A system and method for recycling methane vapor deposition waste gas

Abstract

The present invention discloses a methane vapor deposition waste gas recycling system and method, which relates to the technical field of waste gas recycling of vapor deposition method, including a vapor deposition furnace, a waste gas outlet end of which is connected with a centrifugal fan, the centrifugal fan is connected with a primary oil removal filter, the primary oil removal filter is connected with a debenzene component, the debenzene component is connected with a deoxidation tower using a first compressor, the deoxidation tower is connected with two dehydration towers, the dehydration tower is connected with two first adsorption towers, the first adsorption tower is connected with two second adsorption towers using a second compressor, the second adsorption tower is connected with a methane gas storage tank, and the methane gas storage tank is connected to the inlet end of the vapor deposition furnace. The present invention can process the tail gas of methane vapor deposition, and realize the gas phase separation of methane and other tail gases through processes such as oil removal, temperature swing adsorption, pressure swing adsorption, etc., to obtain high-purity recovered methane, which is returned to the deposition furnace for continued use as raw gas.

Description

Technical Field

[0001] The invention relates to the technical field of waste gas recovery by vapor deposition, and in particular to a system and method for recovering waste gas from methane vapor deposition. Background Art

[0002] The preparation methods of carbon / carbon composite materials mainly include chemical vapor method and liquid phase impregnation method. Among them, the chemical vapor method uses organic low molecular gas (methane, propane, etc.) as a precursor, and forms a carbon matrix through gas phase pyrolysis, diffusion, deposition and other processes of hydrocarbon substances at high temperature. Take methane as an example: CH4+ΔQ→C+2H2, where ΔQ is the energy required for cracking and added from the outside. The process is simple, the preform has many open gaps, the degree of densification is easy to accurately control, and carbon-carbon composite materials with good performance are obtained. The disadvantages are that the preparation cycle is too long, the production efficiency is low, the raw material gas methane consumption is large, and the utilization rate is less than 50%. In the actual production process, the exhaust gas of the gas phase deposition furnace using methane cracking mainly contains methane, hydrogen, nitrogen, oxygen, ethylene, benzene naphthalene, etc., among which nitrogen and oxygen are caused by the poor sealing of the outlet pipe of the deposition furnace and the vacuum pump sucking in air. Among these components, the main ones are methane and hydrogen, with the methane content ≥50%, the hydrogen content ≥40%, and the content of other components ≤10%.

[0003] At present, the treatment method for tail gas from methane deposition furnace is mainly incineration or emptying. A large amount of methane and by-product hydrogen are inefficiently used or directly wasted, causing environmental pollution and increased production costs. The methane can be completely recovered through a series of treatments and returned to the deposition furnace for continued use as raw gas. The by-product hydrogen can also be considered for use as hydrogen fuel cell power generation. However, the efficiency of methane debenzenization adsorption is currently low, the utilization rate of adsorption fillers is low, and only external temperature control equipment is used, resulting in the temperature of the gas entering the debenzenization tower changing with the flow time, resulting in incomplete adsorption.

[0004] In view of the above problems, the present invention provides a methane vapor deposition waste gas recovery and utilization system to solve the above problems. Summary of the invention

[0005] To achieve the above-mentioned objectives, the present invention provides the following technical solutions: a methane vapor deposition waste gas recovery and utilization system, comprising: a vapor deposition furnace, a waste gas outlet end of which is connected to a centrifugal fan, the centrifugal fan is connected to a first-stage oil removal filter, the first-stage oil removal filter is connected to a debenzene component, the debenzene component is connected to a deoxygenation tower using a first compressor, the deoxygenation tower is connected to two dehydration towers, the dehydration tower is connected to two first adsorption towers, the first adsorption tower is connected to two second adsorption towers using a second compressor, the second adsorption tower is connected to a methane gas storage tank, the methane gas storage tank is connected to the inlet end of the vapor deposition furnace, and the two dehydration towers, the first adsorption tower and the second adsorption tower are all connected in parallel.

[0006] Further, preferably, the benzene removal component comprises:

[0007] A base is fixed on the ground, and a bracket is fixed on the base;

[0008] A temperature regulating cylinder is fixed on the bracket, and the top end of the temperature regulating cylinder is connected to the outlet of the primary oil removal filter;

[0009] A control box, fixed on the bracket;

[0010] The debenzene towers are configured as two, both of which are fixed on the base, and the two debenzene towers are connected in parallel by pipelines;

[0011] The control valves are configured in multiple numbers and are symmetrically arranged on the pipeline.

[0012] Further, preferably, the pipeline is configured as an upper pipeline and a lower pipeline, wherein the upper pipeline connects the upper ends of the two debenzene towers, and the upper pipeline is connected to an external collecting device, and the lower pipeline connects the lower ends of the two debenzene towers, and the lower pipeline includes a first pipeline and a second pipeline, wherein the first pipeline is an exhaust gas inlet pipe, which is connected to the two debenzene towers and the temperature regulating cylinder, and the second pipeline is a nitrogen inlet pipe, one end of which is connected to the first pipeline, and the other end is connected to a nitrogen transfer bin, and the nitrogen transfer bin is connected to an external nitrogen supply device.

[0013] Further, preferably, the debenzene tower comprises:

[0014] The cylinder body has an air outlet and an air inlet respectively at its upper and lower ends;

[0015] A fixing ring fixed in the cylinder;

[0016] A first distributor, fixed to the lower end surface of the fixing ring;

[0017] A second distributor is rotatably disposed inside the fixing ring close to the upper end surface;

[0018] a temperature regulating tube, fixed in the fixing ring and located between the first distributor and the second distributor;

[0019] A driving chamber is fixed to the outer wall of the cylinder, a driving motor is fixed inside the driving chamber, and a driving gear is fixed to the output shaft of the driving motor;

[0020] The adsorption filler is fixed in the cylinder and located on the upper end surface of the fixing ring.

[0021] Further, preferably, an annular sealing groove is provided inside the fixing ring, the second distributor is rotatably disposed in the annular sealing groove, and avoidance grooves are provided at positions corresponding to the fixing ring and the driving teeth.

[0022] Further, preferably, the temperature regulating tube comprises at least three supports and a plurality of annular tubes, wherein the plurality of annular tubes are coaxially arranged, and the connecting positions between the plurality of annular tubes are staggered, and the plurality of annular tubes are fixed in the fixing ring by supports.

[0023] Further, preferably, the second distributor includes a distribution plate, which is rotatably arranged in the annular sealing groove, and the outer wall of the distribution plate is fixed with rotating teeth, the rotating teeth are engaged with the driving teeth, and a plurality of second distribution holes are obliquely opened on the distribution plate, and a disturbance plate is fixed to the lower ends of the plurality of second distribution holes.

[0024] Further, preferably, a plurality of first distribution holes are provided on the first distributor, the aperture of the first distribution holes is larger than the aperture of the second distribution holes, and the first distributor, the second distributor and the fixing ring together constitute a secondary temperature adjustment chamber.

[0025] A method for recycling methane vapor deposition waste gas comprises the following steps:

[0026] S1. The tail gas generated by the vapor deposition furnace is collected and sent to the primary oil removal filter by the centrifugal fan. The primary oil removal filter uses fiber cotton to remove a large amount of liquid oil in the tail gas. The tail gas after the primary filtration enters the debenzene component for secondary oil removal;

[0027] S2. The debenzene component adopts the temperature swing adsorption principle and uses activated carbon to adsorb tar, benzene, naphthalene, etc. in the tail gas. The debenzene component is configured with two towers, one for standby and one for use, one for adsorption and one for regeneration, to ensure the continuous adsorption process. The debenzene component that is saturated with adsorption switches to nitrogen for desorption regeneration. After regeneration, the next cycle of adsorption process is carried out;

[0028] S3. The deoiled tail gas passes through the first compressor to increase the pressure to 0.8MPag to provide pressure support for subsequent pressure swing adsorption;

[0029] S4. A special deoxidizer is loaded in the deoxidation tower, and oxygen and hydrogen react in the deoxidation tower to generate water, thereby removing oxygen, and the outlet temperature of the deoxidation tower is controlled within 300°C;

[0030] S5. The product water of the tail gas deoxygenation process is removed through a dehydration tower. The dehydration tower is configured with two towers, one for standby and one for use, one for adsorption and one for regeneration, to ensure the removal of water in the tail gas. The dehydration tower saturated with adsorption water is switched to the nitrogen pipeline for desorption regeneration. After the regeneration is completed, the next cycle of adsorption process is carried out;

[0031] S6. The tail gas after dehydration enters the first adsorption tower for pressure swing adsorption. After adsorption, it is discharged from the bottom of the first adsorption tower and enters the next step. The top of the first adsorption tower outputs hydrogen-rich gas, which can be used as a raw gas for hydrogen fuel cell power generation after purification for green reuse;

[0032] S7. After passing through the first adsorption tower, the pressure of the higher purity methane drops to 30KPag, and after passing through the second compressor, the pressure is increased to 0.6MPag, and the pressurized tail gas enters the second adsorption tower;

[0033] S8. In the second adsorption tower, methane is selectively adsorbed in the filler by a special adsorbent under high pressure, and a small amount of nitrogen and hydrogen that are not adsorbed is discharged from the top of the tower. After the pressure is reduced, the adsorbed methane is desorbed and released from the adsorbent, and stored in a methane gas storage tank. It is transported to the vapor deposition furnace for reuse according to flow and pressure control.

[0034] Compared with the prior art, the present invention provides a methane vapor deposition waste gas recovery and utilization system, which has the following beneficial effects:

[0035] In the present invention, by performing multiple adsorption processes on the waste gas, effective separation of methane and other gases is achieved, the process is clear, the equipment technology is mature, the safety performance is stable, and when the debenzene component is used for variable temperature adsorption, the waste gas can be preliminarily temperature-controlled by the temperature control cylinder, and then enter the secondary temperature control bin for secondary temperature control, which improves the accuracy of temperature control and makes the adsorption of the waste gas by the adsorption filler more rapid. When the debenzene tower is saturated with adsorption, the nitrogen can be preliminarily temperature-controlled by the nitrogen transfer bin, and enter the debenzene tower for displacement desorption, so that the adsorption filler is regenerated to avoid affecting the subsequent adsorption operation. The first distributor can preliminarily distribute the incoming gas to make the gas preliminarily dispersed, and then the rotation of the second distributor can carry out secondary distribution of the gas, so that it is in uniform contact with the adsorption filler, thereby improving the utilization rate of the adsorption filler.

[0036] After actual production verification, the purity of recycled methane is ≥90%. The methane is obtained by the recycling process. Under the same process conditions, the appearance and density indicators of the products obtained by vapor deposition meet the standards. Compared with the use of liquefied natural gas, the product qualification rate is equivalent, achieving the purpose and effect of recycling methane in the tail gas. In actual production, the tail gas discharged by three vapor deposition furnaces is processed by the recovery system process, and the amount of recycled methane gas can meet the raw gas demand of one deposition furnace, and the methane recovery rate can reach more than 85%. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Figure 1 It is a schematic diagram of the overall process of a methane vapor deposition waste gas recovery and utilization system;

[0038] Figure 2 A schematic diagram of a debenzene component of a methane vapor deposition waste gas recovery and utilization system;

[0039] Figure 3 A schematic diagram of the lower pipeline of a methane vapor deposition waste gas recovery and utilization system;

[0040] Figure 4 This is a schematic diagram of the interior of a debenzene tower of a methane vapor deposition waste gas recovery and utilization system;

[0041] Figure 5 A schematic diagram of a temperature regulating tube of a methane vapor deposition waste gas recovery and utilization system;

[0042] Figure 6 A schematic diagram of a second distributor of a methane vapor deposition waste gas recovery and utilization system;

[0043] Figure 7 A schematic diagram of the bottom of a second distributor of a methane vapor deposition waste gas recovery and utilization system;

[0044] In the figure: 1, vapor deposition furnace; 2, centrifugal fan; 3, primary oil removal filter; 4, debenzene assembly; 5, first compressor; 6, deoxygenation tower; 7, dehydration tower; 8, first adsorption tower; 9, second compressor; 10, second adsorption tower; 11, methane gas storage tank; 41, base; 42, bracket; 43, temperature adjustment cylinder; 44, control box; 45, debenzene tower; 46, pipeline; 47, control valve; 461, first pipeline; 462, second pipeline; 463, nitrogen transfer warehouse; 451, Cylinder body; 452, air inlet; 453, air outlet; 454, fixing ring; 455, first distributor; 456, second distributor; 457, temperature regulating tube; 458, driving chamber; 459, adsorption filler; 4541, annular sealing groove; 4542, avoidance groove; 4571, support member; 4572, annular tube; 4551, first distribution hole; 4561, distribution plate; 4562, second distribution hole; 4563, rotating tooth; 4564, disturbance plate; 4581, driving tooth. DETAILED DESCRIPTION

[0045] Reference Figure 1-Figure 7 The present invention provides a technical solution: a methane vapor deposition waste gas recovery and utilization system, comprising: a vapor deposition furnace 1, wherein the waste gas outlet end is connected to a centrifugal fan 2, the centrifugal fan 2 is connected to a primary oil removal filter 3, the primary oil removal filter 3 is connected to a debenzene component 4, the debenzene component 4 is connected to a deoxygenation tower 6 using a first compressor 5, the deoxygenation tower 6 is connected to two dehydration towers 7, the dehydration tower 7 is connected to two first adsorption towers 8, the first adsorption tower 8 is connected to two second adsorption towers 10 using a second compressor 9, the second adsorption tower 10 is connected to a methane gas storage tank 11, the methane gas storage tank 11 is connected to the inlet end of the vapor deposition furnace 1, and the two dehydration towers 7, the first adsorption tower 8 and the second adsorption tower 10 are all connected in parallel.

[0046] That is to say, by connecting the dehydration tower 7, the first adsorption tower 8 and the second adsorption tower 10 in parallel, the purpose of one tower adsorption and one tower regeneration can be achieved, so that a continuous adsorption process can be carried out to improve the adsorption efficiency.

[0047] In this embodiment, the benzene removal component 4 includes:

[0048] A base 41 is fixed on the ground, and a bracket 42 is fixed on the base 41;

[0049] A temperature regulating cylinder 43 is fixed on the bracket 42, and the top end of the temperature regulating cylinder 43 is connected to the outlet of the primary oil removal filter 3;

[0050] A control box 44 is fixed on the bracket 42;

[0051] The debenzene towers 45 are configured as two, both of which are fixed on the base 41, and the two debenzene towers 45 are connected in parallel by a pipeline 46;

[0052] The control valves 47 are configured in multiple numbers and are symmetrically arranged on the pipeline 46 .

[0053] That is to say, the working states of the two debenzene towers 45 can be controlled by switching the control valve 47 , thereby realizing the state switching between adsorption and regeneration of the two debenzene towers 45 .

[0054] As a preferred embodiment, the pipeline 46 is configured as an upper pipeline and a lower pipeline, wherein the upper pipeline connects the upper ends of the two debenzene towers 45, and the upper pipeline is connected to an external collection device, and the lower pipeline connects the lower ends of the two debenzene towers 45, and the lower pipeline includes a first pipeline 461 and a second pipeline 462, wherein the first pipeline 461 is an exhaust gas inlet pipe, which is connected to the two debenzene towers 45 and the temperature regulating cylinder 43, and the second pipeline 462 is a nitrogen inlet pipe, one end of which is connected to the first pipeline 461, and the other end is connected to a nitrogen transfer bin 463, and the nitrogen transfer bin 463 is connected to an external nitrogen supply device.

[0055] It should be noted that the nitrogen transfer bin 463 can regulate the temperature of the nitrogen, thereby controlling the inlet temperature of the nitrogen and improving the desorption efficiency.

[0056] As a preferred embodiment, the debenzene tower 45 comprises:

[0057] The cylinder 451 has an air outlet 453 and an air inlet 452 at its upper and lower ends respectively;

[0058] A fixing ring 454, fixed in the cylinder 451;

[0059] A first distributor 455, fixed on the lower end surface of the fixing ring 454;

[0060] A second distributor 456 is rotatably disposed inside the fixing ring 454 near the upper end surface;

[0061] The temperature regulating tube 457 is fixed in the fixing ring 454 and is located between the first distributor 455 and the second distributor 456;

[0062] The driving chamber 458 is fixed to the outer wall of the cylinder 451, and a driving motor is fixed inside the driving chamber 458, and a driving gear 4581 is fixed to the output shaft of the driving motor;

[0063] The adsorption filler 459 is fixed in the cylinder 451 and is located on the upper end surface of the fixing ring 454 .

[0064] Among them, the adsorption filler 459 is activated carbon, which can adsorb tar, benzene, naphthalene and other substances in the exhaust gas, and can initially distribute the incoming gas through the first distributor 455 to make the gas initially dispersed. Then, the gas can be secondarily distributed through the rotation of the second distributor 456 to uniformly contact with the adsorption filler 459, thereby improving the utilization rate of the adsorption filler 459.

[0065] As a preferred embodiment, an annular sealing groove 4541 is opened inside the fixing ring 454 , the second distributor 456 is rotatably disposed in the annular sealing groove 4541 , and avoidance grooves 4542 are opened at positions corresponding to the fixing ring 454 and the driving teeth 4581 .

[0066] As a preferred embodiment, the temperature regulating tube 457 includes at least three support members 4571 and multiple annular tubes 4572, wherein the multiple annular tubes 4572 are coaxially arranged, and the connecting positions between the multiple annular tubes 4572 are staggered, and the multiple annular tubes 4572 are fixed in the fixing ring 454 by the support members 4571.

[0067] That is to say, after the temperature adjustment is completed, the waste gas or nitrogen passes through the first distributor 456, because it passes through the pipeline 46, its temperature will change. At this time, it can be subjected to secondary temperature adjustment through the temperature adjustment tube 457, so that its temperature is more accurate and the adsorption and desorption efficiency is improved.

[0068] As a preferred embodiment, the second distributor 456 includes a distribution disk 4561, which is rotatably arranged in the annular sealing groove 4541, and the outer wall of the distribution disk 4561 is fixed with rotating teeth 4563, and the rotating teeth 4563 are engaged with the driving teeth 4581, and a plurality of second distribution holes 4562 are obliquely opened on the distribution disk 4561, and a disturbance plate 4564 is fixed to the lower end of each of the plurality of second distribution holes 4562.

[0069] It should be noted that the inclination direction of the second distribution holes 4562 is toward the rotation direction of the distribution disk 4561. That is to say, when the distribution disk 4561 rotates, the inclined second distribution holes 4562 can make the gas flow smoother and avoid the gas being always discharged from the same position, resulting in a low utilization rate of the adsorption filler 459. The disturbance plate 4564 can guide the gas when the distribution disk 4561 rotates, and can also stir the gas in the secondary temperature control chamber to make the gas temperature distribution inside it uniform.

[0070] As a preferred embodiment, a plurality of first distribution holes 4551 are provided on the first distributor 455, the aperture of the first distribution hole 4551 is larger than the aperture of the second distribution hole 4562, and the first distributor 455, the second distributor 456 and the fixing ring 454 together constitute a secondary temperature adjustment chamber.

[0071] That is to say, the flow rate of gas passing through the first distribution holes 4551 is greater than the flow rate of gas passing through the second distribution holes 4562, which will cause the gas to accumulate in the secondary temperature adjustment chamber, thereby enabling the temperature of the gas to be fully adjusted.

[0072] A method for recycling methane vapor deposition waste gas comprises the following steps:

[0073] S1. The tail gas generated by the vapor deposition furnace 1 is collected and sent to the primary oil removal filter 3 by the centrifugal fan 2. The primary oil removal filter 3 uses fiber cotton to filter and remove a large amount of liquid oil in the tail gas. The tail gas after the primary filtration enters the debenzene component 4 for secondary oil removal;

[0074] S2. The debenzene component 4 adopts the temperature swing adsorption principle and uses activated carbon to adsorb tar, benzene, naphthalene, etc. in the tail gas. The debenzene component 4 is configured with two towers, one for standby and one for use, one for adsorption and one for regeneration, to ensure that the adsorption process continues. The debenzene component 4 that is saturated with adsorption switches to nitrogen for desorption regeneration. After regeneration, the next cycle of adsorption process is carried out;

[0075] S3. The exhaust gas after oil removal passes through the first compressor 5, and the pressure is increased to 0.8MPag to provide pressure support for subsequent pressure swing adsorption;

[0076] S4. A special deoxidizer is loaded in the deoxidation tower 6. Oxygen and hydrogen react in the deoxidation tower 6 to generate water, thereby removing oxygen. The outlet temperature of the deoxidation tower 6 is controlled within 300° C. Oxygen leaking into the tail gas poses a huge safety hazard to methane reuse. Therefore, removing oxygen is one of the keys to the entire process. The deoxidation tower 6 removes oxygen, eliminating safety hazards in the system.

[0077] S5. The product water of the tail gas deoxygenation process is removed by the dehydration tower 7. The dehydration tower 7 is configured with two towers, one for standby and one for use, one for adsorption and one for regeneration, to ensure the removal of water from the tail gas. The dehydration tower 7 saturated with adsorption water is switched to the nitrogen pipeline for desorption regeneration. After the regeneration is completed, the next cycle of adsorption process is carried out;

[0078] S6. The tail gas after dehydration enters the first adsorption tower 8 for pressure swing adsorption, the purpose of which is to separate methane from hydrogen. The content of high-purity methane is ≥80%, and the rest is a small amount of nitrogen and hydrogen. After the adsorption is completed, it is discharged from the bottom of the first adsorption tower 8 to enter the next step. The top of the first adsorption tower 8 outputs hydrogen-rich gas with a hydrogen content of ≥90%, and the rest is a small amount of nitrogen and hydrogen, which can be used as a raw gas for hydrogen fuel cell power generation after purification for green reuse;

[0079] S7. After passing through the first adsorption tower 8, the pressure of the higher purity methane drops to 30KPag, and after passing through the second compressor 9, the pressure is increased to 0.6MPag, and the pressurized tail gas enters the second adsorption tower 10;

[0080] S8. In the second adsorption tower 10, methane is selectively adsorbed in the filler by a special adsorbent under high pressure, and a small amount of nitrogen and hydrogen that are not adsorbed is discharged from the top of the tower. After the pressure is reduced, the adsorbed methane is desorbed and released from the adsorbent, and stored in the methane storage tank 11. According to the flow rate and pressure control, it is transported to the vapor deposition furnace 1 for reuse. The purity of the methane released from the adsorbent can reach more than 90%, which can fully meet the requirements of vapor deposition raw gas.

[0081] Among them, after actual production verification, the purity of recycled methane is ≥90%. The methane is obtained by the recycling process. Under the same process conditions, the appearance and density indicators of the products obtained by vapor deposition meet the standards. Compared with the use of liquefied natural gas, the product qualification rate is equivalent, achieving the purpose and effect of recycling methane in the tail gas. In actual production, the tail gas discharged by three vapor deposition furnaces is processed by the recovery system process, and the amount of recycled methane gas can meet the raw gas demand of one deposition furnace, and the methane recovery rate can reach more than 85%.

[0082] What is described above is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A methane vapor deposition waste gas recovery and utilization system, characterized in that: include: A vapor deposition furnace (1), wherein the exhaust gas outlet end thereof is connected to a centrifugal fan (2), the centrifugal fan (2) is connected to a primary oil removal filter (3), the primary oil removal filter (3) is connected to a debenzene component (4), the debenzene component (4) is connected to a deoxidation tower (6) using a first compressor (5), and the debenzene component (4) is connected to a first deoxidation tower (6). The oxygen tower (6) is connected to two dehydration towers (7), the dehydration towers (7) are connected to two first adsorption towers (8), the first adsorption towers (8) are connected to two second adsorption towers (10) by means of a second compressor (9), the second adsorption towers (10) are connected to a methane gas storage tank (11), the methane gas storage tank (11) is connected to the inlet end of the vapor deposition furnace (1), and the two dehydration towers (7), the first adsorption tower (8) and the second adsorption tower (10) are all connected in parallel; The debenzene component (4) comprises: A base (41) is fixed on the ground, and a bracket (42) is fixed on the base (41); A temperature regulating cylinder (43) is fixed on the bracket (42), and the top end of the temperature regulating cylinder (43) is connected to the outlet of the primary oil removal filter (3); A control box (44) fixed on the bracket (42); The debenzene towers (45) are configured as two, both of which are fixed on the base (41), and the two debenzene towers (45) are connected in parallel by a pipeline (46); A control valve (47) is configured as a plurality of control valves and symmetrically arranged on the pipeline (46); The debenzene tower (45) comprises: The cylinder (451) has an air outlet (453) and an air inlet (452) respectively formed at its upper and lower ends; A fixing ring (454) fixed in the cylinder (451); A first distributor (455) fixed on the lower end surface of the fixing ring (454); A second distributor (456) is rotatably disposed inside the fixing ring (454) close to the upper end surface; A temperature regulating tube (457) is fixed in the fixing ring (454) and is located between the first distributor (455) and the second distributor (456); A drive chamber (458) is fixed to the outer wall of the cylinder (451), a drive motor is fixed inside the drive chamber, and a drive gear (4581) is fixed to the output shaft of the drive motor; An adsorption filler (459) is fixed in the cylinder (451) and is located on the upper end surface of the fixing ring (454); An annular sealing groove (4541) is provided inside the fixing ring (454), the second distributor (456) is rotatably disposed in the annular sealing groove (4541), and a avoiding groove (4542) is provided at a position corresponding to the fixing ring (454) and the driving tooth (4581); The second distributor (456) comprises a distribution plate (4561) which is rotatably arranged in the annular sealing groove (4541), and a rotating tooth (4563) is fixed on the outer wall of the distribution plate (4561), and the rotating tooth (4563) is meshed with the driving tooth (4581), and a plurality of second distribution holes (4562) are obliquely opened on the distribution plate (4561), and a disturbance plate (4564) is fixed at the lower end of each of the plurality of second distribution holes (4562); The first distributor (455) is provided with a plurality of first distribution holes (4551), the aperture of the first distribution holes (4551) is larger than the aperture of the second distribution holes (4562), and the first distributor (455), the second distributor (456) and the fixing ring (454) together form a secondary temperature adjustment chamber.

2. A methane vapor deposition waste gas recovery and utilization system according to claim 1, characterized in that: The pipeline (46) is configured as an upper pipeline and a lower pipeline, wherein the upper pipeline connects the upper ends of the two debenzene towers (45), and the upper pipeline is connected to an external collecting device, and the lower pipeline connects the lower ends of the two debenzene towers (45), and the lower pipeline includes a first pipeline (461) and a second pipeline (462), wherein the first pipeline (461) is an exhaust gas inlet pipe, which is connected to the two debenzene towers (45) and the temperature regulating cylinder (43), and the second pipeline (462) is a nitrogen inlet pipe, one end of which is connected to the first pipeline (461) and the other end is connected to a nitrogen transfer bin (463), and the nitrogen transfer bin (463) is connected to an external nitrogen supply device.

3. The methane vapor deposition waste gas recovery and utilization system according to claim 1, characterized in that: The temperature regulating tube (457) comprises at least three supporting members (4571) and a plurality of annular tubes (4572), wherein the plurality of annular tubes (4572) are coaxially arranged, and the connecting positions between the plurality of annular tubes (4572) are staggeredly arranged, and the plurality of annular tubes (4572) are fixed in the fixing ring (454) by means of supporting members (4571).

4. A method for recycling methane vapor deposition waste gas, which uses a methane vapor deposition waste gas recycling system according to any one of claims 1 to 3, characterized in that: The steps include: S1. The tail gas generated by the vapor deposition furnace (1) is collected and sent to the primary oil removal filter (3) by the centrifugal fan (2). The primary oil removal filter (3) uses fiber cotton to filter and remove a large amount of liquid oil in the tail gas. The tail gas after the primary filtration enters the debenzene component (4) for secondary oil removal; S2. The debenzene component (4) adopts the temperature swing adsorption principle and uses activated carbon to adsorb tar, benzene and naphthalene in the tail gas. The debenzene component (4) is configured with two towers, one for standby and one for use, one for adsorption and one for regeneration, to ensure that the adsorption process continues. The debenzene component (4) that is saturated with adsorption is switched to nitrogen for desorption regeneration. After regeneration, the next cycle of adsorption process is carried out; S3. The tail gas after oil removal passes through the first compressor (5) to increase the pressure to 0.8MPag to provide pressure support for subsequent pressure swing adsorption; S4. A special deoxidizer is loaded in the deoxidation tower (6), oxygen and hydrogen react in the deoxidation tower (6) to generate water, thereby removing oxygen, and the outlet temperature of the deoxidation tower (6) is controlled within 300°C; S5. The product water of the tail gas deoxygenation process is removed through the dehydration tower (7). The dehydration tower (7) is configured with two towers, one for standby and one for use, one for adsorption and one for regeneration, to ensure the removal of water from the tail gas. The dehydration tower (7) saturated with adsorption water is switched to the nitrogen pipeline for desorption regeneration. After the regeneration is completed, the next cycle of adsorption process is carried out; S6. After the dehydration, the tail gas enters the first adsorption tower (8) for pressure swing adsorption. After the adsorption is completed, it is discharged from the bottom of the first adsorption tower (8) and enters the next step. The top of the first adsorption tower (8) produces hydrogen-rich gas, which can be used as a raw gas for hydrogen fuel cell power generation after purification and reused greenly; S7. After passing through the first adsorption tower (8), the pressure of the relatively high purity methane drops to 30 KPag, and after passing through the second compressor (9), the pressure is increased to 0.6 MPag, and the pressurized tail gas enters the second adsorption tower (10); S8. In the second adsorption tower (10), methane is selectively adsorbed in the filler by a special adsorbent under high pressure, and a small amount of nitrogen and hydrogen that are not adsorbed is discharged from the top of the tower. After the pressure of the adsorbed methane is reduced, it is desorbed and released from the adsorbent and stored in a methane gas storage tank (11). According to the flow rate and pressure control, it is transported to the vapor deposition furnace (1) for reuse.

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