0039] Specifically, a photocoupler 13 may be provided between the operational amplifier 12 and the output end of the voltage detection unit 31 , the input end of the photocoupler 13 is connected to the output end of the operational amplifier 12 , and the output end of the photocoupler 13 is connected to the output end of the voltage detection unit 31 .

[0040] The photoelectric coupler 13 can be a linear photocoupler, such as ISO224 series. The photoelectric coupler 13 includes a light emitter T1 and a light receiver T2. There is no electrical connection between the light emitter T1 and the light receiver T2. Information is transmitted through light intensity, and the isolation voltage can reach 10,000 to tens of thousands of volts. The output voltage U of the linear photoelectric coupler 13 is 13 and input voltage U 12 Proportional, and the ratio is adjustable, denoted as K 13 , the voltage U at the output end of the optocoupler 13 13 =K 13 *U 12 =K 13 *K 12 *U=K 13 *K 12 *R*I,U 13∝I, through circuit conversion, the current signal I of the sampling resistor R is converted into a voltage signal U 13 By detecting the voltage signal U 13 , the loop current I can be calculated.

[0041] The positive input terminal of the light emitting device T1 is connected to the output terminal of the operational amplifier 12, and the negative input terminal and the reference potential terminal of the light emitting device T1 are respectively used to input the second reference voltage VDD2 - , the second reference voltage VDD2 - The output voltage HV of the output terminal of the electrostatic chuck power supply 10 + The absolute voltage difference △VDD2 between them is less than the withstand voltage difference U2 of the light emitting device T1 max , that is, VDD2 - The value range is (HV + -U2 max , H.V. + +U2 max ), for example, the negative input terminal and the reference potential terminal of the light emitter T1 can be connected to the output terminal of the electrostatic chuck power supply 10 (the corresponding voltage is recorded as HV + ) connection, that is, the second reference voltage VDD2 to the ground of the reference potential terminal of the light emitting device T1 - =HV + Correspondingly, the power supply terminal of the light emitting device T1 is used to input the second power supply voltage VDD2 + , the second supply voltage VDD2 + than the second reference voltage VDD2 - The second voltage value △v2, namely VDD2 + =VDD2 - +△v2. The second voltage value △v2 has a value range of 3.3V to 36V, for example, it can be 12V. At this time, VDD2 + =VDD2 - +12 V. Similarly, in an alternative implementation, ΔVDD2=0.

[0042] The reference potential terminal of the light receiver T2 is grounded (GND), and the power supply terminal of the light receiver T2 is used to input a third power supply voltage, which is a preset third voltage value (eg, 12V). The output terminal of the light receiver T2 is connected to the output terminal of the voltage detection unit 31 .

[0043] Furthermore, the voltage detection unit 31 may also include a voltage follower 14, and the photocoupler 13 is connected to the output end of the voltage detection unit 31 through the voltage follower 14. The basic principle of the voltage follower 14 is to use negative feedback to achieve the matching between the output voltage and the input voltage. The voltage follower 14 includes an amplifier and a feedback circuit. The feedback circuit compares the output signal of the amplifier with the input signal and feeds back the difference to the input end of the amplifier to maintain the stability of the output voltage.

[0044] Specifically, the positive input terminal IN of the voltage follower 14 + The positive output terminal of the photocoupler 13 and the output terminal of the voltage follower 14 are connected respectively, and the negative input terminal IN of the voltage follower 14 - The output end of the voltage follower 14 is connected to the output end of the voltage detection unit.

[0045] The reference potential terminal of the voltage follower 14 is grounded (GND), and the power supply terminal of the voltage follower 14 is used to input a fourth power supply voltage, which is a preset fourth voltage value (for example, 12V). Since the voltages of the input terminal, output terminal, and power supply terminal of the voltage follower 14 are all within 12V relative to the ground (when the third voltage value and the fourth voltage value are 12V), the voltage follower 14 can use an ordinary non-high-voltage isolated operational amplifier. The voltage U at the output terminal of the voltage follower 14 is 14 =U 13 =K 13 *U 12 =K 13 *K 12 *U=K 13 *K 12 *R*I,U 14 ∝I, through circuit conversion, the current signal I of the sampling resistor R is converted into a voltage signal U 14 By detecting the voltage signal U 14 , the loop current I can be calculated.

[0046] like Figure 4 As shown in Figure 2, considering that the loop current I is extremely weak, in order to improve the sampling accuracy, Figure 3 On the basis of the above, a tunnel magnetoresistance (TMR) sensor 11 is arranged before the input end of the operational amplifier 12. The TMR sensor 11 has a built-in integrated coil, an anti-external magnetic interference design, and extremely high precision. For example, the TMR-MAC005 sensor has a resolution of 150 nanoamperes (nA), which meets the micro-current sampling requirements of the ESC power supply 10.

[0047] The positive input terminal IN of the TMR sensor 11+ Connected to the input end of the sampling resistor R, the negative input end IN of the TMR sensor 11 - Connected to the output end of the sampling resistor R, the positive output end Out of the TMR sensor 11 + The positive input terminal IN of the operational amplifier 12 + Connect the negative output terminal of TMR sensor 11 to Out - The negative input terminal IN of the operational amplifier 12 - The TMR sensor 11 is a linear sensor, and the output voltage U 11 It is proportional to the input voltage U, and the ratio is adjustable, denoted by K 11 , the output voltage U of the TMR sensor 11 11 =K 11 *U. Correspondingly, the voltage U at the output of the voltage follower 14 14 =U 13 =K 13 *U 12 =K 13 *K 12 *U 11 =K 13 *K 12 *K 11 *R*I,U 14 ∝I, through circuit conversion, the current signal I of the sampling resistor R is converted into a voltage signal U 14 By detecting the voltage signal U 14 , the loop current I can be calculated.

[0048] Similar to operational amplifier 12, to overcome Figure 1 To overcome the shortcomings of the medium and high voltage isolation operational amplifier 12, the TMR sensor 11 in the embodiment of the present application adopts an ordinary linear sensor, and the isolation voltage between the input and output ends> the preset voltage (for example, 12V) can meet the condition.

[0049] Specifically, the reference potential terminal of the TMR sensor 11 is used to input the fifth reference voltage VDD5 - , the fifth reference voltage VDD5 - The output voltage HV of the output terminal of the electrostatic chuck power supply 10 + The absolute voltage difference △VDD5 between them is less than the tolerance voltage difference U5 of the TMR sensor 11 max , that is, VDD5 - The value range is (HV + -U5 max , H.V. + +U5 max), for example, the reference potential end of the TMR sensor 11 can be connected to the output end of the electrostatic chuck power supply 10 (the corresponding voltage is recorded as HV + ) connection, that is, the fifth reference voltage VDD5 to the ground of the reference potential terminal of the TMR sensor 11 - =HV + The power supply terminal of the TMR sensor 11 is used to input the fifth power supply voltage VDD5 + , the fifth power supply voltage VDD5 + than the fifth reference voltage VDD5 - The fifth voltage value △v5, namely VDD5, is preset at high + =VDD5 - +△v5. The fifth voltage value △v5 has a value range of 3.3V to 36V, for example, it can be 12V. At this time, VDD5 + =VDD5 - +12 V. Similarly, in an alternative implementation, ΔVDD5=0.

[0050] If HV + The voltage to ground is positive 2000V, then VDD5 - The voltage to ground is positive 2000V+△VDD5, that is, the fifth reference voltage of the TMR sensor 11 is positive 2000V+△VDD5 (relative to ground), VDD5 + The voltage to ground is positive 2012V+△VDD5. The voltage IN at the positive input terminal of the TMR sensor 11 is + and the fifth reference voltage VDD5 - The voltage difference between + -VDD5 - =2000-2000-△VDD5=-△VDD5, the voltage IN at the negative input terminal of the TMR sensor 11 - and the fifth reference voltage VDD5 - The voltage difference between + -U-VDD5 - =2000-U-2000-△VDD5=-U-△VDD5, U is the voltage difference across the sampling resistor R (i.e., the sampling voltage). In general, U<10V, that is, the voltage difference between the input and output ends of the TMR sensor 11 is <10V+△VDD5, and △VDD1<the withstand voltage difference U1 of the operational amplifier max Therefore, a common non-high voltage isolated linear sensor can be used, such as the withstand voltage difference U5 max It can be selected as 12V, then VDD1 - The value range is (1988, 2012)V.

[0051] Correspondingly, the input terminal IN of the operational amplifier 12+ , IN - The output terminal Out of the TMR sensor 11 + and Out - , assuming that the first reference voltage VDD1 - and the fifth reference voltage VDD5 - All HV + ,Out + and Out - The voltage value relative to the reference voltage is recorded as V Out+ and V Out- , the positive input terminal IN of the operational amplifier 12 + The voltage and its reference voltage VDD - The voltage difference between Out+ +HV + -VDD - =V Out+ , the negative input terminal IN of the operational amplifier 12 - The voltage and its reference voltage VDD - The voltage difference between Out- +HV + -VDD - =V Out- , V Out+ and V Out- are all less than 12V (when the supply voltage of the TMR sensor 11 to the ground is 12V, according to the rail-to-rail rule, the output voltage to the ground is ≤12V), that is, the voltage difference between the input and output of the operational amplifier 12 is ≤12V. + , IN - ) and the output voltage to ground are both DC high voltage, but the voltage difference between any two is very low, so an ordinary non-high voltage isolated operational amplifier can be used.

[0052] In some optional implementations, the first supply voltage VDD1 required by the operational amplifier + , the second supply voltage VDD2 required by the light emitter in the optocoupler + and the fifth supply voltage VDD5 required by the TMR sensor + are all equal, and the reference voltages of the operational amplifier, the light emitter in the optocoupler, and the TMR sensor are all equal.

[0053] Furthermore, the detection device for the current of the electrostatic chuck power supply loop of the embodiment of the present application may also include a power supply unit for outputting the high voltage power supply voltage required by each device in the voltage detection unit, for example, outputting the first power supply voltage VDD1 required by the operational amplifier to the operational amplifier. + , output the second power supply voltage VDD2 required by the light emitter in the photocoupler to the photocoupler+ and a fifth power supply voltage VDD5 required to output the TMR sensor to the TMR sensor + At the first supply voltage VDD1 + , the second supply voltage VDD2 + and the fifth power supply voltage VDD5 + When the voltages of the operational amplifier, the light emitter of the photocoupler and the TMR sensor are equal, the power supply unit is used to output the same power supply voltage to the operational amplifier, the light emitter of the photocoupler and the TMR sensor.

[0054] like Figure 5 As shown, the power supply unit is a direct current to direct current (DC / DC) circuit. The power supply unit may specifically include a voltage conversion module T5. The first input terminal of the voltage conversion module T5 is used to input a sixth power supply voltage, and the sixth power supply voltage is a preset sixth voltage value, such as 24V. The second input terminal of the voltage conversion module T5 is grounded (GND) through the chopper module IC2, and the first output terminal (SGND) of the voltage conversion module T5 is connected to the output terminal of the electrostatic chuck power supply, that is, connected to the Figure 3 , Figure 4 The operational amplifier, the photocoupler and the reference potential terminal of the TMR sensor are connected, the corresponding voltage is represented by SGND, and the second output terminal of the voltage conversion module T5 is used to output the target power supply voltage (that is, the first power supply voltage, the second power supply voltage or the fifth power supply voltage). Figure 5 In the example, the target power supply voltage is 12V relative to SGND, that is, the voltage relative to ground (GND) is (SGND+12)V, that is, the second output terminal of the voltage conversion module T5 is connected to Figure 3 , Figure 4 The operational amplifier, optocoupler and power supply terminal of the TMR sensor are connected.

[0055] The voltage conversion module T5 may specifically be a transformer. Figure 5 In the transformer, the primary side supply voltage is 24V, the reference voltage is ground (GND), the secondary side output voltage is 12V, and the reference voltage is SGND = HV + , at this time, the voltage between 12V (to SGND) and ground is (HV + +12)V. If HV + The voltage to ground is positive 2000V, that is, the voltage of SGND to ground is positive 2000V, the voltage of 12V (to SGND) to ground is positive 2012V, and there is a voltage difference of 2000V between SGND and the primary ground (GND) of the transformer. This requires the primary and secondary isolation voltage of the transformer to be U iso >HV + =2000V, which can generally be achieved through winding insulation, overall glue filling and increasing the distance between the primary and secondary sides.

[0056] The power supply unit can maintain the stability of the output voltage of the power supply unit by adjusting the output pulse width modulation (PWM) duty cycle of the chopper module IC2.

[0057] The power input pin VIN (corresponding to pin 13) of the chopping module IC2 is connected to the first input end of the voltage conversion module T5, the soft start pin SS (corresponding to pin 14) of the chopping module IC2 is grounded, and the switching pin SW (corresponding to pins 9-11) of the chopping module IC2 is connected to the second input end of the voltage conversion module T5. The chopping module IC2 is used to periodically connect or disconnect the connection between the switching pin SW and the second input end of the voltage conversion module T5.

[0058] The power supply unit may further include an input circuit, and the power input pin VIN of the chopping module IC2 is connected to the first input terminal of the voltage conversion module T5 through the input circuit. The input circuit includes a second resistor R2 and a tenth capacitor C10, a first end of the second resistor R2 is connected to the first input terminal of the voltage conversion module T5, a second end of the second resistor R2 is connected to the power input pin VIN of the chopping module IC2, a first end of the tenth capacitor C10 is connected to the power input pin VIN of the chopping module IC2, and a second end of the tenth capacitor C10 is grounded (GND).

[0059] The power supply unit may further include an input feedback circuit, which includes a fifth resistor R5 and a sixth resistor R6. A first end of the fifth resistor R5 is connected to a first input end of the voltage conversion module T5, a second end of the fifth resistor R5 is connected to a first end of the sixth resistor R6, and a second end of the sixth resistor R6 is connected to a compensation pin COMP (corresponding to pin 1) of the chopping module IC2.

[0060] The power supply unit may further include a voltage stabilizing filter circuit, which includes a fourteenth capacitor C14 and a second voltage stabilizing diode Z2. The first end of the fourteenth capacitor C14 is connected to the second end of the fifth resistor R5, and the second end of the fourteenth capacitor C14 is grounded (GND). The first end of the second voltage stabilizing diode Z2 is connected to the second end of the fifth resistor R5, and the second end of the fourteenth capacitor C14 is grounded (GND).

[0061] The power supply unit may further include a power supply circuit, which provides an operating voltage for the chopping module IC2, and the power supply circuit includes a fourth resistor R4 and a ninth resistor R9. A first end of the fourth resistor R4 is connected to a first input end of the voltage conversion module T5, a second end of the fourth resistor R4 is connected to a pin SHDN (corresponding to pin 3) of the chopping module IC2, a first end of the ninth resistor R9 is connected to a second end of the fourth resistor R4, and a second end of the ninth resistor R9 is grounded (GND).

[0062] The power supply unit may further include a peak absorption circuit, which includes a first voltage stabilizing diode Z1 and a second diode D2, wherein the first voltage stabilizing diode Z1 and the second diode D2 are connected in series between the first input terminal and the second input terminal of the voltage conversion module T5.

[0063] The power supply unit may further include a slow start circuit, which includes a fifteenth capacitor C15 and a sixteenth capacitor C16. The first end of the fifteenth capacitor C15 is connected to the soft start pin SS of the chopping module IC2, and the second end of the fifteenth capacitor C15 is grounded (GND). The first end of the sixteenth capacitor C16 is connected to the bypass control pin BYP (corresponding to pin 12) of the chopping module IC2, and the second end of the sixteenth capacitor C16 is grounded (GND).

[0064] The power supply unit may further include an isolation capacitor C12 for isolating the ground GND of the input end of the voltage conversion module T5 and the ground SGND of the output end. The first end of the isolation capacitor C12 is connected to the compensation pin COMP (corresponding to pin 1) of the chopping module IC2, and the second end of the isolation capacitor C12 is grounded (GND).

[0065] The power supply unit may further include an RCD absorption circuit. The RCD absorption circuit includes a first diode D1, a first capacitor C1, and a third resistor R3. The first end of the first diode D1 is connected to the second output end of the voltage conversion module T5, and the second end of the first diode D1 is used to output the target power supply voltage. The first end of the first capacitor C1 is connected to the second output end of the voltage conversion module T5, the second end of the first capacitor C1 is connected to the first end of the third resistor R3, and the second end of the third resistor R3 is connected to the first output end (SGND) of the voltage conversion module T5.

[0066] The power supply unit may further include a third filter capacitor C3, a first end of the third filter capacitor C3 is connected to the second end of the first diode D1, and a second end of the third filter capacitor C3 is connected to the first output end (SGND) of the voltage conversion module T5.

[0067] The power supply unit may further include a sixth filter capacitor C6, a first end of the sixth filter capacitor C6 is connected to the second end of the first diode D1, and a second end of the sixth filter capacitor C6 is connected to the first output end (SGND) of the voltage conversion module T5.

[0068] The power supply unit may further include a ninth filter capacitor C9, a first end of the ninth filter capacitor C9 being connected to the second end of the first diode D1, a second end of the ninth filter capacitor C9 being connected to the first output end (SGND) of the voltage conversion module T5, and a second end of the third resistor R3 being connected to the first output end (SGND) of the voltage conversion module T5 through the ninth filter capacitor C9.

[0069] The power supply unit may further include a second photocoupler IC1, an input positive terminal of the second photocoupler IC1 being connected to the first output terminal (SGND) of the voltage conversion module T5 via an eleventh capacitor C11, an input negative terminal of the second photocoupler IC1 being connected to the first output terminal (SGND) of the voltage conversion module T5 via an output feedback circuit, an output positive terminal of the second photocoupler IC1 being connected to the first terminal of the isolation capacitor C12, and an output negative terminal of the second photocoupler IC1 being grounded (GND).

[0070] The output feedback circuit includes an eighth resistor R8, a thirteenth capacitor C13, a seventh resistor R7, a tenth resistor R10 and a reference voltage source IC3. A first end of the eighth resistor R8 is connected to the negative input end of the second photocoupler IC1, a second end of the eighth resistor R8 is connected to the first output end (SGND) of the voltage conversion module T5 through the reference voltage source IC3, a first end of the thirteenth capacitor C13 is connected to the second end of the eighth resistor R8, a second end of the thirteenth capacitor C13 is connected to the first output end (SGND) of the voltage conversion module T5 through the tenth resistor R10, a first end of the seventh resistor R7 is connected to the second end of the first diode D1, and a second end of the seventh resistor R7 is connected to the first output end (SGND) of the voltage conversion module T5 through the tenth resistor R10.

[0071] Further, such as Figure 6 As shown, in Figure 5 On the basis of the illustrated embodiment, the power supply unit may further include a second filter capacitor C2, a seventh filter capacitor C7, and an eighth filter capacitor C8 arranged at the input end of the voltage conversion module T5, and a capacitor combination of different capacitance values ​​and dielectric materials may be selected to filter interference signals of different frequencies, thereby increasing the anti-interference capability of the input end. The first ends of the second filter capacitor C2, the seventh filter capacitor C7, and the eighth filter capacitor C8 are all connected to the first input end of the voltage conversion module T5, and the second ends of the second filter capacitor C2, the seventh filter capacitor C7, and the eighth filter capacitor C8 are all grounded (GND).

[0072] The power supply unit may further include a fourth filter capacitor C4 and a fifth filter capacitor C5 disposed at the output end of the voltage conversion module T5. The combination of capacitors with different capacitance values ​​and dielectric materials may filter interference signals of different frequencies, thereby increasing the anti-interference capability of the output end, ensuring the stability of the output voltage, and reducing ripple. The fourth filter capacitor C4 and the fifth filter capacitor C5 are respectively connected in parallel with the sixth filter capacitor C6.

[0073] The power supply unit may further include a dummy load resistor R93 connected in parallel with the sixth filter capacitor C6 to ensure the stability of the output voltage.

[0074] The power supply unit may further include an output indication circuit, which includes an indicator light LED1 and a first resistor R1 connected in series, and plays an output indication role. The output indication circuit is connected in parallel with the sixth filter capacitor C6.

[0075] In summary, in the detection device of the loop current of the electrostatic chuck power supply of the embodiment of the present application, the reference potential terminal of the operational amplifier is connected to the output terminal of the electrostatic chuck power supply, and the power supply terminal of the operational amplifier is used to input a first power supply voltage, and the first power supply voltage is higher than the output voltage of the output terminal of the electrostatic chuck power supply by a preset first voltage value. By setting the reference voltage of the reference potential terminal of the operational amplifier to the output voltage of the output terminal of the electrostatic chuck power supply, the voltage to ground of the input terminal (input positive terminal, input negative terminal) and the output terminal of the operational amplifier are both DC high voltage, but the voltage difference between any two is very low, so the operational amplifier can use a common operational amplifier with non-high voltage isolation, which avoids the high cost of the high voltage isolation operational amplifier and the limited value of the isolation voltage. When the high voltage voltage at the output terminal of the electrostatic chuck power supply is too large, the problem of poor accuracy of current detection reduces the cost and improves the accuracy of current detection. High voltage isolation is achieved by the photoelectric coupler 13, and low-cost high voltage isolation is achieved, which ensures the accuracy of current detection. The stability of the output detection voltage is ensured by the voltage follower, thereby improving the accuracy of current detection. The TMR sensor improves the accuracy of current sampling and the reference voltage of the TMR sensor, so that a non-high-voltage isolated TMR sensor can be used, avoiding the problem of high high-voltage isolation cost. The power supply unit provides the required high-voltage power supply voltage for each device in the voltage detection unit.

[0076] The present application also provides a semiconductor process equipment. Figure 7 As shown, the semiconductor process equipment 70 of the embodiment of the present application includes: an electrostatic chuck 23, an electrostatic chuck power supply 10 and a detection device 71 for the loop current of the electrostatic chuck power supply of the above embodiment.

[0077] The systems, devices, modules or units described in the above embodiments may be implemented by computer chips or entities, or by products with certain functions. A typical implementation device is a computer. Specifically, the computer may be, for example, a personal computer, a laptop computer, a cellular phone, a camera phone, a smart phone, a personal digital assistant, a media player, a navigation device, an email device, a game console, a tablet computer, a wearable device, or a combination of any of these devices.

[0078] For the convenience of description, the above device is described in various units according to their functions. Of course, when implementing the present application, the functions of each unit can be implemented in the same or multiple software and / or hardware.

[0079] Those skilled in the art will appreciate that the embodiments of the present application may be provided as methods, systems, or computer program products. Therefore, the present application may adopt the form of a complete hardware embodiment, a complete software embodiment, or an embodiment in combination with software and hardware. Moreover, the present application may adopt the form of a computer program product implemented in one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) that include computer-usable program code.

[0080] The present application is described with reference to the flowcharts and / or block diagrams of the methods, devices (systems), and computer program products according to the embodiments of the present application. It should be understood that each process and / or box in the flowchart and / or block diagram, as well as the combination of the processes and / or boxes in the flowchart and / or block diagram, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer, an embedded processor, or other programmable data processing device to generate a machine, so that the instructions executed by the processor of the computer or other programmable data processing device generate instructions for implementing the processes in the flowchart and / or block diagram. Figure 1 A process or multiple processes and / or boxes Figure 1 A device that provides the functions specified in a block or multiple blocks.

[0081] These computer program instructions may also be stored in a computer-readable memory capable of directing a computer or other programmable data processing device to operate in a specific manner, so that the instructions stored in the computer-readable memory produce an article of manufacture comprising an instruction device, which implements the process Figure 1 A process or multiple processes and / or boxes Figure 1 A function specified in one or more boxes.

[0082] These computer program instructions can also be loaded onto a computer or other programmable data processing device so that a series of operating steps are executed on the computer or other programmable device to produce a computer-implemented process, thereby providing instructions for implementing the process. Figure 1 A process or multiple processes and / or boxes Figure 1 The steps for the functions specified in one or more boxes.

[0083] In a typical configuration, a computing device includes one or more processors (CPU), input / output interfaces, network interfaces, and memory.

[0084] The memory may include non-permanent storage in a computer-readable medium, random access memory (RAM) and / or non-volatile memory in the form of read-only memory (ROM) or flash RAM. The memory is an example of a computer-readable medium.

[0085] Computer readable media include permanent and non-permanent, removable and non-removable media that can be implemented by any method or technology to store information. Information can be computer readable instructions, data structures, program modules or other data. Examples of computer storage media include, but are not limited to, phase change memory (PRAM), static random access memory (SRAM), dynamic random access memory (DRAM), other types of random access memory (RAM), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory or other memory technology, compact disk read-only memory (CD-ROM), digital versatile disk (DVD) or other optical storage, magnetic cassettes, magnetic tape magnetic disk storage or other magnetic storage devices or any other non-transmission media that can be used to store information that can be accessed by a computing device. As defined herein, computer readable media does not include temporary computer readable media (transitory media), such as modulated data signals and carrier waves.

[0086] It should also be noted that the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, commodity or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, commodity or device. In the absence of more restrictions, the elements defined by the sentence "comprises a ..." do not exclude the existence of other identical elements in the process, method, commodity or device including the elements.

[0087] The present application may be described in the general context of computer-executable instructions executed by a computer, such as program modules. Generally, program modules include routines, programs, objects, components, data structures, etc. that perform specific tasks or implement specific abstract data types. The present application may also be practiced in distributed computing environments where tasks are performed by remote processing devices connected through a communication network. In a distributed computing environment, program modules may be located in local and remote computer storage media, including storage devices.

[0088] Each embodiment in this specification is described in a progressive manner, and the same or similar parts between the embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the system embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and the relevant parts can be referred to the partial description of the method embodiment.

[0089] The above are only embodiments of the present application and are not intended to limit the present application. For those skilled in the art, the present application may have various changes and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included within the scope of the claims of the present application.

Claims

1. A device for detecting current of an electrostatic chuck power supply loop, characterized in that: include: A sampling resistor, the sampling resistor is connected in series to an output end of the electrostatic chuck power supply; An operational amplifier, wherein the positive input terminal of the operational amplifier is connected to the input terminal of the sampling resistor, the negative input terminal of the operational amplifier is connected to the output terminal of the sampling resistor, the reference potential terminal of the operational amplifier is used to input a first reference voltage, the absolute voltage difference between the first reference voltage and the output voltage of the output terminal of the electrostatic chuck power supply is less than the withstand voltage difference of the operational amplifier, the power supply terminal of the operational amplifier is used to input a first power supply voltage, the first power supply voltage is higher than the first reference voltage by a preset first voltage value, and the output terminal of the operational amplifier is used to output a voltage signal proportional to the loop current.

2. The device according to claim 1, characterized in that Also includes: A photoelectric coupler, the photoelectric coupler comprising a light emitter and a light receiver; The positive input terminal of the light emitter is connected to the output terminal of the operational amplifier, the negative input terminal and the reference potential terminal of the light emitter are respectively used to input a second reference voltage, the absolute voltage difference between the second reference voltage and the output voltage of the output terminal of the electrostatic chuck power supply is less than the withstand voltage difference of the light emitter, and the power supply terminal of the light emitter is used to input a second power supply voltage, and the second power supply voltage is higher than the second reference voltage by a preset second voltage value; The reference potential terminal of the light receiver is grounded, and the power supply terminal of the light receiver is used to input a third power supply voltage, and the third power supply voltage is a preset third voltage value.

3. The device according to claim 2, characterized in that Also includes: A voltage follower, wherein the positive input terminal of the voltage follower is connected to the positive output terminal of the photoelectric coupler and the output terminal of the voltage follower respectively, and the negative input terminal of the voltage follower is connected to the negative output terminal of the photoelectric coupler.

4. The device according to claim 3, characterized in that The reference potential terminal of the voltage follower is grounded, and the power supply terminal of the voltage follower is used to input a fourth power supply voltage, and the fourth power supply voltage is a preset fourth voltage value.

5. The device according to claim 1, characterized in that Also includes: Tunnel magnetoresistance sensor, the operational amplifier is connected to both ends of the sampling resistor through the tunnel magnetoresistance sensor; The positive input terminal of the tunnel magnetoresistance sensor is connected to the input terminal of the sampling resistor, the negative input terminal of the tunnel magnetoresistance sensor is connected to the output terminal of the sampling resistor, the positive output terminal of the tunnel magnetoresistance sensor is connected to the positive input terminal of the operational amplifier, the negative output terminal of the tunnel magnetoresistance sensor is connected to the negative input terminal of the operational amplifier, the reference potential terminal of the tunnel magnetoresistance sensor is used to input a fifth reference voltage, the absolute voltage difference between the fifth reference voltage and the output voltage of the output terminal of the electrostatic chuck power supply is less than the tolerance voltage difference of the tunnel magnetoresistance sensor, and the power supply terminal of the tunnel magnetoresistance sensor is used to input a fifth power supply voltage, and the fifth power supply voltage is higher than the fifth reference voltage by a preset fifth voltage value.

6. The device according to any one of claims 1 to 5, characterized in that Also includes: A power supply unit is used to output the first power supply voltage to the operational amplifier.

7. The device according to claim 6, characterized in that The power supply unit comprises: A voltage conversion module, wherein the first input end of the voltage conversion module is used to input a sixth power supply voltage, the sixth power supply voltage is a preset sixth voltage value, the second input end of the voltage conversion module is grounded through a chopper module, the first output end of the voltage conversion module is connected to the output end of the electrostatic chuck power supply, and the second output end of the voltage conversion module is used to output the first power supply voltage; The power input pin of the chopping module is connected to the first input end of the voltage conversion module, the soft start pin of the chopping module is grounded, the switching pin of the chopping module is connected to the second input end of the voltage conversion module, and the chopping module is used to periodically connect or disconnect the connection between the switching pin and the second input end of the voltage conversion module.

8. The device according to claim 7, characterized in that The power supply unit further comprises: an input circuit, through which the power input pin of the chopping module is connected to the first input terminal of the voltage conversion module; The input circuit comprises: a second resistor, wherein a first end of the second resistor is connected to the first input end of the voltage conversion module, and a second end of the second resistor is connected to the power input pin of the chopping module; A tenth capacitor, wherein a first end of the tenth capacitor is connected to a power input pin of the chopping module, and a second end of the tenth capacitor is grounded.

9. The device according to claim 7, characterized in that The power supply unit further includes: an input feedback circuit and a voltage stabilizing filter circuit; The input feedback circuit comprises: a fifth resistor and a sixth resistor; a first end of the fifth resistor is connected to the first input end of the voltage conversion module, a second end of the fifth resistor is connected to the first end of the sixth resistor, and a second end of the sixth resistor is connected to the compensation pin of the chopping module; The voltage stabilizing and filtering circuit includes: a fourteenth capacitor and a second voltage stabilizing diode; the first end of the fourteenth capacitor is connected to the second end of the fifth resistor, and the second end of the fourteenth capacitor is grounded; the first end of the second voltage stabilizing diode is connected to the second end of the fifth resistor, and the second end of the fourteenth capacitor is grounded.

10. The device according to claim 7, characterized in that The power supply unit further includes: a peak absorption circuit and a soft start circuit; The peak absorption circuit comprises: a first voltage stabilizing diode and a second diode; the first voltage stabilizing diode and the second diode are connected in series between the first input terminal and the second input terminal of the voltage conversion module; The soft start circuit includes: a fifteenth capacitor and a sixteenth capacitor; the first end of the fifteenth capacitor is connected to the soft start pin of the chopping module, and the second end of the fifteenth capacitor is grounded; the first end of the sixteenth capacitor is connected to the bypass control pin of the chopping module, and the second end of the sixteenth capacitor is grounded.

11. The device according to claim 7, characterized in that The power supply unit further includes: An RCD absorption circuit, the RCD absorption circuit comprising a first diode, a first capacitor and a third resistor; the first end of the first diode is connected to the second output end of the voltage conversion module, and the second end of the first diode is used to output the first supply voltage; the first end of the first capacitor is connected to the second output end of the voltage conversion module, the second end of the first capacitor is connected to the first end of the third resistor, and the second end of the third resistor is connected to the first output end of the voltage conversion module; a third filter capacitor, wherein a first end of the third filter capacitor is connected to the second end of the first diode, and a second end of the third filter capacitor is connected to the first output end of the voltage conversion module; a sixth filter capacitor, wherein a first end of the sixth filter capacitor is connected to the second end of the first diode, and a second end of the sixth filter capacitor is connected to the first output end of the voltage conversion module; A ninth filter capacitor, wherein the first end of the ninth filter capacitor is connected to the second end of the first diode, the second end of the ninth filter capacitor is connected to the first output end of the voltage conversion module, and the second end of the third resistor is connected to the first output end of the voltage conversion module through the ninth filter capacitor.

12. The device according to claim 11, characterized in that The power supply unit further includes: An isolation capacitor, wherein a first end of the isolation capacitor is connected to a compensation pin of the chopping module, and a second end of the isolation capacitor is grounded; a second photoelectric coupler, wherein the input positive terminal of the second photoelectric coupler is connected to the first output terminal of the voltage conversion module through an eleventh capacitor, the input negative terminal of the second photoelectric coupler is connected to the first output terminal of the voltage conversion module through an output feedback circuit, the output positive terminal of the second photoelectric coupler is connected to the first terminal of the isolation capacitor, and the output negative terminal of the second photoelectric coupler is grounded; The output feedback circuit includes an eighth resistor, a thirteenth capacitor, a seventh resistor, a tenth resistor and a reference voltage source; the first end of the eighth resistor is connected to the negative input end of the second photoelectric coupler, the second end of the eighth resistor is connected to the first output end of the voltage conversion module through the reference voltage source, the first end of the thirteenth capacitor is connected to the second end of the eighth resistor, the second end of the thirteenth capacitor is connected to the first output end of the voltage conversion module through the tenth resistor, the first end of the seventh resistor is connected to the second end of the first diode, and the second end of the seventh resistor is connected to the first output end of the voltage conversion module through the tenth resistor.

13. The device according to claim 7, characterized in that The power supply unit further includes: a second filter capacitor, a seventh filter capacitor and an eighth filter capacitor arranged at the input end of the voltage conversion module; The first ends of the second filter capacitor, the seventh filter capacitor and the eighth filter capacitor are all connected to the first input end of the voltage conversion module, and the second ends of the second filter capacitor, the seventh filter capacitor and the eighth filter capacitor are all grounded.

14. The device according to claim 11, characterized in that The power supply unit further includes: a fourth filter capacitor, a fifth filter capacitor and a dummy load resistor arranged at the output end of the voltage conversion module; The fourth filter capacitor, the fifth filter capacitor and the dummy load resistor are respectively connected in parallel with the sixth filter capacitor.

15. The device according to claim 11, characterized in that The power supply unit further comprises: an output indication circuit; The output indication circuit comprises an indicator light and a first resistor connected in series, and the output indication circuit is connected in parallel with the sixth filter capacitor.

16. A semiconductor process equipment, characterized in that: include: An electrostatic chuck, an electrostatic chuck power supply, and a device for detecting the loop current of the electrostatic chuck power supply as described in any one of claims 1-15.

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