A PVD coating device with self-cooling of the upper cavity

Abstract

The present invention relates to the field of PVD coating technology, specifically to a PVD coating device with self-cooling of the upper cavity, comprising a coating main cavity and a feed port opened in the right side of the coating main cavity; an upper cavity assembly is arranged above the coating main cavity, and a connecting plate is installed above the upper cavity assembly; a support frame is installed on the left side of the coating main cavity, and a magnet assembly is arranged below the water storage cavity; a circulation control assembly is installed inside the water storage cavity; a lifting and adjusting rod is installed through the bottom surface of the coating main cavity, and a placement plate is installed above the lifting and adjusting rod. The PVD coating device with self-cooling of the upper cavity can automatically open and close the water inlet and outlet according to the working state, which is convenient for automatically replacing the cooling water, so that the PVD coating device can automatically cool down, improve the cooling quality and efficiency, and increase the service life of the magnet assembly and the upper cavity assembly, so that the entire PVD coating device can perform magnetron sputtering work well.

Description

Technical Field

[0001] The invention relates to the technical field of PVD coating, in particular to a PVD coating device with a self-cooling upper cavity. Background Art

[0002] PVD coating equipment uses electric field acceleration in a vacuum environment to perform sputtering coating on the workpiece; the coated film layer has higher hardness and higher wear resistance, so the service life of the workpiece can be increased through the film layer, and it is particularly important to coat the workpiece through PVD coating equipment;

[0003] The patent name disclosed in the prior art with application number "CN202110985070.7" is "a PVD coating device". The cavity is a sealed reaction chamber for providing physical vapor deposition. The cavity is also provided with a ventilation pipe, an exhaust pipe and a vacuum gauge. The reaction gas related to the deposition coating is input from the ventilation pipe. In order to control the conveying speed and input amount of the reaction gas, it is preferably controlled by a flow meter, but not limited to this. The reaction gas after the reaction and the by-products generated in the reaction are discharged from the outlet pipe. In order to control the pressure in the cavity, a regulating valve is also required on the exhaust pipe. The exhaust speed is controlled by the regulating valve. The vacuum gauge is used to monitor the pressure in the cavity. In addition, the number and distribution of the ventilation pipe, the outlet pipe and the vacuum gauge are not excessively restricted here. The sputtering unit includes a magnetron assembly and a target material fixing device. The target material fixing device is located on the inner wall of the top of the cavity for carrying the target material; the magnetron assembly is located above the target material fixing device, and a magnetron sputtering method is used to perform PVD coating on the back of the wafer;

[0004] The patent name disclosed in the prior art with application number "CN202410016564.8" is "A PVD magnetron sputtering coating device". The cavity is a sealed reaction chamber for providing physical vapor deposition, and an air inlet and a vacuum gauge are provided on the side wall, and an exhaust port is provided on the bottom wall. The sputtering part is located at the upper part of the cavity, and includes a sputtering target, a magnetron assembly, a magnetron and a magnetron rotating mechanism. The sputtering target is located on the inner top wall of the cavity, and the magnetron assembly is located above the top of the cavity. A cooling water inlet is provided on the top of the cavity. The magnetron is installed in the magnetron assembly. The magnetron rotating mechanism is located above the magnetron assembly and has a rotating transmission shaft. The rotating transmission shaft extends into the magnetron assembly and is connected to the magnetron. The bearing and heating part is located in the cavity and below the sputtering target, and includes a heating plate and a heating plate lifting drive unit.

[0005] When the two PVD coating devices mentioned above are in use, the magnetron is driven to rotate by the magnetron rotating mechanism. During the use of the magnetron, there is energy conversion, so a large amount of heat is generated. The two PVD coating devices mentioned above cannot cool down the magnetron in time during use, which will affect the service life of the magnetron, and then affect the magnetron sputtering work of the magnetron, thereby affecting the use of the entire PVD coating device;

[0006] Therefore, we proposed a PVD coating equipment with self-cooling of the upper cavity to solve the above problems. Summary of the invention

[0007] The object of the present invention is to provide a PVD coating device with self-cooling of the upper cavity, so as to solve the problem raised in the above background technology that there is energy conversion during the use of magnetrons on the market, thereby generating a large amount of heat, and the two PVD coating devices mentioned above cannot cool down the magnetrons in time during use, which will affect the service life of the magnetrons, and then affect the magnetron sputtering work of the magnetrons, thereby affecting the use of the entire PVD coating device.

[0008] To achieve the above object, the present invention provides the following technical solution: a PVD coating device with self-cooling of the upper cavity, comprising a coating main cavity, and a feed port opened in the right side of the coating main cavity;

[0009] An upper cavity assembly is arranged above the coating main cavity, and a connecting plate is installed above the upper cavity assembly;

[0010] Also includes:

[0011] A support frame is installed on the left side of the coating main cavity, and a flip cover control mechanism is installed on the outer side of the support frame;

[0012] A water storage cavity is provided inside the upper cavity assembly, and an opening-shaped structure is provided above the water storage cavity;

[0013] A magnet assembly is placed in the water storage cavity;

[0014] A vertical rod is installed through the interior of the upper cavity assembly and the connecting plate, and the lower end of the vertical rod is connected to the magnet assembly;

[0015] A target body is mounted on the lower surface of the upper cavity assembly;

[0016] A connecting pipe is connected to the upper left side of the connecting plate, and a drain pipe and a water inlet pipe are installed on the left side of the connecting pipe;

[0017] A circulation regulating component is installed on the bearing plate inside the water storage cavity, and the circulation regulating component is arranged above the magnet component;

[0018] A lifting and lowering adjustment rod is installed through the bottom surface of the coating main cavity, and a placement plate is installed above the lifting and lowering adjustment rod.

[0019] Preferably, a water inlet hole and a water outlet hole are provided inside the left side surface of the connecting plate, and a water storage cavity is connected below the water inlet hole and the water outlet hole;

[0020] A water inlet pipe is arranged at the front side of the drain pipe, the water inlet pipe is arranged corresponding to the water inlet hole, and the drain pipe is arranged corresponding to the water outlet hole.

[0021] Preferably, a flip frame is symmetrically mounted on the upper surface of the connecting plate, the bottom of the flip frame is connected to the support frame via a rotating shaft, and one end of the flip control mechanism is connected to the outer side of the middle position of the flip frame.

[0022] Preferably, an exhaust port is installed inside the left side of the coating main cavity.

[0023] Preferably, a regulating rod is slidably connected inside the circulation regulating component, a connecting spring is nested and connected outside one end of the regulating rod, a first piston is installed on the other end of the regulating rod, and the outer side of the first piston is fitted and slidably connected with the inside of the circulation regulating component;

[0024] The interior of the circulation regulating component is a hollow structure, and argon gas is injected into the space between the first piston and the circulation regulating component;

[0025] The regulating rod is arranged in a "T" shape, and the outer ends of the regulating rod are respectively installed with a first cover plate and a second cover plate, a water outlet is arranged on the top of the first cover plate, and the second cover plate and the water inlet are staggered.

[0026] Preferably, the flip cover control mechanism is an electric telescopic rod, a circle of stirring rods are evenly installed on the outside of the vertical rod, the stirring rods are arranged in the water storage chamber, a circulation regulation component is arranged on the outside of the stirring rods, and a magnet component is arranged below the stirring rods.

[0027] Preferably, a main sector gear is installed on the outer side of the vertical rod;

[0028] A single-rotation reciprocating screw rod and a transmission rod are installed above the connecting plate, and a transmission rod is arranged on the left side of the single-rotation reciprocating screw rod;

[0029] A transmission gear and a slave sector gear are installed on the outer side of the transmission rod, and a slave sector gear is arranged above the transmission gear;

[0030] A connecting gear is installed on the outer side of the single-rotation reciprocating screw rod;

[0031] The outer side of the main sector gear is intermittently meshed with a transmission gear, and the outer side of the slave sector gear is intermittently meshed with a connecting gear;

[0032] The diameter of the main sector gear is smaller than the diameter of the transmission gear, and the diameter of the slave sector gear is larger than the diameter of the connecting gear.

[0033] Preferably, a rear water storage pipe and a front water storage pipe are installed through the upper surface of the connecting plate, and the rear water storage pipe and the front water storage pipe are symmetrically arranged about the single-rotation reciprocating screw rod;

[0034] The bottom surfaces of the rear water storage pipe and the front water storage pipe are both hollow structures, and the internal spaces of the rear water storage pipe and the front water storage pipe are connected with the space inside the water storage cavity.

[0035] Preferably, a rear push rod is provided inside the rear water storage pipe, a front push rod is provided inside the front water storage pipe, and second pistons are installed at the bottom ends of the rear push rod and the front push rod, and the height positions of the two second pistons are not on the same plane;

[0036] The outer side surface of the second piston is arranged in close contact with the inner walls of the rear water storage pipe and the front water storage pipe;

[0037] One end of the rear push rod and the front push rod are both threadedly connected to the single-rotation reciprocating screw rod. The rear push rod is arranged in a "Z" shape, and the front push rod is arranged in an inverted "L" shape. The movement directions of the rear push rod and the front push rod are opposite.

[0038] Preferably, a motor is installed on the upper surface of the connecting plate, and the output end of the motor is connected to the outer side of the vertical rod through a sprocket assembly;

[0039] Stirring plates are installed at equal intervals on the upper outer side of the vertical rod, and the lowest point of the stirring plate is higher than the highest point of the fan-shaped gear;

[0040] The main sector gear is disposed at a position between the agitator plate and the sprocket assembly.

[0041] Compared with the prior art, the beneficial effects of the present invention are as follows: the PVD coating equipment with self-cooling of the upper cavity can automatically open and close the water inlet and outlet according to the working state, which is convenient for automatically replacing the cooling water, so that the PVD coating equipment can automatically cool down, improve the cooling quality and efficiency, and increase the service life of the magnet assembly and the upper cavity assembly, so that the entire PVD coating equipment can perform magnetron sputtering work well. The specific contents are as follows:

[0042] (1) The water storage chamber opened on the upper surface of the upper cavity assembly can store cooling water, so that the cooling water in the water storage chamber can cool down the heat generated by the magnet assembly installed in the water storage chamber in the upper cavity assembly, thereby ensuring that the magnet assembly installed in the upper cavity assembly can be used well, thereby increasing the service life of the magnet assembly and the upper cavity assembly, and facilitating the entire PVD coating equipment to perform magnetron sputtering well. At the same time, by circulating the water in the water storage chamber, the heat on the target body can be driven, facilitating the good use of the target body;

[0043] Furthermore, the cooling water with rising temperature heats the surface of the circulating control component, causing the argon gas inside the circulating control component to expand when it encounters heat. At this time, the first piston pushes the control rod to move outward, and the control rod drives the first cover plate to separate from the water outlet. The control rod drives the second cover plate to move to just below the water inlet, so that the second cover plate seals and covers the water inlet. At this time, the water in the water storage chamber can be pumped out through the drain pipe, and the argon gas shrinks when it encounters cold after replacing new cooling water with lower temperature. As shown above, the first cover plate and the second cover plate move in opposite directions and reset. Therefore, the PVD coating equipment can automatically open and close the water inlet and the water outlet according to the working state, which is convenient for automatically replacing the cooling water, so that the PVD coating equipment can automatically cool down, thereby improving the cooling quality and efficiency.

[0044] The water in the water storage chamber is pumped into the front water storage pipe and the rear water storage pipe in an intermittent reciprocating manner for storage for a period of time, so that the water can dissipate heat and cool down in the front water storage pipe and the rear water storage pipe, and then return to the water storage chamber for use. This repeated operation can dissipate heat and cool down the water in the water storage chamber, thereby extending the use time of the water in the water storage chamber and reducing the frequency of changing the water in the water storage chamber.

[0045] The main sector gear on the outside of the vertical rod intermittently drives the transmission gear to rotate, and the transmission gear intermittently drives the transmission rod to rotate, so that the transmission rod cooperates with the intermittent driving of the connecting gear and the single-rotation reciprocating screw by the sector gear to intermittently rotate, not only can the single-rotation reciprocating screw be driven to rotate without using an additional power source, but the single-rotation reciprocating screw can also be rotated to drive the front push rod to descend and the rear push rod to rise, so that the water in the front water storage pipe enters the water storage cavity, and the water in the water storage cavity enters the rear water storage pipe for heat dissipation and cooling, which is convenient for repeated use next time and easy to operate;

[0046] The rotation of the vertical rod drives the stirring plate to rotate, so that the stirring plate can not only generate a certain amount of air around the front water storage pipe and the rear water storage pipe, but also stir the air in the front water storage pipe and the rear water storage pipe, thereby increasing the flow rate of the air around the front water storage pipe and the rear water storage pipe, and facilitating the heat dissipation and cooling of the water in the front water storage pipe and the rear water storage pipe, both of which are made of copper;

[0047] A one-way valve is installed in the water inlet pipe, so that the cooling water in the water storage chamber cannot be discharged through the water inlet pipe, so that the cooling water in the water storage chamber can perform cooling work well;

[0048] The stirring rod is driven to rotate by the vertical rod, so that the stirring rod can stir the water in the water storage chamber, which makes the heat of the water in the water storage chamber uniform, so that the water in the water storage chamber can evenly perform self-cooling operation on the upper cavity component. BRIEF DESCRIPTION OF THE DRAWINGS

[0049] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention;

[0050] Figure 2 This is a schematic diagram of the main cavity for coating of the present invention when viewed from above;

[0051] Figure 3 This is a schematic diagram of the three-dimensional structure of the upper cavity assembly after rotation of the present invention;

[0052] Figure 4 It is a schematic diagram of the three-dimensional structure of the flip cover control mechanism of the present invention;

[0053] Figure 5 This is a schematic diagram of the three-dimensional structure of the connecting plate of the present invention;

[0054] Figure 6 It is a schematic diagram of the three-dimensional structure of the drainage pipe of the present invention;

[0055] Figure 7 This is a schematic diagram of the cross-sectional structure of the connecting plate of the present invention;

[0056] Figure 8 It is a schematic diagram of the separation structure of the upper cavity assembly and the target body of the present invention;

[0057] Fig. 9 It is a schematic diagram of the separation structure of the upper cavity assembly and the connecting plate of the present invention;

[0058] Fig.10 This is a bottom view of the structure of the connecting plate of the present invention;

[0059] Fig.11 This is a schematic cross-sectional view of the circulation control component of the present invention;

[0060] Fig.12 This is a schematic diagram of the cross-sectional structure of the front water storage pipe of the present invention;

[0061] Fig.13 This is a schematic diagram of the separation structure of the connecting plate and the connecting pipe of the present invention;

[0062] Fig.14 It is a schematic diagram of the three-dimensional structure of the rear push rod of the present invention.

[0063] In the figure: 1, coating main cavity; 2, feed port; 3, upper cavity assembly; 301, water storage cavity; 4, connecting plate; 41, water inlet; 42, water outlet; 5, motor; 6, vertical rod; 61, sprocket assembly; 62, stirring rod; 63, stirring plate; 64, main sector gear; 7, flip frame; 8, drain pipe; 9, water inlet pipe; 10, rotating shaft; 11, support frame; 12, flip cover control mechanism; 13, lifting adjustment rod; 131, placement plate; 14, air extraction port; 1 5. Target body; 16. Magnet assembly; 17. Circulation control assembly; 171. Control rod; 172. Connecting spring; 173. First cover plate; 174. Second cover plate; 175. First piston; 18. Single-rotation reciprocating screw; 181. Connecting gear; 19. Rear water storage pipe; 191. Rear push rod; 20. Front water storage pipe; 201. Front push rod; 21. Transmission rod; 211. Transmission gear; 212. Slave fan gear; 22. Connecting pipe; 23. Second piston. DETAILED DESCRIPTION

[0064] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0065] See also Figure 1-Figure 14 , the present invention provides the following technical solutions:

[0066] Embodiment 1: The PVD coating equipment in this embodiment can not only perform self-cooling treatment on the upper cavity assembly 3, but also automatically replace the cooling water, thereby increasing the service life of the magnet assembly 16 and the upper cavity assembly 3, and facilitating the entire PVD coating equipment to perform magnetron sputtering work well. For details, refer to the attached Figure 1-Figure 11As shown, a coating main cavity 1 and a feed port 2 opened on the right side of the coating main cavity 1, an upper cavity assembly 3 is arranged above the coating main cavity 1, and a connecting plate 4 is installed above the upper cavity assembly 3; a support frame 11 is installed on the left side of the coating main cavity 1, and a flip control mechanism 12 is installed on the outer side of the support frame 11; a water storage cavity 301 is opened inside the upper cavity assembly 3, and the upper part of the water storage cavity 301 is arranged in an open structure; a magnet assembly 16 is placed in the water storage cavity 301; vertical rods 6 are installed through the interiors of the upper cavity assembly 3 and the connecting plate 4, and the lower ends of the vertical rods 6 are connected to the magnet assembly 16; a target body 15 is installed on the lower surface of the upper cavity assembly 3; a connecting pipe 22 is connected to the upper left side of the connecting plate 4, and a drain pipe 8 and a water inlet pipe 9 are installed on the left side of the connecting pipe 22; a circulation control assembly 17 is installed on the bearing plate inside the water storage cavity 301, and the circulation control assembly 17 is arranged above the magnet assembly 16;

[0067] A lifting and adjusting rod 13 is installed through the bottom surface of the coating main cavity 1, and a placement plate 131 is installed above the lifting and adjusting rod 13. A water inlet hole 41 and a water outlet hole 42 are opened inside the left side surface of the connecting plate 4, and the water storage cavity 301 is connected below the water inlet hole 41 and the water outlet hole 42; a water inlet pipe 9 is arranged on the front side of the drain pipe 8, and the water inlet pipe 9 is arranged corresponding to the water inlet hole 41, and the drain pipe 8 is arranged corresponding to the water outlet hole 42. A flip frame 7 is symmetrically installed on the upper surface of the connecting plate 4, and the bottom of the flip frame 7 is connected to the support frame 11 through a rotating shaft 10, and one end of the flip cover control mechanism 12 is connected to the outside of the middle position of the flip frame 7. An air suction port 14 is installed inside the left side of the coating main cavity 1. The circulation regulating component 17 is slidably connected with a regulating rod 171, and a connecting spring 172 is nested and connected to the outside of one end of the regulating rod 171. A first piston 175 is installed at the other end of the regulating rod 171, and the outside of the first piston 175 is fitted and slidably connected with the inside of the circulation regulating component 17; the inside of the circulation regulating component 17 is a hollow structure, and argon gas is injected into the space between the first piston 175 and the circulation regulating component 17;

[0068] The regulating rod 171 is arranged in a "T" shape, and the outer ends of the regulating rod 171 are respectively installed with a first cover plate 173 and a second cover plate 174, the upper part of the first cover plate 173 is fitted with a water outlet 42, and the second cover plate 174 is staggered with the water inlet 41. The flip cover control mechanism 12 is an electric telescopic rod, and a circle of stirring rods 62 are evenly spaced on the outer side of the vertical rod 6, and the stirring rods 62 are arranged in the water storage chamber 301. The outer side of the stirring rod 62 is provided with a circulation regulating assembly 17, and the lower part of the stirring rod 62 is provided with a magnet assembly 16. A main sector gear 64 is installed on the outer side of the vertical rod 6; a single-rotation reciprocating screw rod 18 and a transmission rod 21 are installed above the connecting plate 4, and the transmission rod 21 is arranged on the left side of the single-rotation reciprocating screw rod 18; a transmission gear 211 and a slave sector gear 212 are installed on the outer side of the transmission rod 21, and a slave sector gear 212 is arranged above the transmission gear 211; a connecting gear 181 is installed on the outer side of the single-rotation reciprocating screw rod 18; the outer side of the main sector gear 64 is intermittently meshed with the transmission gear 211, and the outer side of the slave sector gear 212 is intermittently meshed with the connecting gear 181; the diameter of the main sector gear 64 is smaller than the diameter of the transmission gear 211, and the diameter of the slave sector gear 212 is larger than the diameter of the connecting gear 181;

[0069] First, move the entire PVD coating equipment into the working area, connect the air exhaust port 14 to the external gate valve, connect the gate valve to the external cold pump, connect the bottom end of the lifting and adjusting rod 13 to the lifting control mechanism, and then the lifting and adjusting mechanism drives the lifting and adjusting rod 13 and the placement plate 131 to rise, so as to adjust the height position of the placement plate 131, and then the substrate is transported to the coating main cavity 1 through the feed port 2 through the external feeding mechanism, so that the substrate is placed on the placement plate 131, and then the PVD coating equipment is started, and the output end below the motor 5 drives the vertical rod 6 to rotate through the sprocket assembly 61, and the bottom of the vertical rod 6 drives The magnet assembly 16 rotates, and argon gas is injected into the coating main chamber 1. At this time, the gate valve is opened, so that the cold pump extracts the gas in the coating main chamber 1 through the exhaust port 14, so that the coating main chamber 1 is in a vacuum state. At this time, the rotating magnet assembly 16 generates a magnetic field, and then the magnetic field drives the argon gas inside the coating main chamber 1 to generate ions to bombard the target body 15. The atoms in the target body 15 are separated from the surface by the kinetic energy of the ion bombardment and fly in different directions, so that the sputtered atoms fall on the surface of the substrate for deposition, thereby enabling the PVD coating equipment to perform magnetron sputtering coating operations on the substrate well;

[0070] After a period of coating, the magnet assembly 16 rotates and generates a lot of heat. At this time, the water inlet pipe 9 is connected to the external water supply mechanism, and then the external cooling water enters the connecting pipe 22 through the water inlet pipe 9 with a one-way valve installed inside, and then enters the water storage chamber 301 from the connecting pipe 22. At this time, the first cover plate 173 covers the water outlet 42, so the water in the water storage chamber 301 will not flow into the drain pipe 8. Then the cooling water in the water storage chamber 301 can cool the upper cavity assembly 3 and the magnet assembly 16 well.

[0071] At the same time, the vertical rod 6 drives a circle of stirring rods 62 arranged at equal intervals on the outside to rotate. At this time, the stirring rods 62 rotate to stir the cooling water inside the water storage chamber 301, so that the temperature of the cooling water at each position in the water storage chamber 301 is uniform, and then the cooling water in the water storage chamber 301 is well self-cooled;

[0072] When the cooling water in the water storage chamber 301 is used for a period of time and its temperature rises, the surrounding higher temperature cooling water heats the surface of the first piston 175, so that the argon gas in the first piston 175 is heated and expands in volume. At this time, the expanded argon gas automatically pushes the first piston 175 to move outward, and the first piston 175 drives the control rod 171, the first cover plate 173 and the second cover plate 174 to move outward. At this time, the first cover plate 173 moves to a position separated from the water outlet 42, and the second cover plate 174 moves to the water inlet 4 1, the second cover plate 174 covers and seals the water inlet hole 41 (the water is in a temporary flowing state in the water storage chamber 301 at this time, so it will not cause too much pressure on the movement of the first piston 175, and then the argon gas expands in volume after being heated and drives the first piston 175 to move well). At this time, the external pumping mechanism can discharge the high-temperature cooling water in the water storage chamber 301 through the water outlet hole 42 through the drain pipe 8, and then the high-temperature cooling water in the water storage chamber 301 is discharged, and the circulation control The heat on the surface of the component 17 is taken away. At this time, the temperature of the surface of the circulating control component 17 is lower than the previous temperature. Therefore, the argon gas in the circulating control component 17 is cooled and its volume shrinks. At the same time, the regulating rod 171 is automatically driven to move inward with the stored force of the connecting spring 172. At this time, the first cover plate 173 moves to a position overlapping with the water outlet 42, and the second cover plate 174 moves to a position separated from the water inlet 41. As shown above, in the same way, the external water supply mechanism then passes the lower temperature cooling water through the water inlet pipe 9. The water is transported to the water storage chamber 301 through the water inlet hole 41 for reuse, so the PVD coating equipment can automatically open and close the water inlet hole 41 and the water outlet hole 42 according to the working state, which is convenient for automatically replacing the cooling water, so that the PVD coating equipment can automatically cool down, improving the quality and efficiency of cooling (rubber pads can be installed on the outer sides of the first cover plate 173 and the second cover plate 174, so as to improve the sealing performance of the first cover plate 173 and the second cover plate 174 when in use, and improve the sealing performance when the water inlet hole 41 and the water outlet hole 42 are closed);

[0073] After the coating is completed, the cover flipping control mechanism 12 is started, and the cover flipping control mechanism 12 drives the flipping frame 7 to flip around the center of the rotating shaft 10, so that the flipping frame 7 drives the upper cavity assembly 3 and the connecting plate 4 to flip, as shown in the attached figure. Figure 3-Figure 4 As shown, the substrate in the coating main cavity 1 can then be discharged from the feed port 2 with the help of external tools;

[0074] Embodiment 2: The PVD coating equipment in this embodiment can assist in cooling the cooling water on the basis of Embodiment 1, which not only improves the cooling effect of the cooling water, but also prolongs the use time of the cooling water. Figure 1 , Figure 13-Figure 14As shown, the bottom surfaces of the rear water storage pipe 19 and the front water storage pipe 20 are both hollow structures, and the internal spaces of the rear water storage pipe 19 and the front water storage pipe 20 are connected to the space inside the water storage chamber 301. A rear push rod 191 is provided inside the rear water storage pipe 19, and a front push rod 201 is provided inside the front water storage pipe 20. The bottom ends of the rear push rod 191 and the front push rod 201 are both installed with second pistons 23, and the height positions of the two second pistons 23 are not on the same plane; the outer side surface of the second piston 23 is arranged in contact with the inner wall of the rear water storage pipe 19 and the front water storage pipe 20; one end of the rear push rod 191 and the front push rod 201 are both threadedly connected to the single-rotation reciprocating screw 18, the rear push rod 191 is arranged in a "Z"-shaped structure, and the front push rod 201 is arranged in an inverted "L"-shaped structure, and the movement directions of the rear push rod 191 and the front push rod 201 are opposite. A motor 5 is installed on the upper surface of the connecting plate 4, and the output end of the motor 5 is connected to the outer side of the vertical rod 6 through a sprocket assembly 61; a rear water storage pipe 19 and a front water storage pipe 20 are installed through the upper surface of the connecting plate 4, and the rear water storage pipe 19 and the front water storage pipe 20 are symmetrically arranged about the single-rotation reciprocating screw 18;

[0075] When a certain amount of cooling water is injected into the water storage chamber 301, a part of the cooling water in the water storage chamber 301 will flow into the front water storage pipe 20, and then when the vertical rod 6 rotates, it drives the main sector gear 64 to rotate. When the main sector gear 64 rotates to mesh with the transmission gear 211, it drives the transmission gear 211 to rotate, and the transmission gear 211 drives the transmission rod 21 to rotate. When the main sector gear 64 rotates to disengage with the transmission gear 211, the transmission gear 211 stops rotating. Therefore, when the main sector gear 64 rotates continuously, the transmission rod 21 rotates intermittently, and then the transmission rod 21 drives the slave sector gear 212 to rotate intermittently. When the slave sector gear 212 rotates intermittently, When the fan gear 212 rotates intermittently to mesh with the connecting gear 181, the connecting gear 181 is driven to rotate by the fan gear 212. When the fan gear 212 rotates intermittently to disengage with the connecting gear 181, the connecting gear 181 does not rotate, so that the connecting gear 181 drives the single-rotation reciprocating screw 18 to rotate intermittently in a reduced speed. When the single-rotation reciprocating screw 18 rotates, it drives the front push rod 201 to move downward. At this time, the front push rod 201 drives the second piston 23 at the bottom to move downward in the front water storage pipe 20, thereby pushing the water with a lower temperature in the front water storage pipe 20 into the water storage chamber 301. At the same time, when the single-rotation reciprocating screw 18 rotates, it drives the rear push rod 191 to move upward. At this time, the rear push rod 201 The moving rod 191 drives the second piston 23 in the rear water storage pipe 19 to move upward, so that a part of the water with higher temperature in the water storage chamber 301 is sucked into the rear water storage pipe 19, and then the heat of the water in the copper rear water storage pipe 19 diffuses outward to cool down. After a period of time, the temperature of the water in the rear water storage pipe 19 decreases, and then the single-rotation reciprocating screw 18 continues to rotate, as shown above. Similarly, at this time, the single-rotation reciprocating screw 18 rotates to drive the front push rod 201 to move upward, and the front push rod 201 drives the second piston 23 in the front water storage pipe 20 to move upward, so that a part of the water in the water storage chamber 301 is sucked into the front water storage pipe 20, and the single-rotation reciprocating screw 18 continues to rotate to drive the rear push rod 1 91 moves downward, so that the water with lower temperature in the rear water storage pipe 19 is pushed into the water storage chamber 301 for mixing. The water in the water storage chamber 301 is repeatedly pumped alternately through the rear water storage pipe 19 and the front water storage pipe 20, which can help to dissipate heat and cool the water in the water storage chamber 301. Therefore, the water in the water storage chamber 301 circulates, which facilitates the water in the water storage chamber 301 to cool the magnet assembly 16 and the target body 15, thereby increasing the use time of the water in the water storage chamber 301, reducing the frequency of changing the water in the water storage chamber 301, and making full use of the water, so that the water completely takes away the heat for circulation, thereby avoiding the waste of water resources.

[0076] Embodiment 3: The PVD coating device in this embodiment can further improve the heat dissipation and cooling effect of the water in the water storage chamber 301 on the basis of the embodiment 2, and has the advantages of referring to the attached Figure 12-13 As shown, stirring plates 63 are installed at equal intervals on the upper outer side of the vertical rod 6, and the lowest point of the stirring plate 63 is higher than the highest point of the slave sector gear 212; the main sector gear 64 is arranged at a position between the stirring plate 63 and the sprocket assembly 61, and when the vertical rod 6 rotates, the stirring plate 63 is driven to rotate. At this time, when the three groups of stirring plates 63 rotate, a certain amount of wind will be generated to blow the surface of the rear water storage pipe 19 and the front water storage pipe 20. At the same time, when the three groups of stirring plates 63 rotate, the air around the rear water storage pipe 19 and the front water storage pipe 20 will be stirred, thereby improving the flow rate of the air around the rear water storage pipe 19 and the front water storage pipe 20, so as to improve the efficiency of water heat dissipation and cooling in the rear water storage pipe 19 and the front water storage pipe 20, and facilitate the cooling of the cooling water in the water storage chamber 301, thereby completing a series of tasks.

[0077] Although the present invention has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments, or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A PVD coating device with self-cooling of the upper cavity, comprising a coating main cavity (1), and a feed inlet (2) opened in the right side of the coating main cavity (1); An upper cavity assembly (3) is arranged above the coating main cavity (1), and a connecting plate (4) is installed above the upper cavity assembly (3); It is characterized in that Also includes: A support frame (11) is installed on the left side of the coating main cavity (1), and a flip cover control mechanism (12) is installed on the outer side of the support frame (11); The upper cavity assembly (3) has a water storage cavity (301) formed inside, and an opening-shaped structure is arranged above the water storage cavity (301); A magnet assembly (16) is placed in the water storage chamber (301); A vertical rod (6) is installed through the interior of the upper cavity assembly (3) and the connecting plate (4), and the lower end of the vertical rod (6) is connected to the magnet assembly (16); A target body (15) is mounted on the lower surface of the upper cavity assembly (3); A connecting pipe (22) is connected to the upper left side of the connecting plate (4), and a drain pipe (8) and a water inlet pipe (9) are installed on the left side of the connecting pipe (22); A circulation control component (17) is installed on the bearing plate inside the water storage chamber (301), and the circulation control component (17) is arranged above the magnet component (16); A lifting and lowering adjustment rod (13) is installed through the bottom surface of the coating main cavity (1), and a placement plate (131) is installed above the lifting and lowering adjustment rod (13); A water inlet hole (41) and a water outlet hole (42) are provided inside the left side surface of the connecting plate (4), and a water storage chamber (301) is connected below the water inlet hole (41) and the water outlet hole (42); A water inlet pipe (9) is arranged at the front side of the drainage pipe (8), the water inlet pipe (9) is arranged correspondingly to the water inlet hole (41), and the drainage pipe (8) is arranged correspondingly to the water outlet hole (42); The circulation regulating component (17) is slidably connected to a regulating rod (171) inside, one end of the regulating rod (171) is nested and connected to the outside of a connecting spring (172), the other end of the regulating rod (171) is mounted with a first piston (175), and the outside of the first piston (175) is slidably connected to the inside of the circulation regulating component (17); The interior of the circulation regulating component (17) is a hollow structure, and argon gas is injected into the space between the first piston (175) and the circulation regulating component (17); The regulating rod (171) is arranged in a "T"-shaped structure, and the outer ends of the regulating rod (171) are respectively mounted with a first cover plate (173) and a second cover plate (174), a water outlet hole (42) is arranged in close contact with the upper portion of the first cover plate (173), and the second cover plate (174) and the water inlet hole (41) are arranged in an offset manner.

2. The PVD coating equipment with self-cooling of the upper cavity according to claim 1, characterized in that: A flip frame (7) is symmetrically mounted on the upper surface of the connecting plate (4); the bottom of the flip frame (7) is connected to a support frame (11) via a rotating shaft (10); and one end of a flip control mechanism (12) is connected to the outer side of the middle portion of the flip frame (7).

3. The PVD coating equipment with self-cooling of the upper cavity according to claim 1, characterized in that: An air extraction port (14) is installed inside the left side of the coating main cavity (1).

4. The PVD coating equipment with self-cooling of the upper cavity according to claim 1, characterized in that: The flip cover control mechanism (12) is an electric telescopic rod, a circle of stirring rods (62) are installed at equal intervals on the outside of the vertical rod (6), the stirring rods (62) are arranged in the water storage chamber (301), a circulation control component (17) is arranged on the outside of the stirring rod (62), and a magnet component (16) is arranged below the stirring rod (62).

5. The PVD coating equipment with self-cooling of the upper cavity according to claim 1, characterized in that: A main sector gear (64) is mounted on the outer side of the vertical rod (6); A single-rotation reciprocating screw rod (18) and a transmission rod (21) are mounted above the connecting plate (4), and a transmission rod (21) is arranged on the left side of the single-rotation reciprocating screw rod (18); A transmission gear (211) and a secondary sector gear (212) are mounted on the outer side of the transmission rod (21), and a secondary sector gear (212) is arranged above the transmission gear (211); A connecting gear (181) is installed on the outer side of the single-rotation reciprocating screw rod (18); The outer side of the main sector gear (64) is intermittently meshed with a transmission gear (211), and the outer side of the slave sector gear (212) is intermittently meshed with a connection gear (181); The diameter of the main sector gear (64) is smaller than the diameter of the transmission gear (211), and the diameter of the slave sector gear (212) is larger than the diameter of the connection gear (181).

6. The PVD coating equipment with self-cooling of the upper cavity according to claim 5, characterized in that: A rear water storage pipe (19) and a front water storage pipe (20) are installed through the upper surface of the connecting plate (4), and the rear water storage pipe (19) and the front water storage pipe (20) are symmetrically arranged with respect to the single-rotation reciprocating screw (18); The interior of the bottom surfaces of the rear water storage pipe (19) and the front water storage pipe (20) are both hollow structures, and the interior spaces of the rear water storage pipe (19) and the front water storage pipe (20) are connected to the interior space of the water storage cavity (301).

7. The PVD coating equipment with self-cooling of the upper cavity according to claim 6, characterized in that: A rear push rod (191) is provided inside the rear water storage pipe (19), and a front push rod (201) is provided inside the front water storage pipe (20). Second pistons (23) are installed at the bottom ends of the rear push rod (191) and the front push rod (201), and the height positions of the two second pistons (23) are not on the same plane. The outer side surface of the second piston (23) is arranged to fit the inner walls of the rear water storage pipe (19) and the front water storage pipe (20); One end of the rear push rod (191) and the front push rod (201) are both threadedly connected to the single-rotation reciprocating screw rod (18); the rear push rod (191) is arranged in a "Z"-shaped structure, and the front push rod (201) is arranged in an inverted "L"-shaped structure; the rear push rod (191) and the front push rod (201) move in opposite directions.

8. The PVD coating equipment with self-cooling of the upper cavity according to claim 1, characterized in that: A motor (5) is mounted on the upper surface of the connecting plate (4), and an output end of the motor (5) is connected to the outer side of the vertical rod (6) via a sprocket assembly (61); Stirring plates (63) are installed at equal intervals on the upper outer side of the vertical rod (6), and the lowest point of the stirring plate (63) is higher than the highest point of the fan-shaped gear (212); The main sector gear (64) is disposed at a position between the stirring plate (63) and the sprocket assembly (61).

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